WO1998059229A3 - Pod monitor for use in a controlled environment - Google Patents
Pod monitor for use in a controlled environment Download PDFInfo
- Publication number
- WO1998059229A3 WO1998059229A3 PCT/US1998/012982 US9812982W WO9859229A3 WO 1998059229 A3 WO1998059229 A3 WO 1998059229A3 US 9812982 W US9812982 W US 9812982W WO 9859229 A3 WO9859229 A3 WO 9859229A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pod
- electrical signals
- environment
- controlled environment
- monitoring
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A system including a pod for carrying and storing objects and a device for monitoring the environment inside the pod and providing notification if the environment becomes less than desired. The monitoring device includes a sensor bundle connected to the pod for measuring the environment inside the pod and converting the measurements to electrical signals. The electrical signals are then provided to a logging device which stores them for later retrieval or transmission. If the electrical signals indicate an undesired environment, a signaling device may transmit a notification to an external system.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5045597P | 1997-06-23 | 1997-06-23 | |
US60/050,455 | 1997-06-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1998059229A2 WO1998059229A2 (en) | 1998-12-30 |
WO1998059229A3 true WO1998059229A3 (en) | 1999-04-01 |
Family
ID=21965349
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1998/012982 WO1998059229A2 (en) | 1997-06-23 | 1998-06-23 | Pod monitor for use in a controlled environment |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO1998059229A2 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1139390A1 (en) | 2000-03-28 | 2001-10-04 | Infineon Technologies AG | Semiconductor wafer pod |
US7187994B1 (en) * | 2000-08-18 | 2007-03-06 | Kla-Tencor Technologies Corp. | Method of interfacing ancillary equipment to FIMS processing stations |
JP4146718B2 (en) | 2002-12-27 | 2008-09-10 | ミライアル株式会社 | Thin plate support container |
WO2006017142A2 (en) * | 2004-07-11 | 2006-02-16 | Lighthouse Worldwide Solutions, Inc. | Monitoring device for transport pods |
US7720558B2 (en) * | 2004-09-04 | 2010-05-18 | Applied Materials, Inc. | Methods and apparatus for mapping carrier contents |
US10192762B2 (en) * | 2016-01-26 | 2019-01-29 | Applied Materials, Inc. | Systems and methods for detecting the existence of one or more environmental conditions within a substrate processing system |
CN108122448A (en) * | 2018-02-11 | 2018-06-05 | 烟台宏远氧业有限公司 | Cabin Yuan Chu cabins indicate system |
JP7110663B2 (en) * | 2018-03-28 | 2022-08-02 | Tdk株式会社 | WAFER CONTAINER AND WAFER CONTAINER CLEANING METHOD |
DE102018113786A1 (en) | 2018-06-08 | 2019-12-12 | Vat Holding Ag | Wafer transfer unit and wafer transfer system |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3139663A1 (en) * | 1981-10-06 | 1983-04-21 | Bernhard 7551 Au Bauer | Device for measuring time and temperature |
US4972099A (en) * | 1988-01-30 | 1990-11-20 | Dai Nippon Printing Co., Ltd. | Sensor card |
FR2683318A1 (en) * | 1991-11-05 | 1993-05-07 | Befic | Method and device for measuring temperature |
US5401212A (en) * | 1990-08-29 | 1995-03-28 | Intelligent Enclosures Corporation | Environmental control system |
US5464475A (en) * | 1994-05-20 | 1995-11-07 | Advanced Micro Devices, Inc. | Work-in-process storage pod |
EP0684631A1 (en) * | 1994-05-24 | 1995-11-29 | Fluoroware, Inc. | Standardized mechanical interface (SMIF) pod. |
-
1998
- 1998-06-23 WO PCT/US1998/012982 patent/WO1998059229A2/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3139663A1 (en) * | 1981-10-06 | 1983-04-21 | Bernhard 7551 Au Bauer | Device for measuring time and temperature |
US4972099A (en) * | 1988-01-30 | 1990-11-20 | Dai Nippon Printing Co., Ltd. | Sensor card |
US5401212A (en) * | 1990-08-29 | 1995-03-28 | Intelligent Enclosures Corporation | Environmental control system |
FR2683318A1 (en) * | 1991-11-05 | 1993-05-07 | Befic | Method and device for measuring temperature |
US5464475A (en) * | 1994-05-20 | 1995-11-07 | Advanced Micro Devices, Inc. | Work-in-process storage pod |
EP0684631A1 (en) * | 1994-05-24 | 1995-11-29 | Fluoroware, Inc. | Standardized mechanical interface (SMIF) pod. |
Also Published As
Publication number | Publication date |
---|---|
WO1998059229A2 (en) | 1998-12-30 |
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DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
122 | Ep: pct application non-entry in european phase |