USB581564I5 - - Google Patents
Info
- Publication number
- USB581564I5 USB581564I5 US58156475A USB581564I5 US B581564 I5 USB581564 I5 US B581564I5 US 58156475 A US58156475 A US 58156475A US B581564 I5 USB581564 I5 US B581564I5
- Authority
- US
- United States
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/597—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon oxynitride, e.g. SIALONS
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/02—Amorphous compounds
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
- C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/10—Solid density
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/581,564 US4036653A (en) | 1975-05-28 | 1975-05-28 | Amorphous silicon nitride composition containing carbon, and vapor phase process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/581,564 US4036653A (en) | 1975-05-28 | 1975-05-28 | Amorphous silicon nitride composition containing carbon, and vapor phase process |
Publications (2)
Publication Number | Publication Date |
---|---|
USB581564I5 true USB581564I5 (en) | 1976-03-23 |
US4036653A US4036653A (en) | 1977-07-19 |
Family
ID=24325687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US05/581,564 Expired - Lifetime US4036653A (en) | 1975-05-28 | 1975-05-28 | Amorphous silicon nitride composition containing carbon, and vapor phase process |
Country Status (1)
Country | Link |
---|---|
US (1) | US4036653A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4073845A (en) | 1976-01-29 | 1978-02-14 | Gte Sylvania Incorporated | High density high strength S13 N4 ceramics prepared by pressureless sintering of partly crystalline, partly amorphous S13 N4 powder |
US4122155A (en) | 1977-01-03 | 1978-10-24 | General Electric Company | Preparation of silicon nitride powder |
CN114773069A (en) * | 2022-05-09 | 2022-07-22 | 秦皇岛光岩科技有限公司 | Preparation method of high-thermal conductivity silicon nitride ceramic substrate for high-power integrated circuit |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4070198A (en) * | 1976-03-05 | 1978-01-24 | Corning Glass Works | SiO2 -Al2 O3 -N glass for production of oxynitride glass-ceramics |
DE2812019C2 (en) * | 1978-03-18 | 1982-06-03 | Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe | Device for producing a preform from silicon nitride |
US4336304A (en) * | 1979-05-21 | 1982-06-22 | The United States Of America As Represented By The United States Department Of Energy | Chemical vapor deposition of sialon |
JPS5617988A (en) * | 1979-07-24 | 1981-02-20 | Toshio Hirai | Electroconductive si3n44c type noncrystalline material by chemical gas phase deposition and its manufacture |
US4289801A (en) * | 1980-05-21 | 1981-09-15 | United Technologies Corporation | Method for producing fine grained pyrolytic silicon nitride |
US4500483A (en) * | 1982-03-19 | 1985-02-19 | United Technologies Corporation | Manufacture of hollow CVD silicon nitride articles |
JPS5921506A (en) * | 1982-07-27 | 1984-02-03 | Ube Ind Ltd | Manufacture of crystalline silicon nitride powder |
US4579699A (en) * | 1983-09-29 | 1986-04-01 | The Boeing Company | Method for making α-Si3 N4 whiskers and articles therefrom |
US4594330A (en) * | 1984-03-22 | 1986-06-10 | Mitsubishi Gas Chemical Company, Inc. | Fine amorphous powder and process for preparing fine powdery mixture of silicon nitride and silicon carbide |
US4613490A (en) * | 1984-05-08 | 1986-09-23 | Mitsubishi Gas Chemical Company, Inc. | Process for preparing silicon nitride, silicon carbide or fine powdery mixture thereof |
JPS62125015A (en) * | 1985-11-19 | 1987-06-06 | Toa Nenryo Kogyo Kk | High-purity silicon nitride fiber and production thereof |
US5187129A (en) * | 1987-12-21 | 1993-02-16 | Eaton Corporation | Process for making silicon nitride and powders and articles made therefrom |
US5176893A (en) * | 1989-10-02 | 1993-01-05 | Phillips Petroleum Company | Silicon nitride products and method for their production |
US5213729A (en) * | 1990-07-24 | 1993-05-25 | Eaton Corporation | Process for preparing a densified beta-phase silicon nitride material having at least one densification aid, and the material resulting therefrom |
US5160719A (en) * | 1990-07-24 | 1992-11-03 | Eaton Corporation | Process for nitriding silicon containing materials |
US5079198A (en) * | 1990-07-24 | 1992-01-07 | Eaton Corporation | Ceramic phase in sintered silicon nitride containing cerium, aluminum, and iron |
US5156830A (en) * | 1990-07-24 | 1992-10-20 | Eaton Corporation | Process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase material |
US5055432A (en) * | 1990-07-24 | 1991-10-08 | Eaton Corporation | Process for preparing a nitridable silicon-containing material having at least one densification aid including alumina, and the material resulting therefrom |
US5085582A (en) * | 1990-07-24 | 1992-02-04 | Eaton Corporation | Silicon nitride containers for the sintering of silicon nitride ceramics |
US5252248A (en) * | 1990-07-24 | 1993-10-12 | Eaton Corporation | Process for preparing a base nitridable silicon-containing material |
US6007789A (en) * | 1992-11-03 | 1999-12-28 | Eaton Corporation | Method of nitriding silicon |
AU4090600A (en) | 1999-06-30 | 2001-01-04 | Rohm And Haas Company | High performance heat exchangers |
RU2540618C2 (en) * | 2009-06-04 | 2015-02-10 | ВОЛТЕЙКС, ЭлЭлСи. | Method and device to produce trisilylamine |
DE102011075974A1 (en) * | 2011-05-17 | 2012-11-22 | Evonik Degussa Gmbh | Process for the preparation of trisilylamine in the gas phase |
JP6041527B2 (en) * | 2012-05-16 | 2016-12-07 | キヤノン株式会社 | Liquid discharge head |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3226194A (en) * | 1962-09-10 | 1965-12-28 | United Aircraft Corp | Process for producing silicon nitride and a product thereof |
US3352637A (en) * | 1963-05-30 | 1967-11-14 | Knapsack Ag | Process and apparatus for the manufacture of nitride powders of the elements aluminum, boron, silicon or zirconium |
US3574677A (en) * | 1966-04-29 | 1971-04-13 | Siemens Ag | Method of producing a protective layer from a semiconductor nitrogen compound for semiconductor purposes |
DE1957952A1 (en) * | 1969-11-18 | 1971-05-27 | Siemens Ag | Silicon nitride coating on quartz walls for diffusion and oxidation reactors |
US3637423A (en) * | 1969-02-10 | 1972-01-25 | Westinghouse Electric Corp | Pyrolytic deposition of silicon nitride films |
US3652331A (en) * | 1968-03-22 | 1972-03-28 | Shumpei Yamazaki | Process for forming a film on the surface of a substrate by a gas phase |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3253886A (en) * | 1961-05-09 | 1966-05-31 | Union Carbide Corp | Process for producing ultrafine powders of refractory materials |
US3492100A (en) * | 1966-11-25 | 1970-01-27 | Centre Nat Rech Scient | Process for obtaining simple and mixed carbonitrides and oxycarbonitrides of transition metals and new metallic carbonitrides and oxycarbonitrides containing such metals |
US3565674A (en) * | 1967-10-30 | 1971-02-23 | Motorola Inc | Deposition of silicon nitride |
DE2243527A1 (en) * | 1972-09-05 | 1974-04-18 | Bayer Ag | MOLDED BODIES FROM HOMOGENOUS MIXTURES OF SILICON CARBIDE AND SILICON NITRIDE AND THE PROCESS FOR THEIR PRODUCTION |
US3979500A (en) * | 1973-05-02 | 1976-09-07 | Ppg Industries, Inc. | Preparation of finely-divided refractory powders of groups III-V metal borides, carbides, nitrides, silicides and sulfides |
US3959446A (en) * | 1974-03-01 | 1976-05-25 | The United States Of America As Represented By The Secretary Of The Air Force | Synthesis of high purity, alpha phase silicon nitride powder |
-
1975
- 1975-05-28 US US05/581,564 patent/US4036653A/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3226194A (en) * | 1962-09-10 | 1965-12-28 | United Aircraft Corp | Process for producing silicon nitride and a product thereof |
US3352637A (en) * | 1963-05-30 | 1967-11-14 | Knapsack Ag | Process and apparatus for the manufacture of nitride powders of the elements aluminum, boron, silicon or zirconium |
US3574677A (en) * | 1966-04-29 | 1971-04-13 | Siemens Ag | Method of producing a protective layer from a semiconductor nitrogen compound for semiconductor purposes |
US3652331A (en) * | 1968-03-22 | 1972-03-28 | Shumpei Yamazaki | Process for forming a film on the surface of a substrate by a gas phase |
US3637423A (en) * | 1969-02-10 | 1972-01-25 | Westinghouse Electric Corp | Pyrolytic deposition of silicon nitride films |
DE1957952A1 (en) * | 1969-11-18 | 1971-05-27 | Siemens Ag | Silicon nitride coating on quartz walls for diffusion and oxidation reactors |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4073845A (en) | 1976-01-29 | 1978-02-14 | Gte Sylvania Incorporated | High density high strength S13 N4 ceramics prepared by pressureless sintering of partly crystalline, partly amorphous S13 N4 powder |
US4122155A (en) | 1977-01-03 | 1978-10-24 | General Electric Company | Preparation of silicon nitride powder |
CN114773069A (en) * | 2022-05-09 | 2022-07-22 | 秦皇岛光岩科技有限公司 | Preparation method of high-thermal conductivity silicon nitride ceramic substrate for high-power integrated circuit |
Also Published As
Publication number | Publication date |
---|---|
US4036653A (en) | 1977-07-19 |