WO1997025531A1 - Micro-pompe pourvue d'un generateur d'energie sonique - Google Patents

Micro-pompe pourvue d'un generateur d'energie sonique Download PDF

Info

Publication number
WO1997025531A1
WO1997025531A1 PCT/US1997/000076 US9700076W WO9725531A1 WO 1997025531 A1 WO1997025531 A1 WO 1997025531A1 US 9700076 W US9700076 W US 9700076W WO 9725531 A1 WO9725531 A1 WO 9725531A1
Authority
WO
WIPO (PCT)
Prior art keywords
tunnel
set forth
pump
sample
plate
Prior art date
Application number
PCT/US1997/000076
Other languages
English (en)
Inventor
Stuart W. Wenzel
Benedict J. Costello
Original Assignee
Berkeley Microinstruments, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkeley Microinstruments, Inc. filed Critical Berkeley Microinstruments, Inc.
Priority to AU13586/97A priority Critical patent/AU1358697A/en
Publication of WO1997025531A1 publication Critical patent/WO1997025531A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/26—Conditioning of the fluid carrier; Flow patterns
    • G01N30/28—Control of physical parameters of the fluid carrier
    • G01N30/32—Control of physical parameters of the fluid carrier of pressure or speed
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00824—Ceramic
    • B01J2219/00826—Quartz
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00824—Ceramic
    • B01J2219/00828—Silicon wafers or plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00851—Additional features
    • B01J2219/00853—Employing electrode arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00873—Heat exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00891—Feeding or evacuation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00925—Irradiation
    • B01J2219/00932—Sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/0095—Control aspects
    • B01J2219/00952—Sensing operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/087—Multiple sequential chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/088—Channel loops
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0883—Serpentine channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
    • B01L2400/0439—Moving fluids with specific forces or mechanical means specific forces vibrational forces ultrasonic vibrations, vibrating piezo elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L5/00—Gas handling apparatus
    • B01L5/02—Gas collection apparatus, e.g. by bubbling under water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N2030/022—Column chromatography characterised by the kind of separation mechanism
    • G01N2030/025—Gas chromatography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G01N30/12—Preparation by evaporation
    • G01N2030/121—Preparation by evaporation cooling; cold traps
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G01N30/12—Preparation by evaporation
    • G01N2030/121—Preparation by evaporation cooling; cold traps
    • G01N2030/122—Preparation by evaporation cooling; cold traps cryogenic focusing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G01N30/12—Preparation by evaporation
    • G01N2030/121—Preparation by evaporation cooling; cold traps
    • G01N2030/123—Preparation by evaporation cooling; cold traps using more than one trap
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/26—Conditioning of the fluid carrier; Flow patterns
    • G01N30/28—Control of physical parameters of the fluid carrier
    • G01N30/32—Control of physical parameters of the fluid carrier of pressure or speed
    • G01N2030/326—Control of physical parameters of the fluid carrier of pressure or speed pumps
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N2030/621—Detectors specially adapted therefor signal-to-noise ratio
    • G01N2030/623—Detectors specially adapted therefor signal-to-noise ratio by modulation of sample feed or detector response
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N2030/77—Detectors specially adapted therefor detecting radioactive properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/88—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86
    • G01N2030/8809—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 analysis specially adapted for the sample
    • G01N2030/8813—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 analysis specially adapted for the sample biological materials
    • G01N2030/8827—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 analysis specially adapted for the sample biological materials involving nucleic acids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/26—Conditioning of the fluid carrier; Flow patterns
    • G01N30/38—Flow patterns
    • G01N30/44—Flow patterns using recycling of the fraction to be distributed
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/88—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mechanical Engineering (AREA)
  • Nanotechnology (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Acoustics & Sound (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Composite Materials (AREA)
  • Dispersion Chemistry (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Micromachines (AREA)

Abstract

L'invention porte sur une micro-pompe (10) comportant un substrat (12) délimitant, tout au moins partiellement, une ou plusieurs parois d'un tunnel se déployant longitudinalement (14). Ce tunnel comporte un segment de paroi susceptible de vibrer. Un générateur d'énergie sonique se trouve placé en relation d'émission d'énergie sonique par rapport à ce segment de paroi. Le générateur d'énergie sonique est conçu pour produire des ondes élastiques parcourant le tunnel dans toute sa longueur.
PCT/US1997/000076 1996-01-05 1997-01-06 Micro-pompe pourvue d'un generateur d'energie sonique WO1997025531A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU13586/97A AU1358697A (en) 1996-01-05 1997-01-06 Micropump with sonic energy generator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US966596P 1996-01-05 1996-01-05
US60/009,665 1996-01-05

Publications (1)

Publication Number Publication Date
WO1997025531A1 true WO1997025531A1 (fr) 1997-07-17

Family

ID=21739020

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1997/000076 WO1997025531A1 (fr) 1996-01-05 1997-01-06 Micro-pompe pourvue d'un generateur d'energie sonique

Country Status (2)

Country Link
AU (1) AU1358697A (fr)
WO (1) WO1997025531A1 (fr)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000048736A1 (fr) * 1999-02-19 2000-08-24 GeSIM Gesellschaft für Silizium-Mikrosysteme mbH Champ de mesure de detecteur destine au controle du bon fonctionnement d'une micropipette
WO2002103210A1 (fr) * 2001-06-15 2002-12-27 Hansford Derek J Procedes et dispositifs de nanopompe
EP1400600A1 (fr) * 2002-09-17 2004-03-24 STMicroelectronics S.r.l. Dispositif intégrén pour les analyses biologiques
EP1403383A1 (fr) 2002-09-17 2004-03-31 STMicroelectronics S.r.l. Micropompe spécialement pour un dispositif intégré pour les analyses biologiques
WO2004076047A1 (fr) * 2003-02-27 2004-09-10 Advalytix Ag Procede et dispositif permettant de generer un mouvement dans une pellicule liquide de faible epaisseur
WO2004076046A1 (fr) * 2003-02-27 2004-09-10 Advalytix Ag Procede et dispositif pour melanger de petites quantites de liquide dans des microcavites
EP1486780A1 (fr) * 2002-02-19 2004-12-15 Ngk Insulators, Ltd. Puce microchimique
JP2006519091A (ja) * 2003-02-27 2006-08-24 アドヴァリティクス アーゲー 薄い液体フィルム内に運動を起こす方法と装置
JP2006519685A (ja) * 2003-02-27 2006-08-31 アドヴァリティクス アーゲー ミクロキャビティでの少量液体の混合方法と装置
WO2009014261A1 (fr) 2007-07-25 2009-01-29 Canon Kabushiki Kaisha Appareil de commande de liquide
WO2009013705A1 (fr) * 2007-07-26 2009-01-29 Fondazione Istituto Italiano Di Tecnologia Dispositif pour commander un mouvement de fluide dans des micro/nanocanaux aux moyens d'ondes acoustiques de surface
US8097222B2 (en) 2005-05-12 2012-01-17 Stmicroelectronics, S.R.L. Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
US8603076B2 (en) 2001-09-14 2013-12-10 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
TWI498552B (zh) * 2013-01-14 2015-09-01 Nat Univ Chung Hsing 可拋式毛細管電泳檢測儀器
CN113187702A (zh) * 2021-05-11 2021-07-30 上海芯物科技有限公司 一种无阀压电泵及其制作方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5006749A (en) * 1989-10-03 1991-04-09 Regents Of The University Of California Method and apparatus for using ultrasonic energy for moving microminiature elements
US5466932A (en) * 1993-09-22 1995-11-14 Westinghouse Electric Corp. Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases
US5525041A (en) * 1994-07-14 1996-06-11 Deak; David Momemtum transfer pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5006749A (en) * 1989-10-03 1991-04-09 Regents Of The University Of California Method and apparatus for using ultrasonic energy for moving microminiature elements
US5466932A (en) * 1993-09-22 1995-11-14 Westinghouse Electric Corp. Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases
US5525041A (en) * 1994-07-14 1996-06-11 Deak; David Momemtum transfer pump

Cited By (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000048736A1 (fr) * 1999-02-19 2000-08-24 GeSIM Gesellschaft für Silizium-Mikrosysteme mbH Champ de mesure de detecteur destine au controle du bon fonctionnement d'une micropipette
WO2002103210A1 (fr) * 2001-06-15 2002-12-27 Hansford Derek J Procedes et dispositifs de nanopompe
US7799197B2 (en) 2001-06-15 2010-09-21 The Ohio State University Research Foundation Nanopump devices and methods
US9433574B2 (en) 2001-09-14 2016-09-06 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US9066876B2 (en) 2001-09-14 2015-06-30 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US9433573B2 (en) 2001-09-14 2016-09-06 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US8986727B2 (en) 2001-09-14 2015-03-24 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US9271926B2 (en) 2001-09-14 2016-03-01 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US9005650B2 (en) 2001-09-14 2015-04-14 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US9066875B2 (en) 2001-09-14 2015-06-30 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US8603076B2 (en) 2001-09-14 2013-12-10 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
EP1486780A4 (fr) * 2002-02-19 2008-04-02 Ngk Insulators Ltd Puce microchimique
EP1486780A1 (fr) * 2002-02-19 2004-12-15 Ngk Insulators, Ltd. Puce microchimique
US7527480B2 (en) 2002-09-17 2009-05-05 Stmicroelectronics S.R.L. Micropump for integrated device for biological analyses
EP1403383A1 (fr) 2002-09-17 2004-03-31 STMicroelectronics S.r.l. Micropompe spécialement pour un dispositif intégré pour les analyses biologiques
US7794611B2 (en) 2002-09-17 2010-09-14 Stmicroelectronics S.R.L. Micropump for integrated device for biological analyses
EP1400600A1 (fr) * 2002-09-17 2004-03-24 STMicroelectronics S.r.l. Dispositif intégrén pour les analyses biologiques
JP2006519685A (ja) * 2003-02-27 2006-08-31 アドヴァリティクス アーゲー ミクロキャビティでの少量液体の混合方法と装置
JP4925819B2 (ja) * 2003-02-27 2012-05-09 ベックマン コールター， インコーポレイテッド ミクロキャビティでの少量液体の混合方法と装置
US8303778B2 (en) 2003-02-27 2012-11-06 Beckman Coulter, Inc. Method and device for generating movement in a thin liquid film
WO2004076047A1 (fr) * 2003-02-27 2004-09-10 Advalytix Ag Procede et dispositif permettant de generer un mouvement dans une pellicule liquide de faible epaisseur
US8038337B2 (en) 2003-02-27 2011-10-18 Beckman Coulter, Inc. Method and device for blending small quantities of liquid in microcavities
WO2004076046A1 (fr) * 2003-02-27 2004-09-10 Advalytix Ag Procede et dispositif pour melanger de petites quantites de liquide dans des microcavites
JP4732329B2 (ja) * 2003-02-27 2011-07-27 ベックマン コールター， インコーポレイテッド 薄い液体フィルム内に運動を起こす方法と装置
JP2006519091A (ja) * 2003-02-27 2006-08-24 アドヴァリティクス アーゲー 薄い液体フィルム内に運動を起こす方法と装置
US8097222B2 (en) 2005-05-12 2012-01-17 Stmicroelectronics, S.R.L. Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
WO2009014261A1 (fr) 2007-07-25 2009-01-29 Canon Kabushiki Kaisha Appareil de commande de liquide
EP2167979A1 (fr) * 2007-07-25 2010-03-31 Canon Kabushiki Kaisha Appareil de commande de liquide
EP2167979A4 (fr) * 2007-07-25 2015-02-18 Canon Kk Appareil de commande de liquide
WO2009013705A1 (fr) * 2007-07-26 2009-01-29 Fondazione Istituto Italiano Di Tecnologia Dispositif pour commander un mouvement de fluide dans des micro/nanocanaux aux moyens d'ondes acoustiques de surface
US8393356B2 (en) 2007-07-26 2013-03-12 Fondazione Istituto Italiano Di Tecnologia Device for controlling fluid motion into micro/nanochannels by means of surface acoustic waves
TWI498552B (zh) * 2013-01-14 2015-09-01 Nat Univ Chung Hsing 可拋式毛細管電泳檢測儀器
CN113187702A (zh) * 2021-05-11 2021-07-30 上海芯物科技有限公司 一种无阀压电泵及其制作方法

Also Published As

Publication number Publication date
AU1358697A (en) 1997-08-01

Similar Documents

Publication Publication Date Title
US6720710B1 (en) Micropump
Xie et al. Surface micromachined electrostatically actuated micro peristaltic pump
WO1997025531A1 (fr) Micro-pompe pourvue d'un generateur d'energie sonique
Reyes et al. Micro total analysis systems. 1. Introduction, theory, and technology
US8940147B1 (en) Microfluidic hubs, systems, and methods for interface fluidic modules
Grover et al. Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices
US6854338B2 (en) Fluidic device with integrated capacitive micromachined ultrasonic transducers
Haswell Development and operating characteristics of micro flow injection based on electroosmotic flow
US9995718B1 (en) Chemical and biomedical nanosensors
Cabuz et al. The dual diaphragm pump
Tas et al. Nanofluidic bubble pump using surface tension directed gas injection
US20040208751A1 (en) Microchip integrated multi-channel electroosmotic pumping system
CN105900253B (zh) 压电器件
US8276433B2 (en) Sensor for measuring properties of liquids and gases
De Pastina et al. Suspended micro/nano channel resonators: a review
JP2006515059A (ja) 試料処理が電気化学的に作動するマイクロ流体装置および方法
Greenwood et al. Sample manipulation in micro total analytical systems
CN101301990A (zh) 用于芯片实验室的声表面波微流体驱动器及其制造方法
White Acoustic sensors for physical, chemical and biochemical applications
JP2006508796A (ja) 液体−流体インタフェースが安定化された超小型流体素子
Meng et al. Focused flow micropump using ultrasonic flexural plate waves
WO2009122340A1 (fr) Transducteurs à ultrasons permettant d'obtenir un mélange microfluidique
Okandan et al. Development of surface micromachining technologies for microfluidics and BioMEMS
Luginbuhl et al. Ultrasonic flexural Lamb-wave actuators based on PZT thin film
Luginbuhl et al. Femtoliter injector for DNA mass spectrometry

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AU CA JP KR

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
NENP Non-entry into the national phase

Ref country code: JP

Ref document number: 97525295

Format of ref document f/p: F

122 Ep: pct application non-entry in european phase