WO1995015822A9 - Appareil et procede de pulverisation de liquide - Google Patents

Appareil et procede de pulverisation de liquide

Info

Publication number
WO1995015822A9
WO1995015822A9 PCT/GB1994/002692 GB9402692W WO9515822A9 WO 1995015822 A9 WO1995015822 A9 WO 1995015822A9 GB 9402692 W GB9402692 W GB 9402692W WO 9515822 A9 WO9515822 A9 WO 9515822A9
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
liquid
perforations
face
actuator
Prior art date
Application number
PCT/GB1994/002692
Other languages
English (en)
Other versions
WO1995015822A1 (fr
Filing date
Publication date
Priority claimed from GB939325227A external-priority patent/GB9325227D0/en
Priority claimed from GB9412669A external-priority patent/GB9412669D0/en
Priority to DK95902868T priority Critical patent/DK0732975T3/da
Priority to KR1019960703016A priority patent/KR100326679B1/ko
Priority to EP95902868A priority patent/EP0732975B1/fr
Priority to US08/646,271 priority patent/US5823428A/en
Application filed filed Critical
Priority to DE69413708T priority patent/DE69413708T2/de
Priority to JP51605095A priority patent/JP3659593B2/ja
Priority to AU11959/95A priority patent/AU687136B2/en
Priority to CZ961681A priority patent/CZ168196A3/cs
Priority to BR9408281A priority patent/BR9408281A/pt
Publication of WO1995015822A1 publication Critical patent/WO1995015822A1/fr
Publication of WO1995015822A9 publication Critical patent/WO1995015822A9/fr

Links

Definitions

  • This invention relates to apparatus and methods for the production of sprays of liquid or of liquid emulsions or suspensions (hereinafter called 'liquids') by means of an actuator.
  • the liquid is introduced as a thin film formed on a plate excited in bending oscillation by the transmission of ultrasonic vibrations from a remote piezoelectric transducer through a solid coupling medium structure.
  • the mechanical oscillations are propagated as sonic or ultrasonic vibrational waves through the liquid towards a perforate membrane or plate (hereinafter referred to as a membrane) that otherwise retains the liquid.
  • a perforate membrane or plate hereinafter referred to as a membrane
  • the action of the vibrational waves in the liquid causes the liquid to be ejected as droplets through the perforations of the membrane.
  • the source of mechanical oscillations is mechanically coupled to a perforate membrane that otherwise retains the liquid.
  • the action of the oscillations causes the liquid to be ejected as droplets through the perforations of the membrane.
  • the devices above can be classified into two types:
  • Spray devices of the first general type transmit the vibration through the liquid to the liquid surface from which the spray is produced, but they describe no geometrical features at that surface which influence droplet size. They either have no perforate membrane to retain the liquid in the absence of oscillation (as in US-A-3 378 574) or they do possess a perforate membrane, but the perforations do not influence droplet size (as in EP-A-0 516 565, eg column 6, line 21).
  • Spray devices of the second general type for example as disclosed in US-A-4 605 167, US-A-4 533 082, EP-A-0 432 992 and GB-A-2 263 076, have a perforate membrane bounding or defining the liquid surface at which droplets are produced and the membrane perforations do have an influence upon droplet size.
  • the present inventors have observed that a substantially cylindrical fluid jet emerges from the 'small-orifice' opening in the front face of the membrane and that this jet oscillates towards and away from the membrane once per cycle of vibration. When the excitation is sufficiently strong the end portion of the jet breaks off to form a free droplet. This behaviour is represented in Figure 1.
  • the droplet diameter typically lies in the range 1.5 to 2 times the diameter of the small- orifice opening in the 'front' face of the membrane. This relationship is also well known in ink jet printing, and has been found in many studies of the instability of liquid jets. The benefit to spray production of having orifices that reduce in size towards the 'front' face is common to all these devices and is also known from ink jet technology. See, for example, US-A-3 683 212.
  • the first type of device is relatively inefficient in use of electrical input energy to its (piezoelectric) vibration actuator.
  • a practical device of the type described in US-A-3 378 574 may atomise 2.5 microlitres of water for 1 joule of input energy.
  • the improvement of EP-A-0 516 565 is claimed to allow about 10 microlitres to be so atomised with 1 joule, but limits liquid feed to capillary action requiring a membrane carefully separated from the actuator and a relatively complex construction. Neither provides an apparatus in which the membrane perforations have a substantial influence on droplet size.
  • the constraint of EP-A-0516 565 to capillary feed and the absence of function of the perforations to define or to influence the droplet size can be disadvantageous. It is generally desirable to be free to select from a wide variety of liquid feed methods to achieve the most appropriate method for the application. For example, for sprays of pharmaceuticals it is desirable to provide a metered dose of liquid to the atomiser and to avoid 'hang-up' i.e. residual drug liquid left on the atomiser that could aid contamination of subsequent dose deliveries. For other, larger, suspensates, for example antiperspirant suspensions, the limited range of capillary- gaps could lead to blockage of the capillary feed. It is also helpful for the droplet size to be determined or at least influenced by physical features of the apparatus, so that by maintaining manufacturing quality of the apparatus, repeatability of droplet size can be assisted.
  • Devices of the second type with perforations narrowing in the direction in which droplets are ejected generally have larger ratio of droplet size larger than orifice exit diameter. This makes it difficult for such devices to atomise suspensions into droplets unless the solids particle size is markedly smaller than the desired droplet diameter.
  • devices of the second type are also poorly adapted to creation of sprays with very small droplet size.
  • sprays with mean droplet size in the region of 6 ⁇ m are desirable to allow 'targeting' of the drug delivery to the optimum region within the pulmonary tract.
  • this may require perforations with exit diameter in the region of 3 ⁇ m to 4 ⁇ m.
  • Membranes of such small perforation size are difficult and expensive to manufacture and may not have good repeatability of perforation size, droplet diameter and therefore of such 'targeting'.
  • suspension drug formulations are often most readily produced with mean solids size around 2 ⁇ m. With such small orifices and with such solids particle sizes, blockage or poor delivery can occur.
  • the flow of solids carried in liquid suspension into a narrowing perforation can induce blocking, particularly when the solids size is comparable with the size of the channel.
  • the relatively large diameter of the perforation at the rear face of the membrane admits particles too large to be able to pass through the relatively small perforation diameter at the front face.
  • the narrowing of the perforation may and in general will bring two or more solid particles into contact both with each other and with the sidewalls of the perforation. These may then be unable to continue forward motion and so induce blocking.
  • Objects of the present invention include the provision of a form of spray device that is of low cost, of simple construction or which is capable of operation with a wide range of liquids, liquid suspensions and liquid feed means.
  • a liquid droplet spray device comprising: a perforate membrane; an actuator, for vibrating the membrane; and means for supplying liquid to a surface of the membrane, characterised in that perforations in the membrane have a larger cross-sectional area at that face of the membrane away from which liquid droplets emerge than at the opposite face of the membrane.
  • perforations in the membrane have a larger cross-sectional area at that face of the membrane away from which liquid droplets emerge than at the opposite face of the membrane.
  • the actuator may be a piezoelectric actuator adapted to operate in the bending mode.
  • the thickness of that actuator is substantially smaller than at least one other dimension.
  • means are provided to create a pressure difference such that the pressure exerted by the ambient gas either directly or indirectly on the droplet-emergent surface of the membrane equals or exceeds the pressure of liquid contacting the opposite membrane surface, but which pressure difference is not substantially greater than that pressure at which gas passes through the perforations of the membrane into said liquid.
  • the pressure exerted by said ambient gas may be indirectly exerted, for example, when it acts on a liquid film that itself is formed upon that face of the membrane.
  • the liquid supply means or the effect of operation of the device itself to expel droplets of liquid from a closed reservoir or some other means may be used to create this pressure difference.
  • the device includes a pressure bias means providing a lower pressure in the liquid opposing the passage of the liquid through the perforations.
  • the perforations, on that face of the membrane away from which liquid droplets emerge, are not touching.
  • the means for supplying liquid to a surface of the membrane preferably comprises a capillary feed mechanism or a bubble-generator feed mechanism.
  • the device may include both normally tapered and reverse tapered perforations.
  • the normally tapered perforations are the preferably disposed around the outside of the reverse tapered perforations.
  • the means for supplying liquid to a surface of the membrane may be adapted to supply said liquid to the face of said membrane away from which liquid droplets emerge.
  • a method of atomising a liquid in which a liquid is caused to pass through tapered perforations in a vibrating membrane in the direction from that side of the membrane at which the perforations have a smaller cross- sectional area to that side of the membrane at which the perforations have a larger cross-sectional area is provided.
  • apparatus according to the present invention operates by means of exciting capillary waves in the liquid to be atomised. Their understanding of such capillary-wave atomisation is given below.
  • the actuator, its mounting and the electronic drive circuit for operating the actuator may, for example, take any of the prior art forms disclosed in WO-A-93 10910, EP-A-0432 992, US-A-4 533 082, US-A-4 605167 or other suitable forms that may be convenient. It is found generally desirable for the actuator and drive electronics to act cooperatively to produce such resonant vibrational excitation.
  • One advantage of this arrangement is that simple and low cost apparatus may be used for production of a droplet spray of liquid suspensions wherein the ratio of mean droplet size to mean suspensate particle size can be reduced over prior art apparatus.
  • a second advantage of this arrangement is that liquid and liquid suspension sprays of small droplet diameter suitable for pulmonary inhalation can be produced, using membranes that are easier to manufacture and which have reduced likelihood in use of blockage of the perforations.
  • a third advantage of this arrangement is that relatively low-velocity liquid sprays suitable for uniform coating of surfaces can be produced.
  • Figure 1 is a schematic section of prior art apparatus showing, in sequence, successive stages of the ejection of a liquid droplet from perforations which are smaller in area at the front of the membrane (from which droplets emerge) than at the rear of the membrane;
  • Figure 2 shows, in section, a preferred droplet dispensation apparatus;
  • Figure 3 illustrates, in section, preferred forms of perforate membrane for the apparatus of figure 2;
  • Figure 4 is a plan and sectional view of a preferred embodiment of an atomising head
  • Figure 5 shows schematic sections of alternative fluid pressure control devices that can be used with an atomising head to form droplet dispensation devices according to the invention
  • Figures 6 show methods of droplet generation as understood by the inventors
  • Figure 7 is a schematic section of a second droplet dispensation apparatus.
  • Figure 8 illustrates, in section, an alternative membrane structure (for the apparatus of figure 7) ;
  • Figure 9 schematically illustrates in section, droplet ejection from both 'normally' tapered and 'reverse' tapered perforations.
  • Figure 1 shows a membrane 61 having 'normally' tapered perforations and in vibratory motion shown by arrow 58 (in a direction substantially perpendicular to the plane of the membrane) against a liquid body 2 contacting its rear face.
  • Figures la to lc show, in sequence during one cycle of vibratory motion, the understood evolution of the liquid meniscus 62 to create a substantially cylindrical jet of fluid 63 from the tapered perforations and the subsequent formation of a free droplet 64.
  • Figure 2 shows a droplet dispensing apparatus 1 comprising an enclosure 3 directly feeding liquid 2 to the rear face
  • a perforate membrane 5 and a vibration means or actuator 7, shown by way of example as an annular electroacoustic disc and substrate and operable by an electronic circuit 8.
  • the circuit 8 derives electrical power from a power supply 9 to vibrate the perforate membrane 5 substantially perpendicular to the plane of the membrane, so producing droplets of liquid emerging away from the front face 51 of the perforate membrane.
  • Perforate membrane 5 and actuator 7 in combination are hereinafter referred to as aerosol head 40.
  • the aerosol head 40 is held captured in a manner that does not unduly restrict its vibratory motion, for example by a grooved annular mounting formed of a soft silicone rubber (not shown) .
  • Liquid storage and delivery to rear face 52 are effected, for example, by an enclosure 3 as shown in Figure 2.
  • Figure 3a shows cross-sectional detail of a first example perforate membrane 5, which is operable to vibrate substantially in the direction of arrow 58 and which is suitable for use with droplet dispensing apparatus 1 to produce fine aerosol sprays.
  • the membrane 5 comprises a circular layer of polymer which contains a plurality of tapered conical perforations 50.
  • Each perforation 50 has openings 53 in the front exit face and openings 54 in the rear entry face, which perforations are laid out in a square lattice.
  • Such perforations may be introduced into polymer membranes by, for example, laser- drilling with an excimer laser.
  • Figure 3b shows cross-sectional detail of a second example perforate membrane 205 according to the invention, which membrane is operable to vibrate substantially and suitable for use with droplet dispensing apparatus 1 in the direction of arrow 58.
  • the membrane is formed as a circular disc of diameter 8mm from electroformed nickel, and is manufactured, for example, by Stork Veco of Eerbeek, The Netherlands. Its thickness is 70 microns and is formed with a plurality of perforations shown at 2050 which, at 'front' face 2051, are of diameter shown at "a" of 120 microns and at 'rear' face 2052 are of diameter shown at "b" of 30 microns.
  • the perforations are laid out in an equilateral triangular lattice of pitch 170 ⁇ m.
  • the profile of the perforations varies smoothly between the front and rear face diameters through the membrane thickness with substantially flat 'land' regions (shown at "c") of smallest dimension 50 ⁇ m in front face 2051.
  • Membranes with similar geometrical forms to those described with reference to Figures 3a,3b, fabricated in alternative materials such as glass or silicon, may also be used.
  • FIG 4 shows a plan and a sectional view through one appropriate form of the aerosol head 40.
  • This aerosol head consists of an electroacoustical disc 70 comprising an annulus 71 of nickel-iron alloy known as 'Invar' to which a piezoelectric ceramic annulus 72 and the circular perforate membrane 5 are bonded.
  • the perforate membrane is as described with reference to Figure 3b.
  • the nickel- iron annulus has outside diameter 20mm, thickness 0.2mm and contains a central concentric hole 73 of diameter 4.5mm.
  • the piezoelectric ceramic is of type P51 from Hoechst CeramTec of Lauf, Germany and has outside diameter 16mm, internal diameter 10mm and thickness 0.25mm.
  • the upper surface 74 of the ceramic has two electrodes: a drive electrode 75 and an optional sense electrode 76.
  • the sense electrode 76 consists of a 1.5mm wide metallisation that, in this example, extends radially substantially from the inner to the outer diameter.
  • the drive electrode 75 extends over the rest of the surface and is electrically insulated from the sense electrode by a 0.5mm air gap. Electrical contacts are made by soldered connections to fine wires not shown.
  • the drive electrode 75 is driven using the electronic circuit 8 by a sinusoidal or square-wave signal at a frequency typically in the range 100 to 300kHz with an amplitude of approximately 30V to produce a droplet spray emerging away from the front face 51 of the perforate membrane wherein the mean droplet size is typically in the region of 10 microns.
  • the actuator head will in general have vibrational resonances at whose frequencies droplets are produced effectively. At such resonances the signal from the sense electrode 76 has a local maximum at that frequency.
  • the drive circuit may be open-loop, not using the feedback signal from electrode 76, or may be closed- loop using that feedback.
  • the electronic drive circuit can be responsive to the changing electrical behaviour of the actuator head at resonance so that actuator head and drive circuit cooperate to maintain resonant vibration of the actuator head.
  • Closed-loop forms for example, can ensure that the piezo actuator maintains resonant vibration by maintaining a phase angle between the drive and feedback or sense electrodes that is predetermined to give maximal delivery.
  • FIG. 5a shows in sectional view, a fluid feed comprising a conduit formed of an open-celled capillary foam.
  • a capillary feed may be used to provide liquid pressure control.
  • the advantage of pressure control is described below.
  • liquid is contained within capillary 81 at a pressure below that of the surrounding atmosphere.
  • the pore size in the capillary foam can be used to control the value of this pressure.
  • Surrounding capillary 81 is a robust external housing 82. This arrangement is particularly useful for spray delivery of dangerous, eg toxic, liquids whilst reducing the danger of other means of liquid loss.
  • the capillary action of material 81 has an action to contain the liquid so that liquid escape is reduced or minimised even if damage to the external housing 82 occurs. Applications of this benefit are to retain pharmaceutical or medicinal liquids or flammable liquids.
  • Figure 5b shows in sectional view, a so-called 'bubble generator' device known from the writing instrument art that may also be used to provide liquid pressure control.
  • the action of dispensing liquid from the perforations in the membrane causes the pressure in the reservoir 90 and therefore of the liquid 91 contacting the membrane to decrease below atmospheric pressure.
  • the pressure is low enough for air to be sucked in against the liquid meniscus pressure through either the membrane perforations or, alternatively through an auxiliary opening (or openings) 92, air is ingested as bubbles until the reservoir pressure rises sufficiently for the liquid meniscus to withstand the pressure differential. In this way the liquid pressure is regulated at a value below the ambient pressure.
  • the vibrational amplitude of the liquid meniscus 67 is large enough, droplets will be emitted, typically with a droplet diameter approximately one third of the capillary wavelength (see for example Rozenberg - Principles of Ultrasonic Technology) .
  • the perforate form enables effective replenishment of liquid lost as droplets from meniscus 67.
  • the membrane form enables efficient vibrational excitation.
  • face 51 is not completely filled with perforations, but the liquid is free to spread out over an area of face 51 larger than the perforation area.
  • This feature allows a balance to be achieved between the rate of flow responsive to vibration 58 (through perforations 50) and the rate at which liquid is sprayed as droplets from capillary waves in meniscus 67.
  • This balance may, alternatively or in combination with the above method, be achieved by use of a pressure differential (opposing the flow through perforations responsively to vibration) small enough that a thin film still forms on face 51. By means of this balance, the flow of excessive liquid onto front face 51, which can inhibit the formation of a droplet spray, is prevented.
  • the pressure differential opposing flow through perforations 50 may alternatively be selected so that bulk liquid does not flow onto front face 51 of the membrane 5 but has menisci 66 that contact the membrane 5 at or between the front 51 and rear 52 faces of the membrane, as shown in Figure 6e.
  • the vibration of the membrane can excite vibration in each of the liquid menisci 66 as shown in Figure 6e.
  • This requires a pressure differential comparable to, but not larger than that needed for air to be drawn in through the perforations against the maximum liquid meniscus pressure in the perforations when the membrane is not vibrated.
  • the coupling of the vibration of the membrane into the liquid is particularly efficient in this case since the geometry of the perforations complements the geometry of the fluid menisci.
  • the induced excitation of the liquid menisci takes the form of capillary waves.
  • capillary waves Preferably an integer number of such capillary waves 'fit' within the perforations.
  • the geometry of the perforations is a good match to that of the menisci when excited with capillary waves and those waves are created efficiently. Again droplet ejection is observed with appropriate frequency and amplitude of vibration.
  • Figures 6f and 6g are shown special cases according to Figure 6e in which the pressure differential is selected so that the meniscus of liquid is retained either at or in the vicinity of the intersection of the perforations 50 with the rear face 52 ( Figure 6f) or with the front face 51 ( Figure 6g) of the perforate membrane; whilst capillary waves are formed in that meniscus through the action of vibration 58. Again, this enables efficient vibrational excitation of the meniscus and if the amplitude and frequency of vibration 58 are appropriate, the droplets of liquid are ejected. It is found that a value of pressure differential between zero and that pressure necessary to draw air (or other ambient gas) in through the membrane perforations against the action of the surface tension of the liquid contacting those perforations acts to improve the effectiveness of droplet generation.
  • ⁇ c 3 f 2 8 ⁇ t ⁇ /p
  • ⁇ fluid surface tension (at frequency f)
  • p fluid density
  • the ratio of the large diameter of the perforation (shown at 53) to the small diameter of the perforation should lie in the range 1 to (p+l)/p. This is most effective for small integer values of p.
  • apparatus according to the present invention allows droplets to be produced whose diameter is approximately one-third or less of diameter of the exit openings 53. (When the liquid meniscus is maintained at or close to openings 54 in rear face 52 of the membrane, apparatus according to the present invention allows droplets to be produced whose diameter is approximately one-third or less of the diameter of the smaller openings 54. Unlike prior art devices, the dimensions of the perforations then have an influence upon the droplet size and can therefore advantageously be selected to assist in the creation of droplets of the desired diameter.)
  • the apparatus is especially useful for producing small droplets, as required for example in pulmonary drug delivery applications.
  • Droplet generation occurs according to the apparatus and methods described with regard to Figures 6e, 6f and 6g when using a perforate membrane described with reference to
  • Bubble generator, capillary feeds and other means for providing a pressure differential opposing flow therefore give particular advantage for the present invention.
  • Spray operation for this device was achieved with sinusoidal excitation of 30V amplitude at frequencies of 115, 137, 204 and 262kHz with corresponding calculated capillary wavelengths in the range 51 ⁇ m to 30 ⁇ m. The latter wavelength corresponds to the minimum opening dimension of the perforations and produces droplets of approximate size lO ⁇ microns.
  • This device is the best embodiment of the invention known to the inventors for producing droplets in the region of 10 microns.
  • the use of 'reverse-tapered' perforations in the present invention helps to prevent blockage when atomising liquid suspensions: firstly, unlike prior art devices, the perforations do not admit solids particles that cannot pass completely through the membrane (but are agitated by the membrane vibration so not to permanently obscure the perforation) ; secondly two or more solids particles are not induced to come into contact both with each other and with the sidewalls of the perforations and so block the perforation; thirdly to produce a given droplet size relatively large perforations can be used and so pass relatively large solids particles in liquid suspension without blockage.
  • Apparatus according to this invention further enables relative ease of membrane manufacturing when small droplets, such as those desired for pulmonary drug delivery, as required.
  • the pressure difference either is selected still to allow a wetted front face of the membrane or, (in the case where that pressure difference is sufficient to pull the fluid meniscus back within the tapered perforations) enables the fluid meniscus to reach a new equilibrium position within the tapered perforation and thereby maintain stable droplet emission.
  • the latter is believed also enables combinations of bias pressure and frequency to be established at which an integer number of capillary wavelengths 'fit' within the perforation and efficiently eject droplets.
  • FIG. 7 shows a second droplet dispensing apparatus 101 with an alternative liquid feed.
  • the liquid feed includes feed pipe 103, and annular plate 102 acting together with face 1051 of membrane 105 to provide a capillary liquid channel to holes 1060 in membrane 105.
  • Membrane 105 is coupled to a vibration means or actuator 7.
  • Actuator 7 is coupled to sealing support and mount 108, electronic circuit 8 and thence to power supply 9.
  • Feed pipe 103 may be mounted relative to sealing support 108; this is not shown.
  • Circuit 8 and power supply 9 may for example be similar to that shown in the first example apparatus.
  • Vibration of the perforate membrane 105 substantially perpendicular to the plane of the membrane in the direction of arrow 58 produces droplets of liquid 1010 from the front face 1051 of the membrane.
  • Perforate membrane 105 and actuator 107 in combination are hereinafter referred to as aerosol head 1040.
  • Figure 8 shows cross-sectional detail of liquid in contact with the perforate membrane 105.
  • the membrane 105 comprises a layer of polymer which contains a plurality each of normally-tapered and reverse-tapered conical perforations shown at 1060 and 1050.
  • the reverse-tapered perforations 1050 are positioned to be free of liquid on the front face of the membrane.
  • the normally-tapered perforations 1060 are positioned to receive liquid from the front face of the membrane and may, for example, conveniently be laid out peripherally around the reverse- tapered perforations 1050.
  • the droplet generation mechanisms described above for the first example apparatus may be employed.
  • the presence of holes of type 1060 enables a variety of liquid feeds to the front of the membrane 5 to be employed.
  • Liquid feed is to holes of type 1060 in the front face of the membrane.
  • one liquid delivery means may be capillary feed means comprising annular plate 102 acting together with face 1051 of membrane 105.
  • this second example droplet dispensation apparatus acts to transmit liquid through holes type 1060 to the rear face 1052 of membrane 105 and so by liquid wetting action maintains holes type 1050 in the rear face 1052 of said membrane in contact with the liquid, enabling droplet dispensation from the front face of holes 1050 in a manner similar to that of the first example droplet dispensation apparatus.
  • Other details follow those for the first droplet dispensation apparatus described above.
  • Figure 9 illustrates a second use of membranes in which the perforations are both 'normally' and 'reverse' tapered.
  • 'reverse' tapered perforations may be of roughly similar sizes or of differing sizes. Accordingly, such devices are capable of creating droplets by one mechanism at one operating frequency and by the other mechanism at another frequency. Similarly, such devices are capable to create droplets 1011 of relatively large size from normally tapered perforations 1060 by one mechanism and droplets
  • the droplet production mechanism of the 'normally' tapered perforations 1060 can also, for example in a bubble- generator enclosure design as described above, be used to create a negative pressure bias for improved droplet generation from the 'reverse' tapered regions of the membrane.
  • devices according to the present invention may be operated in a range of orientations, spraying downwards, sidewards or upwards.

Abstract

Procédé et appareil d'atomisation d'un liquide dans lesquels un liquide est amené à passer par des perforations coniques (50) situées dans une membrane vibrante (5), à partir du côté de la membrane (5) où la superficie de la section des perforations (50) est plus petite (5), vers le côté où les perforations (50) présentent une superficie de section plus importante.
PCT/GB1994/002692 1993-12-09 1994-12-08 Appareil et procede de pulverisation de liquide WO1995015822A1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
BR9408281A BR9408281A (pt) 1993-12-09 1994-12-08 Aparelho pulverizador de goticulas de liquido e processo de atomizar um liquido
CZ961681A CZ168196A3 (en) 1993-12-09 1994-12-08 Apparatus for atomizing liquid and atomizing method
KR1019960703016A KR100326679B1 (ko) 1993-12-09 1994-12-08 액체스프레이장치및방법
EP95902868A EP0732975B1 (fr) 1993-12-09 1994-12-08 Appareil et procede de pulverisation de liquide
US08/646,271 US5823428A (en) 1994-06-23 1994-12-08 Liquid spray apparatus and method
DK95902868T DK0732975T3 (da) 1993-12-09 1994-12-08 Væskeforstøvningsapparat og -fremgangsmåde
DE69413708T DE69413708T2 (de) 1993-12-09 1994-12-08 Vorrichtung und verfahren zum sprühen von flüssigkeiten
JP51605095A JP3659593B2 (ja) 1993-12-09 1994-12-08 液体スプレー装置及び方法
AU11959/95A AU687136B2 (en) 1993-12-09 1994-12-08 Liquid spray apparatus and method

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB939325227A GB9325227D0 (fr) 1993-12-09 1993-12-09
GB9325227.8 1993-12-09
GB9412669.5 1994-06-23
GB9412669A GB9412669D0 (en) 1994-06-23 1994-06-23 Liquid spray apparatus

Publications (2)

Publication Number Publication Date
WO1995015822A1 WO1995015822A1 (fr) 1995-06-15
WO1995015822A9 true WO1995015822A9 (fr) 1995-07-27

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PCT/GB1994/002692 WO1995015822A1 (fr) 1993-12-09 1994-12-08 Appareil et procede de pulverisation de liquide

Country Status (12)

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EP (1) EP0732975B1 (fr)
JP (1) JP3659593B2 (fr)
KR (1) KR100326679B1 (fr)
AT (1) ATE171654T1 (fr)
AU (1) AU687136B2 (fr)
BR (1) BR9408281A (fr)
CA (1) CA2176573A1 (fr)
CZ (1) CZ168196A3 (fr)
DE (1) DE69413708T2 (fr)
DK (1) DK0732975T3 (fr)
ES (1) ES2123227T3 (fr)
WO (1) WO1995015822A1 (fr)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9324250D0 (en) * 1993-11-25 1994-01-12 Minnesota Mining & Mfg Inhaler
JP3592780B2 (ja) * 1995-02-22 2004-11-24 富士写真フイルム株式会社 液体噴射装置
GB9514335D0 (en) * 1995-07-13 1995-09-13 The Technology Partnership Plc Solids and liquids supply
EP1129741B1 (fr) 1997-11-19 2006-04-12 Microflow Engineering SA Dispositif de pulvérisation pour inhalateur
GB9808182D0 (en) 1998-04-17 1998-06-17 The Technology Partnership Plc Liquid projection apparatus
ES2149748T3 (es) 1998-12-01 2007-06-16 Microflow Engineering Sa Inhalador con nebulizador de ondas ultrasonicas que presenta unas aberturas de boquilla superpuestas sobre las crestas de un patron de onda estacionaria.
GB9903433D0 (en) * 1999-02-15 1999-04-07 The Technology Partnership Plc Droplet generation method and device
DE19938055A1 (de) 1999-08-12 2001-03-15 Fraunhofer Ges Forschung Aktorbauglied für einen Mikrozerstäuber und Verfahren zu seiner Herstellung
DE19953317C1 (de) * 1999-11-05 2001-02-01 Pari Gmbh Inhalationsvernebler
EP1205199A1 (fr) * 2000-11-13 2002-05-15 The Technology Partnership Public Limited Company Distributeur à aérosol médical avec membrane pour la régulation du vide pendant la délivrance
EP1236517A1 (fr) 2001-02-23 2002-09-04 Microflow Engineering SA Procédé de fabrication d'un nébuliseur de goutelettes et un tel nébuliseur
DK1287904T3 (da) 2001-09-03 2006-04-03 Microflow Eng Sa Forstövningsindretning til væsker
ATE337105T1 (de) 2001-09-03 2006-09-15 Microflow Eng Sa Flüssigkeitstropfensprühvorrichtung
AU2002230267A1 (en) * 2002-02-11 2003-09-04 Sara Lee/De N.V. Liquid spray-head, apparatus comprising a liquid spray-head and container therefore
DE10243338B4 (de) * 2002-09-18 2005-07-07 Thomas Dipl.-Ing. Leclaire Verfahren und Vorrichtung zur Erzeugung von Aerosolen mit definierter elektrostatischer Ladung
EP1510261A1 (fr) 2003-08-28 2005-03-02 Microflow Engineering SA Appareil de pulvériation de gouttelettes pourvu d'une valve hydrodynamique
FR2879482B1 (fr) 2004-12-20 2007-03-30 Oreal Dispositif de pulverisation d'un produit, notamment d'un parfum
EP1792662A1 (fr) 2005-11-30 2007-06-06 Microflow Engineering SA Appareil de distribution de gouttelettes
WO2007090247A1 (fr) * 2006-02-10 2007-08-16 Intelligent Medical Technologies Pty Limited Nebuliseur
EP1952896B1 (fr) 2007-02-01 2012-11-07 EP Systems SA Appareil de distribution de gouttelettes
FR2912935B1 (fr) 2007-02-23 2009-05-15 Oreal Dispositif de pulverisation d'une composition de fixation
FR2912936B1 (fr) 2007-02-23 2011-12-16 Oreal Dispositif de pulverisation d'une composition de brillance
FR2927234B1 (fr) * 2008-02-13 2011-10-21 Oreal Dispositif de pulverisation d'une composition cosmetique
FR2927235B1 (fr) * 2008-02-13 2010-02-19 Oreal Dispositif de pulverisation d'une composition cosmetique
US20090242660A1 (en) * 2008-03-25 2009-10-01 Quatek Co., Ltd. Medical liquid droplet apparatus
FR2929861B1 (fr) * 2008-04-11 2011-11-11 Oreal Cartouche pour dispositif de pulverisation piezoelectrique et appareil de pulverisation associe.
DE602008003319D1 (de) 2008-06-03 2010-12-16 Microflow Eng Sa Spendervorrichtung für flüchtige flüssige Tröpfchen
FR2933319B1 (fr) 2008-07-02 2010-08-13 Oreal Atomiseur piezoelectrique comprenant une composition liquide parfumante ; procede de parfumage
JP5261077B2 (ja) 2008-08-29 2013-08-14 大日本スクリーン製造株式会社 基板洗浄方法および基板洗浄装置
GB2472416B (en) * 2009-08-05 2012-12-19 Quatek Co Ltd Medical liquid droplet apparatus
FR2960148B1 (fr) 2010-05-20 2012-07-13 Oreal Dispositifs de pulverisation d'une composition parfumante comprenant au moins un alcane lineaire liquide volatil ; procedes de parfumage
US20110303762A1 (en) * 2010-06-10 2011-12-15 Gojo Industries, Inc. Piezoelectric foaming pump
US10154923B2 (en) 2010-07-15 2018-12-18 Eyenovia, Inc. Drop generating device
EP2478969B1 (fr) * 2011-01-24 2017-01-04 Electrolux Home Products Corporation N.V. Appareil domestique
JP5743265B2 (ja) * 2011-06-17 2015-07-01 株式会社オプトニクス精密 霧化噴霧装置
WO2013090459A1 (fr) * 2011-12-12 2013-06-20 Corinthian Ophthalmic, Inc. Mécanisme éjecteur, dispositif éjecteur et procédés d'utilisation
DE102012001342A1 (de) * 2012-01-24 2013-07-25 Nebu-Tec Gmbh Inhalator mit atemgerecht angesteuertem Piezokristall
AU2013245946A1 (en) 2012-04-10 2014-11-27 Eyenovia, Inc. Spray ejector mechanisms and devices providing charge isolation and controllable droplet charge, and low dosage volume opthalmic administration
CN104755180B (zh) 2012-04-20 2018-09-21 艾诺维亚股份有限公司 用于向表面上喷射流体的喷射装置
KR102168906B1 (ko) 2012-05-14 2020-10-22 아이노비아 인코포레이티드 층류 액적 생성기 디바이스 및 이용 방법들
IN2014DN10575A (fr) 2012-05-15 2015-08-28 Corinthian Ophthalmic Inc
CN115300226A (zh) 2017-06-10 2022-11-08 艾诺维亚股份有限公司 用于将一体积的流体输送到眼睛的设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA930005A (en) * 1971-06-15 1973-07-10 Siemens Aktiengesellschaft Piezoelectric vibrators
AU553251B2 (en) * 1981-10-15 1986-07-10 Matsushita Electric Industrial Co., Ltd. Arrangement for ejecting liquid
US5152456A (en) * 1989-12-12 1992-10-06 Bespak, Plc Dispensing apparatus having a perforate outlet member and a vibrating device
US5299739A (en) * 1991-05-27 1994-04-05 Tdk Corporation Ultrasonic wave nebulizer

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