WO1998059229A3 - Pod monitor for use in a controlled environment - Google Patents

Pod monitor for use in a controlled environment Download PDF

Info

Publication number
WO1998059229A3
WO1998059229A3 PCT/US1998/012982 US9812982W WO9859229A3 WO 1998059229 A3 WO1998059229 A3 WO 1998059229A3 US 9812982 W US9812982 W US 9812982W WO 9859229 A3 WO9859229 A3 WO 9859229A3
Authority
WO
WIPO (PCT)
Prior art keywords
pod
electrical signals
environment
controlled environment
monitoring
Prior art date
Application number
PCT/US1998/012982
Other languages
French (fr)
Other versions
WO1998059229A2 (en
Inventor
Robert M Genco
Steven J Henry
Original Assignee
Robert M Genco
Steven J Henry
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert M Genco, Steven J Henry filed Critical Robert M Genco
Publication of WO1998059229A2 publication Critical patent/WO1998059229A2/en
Publication of WO1998059229A3 publication Critical patent/WO1998059229A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A system including a pod for carrying and storing objects and a device for monitoring the environment inside the pod and providing notification if the environment becomes less than desired. The monitoring device includes a sensor bundle connected to the pod for measuring the environment inside the pod and converting the measurements to electrical signals. The electrical signals are then provided to a logging device which stores them for later retrieval or transmission. If the electrical signals indicate an undesired environment, a signaling device may transmit a notification to an external system.
PCT/US1998/012982 1997-06-23 1998-06-23 Pod monitor for use in a controlled environment WO1998059229A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US5045597P 1997-06-23 1997-06-23
US60/050,455 1997-06-23

Publications (2)

Publication Number Publication Date
WO1998059229A2 WO1998059229A2 (en) 1998-12-30
WO1998059229A3 true WO1998059229A3 (en) 1999-04-01

Family

ID=21965349

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/012982 WO1998059229A2 (en) 1997-06-23 1998-06-23 Pod monitor for use in a controlled environment

Country Status (1)

Country Link
WO (1) WO1998059229A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1139390A1 (en) 2000-03-28 2001-10-04 Infineon Technologies AG Semiconductor wafer pod
US7187994B1 (en) * 2000-08-18 2007-03-06 Kla-Tencor Technologies Corp. Method of interfacing ancillary equipment to FIMS processing stations
JP4146718B2 (en) 2002-12-27 2008-09-10 ミライアル株式会社 Thin plate support container
WO2006017142A2 (en) * 2004-07-11 2006-02-16 Lighthouse Worldwide Solutions, Inc. Monitoring device for transport pods
US7720558B2 (en) * 2004-09-04 2010-05-18 Applied Materials, Inc. Methods and apparatus for mapping carrier contents
US10192762B2 (en) * 2016-01-26 2019-01-29 Applied Materials, Inc. Systems and methods for detecting the existence of one or more environmental conditions within a substrate processing system
CN108122448A (en) * 2018-02-11 2018-06-05 烟台宏远氧业有限公司 Cabin Yuan Chu cabins indicate system
JP7110663B2 (en) * 2018-03-28 2022-08-02 Tdk株式会社 WAFER CONTAINER AND WAFER CONTAINER CLEANING METHOD
DE102018113786A1 (en) 2018-06-08 2019-12-12 Vat Holding Ag Wafer transfer unit and wafer transfer system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3139663A1 (en) * 1981-10-06 1983-04-21 Bernhard 7551 Au Bauer Device for measuring time and temperature
US4972099A (en) * 1988-01-30 1990-11-20 Dai Nippon Printing Co., Ltd. Sensor card
FR2683318A1 (en) * 1991-11-05 1993-05-07 Befic Method and device for measuring temperature
US5401212A (en) * 1990-08-29 1995-03-28 Intelligent Enclosures Corporation Environmental control system
US5464475A (en) * 1994-05-20 1995-11-07 Advanced Micro Devices, Inc. Work-in-process storage pod
EP0684631A1 (en) * 1994-05-24 1995-11-29 Fluoroware, Inc. Standardized mechanical interface (SMIF) pod.

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3139663A1 (en) * 1981-10-06 1983-04-21 Bernhard 7551 Au Bauer Device for measuring time and temperature
US4972099A (en) * 1988-01-30 1990-11-20 Dai Nippon Printing Co., Ltd. Sensor card
US5401212A (en) * 1990-08-29 1995-03-28 Intelligent Enclosures Corporation Environmental control system
FR2683318A1 (en) * 1991-11-05 1993-05-07 Befic Method and device for measuring temperature
US5464475A (en) * 1994-05-20 1995-11-07 Advanced Micro Devices, Inc. Work-in-process storage pod
EP0684631A1 (en) * 1994-05-24 1995-11-29 Fluoroware, Inc. Standardized mechanical interface (SMIF) pod.

Also Published As

Publication number Publication date
WO1998059229A2 (en) 1998-12-30

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