WO1996021238A1 - Electron beam device with single crystal window and matching anode - Google Patents
Electron beam device with single crystal window and matching anode Download PDFInfo
- Publication number
- WO1996021238A1 WO1996021238A1 PCT/US1996/000272 US9600272W WO9621238A1 WO 1996021238 A1 WO1996021238 A1 WO 1996021238A1 US 9600272 W US9600272 W US 9600272W WO 9621238 A1 WO9621238 A1 WO 9621238A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- membrane
- fluid
- major surface
- single crystal
- electrons
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
- B29C71/04—After-treatment of articles without altering their shape; Apparatus therefor by wave energy or particle radiation, e.g. for curing or vulcanising preformed articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
- H01J33/02—Details
- H01J33/04—Windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
- H01J5/18—Windows permeable to X-rays, gamma-rays, or particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
- B29C2035/0877—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation using electron radiation, e.g. beta-rays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2007/00—Flat articles, e.g. films or sheets
- B29L2007/008—Wide strips, e.g. films, webs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L2031/3462—Cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/16—Vessels
- H01J2237/164—Particle-permeable windows
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU47495/96A AU685350B2 (en) | 1995-01-05 | 1996-01-03 | Electron beam device with single crystal window and matching anode |
JP52126596A JP3899524B2 (en) | 1995-01-05 | 1996-01-03 | Electron beam device with single crystal window and matching anode |
DE69635189T DE69635189T2 (en) | 1995-01-05 | 1996-01-03 | ELECTRON BEAM UNIT WITH A CIRCULAR WINDOW AND ADJUSTED ANODE |
EP96903392A EP0871972B1 (en) | 1995-01-05 | 1996-01-03 | Electron beam device with single crystal window and matching anode |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US369,127 | 1982-04-16 | ||
US08/369,127 US5612588A (en) | 1993-05-26 | 1995-01-05 | Electron beam device with single crystal window and expansion-matched anode |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1996021238A1 true WO1996021238A1 (en) | 1996-07-11 |
WO1996021238B1 WO1996021238B1 (en) | 1996-08-29 |
Family
ID=23454190
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1996/000272 WO1996021238A1 (en) | 1995-01-05 | 1996-01-03 | Electron beam device with single crystal window and matching anode |
Country Status (9)
Country | Link |
---|---|
US (1) | US5612588A (en) |
EP (1) | EP0871972B1 (en) |
JP (1) | JP3899524B2 (en) |
KR (1) | KR100385583B1 (en) |
AU (1) | AU685350B2 (en) |
CA (1) | CA2209593A1 (en) |
DE (1) | DE69635189T2 (en) |
TW (1) | TW282551B (en) |
WO (1) | WO1996021238A1 (en) |
Cited By (8)
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EP0904594A1 (en) * | 1996-06-12 | 1999-03-31 | American International Technologies, Inc | Actinic radiation source having anode that includes a window area formed by a thin, monolithic silicon membrane |
EP0912351A1 (en) * | 1996-07-19 | 1999-05-06 | The Regents Of The University Of California | Rigid thin windows for vacuum applications |
WO1999048344A1 (en) * | 1998-03-13 | 1999-09-23 | Forschungszentrum Karlsruhe Gmbh | Gas target window |
US6559424B2 (en) | 2001-01-02 | 2003-05-06 | Mattson Technology, Inc. | Windows used in thermal processing chambers |
EP1197470A3 (en) * | 2000-10-13 | 2004-12-01 | Philips Intellectual Property & Standards GmbH | Method for the manufacture of windows transparent to electron beams and windows transparent to electron beams |
WO2013121078A1 (en) | 2012-02-15 | 2013-08-22 | Hs Foils Oy | Method and arrangement for manufacturing a radiation window |
WO2015113835A1 (en) * | 2014-01-31 | 2015-08-06 | Tetra Laval Holdings & Finance S.A. | Device and method for sterilization of packaging containers |
EP3563399A4 (en) * | 2016-12-29 | 2020-07-29 | The University of British Columbia | Optically addressed, thermionic electron beam device |
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US5909032A (en) * | 1995-01-05 | 1999-06-01 | American International Technologies, Inc. | Apparatus and method for a modular electron beam system for the treatment of surfaces |
US7264771B2 (en) | 1999-04-20 | 2007-09-04 | Baxter International Inc. | Method and apparatus for manipulating pre-sterilized components in an active sterile field |
US6140657A (en) * | 1999-03-17 | 2000-10-31 | American International Technologies, Inc. | Sterilization by low energy electron beam |
US6239543B1 (en) * | 1999-08-23 | 2001-05-29 | American International Technologies, Inc. | Electron beam plasma formation for surface chemistry |
US7424764B2 (en) * | 1999-09-01 | 2008-09-16 | Hagleitner Hygiene International Gmbh | Brush with locking and detaching structure for disposable head |
TW464947B (en) | 1999-11-29 | 2001-11-21 | Ushio Electric Inc | Measuring apparatus of electron beam quantity and processing apparatus of electron beam irradiation |
US7243689B2 (en) | 2000-02-11 | 2007-07-17 | Medical Instill Technologies, Inc. | Device with needle penetrable and laser resealable portion and related method |
DE10050811A1 (en) | 2000-10-13 | 2002-04-18 | Philips Corp Intellectual Pty | Electron beam transparent window |
US7331944B2 (en) | 2000-10-23 | 2008-02-19 | Medical Instill Technologies, Inc. | Ophthalmic dispenser and associated method |
WO2002040122A2 (en) * | 2000-10-23 | 2002-05-23 | Py Patent, Inc. | Fluid dispenser with bladder inside rigid vial |
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WO2003033363A1 (en) * | 2001-10-16 | 2003-04-24 | Medical Instill Technologies, Inc. | Dispenser with sealed chamber and one-way valve for providing metered amounts of substances |
US7798185B2 (en) | 2005-08-01 | 2010-09-21 | Medical Instill Technologies, Inc. | Dispenser and method for storing and dispensing sterile food product |
US6696018B2 (en) | 2001-11-14 | 2004-02-24 | Electron Process Company, Llc | System and method for sterilization of biological connections |
US20030226857A1 (en) * | 2002-04-12 | 2003-12-11 | Hyclone Laboratories, Inc. | Systems for forming sterile fluid connections and methods of use |
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US6977492B2 (en) * | 2002-07-10 | 2005-12-20 | Marvell World Trade Ltd. | Output regulator |
ES2543009T3 (en) * | 2002-08-13 | 2015-08-13 | Medical Instill Technologies, Inc. | Container and valve assembly for storing and distributing substances and related method |
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JP4401355B2 (en) * | 2003-01-28 | 2010-01-20 | メディカル・インスティル・テクノロジーズ・インコーポレイテッド | Device having heat-sealable cap and apparatus and method for filling the device |
WO2004096113A2 (en) | 2003-04-28 | 2004-11-11 | Medical Instill Technologies, Inc. | Container with valve assembly for filling and dispensing substances, and apparatus and method for filling |
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JP2005003564A (en) * | 2003-06-13 | 2005-01-06 | Ushio Inc | Electron-beam tube and window for electron beam extraction |
US7145988B2 (en) * | 2003-12-03 | 2006-12-05 | General Electric Company | Sealed electron beam source |
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US7148613B2 (en) | 2004-04-13 | 2006-12-12 | Valence Corporation | Source for energetic electrons |
US7197116B2 (en) * | 2004-11-16 | 2007-03-27 | General Electric Company | Wide scanning x-ray source |
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US8212225B2 (en) * | 2005-05-13 | 2012-07-03 | State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of The University Of Oregon | TEM grids for determination of structure-property relationships in nanotechnology |
US20080280099A1 (en) * | 2005-05-23 | 2008-11-13 | Hutchison James E | Silicon Substrates with Thermal Oxide Windows for Transmission Electron Microscopy |
US7495239B2 (en) * | 2005-12-22 | 2009-02-24 | Asml Netherlands B.V. | Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
US7504643B2 (en) * | 2005-12-22 | 2009-03-17 | Asml Netherlands B.V. | Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
JP2008128973A (en) * | 2006-11-24 | 2008-06-05 | Hamamatsu Photonics Kk | Electron beam irradiation device |
US7656236B2 (en) | 2007-05-15 | 2010-02-02 | Teledyne Wireless, Llc | Noise canceling technique for frequency synthesizer |
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WO2013138258A1 (en) | 2012-03-11 | 2013-09-19 | Mark Larson | Improved radiation window with support structure |
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US9202660B2 (en) | 2013-03-13 | 2015-12-01 | Teledyne Wireless, Llc | Asymmetrical slow wave structures to eliminate backward wave oscillations in wideband traveling wave tubes |
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US3607680A (en) * | 1967-10-03 | 1971-09-21 | Matsushita Electric Ind Co Ltd | Methof for producing a device for transmitting an electron beam |
US3878417A (en) * | 1971-10-13 | 1975-04-15 | Siemens Ag | Ray transmitting window |
US4362965A (en) * | 1980-12-29 | 1982-12-07 | The United States Of America As Represented By The Secretary Of The Army | Composite/laminated window for electron-beam guns |
US4455561A (en) * | 1982-11-22 | 1984-06-19 | Hewlett-Packard Company | Electron beam driven ink jet printer |
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US3486060A (en) * | 1967-09-06 | 1969-12-23 | High Voltage Engineering Corp | Cooling apparatus with laminar flow for electron permeable windows |
US3629576A (en) * | 1970-05-21 | 1971-12-21 | Deltaray Corp | Accelerator tube electrode for focusing a beam of charged particles |
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-
1995
- 1995-01-05 US US08/369,127 patent/US5612588A/en not_active Expired - Lifetime
-
1996
- 1996-01-03 JP JP52126596A patent/JP3899524B2/en not_active Expired - Lifetime
- 1996-01-03 WO PCT/US1996/000272 patent/WO1996021238A1/en active IP Right Grant
- 1996-01-03 DE DE69635189T patent/DE69635189T2/en not_active Expired - Lifetime
- 1996-01-03 KR KR1019970704608A patent/KR100385583B1/en not_active IP Right Cessation
- 1996-01-03 EP EP96903392A patent/EP0871972B1/en not_active Expired - Lifetime
- 1996-01-03 CA CA002209593A patent/CA2209593A1/en not_active Abandoned
- 1996-01-03 AU AU47495/96A patent/AU685350B2/en not_active Ceased
- 1996-01-04 TW TW085100033A patent/TW282551B/zh active
Patent Citations (4)
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US3607680A (en) * | 1967-10-03 | 1971-09-21 | Matsushita Electric Ind Co Ltd | Methof for producing a device for transmitting an electron beam |
US3878417A (en) * | 1971-10-13 | 1975-04-15 | Siemens Ag | Ray transmitting window |
US4362965A (en) * | 1980-12-29 | 1982-12-07 | The United States Of America As Represented By The Secretary Of The Army | Composite/laminated window for electron-beam guns |
US4455561A (en) * | 1982-11-22 | 1984-06-19 | Hewlett-Packard Company | Electron beam driven ink jet printer |
Non-Patent Citations (1)
Title |
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See also references of EP0871972A4 * |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0904594A4 (en) * | 1996-06-12 | 2000-07-19 | American Int Tech | Actinic radiation source having anode that includes a window area formed by a thin, monolithic silicon membrane |
US6224445B1 (en) | 1996-06-12 | 2001-05-01 | Ait | Actinic radiation source and uses therefor |
EP0904594A1 (en) * | 1996-06-12 | 1999-03-31 | American International Technologies, Inc | Actinic radiation source having anode that includes a window area formed by a thin, monolithic silicon membrane |
EP0912351A1 (en) * | 1996-07-19 | 1999-05-06 | The Regents Of The University Of California | Rigid thin windows for vacuum applications |
EP0912351B1 (en) * | 1996-07-19 | 2002-03-13 | The Regents Of The University Of California | Rigid thin windows for vacuum applications |
WO1999048344A1 (en) * | 1998-03-13 | 1999-09-23 | Forschungszentrum Karlsruhe Gmbh | Gas target window |
EP1197470A3 (en) * | 2000-10-13 | 2004-12-01 | Philips Intellectual Property & Standards GmbH | Method for the manufacture of windows transparent to electron beams and windows transparent to electron beams |
US6559424B2 (en) | 2001-01-02 | 2003-05-06 | Mattson Technology, Inc. | Windows used in thermal processing chambers |
WO2013121078A1 (en) | 2012-02-15 | 2013-08-22 | Hs Foils Oy | Method and arrangement for manufacturing a radiation window |
EP2817818A4 (en) * | 2012-02-15 | 2015-10-21 | Hs Foils Oy | Method and arrangement for manufacturing a radiation window |
US9564252B2 (en) | 2012-02-15 | 2017-02-07 | Hs Foils Oy | Method and arrangement for manufacturing a radiation window |
WO2015113835A1 (en) * | 2014-01-31 | 2015-08-06 | Tetra Laval Holdings & Finance S.A. | Device and method for sterilization of packaging containers |
US9969513B2 (en) | 2014-01-31 | 2018-05-15 | Tetra Laval Holdings & Finance S.A. | Device and method for sterilization of packaging containers |
EP3563399A4 (en) * | 2016-12-29 | 2020-07-29 | The University of British Columbia | Optically addressed, thermionic electron beam device |
US10741352B2 (en) | 2016-12-29 | 2020-08-11 | The Board Of Trustees Of The Leland Stanford Junior University | Optically addressed, thermionic electron beam device |
Also Published As
Publication number | Publication date |
---|---|
EP0871972B1 (en) | 2005-09-14 |
AU4749596A (en) | 1996-07-24 |
AU685350B2 (en) | 1998-01-15 |
KR19980701219A (en) | 1998-05-15 |
EP0871972A4 (en) | 2000-03-01 |
TW282551B (en) | 1996-08-01 |
CA2209593A1 (en) | 1996-07-11 |
DE69635189T2 (en) | 2006-07-06 |
US5612588A (en) | 1997-03-18 |
KR100385583B1 (en) | 2003-08-19 |
JPH10512092A (en) | 1998-11-17 |
JP3899524B2 (en) | 2007-03-28 |
EP0871972A1 (en) | 1998-10-21 |
DE69635189D1 (en) | 2005-10-20 |
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