USD562524S1 - Wafer transfer apparatus - Google Patents

Wafer transfer apparatus Download PDF

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Publication number
USD562524S1
USD562524S1 US29/220,627 US22062705F USD562524S US D562524 S1 USD562524 S1 US D562524S1 US 22062705 F US22062705 F US 22062705F US D562524 S USD562524 S US D562524S
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US
United States
Prior art keywords
wafer transfer
transfer apparatus
showing
perspective
view seen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/220,627
Inventor
Tsutomu Hiroki
Wataru Machiyama
Takehiro Shindo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HIROKI, TSUTOMU, MACHIYAMA, WATARU, SHINDO, TAKEHIRO
Application granted granted Critical
Publication of USD562524S1 publication Critical patent/USD562524S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a top view of the wafer transfer apparatus of the present design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a back elevational view thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a reference figure showing a perspective view seen from a back-left hand side of the apparatus;
FIG. 8 is a reference figure showing a top view seen from a back-left hand side of the apparatus;
FIG. 9 is a reference figure showing a perspective view seen from a front-right hand side of the apparatus;
FIG. 10 is a reference figure showing a perspective view seen from a back-right hand side of the apparatus;
FIG. 11 is a reference figure showing a right side view seen from a back side of the apparatus;
FIG. 12 is a reference figure showing a perspective view seen from the back-left hand side of the apparatus;
FIG. 13 is a reference figure showing a perspective view seen from a front-right hand side of the apparatus;
FIG. 14 is a reference figure showing a perspective view seen from the front-left hand side of the apparatus;
FIG. 15 is a reference figure showing a perspective view seen from a back-left hand side of the apparatus; and,
FIG. 16 is a reference figure showing a perspective view seen from a back-right hand side of the apparatus.
The broken line showing of wafers in some of the figures is included for the purpose of illustrating environment and forms no part of the claimed design.

Claims (1)

  1. We claim the ornamental design for a wafer transfer apparatus, as shown and described.
US29/220,627 2004-07-20 2005-01-05 Wafer transfer apparatus Expired - Lifetime USD562524S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004021726 2004-07-20

Publications (1)

Publication Number Publication Date
USD562524S1 true USD562524S1 (en) 2008-02-19

Family

ID=39060172

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/220,627 Expired - Lifetime USD562524S1 (en) 2004-07-20 2005-01-05 Wafer transfer apparatus

Country Status (1)

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US (1) USD562524S1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9245783B2 (en) 2013-05-24 2016-01-26 Novellus Systems, Inc. Vacuum robot with linear translation carriage

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9245783B2 (en) 2013-05-24 2016-01-26 Novellus Systems, Inc. Vacuum robot with linear translation carriage

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