WO1999001589A1 - Colorless diamond-like carbon coatings - Google Patents
Colorless diamond-like carbon coatings Download PDFInfo
- Publication number
- WO1999001589A1 WO1999001589A1 PCT/US1998/013603 US9813603W WO9901589A1 WO 1999001589 A1 WO1999001589 A1 WO 1999001589A1 US 9813603 W US9813603 W US 9813603W WO 9901589 A1 WO9901589 A1 WO 9901589A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- dlc
- coating
- substrate
- deposited
- low conjugation
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
Definitions
- the invention generally relates to a process for producing essentially colorless diamond-like carbon coatings on substrates.
- the invention relates to producing such coatings on plastic substrates used for automotive and aircraft windows.
- Aircraft manufacturers are also very interested in improving their plastic windows. Scratch and impact resistance are key issues. Such coatings must also be inert to and protect the plastic from sulfuric acid which is present in high altitude air pollution.
- DLC diamond-like carbon
- This invention provides a process for producing an essentially colorless, clear low-conjugation DLC coating on a substrate, comprising:
- step (d) contacting the DLC deposited in step (c) with a reactive species capable of saturating the double bonds in the DLC to produce low conjugation-DLC;
- each thin layer of DLC deposited is preferably about 0.1 ⁇ m or less and the thickness of the low conjugation-DLC (lc-DLC) coating is preferably about 10 ⁇ m or less.
- the reactive species is preferably in a gaseous state and preferably an activated form of a halogen, i.e., fluorine, chlorine or bromine, or of hydrogen. If the desired thickness of the essentially colorless, clear low conjugation-DLC is about 0.1 ⁇ m or less, the process can comprise step (a) in which a layer of DLC of the desired thickness is deposited and step (b).
- DLC is a blend of sp2 and sp3 bonded carbon.
- the sp3 bond which is present in true diamond, is a single bond and there are no light absorption bands in the visible spectrum associated with it. Such single bonds exhibit absorption in the UV region of the electromagnetic spectrum.
- the sp2 bonded carbon which occurs in graphite, is a double bond and hence has electrons which are more mobile and can interact with electromagnetic radiation at lower energies. Double bonds are interactive in the visible spectrum when a sufficient number of bonds are conjugated together. For example, graphite is black and opaque, even in very thin compositions, because of the extensive conjugated network of double bonds.
- DLC has a much less extensive conjugated network than graphite and is typically clear in thin coatings, i.e., coatings with thickness less than about 1 ⁇ m, although there is typically a light tan color associated therewith. In thick coatings, i.e., coatings with thickness greater than about 5 ⁇ m, DLC is opaque with a dark brown to nearly black color. Most optical grade window anti-scratch coatings are preferably clear and colorless so that tinting can be added as desired.
- the process of this invention relates to saturating double bonds in DLC, i.e., to the conversion of the double bonds to single bonds, and to thereby lower the conjugation.
- This is accomplished by chemical addition, i.e., by contacting a reactive species with DLC during and/or between the deposition of thin layers of DLC and results in low conjugation-DCL (lc-DCL).
- the reactive species "X*" is preferably in a gaseous state.
- the reactive species is one that can react with the double bond and is preferably an activated form of a halogen, i.e., fluorine, chlorine or bromine, or of hydrogen.
- the initial precursor ground state sources of these activated species would typically be from gases such as the diatomic gases F , C_2 and H 2 or gases in which the species is combined with other elements, e.g. CF 4 , SFg and CCI 4 . Examples of generation of active species are given below in Equations 2 and 3.
- the energy applied can be, among others, electromagnetic or thermal.
- the reactive species F* is reacted with the sp2 bonds during "bleaching" cycles in which double bonds are saturated between repeated steps of depositions of DLC on a substrate.
- a thin layer, i.e., about 0.1 ⁇ m or less in thickness, of DLC is deposited in each deposition step by any of a number of well known DLC deposition technologies available in the art, e.g., by chemical vapor deposition (CVD), laser ablation, ion beam ablation, plasma torch, cathodic arc, etc.
- CVD chemical vapor deposition
- laser ablation ion beam ablation
- plasma torch cathodic arc
- cathodic arc cathodic arc
- a CVD technology using RF excitation and an ion implantation technique known as plasma source ion implantation (PSII) can be conveniently used in the process.
- the deposition step is stopped and the "bleaching" step initiated.
- a plasma of reactive species X* can be created by energy input, such as radio frequency excitation at 13.56 MHz, and the resulting species allowed to react with sp2 bonds in the thin DLC layer.
- the X* species could be deliberately generated in the form of an ion and "driven” into the DLC coating by known ion implantation techniques.
- the "bleaching” step is then stopped, and the cycle of deposition and "bleaching” continued until the desired coating thickness is achieved.
- the thickness of the layer of DLC to be “bleached” must be sufficiently thin to allow the effective diffusion of the active species X* into the DLC.
- the alternating steps of DLC deposition and “bleaching" are performed within the process chamber so as to ensure that the DLC layer is thin enough, i.e., about 0.1 ⁇ m or less in thickness, so that effective diffusion of the active species X* into the DLC occurs. Otherwise, only the portion of the DLC near the surface would be de-colorized.
- the alternation of steps can conveniently be achieved when using a CVD deposition process by manifolding the process gases and having high speed valving controlling switching back and forth from deposition gases (e.g., methane, acetylene, etc.) to "bleaching" gases.
- deposition gases e.g., methane, acetylene, etc.
- the "bleaching" gases can be puffed over the DLC substrate between ablated plumes of carbon.
- High speed valving technology is available commercially.
- the frequency of the alternation of the deposition and "bleaching" will depend on the manifolding and proximity to the substrate so as to allow appropriate diffusion time and separation of the deposition and "bleaching" steps. However, cycle times of 10-100 Hertz should be readily achievable.
- essentially colorless, clear low conjugation DLC coatings is meant coatings of thickness up to 10 ⁇ m which absorb less than 20% of the incident light of any wavelength in the visible spectrum, i.e., any wavelength in the range of 400 nm to 700 nm.
- the essentially colorless, clear lc-DLC coatings made by the process of this invention will be useful for applications other than those based on optical properties (i.e., beyond automotive and aircraft windows).
- optical properties i.e., beyond automotive and aircraft windows.
- electrical resistance, electrical breakdown strength and dielectric constant properties will also be impacted by removal of the double bond color sites since such sites are mechanistically related to these electrical properties. Electrical resistance and breakdown strength will be raised.
- Use of DLC for the interlayer dielectric insulator in integrated circuits has been considered.
- the lc-DLC produced with the process of this invention will have a lower dielectric constant and thus be more desirable for integrated circuits insulator applications.
- the DLC coatings of the invention may be applied in a patterned manner to the window leaving some areas uncoated. This may be important so that uncoated attachment areas (e.g., glue areas) are available to attach the window to lift mechanisms. It may also be preferable to leave any areas that contain heating wires or elements in the window uncoated.
- uncoated attachment areas e.g., glue areas
- DLC coatings may be applied over previously-applied SiO x hard coatings on the window substrate. This may help provide a graded modulus interface between the DLC coating and the window substrate.
- the SiO x interface may aid in the adhesion of the DLC coating, especially when thickly applied.
- laminated structures may be made by a number of means. For example, co-extrusion, roller lamination or the use of an adhesive, interfacial film layer (e.g., "BUTACITE” film commercially available from E. I. du Pont de Nemours and Company, Wilmington, DE) may be used.
- an adhesive, interfacial film layer e.g., "BUTACITE” film commercially available from E. I. du Pont de Nemours and Company, Wilmington, DE
- BUTACITE adhesive, interfacial film layer
- Glass window substrates may also be utilized with DLC coatings to change the surface characteristics, light absorbency and scratch resistance of the glass substrate.
- Glass may also be co-laminated with plastic, wherein the plastic side of the laminate is coated with DLC.
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98931739A EP1017874B1 (en) | 1997-07-01 | 1998-06-30 | Colorless diamond-like carbon coatings |
CA002296095A CA2296095A1 (en) | 1997-07-01 | 1998-06-30 | Colorless diamond-like carbon coatings |
JP50730499A JP2002508035A (en) | 1997-07-01 | 1998-06-30 | Colorless diamond-like carbon coating |
DE69803938T DE69803938T2 (en) | 1997-07-01 | 1998-06-30 | COLORLESS DIAMOND-LIKE CARBON COATINGS |
HK00105420A HK1026235A1 (en) | 1997-07-01 | 2000-08-30 | Colorless diamond-like carbon coatings |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5137297P | 1997-07-01 | 1997-07-01 | |
US60/051,372 | 1997-07-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999001589A1 true WO1999001589A1 (en) | 1999-01-14 |
Family
ID=21970908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1998/013603 WO1999001589A1 (en) | 1997-07-01 | 1998-06-30 | Colorless diamond-like carbon coatings |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1017874B1 (en) |
JP (1) | JP2002508035A (en) |
CA (1) | CA2296095A1 (en) |
DE (1) | DE69803938T2 (en) |
HK (1) | HK1026235A1 (en) |
WO (1) | WO1999001589A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002010473A1 (en) * | 2000-08-01 | 2002-02-07 | Sidel | Barrier coating |
US9751799B2 (en) | 2012-10-03 | 2017-09-05 | Corning Incorporated | Physical vapor deposited layers for protection of glass surfaces |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4783361A (en) * | 1984-09-10 | 1988-11-08 | Ovonic Synthetic Materials Company, Inc. | Coated lenses |
EP0454995A1 (en) * | 1990-04-30 | 1991-11-06 | Xerox Corporation | Coating process |
US5145711A (en) * | 1987-08-10 | 1992-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Cyclotron resonance chemical vapor deposition method of forming a halogen-containing diamond on a substrate |
EP0668372A1 (en) * | 1994-02-16 | 1995-08-23 | General Electric Company | Semi-transparent diamond film |
EP0676484A2 (en) * | 1989-09-14 | 1995-10-11 | General Electric Company | Transparent diamond films and method for making |
-
1998
- 1998-06-30 WO PCT/US1998/013603 patent/WO1999001589A1/en active IP Right Grant
- 1998-06-30 JP JP50730499A patent/JP2002508035A/en active Pending
- 1998-06-30 CA CA002296095A patent/CA2296095A1/en not_active Abandoned
- 1998-06-30 EP EP98931739A patent/EP1017874B1/en not_active Expired - Lifetime
- 1998-06-30 DE DE69803938T patent/DE69803938T2/en not_active Expired - Fee Related
-
2000
- 2000-08-30 HK HK00105420A patent/HK1026235A1/en not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4783361A (en) * | 1984-09-10 | 1988-11-08 | Ovonic Synthetic Materials Company, Inc. | Coated lenses |
US5145711A (en) * | 1987-08-10 | 1992-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Cyclotron resonance chemical vapor deposition method of forming a halogen-containing diamond on a substrate |
EP0676484A2 (en) * | 1989-09-14 | 1995-10-11 | General Electric Company | Transparent diamond films and method for making |
EP0454995A1 (en) * | 1990-04-30 | 1991-11-06 | Xerox Corporation | Coating process |
EP0668372A1 (en) * | 1994-02-16 | 1995-08-23 | General Electric Company | Semi-transparent diamond film |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002010473A1 (en) * | 2000-08-01 | 2002-02-07 | Sidel | Barrier coating |
FR2812666A1 (en) * | 2000-08-01 | 2002-02-08 | Sidel Sa | BARRIER COATING COMPRISING A PROTECTIVE LAYER, METHOD FOR OBTAINING SUCH A COATING AND CONTAINER PROVIDED WITH SUCH A COATING |
US9751799B2 (en) | 2012-10-03 | 2017-09-05 | Corning Incorporated | Physical vapor deposited layers for protection of glass surfaces |
US10730788B2 (en) | 2012-10-03 | 2020-08-04 | Corning Incorporated | Physical vapor deposited layers for protection of glass surfaces |
Also Published As
Publication number | Publication date |
---|---|
EP1017874B1 (en) | 2002-02-20 |
JP2002508035A (en) | 2002-03-12 |
DE69803938D1 (en) | 2002-03-28 |
HK1026235A1 (en) | 2000-12-08 |
DE69803938T2 (en) | 2002-08-22 |
CA2296095A1 (en) | 1999-01-14 |
EP1017874A1 (en) | 2000-07-12 |
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