WO1998025127A3 - Ellipsometer with revolving birefringent shutter blade - Google Patents

Ellipsometer with revolving birefringent shutter blade Download PDF

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Publication number
WO1998025127A3
WO1998025127A3 PCT/FR1997/002214 FR9702214W WO9825127A3 WO 1998025127 A3 WO1998025127 A3 WO 1998025127A3 FR 9702214 W FR9702214 W FR 9702214W WO 9825127 A3 WO9825127 A3 WO 9825127A3
Authority
WO
WIPO (PCT)
Prior art keywords
birefringent
shutter blade
ellipsometer
revolving
polariser
Prior art date
Application number
PCT/FR1997/002214
Other languages
French (fr)
Other versions
WO1998025127A2 (en
Inventor
Andre Robert
Alexandre Fedorov
Original Assignee
Armines
Andre Robert
Alexandre Fedorov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Armines, Andre Robert, Alexandre Fedorov filed Critical Armines
Publication of WO1998025127A2 publication Critical patent/WO1998025127A2/en
Publication of WO1998025127A3 publication Critical patent/WO1998025127A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Abstract

The invention concerns a device for measuring the birefringent characteristics of a transparent medium (4), in particular a linear or circular birefringent, in which a light beam produced by a laser (1) passes successively through a polariser (6), an optical encoder (10), maintained by a housing (8), the central part of which (24) is rotating and comprises a birefringent shutter blade (22), said transparent medium (4), a circular filter (26) and at least a linear filter, to reach a photodetector (28), for measuring the light flux in one point, this photodetector being associated with computing means (18), characterised in that the polariser (6) placed upstream of the optical encoder (10) is integral with the housing (8) of the latter.
PCT/FR1997/002214 1996-12-06 1997-12-05 Ellipsometer with revolving birefringent shutter blade WO1998025127A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR96/15006 1996-12-06
FR9615006A FR2756919B1 (en) 1996-12-06 1996-12-06 ELLIPSOMETER WITH ROTATING BIREFRINGENT BLADE

Publications (2)

Publication Number Publication Date
WO1998025127A2 WO1998025127A2 (en) 1998-06-11
WO1998025127A3 true WO1998025127A3 (en) 1998-09-03

Family

ID=9498414

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR1997/002214 WO1998025127A2 (en) 1996-12-06 1997-12-05 Ellipsometer with revolving birefringent shutter blade

Country Status (2)

Country Link
FR (1) FR2756919B1 (en)
WO (1) WO1998025127A2 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3741661A (en) * 1970-04-16 1973-06-26 Nippon Kogaku Kk Universal polarimeter
FR2491234A1 (en) * 1980-09-29 1982-04-02 Labo Electronique Physique Real time ellipsometer for analysing film on substrate - uses microprocessor to calculate fourier coefficients for function generated by photomultiplier output processing circuit
EP0332508A1 (en) * 1988-03-04 1989-09-13 France Telecom Device for ellipsometric analysis, method for the ellipsometric analysis of a sample, and use in the measurement of thickness variation of thin layers
JPH0283428A (en) * 1988-09-20 1990-03-23 Tsunehiro Umeda Automatic double refraction measuring apparatus
JPH05306133A (en) * 1992-04-30 1993-11-19 Hoya Corp Stress relieving method for glass body and device therefor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3741661A (en) * 1970-04-16 1973-06-26 Nippon Kogaku Kk Universal polarimeter
FR2491234A1 (en) * 1980-09-29 1982-04-02 Labo Electronique Physique Real time ellipsometer for analysing film on substrate - uses microprocessor to calculate fourier coefficients for function generated by photomultiplier output processing circuit
EP0332508A1 (en) * 1988-03-04 1989-09-13 France Telecom Device for ellipsometric analysis, method for the ellipsometric analysis of a sample, and use in the measurement of thickness variation of thin layers
JPH0283428A (en) * 1988-09-20 1990-03-23 Tsunehiro Umeda Automatic double refraction measuring apparatus
JPH05306133A (en) * 1992-04-30 1993-11-19 Hoya Corp Stress relieving method for glass body and device therefor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 014, no. 283 (P - 1063) 19 June 1990 (1990-06-19) *
PATENT ABSTRACTS OF JAPAN vol. 018, no. 111 (C - 1170) 23 February 1994 (1994-02-23) *

Also Published As

Publication number Publication date
FR2756919B1 (en) 1999-02-12
WO1998025127A2 (en) 1998-06-11
FR2756919A1 (en) 1998-06-12

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