WO1991015742A3 - Pressure sensing capacitor, and transducer - Google Patents

Pressure sensing capacitor, and transducer Download PDF

Info

Publication number
WO1991015742A3
WO1991015742A3 PCT/GB1991/000523 GB9100523W WO9115742A3 WO 1991015742 A3 WO1991015742 A3 WO 1991015742A3 GB 9100523 W GB9100523 W GB 9100523W WO 9115742 A3 WO9115742 A3 WO 9115742A3
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
diaphragm
capacitor
transducer
pressure sensing
Prior art date
Application number
PCT/GB1991/000523
Other languages
French (fr)
Other versions
WO1991015742A2 (en
Inventor
Richard Dennis Shelton
Original Assignee
Richard Dennis Shelton
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Richard Dennis Shelton filed Critical Richard Dennis Shelton
Publication of WO1991015742A2 publication Critical patent/WO1991015742A2/en
Publication of WO1991015742A3 publication Critical patent/WO1991015742A3/en
Priority to GB9221021A priority Critical patent/GB2258313B/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

A pressure sensing capacitor utilising two planar layers (41, 141) of conductive material disposed substantially parallel to each other, but separated by a narrow gap. The conductive layers are formed as coatings on two imperforate insulative plates (11, 111), at least one of the plates being a diaphragm adapted to flex when subjected to a change in pressure. The diaphragm is supported by a first wall portion (20) which extends rearwardly away from the front surface of the diaphragm, and by an inwardly facing edge (22) of the peripheral portion (14) to which it is integrally connected. The capacitor can be electrically connected to electronic circuitry adapted to condition the capacitor output signal to an indication of pressure, or pressure difference, and so can be part of a transducer.
PCT/GB1991/000523 1990-04-07 1991-04-04 Pressure sensing capacitor, and transducer WO1991015742A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9221021A GB2258313B (en) 1990-04-07 1992-10-06 Pressure sensing capacitor, and transducer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9007948.4 1990-04-07
GB909007948A GB9007948D0 (en) 1990-04-07 1990-04-07 Designs for low cost,sensitive pressure sensors

Publications (2)

Publication Number Publication Date
WO1991015742A2 WO1991015742A2 (en) 1991-10-17
WO1991015742A3 true WO1991015742A3 (en) 1991-11-14

Family

ID=10674103

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB1991/000523 WO1991015742A2 (en) 1990-04-07 1991-04-04 Pressure sensing capacitor, and transducer

Country Status (3)

Country Link
AU (1) AU7583291A (en)
GB (1) GB9007948D0 (en)
WO (1) WO1991015742A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5436795A (en) * 1994-03-28 1995-07-25 Texas Instruments Incorporated Pressure transducer apparatus and method for making same
DE10043630A1 (en) * 2000-09-01 2002-03-14 Endress Hauser Gmbh Co pressure measuring cell
US10637108B1 (en) 2016-12-09 2020-04-28 Cornell Dubilier Marketing, Inc. Apparatus for detecting expansion of an energy storage device case

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0095966A1 (en) * 1982-05-21 1983-12-07 Allied Corporation Pressure transducer with an invariable reference capacitor
US4490773A (en) * 1983-12-19 1984-12-25 United Technologies Corporation Capacitive pressure transducer
US4683758A (en) * 1986-01-16 1987-08-04 Ford Motor Company Device for measuring stresses in vacuum deposition coatings

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0095966A1 (en) * 1982-05-21 1983-12-07 Allied Corporation Pressure transducer with an invariable reference capacitor
US4490773A (en) * 1983-12-19 1984-12-25 United Technologies Corporation Capacitive pressure transducer
US4683758A (en) * 1986-01-16 1987-08-04 Ford Motor Company Device for measuring stresses in vacuum deposition coatings

Also Published As

Publication number Publication date
WO1991015742A2 (en) 1991-10-17
GB9007948D0 (en) 1990-06-06
AU7583291A (en) 1991-10-30

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