USB476967I5 - - Google Patents
Info
- Publication number
- USB476967I5 USB476967I5 US47696774A USB476967I5 US B476967 I5 USB476967 I5 US B476967I5 US 47696774 A US47696774 A US 47696774A US B476967 I5 USB476967 I5 US B476967I5
- Authority
- US
- United States
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q41/00—Combinations or associations of metal-working machines not directed to a particular result according to classes B21, B23, or B24
- B23Q41/02—Features relating to transfer of work between machines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/476,967 US3995206A (en) | 1972-12-29 | 1974-06-06 | Apparatus for transferring articles through various processing sectors of a manufacturing system |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00319563A US3850105A (en) | 1972-12-29 | 1972-12-29 | Apparatus for transferring articles through various processing sectors of a manufacturing system |
| US05/476,967 US3995206A (en) | 1972-12-29 | 1974-06-06 | Apparatus for transferring articles through various processing sectors of a manufacturing system |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US00319563A Division US3850105A (en) | 1972-12-29 | 1972-12-29 | Apparatus for transferring articles through various processing sectors of a manufacturing system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| USB476967I5 true USB476967I5 (US07223432-20070529-C00017.png) | 1976-03-09 |
| US3995206A US3995206A (en) | 1976-11-30 |
Family
ID=26982062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US05/476,967 Expired - Lifetime US3995206A (en) | 1972-12-29 | 1974-06-06 | Apparatus for transferring articles through various processing sectors of a manufacturing system |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | US3995206A (US07223432-20070529-C00017.png) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4193022A (en) * | 1978-03-22 | 1980-03-11 | Kelsey-Hayes Company | Analog/digital numerical control system |
| SE419709B (sv) * | 1979-02-21 | 1981-08-24 | Roland Kaufeldt | Sett och anordning for att astadkomma snabb gang och mjuk inbromsning samt ett noggrant bestemt slutlege hos en rorlig robotram |
| JPS57211452A (en) * | 1981-06-16 | 1982-12-25 | Fanuc Ltd | Movable portion returning system |
| US4481585A (en) * | 1981-08-03 | 1984-11-06 | General Motors Corporation | System for selectively controlling motor vehicle electrical loads |
| US4399335A (en) * | 1981-08-03 | 1983-08-16 | General Motors Corporation | Switch actuator assembly |
| US4403121A (en) * | 1981-08-03 | 1983-09-06 | General Motors Corporation | Remote control unit |
| JPH0616242B2 (ja) * | 1983-06-06 | 1994-03-02 | ファナック株式会社 | 数値制御方式 |
| JPS60213456A (ja) * | 1984-04-04 | 1985-10-25 | Citizen Watch Co Ltd | 位置決め装置 |
| JPS6123211A (ja) * | 1984-07-12 | 1986-01-31 | Fanuc Ltd | 原点復帰方式 |
| DE3814810A1 (de) * | 1988-05-02 | 1989-11-16 | Bodenseewerk Geraetetech | Stellantrieb zum einstellen eines drehbeweglichen elements |
| US5136226A (en) * | 1989-08-21 | 1992-08-04 | Carco Electronics | Correlated coarse position error processor |
| US5055753A (en) * | 1990-04-09 | 1991-10-08 | Honeywell Inc. | Programmable servomotor coil winder |
| DE59406900D1 (de) * | 1993-02-08 | 1998-10-22 | Sez Semiconduct Equip Zubehoer | Träger für scheibenförmige Gegenstände |
| US6203582B1 (en) * | 1996-07-15 | 2001-03-20 | Semitool, Inc. | Modular semiconductor workpiece processing tool |
| US6281652B1 (en) * | 2000-03-24 | 2001-08-28 | Western Digital Corporation | Method of using two low-resolution DACS for converting high-resolution digital demands into analog output signals that monotonically drive an actuator motor in a disk drive |
| DE102006053580A1 (de) * | 2006-03-10 | 2007-09-13 | Carl Zeiss Meditec Ag | System zur Behandlung oder Diagnose am Auge |
| JP7109863B2 (ja) * | 2018-11-30 | 2022-08-01 | 株式会社ディスコ | 搬送システム |
| US11107713B2 (en) * | 2019-05-29 | 2021-08-31 | Taiwan Semiconductor Manufacturing Company Ltd. | Conveying system and method for operating the same |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2798992A (en) * | 1955-02-04 | 1957-07-09 | Adler Samuel | Fine and coarse control servo system |
| GB945787A (en) * | 1959-04-14 | 1964-01-08 | Gen Electric Co Ltd | Improvements in or relating to position control arrangements |
| JPS4120599B1 (en) * | 1962-09-12 | 1966-12-01 | Rca Corp | Detection apparatus |
| US3339122A (en) * | 1964-03-23 | 1967-08-29 | Carlton Machine Tool Co | Digital positional control device |
| US3504245A (en) * | 1965-10-20 | 1970-03-31 | Cutler Hammer Inc | Automatic storage and retrieval system |
| JPS511865B1 (US07223432-20070529-C00017.png) * | 1968-09-30 | 1976-01-21 | ||
| JPS492230B1 (US07223432-20070529-C00017.png) * | 1970-01-31 | 1974-01-19 | ||
| FR2098524A5 (US07223432-20070529-C00017.png) * | 1970-07-17 | 1972-03-10 | Thomson Csf | |
| US3760249A (en) * | 1971-03-30 | 1973-09-18 | Westinghouse Electric Corp | Coarse-fine analog positioning system |
-
1974
- 1974-06-06 US US05/476,967 patent/US3995206A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3995206A (en) | 1976-11-30 |
