USB505582I5 - - Google Patents
Info
- Publication number
- USB505582I5 USB505582I5 US50558274A USB505582I5 US B505582 I5 USB505582 I5 US B505582I5 US 50558274 A US50558274 A US 50558274A US B505582 I5 USB505582 I5 US B505582I5
- Authority
- US
- United States
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/505,582 US4001659A (en) | 1974-09-12 | 1974-09-12 | Apparatus for spinning a microelectronic substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/505,582 US4001659A (en) | 1974-09-12 | 1974-09-12 | Apparatus for spinning a microelectronic substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| USB505582I5 true USB505582I5 (en) | 1976-03-23 |
| US4001659A US4001659A (en) | 1977-01-04 |
Family
ID=24010926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US05/505,582 Expired - Lifetime US4001659A (en) | 1974-09-12 | 1974-09-12 | Apparatus for spinning a microelectronic substrate |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | US4001659A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5798140A (en) * | 1993-11-12 | 1998-08-25 | Semiconductor Systems, Inc. | Oscillatory chuck method and apparatus for coating flat substrates |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60210840A (en) * | 1984-03-06 | 1985-10-23 | Fujitsu Ltd | Spinning proccessor |
| JP2665313B2 (en) * | 1994-04-22 | 1997-10-22 | 国際電業株式会社 | Reaction force generator |
| US6891287B2 (en) * | 2003-07-17 | 2005-05-10 | Les Produits Associes Lpa, S.A. | Alternating current axially oscillating motor |
| KR100829923B1 (en) * | 2006-08-30 | 2008-05-16 | 세메스 주식회사 | Spin head and method using the same for treating substrate |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3475629A (en) * | 1966-03-30 | 1969-10-28 | Squibb & Sons Inc | Oscillating electric motor |
-
1974
- 1974-09-12 US US05/505,582 patent/US4001659A/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3475629A (en) * | 1966-03-30 | 1969-10-28 | Squibb & Sons Inc | Oscillating electric motor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5798140A (en) * | 1993-11-12 | 1998-08-25 | Semiconductor Systems, Inc. | Oscillatory chuck method and apparatus for coating flat substrates |
Also Published As
| Publication number | Publication date |
|---|---|
| US4001659A (en) | 1977-01-04 |