WO1994002840A1 - Systeme de detection du spectre atomique ou moleculaire et/ou des phenomenes de seuil associes - Google Patents

Systeme de detection du spectre atomique ou moleculaire et/ou des phenomenes de seuil associes Download PDF

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Publication number
WO1994002840A1
WO1994002840A1 PCT/US1993/006718 US9306718W WO9402840A1 WO 1994002840 A1 WO1994002840 A1 WO 1994002840A1 US 9306718 W US9306718 W US 9306718W WO 9402840 A1 WO9402840 A1 WO 9402840A1
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signal
substance
frequencies
frequency
measuring
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PCT/US1993/006718
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English (en)
Inventor
Paul S. Weiss
Stephan J. Stranick
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The Penn State Research Foundation
Biotechnology Research And Development Corporation
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Priority claimed from US07/916,165 external-priority patent/US5268573A/en
Priority claimed from US08/092,016 external-priority patent/US5397896A/en
Priority claimed from US08/092,133 external-priority patent/US5434842A/en
Application filed by The Penn State Research Foundation, Biotechnology Research And Development Corporation filed Critical The Penn State Research Foundation
Priority to EP93917238A priority Critical patent/EP0650593B1/fr
Priority to PCT/US1993/006718 priority patent/WO1994002840A1/fr
Priority to DE69332710T priority patent/DE69332710T2/de
Publication of WO1994002840A1 publication Critical patent/WO1994002840A1/fr
Priority to US08/283,007 priority patent/US5559328A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/12—STS [Scanning Tunnelling Spectroscopy]
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/002—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by perturbation of the physical or electrical structure
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/08—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by electric charge or by variation of electric resistance or capacitance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/204—Means for introducing and/or outputting objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/206—Modifying objects while observing
    • H01J2237/2065—Temperature variations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2538—Low energy electron microscopy [LEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31735—Direct-write microstructures
    • H01J2237/31738—Direct-write microstructures using STM

Definitions

  • This invention relates to a system for detecting the threshold and spectra of substances at the atomic or molecular level.
  • the threshold and spectra of substances at the atomic or molecular level may be detected by detecting either the current through or voltage across the substances or reflection of an electrical signal from the substances such as bulk electrical insulators or other materials.
  • Multiple sources and detection frequencies are proposed for use in detecting threshold phenomena associated with and/or atomic or molecular spectra of one or more substances.
  • the STM has a counter electrode on which the sample to be investigated is placed and another electrode in the shape of a microscope probe with a tip placed at a small distance away from the sample surface. A DC or a low frequency AC signal is then applied across the pair of electrodes. The probe tip is then moved across the sample surface in a scanning operation and the changes in the current or voltage across the electrodes are monitored to detect the characteristics of the sample.
  • the distance between the probe tip and the counter electrode/sample is controlled by a piezoelectric driver in one of two possible modes: a constant current mode and a constant height mode.
  • the current or voltage detected between the pair of electrodes is used to derive a control signal for controlling the piezoelectric driver in the constant current mode to change the distance between the probe tip and the sample so as to maintain a constant current between the electrodes.
  • the voltage that has been applied to the piezoelectric driver in order to keep the tunneling current constant indicates the height of the tip z(x,y) as a function of the position (x,y) of the probe tip over the sample surface. A record of such voltages therefore indicates the topographical image of the sample surface.
  • the constant current mode can be used for surfaces which are not necessarily flat on an atomic scale.
  • a disadvantage of the constant current mode is the response time required for the electronic and piezoelectric components in the feedback loop for controlling the piezoelectric driver; this response time sets relatively low upper limits for the scan speed.
  • the feedback loop response is slowed or turned off completely so that the probe tip is rapidly scanned at a constant average distance to the counter electrode irrespective of the contours of the sample surface.
  • the rapid variations in the tunneling current are recorded as a function of location (x,y) to yield the topographic information of the sample surface.
  • This is known as the constant height mode referring to the fact that the probe tip is maintained at a constant average distance from the counter electrode.
  • the constant height mode is advantageous over the constant current mode since it has a faster scan rate not limited by the response time of the feedback loop. Consequently, slow dynamic processes on surfaces can be studied. On the other hand, it is more difficult to extract the topographic height information from the variations of the tunneling current. Furthermore, unless the sample is ato ically flat, the tip might crash into a surface protrusion of the sample.
  • STM scanning Tunneling Microscopy I
  • Kochanski proposes to investigate insulating films by applying an AC current between the electrodes at frequency ⁇ and the current between the electrodes at 3 ⁇ is detected.
  • the AC signal is generated using a 2 GHz resonant cavity so that the frequency or frequencies of the signal applied to the STM electrodes and detected must be fixed in the scanning operation performed by Kochanski.
  • One aspect of the invention is directed to an apparatus for detecting threshold phenomena associated with and/or atomic or molecular spectra of a substance.
  • the apparatus comprises a source for providing a time varying signal and at least two electrodes for coupling the signal across a substance.
  • the apparatus further comprises a device connected to at least one of the electrodes for measuring the amplitudes of the current or voltage across the electrodes over a predetermined spectrum of frequencies to detect threshold phenomena associated with and/or atomic or molecular spectra of the substance.
  • Another aspect of this invention is a method used for detecting threshold phenomena associated with and/or atomic or molecular spectra of a substance by means of a pair of electrodes across the substance.
  • the method comprises providing an AC electrical signal to the electrode(s) and measuring the amplitudes of the current or voltage across the electrodes over a predetermined spectrum of frequencies to detect threshold phenomena associated with and/or atomic or molecular spectra of the substance.
  • This above aspect of the invention is based on the observation that threshold phenomena associated with and/or atomic or molecular spectra of a substance can be investigated by detecting the current or voltage across the electrodes of the STM at frequencies over a predetermined spectrum of frequencies simultaneously instead of at only a single frequency as in Kochanski•s work. Instead of detecting at different frequencies simultaneously, it is possible to detect at these frequencies sequentially as well.
  • the substance placed between the tip of the STM and a conductor is a bulk insulator such as a salt crystal or mineral or living cells in a large organism such as an animal, it may not be possible to pass a current through the insulator and detect the current therethrough or the voltage across it. Further aspects of the invention enable threshold phenomena associated with such substances to be measured as described below.
  • One additional aspect of the invention is directed to an apparatus for detecting threshold phenomena associated with and/or atomic or molecular spectra of a substance.
  • the apparatus comprises a source for providing a time varying signal and an electrode coupling said input signal to the substance and detecting a reflected electrical signal from the substance in response to said input signal.
  • the apparatus further comprises a device connected to the electrode for measuring the amplitude of the reflected signal from the electrode to detect threshold phenomena associated with and/or atomic or molecular spectra of the substance.
  • the measuring device measures the amplitudes of the reflected signal at the electrode over a predetermined spectrum of frequencies to detect threshold phenomena associated with and/or atomic or molecular spectra or electrochemical response of the substance.
  • the reflected signal may be used for comparison with a reference signal to derive an error signal fed back to control the distance between the electrode and the substance in a constant current mode.
  • Another aspect of this invention is a method used for detecting threshold phenomena associated with and/or atomic or molecular spectra of a substance by means of an electrode.
  • the method comprises placing the electrode in contact with or spaced apart but near the substance, and providing a time varying electrical input signal to the electrode, so that said input signal is coupled to said substance, said substance reflecting said input signal to generate a reflected signal.
  • the method further comprises measuring the amplitude of the reflected signal at the electrode to detect threshold' phenomena associated with and/or atomic or molecular spectra or electrochemical response of the substance.
  • the measuring step measures the amplitudes of the current or voltage across the electrodes over a predetermined spectrum of frequencies to detect threshold phenomena associated with and/or atomic or molecular spectra of the substance. Also in the preferred embodiment, the method further comprises comparing the reflected signal with a reference signal to derive an error signal and using the error signal to control the distance between the electrode and the substance in a constant current mode.
  • the above aspects of the invention are based on the observation that threshold phenomena associated with and/or atomic or molecular spectra or electrochemical response of a substance such as a bulk insulator can be investigated by using an electrode to couple a current or voltage directly or across a gap to the substance and detecting the reflected signal at the electrode. In this manner, it is unnecessary to measure the tunneling current which limits measurement to thin insulators or other small samples that can be placed on an electrical conductor.
  • the reflected signal may be measured at a STM electrode at frequencies over a predetermined spectrum of frequencies simultaneously instead of at only a single frequency as in Kochanski' ⁇ work. Instead of detecting at different frequencies simultaneously, it is possible to detect at these frequencies sequentially as well.
  • the frequency of the signal applied may be tuned to an optimal value for measuring the amplitudes of the current through or voltage across or of the reflected signal over the predetermined spectrum.
  • a tunable source e.g., between about 1-30 GHz
  • the frequency of the signal applied may be tuned to an optimal value for measuring the amplitudes of the current through or voltage across or of the reflected signal over the predetermined spectrum.
  • the frequency of the electrical signal it is possible to detect rates of motion of charges, or structural re-arrangements, in the sample or substance tested.
  • the frequency of the signal is maintained substantially constant but the amplitude of the signal is varied and the current through or voltage across the sample or substance or the signal reflected therefrom at a selected frequency is monitored so that a sudden change in current or voltage indicates a threshold of the substance.
  • the tunable source is preferably tuned to such frequency and the STM may then be used to scan a sample for differentiating different surface species or for obtaining images of the surfaces of the sample.
  • the system of this invention is applicable not only to STM's but also to other detection schemes such as the Coulomb blockade device for measuring threshold phenomena or rates of change of electrical charges in the device, and to electrochemical cells for detecting dynamic information concerning electrochemical changes.
  • a spectrum analyzer or a network analyzer is used for measuring the amplitudes of current through or voltage across the electrodes or of reflected signals over a predetermined spectrum of frequencies.
  • Other measurement devices that can be used instead of a spectrum analyzer or a network analyzer includes a lock-in amplifier, a microwave transition analyzer measuring at one frequency and its harmonics, a vector voltmeter, or a power meter with tunable filters.
  • a network analyzer is used to perform the measurements.
  • multiple source and detection frequencies may be used for detecting threshold phenomena or atomic or molecular spectra.
  • One aspect of the invention is directed towards an apparatus for detecting threshold phenomena associated with and/or atomic or molecular spectra of at least two substances in the vicinity of each other.
  • the apparatus comprises a source providing a time varying electrical signal and electrodes for coupling the signal to said at least two substances. Said signal includes components of at least two different frequencies that are individually or in various combinations characteristic of the at least two substances.
  • the apparatus further comprises a circuit substantially simultaneously measuring the amplitudes of the currents or voltages across the substances at said at least two frequencies or their harmonics, or their sums and differences or various combinations thereof to detect threshold phenomena associated with and/or atomic or molecular spectra of the at least two substances.
  • Another aspect of the invention is directed towards a method for detecting threshold phenomena associated with and/or atomic or molecular spectra of at least two substances in the vicinity of each other.
  • the method comprises providing a time varying electrical signal and coupling the signal to the at least two substances.
  • the signal includes components of at least two different frequencies that are individually or in various combinations characteristic of the at least two substances.
  • the method further comprises substantially simultaneously measuring the amplitudes of the currents or voltages across the substances at said at least two frequencies or their harmonics, or their sums and differences or various combinations thereof to detect threshold phenomena associated with and/or atomic or molecular spectra of the at least two substances.
  • Another aspect of the invention is directed towards an apparatus for detecting threshold phenomena associated with and/or atomic or molecular spectra of at least one substance
  • a source providing a time varying electrical signal and electrodes for coupling the signal to the at least one substance.
  • the signal includes components of at least two different frequencies.
  • the source includes at least two signal generators, each providing an electrical signal with frequencies in a frequency band including one of the at least two frequencies, and a combiner connecting the generators.
  • the apparatus further comprises a device substantially simultaneously measuring the amplitudes of the current or voltage across the substance at frequencies including said at least two frequencies or various combinations thereof.
  • Yet another aspect of the invention is directed towards a method for detecting threshold phenomena associated with and/or atomic or molecular spectra of at least one substance.
  • the method comprises providing time varying electrical signals of at least two different frequencies, combining the signals, and coupling the combined signal to said at least one substance.
  • the method further comprises substantially simultaneously measuring the amplitudes of the current or voltage across the substance at frequencies including said at least two frequencies or various combinations thereof.
  • Fig. 1 is a schematic diagram of a high frequency STM for imaging insulator surfaces using throughput attenuation with a network analyzer, or using non-linear harmonic recording with a spectrum analyzer.
  • Fig. 2A is a graphical illustration of the modulated bias voltage used in the apparatus of Fig. 1 over time, where the dashed line shows the voltage threshold for a second electron to hop to (or from) the surface.
  • Fig. 2B is a graphical illustration of the resulting current due to the effect of the second electron versus time when the bias voltage of Fig. 2A is applied in the apparatus of Fig. 1.
  • Fig. 3 is a graphical illustration of the Fourier spectra detected when an AC signal is applied across a substance to be measured.
  • the Fourier spectra includes three different graphs for three different substances having different thresholds.
  • Fig. 4 is a graphical illustration of the ratio of the current or voltage measured to the voltage or current applied to the STM electrodes across a predetermined spectrum when an AC signal of 2 GHz is applied across a substance.
  • Fig. 5 is a graphical illustration of the ratio of the current or voltage measured to the voltage or current applied to the STM electrodes across a predetermined spectrum when an AC signal of 2.5 GHz is applied across a substance.
  • Fig. 6 is a graphical illustration of the ratio of the current or voltage measured at the fundamental frequency to the voltage or current applied to the STM electrodes at the fundamental frequency to electrodes across a substance.
  • Fig. 7 is a plot of the alternating current STM image of the edge of a pore on a surface showing the microscopic details of the surfaces scanned.
  • Fig. 8 is a schematic diagram of an electrochemical cell and a circuit diagram of a potential controlling and current measuring instrument for monitoring the electrochemical cell in a conventional arrangement.
  • Fig. 9 is a schematic diagram of a Coulomb blockade device to illustrate the invention.
  • Fig. 10 is a schematic diagram of a high frequency STM and multiple oscillators and combiners for providing an AC signal of multiple frequencies and a network or spectrum analyzer for measuring simultaneously at multiple frequencies to illustrate the invention.
  • Fig. 11A is a schematic diagram of a high frequency STM for imaging insulator surfaces by measuring the reflected signal with a network analyzer, or a spectrum analyzer to illustrate the invention of this application.
  • Fig. 11B is a graphical illustration of the ratio of the current or voltage of the reflected signal measured using the scheme of Fig. 9 at the fundamental frequency to the voltage or current applied to the STM electrode at the fundamental frequency.
  • Shown in Fig. 10 also is a graphical illustration of the ratio of the current or voltage of the signal transmitted through the same substance measured using the scheme of Fig. 1 at the fundamental frequency to the voltage or current applied to the STM electrodes at the fundamental frequency to electrodes across a substance, where the reflected and transmitted signals are measured simultaneously.
  • Fig. 12 is a graphical illustration of an AC signal resulting by combining two signals of two different single frequencies to illustrate the invention.
  • Figs. 13A, 13B are schematic diagrams illustrating a one-dimensional and a two-dimensional array respectively of Coulomb blockade devices to illustrate the invention.
  • Fig. 14 is a schematic diagram of a high frequency STM for imaging insulator surfaces using throughput attenuation with a network analyzer, or using non-linear harmonic recording with a spectrum analyzer, and a DC source and detector.
  • Fig. 1 is a schematic diagram of a system 20 including a high frequency scanning tunneling microscope for imaging samples using throughput attenuation with a network analyzer, or using non-linear harmonic recording with a spectrum analyzer to illustrate the preferred embodiment of the invention.
  • a microwave sweep oscillator 21 generates an AC signal and applies it to microscope probe 22 with tip 22a (or to the sample 26 through counter electrode 28, not shown in Fig. 1) through line 24.
  • Tip 22a is placed close to but spaced apart (by vacuum, a gas or a fluid) from a sample 26 which is placed on top of the counter electrode 28.
  • Counter electrode 28 is connected to microwave spectrum/network analyzers 30.
  • the position of the probe tip 22a over sample 26 is controlled by piezoelectric crystal 32 which is in turn controlled by piezo controllers 34. Controllers 34 receive from analyzers 30 a signal to be used for feedback.
  • the microwave sweep oscillator 21 applies the AC signal to tip 22a and analyzers 30 applies typically a reference voltage such as a virtual ground to counter electrode 28.
  • the current or voltage between electrodes 22, 28 is monitored by analyzers 30 which derives a feedback signal for controlling controllers 34.
  • this feedback signal is applied to the piezo controllers 34 for moving the tip 22a away from or towards the sample 26 in order to maintain a constant signal amplitude between electrodes 22, 28.
  • constant height mode the distance between tip 22a and counter electrode 28 is maintained at a constant value and the feedback signal derived from the output of analyzers 30 is either not applied to controllers 34 or attenuated to a very low value before it is applied to controllers 34.
  • the scheme in reference to Fig. 1 differs from Kochanski•s described above in that a tunable source is used to generate the AC signal applied across the electrodes and the amplitudes of the current or voltage can be measured simultaneously at frequencies within a predetermined spectrum using the analyzer.
  • Analyzer 30 then computes the ratio between the amplitudes of the current or voltage measured to the amplitudes of the voltage or current applied by oscillator 21 to probe 22 at frequencies over a predetermined range or spectrum. Where the amplitudes are measured using a network analyzer, both the amplitudes and phases of current or voltage can be measured and used for imaging or spectroscopy.
  • the surface charge Q will change exactly by +e or -e, depending on the direction of tunneling, where e is the electrical charge of a single electron. If the charge Q at the junction is greater than +e/2, an electron can tunnel through the junction in a particular direction, subtracting e from Q. The electron will tunnel in the opposite direction if the charge Q is less than -e/2. If Q is less than +e/2 and greater than -e/2, tunneling in any direction would increase the energy of this system. If the initial charge is within this range, tunneling would not occur and this suppression of tunneling is known as Coulomb blockade.
  • Fig. 2A The effect of applying a sinusoidal voltage across two electrodes separated by an insulating layer is shown in Fig. 2A.
  • a certain threshold 50 shown in dotted line in Fig. 2A
  • this causes the surface charge across the insulating layer to exceed the Coulomb blockade range.
  • it is only during the time periods tl, t2, t3 that more than one electron can tunnel through the insulating layer in a single cycle to cause the current flow as shown in Fig. 2B.
  • the invention of this application is based on the observation that the threshold voltage of the substance in the sample can be determined by measuring the amplitudes of the current or voltage across electrodes over a predetermined frequency spectrum. Also, by inverse Fourier transform from the frequency domain to the time domain or by measuring directly in the time domain, graphs such as those in Fig. 2B can be obtained for determining the threshold of the substance in the sample.
  • the Fourier spectra of three different substances with respective thresholds of 1 volt, 1 and 2 volts, and 2 volts are illustrated in Fig. 3.
  • the respective thresholds of 1 volt, 1 and 2 volts, and 2 volts can be obtained. In this connection. Fig.
  • Fig. 4 is a graphical illustration of a spectrum of a substance when a 2 GHz signal is applied by oscillator 20 across electrodes.
  • Fig. 5 is a graphical illustration similar to that of Fig. 4 except that the oscillator applies an AC signal of 2.5 GHz instead of 2 GHz.
  • a threshold when the amplitude of the AC signal applied across the electrodes is varied, such as where the amplitude is continually increased, one will see a sudden increase in the current flow between the electrodes when a threshold is reached. This will cause a sudden change in current and voltage across the electrodes which can be detected to indicate the presence of a threshold. This may be accomplished by comparing the amplitudes of the high harmonics to those of the low harmonics of the driving frequency of oscillator 21.
  • the amplitude of the AC signal applied across the electrodes is varied by gradually reducing the amplitude, the surface charge buildup on one side of the insulating barrier caused by the tunneling electrodes would tend to dissipate because of the mutual repulsion of the electrons. The dissipation rate of the electrons will reveal the rates of motion of charges in the substance, and the charge transport characteristics of the substance.
  • the frequency of the signal is preferably kept substantially constant.
  • Oscillator 21 may be used to provide different frequency input AC signals across the electrodes.
  • the amplitudes of the current or voltage across the' electrodes may be measured as described above to obtain the spectra such as those shown in Figs. 3-5 for different frequency input signals.
  • the amplitude of the signal provided in the above procedure remains substantially unchanged when the frequency of the signal provided by oscillator 21 is varied. From the various spectra obtained, an optimum value may be obtained for the frequency of the signal applied by oscillator 21, such as one which maximizes the signal detected.
  • Fig. 6 illustrates such a feature.
  • Fig. 6 shows the frequency response at the fundamental for tip 22a at the same spot of the sample. In other words. Fig.
  • Fig. 6 is a plot of the ratio of the amplitude at the fundamental frequency of the current or voltage measured to the amplitude of the voltage or current applied to the electrodes, as the fundamental frequency of the signal applied by oscillator 21 is swept from 1.5 to 22 GHz.
  • the optimum frequency is indicated by the peak of the curve in Fig. 6 at about 7.7 GHz. This indicates that when the input signal is at such frequency, the signal recorded is maximum at the fundamental frequency.
  • the amplitudes at frequencies other than the fundamental may be used instead and are within the scope of the invention.
  • Fig. 6 is obtained by sweeping the fundamental frequency supplied by the oscillator 21 under control of the analyzer 30, although this frequency can also be swept independently.
  • oscillator 21 may be tuned to such frequency and the STM is used in an otherwise conventional manner in either the constant current or constant height mode for differentiating surface species or for obtaining images of the surfaces of a substance or sample.
  • the AC STM can be used to generate a map of the chemical species, the chemical environment or physical structure on the surface.
  • the information may be used to determine the surface composition of one area versus another, or to intercompare an unknown with a previously characterized sample. Samples that can be visually intercompared with known spectra for identification purposes are the simplest case. If the differences are more subtle, a mathematical convolution of the known and unknown to highlight the differences assists the user to see the degree of agreement or lack thereof between the spectra. Where multiple source and detection frequencies are employed in the invention of the present application, such convolution is especially useful since more data would be available for a constrained fit.
  • the spectra are qualitatively very similar, or the signal to noise ratio is poor, or it is desired to have a numerically based recognition of match.
  • a statistical intercomparison of the spectra can be used to differentiate an unknown amongst a wide range of candidates.
  • approaches There are many approaches. Amongst them are the least square distance between spectra or a calculation of the eigenvector distance between spectra in n-dimensional space.
  • a network analyzer is used.
  • a spectrum analyzer is used.
  • Other instruments that may be used include lock-in amplifiers, microwave transition analyzers measuring at one frequency and its harmonics, vector voltmeters and power meters with tunable filters.
  • Fig. 7 shows an image obtained of an edge of a pore on the surface using an STM employing the system of the invention of this application. Since the invention functions at the atomic or molecular level, it is possible to detect and measure surface species and other local phenomena.
  • the concept of this invention can be used not only for application to STM but also to other technologies including Coulomb blockade applications and electrochemical applications.
  • the invention of this application is particularly useful for detecting fast electrochemistry. This is useful for analyzing electrochemically generated species before they diffuse away from the electrode at which they are generated and/or undergo subsequent reaction. It is also possible to analyze chemical species where the electrochemical environment is rapidly changing, such as in electrochemical probing of living cells. Fast electrochemistry can also be used to determine reaction rates and mechanisms. By using a very high modulation frequency, it is possible to measure extremely small numbers of molecules at very small electrodes by being able to measure a signal from each molecule present repeatedly as a form of signal amplification.
  • Fig. 8 is a schematic view of an electrochemical cell and a circuit of a potential controlling and current measuring instrument for monitoring the cell in a conventional arrangement taken from "Ultramicroelectrodes: Cyclic Voltammetry Above One Million V s "1 ,” by Andrieux et al., J. Electroanal. Chem.. .24 . 8:447-450 (1988).
  • electrochemical cell 100 is monitored by circuit 102 having counter electrode C, reference electrode R, and working electrode W.
  • the scheme in Fig. 8 can be readily modified so that a concept of the invention may be applied thereto.
  • the working electrode W is connected to analyzers 30 in the same way as counter electrode 28 of Fig. 1.
  • the output of oscillator 21 is applied to counter electrode C and reference electrode is connected to analyzers 30. Then the above-described operation for the STM may be adapted for measuring the fast electrochemistry of cell 100.
  • the capacitance of the bilayer (the molecules aligned at the electrode surface) is reduced, thereby reducing the associated RC time constant of the electrochemical cell 100 in order to increase the speed of the measurement.
  • a high frequency AC signal with or without a DC bias is applied to the counter electrode and the frequency spectrum at the current at the working electrode is sensed.
  • the frequency spectrum obtained from such measurements will reflect the current/voltage curves, since the current/voltage characteristics of the electrochemical cell are highly non-linear.
  • Working at high frequency will outrun certain processes such as diffusion of electrochemically generated species away from the electrode.
  • the DC bias can also be set to a feature of interest in the current/voltage characteristic of the electrochemical cell.
  • a source for applying a DC bias voltage and current is also included so that the AC signal from the oscillator 21 is superposed onto such DC signal before the summed time varying signal is applied to the cell 100.
  • Fig. 9 is a schematic view of a Coulomb blockade device 200 sandwiched between two conductive layers 204, 206 connected respectively to electrodes 208, 210.
  • the dotted line box in Fig. 1 is replaced by the Coulomb blockade device 200 of Fig. 9 so that the general scheme of Fig. 1 may be used for monitoring the Coulomb blockade device 200.
  • electrode 208 may be connected to the network analyzers 30 through conductor 40 and electrode 210 may be connected to oscillator 21 through conductor 24.
  • the scheme of Fig. 1 can then be used for measuring thresholds and charge dissipation rates in a manner similar to that described above for the STM.
  • the thresholds are measured by varying the amplitude of the applied AC signal.
  • the spectra obtained may be transformed using Fourier transform to obtain the threshold.
  • the sudden change in current or voltage across the electrodes 208, 210 will be adequate.
  • the modulation frequency is varied with the amplitude held constant. If charge escapes during a period, then the threshold (which is due to repulsion from the previous tunneled charge) disappears as does the corresponding non-linearity. The higher harmonics would then decrease as the signature that the dissipation is taking place on the time scale of the modulation. Again, by comparing the amplitudes of the high harmonics to those of the low harmonics of the driving frequency, such dissipation can be detected. This is the case also when a sample or an electrochemical cell is measured using a STM. By applying a summed signal having both AC and DC components in the manner described below in reference to Fig. 14, it is possible to maintain a DC bias at a certain level that would match or approach the threshold concerned while varying the modulation frequency or amplitude.
  • optimum value may be obtained for the frequency of the signal applied by oscillator 21, such as one which maximizes the signal detected as illustrated in Fig. 6.
  • Such optimum frequency is a characteristic of the substance.
  • two different substances will have two different optimum frequencies neither of which is an integral multiple of the other; in other words, the optimum frequency of each of the two substances is not a harmonic of the optimum frequency of the other substance.
  • the above described scheme may need to be modified. Instead of finding a single optimal frequency for both substances, to differentiate between the responses of the two substances, one would attempt to find a first optimal frequency where the response of a first substance is measurably higher than that of a second substance, and a second optimal frequency where the response of the second substance is measurably higher than that of the first substance. This may be possible even though at many other frequencies other than the first and second frequencies, the responses of the two substances are nearly the same. In such event, it would be useful to identify each of the substances by more than one frequency as its characteristic frequencies. Therefore, to obtain optimized results. one would supply to the ACSTM an input signal having' components at each of the optimal frequencies.
  • Fig. 10 is a schematic view of a high frequency STM for imaging substances using a network or spectrum analyzer and multiple oscillators to illustrate the invention of this application.
  • the scheme 300 in Fig. 10 differs from that of Fig. 1 in that n microwave sweep oscillators 21(1), 21(2), ..., 21(n) are used to supply signals of multiple frequencies instead of only one oscillator 21 supplying signals of a single frequency input.
  • the output of oscillator 21(1) is applied to a combiner 302(1) where the output is split into two paths: one path towards combiner 302(2) and the other to the external reference port of the network/spectrum analyzer 30.
  • Combiner 302(2) combines the outputs of oscillators 21(1), 21(2) and sends the combined signal to combiner 302(3) (not shown) which combines such combined signal with the output of oscillator 21(3) (not shown) and so on until combiner 302(n) combines the output of oscillator 21(n) with the outputs of the remaining (n-1) oscillators, and sends the combined signal from the n oscillators along line 24 to the STM probe 22.
  • the combined signal from line 24 is applied to tip 22a and a current or voltage between electrodes 22, 28 is monitored by analyzer 30 or analyzer 306 in a manner described above.
  • a DC voltage or current source may be used in addition to supply a DC bias voltage and current upon which the AC combined signal from the outputs of the oscillators are superposed and the combined or summed time varying signal including DC and AC components supplied to probe 22 or counter electrode through line 24.
  • Such source has been omitted from Fig. 10 for simplicity, it being understood that such optional source is intended and is very useful for electrochemical and Coulomb blockade device applications as explained below.
  • a source generating signal pulses or transients instead of using a number of oscillators and a DC source, it is also possible to use a source generating signal pulses or transients. In general, one can use a source that generates a DC signal, an AC signal, a signal pulse or a signal transient or a combination of two or more thereof; all such variations are within the scope of the invention.
  • a combiner that may be used is a combiner/splitter, although other devices that combine signals may be used as well and are within the scope of the invention. While the embodiments may be described in terms of combining signals and applying the combined signal to the ACSTM, it will be understood that mixers (not shown) may be used to mix the input signals instead and the mixed signal applied to the ACSTM and the invention as described herein will function in essentially the same way to provide all the advantages described herein. In such case, each of the combiners
  • analyzer 30 is generating a feedback signal to controllers 34, then a separate spectrum analyzer 306 is needed to detect and record the detected signal spectrum while analyzer 30 is generating the feedback control signal.
  • combiner or signal splitter 304 sends the current or voltage signal from the counter electrode 28 to analyzers 30 and 306.
  • Each of the frequencies of the outputs of the n oscillators can be chosen to isolate or to indicate particular features such as the use of spectral signatures or functional groups of molecules of interest.
  • Each frequency or a combination of frequencies can be used to probe a particular chemical or physical aspect of the sample.
  • a combination of frequencies is defined as integral multiples (harmonics) of each of the frequencies, and/or sums or differences of such frequencies or multiples.
  • Each of the frequencies from the oscillators and combinations thereof may be detected simultaneously using the spectrum/network analyzer 306. It is therefore possible to map the regions of surfaces containing particular chemical species or exhibiting particular phenomena (e.g., electrical charging).
  • the voltage or current signal detected from the counter electrode 28 and fed to analyzer 306 also has such frequencies and/or combinations thereof.
  • One of these frequencies may be used for feedback purposes to control piezo controllers 34 and in order to control the height of probe 22 above counter 28. This may be accomplished by moving the probe tip or by moving the counter electrode and the sample.
  • the detected signal from counter electrode 28 is split by combiner 304 into two paths, one to analyzer 30 and the other to spectrum analyzer 306 for spectroscopy.
  • Analyzer 30 uses one of the frequencies in the current or voltage from counter 28 to derive an error signal in a feedback path 310 to controllers 34 for controlling the height of probe 22 to reduce such error signal.
  • the controllers 34 may control either the position of the probe tip 22a as shown in Fig. 10, or the position of the counter electrode 28 and the sample (not shown) . It will be understood that manners of control other than those discussed above may also be used, such as a DC voltage from an optional DC source (not shown in Fig. 10) . When an AC or DC feedback is employed to derive an error signal, such feedback action would tend to reduce the error signal so as to maintain a constant current flow between tip 22 and counter electrode 28. Alternatively, the feedback voltage may be turned to a very low value or not applied at all to controllers 34 in a "constant height mode.”
  • Fig. 11A is a schematic diagram of a high frequency AC STM for imaging bulk insulator surfaces by measuring the reflected signal using the network analyzer, or using non-linear harmonic recording with a spectrum analyzer.
  • the sample to be measured is a bulk insulator, such as a salt crystal or mineral or a living cell of an organism, it may not be possible to measure the tunneling current or voltage in the manner described above. In such circumstances, the apparatus 20' of Fig. 11A will enable such substance to be measured.
  • the sweep oscillator 21 supplies an AC signal to analyzer 30 which in turn supplies a microwave signal to sample 26' through tip 22a of the STM.
  • This signal is transmitted from analyzer 30 to the STM through cable 150.
  • the signal transmitted by tip 22a and reflected by sample 26' is detected instead at tip 22a, where such reflected signal is transmitted by cable 150 back to analyzer 30 at input/output port 1.
  • Analyzer 30 records the reflected signal received at port 1.
  • analyzer 30 is capable of recording the amplitude at one frequency or amplitudes at different frequencies over a predetermined spectrum of signals and therefore records the amplitudes at different frequencies within a predetermined spectrum of the reflected signal from cable 150.
  • Fig. 11B is a graphical illustration of the ratio of the current or voltage of the reflected signal measured using the scheme of Fig. 11A at the fundamental frequency to the input voltage or current applied to the STM electrode at the fundamental frequency.
  • Analyzer 30 is of the type which can record both the reflected signal and the transmitted signal where the transmitted signal is recorded in the manner described above in reference to Fig. 1.
  • the transmitted signal may be detected by another electrode (not shown in Fig. 11A but similar to electrode 28 of Fig. 1) and sent to analyzer 30 to a port (not shown in Fig. 11A) different from port 1. Shown also in Fig.
  • FIG. 11B is a graphical illustration of the ratio of the current or voltage of the signal transmitted through the same substance as in Fig. 11A, measured using the scheme of Fig. 1 at the fundamental frequency to the voltage or current applied to the STM electrodes at the fundamental frequency to electrodes across a substance where the reflected and transmitted signals are measured simultaneously.
  • the reflected signal is plotted in solid lines whereas the transmitted signal is plotted in dotted lines.
  • both the transmitted and reflected signals are measured when tip 22a of the STM is close to a sample 26'. This assumes that the sample 26' is not a bulk insulator so that the transmitted signal at electrode 28 of Fig. 1 can also be detected and measured and sent to analyzer 30.
  • the spectrum of sample 26' obtained by detecting the reflected signal is similar to the spectrum obtained by detecting the transmitted signal caused when electrons tunnel through sample 26'.
  • the signal reflected by the sample 26' back towards tip 22a has similar signal characteristics as the signal that is transmitted through the sample 26'.
  • the reflected signal may be fed back through path 152 from analyzer 30 to controller 34 for controlling the distance between tip 22a and sample 26' in a constant current mode.
  • the STM is operating in constant height mode. This also demonstrates that where only one electrode is used to couple the signal to the sample or substance measured, measuring the reflected signal instead of the current through or voltage across the sample or substance is possible even though the sample or substance is electrically conducting.
  • a directional coupler 154 shown in dotted lines in Fig. 11A may be used to separate the reflected signal from the input signal from oscillator 21 on cable 150, and this reflected signal is sent to an appropriate device 156 also shown in dotted lines in Fig. 11A through line 158.
  • Device 156 then detects and measures the reflected signal.
  • Device 156 may be a spectrum analyzer, a network analyzer, a vector voltmeter, a power meter used with tunable filters, or any other device capable of measuring amplitude versus frequency.
  • the scheme of Fig. 11A is used for detecting electrochemical changes, the configuration of Fig.
  • Reference electrodes R may still be used for the electrochemical cell in this context.
  • the reflected signal detected from the working electrode W may then be used in the same manner as that described above for the transmitted signal, for measuring various characteristics of the electrochemical change.
  • Fig. 10 By combining or mixing electrical signals of different frequencies, the embodiment of Fig. 10 enables sums and differences or other combinations of the n frequencies to be generated and applied to the sample 26. This is advantageous for a number of reasons as described below.
  • the signal output resulting from combining two sine wave signals of different frequencies is illustrated in Fig. 12.
  • Fig. 12 by combining two signals of different amplitudes, one would obtain sharp spikes 350 of amplitudes greater than the amplitudes of the two sine wave signals from the oscillators, the sine wave signals being combined to obtain the wave form of Fig. 12.
  • the sharp spikes 350 are of a shape determined by the sum of the frequencies of the two input sine waves, where the sharp spikes 350 would occur at a frequency equal to the difference between the two input sine wave forms.
  • the period of such spikes 350 is t, which is greater than the periods of either one of the two input sine wave forms.
  • the duty cycle of the spikes is 1/t.
  • Fig. 12 is a graphical illustration of a voltage wave form of the signal resulting from combining input voltage signals of two different frequencies, the wave form obtained has a higher amplitude than the two input voltage signals. It is evident that spikes 350 exceed the threshold 352 only for short periods of time at a duty cycle 1/t. If the voltage wave form of Fig. 12 is generated by combining two voltage wave forms having frequencies fl, f2, then the duty cycle 1/t is given by the difference frequency fl-f2 of the two input frequencies. The shape of the spikes 350 is determined by the sum fl+f2 of the two input frequencies.
  • the proper input frequencies fl, f2 it is possible to control the shape of the spikes 350 as well as the duty cycle of the spikes.
  • the voltage wave form of the signal applied to the probe tip 22a of the ACSTM or sample 26 results from combining or mixing more than two signals of different frequencies, it is possible to further fine tune the shape and duty cycle of the spikes.
  • the response of the substance(s) may be measured at the difference frequency instead of at higher frequencies. This may be advantageous if measurement at such low frequency has a better signal to noise ratio than at certain higher frequencies.
  • the scheme of Fig. 10 may be advantageous for applications in electrochemistry, such as when applied to the electrochemical cell of Fig. 8, or simply where sample 26 in Fig. 10 is undergoing electrochemical changes, such as in a living cell.
  • electrochemistry such as when applied to the electrochemical cell of Fig. 8, or simply where sample 26 in Fig. 10 is undergoing electrochemical changes, such as in a living cell.
  • By using multiple source and detection frequencies it is possible to analyze and to separate the effects of more than one electrochemically generated species prior to diffusion away from the electrode at which they are generated and/or subsequent reaction. It is also possible to analyze simultaneously multiple chemical species where the electrochemical environment is rapidly changing, such as in electrochemical probing of living cells. It is also possible to determine "fast" reaction rate and mechanisms.
  • the separation/speciation of the multiple components in each case could be done on the basis of: (1) the diffusion rate to and from the electrode, (2) the generation or reaction rate adds on near the electrode, and (3) the generation or reaction potential. This is explained in more detail below.
  • Such species A then reacts with another species B to give rise to another species C. If all of the species B near the electrodes have been consumed by the reaction, such reaction cannot continue until species B has time to diffuse to the vicinity of the electrodes again.
  • the input frequencies of the two oscillators from 21(1) - 21(n) may be controlled so as to give rise to a long enough period t (relaxation time) , to allow adequate time for a species B to diffuse to the vicinity of the electrodes. Then another sharp spike 350 would occur. causing the species A generated to again react with species B to generate species C.
  • the different species In order to provide a detectable signal, the different species must be detected repeatedly at the difference frequency between the two input sine wave frequencies to yield a detectable signal at the analyzer 306. In other words, an electrochemical signal due to this event would appear at the difference frequency, such as fl-f2 or its harmonics, where fl, f2 are input frequencies at two of the oscillators 21(1) - 21(n).
  • Figs. 13A, 13B are schematic views of a one- dimensional array and a two-dimensional array respectively of Coulomb blockade devices that are currently used.
  • Figs. 13A, 13B are taken from "Single Charge Tunneling Coulomb Blockade Phenomena in Nanostructures," edited by Hermann Grabert and Michel H. Devoret, NATO ASI Series, Series B: Physics, Vol. 294, Chap. 1, page 17, Fig. 9.
  • the appropriate AC voltages with frequency f are applied to the gates (i.e., to the nodes 504(1), 504(2), ..., 504(m-1) ) in Fig.
  • the devices 502(l)-502(m) collectively referred to as devices 502, to have the same resonance frequency. If the devices 502 have somewhat different resonance frequencies, this will cause array 500 used as a current standard to be inaccurate.
  • an input signal including components at two frequencies which are different by a small offset may be applied to the input 506 and the current or voltage at 508 is measured at said at least two frequencies or their harmonics, or various combinations thereof to indicate the accuracy of the standard.
  • current standard 500 responds to such input signal by causing a current or voltage at output 508 to include both frequencies or their harmonics, or various confirmations thereof, it tends to indicate that the devices have different resonance frequencies.
  • the apparatus of Fig. 10 may be applied to the current standard 500 by replacing the dotted line box in Fig. 10 by the array 500 so that line 24 is connected to the input 506 and the output 508 of the apparatus 500 is connected to splitter 304.
  • Fig. 10 connected to array 500 may also be used to detect thresholds of the devices 502 and their charge dissipation characteristics. This can be performed by applying a voltage input signal having the wave form shown in Fig. 12 to the input 506 of the array 500.
  • the voltage wave form of Fig. 12 is obtained again by combining two input voltage wave forms, with frequencies fl, f2 respectively.
  • the respective amplitudes of the two input voltages are varied so that the amplitude of spikes 350 is increased to exceed a predicted threshold 352 of one of the Coulomb blockade devices in the array 500.
  • threshold 352 is indicated by the detection of an increase of higher harmonics and their combinations in the spectra.
  • threshold 352 of the device would be predicted or indicated by presence of large amplitudes of the higher harmonics of the difference frequency fl-f2 or their combinations in the current or voltage detected by the ACSTM.
  • the charge dissipation characteristics of the Coulomb blockade devices in the array may be detected as • follows. If the frequency fl is higher than the frequency f2, then the oscillator that generates the voltage signal at frequency fl is tuned to reduce the frequency fl, while maintaining the same amplitude. If spikes 350 are indeed just above threshold 352, and if the time period during which the spikes exceed threshold 352 becomes comparable to the time scale of dissipation of the devices, this tuning has the effect of broadening the spikes 350 (by reducing fl+f2) , thereby increasing their widths, and reducing the difference frequency fl- f2. This prolongs the time during which the total input voltage wave form shown in Fig.
  • array 500 While the invention as applied to array 500 is illustrated above by example to an array 500 where the blockade devices are arranged in series, it will be understood that the invention is similarly applicable where the devides are arranged in parallel instead or an array with a combination of series and parallel connected devices.
  • the above described schemes for detecting inaccuracies in array 500 used as a current standard or threshold detection in array 500 may also be applied to the two-dimensional array 600 with input 606 and output 608 in the manner similar to that described above for array 500, where line 24 of Fig. 10 is connected to input 606 and output 608 of array 600 connected to splitter 304 in Fig. 10, replacing the dotted line box in Fig. 10.
  • Fig. 14 is a schematic diagram of a high frequency STM for imaging insulator or conductive surfaces using throughput attenuation with a network analyzer, or using non-linear harmonic recording with a spectrum analyzer, and a DC source and a DC detector. From a comparison of Figs. 1 and 14, it will be evident that, in addition to the components present in Fig. 1, device 700 also includes a DC source 702. The DC voltage from source 702 is coupled together with the AC signal from the sweep oscillator 21 through a bias network 704 to line 24 connected to the tip 22a of the STM. Bias network 704 includes an inductor 706 for coupling a DC voltage or low frequency signal to line 24.
  • bias network 704 adds the DC bias voltage or a low frequency signal from source 702 to the high frequency signal from the sweep oscillator 21 and supply the summed signal having both DC and AC components to line 24.
  • the signal from counter electrode 28 is fed through another bias network 704 which separates the DC or low frequency components from the high frequency components which are supplied through capacitor 708 to line 40 which is connected to a spectrum or analyzer 30.
  • the DC or low frequency components of the current from counter electrode 28 are coupled through an inductor 706 to a current amplifier 710 to detect the DC or low frequency current.
  • the current detected by amplifier 710 may be fed back to piezo controllers 34 in the constant current mode in lieu of or in addition to the AC signal detected as described above.
  • oscillators and a DC source as described above in reference to Fig.
  • a source generating a signal pulse or a signal transient it is also possible to employ a source generating a signal pulse or a signal transient.
  • a source that generates a DC signal, an AC signal, a signal pulse or a signal transient or a combination of two or more thereof; all such variations are within the scope of the invention.
  • device 700 is modified simply by replacing the voltage source 702 by a low frequency or DC current source and the current amplifier 710 is replaced by a voltmeter for detecting the DC or low frequency voltage across the sample. Aside from such change, device 700 will function in essentially the same manner as that described above. Instead of applying the summed signal having both AC and DC components to tip 22a of the STM as described above, such signal may instead be applied to the sample through counter electrode 28; in such event, the current through a sample is then detected at tip 22a of the STM so that the tip is then connected to analyzer 30 and detector 710 through the bias network 704 instead. Such and other possible variations are all within the scope of the invention.
  • sources for providing or to devices for detecting AC signals to measure a sample or substance may provide and said detection devices may detect a DC signal, an AC signal, a signal pulse, a signal transient, or a combination of two or more thereof, the term signal herein referring to a current and/or a voltage, for measuring the sample or substance and the various features of the invention described above are similarly applicable.

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Abstract

L'invention concerne un générateur hyperfréquence ou toute autre source de signaux utilisé pour appliquer un signal variant dans le temps à un microscope de balayage par effet tunnel, le courant ou la tension passant dans un échantillon entre les électrodes ou le signal couplé par une électrode et réfléchi par l'échantillon étant mesurés par un analyseur de réseau/spectre hyperfréquence. La fréquence du signal appliqué par le générateur peut être balayée sur un spectre et la fréquence optimale du spectre est déterminée de manière à obtenir une meilleure image de la surface d'un échantillon. Le spectre d'une substance connue peut également être enregistré et utilisé comme signature pour identifier par comparaison les composants d'une substance inconnue. Lorsque le signal est appliqué à des cellules électrochimiques, les informations dynamiques de celles-ci peuvent être mesurées. Lorsqu'il est appliqué à un dispositif de blocage de Coulomb, les seuils de charge et les taux de dissipation de charge peuvent être mesurés. Plusieurs sustances peuvent être contrôlées simultanément au moyen de multiples fréquences d'entrée. Lorsque le signal est appliqué à un groupement de dispositifs de blocage de Coulomb utilisés comme étalon, la précision de l'étalon peut être testée et le rapport signal/bruit peut être amélioré dans les mesures, ou le seuil des dispositifs peut être détecté.
PCT/US1993/006718 1992-07-17 1993-07-16 Systeme de detection du spectre atomique ou moleculaire et/ou des phenomenes de seuil associes WO1994002840A1 (fr)

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EP93917238A EP0650593B1 (fr) 1992-07-17 1993-07-16 Systeme de detection du spectre atomique ou moleculaire et/ou des phenomenes de seuil associes
PCT/US1993/006718 WO1994002840A1 (fr) 1992-07-17 1993-07-16 Systeme de detection du spectre atomique ou moleculaire et/ou des phenomenes de seuil associes
DE69332710T DE69332710T2 (de) 1992-07-17 1993-07-16 System zum feststellen von atom- oder molekularspektren und/oder damit verbundenen schwellenerscheinungen
US08/283,007 US5559328A (en) 1993-07-16 1994-07-29 Small cavity analytical instruments

Applications Claiming Priority (11)

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US07/916,165 1992-07-17
US07/916,165 US5268573A (en) 1992-07-17 1992-07-17 System for detecting threshold phenomena associated with and/or atomic or molecular spectra of a substance
US07/979,597 US5281814A (en) 1992-07-17 1992-11-20 System for imaging and detecting threshold phenomena associated with and/or atomic or molecular spectra of a substance by reflection of an AC electrical signal
US07/979,597 1992-11-20
US5634893A 1993-04-30 1993-04-30
US08/056,348 1993-04-30
US08/092,016 1993-07-15
US08/092,133 1993-07-15
US08/092,016 US5397896A (en) 1992-07-17 1993-07-15 Multiple source and detection frequencies in detecting threshold phenomena associated with and/or atomic or molecular spectra
US08/092,133 US5434842A (en) 1992-07-17 1993-07-15 Reading and writing stored information by means of electrochemistry
PCT/US1993/006718 WO1994002840A1 (fr) 1992-07-17 1993-07-16 Systeme de detection du spectre atomique ou moleculaire et/ou des phenomenes de seuil associes

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