USB433892I5 - - Google Patents

Info

Publication number
USB433892I5
USB433892I5 US43389274A USB433892I5 US B433892 I5 USB433892 I5 US B433892I5 US 43389274 A US43389274 A US 43389274A US B433892 I5 USB433892 I5 US B433892I5
Authority
US
United States
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
Inventor
Kiyotaka Wasa
Fumio Hosomi
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP46013829A external-priority patent/JPS5110677B1/ja
Priority claimed from JP46015274A external-priority patent/JPS5110679B1/ja
Priority claimed from JP46015273A external-priority patent/JPS5110678B1/ja
Priority claimed from US00227070A external-priority patent/US3803057A/en
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to US05/433,892 priority Critical patent/US4016061A/en
Publication of USB433892I5 publication Critical patent/USB433892I5/en
Application granted granted Critical
Publication of US4016061A publication Critical patent/US4016061A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques by sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Vapour Deposition (AREA)
US05/433,892 1971-03-11 1974-01-16 Method of making resistive films Expired - Lifetime US4016061A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US05/433,892 US4016061A (en) 1971-03-11 1974-01-16 Method of making resistive films

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JA46-13829 1971-03-11
JP46013829A JPS5110677B1 (en) 1971-03-11 1971-03-11
JA46-15274 1971-03-17
JP46015274A JPS5110679B1 (en) 1971-03-17 1971-03-17
JP46015273A JPS5110678B1 (en) 1971-03-17 1971-03-17
JA46-15273 1971-03-17
US00227070A US3803057A (en) 1971-03-11 1972-02-17 Resistive materials and method of making such materials
US05/433,892 US4016061A (en) 1971-03-11 1974-01-16 Method of making resistive films

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US00227070A Division US3803057A (en) 1971-03-11 1972-02-17 Resistive materials and method of making such materials

Publications (2)

Publication Number Publication Date
USB433892I5 true USB433892I5 (en) 1976-04-06
US4016061A US4016061A (en) 1977-04-05

Family

ID=27519564

Family Applications (1)

Application Number Title Priority Date Filing Date
US05/433,892 Expired - Lifetime US4016061A (en) 1971-03-11 1974-01-16 Method of making resistive films

Country Status (1)

Country Link
US (1) US4016061A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114086122A (en) * 2021-11-26 2022-02-25 江苏科技大学 Ceramic-based gradient plating layer based on high film-substrate binding force on copper substrate and preparation method thereof

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3545636A1 (en) * 1985-12-21 1987-06-25 Leybold Heraeus Gmbh & Co Kg HARD MATERIAL COATING ON BASE
US5605609A (en) * 1988-03-03 1997-02-25 Asahi Glass Company Ltd. Method for forming low refractive index film comprising silicon dioxide
US5060671A (en) * 1989-12-01 1991-10-29 Philip Morris Incorporated Flavor generating article
US5224498A (en) * 1989-12-01 1993-07-06 Philip Morris Incorporated Electrically-powered heating element
US5269327A (en) * 1989-12-01 1993-12-14 Philip Morris Incorporated Electrical smoking article
US5093894A (en) * 1989-12-01 1992-03-03 Philip Morris Incorporated Electrically-powered linear heating element
US5179966A (en) * 1990-11-19 1993-01-19 Philip Morris Incorporated Flavor generating article
US5095921A (en) * 1990-11-19 1992-03-17 Philip Morris Incorporated Flavor generating article
US5388594A (en) * 1991-03-11 1995-02-14 Philip Morris Incorporated Electrical smoking system for delivering flavors and method for making same
US5573692A (en) * 1991-03-11 1996-11-12 Philip Morris Incorporated Platinum heater for electrical smoking article having ohmic contact
US5505214A (en) * 1991-03-11 1996-04-09 Philip Morris Incorporated Electrical smoking article and method for making same
US5665262A (en) * 1991-03-11 1997-09-09 Philip Morris Incorporated Tubular heater for use in an electrical smoking article
US5249586A (en) * 1991-03-11 1993-10-05 Philip Morris Incorporated Electrical smoking
US5322075A (en) * 1992-09-10 1994-06-21 Philip Morris Incorporated Heater for an electric flavor-generating article
US5666976A (en) * 1992-09-11 1997-09-16 Philip Morris Incorporated Cigarette and method of manufacturing cigarette for electrical smoking system
US5692525A (en) * 1992-09-11 1997-12-02 Philip Morris Incorporated Cigarette for electrical smoking system
TW245766B (en) * 1992-09-11 1995-04-21 Philip Morris Prod
US5367285A (en) * 1993-02-26 1994-11-22 Lake Shore Cryotronics, Inc. Metal oxy-nitride resistance films and methods of making the same
US5649554A (en) * 1995-10-16 1997-07-22 Philip Morris Incorporated Electrical lighter with a rotatable tobacco supply
AU742275B2 (en) * 1996-12-27 2001-12-20 Canon Kabushiki Kaisha Charge-reducing film, image forming apparatus and method of manufacturing the same
CN1127750C (en) * 1996-12-27 2003-11-12 佳能株式会社 Charge-reducing film, image forming apparatus and method of manufacturing the same
EP2100525A1 (en) 2008-03-14 2009-09-16 Philip Morris Products S.A. Electrically heated aerosol generating system and method
EP2110034A1 (en) 2008-04-17 2009-10-21 Philip Morris Products S.A. An electrically heated smoking system
EP2113178A1 (en) 2008-04-30 2009-11-04 Philip Morris Products S.A. An electrically heated smoking system having a liquid storage portion
EP2253233A1 (en) 2009-05-21 2010-11-24 Philip Morris Products S.A. An electrically heated smoking system
EP2319334A1 (en) * 2009-10-27 2011-05-11 Philip Morris Products S.A. A smoking system having a liquid storage portion
EP2327318A1 (en) 2009-11-27 2011-06-01 Philip Morris Products S.A. An electrically heated smoking system with internal or external heater
US9854839B2 (en) 2012-01-31 2018-01-02 Altria Client Services Llc Electronic vaping device and method
JP6420155B2 (en) 2012-02-22 2018-11-07 アルトリア クライアント サービシーズ エルエルシー Electronic smoking article and improved heater element
USD849993S1 (en) 2013-01-14 2019-05-28 Altria Client Services Electronic smoking article
USD691766S1 (en) 2013-01-14 2013-10-15 Altria Client Services Inc. Mouthpiece of a smoking article
USD841231S1 (en) 2013-01-14 2019-02-19 Altria Client Services, Llc Electronic vaping device mouthpiece
USD691765S1 (en) 2013-01-14 2013-10-15 Altria Client Services Inc. Electronic smoking article
USD695449S1 (en) 2013-01-14 2013-12-10 Altria Client Services Inc. Electronic smoking article
BR302014001648S1 (en) 2013-10-14 2015-06-09 Altria Client Services Inc Smoke Applied Configuration

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3395089A (en) * 1964-12-14 1968-07-30 Bell Telephone Labor Inc Method of depositing films of controlled specific resistivity and temperature coefficient of resistance using cathode sputtering
US3664931A (en) * 1970-07-27 1972-05-23 Dieter Gerstenberg Method for fabrication of thin film capacitor
US3736242A (en) * 1968-01-31 1973-05-29 Bell Telephone Labor Inc Sputtering technique

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3395089A (en) * 1964-12-14 1968-07-30 Bell Telephone Labor Inc Method of depositing films of controlled specific resistivity and temperature coefficient of resistance using cathode sputtering
US3736242A (en) * 1968-01-31 1973-05-29 Bell Telephone Labor Inc Sputtering technique
US3664931A (en) * 1970-07-27 1972-05-23 Dieter Gerstenberg Method for fabrication of thin film capacitor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114086122A (en) * 2021-11-26 2022-02-25 江苏科技大学 Ceramic-based gradient plating layer based on high film-substrate binding force on copper substrate and preparation method thereof
CN114086122B (en) * 2021-11-26 2023-06-20 江苏科技大学 Ceramic-based gradient coating based on high film-based bonding force on copper substrate and preparation method

Also Published As

Publication number Publication date
US4016061A (en) 1977-04-05

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