WO1990013392A1 - Appareil pour l'usinage, par faisceau de plasma, d'une piece realisee dans un materiau a point de ramollissement ou de fusion eleve, notamment le quartz, le verre ou un metal - Google Patents

Appareil pour l'usinage, par faisceau de plasma, d'une piece realisee dans un materiau a point de ramollissement ou de fusion eleve, notamment le quartz, le verre ou un metal Download PDF

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Publication number
WO1990013392A1
WO1990013392A1 PCT/HU1989/000040 HU8900040W WO9013392A1 WO 1990013392 A1 WO1990013392 A1 WO 1990013392A1 HU 8900040 W HU8900040 W HU 8900040W WO 9013392 A1 WO9013392 A1 WO 9013392A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrodes
nozzles
symmetry axis
symmetry
set forth
Prior art date
Application number
PCT/HU1989/000040
Other languages
English (en)
Inventor
Sándor HOLLÓ
Zsolt MÁRTON
Balázs NYIRI
János SZÁNTÓ
Original Assignee
Tungsram Részvénytársaság
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tungsram Részvénytársaság filed Critical Tungsram Részvénytársaság
Priority to KR1019910700009A priority Critical patent/KR920700833A/ko
Publication of WO1990013392A1 publication Critical patent/WO1990013392A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K10/00—Welding or cutting by means of a plasma
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/043—Heating devices specially adapted for re-forming tubes or rods in general, e.g. burners
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch

Definitions

  • the present invention refers to an apparatus for machining by the means of a plasma beam a workpiece made of a material of high softening or melting point, especially
  • the proposed apparatus comprises at least three electrodes connected to a current supply of at least three phases and nozzles trans ⁇ porting by their outlets gas for creating a plasma beam into a field determined by the electrodes, wherein the
  • the apparatus proposed by the present invention may be applied advantageously in laboratories and factories re ⁇ quiring softening of quartz and glass type materials and
  • German Patent DE-A1 3136799 discloses an apparatus supplied by electric current from a three-phase alternating current supply.
  • the electrodes of this apparatus are arranged concen ⁇ trically in respective nozzles for forwarding protective gas.
  • the three nozzles and electrodes are arranged with outlets lying on the mantle of a cylinder or a cone.
  • This apparatus can work only with metallic workpiece to be machined and the requirement of generating a stable plasma beam results in a maximal possible length of the spacing between the electrodes.
  • the known apparatus is not capable of over-annealing a workpiece or machining non-conductive materials, i.e. non-metallic workpieces.
  • the present invention is directed to creating an apparatus for machining, by the means of a plasma beam, a workpiece made of a material of high softening or melting point, especially quartz, glass or a metal, whereby it is possible to avoid the disadvantages char ⁇ acterizing the solution of the background art, i.e. to machine either metallic or non-metallic workpieces by simple means ensuring annealing, surface or volumetric heat treatment.
  • the apparatus according tD the present invention should be applicable in different technologic processes only by selecting an appropriate working medium and/or current supply and be realisable with small dimensions ensuring low energy demand.
  • the present invention is based no the recognition that the workpieces made of different metallic and non-me ⁇ tallic materials can be machined in a simple way, with high reproductivity and low energy demand if the workpiece is heated up by a plasma burner comprising electrodes connected to a current supply of at least three phase, applying as working medium a protective gas or a rare gas, wherein the electrodes are arranged for generating a stable plasma beam in the absence of the workpiece to be machined, too.
  • the present invention refers to an apparatus for machining, by the means of a plasma beam, a workpiece made of a material of high softening or melting point, especially quartz, glass or a metal, comprising at least three electrodes connected to a current supply of at least three phases and nozzles transporting by their outlets gas for creating a plasma beam into a field determined by the electrodes, and the nozzles include the electrodes in a coaxial arrangement.
  • the improvement of the apparatus lies in applying the nozzles containing the electrodes in an arrangement of rotational symmetry around a symmetry axis wherein the outlets of the nozzles are placed equi- dista ⁇ tially from the symmetry axis of the rotational symmetry, the symmetry axis forms a line within a workpiece to be machined and the longitudinal axes of the nozzles are arranged in an angular range determined with respect to the symmetry axis by maximal inclination +15° from a plane lying perpendicularly to the symmetry axis.
  • the arrangement of the electrodes and nozzles as required by the invention ensures that the plasma beam shows circular symmetry and high stability in time and space during machining and the features mentioned can be ensured independent on the shape and material of the workpiece, i.e. a non-metallic element of cylindric symmetry can be machined, too.
  • the workpiece to be machined is a small, point- -like element it is advantageous to arrange the nozzles in a way that their longitudinal axes cross one another in a common point lying on the symmetry axis.
  • the nozzles For machining workpieces of bigger dimensions it is advantageous to arrange the nozzles in a way that their longitudinal axes form tangents of a circle line drawn around a central point lying on the symmetry axis. In this way the ionized gas of the plasma beam embraces the work- piece to be machined ensuring thereby high uniformity and co ⁇ trolability of the process of machining.
  • the basic and generally applicable embodiment of the apparatus according to the invention comprises three electrodes connected to a respective phase of a three-phase current supply, i.e. each phase is coupled with a separate electrode.
  • each phase of the more-phase current supply is coupled with a separate electrode; each electrode is, however, supplied from one phase.
  • the uniform heating and machining of the workpiece can be obtained also by means of a three-phase current supply feeding n times three electrodes (n is an integer), wherein in phase ensures supply to n electrodes, i.e.
  • each phase is coupled with two electrodes.
  • the stability of the plasma discharge process is a bit lower than on applying number of phases equal to the number of the electrodes, the circuit arrangement is more simple.
  • the electrodes can be connected in different manners to.i he phase.
  • the over-annealing and heat treatment of long work- pieces, especially wires can be simply carried out if the proposed apparatus includes more sets of electrodes arranged in planes determined along the symmetry axis. In this way the power of the apparatus can be improved with- out increasing the heat load of the separate electrodes.
  • the workpiece can be heated up in more steps, avoiding thereby the unwanted preheating of its surface, if necessary.
  • the in ⁇ vention offers the possibility of arranging the electrodes and the workpiece in a space separated from the ambient atmosphere.
  • the apparatus realised according to the invention is capable of machining metallic and non-metallic workpieces made e.g. of quartz or glass by generating a plasma beam causing no contamination of the workpiece.
  • FIG. 1 is a schematic view of a three-phase three-
  • FIG. 2 is a schematic view of an apparatus proposed by the invention, comprising more times three electrodes arranged in different planes
  • FIG. 3 is a schematic view of a six-phase six-electrode embodiment of the apparatus proposed by the invention
  • FIG. 4 is a schematic view of a three-phase six-electrode embodiment of the apparatus proposed by the in ⁇ vention.
  • the apparatus proposed by the invention comprises three nozzles 1, 2, 3 in an arrangement of the rotational symmetry.
  • the nozzles 1, 2, 3 are arranged equidistantially, with an angle distance 120°, they in ⁇ clude electrodes 7, 8, 9 having longitudinal axes 13, 14, 15.
  • the arrangement of the rotational symmetry is determined by a symmetry axis 19 which includes the common crossing point of the longitudinal axes 13, 14, 15.
  • the symmetry axis 19 lies within a workpiece 20 made e.g. of quartz represented by a circle line on the FIG. 1.
  • the symmetry axis 19 is represented by a point.
  • the electrodes 7, 8, 9 consist of a tungsten alloy including thorium, their dia ⁇ meter is 1 mm, their tips form a cone. They are connected by means of choking coils 21, 22, 23 to phases R, S, T of a three-phase network applied as a current supply.
  • the nozzles 1, 2, 3 are made in the form tubes consisting of quartz, ceramics or a metal of high melting point equipped with a cooling system.
  • the inner diameter of the nozzles 1, 2, 3 is 4 mm, their inner space are connected by the means of regulating valves 28, 29, 30 to a gas source not shown in the drawings.
  • the gas source comprises for example argon.
  • the shape, power density of the plasma beam generated between the electrodes 7, 8, 9 can be regulated by changing the volume flux of the gas.
  • the plasma beam can be applied for concentric heating on a small surface area or for heating a big surface of the workpiece.
  • the applied supply voltage is 3x380 V, 50 Hz, the phase current 8 to 10 A.
  • the plasma beam can be initiat ⁇ ed by high-frequency ignition means connected to the current supply.
  • the apparatus proposed by the invention may comprise a higher number of electrodes arranged in different places along the symmetry axis 19.
  • the workpiece 20 to be machin ⁇ ed i.e. a tungsten wire is forwarded in the line of the symmetry axis 19 and it passes three systems consisting of three nozzles 1, 2, 3 which include respective electrodes 7, 8, 9.
  • the workpiece 20 undergoes over-annealing along the simmetry axis 19 during its translation realised with velocity about 2.10 m/s in the space determined by the nozzles 1, 2, 3.
  • the apparatus is placed in a housing 34 arranged ' for receiving the workpiece 20 at one inlet plane and for forwarding it at the outlet plane, the inlet and outlet planes intersecting with the symmetry axis 19.
  • the nozzles 1, 2, 3 introduce argon gas to the inner, working space of the housing 34 which is separated thereby from the ambient atmosphere.
  • the embodiments of the apparatus according to the invention with six electrodes is shown in FIG. 3 when supplying from a six-phase arrangement and in FIG. 4 when supplying from a three-phase arrangement.
  • FIG. 3 a possible six-nozzle arrangement is de- onstrated, wherein nozzles 1, 2, 3, 4, 5, 6 are arranged together with electrodes 7, 8, 9, 10, 11, 12 in a rotated position, wherein the nozzles 1, 2, 3, 4, 5, 6 have lon ⁇ gitudinal axes 13, 14, 15, 16, 17, 18 forming tangents of a circle enclosing the workpiece 20, wherein the central point of the circle lie on the symmetry axis 19.
  • This so ⁇ lution can be especially advantageous when the workpiece 20 is of great dimensions, because the ionized gas entering the space between the electrodes 7, 8, 9, 10, 11, 12 from the outlets of regulating valves 28, 29, 30, 31, 32, 33 surrounds the workpiece 20 to be machined in a more pre- cise manner than in the case of arranging the nozzles 1, 2, 3, 4, 5, 6 with longitudinal axes 13, 14, 15, 16, 17, 18 crossing the symmetry axis 19.
  • the six-phase electric supply is ensured by the means of separating trans ⁇ formers 35, 36, 37, wherein the electrodes 7, 8, 9, 10, 11, 12 are connected to phases R, S, T, U, V, Z through choking coils 21, 22, 23, 24, 25, 26.
  • the separating transformers 35, 36, 37 are connected to the phases R, S, T of the three-phase supply network.
  • the electrodes 7, 8, 9, 10, 11, 12 are connected to the three phases R, S, T of the supply network by the means of choking coils 21, 22, 23, 24, 25, 26.
  • this arrangement it is especially advantageous to connect with the same phase, e.g. signed by R two electrodes signed by 7 and 10 and arranged oppo ⁇ sitely, i.e. along the same diameter determining the ar ⁇ rangement of the electrodes 7, 8, 9, 10, 11, 12.
  • the apparatus according the invention operates in the manner of the known plasma apparatuses, i.e. the electrodes generates a plasma beam for machining the workpiece 20, wherein the plasma beam is realised inde ⁇ pendently on the material of the workpiece.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

Dans un appareil servant à l'usinage, par le moyen d'un faisceau de plasma, d'une pièce réalisée dans un matériau à point de ramollissement ou de fusion élevé, notamment le quartz, le verre ou un métal, et comprenant au moins trois électrodes (7, 8, 9), reliées à une source de courant comportant au moins trois phases (R, S, T), et des tuyères (1, 2, 3) projetant par leurs orifices de sortie un gaz pour produire un faisceau de plasma dans un champ des électrodes (7, 8, 9), ces électrodes (7, 8, 9) étant disposées à l'intérieur des tuyères (1, 2, 3) dans le même axe que celles-ci, l'innovation consiste en ce que les tuyères (1, 2, 3) contenant les électrodes (7, 8, 9) qui produisent le champ sont agencées selon une disposition caractérisée par une symétrie de rotation autour d'un axe (19), disposition selon laquelle les orifices de sortie des tuyères (1, 2, 3) sont placés à égale distance de l'axe (19) de symétrie de rotation, cet axe de symétrie (19) formant une ligne à l'intérieur de la pièce à usiner (20), et les axes longitudinaux (13, 14, 15) des tuyères (1, 2, 3) et des électrodes (7, 8, 9) sont placés dans une fourchette d'angles déterminés par rapport à l'axe de symétrie (19), leur inclinaison maximum étant de ± 15° par rapport à un plan perpendiculaire à l'axe de symétrie (19).
PCT/HU1989/000040 1989-05-05 1989-08-11 Appareil pour l'usinage, par faisceau de plasma, d'une piece realisee dans un materiau a point de ramollissement ou de fusion eleve, notamment le quartz, le verre ou un metal WO1990013392A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019910700009A KR920700833A (ko) 1989-05-05 1989-08-11 플라즈마 빔을 이용한 공작물 가공장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
HU4734/87 1989-05-05
HU473489 1989-05-05

Publications (1)

Publication Number Publication Date
WO1990013392A1 true WO1990013392A1 (fr) 1990-11-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/HU1989/000040 WO1990013392A1 (fr) 1989-05-05 1989-08-11 Appareil pour l'usinage, par faisceau de plasma, d'une piece realisee dans un materiau a point de ramollissement ou de fusion eleve, notamment le quartz, le verre ou un metal

Country Status (4)

Country Link
EP (1) EP0423242A1 (fr)
JP (1) JPH03505848A (fr)
KR (1) KR920700833A (fr)
WO (1) WO1990013392A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2763778A1 (fr) * 1997-05-21 1998-11-27 Sunnen Technologies Procede et dispositif de production d'un plasma hors d'equilibre
FR2775864A1 (fr) * 1998-03-06 1999-09-03 Physiques Et Chimiques Dispositif a decharges electriques froides et ses applications pour traiter des gaz, des vapeurs et/ou de la matiere solide ou liquide dispersee
WO2000059838A1 (fr) * 1999-03-30 2000-10-12 Corning Incorporated Procede et appareil pour le traitement thermique d'un objet tel qu'une preforme de fibres optiques
US6779363B1 (en) 2000-09-29 2004-08-24 Corning Incorporated Method for pregobbing an optical fiber preform and system producing optical fiber therefrom
EP1689549A2 (fr) * 2003-12-02 2006-08-16 Battelle Energy Alliance, LLC Generateurs de plasma, systemes de reacteur et procedes associes

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2972696A (en) * 1959-08-24 1961-02-21 Avco Corp Plasma generator
DE2014592A1 (de) * 1969-03-31 1970-10-08 La Soudure Electrique Autogene, Procedes Arcos, S.A., Brüssel Verfahren und Vorrichtung zur Erwärmung von großen Oberflächen auf hohe Temperatur
US3541297A (en) * 1968-10-07 1970-11-17 Soudure Autogene Elect Heating a reactive fluid to high temperature
DE1758483B1 (de) * 1968-06-11 1971-02-11 Inst Elektroswarki Patona Verfahren zum Schmelzen mit Strahlen
US3770935A (en) * 1970-12-25 1973-11-06 Rikagaku Kenkyusho Plasma jet generator
US3798408A (en) * 1968-12-31 1974-03-19 Anvar Methods and devices for plasma production

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2972696A (en) * 1959-08-24 1961-02-21 Avco Corp Plasma generator
DE1758483B1 (de) * 1968-06-11 1971-02-11 Inst Elektroswarki Patona Verfahren zum Schmelzen mit Strahlen
US3541297A (en) * 1968-10-07 1970-11-17 Soudure Autogene Elect Heating a reactive fluid to high temperature
US3798408A (en) * 1968-12-31 1974-03-19 Anvar Methods and devices for plasma production
DE2014592A1 (de) * 1969-03-31 1970-10-08 La Soudure Electrique Autogene, Procedes Arcos, S.A., Brüssel Verfahren und Vorrichtung zur Erwärmung von großen Oberflächen auf hohe Temperatur
US3770935A (en) * 1970-12-25 1973-11-06 Rikagaku Kenkyusho Plasma jet generator

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2763778A1 (fr) * 1997-05-21 1998-11-27 Sunnen Technologies Procede et dispositif de production d'un plasma hors d'equilibre
FR2775864A1 (fr) * 1998-03-06 1999-09-03 Physiques Et Chimiques Dispositif a decharges electriques froides et ses applications pour traiter des gaz, des vapeurs et/ou de la matiere solide ou liquide dispersee
WO2000059838A1 (fr) * 1999-03-30 2000-10-12 Corning Incorporated Procede et appareil pour le traitement thermique d'un objet tel qu'une preforme de fibres optiques
AU770280B2 (en) * 1999-03-30 2004-02-19 Corning Incorporated Method and apparatus for the thermal treatment of an object such as an optical fiber preform
US6779363B1 (en) 2000-09-29 2004-08-24 Corning Incorporated Method for pregobbing an optical fiber preform and system producing optical fiber therefrom
EP1689549A2 (fr) * 2003-12-02 2006-08-16 Battelle Energy Alliance, LLC Generateurs de plasma, systemes de reacteur et procedes associes
EP1689549A4 (fr) * 2003-12-02 2008-11-05 Battelle Energy Alliance Llc Generateurs de plasma, systemes de reacteur et procedes associes

Also Published As

Publication number Publication date
EP0423242A1 (fr) 1991-04-24
JPH03505848A (ja) 1991-12-19
KR920700833A (ko) 1992-08-10

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