WO1996025524A1

WO1996025524A1 - Sealing device for zone outlet/inlet of continuous heat treatment furnace, continuous vacuum evaporation equipment and the like

Info

Publication number: WO1996025524A1
Application number: PCT/JP1995/001146
Authority: WO
Inventors: Teruhisa Nakamura
Original assignee: Nisshin Steel Co., Ltd.
Priority date: 1995-02-16
Filing date: 1995-06-07
Publication date: 1996-08-22

Abstract

The invention provides a sealing device which is hard to cause a fire and can ensure a stable sealability over a long term. The sealing device is provided at the outlet/inlet of a bright annealing furnace (21) where a metallic web (22) enters and goes out, and serves to shut off an atmosphere within the furnace from the outside air. A pair of elastic rolls (30a, 30b) press against both sides of the metallic web (22). Rigid rolls (26a, 26b) provide airtight sealing between the elastic rolls (30a, 30b) and pressing bodies (25a, 25b). The elastic rolls (30a, 30b) and pressing bodies (25a, 25b) are formed of a rubber-based material, and the rigid rolls (26a, 26b) are formed of a metal. Interposed between the rigid rolls (26a, 26b) and pressing bodies (25a, 25b) are nonwoven fabric members (27a, 27b).

Description

Description Sealing equipment for compartment entrances in continuous heat treatment furnaces, continuous vacuum evaporation equipment, etc.

The present invention relates to a continuous heat treatment furnace using an atmosphere gas such as a bright annealing furnace for a metal strip, or a sealing device such as an entrance or an entrance of a continuous vacuum evaporation facility for performing vacuum evaporation under reduced pressure, or an entrance or an entrance of an internal section thereof. Review. Background art

Conventionally, for example, a continuous atmosphere heat treatment apparatus as disclosed in Japanese Patent Publication No. Sho 42-18893, a steel strip as disclosed in Japanese Patent Publication No. Hei 6-48575 In a continuous vacuum vapor deposition equipment such as a continuous vacuum vapor deposition apparatus described above, a seal device is used at the entrance or exit of the section provided therein. Among such sealing devices, a typical prior art of a continuous atmosphere treatment device, particularly a bright annealing furnace, is shown in, for example, FIGS. 13 and 14.

In FIG. 13, a metal bright steel 2 such as stainless steel is continuously passed through a vertical bright annealing furnace 1 and annealed while maintaining a bright state. In the bright annealing furnace 1, in order to prevent oxidation of the metal strip 2, a flammable gas containing hydrogen gas such as a mixed gas composed of 75% of hydrogen gas and 25% of nitrogen gas or ammonia decomposition gas is used. The original atmosphere is maintained. The metal strip 2 is supplied from a payoff reel or the like provided on the upstream side, is changed in direction by a deflector roll 3, and is introduced into the bright annealing furnace 1 via a sealing device 4 on the entrance side. In the bright annealing furnace 1, when the metal strip 2 descends, it is ripened and annealing is performed by a down heat method. The annealed metal strip 2 has a seal It is drawn out to the deflector roll 6 through the device 5, and is wound with the passing direction changed.

FIG. 14 shows the configuration of the sealing device 5 on the outlet side in FIG. The seal device 4 on the inlet side is substantially the same. In the sealing device 5, the base ends of the metal strips 2 of the seal pads 7 a and 7 b in the width direction of the metal plate 2 are air-tightly fixed to the furnace wall 8. The cylinder 9 presses the pair of seal rolls 10a and 10b from both sides of the metal strip 2, respectively. The seal rolls 10a and 10b are also pressed by the seal pads 7a and 7b. The pressing force is adjusted by the pressing adjusting devices 11a and 11b.

Sealing devices 4 and 5 as shown in Fig. 13 are used to shut off the flammable atmosphere gas in the bright annealing furnace 1 from the outside air. Since performing a complete cut-off while allowing the passage plate of metal蒂2 is very difficult, in fact enhanced 1 0 to 5 0 mm H ₂ 〇 degree than the outside air pressure of the atmosphere in the furnace is cut Care is taken so that the ambient gas leaks into the outside air little by little. When water vapor or oxygen in the air enters the bright annealing furnace 1 from the outside air, the metal strip 2 is oxidized in the bright annealing furnace wall 1 and not only cannot perform bright annealing, but also fire, explosion, etc. There is also the danger of a major disaster. In addition, after the bright annealing furnace 1 is damaged due to a fire or the like and the repair is completed, it takes time to recover the dew point of the furnace atmosphere, during which time the bright ripening treatment must be stopped. Thus, in the bright annealing furnace, the performance of the sealing device has a significant effect on production activities. Similarly, in vacuum deposition equipment, etc., as in the bright annealing furnace, the inside of the compartment is maintained at a positive pressure higher than atmospheric pressure, or the interior of the compartment is depressurized or vacuumed for vapor deposition, so the sealing device has an airtightness. is important.

In the case of the sealing devices 4 and 5 as shown in FIGS. 13 and 14, the sealing pads 7a and 7b and the sealing rolls 10a and 10b are made of an elastic material to enhance the sealing function. Use Seal pads 7a and 7b For example, felt or a nonwoven fabric equivalent to felt is used, and a rubber material is used for the seal rollers 10a and 10b, for example. A gap is formed between the seal rolls 10a and 10b at both ends in the width direction of the metal die due to the thickness thereof, so that gas in the furnace easily leaks. In order to improve the sealing performance, it is necessary to reduce the hardness of the rubber, use a soft rubber material, and reduce the gap by the rubber wrapping around the formed gap. The seal made by combining such seal pads 7a and 7b and the seal rolls 10a and 10b has a structure in which a soft rubber material is rubbed with an unwoven cloth. Scratches and fibers of the nonwoven fabric fall off the seal pads 7a and 7b. If the fiber adheres to the metal strip, it is usually not easily removed because of the electrostatic charge, and it is pushed into the rolling rolls in the temper rolling step in the next process, and the surface defects of the metal strip are removed. generate. In order to avoid these, the contact pressure between the seal pads 7a and 7b and the seal rolls 10a and 10b tends to be low, so that a part having a low contact pressure has more furnaces than other parts. A phenomenon occurs in which the atmospheric gas leaks. Also, when the seal rolls 10a and 10b are pressed against the metal band 2 passing between them, the portions which are always in contact with the sharp edge portions at both ends in the width direction of the metal roll 2 are intensively worn. The gas in the furnace easily leaks from the gap between the worn portion and the metal band 2. These leaky parts are likely to be exposed to outside air in sections under reduced pressure such as vacuum evaporation equipment. In addition, as in the bright annealing furnace, in a section where the furnace pressure is higher than in other sections, atmospheric gas is likely to leak to other sections. These are exactly the same phenomena as bright annealing furnaces.

Furthermore, in the sealing device 5 located at the lower part of the vertical bright annealing furnace, refractory pieces such as red-hot brick debris from the bright annealing furnace 1 are subjected to heat treatment. Directly fall, igniting easily the leaked atmosphere gas and the mixed gas of air, and sealing pads 7a, 7b and The seal rolls 10a and 10b are liable to burn or cause a fire. In addition, since the seal pads 7a and 7b and the seal rolls 10a and 10b repeat friction, static electricity is likely to be generated, and a mixture of air and a flammable atmosphere gas is easily generated by the spark discharge. Easily ignited by flammable gas.

An object of the present invention is to provide a heat treatment furnace using an atmosphere gas containing hydrogen gas, a section using the same atmosphere gas containing hydrogen gas, a vacuum atmosphere, a continuous vacuum deposition facility having a reduced-pressure atmosphere section, and the like. To provide a sealing device for the entrance and exit of a compartment such as a continuous heat treatment furnace and a continuous vacuum deposition facility that can enhance the sealing performance of the entrance and exit of the compartment, prevent fires, etc., and secure the sealing performance stably for a long period of time. It is. Disclosure of the invention

The present invention relates to a continuous maturation treatment furnace in which metal dies are continuously passed through and an atmosphere gas is used in the furnace, a continuous vacuum deposition facility for performing vacuum deposition under reduced pressure, or a partitioned inlet and Z or In a continuous heat treatment furnace that provides a pair of elastic rolls that sandwich the metal band outside the opening for passing the metal band at the exit to shut off the inside and outside, sealing devices for compartment entrances such as furnaces and continuous vacuum deposition equipment,

Opposing side walls for sealing the end faces of the pair of elastic rolls by contacting them,

A pair of rigid rolls that are in air-tight contact with each elastic roll, spaced from the metal strip between opposing side walls;

It is characterized by including each rigid roll and an elastic pressing body for hermetically sealing between the furnace body and the compartment casing while being in contact with each rigid roll.

Further, the atmosphere gas of the present invention is characterized in that it contains hydrogen gas. The present invention also provides a pair of additional elastic members disposed between the opposed side walls at an interval outside of the pair of elastic rolls to sandwich a metal band. Rolls,

A pair of intermediate rolls / rollers disposed between the opposing side walls and spaced apart from the metal strip and between the elastic roll and the additional elastic roll / ray, and in airtight contact with each elastic roll and each additional elastic roll. And characterized in that:

Further, according to the present invention, the space formed between the opposed side walls is surrounded by an elastic roll, an additional elastic roll, and an intermediate roll. A supply means for supplying gas, nitrogen gas, or an inert gas is provided.

Further, according to the present invention, the space formed between the opposed side walls is surrounded by an elastic roll, an additional elastic roll, and an intermediate roll. A supply means for supplying a gas, a nitrogen gas, or an inert gas is provided, and an ion generator is mounted in the space.

Further, the present invention is characterized in that a space formed between the opposing side walls by an elastic roll, an additional elastic roll, and an intermediate roll is suctioned by vacuum.

Further, the elastic roll or the additional elastic roll of the present invention includes silicone rubber, fluoro rubber, chloroprene rubber, SBR, NBR, EPDM, polyurethane rubber, isoprene rubber, butyl rubber, polysulfide rubber, chlorosulfonated polyethylene, chlorinated polyethylene, It is characterized by being formed from one kind of elastic body selected from butadiene rubber, acrylic rubber, and hydrin rubber, with the electric resistivity kept by the elastic body itself or by imparting conductivity to the elastic body. And

Further, the elastic roll or the additional elastic roll of the present invention may be formed of silicone rubber, fluorine rubber, One kind of elastic material selected from loroallene rubber, SBR, NBR, EPDM, urethane rubber, izoprene rubber, butyl rubber, polysulfide rubber, chlorosulfonated polyethylene, chlorinated polyethylene, butadiene rubber, acryl rubber, and hydrin rubber The body has the same electrical resistivity as the body itself, or is formed by integrally forming an elastic body with conductivity added to the elastic body in a cylindrical shape, or such elasticity in the form of a cylindrical sleeve It is characterized by being integrally formed by attaching the body.

The specific electric resistance of the elastic body of the elastic roll of the present invention lies in the range of 1~ 1 0 ⁷ Ω cm.

Further, the hardness of the elastic body of the elastic roll of the present invention is 40 specified in JISK6301A. It is characterized by being in the range of ~ 90 ^£ .

In addition, the elastic pressing body of the present invention includes silicone rubber, fluorine rubber, black rubber, black rubber, SBR, NBR, EPDM, urethane rubber, isoprene rubber, butyl rubber, polysulfide rubber, chlorosulfonated polyethylene, chlorinated polyethylene, and butadiene rubber. One type of elastic body selected from acrylic rubber, hydrin rubber, or a sponge-like elastic body of a fine cell obtained by foaming one type of elastic body selected in the same manner, the electric resistivity value of the elastic body itself Mamaka, or characterized in that it is formed so as to impart conductivity in the range of electrical resistivity 1~ 1 0 ⁷ Ω · cm in elastic body.

Further, the elastic pressing body of the present invention is characterized in that a surface of the elastic body or the sponge-like elastic body has a coating layer of a nonwoven fabric having a thickness of 2 Omm or less.

Further, the nonwoven fabric of the elastic pressing body of the present invention is characterized in that it has a self-extinguishing property when the LOI value, which is the limiting oxygen index, is 26 or more.

Further, the hardness of the elastic body of the elastic pressing body or the sponge-like elastic body of the elastic pressing body of the present invention is 10 to 50 ° specified in JISS 6050. It is characterized by being.

Further, the conductivity of the elastic body of the elastic roll and the elastic pressing body or the sponge-like elastic body of the elastic pressing body of the present invention is provided by mixing carbon.

Further, at both ends of the elastic roll of the present invention in the axial direction, an elastic disk and a slip disk are interposed between the elastic roll end face and the side wall.

Further, the present invention provides a first flange portion which comes into contact with an elastic roll end face which is incorporated as each member constituting the elastic roll end sealing device, and an axially outward portion from an outer peripheral portion of the first flange portion. An outer skin member having a first sleeve portion extending to the outer surface and made of an elastic material;

The second flange portion, which is axially outward from the first flange portion and is in contact with the outer surface of the first flange portion, and the second sleeve portion extending axially outward from the outer peripheral portion of the second flange portion. A first support member made of a material having rigidity;

The third sleeve portion interposed between the shaft and the second sleeve portion in the axial direction outside of the second flange portion, and the radial direction of the elastic roll from the axially outer end face of the third sleeve portion to the third sleeve portion. A second support member having a third flange portion extending to the second member and made of a rigid material;

An outer bearing interposed between the third sleeve portion and the second sleeve portion and receiving radial force and thrust force;

An inner bearing interposed between the third sleeve portion and the shaft,

At least both ends in the axial direction of the elastic roll are interposed between the side wall and the third flange portion of the second support member, and at least a radially outer side of the elastic roll has an end sealing member made of a material having elasticity. It is characterized by being prepared for.

In addition, the present invention provides a rigid roll having a smooth chrome-coated layer, It is characterized by a sprayed carbide layer or stainless steel.

According to the present invention, the surface of the metal band is hermetically sealed while allowing the metal band to pass through the pair of elastic rolls. A rigid port and an elastic pressing body are provided between the elastic roll and the furnace body or the compartment caging. The rigid roll is provided at a greater distance from the surface of the metal band than the elastic roll, and seals by being in airtight rotational contact with the elastic roll. The elastic pressing body hermetically seals the space between the furnace body and the compartment casing while contacting the rigid steel. The surface of the rigid roll is finished very smoothly with a hard material such as metal.If the surface layer of the elastic pressing body has a coating layer of non-woven fabric, the coefficient of friction between the non-woven fabric and the non-woven fabric even if it comes into rotational sliding contact Very small. Therefore, even if it is pressed strongly, the fibers of the nonwoven fabric do not come off and do not fluff. If the surface of the rigid roll is a conductor and is grounded through a drill shaft or the like, there is no static charge, and even if it is an insulator, the charged potential is very low and does not pose a problem. In addition, the surface of the rigid roll, which is a hard material such as metal, is not damaged by the nonwoven fabric fibers even if the elastic pressing body is strongly pressed. Furthermore, both the rigid mouth and the elastic pressing body are less consumed by friction. As a result, the rigid row / roll and the elastic pressing body are pressed sufficiently strongly, and a stable seal can be maintained for a long time.

Further, according to the present invention, since the atmosphere gas contains hydrogen gas, if it leaks to the outside air and mixes with the outside air, it becomes easy to explode and burn, but the sealing property between the rigid roll and the elastic pressing body or the elastic roll is improved. Gas leakage is reduced and safety can be improved.

Further, according to the present invention, a pair of intermediate rolls interposed between the pair of elastic rolls and the additional elastic roll further allows outside air to be provided outside the sealing portion between the pair of elastic rolls and the metal band. A space to cut off is formed, Leakage of air into the outside air can be reduced. In addition, this space is supplied with an inert gas, an atmosphere gas of an atmosphere aging furnace or a gas or a nitrogen gas similar to the atmosphere gas (hereinafter collectively referred to as an inert gas), or a corona discharge gas. This can reduce the electrostatic charge due to the neutralizing action of the ion, or can evacuate this space to strengthen the cutoff between the compartment casing and the outside air and enhance safety.

Further, according to the present invention, since the rubber material of the elastic roll or the additional elastic roll has conductivity, spark discharge due to static electricity is less likely to occur, and the danger of explosion and the like is reduced even if flammable atmospheric gas leaks. And increase safety.

Further, according to the present invention, since the elastic roll or the additional elastic roll is formed by running or integrally forming a rubber material having conductivity on the surface, spark discharge due to static electricity is less likely to occur, and a flammable atmosphere is formed. The risk of explosion in the event of a gas leak can be reduced.

Also according to the present invention, the elastic pressure member is a rubber material or sponge-like elastic body of the foamed fine fine cell, the electrical resistivity 1~ 1 0 ⁷ Ω. Since a conductive ranging cm In addition, spark discharge due to static electricity is unlikely to occur between the rigid roll and the roll, thereby improving safety in the event of a flammable atmosphere gas leaking.

Further, according to the present invention, since the nonwoven fabric coating layer having a thickness of 20 mm or less is provided on the surface of the elastic body or the sponge-like elastic body, the airtight nonwoven fabric coating layer is relatively thin, and the sealing property can be improved. .

Further, according to the present invention, the nonwoven fabric has a self-extinguishing property when the LOI value, which is the limiting oxygen index, is 26 or more, so that even if a fire occurs in the air, it is extinguished naturally and the safety can be improved. .

According to the present invention, the hardness of the elastic body or the sponge-like elastic body is JIS. Since it is 10 ° to 50 ° specified in S650, it can be sufficiently contacted with the elastic roll to perform airtight sealing sufficiently.

Further, according to the present invention, the conductivity of the elastic body or the sponge-like elastic body is imparted by mixing a rubber. If carbon is added to the rubber material, wear resistance and the like are also improved, so that stable sealing properties can be maintained for a long period of time.

According to the invention, the elastic roll and the slip disk are interposed between the end face of the elastic roll and the casing at both ends in the axial direction of the elastic roll. The hermetic sealing between the casing and the casing can be performed by the elastic disc while permitting the sealing.

Further, according to the present invention, at both ends in the axial direction of the elastic roll, a skin member and an end surface sealing member made of a material having elasticity between the elastic roll end surface and the side wall, and a first material made of a rigid material are provided. Includes a support member and a second support member, an outer bearing that receives radial and thrust forces, and an inner bearing that receives radial forces.Separates the hermetic sealing function from the bearing function to improve sealing performance and rotational load. Can be reduced. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a front sectional view of a first embodiment of the present invention, FIG. 2 is a partial bottom view of the first embodiment, and FIG. 3 is a front sectional view of a second embodiment of the present invention. 4 is a side view of the second embodiment, FIG. 5 is a front sectional view of the third embodiment of the present invention, FIG. 6 is a side view of the third embodiment, and FIG. 7 is a third embodiment. FIG. 8 is a partial perspective view of an example, FIG. 8 is a side sectional view of a fourth embodiment of the present invention, FIG. 9 is a front sectional view of a fifth embodiment of the present invention, and FIG. FIG. 11 is a partial plan sectional view of a fifth embodiment, and FIG. 11 is a front sectional view of a sixth embodiment of the present invention. Fig. 12 is a graph showing the material corresponding to the LOI value, Fig. 13 is a simplified cross-sectional view showing the basic formation of the bright annealing furnace, and Fig. 14 is It is a front view of the sealing device of an entrance / exit. BEST MODE FOR CARRYING OUT THE INVENTION

FIG. 1 shows a front sectional view of a first embodiment of the present invention, FIG. 2 shows a bottom view of a main part of the first embodiment, and FIG. 3 shows a front sectional view of a second embodiment of the present invention. 4 shows a side view of the second embodiment, FIG. 5 shows a front sectional view of the third embodiment of the present invention, FIG. 6 shows a side view of the third embodiment, and FIG. 7 shows a third embodiment. FIG. 8 shows a partial perspective view of the example, FIG. 8 shows a side sectional view of a fourth embodiment of the present invention, FIG. 9 shows a front sectional view of a fifth embodiment of the present invention, and FIG. FIG. 11 shows a partial plan cross-sectional view of a fifth embodiment, FIG. 11 shows a front cross-sectional view of a sixth embodiment of the present invention, and FIG. 12 shows a material corresponding to the limiting oxygen index LOI value.

In the drawings, corresponding parts are denoted by the same reference numerals. In addition, if the reference mark is formed by adding the same reference number with a or b suffix, it indicates that the reference exists symmetrically as a pair on both legs with a metal band in between. They may be collectively referred to using only reference numbers.

In the sealing device 20 according to the first embodiment of the present invention shown in FIG. 1 and FIG. 2, the hermetic sealing is performed while passing a metal 22 such as stainless steel at the entrance or exit of the bright annealing furnace 21. The partition 23 of the bright annealing furnace 21 is provided with an opening 23A for passing through metal dies, and a sealing device 20 is installed outside the opening 23A. Side walls 24 are provided on both sides of the metal strip 22 in the width direction. Pressing bodies 25a and 25b and rigid rolls 26a and 26b are provided between the side walls 24. The pressing members 25a and 25b are made of a rubber-based elastic material, and the rigid rolls 26a and 26b are, for example, metal rolls.

Pressing body 25a, 25b and rigid roll 26a, 26b Non-woven cloth 2 7 a, 27b, and hermetically sealed. Although the longer the contact part, the better the sealing performance due to the labyrinth effect, considering the ease with which the pressing bodies 25a and 25b can come off, it may be about half the outer circumference of the rigid rolls 26a and 26b. preferable. Rigid rolls 26a, 26b have smooth surfaces For example, JISB 003 1 (1 982) Ra 1.6a, Rmax 6.3S, Rz 6, 3Z or less chrome (Cr) plated rigid roll Therefore, even if a long contact portion is formed, the coefficient of friction is small (for example, rubber: non-woven fabric; u 0.5, Cr plating: non-woven fabric is 〃 0.05). It is difficult for the fibers to come off from the nonwoven fabrics 27a and 27b, and the removed fiber scraps may adhere to the surface of the metal dies 22 and be pressed against the metal strips 22 by the rolling mill roll in the next process, which may cause indentations and deteriorate the quality. Less. Therefore, even if it is strongly pressed, if the surface of the rigid roll is a conductor and is grounded through a roll shaft etc., there is no static charge, and even if it is insulated, the charged potential is extremely low. , Does not matter. It has abrasion resistance, has a long life, and can be used stably for a long time. In addition, the roll surface of chrome plating, tungsten carbide, and stainless steel does not generate 、, and smooth rotational sliding is always possible. Rigid roll 26a

26b rotates around the shafts 28a and 28b, and is pressed against the elastic rolls 30a and 30b by the cylinders 29a and 29b to perform hermetic sealing. The elastic rolls 30a and 30b are made of a rubber-based elastic material, and press the metal strip 22 from both sides. As a result, the metal band 22 and the elastic roll 30a,

A hermetic seal between 30 b is performed.

The pressing force of the pressing members 25a, 25b to the rigid rolls 26a, 26b can be adjusted by the pressing force adjusting devices 3la, 31b. Pressing body receiving stoppers 32a and 32b are provided above the pressing bodies 25a and 25b. On the back side of the pressing bodies 25a and 25b, pressing body frames 33a and 33b are provided. It receives the pressing force from the pressing adjustment devices 31a and 31b. The connection frames 34a, 34b are provided with screw holes that oval the pressure adjusting devices 31a, 31b. The axes 35a, 35b of the elastic rows / layers 30a, 3Ob are also displaceable on both sides of the metal strip 22 in a direction perpendicular to the surface. The bearing 36 for fixing the shafts 28a and 28b of the rigid rolls 26a and 26b is attached to a slide plate 37 connected by connecting frames 34a and 34b.

As shown in FIG. 3, in the sealing device 40 according to the second embodiment of the present invention, the pressure adjusting devices 41a and 41 are arranged such that the substantially horizontal seal pads 42a and 42b are connected to the rigid rolls 26a and 26b. Press b. S / rev 42 a, 4

2 b is made of a rubber-based elastic material, and its surface is made of non-woven fabric 43 a, 4

3 b is pasted. The length of the contact portion between the nonwoven fabrics 43a and 43b and the rigid rolls 26a and 26b is preferably 1Z15 or more on the outer periphery of the rigid rolls 26a and 26 from the viewpoint of sealing performance.

As shown in FIG. 4, in the sealing device 40 of the second embodiment, the hermetic sealing of both ends in the axial direction of the rigid rolls 26a and 26b and the elastic rolls 30a and 30b is performed by using, for example, Teflon (PTFE). E) or a pair of slip disks 44A, 44B with Teflon as the main component; 45A, 45B, and elastic made of rubber material with hardness of about 55, for example, JISK 6301A Disks 44 C and 45 C are interposed between the side walls 24. Slip discs 44A, 44B; 45A, 45B can be combined with a pair of Teflon-based two-pieces so that they slip together with each other, as well as a combination of metal and a resin mainly composed of fluororesin. If it is made of a material that is rigid and slips easily with each other, it can also be used. When using fluororesins, it is preferable to use a resin having an electrostatic specific resistance of about 1 to 10 ⁷ Ω · cm to prevent static electricity. Elastic disk 44 44 C; 45 C is formed from a rubber-based elastic material. The sealing is performed while the sliding disks 44A, 44B and the slip disks 45A, 45B are in rotational sliding contact with each other, while the elastic disks 44C, 45C are formed by a moderate elastic repulsive force. Press the slip disks 44A, 44B; 45A, 45B to close the gaps and perform airtight sealing. Such a sealing structure at both ends in the axial direction can be similarly applied to the first embodiment and other embodiments. As for the connecting frame 34, each roll has a connecting frame for connecting the bearing 47 to the shaft 35 in the same manner as connecting the bearing 36 and the slide plate 37 to the shaft 28 (only the connecting frame 34 is shown). ).

As shown in FIG. 5, FIG. 6 and FIG. 7, in the sheathing / repelling device 50 according to the third embodiment of the present invention, an additional elastic roll is provided outside the first elastic rolls 51a and 51b. 2 Elastic rolls 52a and 52b are provided, and rigid rolls 53a and 53b, first elastic rolls 51a and 51b and a second elastic roll are provided inside the first elastic rolls 51a and 51b. Intermediate rolls 54a and 54b are respectively provided between 52a and 52b to form a buffer space 5OA with the outside air.

First and second elastic rolls 5 l a, 5 1 b; axes of 52 a, 52 b 5 5

The shafts 58, 57 of 56, and the rigid and intermediate rolls 53a, 53b; 54a, 54b are journaled by bearings 59, 60, 61, 62. In addition, each of the shafts 55, 56, 58, and 57 has a slip disk 63A, 63B; 64A, 64B; 65A, 65B; 66A,

66 B and elastic disks 63 C; 64 C; 65 C; and 66 C are hermetically sealed at both ends in the axial direction. The bearings 59, 60, 61, 62 are mounted on the guide frame 37c via the slide plates 67, 68, 69, 70. As shown in FIG. 8, in the fourth embodiment of the present invention, an ion generator 71 is attached to a space 50 A of the third embodiment, and supplied from an inert gas supply device 72 through a pipe 73.ィ Ion generated by corona discharge with high voltage power from the high voltage power supply 74 is added to the inert gas to neutralize the static electricity and remove it. In this space 5 OA, only an inert gas may be supplied. In particular, if it is provided on the inlet side, air outside the compartment brought into contact with the surface of the metal strip 22 and water vapor contained in the air It has the effect of cleaning the outside air such as oxygen. Further, the space 50 A may be suctioned by vacuum. In a decompression zone or a vacuum zone of a vacuum evaporation facility, it is difficult for outside air to enter the facility or the compartment.

As shown in FIG. 9, the sealing device 80 according to the fifth embodiment of the present invention is similar to the third and fourth embodiments in that a space 80 A is formed, and the first intermediate roll 53 a , 53b and the seal pads 42a, 42b are similar to the second embodiment. In the third to fifth embodiments, the spaces 5 OA and 8 OA between the elastic rolls 51 a and 51 b; 52 a and 52 b are one, but an intermediate roll and an elastic roll are added. Then, more similar spaces can be provided. For example, it is possible to efficiently realize a multiple-type sealing device used for vacuum deposition equipment and the like as in the prior art of Japanese Patent Publication No. 6-48575.

FIG. 10 shows the configuration of an elastic row / roller end face sealing device 99 for hermetically sealing both ends of the shafts 55 a and 55 b of the first elastic rolls 5 la and 51 b in the fifth embodiment. Is shown. The elastic roll 51a forms a coating 81 made of a rubber-based elastic material on the surface of a metal roll 82 composed of a disk 82A and a cylinder 82B. An outer cover member 85 made of a rubber-based elastic material and having a first inward flange portion 83 and a first sleeve portion 84 is mounted on the outer side of the disk 82A in the axial direction. Inward of the outer covering member 85 in the radial direction is a second inward A first metal support member 88 having a flange portion 86 and a second sleeve portion 87 is attached. A metal second holding member 91 having a third sleeve portion 89 and a third outward flange portion 90 is mounted radially inward of the first support member 88. An end face sealing member 92 made of a rubber-based elastic material is mounted outside the second support member 91 in the axial direction. The terms “inward” or “outward” used to describe the first, second, and third flanges refer to inward or outward, respectively, with respect to the respective axial direction. The direction can be reversed inside and outside.

The first inward flange portion 83 hermetically seals between the axial end surface of the first elastic roll 51 and the second inward flange portion 86. The first sleeve portion 84 is in close contact with the surface of the second sleeve portion 87. The third outward flange portion 900) The inner surface of the end face sealing member 92 is in close contact with the outside in the axial direction. The outer peripheral surface of the third outward flange portion 90 is provided with a tapered slope. The surface sealing member 92 is in direct contact with the tip. Instead of making direct contact, a Teflon or Teflon-based disc (not shown, for example, with a thickness of l to 2 mm, the outer diameter of which is about the same as the outer diameter of the third outward flange portion 90) is connected to the third outward flange portion. It can be installed inside the 90 axial direction to reduce frictional resistance and make it more resistant to wear. The axial length of the second sleeve portion 87 is shorter than the axial length of the third sleeve portion 89 so that its end face does not contact the third outward flange portion 90. Also, a step is formed on the surface of the second inward flange portion 86 so that the end surface of the third sleeve portion 89 does not contact the second inward flange portion 86.

A gap is provided between the second sleeve portion 87, the third sleeve portion 89, and the shaft 55. An outer bearing 93 made of a clear ball bearing is interposed between the second sleeve portion 87 and the third sleeve portion 89, and the radial force and shaft It bears the thrust force in the linear direction. A retaining ring 94 is used on the inner ring side of the outer bearing 93 so that the position is not shifted by the thrust force. The outer ring side of the outer bearing 93 is in contact with the thick portion of the second inward flange portion 86. Between the third sleeve portion 89 and the shaft 55, inner bearings 95, 96 are interposed. The inner bearings 95, 96 are fitted to the inner surface of the third sleeve portion 89 to bear the radiator / recorder. For hermetic sealing between the second sleeve portion 87 and the third sleeve portion 89, a lip seal 97 made of a material mainly containing NBR or PTFE (Teflon) can be provided. The elastic roll end face sealing device 99 can be used for a rigid roll and an intermediate roll with exactly the same structure. It can be used even if the roll side and the non-roll side are switched. In that case, the inner bearing can be omitted. That is, the slip disks (44A, 44B, etc.) and the elastic disks (44C, 45C) of FIG. 4 (second embodiment) and the slip disks (63A, 63C) of FIG. 6 (third embodiment) are used. B, etc.) and elastic discs (63C, 64C, 65C, 66C) can be used in place of the combination, and can of course be used in the first embodiment and other embodiments of the present invention.

The coating 81 is integrally formed by coating the rubber-based elastic body cylindrically in the axial direction of the cylinder 82B, that is, in the body length direction of the outer peripheral surface of the metal roll 82. It can also be formed by attaching a cylindrical sleeve-like rubber-based elastic body to the outer periphery of the metal roll 82. In addition, a coating can be formed directly on the outer periphery of the metal shaft. In the first to fourth embodiments, similar birch elastic ports can be used as the first elastic roll or the second elastic roll.

As shown in FIG. 11, the sealing device 100 according to the sixth embodiment of the present invention is similar to that of the second embodiment, but has the inside of the elastic rolls 30a and 30b closer to the opening 23A. On the other hand, the first rigid rolls 101a, 101b and O The second rigid mouthpieces 102a and 102b are in contact with each other, and the combination with the seal pads 104a and 104b affixed to the surface of the seal hardware 103a and 103b. A space 100 OA can be formed to provide a double seal against the outside air, and an inert gas is injected into this space 100 A, or this space 100 A is evacuated (illustrated) The feature is that the space between the outside air and the compartment is more airtightly sealed. The first and second rigid rolls 101 and 102 are made of metal, and the seal pad 104 is made of a nonwoven fabric such as hues / reto. Also, in the sixth embodiment shown in FIG. 11, the elastic-port-end-face sealing device 99 shown in the fifth embodiment shown in FIG. 10 includes the first rigid rows / layers 101 a, 101 b and The second rigid rolls 102a and 102b and the elastic D-roll 30a ₍ 30b can be used in the same manner as in the first to fourth embodiments, and the elastic rolls 30a and 30b The configuration of b is exactly the same as in the fifth embodiment, as in the first to fourth embodiments.

The rubber-based elastic material such as the elastic rolls 30, 51, 52, the pressing body 25, and the seal pad 42 in each of the above-mentioned embodiments includes silicon rubber, fluorine rubber, chloroprene rubber, SBR, NBR, EPDM Synthetic rubber or natural rubber selected from urethane rubber, isoprene rubber, butyl rubber, polysulfide rubber, chlorosulfonated borylene, chlorinated polyethylene, butadiene rubber, acryl rubber, and hydrid rubber can be used. If conductivity is imparted by adding carbon or metal powder, spark discharge due to static electricity is less likely to occur. If the rubber itself has conductivity, it may be used as it is. Conductivity, arbitrariness preferred that an electrical resistivity in the range of 1~ 1 0 ⁷ Ω · cm. When the electric resistivity is smaller than this range, sparks are easily generated when static electricity is generated in the surroundings, and when it is large, the static electricity is charged and sparks are easily generated.

Hardness as rubber when used as elastic rolls 30, 51, 52 Is 40 specified in A of JISK6301. ~ 90. Is preferably within the range. When used as the pressing body 25, the sealer, and the tape 42, the hardness of the rubber is preferably in the range of 10 to 50 ° specified in JISS 600, and is fine. It is preferable to generate a sponge shape by generating simple closed cells. If the hardness is lower than these ranges, the strength is insufficient and sufficient sealing properties cannot be obtained. If the hardness is higher than these ranges, the flexibility is insufficient and sufficient sealing performance cannot be obtained. As shown in Fig. 12, the self-extinguishing properties of various materials are based on the limit oxygen index, L 0 I Evaluated by value. The non-woven fabric 27 on the surface of the pressing body 25, the non-woven fabric 43 on the surface of the seal pad 42, and the seal pad 1 の 4 on the surface of the sealing hardware 103 are exposed to a flame in the event of a fire. It is preferable to use a material that meets the condition that the LOI value indicated by Α in the figure is 26 or more, that is, the minimum oxygen volume percentage required for the fiber to maintain combustion is 26% or more. . Suitable materials are, for example, aromatic polyamide (Alamide), Bolif X-diene sulfide (PPS), a blend of aromatic polyamide and carbon fiber, and carbon fiber. 5. C, of which the para-type is 43 CTC and the meta-type is 371. The meta-type decomposes at C and self extinguishes, and vitreous fiber is inactive below 300 ° C. It has sufficient heat resistance in the case of a short-time fire within only 10 seconds of the sealing device.Since the non-woven fabric is breathable, the thickness is 2 Omm or less, and it is made as thin as possible and breathable. Is preferably reduced.

Of the rubber-based elastic materials, EPDM, chloroprene rubber, chlorosulfonated polyethylene, chlorinated polyethylene, hydrin rubber, silicone rubber, or fluoro rubber are used to provide good flame resistance. Even if the fire occurs after the leaked hydrogen gas mixes with oxygen in the air and ignites, supply nitrogen gas into the bright annealing furnace 21 or blow carbon dioxide gas from the fire extinguishing equipment. Until the fire is extinguished in a relatively short time, there will be no scorching, melting or material change on the surface of the seal C7 //. Industrial applicability

As described above, according to the present invention, the space between the metal strip and the compartment casing is hermetically sealed by the elastic roll / roll, the rigid roll, and the elastic pressing body. Sliding contact between the elastic pressing body and the rigid roll is performed by a nonwoven fabric and a rigid material of a rigid roll having a smooth surface, so that the coefficient of friction is small and the fibers of the nonwoven fabric do not come off. A stable sealing performance can be exhibited for a long period of time without wear. Therefore, long-term stable production activities can be achieved.

Further, according to the present invention, in a continuous heat treatment furnace using an atmosphere gas containing hydrogen gas, a plurality of seals can be simply provided, and the sealing performance can be improved. Therefore, the safety can be improved, the gas and energy consumption required for maintaining the atmospheric gas pressure and the vacuum pressure can be reduced, and the economic efficiency can be improved.

Further, according to the present invention, a space is formed outside the elastic roll by the intermediate roll and the additional elastic roll, so that the internal atmosphere and the outside air can be more reliably shut off.

Further, according to the present invention, an inert gas can be injected into the space or a vacuum can be suctioned into the space, so that the internal compartment and the outside air can be more reliably shut off. In addition, when injecting an inert gas, an ion generator is installed in the space, so that even if static electricity is generated, the ion generator can be neutralized and a fire-resistant seal can be provided.

Further, according to the present invention, the elastic roll or the additional elastic roll is used as it is for various rubbers or in a state where conductivity is further imparted. This As a result, sparks due to static electricity are less likely to occur, and even if flammable furnace gas leaks, fires and other disasters are less likely to occur, improving safety.

Further, according to the present invention, since a conductive rubber layer is provided on the outer peripheral surface of the metal shaft or the metal roll, it is possible to prevent occurrence of spark discharge due to static electricity while sealing the space between the metal roll or the rigid rolls well. be able to.

Further, according to the present invention, since the surface of the elastic pressing body has a coating layer having a thickness of 20 mrn or less, there is no frictional resistance between the elastic roll and the rigid roll, and the air permeability is low without fear of quality deterioration such as hair loss. In addition, according to the present invention, the nonwoven fabric has an L〇I value of 26 or more according to the present invention. Even if a flammable atmosphere gas leaks into the surrounding area and a fire or the like occurs, its self-extinguishing properties can prevent its spread, improving safety and minimizing fire damage. Can be fastened.

According to the present invention, the elastic body or the sponge-like elastic body has a hardness of JIS.

10 ° to 50 ° specified in S650. Therefore, it is possible to exhibit a stable sealing performance with an appropriate profile for a long period of time.

Further, according to the present invention, since the conductivity of the elastic body or the sponge-like elastic body is imparted by mixing the rubber, mechanical properties such as abrasion resistance are also improved and stable for a long time. It can exhibit excellent sealing performance.

Further, according to the present invention, the elastic disk and the slip disk are interposed on the end face in the axial direction between the elastic roll and the side wall, and reliable airtight sealing can be performed while allowing the elastic roll to rotate. Therefore, an inexpensive sealing device having a simple structure can be provided.

Further, according to the present invention, between the end face in the axial direction of the elastic roll and the side wall, the outer bearing is used as an elastic roll end face sealing device so as not to increase the rotational load. Since internal and internal bearings are provided, and a member for improving the sealing performance is provided, it is possible to improve the sealing performance and reduce the rotational load. Therefore, the power energy required for the rotation can be saved, and the tension disturbance of the metal band or the like passed through the partition can be minimized, so that the product quality can be improved.

From these facts, by adopting the present invention, a sealing device with good economy, durability and safety can be provided, so that the industrial value is large.

Claims

The scope of the claims

1Continuous heat treatment using an atmosphere gas in the furnace with a continuous metal strip passing through the furnace ゃ Continuous vacuum deposition equipment that performs vacuum deposition under reduced pressure, or the metal at the inlet and / or outlet defined inside In a continuous heat treatment furnace that provides a pair of elastic rolls that sandwich a metal band outside the band passage opening to shut off the inside and outside, sealing devices at the entrance and exit of compartments such as continuous vacuum evaporation equipment,

A pair of rigid rolls / layers that are in airtight contact with each elastic roll, spaced from the metal strip between opposing side walls;

A partition for a continuous heat treatment furnace, a continuous vacuum vapor deposition facility, etc., characterized by including each rigid roll and an elastic pressing body for hermetically sealing the space between the furnace body or the partition casing while contacting each rigid roll / layer. Sealing device.

2. The apparatus according to claim 1, wherein the atmosphere gas contains hydrogen gas.

3. Between the opposed side walls, a pair of additional elastic rows / layers, which are arranged outside of the pair of elastic rolls and sandwich the metal band, and between the opposed side walls, The method according to claim 1 or 2, further comprising a pair of intermediate rolls disposed between the elastic roll and the additional elastic roll at a distance from the metal strip, and each of the elastic rolls and the additional elastic roll are in airtight contact with each other. Sealing equipment at the entrance and exit of compartments such as the continuous maturation furnace and continuous vacuum evaporation equipment described in 2.

4. Between the opposing side walls, surrounded by elastic rolls, additional elastic rolls / layers, and intermediate rows / layers, and in the space formed between them, the atmosphere gas or atmosphere of the atmosphere ripening furnace A supply means for supplying a gas similar to a gas, a nitrogen gas, or an inert gas is provided. 4. A sealing device for a compartment entrance such as a continuous processing furnace, a continuous vacuum evaporation facility, or the like according to any one of claims 1 to 3.

5-Between the opposing side walls, surrounded by elastic rolls, additional elastic rolls, and intermediate rolls, the space formed between them is similar to the atmosphere gas or gas of the atmosphere heating furnace. The continuous heat treatment according to any one of claims 1 to 3, wherein supply means for supplying gas, nitrogen gas or inert gas is provided, and an ion generator is mounted in the space. Furnace, sealing equipment for compartment entrances such as continuous vacuum evaporation equipment

6. The space formed between the opposing side walls and surrounded by an elastic roll, an additional elastic roll, and an intermediate roll, and a space formed in the middle thereof is vacuum-suctioned. Sealing equipment for compartment entrances such as the continuous heat treatment furnace and continuous vacuum evaporation equipment described in 2.

7. The elastic roll or the additional elastic roll can be made of silicone rubber, fluorine rubber, chloroprene rubber, EPDM, urethane rubber, isoprene rubber, butyl rubber, polysulfide rubber, chlorosulfonated polyethylene, chlorine in SBR, NBF From one kind of elastic material selected from polyethylene, butadiene rubber, acrylic rubber, and hydrin rubber, the elastic material itself retains the very small electrical resistivity value, or the elastic material has conductivity. 7. The sealing device for an entrance and exit of a compartment such as a continuous aging treatment furnace or a continuous vacuum evaporation facility according to claim 1, wherein

8-The elastic rolls or the additional elastic rolls may be arranged in the body length direction of the metal shaft or the outer peripheral surface of the metal roll, such as silicon rubber, fluoro rubber, black pi-prene rubber, SBR, NBFEPDM, urethane rubber, and izoprene rubber. , Rubber, polysulfide rubber, chlorosulfonated polyethylene, chlorinated polyethylene, butadiene rubber, acryl rubber, and hydridone rubber, and the electrical resistivity of the elastic body itself. Leave it, Alternatively, the elastic body may be formed integrally by covering the elastic body with conductivity imparted in a cylindrical shape, or may be integrally formed by mounting such an elastic body having a cylindrical sleeve shape. 7. The apparatus according to claim 1, wherein the continuous heat treatment furnace, the continuous vacuum deposition equipment, and the like have an entrance / exit slot / L apparatus.

9. The continuous heat treatment furnace according to any one of claims 1 to 8, wherein an electric resistivity value of the elastic body of the elastic roll is in a range of 1 to 10 Ω. Sealing device at the entrance of the compartment.

10. The continuous material according to any one of claims 1 to 9, wherein the hardness of the elastic body of the elastic roll is in a range of ⁴⁰ 'to ^{90 °} specified in ^JISK6301A. Sealing equipment for compartment entrances such as heat treatment furnaces and continuous vacuum evaporation equipment.

1 1. The elastic pressing body is made of silicone rubber, fluorine rubber, black rubber, SBR, NBR, EPDΜ, urethane rubber, isoprene rubber, butyl rubber, polysulfide rubber, chloros / polyethylene chlorinated, chlorinated. One type of elastic body selected from polyethylene, butadiene rubber, acrylic rubber, and hydrin rubber, or a sponge-like elastic body of fine cells obtained by foaming one type of elastic body similarly selected The elastic body is formed so as to have an electrical resistivity of 1 to 10 ⁷ Ω-cm by keeping electrical resistivity or by imparting conductivity to the elastic body. 10. A sealing device at a compartment entrance such as a continuous ripening furnace, a continuous vacuum evaporation facility, or the like according to any one of 10.

12. The elastic pressing body has a coating layer of a nonwoven fabric having a thickness of 20 mm or less on a surface of the elastic body or the sponge-like elastic body. Sealing equipment at the entrance and exit of continuous thermal furnaces, continuous vacuum evaporation equipment, etc.

13. The continuous aging treatment furnace according to any one of claims 1 to 12, wherein the nonwoven fabric of the elastic pressing body has a self-extinguishing property with a LOI value of 26 or more, which is a limiting oxygen index. Equipment for the entrance / exit of compartments such as continuous vacuum evaporation equipment.

14. The hardness of the elastic body of the elastic pressing body or the sponge-like elastic body of the elastic pressing body is 10 ° to 50 ° specified in JIS S650. The sealing device for a compartment entrance / exit of a continuous heat treatment furnace, a continuous vacuum deposition facility, or the like according to any one of claims 1 to 13, characterized in that:

15-The conductive property of the elastic body of the elastic row / layer and the elastic pressing body or the sponge-like elastic body of the elastic pressing body is provided by mixing carbon. 4. A sealing device for the entrance and exit of a compartment of a continuous heat treatment furnace or a continuous vacuum evaporation facility according to any one of 4.

16. An elastic disk and a slip disk are interposed between an end face of the elastic roll and a side wall at both ends in the axial direction of the elastic roll, according to any one of claims 1 to 15, wherein Sealing device for compartment entrances such as continuous heat treatment furnaces and continuous vacuum deposition equipment.

17. The first flange portion that comes into contact with the elastic roll end surface, which is incorporated as each member constituting the elastic roll end sealing device, and the axially outward direction from the outer peripheral portion of the first flange portion. An outer skin member having a first sleeve portion extending and made of a resilient material;

The second flange portion, which is axially outward from the first flange portion and is in contact with the outer surface of the first flange portion, and the second sleeve portion that extends axially outward from the outer peripheral portion of the second flange portion. A first support member made of a material having rigidity;

The third sleeve portion interposed between the shaft and the second sleeve portion outside the second flange portion in the axial direction, and the axially outer end of the third sleeve portion. A second support member having a third flange portion extending in a radial direction of the elastic roll from the surface, and a second support member made of a rigid material;

An inner bearing interposed between the third sleeve portion and the shaft,

At least both ends in the axial direction of the elastic roll are interposed between the side wall and the third flange portion of the second support member, and at least a radially outer side of the elastic roll has an end sealing member made of a material having elasticity. The sealing device for a compartment entrance of a continuous heat treatment furnace, a continuous vacuum deposition facility, or the like according to any one of claims 1 to 15, characterized in that:

18. The continuous ripening treatment according to any one of claims 1 to 17, wherein the surface of the rigid roll is a smooth chromium-plated layer, a tungsten single-sprayed layer, or stainless steel. Sealing device for entrances and exits of furnaces, continuous vacuum evaporation equipment, etc.