USRE31570E - Fluid flowmeter - Google Patents

Fluid flowmeter Download PDF

Info

Publication number
USRE31570E
USRE31570E US06/346,422 US34642282A USRE31570E US RE31570 E USRE31570 E US RE31570E US 34642282 A US34642282 A US 34642282A US RE31570 E USRE31570 E US RE31570E
Authority
US
United States
Prior art keywords
flow
disk
conduit
opening
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US06/346,422
Inventor
Charles F. Drexel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMD Millipore Corp
Sanwa Business Credit Corp
Original Assignee
Tylan Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00349169A external-priority patent/US3851526A/en
Application filed by Tylan Corp filed Critical Tylan Corp
Priority to US06/346,422 priority Critical patent/USRE31570E/en
Application granted granted Critical
Publication of USRE31570E publication Critical patent/USRE31570E/en
Assigned to BANK OF AMERICA NATIONAL TRUST AND SAVINGS ASSOCIATION reassignment BANK OF AMERICA NATIONAL TRUST AND SAVINGS ASSOCIATION SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TYLAN CORPORATION
Assigned to BANK OF AMERICA NATIONAL TRUST AND SAVINGS ASSOCIATION reassignment BANK OF AMERICA NATIONAL TRUST AND SAVINGS ASSOCIATION SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TYLAN CORPORATION
Assigned to SANWA BUSINESS CREDIT CORPORATION, A DE CORP. reassignment SANWA BUSINESS CREDIT CORPORATION, A DE CORP. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: TYLAN CORPORATION, A CA CORP.
Anticipated expiration legal-status Critical
Assigned to TYLAN GENERAL TCA CORP. reassignment TYLAN GENERAL TCA CORP. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: TYLAN CORPORATION
Assigned to TYLAN GENERAL, INC. reassignment TYLAN GENERAL, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TYLAN GENERAL TCA CORP.
Assigned to TYLAN GENERAL, INC., A DELAWARE CORPORATION reassignment TYLAN GENERAL, INC., A DELAWARE CORPORATION MERGER (SEE DOCUMENT FOR DETAILS). Assignors: TYLAN GENERAL, INC., A MASSACHUSETTS CORP.
Assigned to MILLIPORE CORPORATION, A MASSACHUSETTS reassignment MILLIPORE CORPORATION, A MASSACHUSETTS MERGER (SEE DOCUMENT FOR DETAILS). Assignors: TYLAN GENERAL, INC., A DELAWARE CORP.
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40Details of construction of the flow constriction devices
    • G01F1/42Orifices or nozzles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40Details of construction of the flow constriction devices

Definitions

  • the fields of art to which the invention pertains include the fields of pressure differential measuring and testing devices, flowmeters and conduit restrictors and flow elements.
  • the prior art has developed a variety of linear flowmeters in which a manometer or other device for measuring a pressure differential is connected across opposite sides of a flow restrictor.
  • the restrictor comprises one or more passageways proportioned so that under normal working conditions the resistance to flow through the resistor as a whole is substantially proportional to the rate of flow.
  • There are certain levels of inaccuracies inherent in such devices and methods have been developed to optimize the accuracy of results obtained. See for example Goldsmith U.S. Pat. No. 3,071,001 and Weichbrod U.S. Pat. No. 3,071,160.
  • the flow rate of a fluid is measured not by directly determining the pressure differential across a restrictor, but by measuring the actual flow of a small portion of fluid.
  • Such applications require that the flow of the fluid be divided into two or more paths with an exact ratio maintained between the individual path flow rates.
  • a very small percentage of the flow is diverted into a measuring section. This percentage may be as small as 1 part in 40,000 and the flow measuring section is typically a very thin tubular conduit which is much longer that its diameter so that laminar flow prevails throughout the conduit.
  • the flow rate is directly proportional to pressure drop and inversely proportional to viscosity.
  • the present invention provides simple and economical methods for assuring laminar flow in both the measuring section and bypass section of a flow splitter so that a constant and predetermined ratio is maintained across the entire range of flow rates to be measured.
  • the present construction overcomes the disadvantages referred to above and additionally provides a wide range of flow, as high as 1,000:1 or higher, obtained with facility and repeatable accuracy. This has been accomplished by using as a flow restrictor one or a juxtaposed plurality of disks, each having one or a plurality of channels formed from its perimeter to an opening through opposite sides of the disk. Fluid is directed to the perimeter of the disk or disks and is conveyed by the conduits to the opening.
  • the conduits have sufficiently large length to diameter ratios (or length to effective hydraulic radius, as defined hereinafter) to assure laminar flow of the fluid.
  • the flow restrictor comprises flat, smooth sided juxtaposed disks, formed with central, aligned openings.
  • the central opening in each disk communicates via one or more conduits radiating from the central opening to the perimeter of the disk.
  • the flow restrictor is combined with an elongate laminar flow conduit, serving as a measuring section, to form a substantially linear flowmeter.
  • a substantially linear flowmeter includes a housing having a fluid inlet and fluid outlet, the housing defining a fluid path between the inlet and outlet.
  • the flow restrictor is disposed in this fluid path in parallel circuit with the measuring section conduit.
  • Means are provided for measuring the rate of flow of fluid through the measuring section conduit, which means are known in the prior art and constitute no part of the present invention. The result is a compact structure of simple construction which demonstrates high accuracy in measurements over a substantial range of flow temperature and pressure conditions.
  • FIG. 1 is a schematic representation of the fluid flow paths in a flow divider
  • FIG 2 is a schematic illustration in cross-section of portions of a flowmeter incorporating a flow restrictor of this invention
  • FIG. 3 is an enlarged cross-sectional view of the flow restrictor portion of the flowmeter of FIG. 2;
  • FIG. 4 is a front elevational view of an exemplary flow restrictor disk used in the flow element of FIG. 3, taken on the line 4--4 of FIG. 3.
  • FIG. 5 is a cross-sectional view of the flow restrictor disk of FIG. 4, taken on line 5--5 of FIG. 4;
  • FIG. 6 is a cross-sectional view of the flow restrictor disk of FIG. 4, taken on line 6--6 of FIG. 4;
  • FIGS. 7-14 are front views of alternative flow restrictor disks.
  • FIG. 15 is a perspective view of another alternative flow restrictor disk.
  • FIGS. 2-6 The invention will first be described with respect to a particular type of restrictor or flow element disk as illustrated in FIGS. 2-6. Subsequently, alternative disk configurations will be described as illustrative in FIGS. 7-15. The invention will be described with respect to fluid flowing from left to right in FIGS. 1-3, but the devices described herein are as effective with a reverse fluid flow.
  • fluid paths A and B constitute the flow through a flowmeter from the inlet at P 1 to the outlet P 2 .
  • the line labeled PATH A represents fluid flow through the measuring section of the flowmeter and the line designated PATH B represents fluid flow through the bypass section of the flowmeter.
  • the pressure drop is the same across each path. It is desired to have the flow rate in PATH A divided by the flow rate in PATH B be a constant at all times.
  • PATH A is a tube of sufficient elongation to assure laminar flow.
  • PATH B must also assure laminar flow, otherwise the flow ratio would have an undesirable dependency upon temperature and pressure.
  • Flow through channel may be characterized by the nondimensional parameter known as the Reynold's number where
  • is the density of the fluid
  • v m is the mean velocity in the conduit
  • u is the fluid viscosity
  • m is the hydraulic radius defined as the conduit are a divided by the conduit perimeter.
  • the effective diameter of the conduit can be considered to be 4m.
  • the Reynold's number expresses the ratio of the inertia forces to the viscous forces in the fluid. For low values of R, the flow is laminar, while for high values of R, inertia forces predominate and the flow tends to be turbulent.
  • the Reynold's number transition generally occurs in the range of about 1,600 to about 2,800 Reynold's number.
  • the transition Reynold's number can be determined by noting the mean velocity at which fluid of known density and viscosity flows in a turbulent manner and applying the information to the formula set forth above.
  • the following embodiments illustrate a number of specific structures to accomplish laminar flow in the bypass section, PATH B, in combination with laminar flow in the measuring section, PATH A.
  • Each of these embodiments provide a flow restrictor in the fluid path through the bypass section, PATH B, defined radially inward (or outward) flow through conduits having length to effective diameter ratios sufficiently large to assure laminar fluid flow.
  • the fluid being measured is gaseous, but the structure and concepts are applicable to liquids as well.
  • the flowmeter includes a housing 12 bored and counterbored to define a passageway 14 formed with inlet and outlet ports 16 and 18, respectively, for the fluid whose flow is to be measured.
  • a reduced diameter portion 20 defines an annular shoulder 22 for receiving a flow restrictor 24 and an upstream flow directing hollow cylindrical nut 25.
  • the flow restrictor 24 includes one or a plurality of channeled disks 27 which will be described hereinafter in more detail.
  • a passageway region 26 is threaded and received the flow restrictor 24 and the matingly threaded cyindrical nut 25.
  • the cylindrical nut 25 is formed with notches 30 across its far end so as to be readily threaded into the passageway 14 against flow restrictor 24 to secure the flow restrictor 24 in abutment with the shoulder 22.
  • An expanded diameter passageway region 32 defines a shoulder 34 spaced from the end of the cylindrical nut 25 for receiving a filter screen 36.
  • the passageway region 32 is threaded and receives a matingly threaded cylindrical securing member 38 for abutment against the filter screen 36, securing the screen 36 in place.
  • Upstream and downstream taps in the form of bore holes 40 and 42, respectively, in the housing, are provided for disposing respective attachment ends 44 and 46 of a measuring section tube 48 on opposite sides of the combination of flow directing nut 25 and flow restrictor 24.
  • the attachment ends 44 and 46 are tubular members through which the ends of the measuring section tube 48 are tightly secured, so that fluid flowing into the attachment ends 44 and 46 is conducted entirely through the measuring section tube 48.
  • the measuring section tube is very thin and elongate; in this exemplary embodiment the tube 48 has an inside diameter of 0.010 inch and a length of 3.1 inches.
  • Thermal elements 50 and 52 on the outside of the tube detect the mass flow rates of fluid passing through the tube 48. The method by which this is accomplished is known to the art and per se does not constitute a part of this invention.
  • the flow restrictor 24 consists of a plurality of juxtaposed channeled disks 27 stacked together to create a desired pressure drop and flow rate. This particular illustration incorporates seven disks each with flat parallel surfaces and 0.005 inch in width. There can be as few as 1 disk 27 or as many as 20 or more, depending upon the desired pressure drop and capacity of the housing 12.
  • each of the disks 27 is formed flat, as a washer, with a central opening 54 through the opposite parallel surfaces.
  • four conduits or channels 56 are formed through the front surface 58 of the disk radiating from the central opening 54 outwardly to the perimeter 60 of the disk.
  • the channels 56 serve to conduct fluid from the periphery of the disk 27 to the opening 54.
  • each disk should be flat and its surfaces smooth and free from burrs or unevenness that would interfere with fluid flow in the channels 56 or cause the disks 27 to be separated. Sufficient smoothness can be achieved with chemical etching.
  • the diameter of the disk 27 is 0.480 inch
  • the diameter of the central opening is 0.270 inch
  • the length of the channel is 0.105 inch.
  • the channel 56 is rectangular in cross-section and has height and width dimensions of 0.0025 inch and 0.0085 inch, respectively.
  • the cross-sectional area of each channel 56 is 0.000021.
  • the effective hydraulic radius of the channel can be calculated as the radius of a circle having an equivalent cross-sectional area; in this case the effective hydraulic radius is 0.0026 inch. Accordingly, each channel has a length to effective hydraulic radius of about 40:1.
  • the ratio of length to effective hydraulic radius should be at least 4:1 and can be as high as 200:1 or higher.
  • the mesh filter 36 located upstream of the flow element 24 passes 5 micron particles. In view of the much larger channel diameter, the flow element 24 is protected from clogging from contaminants in the fluid stream.
  • the cylindrical nut 25 operates in conjunction with the flow restrictor 27 to direct fluid through the conduits 56 radially inwardly to the central opening 54.
  • the nut 25 is hollow and open at its upstream end 62 and closed at its downstream end by an end wall 64.
  • the annular side wall 66 of the nut defines a plurality of openings 68 adjacent the end wall 64. In this embodiment four such openings are formed, each 0.093 inch in diameter.
  • three elongate cylindrical pins 70 each threaded at its end are disposed in threaded openings therefor in the downstream surface of the end wall 64. The pins jut from the end wall 64 a distance sufficient to carry the disks 27 for alignment thereof.
  • the desired number of disks 27 are merely stacked on the pins 70 to define the flow element 24.
  • the nut 66 is then threaded into the passageway region 26 so that the flow element 24 abuts the shoulder 34 and the nut end wall 64 abuts the flow element 24 and presses the component disks 27 together. No seals are required since the components can be tightly assembled.
  • the remainder of the flowmeter is assembled as known to the art and flowmeter electronics are assembled in the housing as known to the prior art, and which are not per se a part of the invention herein.
  • fluid is fed into the inlet 16 whereupon it is filtered by the filter screen 36 and travels into the hollow nut 25, through the holes 68 to the perimeters of the stacked disks 27, radially through the conduits 56, to and through the alinged disk openings 54 and emerging from the outlet 18.
  • a portion of the fluid stream is diverted through the measuring section tube 48, flowing therethrough to meet the emerging fluid at the outlet 18.
  • flow through both the measuring section tube 48 and flow element 24 are laminar, yielding accurate measurements over a substantial range of flow, temperature and pressure conditions.
  • each disk 27 has sufficient thickness to retain dimensional integrity when squeezed by the nut 25. Because of the flatness of the disks 27, the flow meter is not significantly affected by variations in compressive force caused by tightening of the nut 27. Installation of the flow directing components is simple and requires no calibration adjustments for predetermined combinations of disks. Importantly, the present construction permits channels of substantial length allowing substantial cross-section for high length:hydraulic radius ratios. Accordingly, relatively large size particles can pass through the system without plugging the flow restrictor. Furthermore, the entire assembly can be formed of metal, without requiring seals, allowing use of the flow restrictor with otherwise corrosive fluids.
  • the particular structure of the disks 27 can be varied in number and in configuration to accomodate various flow ranges. Disks having 1-60 or more channels can be used, as well as disks having non-linear channel shapes such as will be described below, in any combination of from 1-40 disks or more to achieve any particular flow range.
  • the desired arrangement can be obtained with simple experimentation or by calculations using the Reynold's number equation given above. Thus, it has been found that a flow range of 5 to 5,000 standard cubic centimeters per minute could be achieved by stacking 1-20 disks comprising one to three differently configurated disks having one, 10 and 50 channels.
  • the diameter of the disk opening 54 and the diameter of the disk itself can be varied to suit particular needs.
  • FIGS. 7-15 a variety of disk configurations are shown.
  • a disk 77 is shown having a central opening 74 and a single channel 76 linearly formed in one surface from the opening 74 to the perimeter of the disk 77.
  • a disk 87 is shown having a central opening 84 and 10 channels 86 radiating from the opening 84 to the disk perimeter.
  • a disk 97 is shown having a central opening 94 and 50 radiating channels 96.
  • a disk 107 is shown having a central opening 104 and four curved channels 106 extending from the opening 104 to the disk perimeter in pinwheel fashion.
  • a disk 117 is shown having a central opening 114 and a single spirally formed channel 116 connecting the opening 114 to the disk perimeter.
  • a disk 127 is shown having a central opening 124 and a series of maze-like concentric channels 126 therearound connected by short channels 125 to provide communication between the opening 124 and disk perimeter.
  • a disk 137 is shown having a central opening 134 and a plurality of circular channels 136 annularly disposed about the opening 134, connected to the opening 134 and disk perimeter by short channels 135.
  • a disk 147 is shown having a central opening 144 and a plurality of diamond-shaped channels 146 annularly disposed about the opening 144, connected to the opening 144 and disk perimeter by short channels 145.
  • a disk 157 is shown having a central opening 154 and a plurality of channels 156 in the form of elongate conduits drilled through the body of the disk 157 from the perimeter 159 to the opening 154.
  • each of the disks illustrated in FIGS. 7-15 can be substituted for one or more disks in the embodiment illustrated in FIG. 3.
  • Other variations are also permissable; for example the opening in each disk can be off-center and means; such as a jig or appropriately spaced alignment pins on the nut 25 can be provided for alignment.

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)

Abstract

A flowmeter in which a laminar flow conduit is connected in parallel to a flow restrictor comprising at least one disk having an opening through opposite surfaces and at least one conduit from the opening to the perimeter of the disk, each conduit having an effective length to diameter ratio sufficient to assure laminar fluid flow.

Description

FIELD OF THE INVENTION
The fields of art to which the invention pertains include the fields of pressure differential measuring and testing devices, flowmeters and conduit restrictors and flow elements.
BACKGROUND AND SUMMARY OF THE INVENTION
The prior art has developed a variety of linear flowmeters in which a manometer or other device for measuring a pressure differential is connected across opposite sides of a flow restrictor. The restrictor comprises one or more passageways proportioned so that under normal working conditions the resistance to flow through the resistor as a whole is substantially proportional to the rate of flow. There are certain levels of inaccuracies inherent in such devices and methods have been developed to optimize the accuracy of results obtained. See for example Goldsmith U.S. Pat. No. 3,071,001 and Weichbrod U.S. Pat. No. 3,071,160. See also application Ser. No. 141,897, now U.S. Pat. No. 3,792,609 entitled Flow Splitter by R. F. Blair, R. J. Hill and D. B. Le May of common assignment to the present application.
In certain applications the flow rate of a fluid is measured not by directly determining the pressure differential across a restrictor, but by measuring the actual flow of a small portion of fluid. Such applications require that the flow of the fluid be divided into two or more paths with an exact ratio maintained between the individual path flow rates. In a typical situation, such as in a mass flowmeter, a very small percentage of the flow is diverted into a measuring section. This percentage may be as small as 1 part in 40,000 and the flow measuring section is typically a very thin tubular conduit which is much longer that its diameter so that laminar flow prevails throughout the conduit. During laminar flow of a fluid, the flow rate is directly proportional to pressure drop and inversely proportional to viscosity. In contrast, during turbulent flow, the flow rate is proportional to the square root of pressure drop and largely independent of viscosity. Therefore, in the design of a flowmeter in which the flow is split along parallel paths, it is important to provide conditions that will assure laminar flow in each path. Since the measuring section flow is laminar, if the bypass flow were turbulent the flow ratio would be a function of viscosity and would have an undesirable dependency upon temperature and pressure. Such flow splitters are thus much more prone to inaccuracies as a result of geometric configuration than are pressure differential devices.
In the above-mentioned application Ser. No. 141,897 a number of devices are disclosed incorporating a plurality of closely spaced fluid passageways, e.g., defined by a plurality of screens, each passageway defining a laminar flow path. Generally, improvements over prior devices is thus obtained, but the pressure drop is influenced by the compressive force used to assemble the device and by variations in screen mesh. The effective diameters are quite small, which can result in trapping of contaminants and resulting plugging.
The present invention provides simple and economical methods for assuring laminar flow in both the measuring section and bypass section of a flow splitter so that a constant and predetermined ratio is maintained across the entire range of flow rates to be measured. The present construction overcomes the disadvantages referred to above and additionally provides a wide range of flow, as high as 1,000:1 or higher, obtained with facility and repeatable accuracy. This has been accomplished by using as a flow restrictor one or a juxtaposed plurality of disks, each having one or a plurality of channels formed from its perimeter to an opening through opposite sides of the disk. Fluid is directed to the perimeter of the disk or disks and is conveyed by the conduits to the opening. The conduits have sufficiently large length to diameter ratios (or length to effective hydraulic radius, as defined hereinafter) to assure laminar flow of the fluid. In an exemplary embodiment, the flow restrictor comprises flat, smooth sided juxtaposed disks, formed with central, aligned openings. The central opening in each disk communicates via one or more conduits radiating from the central opening to the perimeter of the disk.
By juxtaposing a predetermined number of disks having a predetermined number and shape of conduit, one can achieve any flow ratio desired. There is only one flow path, radially inward (or outward if flow is reversed); therefore, the passage size can be precisely controlled. Furthermore, the conduits have sufficient diamter so that plugging by contaminants can be avoided. The entire construction can be made of metal and can be tightly assembled so that seals are not required, enabling its use with otherwise corrosive fluids.
The flow restrictor is combined with an elongate laminar flow conduit, serving as a measuring section, to form a substantially linear flowmeter. Such a meter includes a housing having a fluid inlet and fluid outlet, the housing defining a fluid path between the inlet and outlet. The flow restrictor is disposed in this fluid path in parallel circuit with the measuring section conduit. Means are provided for measuring the rate of flow of fluid through the measuring section conduit, which means are known in the prior art and constitute no part of the present invention. The result is a compact structure of simple construction which demonstrates high accuracy in measurements over a substantial range of flow temperature and pressure conditions.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a schematic representation of the fluid flow paths in a flow divider;
FIG 2 is a schematic illustration in cross-section of portions of a flowmeter incorporating a flow restrictor of this invention;
FIG. 3 is an enlarged cross-sectional view of the flow restrictor portion of the flowmeter of FIG. 2;
FIG. 4 is a front elevational view of an exemplary flow restrictor disk used in the flow element of FIG. 3, taken on the line 4--4 of FIG. 3.
FIG. 5 is a cross-sectional view of the flow restrictor disk of FIG. 4, taken on line 5--5 of FIG. 4;
FIG. 6 is a cross-sectional view of the flow restrictor disk of FIG. 4, taken on line 6--6 of FIG. 4;
FIGS. 7-14 are front views of alternative flow restrictor disks; and
FIG. 15 is a perspective view of another alternative flow restrictor disk.
DETAILED DESCRIPTION
As required, details of illustrative embodiments of the invention are disclosed. However, it is to be understood that these embodiments merely exemplify the invention which may take forms different from the specific illustrative embodiments disclosed. Therefore, specific structural and functional details are not necessarily to be interpreted as limiting, but as a basis for the claims.
The invention will first be described with respect to a particular type of restrictor or flow element disk as illustrated in FIGS. 2-6. Subsequently, alternative disk configurations will be described as illustrative in FIGS. 7-15. The invention will be described with respect to fluid flowing from left to right in FIGS. 1-3, but the devices described herein are as effective with a reverse fluid flow.
Referring to FIG. 1, fluid paths A and B constitute the flow through a flowmeter from the inlet at P1 to the outlet P2. The line labeled PATH A represents fluid flow through the measuring section of the flowmeter and the line designated PATH B represents fluid flow through the bypass section of the flowmeter. The pressure drop is the same across each path. It is desired to have the flow rate in PATH A divided by the flow rate in PATH B be a constant at all times. In the particular embodiments illustrated herein, PATH A is a tube of sufficient elongation to assure laminar flow. PATH B must also assure laminar flow, otherwise the flow ratio would have an undesirable dependency upon temperature and pressure.
Flow through channel may be characterized by the nondimensional parameter known as the Reynold's number where
R=4mφv.sub.m /u
where φ is the density of the fluid, vm is the mean velocity in the conduit, u is the fluid viscosity and m is the hydraulic radius defined as the conduit are a divided by the conduit perimeter. The effective diameter of the conduit can be considered to be 4m. The Reynold's number expresses the ratio of the inertia forces to the viscous forces in the fluid. For low values of R, the flow is laminar, while for high values of R, inertia forces predominate and the flow tends to be turbulent. The Reynold's number transition generally occurs in the range of about 1,600 to about 2,800 Reynold's number. For any particular structure, the transition Reynold's number can be determined by noting the mean velocity at which fluid of known density and viscosity flows in a turbulent manner and applying the information to the formula set forth above. The following embodiments illustrate a number of specific structures to accomplish laminar flow in the bypass section, PATH B, in combination with laminar flow in the measuring section, PATH A. Each of these embodiments provide a flow restrictor in the fluid path through the bypass section, PATH B, defined radially inward (or outward) flow through conduits having length to effective diameter ratios sufficiently large to assure laminar fluid flow. In each of the embodiments, the fluid being measured is gaseous, but the structure and concepts are applicable to liquids as well.
Referring now to FIGS. 2 and 3, a flowmeter 10 is illustrated incorporating a flow splitter in accordance with this invention. The flowmeter includes a housing 12 bored and counterbored to define a passageway 14 formed with inlet and outlet ports 16 and 18, respectively, for the fluid whose flow is to be measured. A reduced diameter portion 20 defines an annular shoulder 22 for receiving a flow restrictor 24 and an upstream flow directing hollow cylindrical nut 25. The flow restrictor 24 includes one or a plurality of channeled disks 27 which will be described hereinafter in more detail. A passageway region 26 is threaded and received the flow restrictor 24 and the matingly threaded cyindrical nut 25. The cylindrical nut 25 is formed with notches 30 across its far end so as to be readily threaded into the passageway 14 against flow restrictor 24 to secure the flow restrictor 24 in abutment with the shoulder 22. An expanded diameter passageway region 32 defines a shoulder 34 spaced from the end of the cylindrical nut 25 for receiving a filter screen 36. The passageway region 32 is threaded and receives a matingly threaded cylindrical securing member 38 for abutment against the filter screen 36, securing the screen 36 in place.
Upstream and downstream taps, in the form of bore holes 40 and 42, respectively, in the housing, are provided for disposing respective attachment ends 44 and 46 of a measuring section tube 48 on opposite sides of the combination of flow directing nut 25 and flow restrictor 24. The attachment ends 44 and 46 are tubular members through which the ends of the measuring section tube 48 are tightly secured, so that fluid flowing into the attachment ends 44 and 46 is conducted entirely through the measuring section tube 48. The measuring section tube is very thin and elongate; in this exemplary embodiment the tube 48 has an inside diameter of 0.010 inch and a length of 3.1 inches. Thermal elements 50 and 52 on the outside of the tube detect the mass flow rates of fluid passing through the tube 48. The method by which this is accomplished is known to the art and per se does not constitute a part of this invention.
The flow restrictor 24 consists of a plurality of juxtaposed channeled disks 27 stacked together to create a desired pressure drop and flow rate. This particular illustration incorporates seven disks each with flat parallel surfaces and 0.005 inch in width. There can be as few as 1 disk 27 or as many as 20 or more, depending upon the desired pressure drop and capacity of the housing 12.
Referring to FIGS. 4, 5 and 6, in this particular embodiment each of the disks 27 is formed flat, as a washer, with a central opening 54 through the opposite parallel surfaces. In the illustration, four conduits or channels 56 are formed through the front surface 58 of the disk radiating from the central opening 54 outwardly to the perimeter 60 of the disk. The channels 56 serve to conduct fluid from the periphery of the disk 27 to the opening 54.
Each disk should be flat and its surfaces smooth and free from burrs or unevenness that would interfere with fluid flow in the channels 56 or cause the disks 27 to be separated. Sufficient smoothness can be achieved with chemical etching. In this particular embodiment the diameter of the disk 27 is 0.480 inch, the diameter of the central opening is 0.270 inch and the length of the channel is 0.105 inch. The channel 56 is rectangular in cross-section and has height and width dimensions of 0.0025 inch and 0.0085 inch, respectively. Thus, the cross-sectional area of each channel 56 is 0.000021. The effective hydraulic radius of the channel can be calculated as the radius of a circle having an equivalent cross-sectional area; in this case the effective hydraulic radius is 0.0026 inch. Accordingly, each channel has a length to effective hydraulic radius of about 40:1. Generally, the ratio of length to effective hydraulic radius should be at least 4:1 and can be as high as 200:1 or higher. The mesh filter 36 located upstream of the flow element 24 passes 5 micron particles. In view of the much larger channel diameter, the flow element 24 is protected from clogging from contaminants in the fluid stream.
Referring back to FIG. 3, the cylindrical nut 25 operates in conjunction with the flow restrictor 27 to direct fluid through the conduits 56 radially inwardly to the central opening 54. For this purpose, the nut 25 is hollow and open at its upstream end 62 and closed at its downstream end by an end wall 64. The annular side wall 66 of the nut defines a plurality of openings 68 adjacent the end wall 64. In this embodiment four such openings are formed, each 0.093 inch in diameter. Additionally, for purposes of aligning the disks 27, three elongate cylindrical pins 70, each threaded at its end are disposed in threaded openings therefor in the downstream surface of the end wall 64. The pins jut from the end wall 64 a distance sufficient to carry the disks 27 for alignment thereof.
In assembly, the desired number of disks 27 are merely stacked on the pins 70 to define the flow element 24. The nut 66 is then threaded into the passageway region 26 so that the flow element 24 abuts the shoulder 34 and the nut end wall 64 abuts the flow element 24 and presses the component disks 27 together. No seals are required since the components can be tightly assembled. In place of the pins 70, one can provide nibs on the perimeter of the disks 27. Alternatively, one can use a jig protruding through the outlet port 18 to align the disks prior to tightening. The remainder of the flowmeter is assembled as known to the art and flowmeter electronics are assembled in the housing as known to the prior art, and which are not per se a part of the invention herein.
In operation, fluid is fed into the inlet 16 whereupon it is filtered by the filter screen 36 and travels into the hollow nut 25, through the holes 68 to the perimeters of the stacked disks 27, radially through the conduits 56, to and through the alinged disk openings 54 and emerging from the outlet 18. A portion of the fluid stream is diverted through the measuring section tube 48, flowing therethrough to meet the emerging fluid at the outlet 18. As a result of the present configuration, flow through both the measuring section tube 48 and flow element 24 are laminar, yielding accurate measurements over a substantial range of flow, temperature and pressure conditions.
The foregoing assembly provides only one flow path for PATH B referred to in FIG. 1, radially inwardly, or outward for reverse operation. Importantly, each disk 27 has sufficient thickness to retain dimensional integrity when squeezed by the nut 25. Because of the flatness of the disks 27, the flow meter is not significantly affected by variations in compressive force caused by tightening of the nut 27. Installation of the flow directing components is simple and requires no calibration adjustments for predetermined combinations of disks. Importantly, the present construction permits channels of substantial length allowing substantial cross-section for high length:hydraulic radius ratios. Accordingly, relatively large size particles can pass through the system without plugging the flow restrictor. Furthermore, the entire assembly can be formed of metal, without requiring seals, allowing use of the flow restrictor with otherwise corrosive fluids.
The particular structure of the disks 27 can be varied in number and in configuration to accomodate various flow ranges. Disks having 1-60 or more channels can be used, as well as disks having non-linear channel shapes such as will be described below, in any combination of from 1-40 disks or more to achieve any particular flow range. The desired arrangement can be obtained with simple experimentation or by calculations using the Reynold's number equation given above. Thus, it has been found that a flow range of 5 to 5,000 standard cubic centimeters per minute could be achieved by stacking 1-20 disks comprising one to three differently configurated disks having one, 10 and 50 channels. The diameter of the disk opening 54 and the diameter of the disk itself can be varied to suit particular needs.
Referring to FIGS. 7-15, a variety of disk configurations are shown. In FIG. 7, a disk 77 is shown having a central opening 74 and a single channel 76 linearly formed in one surface from the opening 74 to the perimeter of the disk 77. In FIG. 8, a disk 87 is shown having a central opening 84 and 10 channels 86 radiating from the opening 84 to the disk perimeter. In FIG. 9, a disk 97 is shown having a central opening 94 and 50 radiating channels 96.
In FIG. 10, a disk 107 is shown having a central opening 104 and four curved channels 106 extending from the opening 104 to the disk perimeter in pinwheel fashion.
In FIG. 11, a disk 117 is shown having a central opening 114 and a single spirally formed channel 116 connecting the opening 114 to the disk perimeter.
In FIG. 12, a disk 127 is shown having a central opening 124 and a series of maze-like concentric channels 126 therearound connected by short channels 125 to provide communication between the opening 124 and disk perimeter.
In FIG. 13, a disk 137 is shown having a central opening 134 and a plurality of circular channels 136 annularly disposed about the opening 134, connected to the opening 134 and disk perimeter by short channels 135.
In FIG. 14 a disk 147 is shown having a central opening 144 and a plurality of diamond-shaped channels 146 annularly disposed about the opening 144, connected to the opening 144 and disk perimeter by short channels 145.
In FIG. 15, a disk 157 is shown having a central opening 154 and a plurality of channels 156 in the form of elongate conduits drilled through the body of the disk 157 from the perimeter 159 to the opening 154.
Each of the disks illustrated in FIGS. 7-15 can be substituted for one or more disks in the embodiment illustrated in FIG. 3. Other variations are also permissable; for example the opening in each disk can be off-center and means; such as a jig or appropriately spaced alignment pins on the nut 25 can be provided for alignment.

Claims (10)

I claim:
1. A flowmeter comprising:
a housing having a fluid inlet and a fluid outlet defining a first fluid path therebetween .Iadd.and aligned along a first direction.Iaddend.;
a flow restrictor in said first fluid path comprising at least one disk having a front surface and a rear surface connected by a perimeter surface, an opening through said front and rear surfaces and at least one conduit through said perimeter surface to said opening, said conduit being of a length to diameter ratio to provide laminar flow;
means for supporting said restrictor in said first fluid path whereby the flow therethrough is directed radially in either direction.Iadd., normal to said first direction, .Iaddend.between the perimeter and the opening of said at least one disk;
an elongate conduit defining a laminar flow second fluid path;
means for measuring the rate of flow of fluid through said elongate conduit; and
means for connecting said second fluid path in parallel with said first fluid path on opposite flow sides of said flow element.Iadd.; said housing being constructed to as to redirect said radially directed flow to flow parallel to said first direction.Iaddend..
2. The flowmeter of claim 1 in which said conduit is defined as a channel through the front surface of said disk.
3. The flowmeter of claim 1 in which said conduit comprises an elongate passageway having an effective length substantially larger than the effective hydraulic radius thereof.
4. The flowmeter of claim 1 in which the ratio of the length of said passageway to the effective hydraulic radius thereof is at least 1.5:1.
5. The flowmeter of claim 1 in which said opening is centrally formed through said disk and said conduit radiates linearly therefrom to said perimeter surface.
6. The flowmeter of claim 1 in which said disk is formed flat with substantially even front and rear surfaces exclusive of said conduit.
7. The flowmeter of claim 1 in which said flow element comprises a plurality of juxtaposed disks, including said one disk, each disk having a front surface and a rear surface connected by a perimeter surface, each disk having an opening through said front and rear surfaces and at least one conduit through said perimeter surface to said opening, the opening of said plurality of disks being aligned.
8. .[.The flowmeter of claim 7 in which .]. .Iadd.A flow meter comprising:
a housing having a fluid inlet and a fluid outlet defining a first fluid path therebetween;
a flow restrictor in said first fluid path comprising a plurality of juxtaposed disks, including said one disk, each disk having a front surface and a rear surface connected by a perimeter surface, each disk having an opening through said front and rear surfaces and at least one conduit through said perimeter surface to said opening, said conduit being of a length to diameter ratio to provide laminar flow, .Iaddend.the number of conduits carried by one of said plurality of disks .[.is.]. .Iadd.being .Iaddend.different from the number of conduits carried by another of said plurality of disks.Iadd., the opening of said plurality of disks being aligned;
means for supporting said retrictor in said first fluid path whereby the flow therethrough is directed radially in either direction between the perimeter and the opening of said at least one disk;
an elongate conduit defining a laminar flow second fluid path;
means for measuring the rate of fluid through said elongate conduit; and
means for connecting said second fluid path and parallel with said first fluid path on opposite flow sides of said flow element. .Iaddend.
9. A flowmeter comprising:
a housing having a fluid inlet and a fluid outlet defining a first fluid path therebetween;
a flow restrictor in said first fluid path comprising at least one disk having a front surface and a rear surface connected by a perimeter surface, an opening through said front and rear surfaces and at least one conduit through said perimeter surface to said opening, said conduit being of a length to diameter ratio to provide laminar flow;
an elongate conduit defining a laminar flow second fluid path;
means for measuring the rate of flow of fluid through said elongate conduit; and
means for connecting said second fluid path in parallel with said first fluid path on opposite flow sides of said flow element;
said housing comprising a wall defining said fluid inlet, said wall being threaded, and including a retaining member in said inlet for securing said flow restrictor in said first fluid path, said retaining member being hollow and externally threaded to mate with said housing wall thread, said retaining member being open at one end and closed at its opposite end, said opposite end of said retaining member abutting said flow restrictor at one of said front and rear surfaces thereof, and means in said housing for retaining the opposite surface of said flow restrictor against movement, said retaining member being formed with at least one lateral opening therethrough, the effective outer diameter of said flow restrictor being smaller than the effective inner diameter of said inlet whereby fluid introduced into said retaining member flows through said lateral opening, through said conduit, into said disk opening and out thereof to define said .[.second.]. .Iadd.first .Iaddend.fluid path.
10. The flowmeter of claim 7 in which each said disk is formed with a plurality of said conduits.
US06/346,422 1973-04-09 1982-02-05 Fluid flowmeter Expired - Lifetime USRE31570E (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US06/346,422 USRE31570E (en) 1973-04-09 1982-02-05 Fluid flowmeter

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US00349169A US3851526A (en) 1973-04-09 1973-04-09 Fluid flowmeter
US06/346,422 USRE31570E (en) 1973-04-09 1982-02-05 Fluid flowmeter

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US00349169A Reissue US3851526A (en) 1973-04-09 1973-04-09 Fluid flowmeter

Publications (1)

Publication Number Publication Date
USRE31570E true USRE31570E (en) 1984-05-01

Family

ID=26994850

Family Applications (1)

Application Number Title Priority Date Filing Date
US06/346,422 Expired - Lifetime USRE31570E (en) 1973-04-09 1982-02-05 Fluid flowmeter

Country Status (1)

Country Link
US (1) USRE31570E (en)

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5253520A (en) * 1990-12-07 1993-10-19 Dxl International, Inc. Flow sensor connector
US6655207B1 (en) * 2000-02-16 2003-12-02 Honeywell International Inc. Flow rate module and integrated flow restrictor
US20050179748A1 (en) * 2002-10-25 2005-08-18 Craig Malik Techniques for improving pressure sensor shock robustness in fluid containment devices
US20060059985A1 (en) * 2002-11-18 2006-03-23 Yamatake Corporation Fluid detection device
US20070089788A1 (en) * 2005-07-08 2007-04-26 Chinnock Robert T Chemically inert flow controller with non-contaminating body
US20100300542A1 (en) * 2009-05-27 2010-12-02 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
US20110226053A1 (en) * 2010-03-22 2011-09-22 Honeywell International Inc. Flow sensor assembly with porous insert
EP2452110A1 (en) * 2009-05-27 2012-05-16 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
US8418549B2 (en) 2011-01-31 2013-04-16 Honeywell International Inc. Flow sensor assembly with integral bypass channel
US8485031B2 (en) 2010-03-22 2013-07-16 Honeywell International Inc. Sensor assembly with hydrophobic filter
US8656772B2 (en) 2010-03-22 2014-02-25 Honeywell International Inc. Flow sensor with pressure output signal
US8695417B2 (en) 2011-01-31 2014-04-15 Honeywell International Inc. Flow sensor with enhanced flow range capability
US8756990B2 (en) 2010-04-09 2014-06-24 Honeywell International Inc. Molded flow restrictor
US9003877B2 (en) 2010-06-15 2015-04-14 Honeywell International Inc. Flow sensor assembly
US9052217B2 (en) 2012-11-09 2015-06-09 Honeywell International Inc. Variable scale sensor
US20170038237A1 (en) * 2014-12-05 2017-02-09 General Electric Company System and method for fluid metering
US9952079B2 (en) 2015-07-15 2018-04-24 Honeywell International Inc. Flow sensor
US20180340643A1 (en) * 2017-05-25 2018-11-29 Fisher Controls International Llc Method of Manufacturing a Fluid Pressure Reduction Device
US10941878B2 (en) 2013-03-15 2021-03-09 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
US11506305B2 (en) 2017-05-25 2022-11-22 Fisher Controls International Llc Method of manufacturing a fluid pressure reduction device

Citations (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US76166A (en) * 1868-03-31 Joseph cordnan
US163929A (en) * 1875-06-01 Improvement in gas-burners
US1140548A (en) * 1914-06-08 1915-05-25 John B Vogelsang Device for combining and emulsifying substances.
US1142674A (en) * 1915-02-27 1915-06-08 William A Gilchrist Fuel-atomizer for internal-combustion engines.
US1178891A (en) * 1915-07-08 1916-04-11 Herman Walther Fuel-mixer.
US1559547A (en) * 1920-03-25 1925-11-03 Francis H Brown Pressure-responsive device
GB251194A (en) * 1925-11-23 1926-04-29 Wilhelm Schurz Improvements in or relating to measuring the flow of liquid or gaseous media
US1687780A (en) * 1926-05-01 1928-10-16 Gen Motors Corp Porous-metal plug for valve lubrication
US1701805A (en) * 1927-02-11 1929-02-12 Irwin L Dunn Explosion arrester
US1814235A (en) * 1928-12-10 1931-07-14 Wired Radio Inc Fluid flow indicator
US1816390A (en) * 1926-12-07 1931-07-28 Mobus Wilhelm Nebulizing and antibackfiring device for internal combustion engines
US1870849A (en) * 1928-06-09 1932-08-09 Hodgson John Lawrence Flow quantity meter
US1883813A (en) * 1923-10-08 1932-10-18 Morrison Montford Manometer
US2132011A (en) * 1936-07-17 1938-10-04 Budwig Mfg Company Beverage dispensing apparatus
US2163730A (en) * 1935-03-29 1939-06-27 Goetzl Manlio Integrating calorimeter
GB520083A (en) * 1938-10-08 1940-04-15 Kent Ltd G A device for reducing disturbance in fluid flows
US2515394A (en) * 1946-02-28 1950-07-18 Clarkson Alick Pressure gauge stabilizer
US2604958A (en) * 1944-09-15 1952-07-29 Karl J G Leufvenius Lubrication fitting
US2661768A (en) * 1949-10-29 1953-12-08 Standard Oil Dev Co Indicating orifice plate for threaded orifice union
US2687645A (en) * 1950-03-02 1954-08-31 Askania Regulator Co Differential pressure flow rate measurement device
US2760371A (en) * 1953-05-29 1956-08-28 B I F Ind Inc Multiple venturi tube
US2815923A (en) * 1952-07-23 1957-12-10 Gen Electric Valve with automatic rate-of-flow control
US2887129A (en) * 1956-01-10 1959-05-19 Hughes Aircraft Co Liquid metering device
US2893432A (en) * 1953-12-31 1959-07-07 Dole Valve Co Fluid flow control
US2927462A (en) * 1955-10-28 1960-03-08 Yao T Li Orifice type flowmeter
US2929248A (en) * 1957-11-13 1960-03-22 Bailey Meter Co Flow meter
US3027746A (en) * 1959-11-16 1962-04-03 Kappel Corp Flow control device
US3071160A (en) * 1959-07-01 1963-01-01 Nat Instr Lab Inc Fluid restrictor for linear flow meters
US3071001A (en) * 1960-02-16 1963-01-01 Nat Instr Lab Inc Linear flow meter
US3129587A (en) * 1960-10-11 1964-04-21 Honeywell Regulator Co Flow sensing device
US3330156A (en) * 1965-09-08 1967-07-11 Jesse W Thomas Fluid flowmeters
US3349619A (en) * 1959-07-29 1967-10-31 Meriam Instr Company Laminar flow element and flow meter
US3433068A (en) * 1964-11-12 1969-03-18 Rosemount Eng Co Ltd Thermal mass flow sensor
US3514074A (en) * 1968-05-06 1970-05-26 Richard E Self High energy loss fluid control
US3559482A (en) * 1968-11-27 1971-02-02 Teledyne Inc Fluid flow measuring apparatus
US3613448A (en) * 1969-11-26 1971-10-19 Teledyne Inc Fluid flow measuring apparatus
US3688800A (en) * 1970-11-27 1972-09-05 Sanders Associates Inc Fluid flow restrictor
US3722854A (en) * 1971-12-01 1973-03-27 Grove Valve & Regulator Co Valve with perforated ribbon silencing element
US3792609A (en) * 1971-05-10 1974-02-19 Tylan Corp Flow splitter
US3805610A (en) * 1972-06-23 1974-04-23 Emerson Electric Co Flow dividing means, particularly for thermal flowmeter

Patent Citations (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US163929A (en) * 1875-06-01 Improvement in gas-burners
US76166A (en) * 1868-03-31 Joseph cordnan
US1140548A (en) * 1914-06-08 1915-05-25 John B Vogelsang Device for combining and emulsifying substances.
US1142674A (en) * 1915-02-27 1915-06-08 William A Gilchrist Fuel-atomizer for internal-combustion engines.
US1178891A (en) * 1915-07-08 1916-04-11 Herman Walther Fuel-mixer.
US1559547A (en) * 1920-03-25 1925-11-03 Francis H Brown Pressure-responsive device
US1883813A (en) * 1923-10-08 1932-10-18 Morrison Montford Manometer
GB251194A (en) * 1925-11-23 1926-04-29 Wilhelm Schurz Improvements in or relating to measuring the flow of liquid or gaseous media
US1687780A (en) * 1926-05-01 1928-10-16 Gen Motors Corp Porous-metal plug for valve lubrication
US1816390A (en) * 1926-12-07 1931-07-28 Mobus Wilhelm Nebulizing and antibackfiring device for internal combustion engines
US1701805A (en) * 1927-02-11 1929-02-12 Irwin L Dunn Explosion arrester
US1870849A (en) * 1928-06-09 1932-08-09 Hodgson John Lawrence Flow quantity meter
US1814235A (en) * 1928-12-10 1931-07-14 Wired Radio Inc Fluid flow indicator
US2163730A (en) * 1935-03-29 1939-06-27 Goetzl Manlio Integrating calorimeter
US2132011A (en) * 1936-07-17 1938-10-04 Budwig Mfg Company Beverage dispensing apparatus
GB520083A (en) * 1938-10-08 1940-04-15 Kent Ltd G A device for reducing disturbance in fluid flows
US2604958A (en) * 1944-09-15 1952-07-29 Karl J G Leufvenius Lubrication fitting
US2515394A (en) * 1946-02-28 1950-07-18 Clarkson Alick Pressure gauge stabilizer
US2661768A (en) * 1949-10-29 1953-12-08 Standard Oil Dev Co Indicating orifice plate for threaded orifice union
US2687645A (en) * 1950-03-02 1954-08-31 Askania Regulator Co Differential pressure flow rate measurement device
US2815923A (en) * 1952-07-23 1957-12-10 Gen Electric Valve with automatic rate-of-flow control
US2760371A (en) * 1953-05-29 1956-08-28 B I F Ind Inc Multiple venturi tube
US2893432A (en) * 1953-12-31 1959-07-07 Dole Valve Co Fluid flow control
US2927462A (en) * 1955-10-28 1960-03-08 Yao T Li Orifice type flowmeter
US2887129A (en) * 1956-01-10 1959-05-19 Hughes Aircraft Co Liquid metering device
US2929248A (en) * 1957-11-13 1960-03-22 Bailey Meter Co Flow meter
US3071160A (en) * 1959-07-01 1963-01-01 Nat Instr Lab Inc Fluid restrictor for linear flow meters
US3349619A (en) * 1959-07-29 1967-10-31 Meriam Instr Company Laminar flow element and flow meter
US3027746A (en) * 1959-11-16 1962-04-03 Kappel Corp Flow control device
US3071001A (en) * 1960-02-16 1963-01-01 Nat Instr Lab Inc Linear flow meter
US3129587A (en) * 1960-10-11 1964-04-21 Honeywell Regulator Co Flow sensing device
US3433068A (en) * 1964-11-12 1969-03-18 Rosemount Eng Co Ltd Thermal mass flow sensor
US3330156A (en) * 1965-09-08 1967-07-11 Jesse W Thomas Fluid flowmeters
US3514074A (en) * 1968-05-06 1970-05-26 Richard E Self High energy loss fluid control
US3559482A (en) * 1968-11-27 1971-02-02 Teledyne Inc Fluid flow measuring apparatus
US3613448A (en) * 1969-11-26 1971-10-19 Teledyne Inc Fluid flow measuring apparatus
US3688800A (en) * 1970-11-27 1972-09-05 Sanders Associates Inc Fluid flow restrictor
US3792609A (en) * 1971-05-10 1974-02-19 Tylan Corp Flow splitter
US3722854A (en) * 1971-12-01 1973-03-27 Grove Valve & Regulator Co Valve with perforated ribbon silencing element
US3805610A (en) * 1972-06-23 1974-04-23 Emerson Electric Co Flow dividing means, particularly for thermal flowmeter

Cited By (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5253520A (en) * 1990-12-07 1993-10-19 Dxl International, Inc. Flow sensor connector
US6655207B1 (en) * 2000-02-16 2003-12-02 Honeywell International Inc. Flow rate module and integrated flow restrictor
US20050179748A1 (en) * 2002-10-25 2005-08-18 Craig Malik Techniques for improving pressure sensor shock robustness in fluid containment devices
US7654655B2 (en) * 2002-10-25 2010-02-02 Hewlett-Packard Development Company, L.P. Labyrinth seal structure
US20060059985A1 (en) * 2002-11-18 2006-03-23 Yamatake Corporation Fluid detection device
US7228733B2 (en) * 2002-11-18 2007-06-12 Yamatake Corporation Fluid detection device
CN100376875C (en) * 2002-11-18 2008-03-26 株式会社山武 Fluid detection device
US7866337B2 (en) * 2005-07-08 2011-01-11 Entegris, Inc. Chemically inert flow controller with non-contaminating body
US20070089788A1 (en) * 2005-07-08 2007-04-26 Chinnock Robert T Chemically inert flow controller with non-contaminating body
US20100300542A1 (en) * 2009-05-27 2010-12-02 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
US9732880B2 (en) 2009-05-27 2017-08-15 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
EP2452110A1 (en) * 2009-05-27 2012-05-16 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
US8881768B2 (en) 2009-05-27 2014-11-11 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
EP2452110A4 (en) * 2009-05-27 2013-04-03 Flowserve Man Co Fluid flow control devices and systems, and methods of flowing fluids therethrough
US10989329B2 (en) 2009-05-27 2021-04-27 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
US10550960B2 (en) 2009-05-27 2020-02-04 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
US20110226053A1 (en) * 2010-03-22 2011-09-22 Honeywell International Inc. Flow sensor assembly with porous insert
US8656772B2 (en) 2010-03-22 2014-02-25 Honeywell International Inc. Flow sensor with pressure output signal
US8485031B2 (en) 2010-03-22 2013-07-16 Honeywell International Inc. Sensor assembly with hydrophobic filter
US8397586B2 (en) 2010-03-22 2013-03-19 Honeywell International Inc. Flow sensor assembly with porous insert
US8756990B2 (en) 2010-04-09 2014-06-24 Honeywell International Inc. Molded flow restrictor
US9003877B2 (en) 2010-06-15 2015-04-14 Honeywell International Inc. Flow sensor assembly
US8695417B2 (en) 2011-01-31 2014-04-15 Honeywell International Inc. Flow sensor with enhanced flow range capability
US9091577B2 (en) 2011-01-31 2015-07-28 Honeywell International Inc. Flow sensor assembly with integral bypass channel
US8418549B2 (en) 2011-01-31 2013-04-16 Honeywell International Inc. Flow sensor assembly with integral bypass channel
US9052217B2 (en) 2012-11-09 2015-06-09 Honeywell International Inc. Variable scale sensor
US10941878B2 (en) 2013-03-15 2021-03-09 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
US11287059B2 (en) 2013-03-15 2022-03-29 Flowserve Management Company Fluid flow control devices and systems, and methods of flowing fluids therethrough
US11761558B2 (en) 2013-03-15 2023-09-19 Flowserve Pte. Ltd. Fluid flow control devices and systems, and methods of flowing fluids therethrough
US10139259B2 (en) * 2014-12-05 2018-11-27 General Electric Company System and method for metering gas based on amplitude and/or temporal characteristics of an electrical signal
US20170038237A1 (en) * 2014-12-05 2017-02-09 General Electric Company System and method for fluid metering
US9952079B2 (en) 2015-07-15 2018-04-24 Honeywell International Inc. Flow sensor
US20180340643A1 (en) * 2017-05-25 2018-11-29 Fisher Controls International Llc Method of Manufacturing a Fluid Pressure Reduction Device
US10711937B2 (en) * 2017-05-25 2020-07-14 Fisher Controls International Llc Method of manufacturing a fluid pressure reduction device
US11506305B2 (en) 2017-05-25 2022-11-22 Fisher Controls International Llc Method of manufacturing a fluid pressure reduction device
US11719362B2 (en) 2017-05-25 2023-08-08 Fisher Controls International Llc Method of manufacturing a fluid pressure reduction device

Similar Documents

Publication Publication Date Title
US3851526A (en) Fluid flowmeter
USRE31570E (en) Fluid flowmeter
US3792609A (en) Flow splitter
US5357793A (en) Fluid metering apparatus
US3071160A (en) Fluid restrictor for linear flow meters
US5511416A (en) Wide range laminar flow element
US5576498A (en) Laminar flow element for a flowmeter
US5295397A (en) Slotted orifice flowmeter
EP0075343B1 (en) Laminar flow element
US5804717A (en) Mass flow transducer having extended flow rate measurement range
US5297427A (en) Wide-range laminar flowmeter
US4497202A (en) Laminar flowmeter
EP0428364A1 (en) Flowmeter
KR20090004487A (en) Flowmeter
JPS6056219A (en) Flowmeter
JPH02118205A (en) Flow stabilizer for fluid, mass flowmeter and mass flow rate controller
US4290315A (en) Apparatus for determining the differential pressure and the volumetric fluid flow in a conduit
EP0978021B1 (en) Proportioner
JPS58500774A (en) Flowmeter
KR102128430B1 (en) Mass flow meter and bypass flow controlling method for the mass flow meter
JPH07119636B2 (en) Flowmeter
US11624454B2 (en) Flow resistance insert and a flow rate measuring or flow rate control means
JPH0222647Y2 (en)
KR102524468B1 (en) Differential pressure generating element for mass flow controller and mass flow controller comprising the same
DE19648591C1 (en) Effective pressure indicator of flow meter

Legal Events

Date Code Title Description
AS Assignment

Owner name: BANK OF AMERICA NATIONAL TRUST AND SAVINGS ASSOCIA

Free format text: SECURITY INTEREST;ASSIGNOR:TYLAN CORPORATION;REEL/FRAME:004702/0182

Effective date: 19870403

AS Assignment

Owner name: BANK OF AMERICA NATIONAL TRUST AND SAVINGS ASSOCIA

Free format text: SECURITY INTEREST;ASSIGNOR:TYLAN CORPORATION;REEL/FRAME:004766/0186

Effective date: 19870403

AS Assignment

Owner name: SANWA BUSINESS CREDIT CORPORATION, A DE CORP., ILL

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:TYLAN CORPORATION, A CA CORP.;REEL/FRAME:005161/0619

Effective date: 19891005

AS Assignment

Owner name: TYLAN GENERAL TCA CORP., CALIFORNIA

Free format text: CHANGE OF NAME;ASSIGNOR:TYLAN CORPORATION;REEL/FRAME:006781/0248

Effective date: 19900123

AS Assignment

Owner name: TYLAN GENERAL, INC., CALIFORNIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:TYLAN GENERAL TCA CORP.;REEL/FRAME:006781/0006

Effective date: 19931115

AS Assignment

Owner name: TYLAN GENERAL, INC., A DELAWARE CORPORATION, CALIF

Free format text: MERGER;ASSIGNOR:TYLAN GENERAL, INC., A MASSACHUSETTS CORP.;REEL/FRAME:007888/0638

Effective date: 19950127

AS Assignment

Owner name: MILLIPORE CORPORATION, A MASSACHUSETTS, MASSACHUSE

Free format text: MERGER;ASSIGNOR:TYLAN GENERAL, INC., A DELAWARE CORP.;REEL/FRAME:008783/0969

Effective date: 19970731