USD604257S1 - Heater for semiconductor manufacturing - Google Patents

Heater for semiconductor manufacturing Download PDF

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Publication number
USD604257S1
USD604257S1 US29/258,749 US25874906F USD604257S US D604257 S1 USD604257 S1 US D604257S1 US 25874906 F US25874906 F US 25874906F US D604257 S USD604257 S US D604257S
Authority
US
United States
Prior art keywords
heater
semiconductor manufacturing
view
enlarged
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/258,749
Inventor
Yasuhiro Inatomi
Kenichi Yamaga
Hiroyuki Honma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Toshiba Ceramics Co Ltd filed Critical Tokyo Electron Ltd
Assigned to TOSHIBA CERAMICS CO., LTD., TOKYO ELECTRON LIMITED reassignment TOSHIBA CERAMICS CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HONMA, HIROYUKI, YAMAGA, KENICHI, INATOMI, YASUHIRO
Application granted granted Critical
Publication of USD604257S1 publication Critical patent/USD604257S1/en
Assigned to COORSTEK KK reassignment COORSTEK KK CHANGE OF NAME & ADDRESS Assignors: COVALENT MATERIALS CORPORATION
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is an enlarged front elevation view of a heater for semiconductor manufacturing showing our new design;
FIG. 2 is an enlarged left side elevation view, the right side being a mirror image thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is an enlarged top plan view of the area 55 shown in FIG. 3; and,
FIG. 6 is an enlarged bottom plan view of the area 66 shown in FIG. 4.
The broken lines shown in the figures are for illustrative purposes only and form no part of the claimed design.

Claims (1)

  1. The ornamental design for a heater for semiconductor manufacturing, as shown and described.
US29/258,749 2005-10-27 2006-04-27 Heater for semiconductor manufacturing Expired - Lifetime USD604257S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005031458 2005-10-27

Publications (1)

Publication Number Publication Date
USD604257S1 true USD604257S1 (en) 2009-11-17

Family

ID=41280055

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/258,749 Expired - Lifetime USD604257S1 (en) 2005-10-27 2006-04-27 Heater for semiconductor manufacturing

Country Status (1)

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US (1) USD604257S1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater

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