USB509586I5 - - Google Patents

Info

Publication number
USB509586I5
USB509586I5 US50958674A USB509586I5 US B509586 I5 USB509586 I5 US B509586I5 US 50958674 A US50958674 A US 50958674A US B509586 I5 USB509586 I5 US B509586I5
Authority
US
United States
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to US05/509,586 priority Critical patent/US4006645A/en
Publication of USB509586I5 publication Critical patent/USB509586I5/en
Application granted granted Critical
Publication of US4006645A publication Critical patent/US4006645A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05G—CONTROL DEVICES OR SYSTEMS INSOFAR AS CHARACTERISED BY MECHANICAL FEATURES ONLY
    • G05G11/00—Manually-actuated control mechanisms provided with two or more controlling members co-operating with one single controlled member
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements
    • Y10T74/20348—Planar surface with orthogonal movement and rotation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
US05/509,586 1974-09-26 1974-09-26 X, Y, θ alignment mechanism Expired - Lifetime US4006645A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US05/509,586 US4006645A (en) 1974-09-26 1974-09-26 X, Y, θ alignment mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/509,586 US4006645A (en) 1974-09-26 1974-09-26 X, Y, θ alignment mechanism

Publications (2)

Publication Number Publication Date
USB509586I5 true USB509586I5 (en) 1976-02-03
US4006645A US4006645A (en) 1977-02-08

Family

ID=24027279

Family Applications (1)

Application Number Title Priority Date Filing Date
US05/509,586 Expired - Lifetime US4006645A (en) 1974-09-26 1974-09-26 X, Y, θ alignment mechanism

Country Status (1)

Country Link
US (1) US4006645A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0184098A1 (en) * 1984-11-30 1986-06-11 Opto Micron Industry Co. Ltd. Submicromanipulator

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1034393A (en) * 1976-10-13 1978-07-11 Henry J. Taylor Powered wrist joint
JPS5912419B2 (en) * 1976-12-16 1984-03-23 株式会社東芝 table equipment
AT393732B (en) * 1986-07-15 1991-12-10 Steyr Daimler Puch Ag SIGHTING DEVICE, IN PARTICULAR FOR RIFLES
DD297758A7 (en) * 1987-03-13 1992-01-23 Elektromat Gmbh,De POSITIONING DEVICE FOR THE MANUFACTURE OF SEMICONDUCTOR COMPONENTS
US4995277A (en) * 1988-05-31 1991-02-26 Ken Yanagisawa Two dimensional drive system
JP2974535B2 (en) * 1993-03-11 1999-11-10 キヤノン株式会社 Positioning device
US6098485A (en) * 1998-08-27 2000-08-08 Thermotrex Corporation Lead screw actuator
US6301989B1 (en) * 1999-09-30 2001-10-16 Civco Medical Instruments, Inc. Medical imaging instrument positioning device
EP1216787B1 (en) * 2000-12-21 2004-08-18 Liechti Engineering AG Positioning device
IL156330A (en) * 2003-06-05 2009-12-24 Nova Measuring Instr Ltd Article transfer system
JP6095022B1 (en) * 2015-12-04 2017-03-15 三菱電機株式会社 Wave energy radiation device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3626769A (en) * 1970-04-06 1971-12-14 Ibm Apparatus for positioning workpieces in selected translational and rotational orientations
US3691864A (en) * 1970-11-19 1972-09-19 Ibm X-y rotational positioning system
US3861233A (en) * 1972-04-18 1975-01-21 Takachiho Koeki Kk Positioner for adjusting inclination and position of an object from one direction

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3626769A (en) * 1970-04-06 1971-12-14 Ibm Apparatus for positioning workpieces in selected translational and rotational orientations
US3691864A (en) * 1970-11-19 1972-09-19 Ibm X-y rotational positioning system
US3861233A (en) * 1972-04-18 1975-01-21 Takachiho Koeki Kk Positioner for adjusting inclination and position of an object from one direction

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0184098A1 (en) * 1984-11-30 1986-06-11 Opto Micron Industry Co. Ltd. Submicromanipulator

Also Published As

Publication number Publication date
US4006645A (en) 1977-02-08

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Legal Events

Date Code Title Description
AS Assignment

Owner name: SVG LITHOGRAPHY, INC., A CORP OF DE

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:PERKIN-ELMER CORPORATION, THE,;REEL/FRAME:005424/0111

Effective date: 19900515