USD630657S1 - Shaft portion of an apparatus for holding and heating semiconductor wafers or the like - Google Patents

Shaft portion of an apparatus for holding and heating semiconductor wafers or the like Download PDF

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Publication number
USD630657S1
USD630657S1 US29/323,534 US32353408F USD630657S US D630657 S1 USD630657 S1 US D630657S1 US 32353408 F US32353408 F US 32353408F US D630657 S USD630657 S US D630657S
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US
United States
Prior art keywords
holding
shaft portion
semiconductor wafers
heating semiconductor
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/323,534
Inventor
Taichi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Assigned to NGK INSULATORS, LTD. reassignment NGK INSULATORS, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: NAKAMURA, TAICHI
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Publication of USD630657S1 publication Critical patent/USD630657S1/en
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Description

FIG. 1 is a perspective view of a shaft portion of an apparatus for holding and heating semiconductor wafers or the like;
FIG. 2 is a front view thereof, a rear view being the same image of a front view;
FIG. 3 is a right side view thereof, a left side view being the same image of a right side view;
FIG. 4 is a bottom plan view thereof; and,
FIG. 5 is a sectional view taken vertically at the center of the portion shown by 5—5 in FIG. 2.
The broken lines showing on the drawing disclosure are for illustrative purposes only and form no part of the claimed design. The lines consisting of long lines and dots indicate conceptual border lines between the claimed portions and the disclaimed portions.

Claims (1)

  1. The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.
US29/323,534 2008-02-29 2008-08-27 Shaft portion of an apparatus for holding and heating semiconductor wafers or the like Active USD630657S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-004937 2008-02-29
JP2008004937 2008-02-29

Publications (1)

Publication Number Publication Date
USD630657S1 true USD630657S1 (en) 2011-01-11

Family

ID=43416063

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/323,534 Active USD630657S1 (en) 2008-02-29 2008-08-27 Shaft portion of an apparatus for holding and heating semiconductor wafers or the like

Country Status (2)

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US (1) USD630657S1 (en)
TW (1) TWD133940S1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1031676S1 (en) * 2020-12-04 2024-06-18 Asm Ip Holding B.V. Combined susceptor, support, and lift system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1031676S1 (en) * 2020-12-04 2024-06-18 Asm Ip Holding B.V. Combined susceptor, support, and lift system

Also Published As

Publication number Publication date
TWD133940S1 (en) 2010-03-21

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