USD803075S1 - Thermometry tool for substrate processing apparatus - Google Patents

Thermometry tool for substrate processing apparatus Download PDF

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Publication number
USD803075S1
USD803075S1 US29/572,550 US201629572550F USD803075S US D803075 S1 USD803075 S1 US D803075S1 US 201629572550 F US201629572550 F US 201629572550F US D803075 S USD803075 S US D803075S
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US
United States
Prior art keywords
thermometry
tool
processing apparatus
substrate processing
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/572,550
Inventor
Tokunobu Akao
Motoya TAKEWAKI
Akihiro Osaka
Masaaki Ueno
Tetsuya Kosugi
Masashi Sugishita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OSAKA, AKIHIRO, AKAO, TOKUNOBU, KOSUGI, TETSUYA, SUGISHITA, MASASHI, TAKEWAKI, MOTOYA, UENO, MASAAKI
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Publication of USD803075S1 publication Critical patent/USD803075S1/en
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
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Description

FIG. 1 is a perspective view of a thermometry tool for substrate processing apparatus showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is an enlarged portion view taken along line 8-8 in FIG. 1 thereof;
FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2 thereof;
FIG. 10 is an enlarged portion view taken along line 10-10 in FIG. 4 thereof; and,
FIG. 11 is an enlarged portion view taken along line 11-11 in FIG. 6 thereof.
The dashed-dot-dashed lines represent the boundary lines of the claimed design.
The broken lines shown in the drawings represent portions of the thermometry tool for substrate processing apparatus that form no part of the claimed design.

Claims (1)

    CLAIM
  1. We claim the ornamental design for a thermometry tool for substrate processing apparatus, as shown (and described).
US29/572,550 2016-02-10 2016-07-28 Thermometry tool for substrate processing apparatus Active USD803075S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016/002841 2016-02-10
JPD2016-2841F JP1564809S (en) 2016-02-10 2016-02-10

Publications (1)

Publication Number Publication Date
USD803075S1 true USD803075S1 (en) 2017-11-21

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Family Applications (1)

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US29/572,550 Active USD803075S1 (en) 2016-02-10 2016-07-28 Thermometry tool for substrate processing apparatus

Country Status (3)

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US (1) USD803075S1 (en)
JP (1) JP1564809S (en)
TW (1) TWD182149S (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD924701S1 (en) * 2019-03-04 2021-07-13 Kokusai Electric Corporation Temperature sensor
USD976129S1 (en) * 2020-09-15 2023-01-24 Kokusai Electric Corporation Temperature sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9488528B2 (en) * 2012-03-29 2016-11-08 Türk & Hillinger GmbH Immersion temperature sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9488528B2 (en) * 2012-03-29 2016-11-08 Türk & Hillinger GmbH Immersion temperature sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD924701S1 (en) * 2019-03-04 2021-07-13 Kokusai Electric Corporation Temperature sensor
USD976129S1 (en) * 2020-09-15 2023-01-24 Kokusai Electric Corporation Temperature sensor

Also Published As

Publication number Publication date
TWD182149S (en) 2017-04-01
JP1564809S (en) 2016-12-05

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