WO1999031419A1 - Diaphragm valve for a fluid circuit - Google Patents
Diaphragm valve for a fluid circuit Download PDFInfo
- Publication number
- WO1999031419A1 WO1999031419A1 PCT/US1998/025648 US9825648W WO9931419A1 WO 1999031419 A1 WO1999031419 A1 WO 1999031419A1 US 9825648 W US9825648 W US 9825648W WO 9931419 A1 WO9931419 A1 WO 9931419A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fluid
- dome
- invention defined
- valve
- passageways
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C3/00—Circuit elements having moving parts
- F15C3/04—Circuit elements having moving parts using diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87571—Multiple inlet with single outlet
- Y10T137/87676—With flow control
- Y10T137/87684—Valve in each inlet
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000539286A JP4216470B2 (en) | 1997-12-15 | 1998-12-03 | Diaphragm valve for fluid circuit |
DE1998613280 DE69813280T2 (en) | 1997-12-15 | 1998-12-03 | DIAPHRAGM VALVE FOR LIQUID CIRCUIT |
EP98960690A EP1030989B1 (en) | 1997-12-15 | 1998-12-03 | Diaphragm valve for a fluid circuit |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/990,861 US6007046A (en) | 1997-12-15 | 1997-12-15 | Fluid transport circuit and valve structure therefor |
US08/990,861 | 1997-12-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999031419A1 true WO1999031419A1 (en) | 1999-06-24 |
Family
ID=25536593
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1998/025648 WO1999031419A1 (en) | 1997-12-15 | 1998-12-03 | Diaphragm valve for a fluid circuit |
Country Status (5)
Country | Link |
---|---|
US (1) | US6007046A (en) |
EP (1) | EP1030989B1 (en) |
JP (1) | JP4216470B2 (en) |
DE (1) | DE69813280T2 (en) |
WO (1) | WO1999031419A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102483173A (en) * | 2009-08-31 | 2012-05-30 | 株式会社富士金 | Fluid controller |
US10100939B2 (en) | 2013-12-06 | 2018-10-16 | The University Of Tokyo | Valve, fluid control structure, fluid device and method of manufacturing valve |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6394417B1 (en) | 1998-10-09 | 2002-05-28 | Swagelok Co. | Sanitary diaphragm valve |
US6883780B2 (en) * | 1998-10-09 | 2005-04-26 | Swagelok Company | Sanitary diaphragm valve |
US6309541B1 (en) | 1999-10-29 | 2001-10-30 | Ontogen Corporation | Apparatus and method for multiple channel high throughput purification |
US6358414B1 (en) | 1999-10-29 | 2002-03-19 | Ontogen Corporation | Pressure regulation apparatus and method for multiple channel high throughput purification |
US20020127146A1 (en) * | 2001-03-07 | 2002-09-12 | Symyx Technologies, Inc. | Gas chromatograph injection valve |
WO2002070932A2 (en) | 2001-03-07 | 2002-09-12 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Microvalve |
US6637476B2 (en) | 2002-04-01 | 2003-10-28 | Protedyne Corporation | Robotically manipulable sample handling tool |
TW561038B (en) * | 2003-03-04 | 2003-11-11 | Rossmax Int Ltd | Device for adjusting gas pressure |
US7249529B2 (en) * | 2003-03-28 | 2007-07-31 | Protedyne Corporation | Robotically manipulable sample handling tool |
US6941963B2 (en) * | 2003-06-26 | 2005-09-13 | Planar Systems, Inc. | High-speed diaphragm valve for atomic layer deposition |
US7021330B2 (en) | 2003-06-26 | 2006-04-04 | Planar Systems, Inc. | Diaphragm valve with reliability enhancements for atomic layer deposition |
US6907897B2 (en) * | 2003-06-26 | 2005-06-21 | Planar Systems, Inc. | Diaphragm valve for high-temperature precursor supply in atomic layer deposition |
KR101491713B1 (en) * | 2013-06-10 | 2015-02-11 | (주)씨엔에스 | Method for controlling flow rate of liquid or gas |
KR101491711B1 (en) * | 2013-06-10 | 2015-02-11 | (주)씨엔에스 | Method for controlling flow rate of liquid or gas using diaphragm valve |
JP6589865B2 (en) * | 2014-07-01 | 2019-10-16 | 株式会社ニコン | Fluid device, fluid control method, inspection device, inspection method, and fluid device manufacturing method |
KR101604978B1 (en) * | 2014-08-05 | 2016-03-21 | (주)씨엔에스 | Assembled diaphragm valve installation for using motor |
GB2555816A (en) * | 2016-11-10 | 2018-05-16 | Natural Environment Res Council | Analyser |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3897041A (en) * | 1973-08-20 | 1975-07-29 | Leesona Corp | Fluid flow control elements with area dividing inserts |
US4304257A (en) | 1980-07-01 | 1981-12-08 | Instrumentation Laboratory Inc. | Valve with flexible sheet member |
US4944487A (en) * | 1989-05-08 | 1990-07-31 | Lee Company | Diaphragm valve |
US5083742A (en) | 1990-08-01 | 1992-01-28 | Photovac Incorporated | Fluid control valve |
US5176359A (en) | 1991-05-20 | 1993-01-05 | Photovac International, Inc. | Fluid control valve arrangement |
US5203368A (en) | 1992-07-29 | 1993-04-20 | Protein Technologies Inc. | Matrix of valves |
US5496009A (en) | 1994-10-07 | 1996-03-05 | Bayer Corporation | Valve |
US5653259A (en) * | 1994-10-17 | 1997-08-05 | Applied Biosystems, Inc. | Valve block |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS448943Y1 (en) * | 1965-02-27 | 1969-04-11 | ||
IL55233A0 (en) * | 1977-08-16 | 1978-09-29 | Niemand C W P | Improvements to fluid valves |
JPS62140205U (en) * | 1986-02-28 | 1987-09-04 | ||
US4911195A (en) * | 1986-08-27 | 1990-03-27 | Porton Instruments, Inc. | Valve block assembly |
-
1997
- 1997-12-15 US US08/990,861 patent/US6007046A/en not_active Expired - Fee Related
-
1998
- 1998-12-03 EP EP98960690A patent/EP1030989B1/en not_active Expired - Lifetime
- 1998-12-03 JP JP2000539286A patent/JP4216470B2/en not_active Expired - Fee Related
- 1998-12-03 DE DE1998613280 patent/DE69813280T2/en not_active Expired - Fee Related
- 1998-12-03 WO PCT/US1998/025648 patent/WO1999031419A1/en active IP Right Grant
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3897041A (en) * | 1973-08-20 | 1975-07-29 | Leesona Corp | Fluid flow control elements with area dividing inserts |
US4304257A (en) | 1980-07-01 | 1981-12-08 | Instrumentation Laboratory Inc. | Valve with flexible sheet member |
US4944487A (en) * | 1989-05-08 | 1990-07-31 | Lee Company | Diaphragm valve |
US5083742A (en) | 1990-08-01 | 1992-01-28 | Photovac Incorporated | Fluid control valve |
US5176359A (en) | 1991-05-20 | 1993-01-05 | Photovac International, Inc. | Fluid control valve arrangement |
US5203368A (en) | 1992-07-29 | 1993-04-20 | Protein Technologies Inc. | Matrix of valves |
US5496009A (en) | 1994-10-07 | 1996-03-05 | Bayer Corporation | Valve |
US5653259A (en) * | 1994-10-17 | 1997-08-05 | Applied Biosystems, Inc. | Valve block |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102483173A (en) * | 2009-08-31 | 2012-05-30 | 株式会社富士金 | Fluid controller |
CN102483173B (en) * | 2009-08-31 | 2014-08-13 | 株式会社富士金 | Fluid controller |
US10100939B2 (en) | 2013-12-06 | 2018-10-16 | The University Of Tokyo | Valve, fluid control structure, fluid device and method of manufacturing valve |
Also Published As
Publication number | Publication date |
---|---|
DE69813280T2 (en) | 2004-01-29 |
US6007046A (en) | 1999-12-28 |
EP1030989B1 (en) | 2003-04-09 |
JP4216470B2 (en) | 2009-01-28 |
JP2002508491A (en) | 2002-03-19 |
DE69813280D1 (en) | 2003-05-15 |
EP1030989A1 (en) | 2000-08-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6007046A (en) | Fluid transport circuit and valve structure therefor | |
JP3278437B2 (en) | Fluid control valve structure | |
EP0706003B1 (en) | Diaphragm valve | |
US5660370A (en) | Valve with flexible sheet member and two port non-flexing backer member | |
AU697402B2 (en) | Integral valve diaphragm pump and method | |
EP0469913B1 (en) | Fluid flow control valves | |
EP0706004B1 (en) | Relief valve | |
US4545561A (en) | Piezoelectric valve operator | |
US6415818B2 (en) | Diaphragm-type solenoid valve | |
WO2002070932A2 (en) | Microvalve | |
CA2165425A1 (en) | Diaphragm valve | |
EP0923727B1 (en) | Improved fluid control valve arrangement | |
JP2013516582A5 (en) | ||
KR20010043451A (en) | Microvalve | |
US4771204A (en) | Sealing method and means for fluid control device | |
US5197192A (en) | Method of making a fluid control valve | |
JPH0617949A (en) | Device for circulating and interrupting fluid | |
US4931601A (en) | Pressure switch having internal vent chamber | |
AU752367B2 (en) | Ferroelectric fluid flow control valve | |
JPH03223580A (en) | Piezoelectric type valve device | |
JPH0649982Y2 (en) | Solenoid valve | |
JPH041418Y2 (en) | ||
JPH082592Y2 (en) | Micro system gas sensor | |
JPH07229579A (en) | Microvalve device | |
GB2089941A (en) | Pneumatic switcher |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): JP |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 1998960690 Country of ref document: EP |
|
ENP | Entry into the national phase |
Ref country code: JP Ref document number: 2000 539286 Kind code of ref document: A Format of ref document f/p: F |
|
WWP | Wipo information: published in national office |
Ref document number: 1998960690 Country of ref document: EP |
|
WWG | Wipo information: grant in national office |
Ref document number: 1998960690 Country of ref document: EP |