USD647549S1 - Shaft portion of an apparatus for holding and heating semiconductor wafers or the like - Google Patents

Shaft portion of an apparatus for holding and heating semiconductor wafers or the like Download PDF

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Publication number
USD647549S1
USD647549S1 US29/323,537 US32353708F USD647549S US D647549 S1 USD647549 S1 US D647549S1 US 32353708 F US32353708 F US 32353708F US D647549 S USD647549 S US D647549S
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US
United States
Prior art keywords
holding
shaft portion
semiconductor wafers
heating semiconductor
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/323,537
Inventor
Taichi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Assigned to NGK INSULATORS, LTD. reassignment NGK INSULATORS, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: NAKAMURA, TAICHI
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Publication of USD647549S1 publication Critical patent/USD647549S1/en
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FIG. 1 is a perspective view of a shaft portion of an apparatus for holding and heating semiconductor wafers or the like;
FIG. 2 is a front view thereof, a rear view being the same image of a front view;
FIG. 3 is a right side view thereof, a left side view being the same image of a right side view;
FIG. 4 is a bottom plan view thereof; and,
FIG. 5 is a sectional view taken vertically at the center of the portion shown by 5—5 in FIG. 2.
The broken lines showing on the drawing disclosure are for illustrative purposes only and form no part of the claimed design. The lines consisting of long lines and dots indicate conceptual border lines between the claimed portions and the disclaimed portions.

Claims (1)

  1. The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.
US29/323,537 2008-02-29 2008-08-27 Shaft portion of an apparatus for holding and heating semiconductor wafers or the like Active USD647549S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008004939 2008-02-29
JP2008-004939 2008-02-29

Publications (1)

Publication Number Publication Date
USD647549S1 true USD647549S1 (en) 2011-10-25

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US29/323,537 Active USD647549S1 (en) 2008-02-29 2008-08-27 Shaft portion of an apparatus for holding and heating semiconductor wafers or the like

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD947913S1 (en) * 2019-05-17 2022-04-05 Asm Ip Holding B.V. Susceptor shaft
USD965044S1 (en) * 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft
USD975665S1 (en) * 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
USD1004132S1 (en) * 2020-09-24 2023-11-07 Cyclomedica Australia Pty Limited Carbon crucible holder

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD947913S1 (en) * 2019-05-17 2022-04-05 Asm Ip Holding B.V. Susceptor shaft
USD975665S1 (en) * 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
USD965044S1 (en) * 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft
USD1004132S1 (en) * 2020-09-24 2023-11-07 Cyclomedica Australia Pty Limited Carbon crucible holder

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