USRE38278E1 - Surface acoustic wave device and production process thereof - Google Patents

Surface acoustic wave device and production process thereof Download PDF

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Publication number
USRE38278E1
USRE38278E1 US09/286,328 US28632899A USRE38278E US RE38278 E1 USRE38278 E1 US RE38278E1 US 28632899 A US28632899 A US 28632899A US RE38278 E USRE38278 E US RE38278E
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film
acoustic wave
surface acoustic
aluminum
copper
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Yoshio Satoh
Osamu Ikata
Hidema Uchishiba
Takashi Matsuda
Tokihiro Nishihara
Mitsuo Takamatsu
Hajime Taniguchi
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Taiyo Yuden Co Ltd
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Fujitsu Ltd
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Definitions

  • This invention relates to a surface acoustic wave device and a production process thereof.
  • a surface acoustic wave (SAW) device comprises a piezoelectric substrate and a comb-shaped interdigital electrode disposed on the substrate, for converting a voltage to a surface acoustic wave or vice versa.
  • the function of the surface acoustic wave device is to convert a radio frequency voltage to a surface acoustic wave having a wavelength of about 10 ⁇ 5 times by using a comb-shaped interdigital electrode, which causes this wave to propagate on the surface of the piezoelectric substrate and converts again the wave to the voltage by the comb-shaped interdigital electrode.
  • Frequency selectivity can be provided in accordance with the shape of the interdigital electrode during the two conversion operations between the surface acoustic wave and the voltage, and a filter or a resonator can be constituted by utilizing this characteristic property. Because the propagation speed can be retarded to about 10 ⁇ 5 times that of an electromagnetic wave, the surface acoustic wave device can be used as a delay device.
  • the surface acoustic wave device has already been done by utilizing the functions described above.
  • the surface acoustic wave device has been applied to IF filters of television sets, resonators of VTR (vide tape recorder) oscillators, VCOs of cordless telephones, and recently, the application has been expanded to RF filters and IF filters of automobile telephones, mobile telephones, and so forth.
  • VTR tape recorder
  • transmission power is relatively great, that is, 0.6 to 3 W, and a large RF power is applied to a filter of a front-end portion inside the apparatus, particularly, to an antenna duplexer.
  • the maximum input power of the surface acoustic wave filter has been about 0.2 W up to the present, and the filter lacks sufficient power characteristics. For this reason, a dielectric filter having high power resistance has been used for the antenna duplexer. However, because the dielectric filter is large in scale, it causes a problem when the size of the apparatus is reduced as a whole.
  • the mobile telephones can be made even smaller, and the effect of utilization in industry becomes greater.
  • the interdigital electrode is used in the surface acoustic wave device as described above, and aluminum (Al) or an aluminum alloy containing a small amount of a different kind of metal (not always a solid solution body in many cases) is generally used because the mass is small and its electrical resistance value is low.
  • Japanese Unexamined Patent Publication (Kokai) Nos. 5-167388 and 5-167389 proposes to constitute a duplexer by using a plurality of band-pass filters each formed by using the surface acoustic wave device.
  • 5-167389 proposes to integrate a plurality of surface acoustic wave band-pass filter chips having mutually different center frequency bands and having signal input/output terminals and ground terminals, by storing them in one package so as to minimize the duplexer while keeping excellent isolation.
  • the conventional antenna duplexer does not have characteristics such that the filter can sufficiently withstand the increase of RF power.
  • the life time at the maximum input power at which the apparatus can be used is generally used as a guideline.
  • the conventional antenna duplexer has a life time of only about 1,600 hours at the 1 W input at an environmental temperature of 85° C. (chip temperature of 120° C.) in an accelerated deterioration test stipulated for the mobile telephones of the NTT specification in Japan, for example. These values are not considered sufficient for the life of mobile telephones, and the values of at least twice are believed necessary.
  • the main factor that determines the useful life of the surface acoustic wave device is power characteristics of electrode fingers of the filter (interdigital electrode fingers IDT), and an aluminum system alloy film containing a trace amount of copper and formed by sputtering, which is well known as being resistant to migration in the field of semiconductor devices, has been used.
  • this alloy is not yet sufficient as the electrode material of the surface acoustic wave device used as the antenna duplexer to which a high power load is applied.
  • Al-Ti aluminum-titanium alloy
  • Al-Ti aluminum-titanium alloy
  • This method is based on the fact that grain boundary diffusion in stress migration of aluminum (Al) can be restricted by converting the structure to a single crystal, and is reported in papers of the Electronic Data Communication Society, A, Vol. J76-A, No. 2, pp. 145-152 (1993) (by Ieki et al.). According to this report, life time can be improved to 2,000 times that of an aluminum-copper alloy (Al-Cu) film by vacuum evaporation.
  • Al-Cu aluminum-copper alloy
  • the useful life of an aluminum-copper alloy (Al-Cu) film formed by vacuum evaporation is much shorter from the beginning (refer to Yuhara et al., and other references), and the improvement in life time is believed to be substantially 20 to 200 times.
  • this method can cause epitaxial growth only when the substrate material as the base is quartz, and cannot realize the film when LiTaO 3 or LiNbO 3 , which have been widely used as a substrate material for filters for mobile communication, is employed.
  • stress migration in the surface acoustic wave device is analogous to electromigration and stress migration in wiring technology of semiconductor devices, and migration-resistant technology in the semiconductor devices will be useful for the migration-resistant technology in the surface acoustic wave devices.
  • the following technology has drawn increasing attention.
  • life time becomes maximal when chromium (Cr) is used as the transition metal, and is about 10 times that of the aluminum-copper alloy (Al-Cu).
  • Cr chromium
  • Al-Cu aluminum-copper alloy
  • FIG. 1 is an explanatory structural view of a surface acoustic wave filer having the conventional three-layered structure.
  • reference numeral 11 denotes a LiTaO 3 piezoelectric substrate
  • 12 is an Al-1%Cu alloy film
  • 13 is a Ta film
  • 14 is an Al-1%Cu film
  • 15 and 16 are Al-Ta alloy films.
  • an 1,000 ⁇ -thick Al-1%Cu alloy film 12 is formed on the LiTaO 3 piezoelectric substrate 11 , a 500 ⁇ -thick Ta film 13 is formed on the former, and a 1,000 ⁇ -thick Al-1%Cu film 14 is further formed on the Ta film 13 .
  • heat-treatment is carried out at 400° C. in vacuum so as to form sufficient Ta-Al (TaAl 3 ) 15 and 16 on the interface between the Al-1%Cu films 12 , 14 , and the Ta film 13 and in the grain boundaries of the Al-1%Cu alloy films 12 , 14 .
  • the electrode structure is then patterned into an interdigital shape to form the electrode.
  • FIG. 2 is a graph useful for explaining power characteristics of a surface acoustic wave filter having the conventional three-layered structure.
  • the abscissa represents input power (W) and the ordinate represents life time (mean time to failure: MTTF, hours).
  • Curve a represents an Al-1%Cu single layer film which is not heat-treated
  • curve b represents an Al-1%Cu/Ta/Al-1%Cu film which is not heat-treated
  • curve c represents an Al-1%Cu/Ta/Al-1%Cu film which is heat-treated at 400° C.
  • the substrate (chip) temperature when forming each film is 120° C., and each film has a thickness of 3,200 ⁇ .
  • the surface acoustic wave filter having the three-layered structure electrode described above should provide longer life at least 20 times that of the Al-1%Cu film. According to experiments, however, the actual life of the Al-1%Cu/Ta/Al-1%Cu film (see curve c) which is formed under the ordinary heat-treatment conditions at 400° C. is much shorter than the life of the Al-1%Cu single layer film (see curve a) which is not heat-treated. This difference results from some differences of a life deterioration mechanism of wirings of semiconductor devices from a life deterioration mechanism of IDT (Interdigital Transducer) of the surface acoustic wave filter.
  • IDT Interdigital Transducer
  • the static stress migration means the Al migration driven by the static internal stress of Al films.
  • the dynamic stress migration means the Al migration driven by the dynamic migration of the internal stress caused by the acoustic surface wave propagation.
  • a typical example is the grain size of Al. According to J. B.
  • FIG. 3 is a graph useful for schematically explaining the relation between the grain size of the electrode material and life time.
  • the abscissa in the graph represents the grain size, and the ordinate represents life time.
  • life time becomes longer with the increase of the grain size (see curve b).
  • SAW surface acoustic wave
  • life time becomes shorter with the increase of the grain size of the electrode material (see curve a).
  • the grain size of the electrode material can be increased by applying heat-treatment.
  • life time can be drastically improved. This is because the grain size can be kept small. In this case, although the grain size remains small and life time is relatively long, the alloy between Al and the transition metal is not formed, between the layers because heat-treatment is not effected, and because the function of a stopper for inhibiting cracks occurring in the film, that is, the growth of voids, does not exist, so life time is not improved in comparison with the Al-1%Cu single layered film which is not heat-treated (see curve a).
  • a surface acoustic wave device which comprises a piezoelectric substrate and an electrode formed on the substrate by alternately laminating a film of aluminum containing at least copper added thereto or an alloy of such aluminum and a copper film.
  • the electrode is a transducer for converting an electrical signal to a surface acoustic wave.
  • directions of internal stresses of the film of aluminum containing at least copper or the alloy of such aluminum and the copper film preferably have opposite directions, and moreover, the sum of these internal stresses are zero (0) or compressive (stress on the negative side).
  • the internal stresses are regulated in this way, stress migration of aluminum can be reduced.
  • a laminate structure of the aluminum or aluminum alloy film/copper film constituting the electrode can be constituted arbitrarily into a two- or more multi-layered structure, and is preferably a two- or three-layered laminate structure.
  • the thickness of each film can be broadly changed in accordance with frequency and other various factors, but is generally and preferably within the range of from about 300 ⁇ to about 10,000 ⁇ .
  • the electrode can be a two-layered laminate structure of the aluminum-copper alloy film and the copper film.
  • the thickness of the Al-Cu film for 800 to 1,000 MHz filters is preferably from about 1,000 ⁇ to about 5,000 ⁇
  • the thickness of the Cu film is preferably from about 300 to about 1,000 ⁇ .
  • the electrode can be a three-layered laminate structure comprising two aluminum-copper alloy films and the copper film sandwiched between the aluminum-copper alloy films.
  • the thickness of each of the Al-Cu films for 800 to 1,000 MHz filters is preferably from about 500 ⁇ to about 1,500 ⁇ , and the thickness of the Cu film is preferably from about 300 ⁇ to about 1,000 ⁇ .
  • the surface acoustic wave device it is essentially necessary to add copper to the aluminum or aluminum alloy film constituting the electrode.
  • the amount of addition of copper is preferably from 0.4 to 4 wt% and further preferably, from 0.5 to 1.5 wt% on the basis of the weight of the film. If the amount of addition of copper is below 0.4 wt%, problems such as stress migrations appear, and if it exceeds 4 wt%, on the other hand, fine patterns of IDT can not be delineated by RIE (reactive ion etching) because of copper-based residue.
  • copper is most preferably added to the aluminum or aluminum alloy film.
  • the piezoelectric substrate used as the substrate can be those piezoelectric crystal substrates which are ordinarily used in surface acoustic wave devices, such as LiNbO 3 , LiTaO 3 , quartz, ZnO/glass, PZT type ceramics, and so forth.
  • LiTaO 3 such as (36° Y-X)LiTaO 3 and LiNbO 3 such as (64° Y-X)LiNbO 3 , can be used effectively as the piezoelectric substrate.
  • the present invention provides a process for producing a surface acoustic wave device which comprises alternately laminating a film of aluminum containing at least copper added thereto and a copper film on the piezoelectric substrate at a temperature not higher than 200° C.; patterning the resulting laminate structure to form an electrode; and carrying out subsequent processings while maintaining the temperature of not higher than 200° C.
  • the piezoelectric substrate and the electrode formed on the substrate have already been described above.
  • the electrode can be formed by laminating the respective films into a predetermined film thickness by ordinary film formation technology such as sputtering, CVD (Chemical Vapor Deposition), electron beam deposition, etc., and subsequently patterning the resulting laminate structure into a desired electrode shape.
  • the method of the present invention can restrict the growth of the grain boundary of the electrode materials by employing the process steps described above.
  • FIG. 1 is a perspective view useful for explaining the structure of a surface acoustic wave filter having a three-layered structure according to the prior art
  • FIG. 2 is a graph useful for explaining power characteristics of a surface acoustic wave filter having a three-layered structure according to the prior art
  • FIG. 3 is a graph useful for explaining the relationship between a grain size of an electrode material and life time
  • FIG. 4 is a perspective view useful for explaining the structure of a surface acoustic wave device according to one embodiment of the present invention.
  • FIG. 5 is a graph useful for explaining experimental results of a film thickness and an internal stress of each of an Al-1%Cu film and a Cu film;
  • FIG. 6 is a perspective view useful for explaining the structure of a surface acoustic wave filter according to an embodiment of the present invention.
  • FIG. 7 is an equivalent circuit diagram of the surface acoustic wave filter shown in FIG. 6;
  • FIG. 8 is a graph showing transmission characteristics of the surface acoustic wave filter according to an embodiment of the present invention.
  • FIG. 9 is a graph showing power characteristics of the surface acoustic wave filter according to an embodiment of the present invention.
  • FIG. 10 is an explanatory view of an Al-Cu film electrode structure
  • FIG. 11 is a perspective view useful for explaining an Al-Cu/Cu film electrode structure
  • FIG. 12 is a schematic view useful for explaining a CuAl 2 crystal structure
  • FIG. 13 is a perspective view useful for explaining an Al-Cu/Cu/Al-Cu film electrode structure.
  • FIG. 14 is a graph showing the relationship between an internal stress of an alloy film and power characteristics of a surface acoustic wave device.
  • a film obtained by adding a small amount (about 3 to 4 wt %) of a different kind of metal to Al has a structure in which an alloy between Al and the different kind of metal exists at a grain boundary of Al.
  • FIG. 10 is an explanatory view of an Al-Cu film electrode structure.
  • reference numeral 21 denotes an LiTaO 3 substrate
  • 22 is an Al-Cu film
  • 23 is Al crystal grains
  • 24 is a grain boundary
  • 25 is CuAl 2 .
  • This drawing illustrates an example where the Al-Cu film 22 is deposited on the LiTaO 3 substrate 21 by sputtering or electron beam deposition and is patterned. Basically, it is a polycrystalline structure of Al, wherein a large number of Al crystal grains 23 exist, and CuAl 2 25 segregates at the grain boundary 24 . It is believed that the reason why the Al-Cu film has higher resistance to migration than the Al film is because CuAl 2 25 inhibits fluidization of the Al atoms.
  • FIG. 11 is an explanatory view of an Al-Cu/Cu film electrode structure.
  • reference numeral 21 denotes a LiTaO 3 substrate
  • 22 is an Al-Cu film
  • 23 is Al crystal grains
  • 24 is a grain boundary
  • 25 is CuAl 2
  • 26 is a Cu film.
  • the drawing illustrates an example where the Al-Cu alloy film 22 is formed on the LiTaO 3 substrate 21 by sputtering or electron beam deposition, the Cu film 26 is formed on the former and the Cu film 26 is then patterned.
  • This is basically a polycrystalline structure of Al.
  • Cu to be sputtered has large kinetic energy and impinges against Al, and the film is formed while Cu imparts kinetic energy to the Al atoms. Therefore, an effect similar to the effect of local heat-treatment occurs, and CuAl 2 is formed on the interface between the Al-Cu alloy film 22 and the Cu film 26 .
  • the thickness of Cu-Al 2 on the interface is some dozens of angstroms ( ⁇ ).
  • FIG. 12 is an explanatory view of the CuAl 2 crystal structure.
  • the CuAl 2 crystal has the structure wherein the Cu layers and the Al layers are alternately laminated. Therefore, matching with the Cu film is extremely excellent, and firm bonding can be expected. Because CuAl 2 25 existing in the Al grain boundary 24 of the Al-Cu film 22 shown in FIG. 11 and CuAl 2 25 existing on the interface between the Al-Cu film 22 and the Cu film 26 are the same crystal, mutual bonding strength becomes high.
  • FIG. 13 is an explanatory view of an Al-Cu/Cu/Al-Cu film electrode structure.
  • reference numeral 21 denotes a LiTaO 3 substrate
  • 22 is an Al-Cu film
  • 23 is an AQ crystal grain
  • 24 is a grain boundary
  • 25 is CuAl 2
  • 26 is a Cu film
  • 27 is an Al-Cu film
  • 28 is an Al crystal grain
  • 29 is a grain boundary
  • 30 is CuAl 2 .
  • the drawing illustrates an example where the Al-Cu film 22 is formed on the LiTaO 3 substrate 21 by sputtering or electron beam deposition, the Cu film 26 is formed on the former, and the Al-Cu film 27 is further formed on the Cu film 26 and is patterned.
  • CuAl 2 25 is formed in the grain boundary 24 of the Al crystal grains 23 of the Al-Cu film 22
  • CuAl 2 30 is formed in the grain boundary 29 of the Al crystal grains 28 of the Al-Cu film 27
  • CuAl 2 is further formed between the Cu film 26 and the upper and lower Al-Cu films 22 , 27 .
  • the fundamental principle of the present invention lies in that the Al-Cu film and the Cu film are laminated, and the network structure is formed by CuAl 2 formed in the grain boundary of Al in the Al-Cu film with the Cu film being the center, so as to inhibit stress migration.
  • the fundamental principle of the present invention is based on the concept that the internal stress of the Al alloy film is largely associated with power characteristics (life) of the surface acoustic wave device, power characteristics are high when the stress of the Al alloy film is zero or rather compressive, and power characteristics drop with higher tensile stress.
  • FIG. 14 is a graph showing the relation between the internal stress of the alloy film and power characteristics of the surface acoustic wave device.
  • This graph cites the data reported previously by Yuhara et al.
  • the axis of abscissa represents the internal stress of the alloy film, and the ordinate represents the stress of the surface acoustic wave device, that is, the tendency of power characteristics.
  • power characteristics of the surface acoustic wave device are high when the internal stress of the alloy film is zero or compressive, but are deteriorated when the internal stress is tensile.
  • power characteristics can be improved by arranging the films so that their internal stresses have opposite signals when the multi-layered alloy film is formed, and moreover, the magnitude of the internal stresses are mutually in equilibrium, in order to regulate the internal stress of the film as a whose to zero or somewhat compressive.
  • FIG. 4 is an explanatory structural view of a surface acoustic wave device according to an embodiment of the present invention.
  • reference numeral 1 denotes a LiTaO 3 substrate
  • 2 is an Al-1%Cu film
  • 3 is Al crystal grains
  • 4 is a grain boundary
  • 5 is CuAl 2
  • 6 is a Cu film
  • 7 is an Al-1%Cu film
  • 8 is Al crystal grains
  • 9 is a grain boundary
  • 10 is CuAl 2 .
  • a 1,000 ⁇ -thick Al-1%Cu film 2 is formed on the LiTaO 3 substrate 1 having a piezoelectric property while the temperature is kept below 200° C.
  • a 400 ⁇ -thick Cu film 6 is formed on the former
  • a 1,000 ⁇ -thick Al-1%Cu film 7 is formed on the Cu film 6 .
  • a three-layered film having a total thickness of 2,400 ⁇ is formed.
  • This three-layered laminate film is patterned to form an interdigital electrode (hereinafter referred to as the “three layered film electrode A”).
  • CuAl 2 5 is formed in the grain boundary 4 of the Al crystal grains 3 of the Al-1%Cu film 2
  • CuAl 2 10 is formed in the grain boundary 9 of the Al crystal grains 8 of the Al-1%Cu film
  • CuAl 2 5 , 10 is also formed between the Cu film 6 and the upper and lower Al-1%Cu films 2 , 7 .
  • an interdigital electrode consisting of a 3,200 ⁇ -thick Al-1%CU single-layered film (hereinafter referred to as the “single-layered film electrode C”) is formed on the LiTaO 3 substrate.
  • an interdigital electrode (hereinafter referred to as the “three-layered film electrode B”) is formed by first forming a 700 ⁇ -thick Al-1%Cu film, a 600 ⁇ -thick Cu film and a 700 ⁇ -thick Al-1%Cu film on the LiTaO 3 and substrate in the total thickness of 2,000 ⁇ and patterning this three-layered laminate film.
  • an interdigital electrode (hereinafter referred to the “three-layered film electrode A”) is formed by heat-treating the three-layered film electrode A at 400° C. after the film formation.
  • the thickness of these electrode films is determined in the following way.
  • the center frequency changes in accordance with the mass of the electrode due to the mass load effect. Therefore, in order to correctly compare power characteristics when the electrode is changed, it is necessary to bring the mass of the electrode film into conformity with the mass of the electrode of the surface acoustic wave filter using the Al-1%Cu single layer film electrode C so as to prevent frequency fluctuation.
  • the density of Cu is 8.9, the density of Al is 2.7, and the density of the Cu film is about three times the density of Al. Therefore, the masses of the three-layered film electrodes A, B and AA are substantially the same as the mass of the 3,200 ⁇ -thick Al-1%Cu single layer film electrode as the reference. Accordingly, the surface acoustic wave filters using the three-layered film electrodes A, B and AA exhibit substantially the same characteristics as the 933 MHz filter.
  • the internal stress of the multi-layered film depends on the film thickness of each layer.
  • FIG. 5 is a graph useful for explaining the experimental results of the internal stresses of the Al-1%Cu film and the Cu film.
  • the abscissa represents the film thickness of the metal film
  • the ordinate represents the stress.
  • the experimental results of the film thickness of the Al-1%Cu film and the Cu film, and the internal stress are plotted.
  • the stress is ⁇ 6 ⁇ 10 8 N/m 2 (the ⁇ sign represents the compressive stress and the +sign represents the tensile stress) in the case of the Cu film at a thickness of 400 ⁇ , and +2 ⁇ 10 8 N/m 2 in the case of the Al-1%Cu film at a film thickness of 1,000 ⁇ in the three-layered film electrode A consisting of the Al-1%Cu film/Cu film/Al-1%Cu film. Therefore, the stress is ⁇ 2 ⁇ 10 8 N/m 2 in the three-layered film electrode as a whole, and a weak compressive stress is applied. According to FIG. 14 previously explained, this internal stress ⁇ 2 ⁇ 10 8 N/m 2 is included in a region in which power characteristics of the multi-layered film electrode are not deteriorated.
  • the stress value is ⁇ 2 ⁇ 10 8 N/m 2 for the Cu film at a thickness of 600 ⁇ , and 2 ⁇ 2.5 ⁇ 10 8 N/m 2 for each Al-1%Cu film at a thickness of 700 ⁇ .
  • the total stress is 4 ⁇ 10 8 N/m 2 , and is the tensile stress. According to FIG. 14, this internal stress of 4 ⁇ 10 8 N/m 2 is included in the region where power characteristics of the multi-layered film electrode are deteriorated.
  • FIGS. 6 and 7 are explanatory structural views of the surface acoustic wave filter according to one embodiment of the present invention, wherein FIG. 6 is a perspective view and FIG. 7 is an equivalent circuit diagram.
  • symbol T in denotes an input terminal
  • T out is an output terminal
  • R p1 is a first parallel resonator
  • R p2 is a second parallel resonator
  • R p3 is a third parallel resonator
  • R s1 is a first series resonator
  • R s2 is a second series resonator
  • R p11 , R p12 , R p21 , R p22 , R p31 , R s32 , R s11 , R s12 , R s21 and R s22 are reflectors.
  • the surface acoustic wave filter according to this embodiment is described in detail in Japanese Unexamined Patent Publication (Kokai) No. 5-183380 to which reference is hereby made.
  • the multi-layered film interdigital electrode of this embodiment is formed on a 36° Y-X LiTaO 3 piezoelectric substrate of 1.5 ⁇ 2 ⁇ 0.5 mm, and the first series resonator R s1 and the second series resonator R s2 are connected in series from the input terminal T in , towards the output terminal T out .
  • the first, second and third parallel resonators R p1 , R p2 and R p3 are grounded from the junction between the input terminal and the first series resonator R p1 , from the junction between the first and second series resonators R s1 , R s2 , and from the junction between the second series resonator R s2 and the output terminal.
  • the reflectors R s11 , R s12 are provided to the first series resonator R s1 and the reflectors R s21 , R s22 are provided to the second series resonator R s2 .
  • the reflectors R p11 , R p12 are provided to the first parallel resonator R p1
  • the reflectors R p21 , R p22 are provided to the second parallel resonator R p2 .
  • the reflectors R p31 , R p32 are provided to the third parallel resonator R p3 .
  • the 0.5 mm-thick LiTaO 3 piezoelectric substrate is used in such a manner that its 1.5 mm side as the x-axis direction of the crystal axis exists in the transverse direction of the drawing and its 2 mm side exists in the longitudinal direction of the drawing, or in other words, in the propagating direction of the surface acoustic wave.
  • the pitch ⁇ p of the electrodes of the first parallel resonator R p1 is set to 4.39 ⁇ m
  • its aperture length is set to 160 ⁇ m
  • the aperture length of the first series resonator R s1 is set to 60 ⁇ m
  • the electrode pitch of the second series resonator R s2 is set to 4.16 ⁇ m.
  • FIG. 8 is a graph showing the transmission characteristics of the surface acoustic wave filter according to one embodiment of the present invention.
  • the abscissa in the graph represents frequency (MHz) and the ordinates represents attenuation (dB).
  • the surface acoustic wave filter has the characteristics of a band-pass filter having an about 60 MHz pass band in the proximity of 930 MHz. Attenuation in the pass band is 1.5 dB.
  • the life test of this surface acoustic wave filter is carried out by selecting a frequency, at which power characteristics are the lowest among the pass band, that is, near 950 MHz in this embodiment, and applying a radio frequency power thereto. At this time, the temperature of the filter chip rises somewhat, but an external temperature is controlled in taking such a temperature rise into consideration in advance, and radio frequency power and its life are controlled while the surface temperature of the filter chip is kept constant.
  • FIG. 9 is a graph showing the power characteristics of the surface acoustic wave filter according to one embodiment of the present invention.
  • the abscissa in the graph represents input power (W) and the ordinate represents mean time to failure (MTTF).
  • the failure is defined by the degradation of 0.3 dB for 1.5 dB insertion loss in the pass band (see, FIG. 8 ).
  • FIG. 9 shows also the life time of the surface acoustic wave filters using the four kinds of the electrodes described above, respectively.
  • the filter chip temperature T is set to 393K (120° C.).
  • Curve a in FIG. 9 represents the life time of the surface acoustic wave filter using the Al-1%Cu/Cu/Al-1%Cu film (three-layered film electrode A) which is not heat-treated and has a compressive stress of ⁇ 2 ⁇ 10 8 N/m 2 .
  • Curve b represents the life time of the surface acoustic wave filter using the Al-1%Cu/Cu/Al-1%Cu film (threelayered film electrode B) which is not heat-treated and has a tensile stress of +4 ⁇ 10 8 N/m 2 .
  • Curve c represents the life time of the surface acoustic wave filter using the Al-1%Cu film (single layer film electrode C) which is not heat-treated
  • curve d represents the life time of the surface acoustic wave filter using the Al-1%Cu/Cu/Al-1%Cu film (three-layered electrode AA) which is heat-treated at 400° C.
  • the substrate temperature when forming each film is 120° C.
  • the life time of the surface acoustic wave filter (see curve a) using the Al-1%Cu/Cu/Al-1%Cu film (three-layered film electrode A) of this embodiment, which is not heat-treated and has the compressive stress of ⁇ 2 ⁇ 10 8 N/m 2 is 120 times.
  • the life time of the acoustic wave filter (see curve d) having the three-layered film (three-layered film electrode AA) obtained by heat-treating the Al-1%Cu/Cu/Al-1%Cu film (three-layered electrode A) of this embodiment which is not heat-treated and has a compressive stress of ⁇ 2 ⁇ 10 8 N/m 2 , becomes drastically short, and is shorter than the life time of the surface acoustic wave filter (see curve c) using the conventional Al-1%Cu single film layer (single layer film electrode).
  • the life time of the Al-1%Cu/Cu/Al-1%Cu film (three-layered film electrode B) which is not heat-treated and has a tensile stress of +4 ⁇ 10 8 N/m 2 is improved in comparison with the life time of the surface acoustic wave filter (see curve c) using the conventional Al-1%Cu single layer film (single layer film electrode C), but is incomparatively shorter than the life time of the surface acoustic wave filter of this embodiment having the internal stress thereof regulated (see curve a).
  • the surface acoustic wave filter of this embodiment can provide 200,000 hours as the useful life at the time of input of 1W. Accordingly, the filter can be said to have sufficient power characteristics as an antenna duplexer.
  • the piezoelectric materials illustrated in this embodiment such as LiTaO 3 (36° Y cut-X propagation), LiNbO 3 (64° Y cut-X propagation), etc., are effective in order to improve the characteristics of the filter, and the like.
  • the present invention employs the multi-layered structure of the Al-Cu film/Cu film/Al-Cu film as the electrode material. Therefore, even in the case of surface acoustic wave devices which cannot be heat-treated at a high temperature due to stress migration, the present invention can drastically improve their power characteristics, and greatly contributes to the improvement in performance of the surface acoustic wave devices such as the surface acoustic wave filters.

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Abstract

This invention relates to a surface acoustic wave device and a production process thereof. An electrode is formed by alternately laminating a film of an aluminum alloy containing at least copper added thereto and a copper film on a piezoelectric substrate. While the particle size of the multi-layered electrode materials in kept small, the occurrence of voids in the film is prevented and life time of the surface acoustic wave device is elongated.

Description

This application is a continuation of application Ser. No. 08/297,914, filed Aug. 31, 1994, now abandoned.
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to a surface acoustic wave device and a production process thereof.
Generally, a surface acoustic wave (SAW) device comprises a piezoelectric substrate and a comb-shaped interdigital electrode disposed on the substrate, for converting a voltage to a surface acoustic wave or vice versa. The function of the surface acoustic wave device is to convert a radio frequency voltage to a surface acoustic wave having a wavelength of about 10−5 times by using a comb-shaped interdigital electrode, which causes this wave to propagate on the surface of the piezoelectric substrate and converts again the wave to the voltage by the comb-shaped interdigital electrode.
Frequency selectivity can be provided in accordance with the shape of the interdigital electrode during the two conversion operations between the surface acoustic wave and the voltage, and a filter or a resonator can be constituted by utilizing this characteristic property. Because the propagation speed can be retarded to about 10−5 times that of an electromagnetic wave, the surface acoustic wave device can be used as a delay device.
The application of the surface acoustic wave device to small, economical filters, resonators, delay lines, etc., has already been done by utilizing the functions described above. In other words, the surface acoustic wave device has been applied to IF filters of television sets, resonators of VTR (vide tape recorder) oscillators, VCOs of cordless telephones, and recently, the application has been expanded to RF filters and IF filters of automobile telephones, mobile telephones, and so forth.
To further expand the utilization in this field, it is important to improve a pass band and power characteristics of the surface acoustic wave device. Particularly in the case of the automobile telephones and the mobile telephones, transmission power is relatively great, that is, 0.6 to 3 W, and a large RF power is applied to a filter of a front-end portion inside the apparatus, particularly, to an antenna duplexer.
The maximum input power of the surface acoustic wave filter has been about 0.2 W up to the present, and the filter lacks sufficient power characteristics. For this reason, a dielectric filter having high power resistance has been used for the antenna duplexer. However, because the dielectric filter is large in scale, it causes a problem when the size of the apparatus is reduced as a whole.
Accordingly, if the power characteristics of the surface acoustic wave device can be improved and the antenna duplexer can be realized by utilizing the surface acoustic wave device, the mobile telephones can be made even smaller, and the effect of utilization in industry becomes greater.
2. Description of the Related Art
The interdigital electrode is used in the surface acoustic wave device as described above, and aluminum (Al) or an aluminum alloy containing a small amount of a different kind of metal (not always a solid solution body in many cases) is generally used because the mass is small and its electrical resistance value is low.
Several proposals have been made for the structure of the antenna duplexer using the surface acoustic wave device. Typical examples are described in Japanese Unexamined Patent Publication (Kokai) Nos. 5-167388 and 5-167389. In order to simplify the filter structure in the duplexer and to secure desired characteristics, Japanese Unexamined Patent Publication (Kokai) No. 5-167388 proposes to constitute a duplexer by using a plurality of band-pass filters each formed by using the surface acoustic wave device. Japanese Unexamined Patent Publication (Kokai) No. 5-167389 proposes to integrate a plurality of surface acoustic wave band-pass filter chips having mutually different center frequency bands and having signal input/output terminals and ground terminals, by storing them in one package so as to minimize the duplexer while keeping excellent isolation.
However, the conventional antenna duplexer does not have characteristics such that the filter can sufficiently withstand the increase of RF power. To evaluate the power resistance or characteristics, the life time at the maximum input power at which the apparatus can be used is generally used as a guideline. The conventional antenna duplexer has a life time of only about 1,600 hours at the 1 W input at an environmental temperature of 85° C. (chip temperature of 120° C.) in an accelerated deterioration test stipulated for the mobile telephones of the NTT specification in Japan, for example. These values are not considered sufficient for the life of mobile telephones, and the values of at least twice are believed necessary.
The main factor that determines the useful life of the surface acoustic wave device is power characteristics of electrode fingers of the filter (interdigital electrode fingers IDT), and an aluminum system alloy film containing a trace amount of copper and formed by sputtering, which is well known as being resistant to migration in the field of semiconductor devices, has been used. However, this alloy is not yet sufficient as the electrode material of the surface acoustic wave device used as the antenna duplexer to which a high power load is applied.
Besides the patent references described above, the following reports have been made regarding the methods of improving electric power of the electrode of the surface acoustic wave device.
1. Change of addition metal in aluminum (Al) system alloy:
The use of an aluminum-titanium alloy (Al-Ti), etc., for example, is described in detail in “Examination of Al System Thin Film Material for SAW Power-Resistant Electrode and Production Method Thereof” (by Yuhara et al.), No. 17th EM Symposium Presume, pp. 7-12. According to this report, the useful life of the surface acoustic wave device can be improved by about 10 times the life of an aluminum-copper (Al-Cu) alloy film by changing the electrode material to an aluminum-titanium (Al-Ti) alloy.
2. Use of aluminum (Al) epitaxial single crystal film:
This method is based on the fact that grain boundary diffusion in stress migration of aluminum (Al) can be restricted by converting the structure to a single crystal, and is reported in papers of the Electronic Data Communication Society, A, Vol. J76-A, No. 2, pp. 145-152 (1993) (by Ieki et al.). According to this report, life time can be improved to 2,000 times that of an aluminum-copper alloy (Al-Cu) film by vacuum evaporation.
In comparison with films formed by sputtering, the useful life of an aluminum-copper alloy (Al-Cu) film formed by vacuum evaporation is much shorter from the beginning (refer to Yuhara et al., and other references), and the improvement in life time is believed to be substantially 20 to 200 times. At present, however, it has been confirmed only that this method can cause epitaxial growth only when the substrate material as the base is quartz, and cannot realize the film when LiTaO3 or LiNbO3, which have been widely used as a substrate material for filters for mobile communication, is employed.
As described above, stress migration in the surface acoustic wave device is analogous to electromigration and stress migration in wiring technology of semiconductor devices, and migration-resistant technology in the semiconductor devices will be useful for the migration-resistant technology in the surface acoustic wave devices. Among them, the following technology has drawn increasing attention.
Namely, it is the method which forms in a laminar form a film of an intermetallic compound of aluminum (Al) and a transition metal between the aluminum (Al) films so as to block electromigration of the aluminum (Al) atoms by the intermetallic compound. This method is reported in U.S. Pat. No. 4,017,890 (J. K. Howard, IBM, April 1977) and in connection with this patent, a report is made by J. K. Howard, J. F. White and P. S. Ho in “J. Appl. Phys., Vol. 49, p. 4083 (1978).
According to these reports, life time becomes maximal when chromium (Cr) is used as the transition metal, and is about 10 times that of the aluminum-copper alloy (Al-Cu). However, when the inventors of the present invention applied this method to the electrode of the surface acoustic wave device, a sufficient effect could not be obtained.
As described above, several methods have been proposed as the prior art technologies for improving the electrode materials, but none of them have provided sufficient power characteristics. Accordingly, development of an electrode material having higher performance has been necessary. As a matter of fact, when the method of improving the power characteristics by the multi-layered structure of the aluminum films (Al) and the intermetallic compound of the aluminum (Al) and the transition metal is applied to the surface acoustic wave device, no effect can be observed but performance actually deteriorates.
FIG. 1 is an explanatory structural view of a surface acoustic wave filer having the conventional three-layered structure. In the drawing, reference numeral 11 denotes a LiTaO3 piezoelectric substrate, 12 is an Al-1%Cu alloy film, 13 is a Ta film, 14 is an Al-1%Cu film, and 15 and 16 are Al-Ta alloy films.
In the surface acoustic wave filter using this conventional three-layered electrode structure, an 1,000 Å-thick Al-1%Cu alloy film 12 is formed on the LiTaO3 piezoelectric substrate 11, a 500 Å-thick Ta film 13 is formed on the former, and a 1,000 Å-thick Al-1%Cu film 14 is further formed on the Ta film 13. Next, heat-treatment is carried out at 400° C. in vacuum so as to form sufficient Ta-Al (TaAl3) 15 and 16 on the interface between the Al-1% Cu films 12, 14, and the Ta film 13 and in the grain boundaries of the Al-1% Cu alloy films 12, 14. The electrode structure is then patterned into an interdigital shape to form the electrode. When the useful life of this surface acoustic wave filter is measured by conducting an accelerated deterioration test at a chip temperature of 120° C. and radio frequency power of 1 W, the life expectancy is found to be 100 hours, and drops to {fraction (1/16)} of the life time of a 3,200 Å-thick Al-1%Cu single layered film, that is, 1,600 hours.
FIG. 2 is a graph useful for explaining power characteristics of a surface acoustic wave filter having the conventional three-layered structure.
In the graph, the abscissa represents input power (W) and the ordinate represents life time (mean time to failure: MTTF, hours). Curve a represents an Al-1%Cu single layer film which is not heat-treated, curve b represents an Al-1%Cu/Ta/Al-1%Cu film which is not heat-treated, and curve c represents an Al-1%Cu/Ta/Al-1%Cu film which is heat-treated at 400° C. The substrate (chip) temperature when forming each film is 120° C., and each film has a thickness of 3,200 Å.
According to the J. K. Howard et al. reference described above, the surface acoustic wave filter having the three-layered structure electrode described above should provide longer life at least 20 times that of the Al-1%Cu film. According to experiments, however, the actual life of the Al-1%Cu/Ta/Al-1%Cu film (see curve c) which is formed under the ordinary heat-treatment conditions at 400° C. is much shorter than the life of the Al-1%Cu single layer film (see curve a) which is not heat-treated. This difference results from some differences of a life deterioration mechanism of wirings of semiconductor devices from a life deterioration mechanism of IDT (Interdigital Transducer) of the surface acoustic wave filter.
In short, both electromigration of the Al atoms and static stress migration are involved in the life deterioration of the wirings of the semiconductor devices, whereas the life deterioration of IDT of the surface acoustic wave device mainly results from the dynamic stress migration. Here, the static stress migration means the Al migration driven by the static internal stress of Al films. The dynamic stress migration means the Al migration driven by the dynamic migration of the internal stress caused by the acoustic surface wave propagation. Depending on parameters associated with the life deterioration, exactly opposite actions results in some cases due to the difference of electromigration from the dynamic stress migration. A typical example is the grain size of Al. According to J. B. Ghate, “Electro-migration-Induced failure VLSI Interconnectors”, Solid State Technology, pp. 113-120, 1983, the greater the grain size, the greater the effect of suppressing electromigration and the longer life becomes, in the case of the wirings of the semiconductor devices. On the other hand, according to the aforementioned Yuhara et al. reference, the greater the grain size, the shorter life becomes, in the case of the surface acoustic wave device.
FIG. 3 is a graph useful for schematically explaining the relation between the grain size of the electrode material and life time. The abscissa in the graph represents the grain size, and the ordinate represents life time. As shown in the graph, since electromigration is predominant in the case of the wirings of the semiconductor device, life time becomes longer with the increase of the grain size (see curve b). In the case of the surface acoustic wave (SAW) device electrode, on the other hand, since stress migration is predominant, life time becomes shorter with the increase of the grain size of the electrode material (see curve a). The grain size of the electrode material can be increased by applying heat-treatment.
It can be interpreted from the sequence described above that the cause of deterioration of the Al-1%Cu/Ta/Al-1%Cu film formed conventionally by applying heat-treatment at 400° C. and represented by the curve c in FIG. 2 is this heat-treatment at 400° C., since the grain size becomes greater and stress migration becomes more likely to occur due to this heat-treatment, so life time is reduced. To further support this fact, a three-layered film having the same structure is formed without carrying out the heat-treatment and moreover, in such a manner that the temperature never exceeds 200° C. throughout the full process, so as to constitute the surface acoustic wave filter. When life of this filter is evaluated, the curve b in FIG. 2 can be obtained, and life time is substantially equal to that of the Al-1%Cu single layered film (see curve a).
It can be understood that when the heat-treatment is not carried out at a high temperature of about 400° C., life time can be drastically improved. This is because the grain size can be kept small. In this case, although the grain size remains small and life time is relatively long, the alloy between Al and the transition metal is not formed, between the layers because heat-treatment is not effected, and because the function of a stopper for inhibiting cracks occurring in the film, that is, the growth of voids, does not exist, so life time is not improved in comparison with the Al-1%Cu single layered film which is not heat-treated (see curve a).
SUMMARY OF THE INVENTION
It is an object of the present invention to provide a surface acoustic wave device which can prevent the occurrence of voids in a film while keeping a grain size of an Al-Cu multi-layered film small, and which has a long life time.
It is another object of the present invention to provide a process for producing such a surface acoustic wave device.
These and other objects of the present invention will become more apparent from the following detailed description of preferred embodiments thereof.
According to the present invention, there is provided a surface acoustic wave device which comprises a piezoelectric substrate and an electrode formed on the substrate by alternately laminating a film of aluminum containing at least copper added thereto or an alloy of such aluminum and a copper film. In this case, the electrode is a transducer for converting an electrical signal to a surface acoustic wave.
In the surface acoustic wave device according to the present invention, directions of internal stresses of the film of aluminum containing at least copper or the alloy of such aluminum and the copper film preferably have opposite directions, and moreover, the sum of these internal stresses are zero (0) or compressive (stress on the negative side). When the internal stresses are regulated in this way, stress migration of aluminum can be reduced.
A laminate structure of the aluminum or aluminum alloy film/copper film constituting the electrode can be constituted arbitrarily into a two- or more multi-layered structure, and is preferably a two- or three-layered laminate structure. In such a multi-layered structure, the thickness of each film can be broadly changed in accordance with frequency and other various factors, but is generally and preferably within the range of from about 300 Å to about 10,000 Å.
In a preferred embodiment of the present invention, the electrode can be a two-layered laminate structure of the aluminum-copper alloy film and the copper film. Here, the thickness of the Al-Cu film for 800 to 1,000 MHz filters is preferably from about 1,000 Å to about 5,000 Å, and the thickness of the Cu film is preferably from about 300 to about 1,000 Å.
In another preferred embodiment of the present invention, the electrode can be a three-layered laminate structure comprising two aluminum-copper alloy films and the copper film sandwiched between the aluminum-copper alloy films. The thickness of each of the Al-Cu films for 800 to 1,000 MHz filters is preferably from about 500 Å to about 1,500 Å, and the thickness of the Cu film is preferably from about 300 Å to about 1,000 Å.
In the surface acoustic wave device according to the present invention, it is essentially necessary to add copper to the aluminum or aluminum alloy film constituting the electrode. The amount of addition of copper is preferably from 0.4 to 4 wt% and further preferably, from 0.5 to 1.5 wt% on the basis of the weight of the film. If the amount of addition of copper is below 0.4 wt%, problems such as stress migrations appear, and if it exceeds 4 wt%, on the other hand, fine patterns of IDT can not be delineated by RIE (reactive ion etching) because of copper-based residue.
In the embodiments of the present invention, copper is most preferably added to the aluminum or aluminum alloy film.
The piezoelectric substrate used as the substrate can be those piezoelectric crystal substrates which are ordinarily used in surface acoustic wave devices, such as LiNbO3, LiTaO3, quartz, ZnO/glass, PZT type ceramics, and so forth. Preferably, LiTaO3, such as (36° Y-X)LiTaO3 and LiNbO3 such as (64° Y-X)LiNbO3, can be used effectively as the piezoelectric substrate.
When a surface acoustic wave device having a piezoelectric substrate and an electrode formed on the substrate is produced, the present invention provides a process for producing a surface acoustic wave device which comprises alternately laminating a film of aluminum containing at least copper added thereto and a copper film on the piezoelectric substrate at a temperature not higher than 200° C.; patterning the resulting laminate structure to form an electrode; and carrying out subsequent processings while maintaining the temperature of not higher than 200° C.
The piezoelectric substrate and the electrode formed on the substrate have already been described above. The electrode can be formed by laminating the respective films into a predetermined film thickness by ordinary film formation technology such as sputtering, CVD (Chemical Vapor Deposition), electron beam deposition, etc., and subsequently patterning the resulting laminate structure into a desired electrode shape.
The method of the present invention can restrict the growth of the grain boundary of the electrode materials by employing the process steps described above.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a perspective view useful for explaining the structure of a surface acoustic wave filter having a three-layered structure according to the prior art;
FIG. 2 is a graph useful for explaining power characteristics of a surface acoustic wave filter having a three-layered structure according to the prior art;
FIG. 3 is a graph useful for explaining the relationship between a grain size of an electrode material and life time;
FIG. 4 is a perspective view useful for explaining the structure of a surface acoustic wave device according to one embodiment of the present invention;
FIG. 5 is a graph useful for explaining experimental results of a film thickness and an internal stress of each of an Al-1%Cu film and a Cu film;
FIG. 6 is a perspective view useful for explaining the structure of a surface acoustic wave filter according to an embodiment of the present invention;
FIG. 7 is an equivalent circuit diagram of the surface acoustic wave filter shown in FIG. 6;
FIG. 8 is a graph showing transmission characteristics of the surface acoustic wave filter according to an embodiment of the present invention;
FIG. 9 is a graph showing power characteristics of the surface acoustic wave filter according to an embodiment of the present invention;
FIG. 10 is an explanatory view of an Al-Cu film electrode structure;
FIG. 11 is a perspective view useful for explaining an Al-Cu/Cu film electrode structure;
FIG. 12 is a schematic view useful for explaining a CuAl2 crystal structure;
FIG. 13 is a perspective view useful for explaining an Al-Cu/Cu/Al-Cu film electrode structure; and
FIG. 14 is a graph showing the relationship between an internal stress of an alloy film and power characteristics of a surface acoustic wave device.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
First, an electrode structure which can be advantageously utilized in a surface acoustic wave device according to the present invention, and the function and effect of such an electrode, will be explained.
Generally, it is believed that a film obtained by adding a small amount (about 3 to 4 wt %) of a different kind of metal to Al has a structure in which an alloy between Al and the different kind of metal exists at a grain boundary of Al.
FIG. 10 is an explanatory view of an Al-Cu film electrode structure. In this drawing, reference numeral 21 denotes an LiTaO3 substrate, 22 is an Al-Cu film, 23 is Al crystal grains, 24 is a grain boundary, and 25 is CuAl2. This drawing illustrates an example where the Al-Cu film 22 is deposited on the LiTaO3 substrate 21 by sputtering or electron beam deposition and is patterned. Basically, it is a polycrystalline structure of Al, wherein a large number of Al crystal grains 23 exist, and CuAl 2 25 segregates at the grain boundary 24. It is believed that the reason why the Al-Cu film has higher resistance to migration than the Al film is because CuAl 2 25 inhibits fluidization of the Al atoms.
A similar effect can be obtained when Ti, Si, etc., is used as the metal to be added to Al, in place of Cu described above.
Next, we consider the case where a Cu film is formed on the upper surface of the Al film having this structure, with reference to FIG. 11.
FIG. 11 is an explanatory view of an Al-Cu/Cu film electrode structure. In the drawing, reference numeral 21 denotes a LiTaO3 substrate, 22 is an Al-Cu film, 23 is Al crystal grains, 24 is a grain boundary, 25 is CuAl2 and 26 is a Cu film. The drawing illustrates an example where the Al-Cu alloy film 22 is formed on the LiTaO3 substrate 21 by sputtering or electron beam deposition, the Cu film 26 is formed on the former and the Cu film 26 is then patterned. This is basically a polycrystalline structure of Al. A large number of Al crystal grains 23 exist, and CuAl 2 25 segregates between the grain boundary 24, the Al-Cu film 22 and the Cu film 26.
Even when the temperature is as low as below 200° C. when forming the Cu film 26 on the Al-Cu film 22, a small amount of CuAl 2 25 is formed on the interface between the grain boundary, the Al-Cu film 22 and the Cu film 26.
The reason for this is believed to be as follows. Cu to be sputtered has large kinetic energy and impinges against Al, and the film is formed while Cu imparts kinetic energy to the Al atoms. Therefore, an effect similar to the effect of local heat-treatment occurs, and CuAl2 is formed on the interface between the Al-Cu alloy film 22 and the Cu film 26. The thickness of Cu-Al2 on the interface is some dozens of angstroms (Å).
Now, let's consider the case where the Al-Cu alloy film is further formed on the film having the structure shown in FIG. 11.
FIG. 12 is an explanatory view of the CuAl2 crystal structure. As shown in the drawing, the CuAl2 crystal has the structure wherein the Cu layers and the Al layers are alternately laminated. Therefore, matching with the Cu film is extremely excellent, and firm bonding can be expected. Because CuAl 2 25 existing in the Al grain boundary 24 of the Al-Cu film 22 shown in FIG. 11 and CuAl 2 25 existing on the interface between the Al-Cu film 22 and the Cu film 26 are the same crystal, mutual bonding strength becomes high.
FIG. 13 is an explanatory view of an Al-Cu/Cu/Al-Cu film electrode structure. In this drawing, reference numeral 21 denotes a LiTaO3 substrate, 22 is an Al-Cu film, 23 is an AQ crystal grain, 24 is a grain boundary, 25 is CuAl2, 26 is a Cu film, 27 is an Al-Cu film, 28 is an Al crystal grain, 29 is a grain boundary, and 30 is CuAl2. The drawing illustrates an example where the Al-Cu film 22 is formed on the LiTaO3 substrate 21 by sputtering or electron beam deposition, the Cu film 26 is formed on the former, and the Al-Cu film 27 is further formed on the Cu film 26 and is patterned. CuAl 2 25 is formed in the grain boundary 24 of the Al crystal grains 23 of the Al-Cu film 22, CuAl 2 30 is formed in the grain boundary 29 of the Al crystal grains 28 of the Al-Cu film 27, and CuAl2 is further formed between the Cu film 26 and the upper and lower Al- Cu films 22, 27.
Under such a condition, CuAl 2 25, 30 existing in the grain boundaries 24, 29 in the upper and lower Al- Cu films 22, 27 and CuAl2 existing on the interface between the Al- Cu films 22, 27 and the Cu film 26 are strongly bonded to one another, and the Cu film at the center of the film as a whole functions as the framework, while CuAl2 existing in the grain boundaries of the upper and lower Al-Cu film has a small bone network structure. Accordingly, a film having high resistance to stress migration can be realized at a low temperature of below 200° C. When heat-treatment is applied to the film, CuAl2 on the interface becomes thick, but because the Al crystal grains grow to a large grain size as described already, the resistance to stress migration drops. Accordingly, heat-treatment at a high temperature above 200° must not be applied.
As described above, the fundamental principle of the present invention lies in that the Al-Cu film and the Cu film are laminated, and the network structure is formed by CuAl2 formed in the grain boundary of Al in the Al-Cu film with the Cu film being the center, so as to inhibit stress migration.
As described in the afore-mentioned Yuhara et al. reference, also, the fundamental principle of the present invention is based on the concept that the internal stress of the Al alloy film is largely associated with power characteristics (life) of the surface acoustic wave device, power characteristics are high when the stress of the Al alloy film is zero or rather compressive, and power characteristics drop with higher tensile stress.
FIG. 14 is a graph showing the relation between the internal stress of the alloy film and power characteristics of the surface acoustic wave device. This graph cites the data reported previously by Yuhara et al. The axis of abscissa represents the internal stress of the alloy film, and the ordinate represents the stress of the surface acoustic wave device, that is, the tendency of power characteristics. As can be seen from this graph, power characteristics of the surface acoustic wave device are high when the internal stress of the alloy film is zero or compressive, but are deteriorated when the internal stress is tensile.
Accordingly, power characteristics can be improved by arranging the films so that their internal stresses have opposite signals when the multi-layered alloy film is formed, and moreover, the magnitude of the internal stresses are mutually in equilibrium, in order to regulate the internal stress of the film as a whose to zero or somewhat compressive.
Next, several embodiments of the present invention will be explained with reference to the drawings. It is to be understood that these embodiments are merely illustrative and in no way limit the present invention.
FIG. 4 is an explanatory structural view of a surface acoustic wave device according to an embodiment of the present invention. In the drawing, reference numeral 1 denotes a LiTaO3 substrate, 2 is an Al-1%Cu film, 3 is Al crystal grains, 4 is a grain boundary, 5 is CuAl2, 6 is a Cu film, 7 is an Al-1%Cu film, 8 is Al crystal grains, 9 is a grain boundary, and 10 is CuAl2. In the surface acoustic wave device of this embodiment, a 1,000 Å-thick Al-1%Cu film 2 is formed on the LiTaO3 substrate 1 having a piezoelectric property while the temperature is kept below 200° C., a 400 Å-thick Cu film 6 is formed on the former, and a 1,000 Å-thick Al-1%Cu film 7 is formed on the Cu film 6. In this way, a three-layered film having a total thickness of 2,400 Å is formed. This three-layered laminate film is patterned to form an interdigital electrode (hereinafter referred to as the “three layered film electrode A”).
In the embodiment shown in the drawing, CuAl 2 5 is formed in the grain boundary 4 of the Al crystal grains 3 of the Al-1%Cu film 2, CuAl 2 10 is formed in the grain boundary 9 of the Al crystal grains 8 of the Al-1%Cu film, and CuAl 2 5, 10 is also formed between the Cu film 6 and the upper and lower Al-1%Cu films 2, 7.
To compare with the three-layered electrode A of this embodiment, an interdigital electrode consisting of a 3,200 Å-thick Al-1%CU single-layered film (hereinafter referred to as the “single-layered film electrode C”) is formed on the LiTaO3 substrate.
To compare the effect of stress regulation of the three-layered film electrode, an interdigital electrode (hereinafter referred to as the “three-layered film electrode B”) is formed by first forming a 700 Å-thick Al-1%Cu film, a 600 Å-thick Cu film and a 700 Å-thick Al-1%Cu film on the LiTaO3 and substrate in the total thickness of 2,000 Å and patterning this three-layered laminate film.
To examine the heat-treatment effect of the three-layered film electrode A, an interdigital electrode (hereinafter referred to the “three-layered film electrode A”) is formed by heat-treating the three-layered film electrode A at 400° C. after the film formation.
The thickness of these electrode films is determined in the following way.
A. As a reference a 3,200 Å-thick Al-1%CU single layer film will be considered.
When a surface acoustic wave filter is produced using this Al-1%Cu single layer film as the electrode by the later-appearing method, a transmission band-pass filter of an NTT specifications having 933 MHz as the center frequency can be realized.
In the surface acoustic wave filter, the center frequency changes in accordance with the mass of the electrode due to the mass load effect. Therefore, in order to correctly compare power characteristics when the electrode is changed, it is necessary to bring the mass of the electrode film into conformity with the mass of the electrode of the surface acoustic wave filter using the Al-1%Cu single layer film electrode C so as to prevent frequency fluctuation.
The density of Cu is 8.9, the density of Al is 2.7, and the density of the Cu film is about three times the density of Al. Therefore, the masses of the three-layered film electrodes A, B and AA are substantially the same as the mass of the 3,200 Å-thick Al-1%Cu single layer film electrode as the reference. Accordingly, the surface acoustic wave filters using the three-layered film electrodes A, B and AA exhibit substantially the same characteristics as the 933 MHz filter.
B. The balance of the internal stresses of the multi-layered film electrode must be secured so as to improve power characteristics as already described.
If the substrate temperature and the film formation rate at the time of growth of the multi-layered film are constant, the internal stress of the multi-layered film depends on the film thickness of each layer.
FIG. 5 is a graph useful for explaining the experimental results of the internal stresses of the Al-1%Cu film and the Cu film. In this graph, the abscissa represents the film thickness of the metal film, and the ordinate represents the stress. In the graph, the experimental results of the film thickness of the Al-1%Cu film and the Cu film, and the internal stress are plotted.
When the balance of the internal stress inside the laminate film is taken into consideration, the stress is −6×108 N/m2 (the − sign represents the compressive stress and the +sign represents the tensile stress) in the case of the Cu film at a thickness of 400 Å, and +2×108 N/m2 in the case of the Al-1%Cu film at a film thickness of 1,000 Å in the three-layered film electrode A consisting of the Al-1%Cu film/Cu film/Al-1%Cu film. Therefore, the stress is −2×108 N/m2 in the three-layered film electrode as a whole, and a weak compressive stress is applied. According to FIG. 14 previously explained, this internal stress −2×108 N/m2 is included in a region in which power characteristics of the multi-layered film electrode are not deteriorated.
In the case of the three-layered film electrode B, the stress value is −2×108 N/m2 for the Cu film at a thickness of 600 Å, and 2×2.5×108 N/m2 for each Al-1%Cu film at a thickness of 700 Å. The total stress is 4×108 N/m2, and is the tensile stress. According to FIG. 14, this internal stress of 4×108 N/m2 is included in the region where power characteristics of the multi-layered film electrode are deteriorated.
FIGS. 6 and 7 are explanatory structural views of the surface acoustic wave filter according to one embodiment of the present invention, wherein FIG. 6 is a perspective view and FIG. 7 is an equivalent circuit diagram. In the drawings, symbol Tin denotes an input terminal, Tout is an output terminal, Rp1 is a first parallel resonator, Rp2 is a second parallel resonator, Rp3 is a third parallel resonator, Rs1 is a first series resonator, Rs2 is a second series resonator, and Rp11, Rp12, Rp21, Rp22, Rp31, Rs32, Rs11, Rs12, Rs21 and Rs22 are reflectors.
The surface acoustic wave filter according to this embodiment is described in detail in Japanese Unexamined Patent Publication (Kokai) No. 5-183380 to which reference is hereby made. The multi-layered film interdigital electrode of this embodiment is formed on a 36° Y-X LiTaO3 piezoelectric substrate of 1.5×2×0.5 mm, and the first series resonator Rs1 and the second series resonator Rs2 are connected in series from the input terminal Tin, towards the output terminal Tout. The first, second and third parallel resonators Rp1, Rp2 and Rp3 are grounded from the junction between the input terminal and the first series resonator Rp1, from the junction between the first and second series resonators Rs1, Rs2, and from the junction between the second series resonator Rs2 and the output terminal.
The reflectors Rs11, Rs12 are provided to the first series resonator Rs1 and the reflectors Rs21, Rs22 are provided to the second series resonator Rs2. The reflectors Rp11, Rp12 are provided to the first parallel resonator Rp1, and the reflectors Rp21, Rp22 are provided to the second parallel resonator Rp2. Further, the reflectors Rp31, Rp32 are provided to the third parallel resonator Rp3.
The 0.5 mm-thick LiTaO3 piezoelectric substrate is used in such a manner that its 1.5 mm side as the x-axis direction of the crystal axis exists in the transverse direction of the drawing and its 2 mm side exists in the longitudinal direction of the drawing, or in other words, in the propagating direction of the surface acoustic wave. The pitch λp of the electrodes of the first parallel resonator Rp1, is set to 4.39 μm, its aperture length is set to 160 μm, the aperture length of the first series resonator Rs1 is set to 60 μm, and the electrode pitch of the second series resonator Rs2 is set to 4.16 μm.
FIG. 8 is a graph showing the transmission characteristics of the surface acoustic wave filter according to one embodiment of the present invention. The abscissa in the graph represents frequency (MHz) and the ordinates represents attenuation (dB). As shown in the graph, the surface acoustic wave filter has the characteristics of a band-pass filter having an about 60 MHz pass band in the proximity of 930 MHz. Attenuation in the pass band is 1.5 dB.
The life test of this surface acoustic wave filter is carried out by selecting a frequency, at which power characteristics are the lowest among the pass band, that is, near 950 MHz in this embodiment, and applying a radio frequency power thereto. At this time, the temperature of the filter chip rises somewhat, but an external temperature is controlled in taking such a temperature rise into consideration in advance, and radio frequency power and its life are controlled while the surface temperature of the filter chip is kept constant.
FIG. 9 is a graph showing the power characteristics of the surface acoustic wave filter according to one embodiment of the present invention. The abscissa in the graph represents input power (W) and the ordinate represents mean time to failure (MTTF). The failure is defined by the degradation of 0.3 dB for 1.5 dB insertion loss in the pass band (see, FIG. 8).
Generally, when the MTTF of the electrode of the surface acoustic wave filter relies on the Arrhenius' equation, that is,
1n(MTTF)=A+B/T−n×1n(Pin),
the natural logarithm of the input power (Pin) and the natural logarithm of mean time to failure (MTTF) are expressed by rightwardly descending straight lines. Here, A, B and n are proportional constants.
Besides the surface acoustic wave filter using the electrode of this embodiment, this FIG. 9 shows also the life time of the surface acoustic wave filters using the four kinds of the electrodes described above, respectively. In this measurement, the filter chip temperature T is set to 393K (120° C.).
Curve a in FIG. 9 represents the life time of the surface acoustic wave filter using the Al-1%Cu/Cu/Al-1%Cu film (three-layered film electrode A) which is not heat-treated and has a compressive stress of −2×108 N/m2. Curve b represents the life time of the surface acoustic wave filter using the Al-1%Cu/Cu/Al-1%Cu film (threelayered film electrode B) which is not heat-treated and has a tensile stress of +4×108 N/m2. Curve c represents the life time of the surface acoustic wave filter using the Al-1%Cu film (single layer film electrode C) which is not heat-treated, and curve d represents the life time of the surface acoustic wave filter using the Al-1%Cu/Cu/Al-1%Cu film (three-layered electrode AA) which is heat-treated at 400° C. By the way, the substrate temperature when forming each film is 120° C.
In comparison with the surface acoustic wave filter (see curve c) using the conventional Al-1%Cu single layer film (single layer film electrode C), the life time of the surface acoustic wave filter (see curve a) using the Al-1%Cu/Cu/Al-1%Cu film (three-layered film electrode A) of this embodiment, which is not heat-treated and has the compressive stress of −2×108 N/m2 is 120 times.
The life time of the acoustic wave filter (see curve d) having the three-layered film (three-layered film electrode AA) obtained by heat-treating the Al-1%Cu/Cu/Al-1%Cu film (three-layered electrode A) of this embodiment which is not heat-treated and has a compressive stress of −2×108 N/m2, becomes drastically short, and is shorter than the life time of the surface acoustic wave filter (see curve c) using the conventional Al-1%Cu single film layer (single layer film electrode).
Further, the life time of the Al-1%Cu/Cu/Al-1%Cu film (three-layered film electrode B) which is not heat-treated and has a tensile stress of +4×108 N/m2 (see curve b) is improved in comparison with the life time of the surface acoustic wave filter (see curve c) using the conventional Al-1%Cu single layer film (single layer film electrode C), but is incomparatively shorter than the life time of the surface acoustic wave filter of this embodiment having the internal stress thereof regulated (see curve a).
The surface acoustic wave filter of this embodiment can provide 200,000 hours as the useful life at the time of input of 1W. Accordingly, the filter can be said to have sufficient power characteristics as an antenna duplexer.
Though a general piezoelectric crystal substrate can be used as the piezoelectric substrate, the piezoelectric materials illustrated in this embodiment, such as LiTaO3 (36° Y cut-X propagation), LiNbO3 (64° Y cut-X propagation), etc., are effective in order to improve the characteristics of the filter, and the like.
As described above, the present invention employs the multi-layered structure of the Al-Cu film/Cu film/Al-Cu film as the electrode material. Therefore, even in the case of surface acoustic wave devices which cannot be heat-treated at a high temperature due to stress migration, the present invention can drastically improve their power characteristics, and greatly contributes to the improvement in performance of the surface acoustic wave devices such as the surface acoustic wave filters.

Claims (37)

We claim:
1. A surface acoustic wave device comprising:
a piezoelectric substrate; and
an electrode formed on said substrate by alternately laminating of an aluminum copper alloy film and a copper film such that said electrode has a three-layered laminate structure with two with CuAl2 formed at an interface between said aluminum-copper alloy films sandwiching one film and said copper film.
2. A surface acoustic wave device according to claim 1, wherein
the aluminum-copper alloy films have film has one of a tensile internal stress and a compressive internal stress,
the copper film has the other of a tensile internal stress and a compressive internal stress such that the internal stresses of said aluminum-copper alloy films film and said copper film have mutually opposite directions, and
the sum of said internal stresses is either zero or compressive.
3. A surface acoustic wave device according to claim 1, wherein the amount of copper in the aluminum-copper alloy film is from 0.5 to 4 wt % on the basis of the total weight of said alloy film.
4. A surface acoustic wave device according to claim 1, wherein said piezoelectric substrate is made of one of LiTaO3 and LiNbO3.
5. A surface acoustic wave device according to claim 1, wherein the piezoelectric substrate and the electrode are in the form of a surface acoustic wave filter.
6. A surface acoustic wave device according to claim 1, wherein the electrode has two aluminum-copper alloy films, one copper film and two CuAl 2 films between the copper film and the respective aluminum-copper alloy films.
7. A surface acoustic wave device according to claim 1, wherein the electrode forms a comb-tooth interdigital transducer on the piezoelectric substrate.
8. A surface acoustic wave device comprising:
a piezoelectric substrate; and
an electrode formed on said substrate, the electrode having aluminum-copper alloy films and a CuAl 2 layer formed between the aluminum-copper alloy films, wherein
the electrode is produced by a process of laminating aluminum-copper alloy films and a copper film, and
said CuAl 2 layer is formed from aluminum of the aluminum-copper alloy films and from copper of the copper film.
9. A surface acoustic wave device according to claim 8, wherein the electrode has a plurality of aluminum-copper alloy films and a plurality of CuAl 2 layers formed between the aluminum-copper alloy films.
10. A surface acoustic wave device according to claim 8, wherein the amount of copper in the aluminum-copper alloy films is from 0.5 to 4 wt % on the basis of the total weight of said alloy films.
11. A surface acoustic wave device according to claim 8, wherein said piezoelectric substrate is made of one of LiTaO3 and LiNbO 3.
12. A surface acoustic wave device according to claim 8, wherein the piezoelectric substrate and the electrode are in the form of a surface acoustic wave filter.
13. A surface acoustic wave device according to claim 8, wherein the CuAl2 formed between the aluminum-copper alloy films and a CuAl 2 formed in a grain boundary of the aluminum-copper alloy films are mutually bonded.
14. A surface acoustic wave filter comprising:
a piezoelectric substrate;
an input terminal;
an output terminal;
a series resonator connected to said input terminal and said output terminal; and
a parallel resonator connected between said series resonator and a ground, said series and said parallel resonators including an electrode formed on said substrate of an aluminum copper alloy film and a copper film with CuAl 2 formed at an interface between said aluminum copper alloy film and said copper film.
15. A surface acoustic wave device according to claim 14, wherein
the aluminum-copper alloy film has one of a tensile internal stress and a compressive internal stress,
the copper film has the other of a tensile internal stress and a compressive internal stress such that the internal stresses of said aluminum-copper alloy film and said copper film have mutually opposite directions, and
the sum of said internal stresses is either zero or compressive.
16. A surface acoustic wave device according to claim 14, wherein the amount of copper in the aluminum-copper alloy film is from 0.5 to 4 wt % on the basis of the total weight of said alloy film.
17. A surface acoustic wave device according to claim 14, wherein said piezoelectric substrate is made of one of LiTaO3 and LiNbO 3.
18. A surface acoustic wave device according to claim 14, wherein the piezoelectric substrate and the electrode are in the form of a surface acoustic wave filter.
19. A surface acoustic wave device according to claim 14, wherein the electrode has two aluminum-copper alloy films, one copper film and two CuAl 2 films between the copper film and the respective aluminum-copper alloy films.
20. A surface acoustic wave filter comprising:
a piezoelectric substrate;
an input terminal;
an output terminal;
a series resonator connected to said input terminal and said output terminal; and
a parallel resonator connected between said series resonator and a ground, said series and said parallel resonators including an electrode formed on said substrate, the electrode having aluminum-copper alloy films and a CuAl 2 layer formed between the aluminum-copper alloy films, wherein
the electrode is produced by a process of alternately laminating aluminum-copper alloy films and a copper film, and
said CuAl 2 layer is formed from aluminum of the aluminum-copper alloy films and from copper of the copper film.
21. A surface acoustic wave filter according to claim 20, wherein the electrode has a plurality of aluminum-copper alloy films and a plurality of CuAl 2 films formed between the aluminum-copper alloy films.
22. A surface acoustic wave filter according to claim 20, wherein the amount of copper in the aluminum-copper alloy films is from 0.5 to 4 wt % on the basis of the total weight of said alloy films.
23. A surface acoustic wave filter according to claim 20, wherein said piezoelectric substrate is made of one of LiTaO3 and LiNbO 3.
24. A surface acoustic wave filter according to claim 20, wherein the piezoelectric substrate and the electrode are in the form of a surface acoustic wave filter.
25. A surface acoustic wave filter according to claim 20, wherein the piezoelectric substrate, input terminal, output terminal, series resonator and parallel resonator form an antenna duplexer.
26. A surface acoustic wave filter according to claim 22, wherein the piezoelectric substrate, input terminal, output terminal, series resonator and parallel resonator form an antenna duplexer.
27. A surface acoustic wave filter according to claim 23, wherein the piezoelectric substrate, input terminal, output terminal, series resonator and parallel resonator form an antenna duplexer.
28. A surface acoustic wave filter according to claim 24, wherein the piezoelectric substrate, input terminal, output terminal, series resonator and parallel resonator form an antenna duplexer.
29. A surface acoustic wave device comprising:
a piezoelectric substrate; and
an electrode formed on said substrate by a process comprising the steps of:
laminating an aluminum-copper alloy film and a copper film thereby forming a laminated structure; and
heating the laminated structure.
30. A surface acoustic wave device according to claim 29, wherein the amount of copper in the aluminum-copper alloy film is from 0.5 to 4 wt % on the basis of the total weight of said alloy film.
31. A surface acoustic wave device according to claim 29, wherein said piezoelectric substrate is made of one of LiTaO3 and LiNbO 3.
32. A surface acoustic wave filter comprising:
a piezoelectric substrate;
an input terminal;
an output terminal;
a series resonator connected to said input terminal and said output terminal; and
a parallel resonator connected between said series resonator and a ground, said series and said parallel resonators including an electrode having an aluminum-copper alloy film and a CuAl 2 layer, the electrode being formed on said substrate by a process comprising the steps of:
laminating the aluminum-copper alloy film and a copper film thereby forming a laminated structure; and
heating the laminated structure.
33. A surface acoustic wave filter according to claim 32, wherein the amount of copper in the aluminum-copper alloy film is from 0.5 to 4 wt % on the basis of the total weight of said alloy film.
34. A surface acoustic wave filter according to claim 32, wherein said piezoelectric substrate is made of one of LiTaO3 and LiNbO 3.
35. A surface acoustic wave device comprising:
a piezoelectric substrate; and
an electrode formed on said substrate by a process comprising the steps of:
laminating an aluminum-copper alloy film and a copper film thereby forming a laminated structure with the aluminum-copper alloy film facing said substrate; and
heating the laminated structure.
36. A surface acoustic wave device comprising:
a piezoelectric substrate; and
an electrode formed on said substrate by a process comprising the steps of:
alternately laminating aluminum-copper alloy films and a copper film thereby forming a laminated structure; and
heating the laminated structure.
37. A surface acoustic wave device comprising:
a piezoelectric substrate; and
an electrode formed on said substrate by a process comprising the steps of:
alternately laminating aluminum-copper alloy films and a copper film thereby forming a laminated structure with one of the aluminum-copper alloy films facing said substrate; and
heating the laminated structure.
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JP3379049B2 (en) 2003-02-17
US5774962A (en) 1998-07-07
JPH07122961A (en) 1995-05-12
USRE38002E1 (en) 2003-02-25
US5773917A (en) 1998-06-30
FR2711863B1 (en) 1996-04-12

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