USD641031S1 - Shaft portion of an apparatus for holding and heating semiconductor wafers or the like - Google Patents
Shaft portion of an apparatus for holding and heating semiconductor wafers or the like Download PDFInfo
- Publication number
- USD641031S1 USD641031S1 US29/323,533 US32353308F USD641031S US D641031 S1 USD641031 S1 US D641031S1 US 32353308 F US32353308 F US 32353308F US D641031 S USD641031 S US D641031S
- Authority
- US
- United States
- Prior art keywords
- holding
- shaft portion
- semiconductor wafers
- heating semiconductor
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Description
The broken lines showing on the drawing disclosure are for illustrative purposes only and form no part of the claimed design. The lines consisting of long lines end dots indicate conceptual border lines between the claimed portions and the disclaimed portions.
Claims (1)
- The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008-004935 | 2008-02-29 | ||
JP2008004935 | 2008-02-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD641031S1 true USD641031S1 (en) | 2011-07-05 |
Family
ID=44202734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/323,533 Active USD641031S1 (en) | 2008-02-29 | 2008-08-27 | Shaft portion of an apparatus for holding and heating semiconductor wafers or the like |
Country Status (1)
Country | Link |
---|---|
US (1) | USD641031S1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD861752S1 (en) * | 2017-08-01 | 2019-10-01 | Stas Inc. | Rotor and shaft assembly |
USD947913S1 (en) * | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
USD965044S1 (en) * | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
USD975665S1 (en) * | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
-
2008
- 2008-08-27 US US29/323,533 patent/USD641031S1/en active Active
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD861752S1 (en) * | 2017-08-01 | 2019-10-01 | Stas Inc. | Rotor and shaft assembly |
USD885447S1 (en) * | 2017-08-01 | 2020-05-26 | Stas Inc. | Rotor and shaft assembly |
USD947913S1 (en) * | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
USD975665S1 (en) * | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
USD965044S1 (en) * | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
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