WO1998002926A8 - Capteur piezo-electrique et procede d'utilisation - Google Patents

Capteur piezo-electrique et procede d'utilisation

Info

Publication number
WO1998002926A8
WO1998002926A8 PCT/US1997/012165 US9712165W WO9802926A8 WO 1998002926 A8 WO1998002926 A8 WO 1998002926A8 US 9712165 W US9712165 W US 9712165W WO 9802926 A8 WO9802926 A8 WO 9802926A8
Authority
WO
WIPO (PCT)
Prior art keywords
fluid
piezoelectric crystal
resonant frequency
trace
fluid component
Prior art date
Application number
PCT/US1997/012165
Other languages
English (en)
Other versions
WO1998002926A1 (fr
Inventor
Glenn M Tom
Cynthia A Miller
Original Assignee
Advanced Tech Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/678,572 external-priority patent/US5977687A/en
Priority claimed from US08/679,258 external-priority patent/US5817921A/en
Application filed by Advanced Tech Materials filed Critical Advanced Tech Materials
Publication of WO1998002926A1 publication Critical patent/WO1998002926A1/fr
Publication of WO1998002926A8 publication Critical patent/WO1998002926A8/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/022—Liquids
    • G01N2291/0222—Binary liquids

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Acoustics & Sound (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

L'invention concerne un capteur destiné à la détection d'un composant fluide à l'état de traces dans un environnement fluide, comprenant: un cristal piézo-électrique doté d'une fréquence résonante fondamentale en réaction à l'application d'un champ électrique oscillant; un revêtement sur le cristal piézo-électrique d'un capteur sujet à réaction avec le composant fluide à l'état de traces pour donner un produit d'interaction solide; un dispositif d'application d'un champ électrique oscillant au cristal piézo-électrique qui génère à partir de là une fréquence résonante de sortie; un dispositif permettant: (i) d'échantillonner la fréquence résonante de sortie du cristal piézo-électrique pendant que le champ électrique oscillant y est appliqué, (ii) de déterminer la modification de la fréquence résonante à partir de la fréquence résonante fondamentale intervenant lors de la formation du produit d'interaction solide lorsque le capteur interagit avec le composant fluide à l'état de traces dans l'environnement fluide, et (iii) de générer un signal de sortie indiquant la présence du composant fluide à l'état de traces dans l'environnement; et un dispositif permettant de faire couler un fluide de l'environnement fluide sur le revêtement du cristal piézo-électrique, de façon que lorsque le composant fluide à l'état de traces est présent, il réagisse avec le revêtement pour former le produit d'interaction solide; dans le capteur, le cristal piézo-éectrique recouvert d'un revêtement présente une vitesse de réponse en fréquence au composant fluide à l'état de traces d'environ 0,001 à environ 1000 milliHertz/min./(partie par million du composant fluide). Le capteur peut servir à détecter une crevaison lors de l'épuration à sec des gaz dans la fabrication de semi-conducteurs, ainsi que des espèces gazeuses contaminantes et dangereuses dans des environnements fluides ambiants, et peut donc être utilisé dans la surveillance de l'environnement.
PCT/US1997/012165 1996-07-12 1997-07-11 Capteur piezo-electrique et procede d'utilisation WO1998002926A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US08/679,258 1996-07-12
US08/678,572 1996-07-12
US08/678,572 US5977687A (en) 1996-07-12 1996-07-12 Piezoelectric end point sensor for detection of breakthrough of fluid, and fluid processing apparatus comprising same
US08/679,258 US5817921A (en) 1996-07-12 1996-07-12 Piezoelectric enviromental fluid monitoring assembly and method

Publications (2)

Publication Number Publication Date
WO1998002926A1 WO1998002926A1 (fr) 1998-01-22
WO1998002926A8 true WO1998002926A8 (fr) 2001-06-21

Family

ID=27102049

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1997/012165 WO1998002926A1 (fr) 1996-07-12 1997-07-11 Capteur piezo-electrique et procede d'utilisation

Country Status (1)

Country Link
WO (1) WO1998002926A1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0038637A1 (fr) * 1980-04-18 1981-10-28 Secretary of State for Social Services in Her Britannic Majesty's Gov. of the U.K. of Great Britain and Northern Ireland Méthode et appareil pour détecter la présence d'une impureté dans un courant gazeux
US5151395A (en) * 1987-03-24 1992-09-29 Novapure Corporation Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor
US5138869A (en) * 1990-12-14 1992-08-18 Novapure Corporation In-line detector system for real-time determination of impurity concentration in a flowing gas stream
US5065140A (en) * 1991-03-08 1991-11-12 Bell Communications Research, Inc. Early warning reactive gas detection system

Also Published As

Publication number Publication date
WO1998002926A1 (fr) 1998-01-22

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