WO1993011862A1 - Filtre micromecanique et procede pour sa fabrication - Google Patents
Filtre micromecanique et procede pour sa fabrication Download PDFInfo
- Publication number
- WO1993011862A1 WO1993011862A1 PCT/DK1992/000364 DK9200364W WO9311862A1 WO 1993011862 A1 WO1993011862 A1 WO 1993011862A1 DK 9200364 W DK9200364 W DK 9200364W WO 9311862 A1 WO9311862 A1 WO 9311862A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- filter according
- layer
- regions
- top layer
- filter
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000010410 layer Substances 0.000 claims description 154
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 239000004411 aluminium Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000005304 joining Methods 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 238000004458 analytical method Methods 0.000 claims description 3
- 238000004868 gas analysis Methods 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 229920003023 plastic Polymers 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims description 3
- 238000004080 punching Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000005388 borosilicate glass Substances 0.000 claims 1
- 238000001914 filtration Methods 0.000 description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 239000012530 fluid Substances 0.000 description 10
- 238000005530 etching Methods 0.000 description 9
- 239000002245 particle Substances 0.000 description 9
- 238000000502 dialysis Methods 0.000 description 7
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 5
- 238000010276 construction Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 241000894006 Bacteria Species 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000012447 hatching Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 230000035508 accumulation Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0093—Chemical modification
- B01D67/00933—Chemical modification by addition of a layer chemically bonded to the membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0093—Chemical modification
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/24—Dialysis ; Membrane extraction
- B01D61/28—Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/0058—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by selective elimination of components, e.g. by leaching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/12—Composite membranes; Ultra-thin membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/12—Composite membranes; Ultra-thin membranes
- B01D69/1216—Three or more layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/0213—Silicon
Definitions
- Micro echanical filter and method for the manufacture thereof are disclosed.
- the invention relates to a micromechanical filter with a top layer provided with openings, a bottom layer, and an intermediate layer provided in predetermined first regions between the top layer and bottom layer, which intermediate layer substantially determines the spacing between the top layer and bottom layer in predetermined intermediate layer-free second regions, and a method for the manufacture of such a filter, in which the top layer and the bottom layer are joined together by means of the intermediate layer, first and second regions being formed by removal of parts of the intermediate layer.
- a filter of that kind is known from WO 89/08489.
- the top layer and bottom layer have openings which are staggered relative to one another. These openings are joined to one another by intermediate layer-free second regions so that a fluid path from an opening in the top layer through the intermediate space between the top layer and the bottom layer to the opening in the bottom layer can be formed.
- the degree of permeability of the filter or the filter opening is in that case determined by the spacing between the top layer and the bottom layer. This spacing is in its turn determined by the thickness of the intermediate layer, which supports the top layer and the bottom layer against one another.
- the terms "top layer” and "bottom layer” serve here merely to differentiate two layers, they do not determine the orientation of the filter. In the known filter, a relatively large pressure difference is necessary to propel the fluid through the filter. This leads to a correspondingly high pressure drop across the filter.
- the invention is based on the problem of providing a filter which creates a lower pressure drop during filtering.
- the flow resistance for the fluid is therefore quite considerably reduced.
- the filtering effect is not impaired thereby, since the filtering characteristic is still determined by the second regions.
- this filter allows only corresponding particle sizes to pass through and holds others back.
- In the third regions there is admittedly a larger dead volume, but this is far more easily controllable than in the known case.
- a fluid is able to flow substantially more easily out of the third regions, with the result that emptying of the filter is improved.
- the degree of support and the number of supporting points depend on the desired intended use.
- a second region is provided between a third region and an opening.
- the effect of this is that only filtered fluid flows in this third region.
- the filter is thereby easily controllable.
- the area of the third regions is also preferable for the area of the third regions to be substantially larger than that of the second regions.
- the second regions, which form the main flow resistance, then still suffice to hold back the desired particles, but there is no need for a larger width, with the result that the flow resistance of the filter can be kept small to the required degree.
- the third regions form ducts.
- the fluid flowing through the filter can be collected in these ducts and guided in a controlled manner. Control of the fluid flow is thereby already effective in the filter.
- An advantageous construction furthermore provides for a plurality of ducts to be connected in parallel.
- the flow conductance values of the individual ducts are added together as a result, which leads to a further reduction in flow resistance.
- the third regions are in connection with at least one inlet and at least one outlet.
- a flow through the third regions can thereby be achieved which renders the filter particularly suitable for use as a dialysis filter.
- particles or, in an extreme case, even elemental particles, such as ions are able to pass from the openings through the filtering slot formed by the second regions into the third regions, and can be taken up by an acceptor medium flowing from the inlet to the outlet.
- the acceptor medium can be distributed in the collecting space to the ducts or can be collected from there again. This enables the acceptor medium to be controlled relatively easily.
- the openings are preferably longer than they are wide and their width corresponds substantially to the width of the ducts, a transition from an opening into a duct being effected substantially at the long sides thereof.
- the flow behaviour through the openings can thereby be matched to the flow behaviour through the ducts.
- the donor medium and the acceptor medium are able to flow substantially parallel to one another, the desired particles being able to change over from the donor medium into the acceptor medium through the filtering slot into the second regions.
- the ducts are arranged in groups substantially parallel with one another, adjacent groups being arranged so that the ends of the respective ducts face towards one another and just one outlet region or just one inlet region is formed between two adjacent groups. The inlet region is then in connection with the inlet and the outlet region is in connection with the outlet.
- the ducts are arranged parallel with one another. Two adjacent groups have a common inlet region or common outlet region. This results in the individual groups in turn being arranged parallel with one another.
- two adjacent groups together form an angle; in the apex region of the angle there is a separation between the inlet and outlet region. Because the groups themselves separate the inlet region from the outlet region, the angle ensures that a separation between the inlet region and the outlet region where there are no groups of ducts is confined to a narrow space. The measures for separating the inlet region from the outlet region therefore involve very little expense.
- a plurality of groups is arranged in a meander, which separates the inlet region from the outlet region. Because both the individual groups and also the ducts within a group are arranged in parallel, this produces a parallel arrangement of very many ducts, which contributes to a considerable reduction in the flow resistance of the filter, in particular for the acceptor medium, and at the same time provides a large transitional area between the donor medium and the acceptor medium.
- the overall size of the filter is kept small, however. In principle, only the lengths of the individual groups determined by the lengths of the ducts are added, and not the total width of all the ducts determined by the sum of the widths of the ducts.
- the bottom layer is preferably formed from boro ⁇ ilicate glass. This material has proved reliable in microtechnology.
- the filter can be covered on the side having the openings by a protective layer, which leaves free at least a subregion of the openings.
- the openings can thereby be supplied with medium, but at the same time the top layer is largely protected against mechanical influences and attendant damage.
- the top layer is preferably inclined in relation to the bottom layer at the transition from a first or a second region to a third region. This facilitates manufacture and improves the flow behaviour.
- a heating means in particular a heating means formed by two electrodes.
- a current can be produced across the filter. Because the filter has a certain electrical resistance, this current leads to the formation of heat, which can easily lead to a temperature of 100° C in air. Biological contamination of the filter, such as accumulations of bacteria, can thereby be rendered harmless.
- the top layer can consist of silicon, doped silicon, or boron-doped silicon.
- the intermediate layer can be formed from quartz, with the bottom layer being formed from silicon or glass.
- the intermediate layer can consist of metal, in particular aluminium, while the top layer is formed from silicon and the bottom layer from glass.
- the filter has an integrated conductivity meter, which is arranged in particular in the collecting space. Using such a conductivity meter the electrical conductivity of the media, especially the acceptor medium, can be ascertained. On the basis of these values the inflow to the filter can be controlled. With the conductivity meter arranged in the collecting space, the small dead volume of the filter can be exploited well, and a very rapid response is achieved.
- the conductivity meter is preferably formed by a thin-film disposed on the bottom layer or top layer, in which pairs of electrodes are formed.
- the co-operating pairs of electrodes enable a current to be passed through the medium to be examined, by means of which the conductivity of the medium can be ascertained.
- each electrode In order to obtain a relatively large electrode area, provision is preferably made for each electrode to have prongs projecting from a main lead, the prongs of one electrode projecting into the gaps of the other electrode.
- the invention also relates to the use of such a filter for chemical analysis, in particular gas analysis.
- a filter for chemical analysis, in particular gas analysis.
- the bottom layer is preferably joined to the intermediate layer by bonding.
- Bonding is a very suitable method for microtechnology, and is also known from semiconductor technology. It is in this case an anodic joining technique.
- the third regions are advantageously etched from a substrate, and the resulting recesses are lined with the top layer. Later on, the substrate is then removed. This "negative moulding" allows a high precision when producing the top layer.
- the intermediate layer is advantageously applied. This facilitates manufacture.
- the top layer can also be formed by mechanically processed metal or plastics material of small thickness, in particular by punching, stamping or boring.
- the intermediate layer is then preferable for the intermediate layer to be applied by vacuum-evaporation. Aluminium is preferably used in this method. Techniques of that kind are known from semiconductor technology.
- FIG. 1 shows a diagrammatic view of the filter in section, shows several steps in the method for manufacturing the filter, shows a perspective view of a filter, shows an example for the use of the filter as a dialysis filter, shows a further embodiment of a dialysis filter, and shows an enlarged fragmentary view from
- a filter 1 has a top layer 10, an intermediate layer 11 and a bottom layer 12.
- the top layer 10 has openings 13.
- the top layer 10 and the bottom layer 12 are ' joined in predetermined first regions A to the intermediate layer 11.
- second regions B free from intermediate layer, in which the spacing between the top layer 10 and the bottom layer 12 corresponds to the thickness of the intermediate layer 11.
- third regions C are provided, in which the spacing between top layer 10 and bottom layer 12 is larger than in the first regions A and second regions B.
- the space between the top layer 10 and the bottom layer 12 in the second regions B forms a filtering slot 14, through which a fluid entering through the openings 13 must pass in order to reach the third regions C.
- the third regions are of duct-like construction, so that the fluid passing through the filtering slot 14 can also be drained off again at a point not illustrated in detail.
- the duct height is substantially larger than the height of the slots 14, the flow resistance which is Altogether, the flow resistance of the filter can therefore be kept low.
- Fig. 2 shows by way of example the manufacture of such a filter with three ducts 15.
- standard methods known from micromechanics can be used, such as oxidation, anisotropic etching or doped- selective etching, as also known from WO 89/08489.
- Etching can be influenced by earlier diffusion steps, for example using boron.
- Fig. 2a shows a silicon substrate 16 which carries an oxide layer 17, 18 on a top side and on its bottom side respectively.
- the oxide layer 18 on the bottom side of the substrate 16 has already been selectively etched in regions which will later correspond to the third regions C.
- Fig. 2b shows the result of etching in KOH (potassium hydroxide) or of an anisotropic etching, in which recesses 19 have been created.
- KOH potassium hydroxide
- anisotropic etching in which recesses 19 have been created.
- the remainder 20 of the oxide layer 18 still illustrated in Fig. 2a was etched away on the underside of the substrate 16, for example using hydrofluoric acid.
- a first region A forms here later on.
- Fig. 2c shows the creation of the top layer 10 by diffusion of boron into the regions that will later correspond to the first, second and third regions A, B, C.
- the top layer 10 is here formed by the area of the silicon substrate 16 enriched with boron, the area also following the recesses 19.
- the remaining oxide layer 18 on the underside of the substrate 16 is removed by etching, the top layer 10 produced by boron diffusion presenting an increased resistance to the etching and thus remaining.
- Fig. 2d shows the result produced after the intermediate layer 11 has been applied and the bottom layer 12 attached.
- the bottom layer 12 can consist, for example, of Pyrex glass, which is electrostatically joined by means of bonding, that is, - lo ⁇ an anodic joining technique, to the intermediate layer 11.
- the substrate 16 is removed selectively by etching, so that only left-hand and right-hand walls 21, 22 remain.
- the top layer 10 which is interrupted by openings 13, and the intermediate layer 11.
- the intermediate layer 11 too can now be removed through the openings 13 down to a residual part in the first region A, so that the same characteristic features of the filter occur as those illustrated in Fig. 1.
- the right-hand duct of the • three ducts 15 is of course not just suspended in air.
- the region A by way of which it is connected to the bottom layer 12, does not lie in the plane of the drawing illustrated. This is especially apparent from Fig. 3, where the section line II-II that illustrates the section course from Fig. 2 is drawn in.
- both the top layer and the bottom layer can be manufactured from silicon. It is also possible to use thin-film technology on a substrate of silicon or a similar material.
- the top layer 10 can also be ' formed by punching, stamping or boring a metal, for example stainless steel, or a plastics material, onto which a different material is applied by vacuum-evaporation, for example aluminium. A glass substrate can then be bonded to the intermediate layer, whereupon the intermediate layer can again be selectively etched.
- Fig. 3 shows a perspective drawing of a filter with a construction that corresponds to that in Fig. 2f.
- the parts of the top layer 10 forming the ducts 15 are joined to the bottom layer 12 only in the region A. Should it be necessary, however, the join can be effected also at other points. No filtering slot 14 is then provided at these points.
- all three ducts 15 flow into a collecting space 23 which is provided in the substrate 16.
- a similar collecting space can also be provided at the other end of the ducts.
- a conductivity meter is integrated into the collecting space 23. It comprises two electrodes 40, 41 with connecting contacts 47, 48.
- the electrodes comprise main leads 44, 45 respectively.
- Prongs 42, between which there are gaps 43, project from each main lead.
- the prongs 42 of the one electrode 41 project into the gaps 43 of the other electrode 40.
- the conductivity of the medium can be ascertained in this manner. Control of the medium, for example, of the acceptor medium, through the filter can be effected, for example, in dependence on the electrical conductivity. Because the dead volume of the collecting space 23 is relatively small, a very rapid response to changes in conductivity is achieved. On the other hand, there is sufficient room available to accommodate sufficient medium. This enables a relatively trouble-free measurement of the conductivity to be effected.
- the conductivity meter 46 is constructed in thin-film technology. It is applied to the bottom layer 12. Alternatively, it can be applied to the top layer 10. The thin-film can be applied to the bottom layer 12, for example, by vacuum-evaporation.
- the fluid to be filtered can now be introduced from above into the aperture formed between the walls 21, 22 into the openings 13. From there it is able to pass through the filtering slots 14 into the ducts 15 and finally into the collecting space 23, from where it can be removed again by means of a drain, not illustrated in Fig. 3.
- a filter as a dialysis filter.
- FIG. 4 Such an embodiment is illustrated diagrammatically in Fig. 4.
- the openings 13 are masked by a protective layer 24, which leaves the openings 13 free at least in a subregion, namely, at a feed opening 25 and at a removal opening 26.
- a flow of a donor medium denoted by arrows 27 can be set up through the feed opening 25 and the removal opening 26. This donor medium flows through the elongate openings 13 past the outside of the ducts 15 formed by the top layer 10.
- the collecting space 23 is connected to an inlet 28.
- a further collecting space 29 at the other end of the ducts 15 is connected to a outlet 30.
- a dialysis filter of that kind is especially suitable for examining waste water. If the filtering slots 14 are selected to be sufficiently small, then such a dialysis filter can also be used to investigate the ion charge of the waste water, in that after passing through the filter the acceptor medium is examined for the ions in question.
- the medium to be examined flows past the filtering slots 14. This may, however, be disadvantageous in the case of donor media which are loaded with contaminants because the flow can then lead to the filtering slots 14 becoming blocked.
- FIG. 5 another embodiment is therefore shown, • in which the filter can be immersed directly into the donor medium. Because in this embodiment there is no flow of donor medium past the filtering slots 14, it is necessary to provide the filtering slots 14 with sufficient length to ensure a satisfactory passage of the desired particles into the acceptor medium. But because such a large filtering slot length involves the risk that the acceptor medium will also cross over into the donor medium, which involves a certain loss, it is necessary for the acceptor medium to be transported at a very low pressure through the filter. This is achieved by a large number of short ducts that are arranged parallel with one another.
- Fig. 5 shows a plan view of such a filter 31. The openings 13 in the top layer 10 are indicated by black strokes, which are arranged substantially parallel with one another. Eight inlet openings 28 and three outlet openings 30 for the acceptor medium are also illustrated diagrammatically. Arrows 32 indicate the flow of the acceptor medium.
- the filtering slots already mentioned are arranged between the ducts and the openings 13.
- the ducts are arranged in groups, the ducts of each group 33 being parallel with one another. Adjacent groups are arranged so that the respective ends of the ducts face one another.
- the inlet openings 28 flow into an inlet region 34.
- the outlet openings 30 are connected to an outlet region 35.
- the ends of the ducts 15 of adjacent groups 33 facing one another enclose between them either just one inlet region 34 or just one outlet region 35. In other words, the ducts of two adjacent groups are arranged parallel with one another in the flow direction.
- the individual groups 33 are alternately mutually inclined, so that they are connected in the manner of a meander 37, that is, for example in the form of a zig-zag curve.
- a meander 37 that is, for example in the form of a zig-zag curve.
- Several of these meanders 37 are arranged parallel with one another so that a large number of parallel ducts 15 is provided. In the embodiment illustrated this number is about 1,500.
- the dialysis filter illustrated in Fig. 5 has an area of about 1 cm 2 .
- the filter is furthermore provided with two electrodes 38, 39 to which an electrical voltage can be applied in order to drive a current through the filter.
- This current leads to heating of the filter.
- a voltage of 6 V and a current of 0.3 A the filter can be heated in air to temperature values of about 100° C. This is, in particular, of great value when the filter is used in an environment laden with bacteria and for that reason has to be cleaned periodically.
- Fig. 6 shows an enlarged fragmentary view from Fig. 5.
- the openings 13 are indicated by hatching from bottom left to top right, while the top layer 10 is indicated by hatching from top left to bottom right.
- the areas that correspond to the first regions A have no marking, that is to say, are left blank.
- top layer 10 is connected by way of the intermediate layer 11 to the bottom layer 12. It is clear that the top layer can be secured to the bottom layer reliably and with an adequate number of supporting points.
- the filtering slot 14 and the duct 15 are located beneath the narrow webs that are arranged between two openings 13; the width ratio can, for example, be as illustrated in Fig. 1.
- the top layer 10 can consist, for example, of silicon, doped silicon or boron-doped silicon.
- the intermediate layer 11 can be formed from quartz. It is then advantageously combined with a bottom layer 12 of silicon or glass.
- the intermediate layer 11 can also be formed from metal, for example, aluminium, and can then be combined with a top layer 10 of silicon and a bottom layer 12 of glass.
- Such a filter is also especially suitable for chemical analyses, for example for a gas analysis.
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Health & Medical Sciences (AREA)
- Urology & Nephrology (AREA)
- Water Supply & Treatment (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP93901657A EP0643616A1 (fr) | 1991-12-12 | 1992-12-03 | Filtre micromecanique et procede pour sa fabrication |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4140922A DE4140922C1 (fr) | 1991-12-12 | 1991-12-12 | |
DEP4140922.1 | 1991-12-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1993011862A1 true WO1993011862A1 (fr) | 1993-06-24 |
Family
ID=6446841
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DK1992/000364 WO1993011862A1 (fr) | 1991-12-12 | 1992-12-03 | Filtre micromecanique et procede pour sa fabrication |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0643616A1 (fr) |
AU (1) | AU3255293A (fr) |
DE (1) | DE4140922C1 (fr) |
WO (1) | WO1993011862A1 (fr) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996040420A1 (fr) * | 1995-06-07 | 1996-12-19 | The Regents Of The University Of California | Membranes poreuses micro-usinees avec support massif |
US5798042A (en) * | 1994-03-07 | 1998-08-25 | Regents Of The University Of California | Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters |
DE19742439C1 (de) * | 1997-09-26 | 1998-10-22 | Boehringer Ingelheim Int | Mikrostrukturiertes Filter |
US5938923A (en) * | 1997-04-15 | 1999-08-17 | The Regents Of The University Of California | Microfabricated filter and capsule using a substrate sandwich |
US5985164A (en) * | 1994-03-07 | 1999-11-16 | Regents Of The University Of California | Method for forming a filter |
US5985328A (en) * | 1994-03-07 | 1999-11-16 | Regents Of The University Of California | Micromachined porous membranes with bulk support |
US6503362B1 (en) | 1992-09-29 | 2003-01-07 | Boehringer Ingelheim International Gmbh | Atomizing nozzle an filter and spray generating device |
WO2013029691A2 (fr) | 2011-09-04 | 2013-03-07 | Agilent Technologies, Inc. | Filtre à déchets pour mesure fluidique présentant un évidement dont la taille est décroissante dans le sens d'écoulement du fluide |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1989008489A1 (fr) * | 1988-03-11 | 1989-09-21 | Stemme Nils Goeran | Structure membraneuse et procede de fabrication d'une telle structure |
-
1991
- 1991-12-12 DE DE4140922A patent/DE4140922C1/de not_active Expired - Fee Related
-
1992
- 1992-12-03 WO PCT/DK1992/000364 patent/WO1993011862A1/fr not_active Application Discontinuation
- 1992-12-03 EP EP93901657A patent/EP0643616A1/fr not_active Withdrawn
- 1992-12-03 AU AU32552/93A patent/AU3255293A/en not_active Abandoned
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1989008489A1 (fr) * | 1988-03-11 | 1989-09-21 | Stemme Nils Goeran | Structure membraneuse et procede de fabrication d'une telle structure |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7246615B2 (en) | 1992-09-29 | 2007-07-24 | Boehringer International Gmbh | Atomising nozzle and filter and spray generating device |
US6503362B1 (en) | 1992-09-29 | 2003-01-07 | Boehringer Ingelheim International Gmbh | Atomizing nozzle an filter and spray generating device |
US5770076A (en) * | 1994-03-07 | 1998-06-23 | The Regents Of The University Of California | Micromachined capsules having porous membranes and bulk supports |
US5798042A (en) * | 1994-03-07 | 1998-08-25 | Regents Of The University Of California | Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters |
US5985164A (en) * | 1994-03-07 | 1999-11-16 | Regents Of The University Of California | Method for forming a filter |
US5985328A (en) * | 1994-03-07 | 1999-11-16 | Regents Of The University Of California | Micromachined porous membranes with bulk support |
US6044981A (en) * | 1994-03-07 | 2000-04-04 | The Regents Of The University Of California | Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters |
WO1996040420A1 (fr) * | 1995-06-07 | 1996-12-19 | The Regents Of The University Of California | Membranes poreuses micro-usinees avec support massif |
US5938923A (en) * | 1997-04-15 | 1999-08-17 | The Regents Of The University Of California | Microfabricated filter and capsule using a substrate sandwich |
EP1243299A2 (fr) * | 1997-09-26 | 2002-09-25 | BOEHRINGER INGELHEIM INTERNATIONAL GmbH | Filtre a microstructure |
AU748729B2 (en) * | 1997-09-26 | 2002-06-13 | Boehringer Ingelheim International Gmbh | Microstructured filter |
EP1243299A3 (fr) * | 1997-09-26 | 2002-12-11 | BOEHRINGER INGELHEIM INTERNATIONAL GmbH | Filtre a microstructure |
WO1999016530A1 (fr) * | 1997-09-26 | 1999-04-08 | Boehringer Ingelheim International Gmbh | Filtre a microstructure |
US6846413B1 (en) | 1997-09-26 | 2005-01-25 | Boehringer Ingelheim International Gmbh | Microstructured filter |
US6977042B2 (en) | 1997-09-26 | 2005-12-20 | Klaus Kadel | Microstructured filter |
EP1772175A2 (fr) * | 1997-09-26 | 2007-04-11 | Boehringer Ingelheim International GmbH | Filtre à microstructure |
DE19742439C1 (de) * | 1997-09-26 | 1998-10-22 | Boehringer Ingelheim Int | Mikrostrukturiertes Filter |
EP1772175A3 (fr) * | 1997-09-26 | 2007-08-01 | Boehringer Ingelheim International GmbH | Filtre à microstructure |
CZ298849B6 (cs) * | 1997-09-26 | 2008-02-27 | Boehringer Ingelheim International Gmbh | Mikrostrukturní filtr a rozprašovac pro inhalacníterapii |
US7645383B2 (en) | 1997-09-26 | 2010-01-12 | Boehringer Ingelheim International Gmbh | Microstructured filter |
WO2013029691A2 (fr) | 2011-09-04 | 2013-03-07 | Agilent Technologies, Inc. | Filtre à déchets pour mesure fluidique présentant un évidement dont la taille est décroissante dans le sens d'écoulement du fluide |
Also Published As
Publication number | Publication date |
---|---|
DE4140922C1 (fr) | 1993-07-29 |
EP0643616A1 (fr) | 1995-03-22 |
AU3255293A (en) | 1993-07-19 |
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