US9606038B2 - Particle count measurement device - Google Patents

Particle count measurement device Download PDF

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Publication number
US9606038B2
US9606038B2 US14/402,611 US201214402611A US9606038B2 US 9606038 B2 US9606038 B2 US 9606038B2 US 201214402611 A US201214402611 A US 201214402611A US 9606038 B2 US9606038 B2 US 9606038B2
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aerosol
ion trap
particle
particles
particle count
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US20150102822A1 (en
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Daiji Okuda
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Shimadzu Corp
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Shimadzu Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0266—Investigating particle size or size distribution with electrical classification
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/017—Combinations of electrostatic separation with other processes, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02—Plant or installations having external electricity supply
    • B03C3/04—Plant or installations having external electricity supply dry type
    • B03C3/08—Plant or installations having external electricity supply dry type characterised by presence of stationary flat electrodes arranged with their flat surfaces parallel to the gas stream
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02—Plant or installations having external electricity supply
    • B03C3/04—Plant or installations having external electricity supply dry type
    • B03C3/12—Plant or installations having external electricity supply dry type characterised by separation of ionising and collecting stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/38—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/41—Ionising-electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/45—Collecting-electrodes
    • B03C3/47—Collecting-electrodes flat, e.g. plates, discs, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C2201/00—Details of magnetic or electrostatic separation
    • B03C2201/06—Ionising electrode being a needle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C2201/00—Details of magnetic or electrostatic separation
    • B03C2201/24—Details of magnetic or electrostatic separation for measuring or calculating parameters, efficiency, etc.
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0038—Investigating nanoparticles

Definitions

  • the present invention relates to a device for measuring the particle count in an aerosol, and for example, relates to a device for mainly measuring the particle count of particles that are about 100 nm or smaller.
  • An aerosol is a colloid whose dispersion medium is gas, and whose dispersoid is liquid or solid. When the dispersoid is liquid, the aerosol is fog, mist, cloud or the like, and when the dispersoid is solid, it is dust, smoke or the like.
  • Measurement of elemental components of fine particles in the aerosol has a significant meaning in the research related to evaluation of the environmental state, health effect and the like.
  • the measurement of the aerosol there is, for example, air pollution measurement.
  • Exhaust gas from the combustion engine of a vehicle and flue gas from an industrial plant which cause environmental pollution or air pollution in recent years include sulfur compounds (SO x , H 2 S, etc.), nitrogen compounds (NO x , NH 3 , etc.), hydrocarbons, and the like, and these turn into hydrosulfate or nitrate by chemical reaction or photochemical reaction, absorb the water vapor in the air, and become a liquid aerosol.
  • This method includes two modes.
  • the first mode is for positively or negatively charging particles (aerosol) in a gaseous phase by DC corona discharge or the like and collecting the charged particles on an electrode, and measuring a charge amount thereof as a current value. Then, the particle count or the particle surface area is estimated based on a relational expression between current and the particle count or between current and the particle surface area prepared in advance (see Patent Documents 1 and 2).
  • the second mode is developed as an improvement of the first mode. According to the second mode, particles are not collected after being charged, and the charge amount removed from a spatial region by the charged particles is measured as the current (see Patent Document 3). This mode is characteristic in that, since the charged particles do not have to be collected, maintenance of a detection section is easy.
  • the second mode ionizes the air by high voltage DC discharge and mixes the generated unipolar ions with the particles in an aerosol to thereby charge the particles by diffusion. Then, when a flow including the charged particles passes through a space, a predetermined electric field is applied to the space, and gas ions smaller than the particles are collected and removed. On the other hand, the charged particles which are not collected in the space move out of the spatial region. The charge amount that is moved out by the charged particles from the spatial region at that time is measured.
  • Patent Document 1 U.S. Pat. No. 7,066,037
  • Patent Document 2 US 2006/0156791
  • Patent Document 3 WO 2009/109688 A
  • the present invention relates to improvement of the second mode described above.
  • the second mode the difference between the charge amount flowing into a measurement device and the charge amount flowing out of the measurement device is measured, and thus, the amount of particles which were charged before flowing into the measurement device is not measured. Therefore, if the charged amount of the particles flowing in is not known, accurate measurement cannot be performed.
  • the present invention has its aim to enable accurate measurement of the particle count in an aerosol which is the target of measurement, even if the aerosol which is the target of measurement includes particles which were charged before flowing into a measurement device, and even if the charged amount of the charged particles is unknown.
  • the present invention is a particle count measurement device for measuring a particle count concentration of an aerosol flowing through a measurement region
  • the particle count measurement device including a preprocessing section configured to place the aerosol introduced into the measurement region in an electrical state of any of a neutralized state, a positively charged state or a negatively charged state, a unipolar charging section inside the measurement region, the unipolar charging section being configured to place the aerosol which has been introduced in either a positively charged state or a negatively charged state that is an electrical state different from at a time of introduction into the measurement region, an ion trap arranged inside the measurement region, on a downstream of the unipolar charging section in terms of a flow of the aerosol, the ion trap including an ion trap electrode for generating an electric field that draws only gas ions in the aerosol, an exhaust mechanism outside the measurement region, the exhaust mechanism being configured to discharge the aerosol from the measurement region at a constant flow rate, and an ammeter for detecting, as a measurement value corresponding to the particle count concentration, a difference between
  • the preprocessing section is a neutralizer, and the particle count concentration of particles that are neutralized by causing the total of the charge amount of particles in the aerosol flowing into the measurement region from the inlet to be substantially zero at all times, that are introduced into the measurement region, that are positively or negatively charged, and that are then made to flow out of the measurement region is measured.
  • the preprocessing section is a discharge neutralizer for placing the aerosol in a neutralized state by AC corona discharge
  • the unipolar charging section is a discharge charger based on unipolar corona discharge, the discharge charger including a DC high-voltage power supply and an electrode.
  • the preprocessing section is a discharge charger for placing the aerosol in a positively charged state by positive DC corona discharge
  • the unipolar charging section is a discharge negative charger based on negative unipolar corona discharge, the discharge negative charger including a negative DC high-voltage power supply and an electrode.
  • the charge state is opposite that of the second aspect. That is, the preprocessing section is a negative charger that performs negative DC discharge, and negatively charges the particles in the aerosol flowing into the measurement region from the inlet, and then, the particles in the aerosol are positively charged at the unipolar charging section. In this case, the particles in the aerosol flow into the measurement region being negatively charged, and flow out of the measurement region being positively charged, and the particle count concentration is thus measured based on the charge amount of the difference.
  • the preprocessing section is a negative charger that performs negative DC discharge, and negatively charges the particles in the aerosol flowing into the measurement region from the inlet, and then, the particles in the aerosol are positively charged at the unipolar charging section.
  • the particles in the aerosol flow into the measurement region being negatively charged, and flow out of the measurement region being positively charged, and the particle count concentration is thus measured based on the charge amount of the difference.
  • the preprocessing section is a discharge charger for placing the aerosol in a negatively charged state by negative DC corona discharge
  • the unipolar charging section is a discharge positive charger based on positive unipolar corona discharge, the discharge positive charger including a positive DC high-voltage power supply and an electrode.
  • the mass flow rate inside the exhaust duct is not constant, and is dependent on the rotational speed of the engine.
  • the exhaust mechanism includes the flow rate adjustment section for making the exhaust flow rate constant, the measurement target gas flows at a constant mass flow rate through the measurement region where the particle count concentration is measured, and the particle count concentration may be stably measured as well.
  • a diffusion filter arranged between the ion trap and an outlet of the measurement region and formed from a conductive mesh for removing charged particles of particle diameters smaller than a predetermined particle diameter.
  • the ammeter may measure a particle count concentration of particles having particle diameters equal to or greater than the predetermined particle diameter by measuring a difference between current supplied by the unipolar charging section and total current flowing into the ion trap and the diffusion filter.
  • a pair of counter electrodes and a classification power supply are provided.
  • the pair of counter electrodes are arranged between the ion trap and an outlet of the measurement region in parallel with a flow of an aerosol.
  • the classification power supply is to generate, at the counter electrodes, an electric field for drawing charged particles having particle diameters smaller than a predetermined particle diameter.
  • the ammeter may measure a particle count concentration of particles having particle diameters equal to or greater than the predetermined particle diameter by measuring a difference between current supplied by the unipolar charging section and total current flowing into the ion trap and the counter electrodes.
  • a pair of counter electrodes, a classification power supply and a classification ammeter are provided.
  • the pair of counter electrodes are arranged between the ion trap and an outlet of the measurement region in parallel with a flow of an aerosol.
  • the classification power supply is to generate, at the counter electrodes, an electric field for drawing charged particles having particle diameters smaller than a predetermined particle diameter.
  • the classification ammeter is to measure current flowing into the counter electrodes. In this case, a particle count concentration of particles having particle diameters greater than the gas ions but smaller than the predetermined particle diameter may also be measured based on a measurement value of the classification ammeter.
  • a particle count concentration of particles having particle diameters in a specific range which is greater than particle diameters to be captured by the ion trap electrode and is smaller than the predetermined particle diameter may be measured.
  • the amount of particles may be correctly measured without being influenced by the original charged state of the particles in the aerosol.
  • the charged state of target particles changes depending on the composition or the generation mechanism of the measurement target particles, reproducible measurement not depending on the initial charged state of the particles is enabled by the present invention, and highly accurate measurement may be performed for various types of aerosols.
  • the particle count measurement device of the present invention may perform measurement with no regard to whether or not a measurement target aerosol includes particles which were charged before flowing into the measurement region.
  • FIG. 1 is a block diagram schematically showing an embodiment.
  • FIG. 2 is a circuit diagram showing the embodiment.
  • FIG. 3 is a diagram concretely showing the embodiment, and shows a cross-sectional diagram of a flow path along a flowing direction together with a circuit diagram.
  • FIG. 4 is a diagram schematically showing a classification section according to another embodiment.
  • FIG. 5 is a diagram schematically showing a classification section according to another embodiment.
  • FIG. 6 is a diagram concretely showing the classification section of FIG. 5 , and shows a cross-sectional diagram of a flow path along a flowing direction together with a circuit diagram.
  • FIG. 7 is a block diagram schematically showing another embodiment.
  • FIG. 1 is a block diagram schematically showing an embodiment.
  • a shield electrode 2 is provided to form a spatial region for measurement of particle count concentration in a measurement target aerosol, and the spatial region is surrounded by the shield electrode 2 .
  • the shield electrode 2 is formed of conductive material, and is grounded so as not to be influenced by electromagnetic waves from outside.
  • the spatial region surrounded by the shield electrode 2 is a measurement region where the difference between flow-in and flow-out of charged particles is to be measured.
  • a unipolar charging section 8 for charging the aerosol introduced from an inlet 4 positioned at the boundary of the measurement region is arranged on the flow path 3 .
  • a DC high-voltage power supply 10 is connected to an electrode of the unipolar charging section 8 , and positive potential or negative potential is applied by the high-voltage power supply 10 in such a way that corona discharge is generated by the electrode of the unipolar charging section 8 .
  • the high-voltage power supply 10 applies positive voltage of about 2 KV to 10 KV on the electrode of the unipolar charging section 8 .
  • gas molecules in the aerosol are ionized by the discharge from the electrode and gas ions are generated, and the generated gas ions come into contact with the particles in the aerosol to charge the particles.
  • the particles are positively charged.
  • an ion trap 12 is arranged on the downstream of the unipolar charging section 8 along the flow direction of the aerosol in the flow path 3 .
  • a DC power supply 14 is connected to an electrode of the ion trap 12 , and an electric field of the opposite polarity from the unipolar charging section 8 is applied.
  • the gas ions have high electrical mobility and are easily trapped by a small electric field, and are thus captured by the ion trap 12 .
  • the DC power supply 14 applies negative voltage of about 1 to 100 V to the electrode of the ion trap 12 so that negative potential is applied to the electrode of the ion trap 12 .
  • the gas ions remaining in the aerosol, among the gas ions generated by the unipolar charging section 8 are captured by the electrode of the ion trap 12 .
  • the unipolar charging section 8 , the DC high-voltage power supply 10 , the ion trap 12 , and the DC power supply 14 are arranged inside the shield electrode 2 so as to avoid influence of disturbance.
  • a guard electrode 16 for measuring entering and leaving of charged particles into and from the shield electrode 2 is provided, and a microammeter 18 provided inside the shield electrode 2 is connected to the guard electrode 16 to measure the entering and leaving of the charged particles.
  • a flow path portion 3 a inside the shield electrode 2 may be used also as the guard electrode 16 , as in the embodiment shown in FIGS. 2 and 3 described later.
  • a COM line of the DC high-voltage power supply 10 and the DC power supply 14 arranged inside the shield electrode 2 is connected to the guard electrode 16 , and the microammeter 18 measures the current between the guard electrode 16 and the shield electrode 2 . That is, the microammeter 18 is to measure the current value of the charge particles charged at the unipolar charging section 8 and carried out of the measurement region surrounded by the shield electrode 2 .
  • a discharge neutralizer 24 is arranged as a preprocessing section in a portion between an aerosol supply port 22 and before entering of the measurement region so as to neutralize the aerosol.
  • a high-voltage high-frequency power supply 26 is connected to an electrode of the neutralizer 24 , and by generating positive gas ions and negative gas ions from the air in the aerosol, the charge of the particles in the aerosol, including originally charged particles included in the aerosol, is neutralized. Voltage of 2 to 10 KV is applied at 50 Hz to 1 MHz to the electrode of the neutralizer 24 by the high-voltage high-frequency power supply 26 .
  • An ion trap 28 is provided in a portion between the neutralizer 24 and before entering of the region of the shield electrode 2 for removing gas ions remaining after neutralization.
  • the ion trap 28 is provided with a pair of electrodes, and an electric field is applied between the electrodes by a DC power supply 30 . Gas ions are captured by the electrodes by the electric field, and a state is achieved where there are no remaining gas ions in the aerosol to be supplied to the measurement region. If neutralization is ideally performed by the neutralizer 24 , the ion trap 28 would not be necessary, but in reality, gas ions will remain. If remaining gas ions enter the measurement region, these will become noise current, and thus, the ion trap 28 is desirably provided. Voltage of 1 to 100 V is applied between the pair of electrodes of the ion trap 28 by the DC power supply 30 .
  • a vacuum pump 36 for drawing the aerosol into the measurement region is arranged.
  • a filter 32 for removing particles in the aerosol and a critical orifice 34 for causing gas from which particles have been removed to flow at a constant flow rate are arranged from the outlet 6 side.
  • the flow rate of aerosol to be introduced into the measurement region is controlled to be constant by the critical orifice 34 and the vacuum pump 36 .
  • the diameter of the orifice of the critical orifice 34 is, for example, 100 to 500 ⁇ m and the flow rate is set to be, for example, about 1 to 10 L per minute.
  • the aerosol to be introduced into the measurement region is neutralized.
  • neutralized particles flow into the guard electrode 16
  • positively charged gas ions are generated by discharge at the unipolar charging section 8 by the high-voltage power supply 10 .
  • These gas ions attach, by being diffused, to the particles which have flown in to charge the particles.
  • an appropriate DC electric field is applied at the ion trap 12 on the downstream, the remaining gas ions after neutralization are captured and collected, but most particles with diameters of, for example, about 5 nm or more flow further downstream without being captured.
  • the current flowing into the microammeter 18 via the guard electrode 16 becomes equal to the amount of current carried outside the guard electrode 16 by the charged particles.
  • the gas flow rate is controlled by the critical orifice 34 and the vacuum pump 36 to be a constant flow rate, and thus, the charged amount of particles in a unit volume is calculated based on the flow rate and the value of current measured by the microammeter 18 .
  • Conversion from the charged amount to the amount of particles is dependent on the charging characteristics of the particles including the characteristics of a charging device, but by experimentally determining the conversion coefficient for the conversion in advance, the particle count estimation value may be obtained in real-time.
  • the critical orifice 34 is used to make the flow rate of a sample flowing through the measurement region constant, the flow rate may be stabilized by a structure which is simple when compared to a flow rate adjustment mechanism such as a mass flow controller.
  • the flow path 3 is cylindrical, and is formed of conductive material.
  • the flow path 3 includes a portion 3 a inside the measurement region, and a portion 3 b of the preprocessing section on the inlet side where the discharge neutralizer 24 is arranged.
  • the portions 3 a and 3 b are electrically separated by a ring-shaped insulating member 3 c .
  • an electrode 24 a is connected to the AC high-voltage power supply 26 .
  • the electrode 24 a is attached inside the flow path 3 b while being insulated from the flow path 3 b by an insulating member 24 b .
  • an electrode 28 a is attached inside the flow path 3 b while being insulated from the flow path 3 b by an insulating member 28 c .
  • the DC power supply 30 for supplying ion trap power being connected between the electrode 28 a and the flow path 3 b , the flow path 3 b is the other electrode of the ion trap 28 .
  • An electric field for the ion trap is applied between the electrode 28 a and the flow path 3 b.
  • An electrode 8 a of the unipolar charging section 8 is attached inside the flow path 3 a while being insulated from the flow path 3 a by an insulating member 8 b .
  • An electrode 13 of the ion trap 12 is also attached inside the flow path 3 a while being insulated from the flow path 3 a by an insulating member 12 b .
  • the flow path 3 a is electrically separated on the inside and the outside of the measurement region by a ring-shaped insulating member 3 d at a boundary portion on the downstream side of the measurement region.
  • the flow path 3 a serves also as the guard electrode 16 .
  • a terminal on the positive electrode side of the DC high-voltage power supply 10 is connected to the electrode 8 a of the unipolar charging section 8
  • a terminal on the negative electrode side of the ion trap power supply 14 is connected to the electrode 13 of the ion trap 12
  • the COM line of the power supplies 10 and 14 is connected to the flow path 3 a configuring the guard electrode 16 .
  • Power is supplied to the high-voltage power supply 10 of the unipolar charging section 8 from a DC-high frequency conversion circuit 20 provided outside the shield electrode 2 via a transformer 21 a and an AC-DC converter 21 b . Power is similarly supplied to the DC power supply 14 for the ion trap via the transformer 21 a and the AC-DC converter 21 b . It is important that, with respect to the transformer 21 a , the leakage of direct current is small.
  • the DC-high frequency conversion circuit 20 is installed inside a shield case, the shield case and the circuit COM of the DC-high frequency conversion circuit 20 are connected to the flow path 3 a , and the transformer 21 a is also installed inside the shield case, and the shield case of the transformer 21 a is connected to the flow path 3 a .
  • the transformer 21 a is selected in such a way that the DC resistance between a primary circuit and a second circuit is about 1000 T ⁇ or more, and that a sufficient creepage distance is maintained. Moreover, to prevent reduction in impedance due to moisture or dust, the transformer 21 a is desirably accommodated in an airtight container, and the inside of the container is desirably kept dry.
  • DC power is supplied by an AC-DC converter 44 .
  • a battery may be used instead of the AC-DC converter 44 . If a battery is used, leakage of direct current may be easily coped with.
  • the microammeter 18 including a current-voltage conversion circuit is connected between the flow path 3 a serving also as the guard electrode 16 and the shield electrode 2 .
  • the output of the microammeter 18 is extracted and is converted into a particle count or the particle surface area.
  • a diffusion filter 50 may be provided inside the flow path 3 near the outlet 6 inside the measurement region.
  • the diffusion filter serves to limit the range of diameters of particles that flow out to, for example, about 20 nm or more.
  • a conductive mesh may be provided in the flow path and be connected to the guard electrode 16 to realize the diffusion filter 50 .
  • the relationship between the mesh size and the diameter of a charged particle to be captured by the mesh may be stated as below.
  • ⁇ is the filling rate (the proportion of the microcylinders to the flow path)
  • FIG. 3 shows an example of a concrete configuration of the present embodiment.
  • the flow paths 3 a and 3 b are cylindrical and are formed of conductive material, and are joined by the insulating member 3 c , but are electrically separated from each other.
  • the flow path 3 b is grounded.
  • the flow path 3 b is a preprocessing section. One end of the flow path 3 b is closed, and the discharge neutralizer 24 is arranged on the side of this end portion, and on the side of the flow path 3 a , the ion trap 28 is arranged being adjacent to the neutralizer 24 .
  • the aerosol supply port 22 through which an aerosol is supplied is provided with the neutralizer 24 , and the electrode 24 a for neutralization by AC corona discharge is arranged inside the neutralizer 24 .
  • the electrode 24 a is insulated from the flow path 3 b by the insulating member 24 b , and is connected to the AC high-voltage power supply 26 .
  • the neutralizer 24 and the ion trap 28 are linked through an opening provided at a position facing the electrode 24 a of the neutralizer 24 , and the ion trap electrode 28 a having an area greater than the opening is arranged inside the ion trap 28 , at a position facing the opening.
  • the ion trap electrode 28 a is insulated from the flow path 3 b by the insulating member 28 c , and is connected to the DC power supply 30 .
  • the flow path 3 b which is grounded, is the other electrode of the ion trap 28 .
  • An electric field for the ion trap is applied between the electrode 28 a and the flow path 3 b .
  • An aerosol neutralized by the neutralizer 24 is led into the ion trap 28 through the opening, and comes into contact with the electrode 28 a.
  • the flow path 3 a where the unipolar charging section 8 and the ion trap 12 are arranged is arranged inside the shield electrode 2 formed of conductive material, and the flow path 3 a and the shield electrode 2 are insulated by the insulating members 3 c and 3 d .
  • the shield electrode 2 is grounded, and is formed into a shape of a container covering the flow path 3 a .
  • Both the shield electrode 2 and the flow path 3 b of the preprocessing section are grounded, and thus, they may be connected while being conducted with each other, but in the present embodiment, they are insulated from each other.
  • the flow path 3 a serves also as the guard electrode.
  • the unipolar charging section 8 is arranged inside the flow path 3 a , on the side of the preprocessing section, and the electrode 8 a is arranged at the center of the unipolar charging section 8 , that is, on the center axis of the flow path 3 a .
  • the electrode 8 a is insulated from the flow path 3 a by the insulating member 8 b , and is connected to the DC high-voltage power supply 10 arranged on the outside of the flow path 3 a .
  • the ion trap 28 and the unipolar charging section 8 are linked by inlet flow paths 4 that are provided passing through the shield electrode 2 and the insulating member 3 c .
  • a plurality of inlet flow paths 4 are provided through the wall at the boundary of the ion trap 28 and the unipolar charging section 8 , and are circumferentially arranged at regular intervals around the center axis of the flow path 3 a .
  • An aerosol from the ion trap 28 is led to the unipolar charging section 8 through the inlet flow paths 4 .
  • a wall 8 c formed of conductive material is provided at the boundary of the unipolar charging section 8 and the ion trap 12 on the downstream, and an opening is provided at the center of the wall.
  • the wall 8 c is conducted with the flow path 3 a , DC high voltage of about several KV is applied between the electrode 8 a and the wall 8 c by the DC high-voltage power supply 10 , and particles in the aerosol led to the unipolar charging section 8 are charged to the positive potential.
  • the ion trap 12 is provided inside the flow path 3 a , adjacent to and on the downstream side of the unipolar charging section 8 .
  • the columnar ion trap 13 is arranged in the ion trap 12 , on the center axis of the flow path 3 a , and the ion trap electrode 13 is insulated from the flow path 3 a by an insulating member.
  • the ion trap electrode 13 is connected to the terminal on the negative electrode side of the ion trap power supply 14 arranged outside the flow path 3 a , and voltage of about ⁇ 100 V is applied thereto.
  • the terminal on the positive electrode side of the ion trap power supply 14 is connected to the flow path 3 a.
  • a plurality of through holes are formed in the insulating members supporting the ion trap electrode 13 on the upstream side and the downstream side of the flow path 3 a , and the through holes are circumferentially arranged at regular intervals around the center axis of the flow path 3 a .
  • the aerosol from the unipolar charging section 8 is led to the ion trap 12 through the through holes on the upstream side.
  • remaining gas ions in the aerosol are drawn to the ion trap electrode 13 , and charged particles leaves the ion trap 12 through the through holes on the downstream side without being drawn to the ion trap electrode 13 .
  • the outlet 6 is provided downstream of the ion trap 12 , through the shield electrode 2 .
  • the conductive materials forming the flow paths 3 a and 3 b , and the shield electrode 2 may be the same or different.
  • the materials are not particularly restricted, and an appropriate material such as copper, aluminum, stainless steel or the like may be used.
  • the DC high-voltage power supply 10 , the AC-DC converter 21 b , the ammeter 18 , and the ion trap power supply 14 are arranged between the flow path 3 a and the shield electrode 2 , and the connection among these and the flow path 3 a and the shield electrode 2 is as described above with reference to FIG. 2 .
  • the DC high-voltage power supply 10 , the AC-DC converter 21 b , and the ion trap power supply 14 include a shield function.
  • Classification electrodes 52 a and 52 b as shown in FIG. 4 may be arranged, instead of the diffusion filter 50 , inside the flow path 3 , at the position of the diffusion filter 50 shown in FIG. 2 , while being electrically insulated from the flow path 3 .
  • An electric field that draws charged particles of particle diameters having predetermined electrical mobility is applied between the classification electrodes 52 a and 52 b by a classification power supply 54 .
  • a microammeter 56 including a current-voltage conversion circuit is connected to one of the electrodes 52 b , to detect current which has been drawn and flown in.
  • charged particles of particle diameters equal to or smaller than a predetermined particle diameter are captured downstream of the outlet 6 of the flow path 3 a of the embodiment of FIG. 2 .
  • a flow path 3 e that is connected to the outlet 6 of the flow path 3 a is arranged in a region surrounded by a shield electrode 2 a formed of conductive material.
  • the flow path 3 e is also formed of conductive material, and serves also as a guard electrode.
  • the shield electrode 2 a may be conducted with the shield electrode 2 , but the flow path 3 e is electrically separated from the flow path 3 a .
  • a pair of classification electrodes 60 and 62 is arranged inside the flow path 3 e , and a predetermined electric field is applied between the classification electrodes 60 and 62 by the classification power supply 54 in such a way that charged particles having electrical mobility equal to or higher than predetermined electrical mobility are drawn in.
  • the voltage to be applied to the classification electrodes 60 and 62 is set according to the particle diameters of charged particles that are to be drawn in, and is, for example, 1 KV.
  • a microammeter 56 including a current-voltage conversion circuit is connected between the flow path 3 e and the shield electrode 2 a .
  • the microammeter 56 is arranged inside the space surrounded by the shield electrode 2 a together with the classification power supply 54 .
  • a case of the classification power supply 54 is connected to the flow path 3 e , to form a part of the guard electrode.
  • power is supplied to the classification power supply 54 by a transformer, but in reality, power is supplied via the same transformer 21 a and AC-DC converter 21 b as in the case of power supply to the DC high-voltage power supply 10 shown in FIG. 2 , or power is supplied by a different but similar transformer and an AC-DC converter.
  • An operational amplifier with high gain is used for the current-voltage conversion circuit of the microammeter 56 , and negative feedback is applied by a resistor that performs current-voltage conversion.
  • the flow path 3 e and the shield electrode 2 a have approximately the same potential (a potential difference of about 1 mV or less) due to imaginary short of the operational amplifier, and thus, the charge that is accumulated by the electrostatic capacitance between the flow path 3 e and the shield electrode 2 a is small, and noise caused by the variation in the charge amount is small.
  • the particle count of particles of particle diameters equal to or smaller than a predetermined particle diameter specified by the classification voltage that is applied by the classification power supply 54 , or of particle diameters greater than the predetermined particle diameter, among the charged particles which have passed through the particle count measurement device of FIG. 2 or FIG. 3 , may be counted.
  • FIG. 6 is a concrete example of the device of FIG. 5 .
  • the flow path 3 e formed of cylindrical conductive material is arranged within the region surrounded by the shield electrode 2 a , and the flow path 3 e is electrically insulated from the shield electrode 2 a by an insulating member.
  • a columnar electrode 60 a is arranged inside the flow path 3 e , along the center axis of the flow path 3 e .
  • the electrode 60 a is supported by insulating members at both ends thereof, and is electrically insulated from the flow path 3 e .
  • the electrode 60 a and the flow path 3 e correspond to the classification electrodes 60 and 62 of the device of FIG. 5 .
  • An inlet 70 is provided at one end of the flow path 3 e , and an outlet 72 is provided at the other end.
  • the inlet 70 is to be connected to an outlet 16 of the particle count measurement device of FIG. 3 , and the shield electrode 2 a is conducted with the shield electrode 2 and is grounded by the inlet 70 and the outlet 16 being connected.
  • a plurality of holes that are circumferentially arranged around the center axis of the flow path 3 e are opened to the insulating members supporting both ends of the electrode 60 a so that gas including charged particles entering from the inlet 70 flows along the electrode 60 a .
  • Gas entering from the inlet 70 enters the space where the electrode 60 a is arranged through the holes on the upstream side, and leaves from the outlet 72 through the holes on the downstream side after flowing along the electrode 60 a.
  • the electrode 60 a is connected to a negative electrode terminal of the classification power supply 54 through the insulating member, and the flow path 3 e is connected to a positive electrode terminal of the classification power supply 54 .
  • the classification power supply 54 is arranged in the region surrounded by the shield electrode 2 a , and as in FIG. 3 , power is supplied to the classification power supply 54 via an AC-DC converter 58 b from a secondary side 58 a of a transformer. Voltage in a range of, for example, 10 V to 1 KV is applied by the classification power supply 54 to between the electrode 60 a and the flow path 3 e according to the particle diameters of charged particles to be classified.
  • the classification power supply 54 and the AC-DC converter 58 b include a shield function.
  • the microammeter 56 including a current-voltage converter is connected between the flow path 3 e and the shield electrode 2 a .
  • the microammeter 56 is also arranged within the region surrounded by the shield electrode 2 a.
  • the ion trap power supply 14 may also apply voltage to the ion trap electrode 13 in such a way that, in addition to gas ions, charged particles of relatively small particle diameters are also drawn to the ion trap 12 .
  • the particle count concentration of particles having particle diameters in a specific range which is greater than the particle diameters of charged particles to be captured by the ion trap electrode 13 and is smaller than the predetermined particle diameter in the embodiment of FIG. 5 or 6 may be measured.
  • FIG. 7 is an embodiment of a case where the preprocessing section is a positive charger that performs positive DC discharge.
  • a positive charger 24 a receives supply of power of positive 2 KV to 10 KV from a DC high-voltage power supply 26 a , and positively charges particles in an aerosol flowing into the measurement region surrounded by the shield electrode 2 .
  • the positive charger 24 a is, for example, a discharge positive charger based on positive unipolar corona discharge.
  • a unipolar charging section 8 a receives supply of power of negative 2 KV to 10 KV from a DC high-voltage power supply 10 a , and charges the particles in the aerosol to a negatively charged state.
  • the unipolar charging section 8 a is, for example, a discharge negative charger based on negative unipolar corona discharge.
  • An ion trap 12 a receives supply of power of positive 1 V to 100 V from a DC power supply 14 a , and captures the gas ions in the aerosol.
  • FIG. 8 is an embodiment of a case where the preprocessing section is a positive charger that performs negative DC discharge.
  • a negative charger 24 b receives supply of power of negative 2 KV to 10 KV from a DC high-voltage power supply 26 b , and negatively charges particles in an aerosol flowing into the measurement region.
  • the negative charger 24 b is, for example, a discharge negative charger based on negative unipolar corona discharge.
  • the unipolar charging section 8 , the DC high-voltage power supply 10 , the ion trap 12 , the DC power supply 14 , and other structures and operations are the same as those of the embodiments of FIGS. 1 and 2 .
  • particles in an aerosol flow into the measurement region being negatively charged, and flow out of the measurement region being positively charged, and thus, the particle count concentration is measured based on the charge amount of the difference.

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190039076A1 (en) * 2015-09-08 2019-02-07 Rutgers, The State University Of New Jersey Personal Electrostatic Bioaerosol Sampler with High Sampling Flow Rate
US10429290B2 (en) * 2016-09-29 2019-10-01 Ngk Spark Plug Co., Ltd. Particulate measurement apparatus and particulate measurement system
US10436752B2 (en) * 2016-09-28 2019-10-08 Ngk Spark Plug Co., Ltd. Particulate measurement apparatus and particulate measurement system

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011002936A1 (de) * 2011-01-20 2012-07-26 Ford Global Technologies, Llc Partikelsensor, Abgassystem und Verfahren zum Bestimmen von Partikeln im Abgas
WO2013183652A1 (fr) * 2012-06-06 2013-12-12 株式会社島津製作所 Dispositif de mesure de classification de particules fines, dispositif de création d'échantillon ayant une concentration de particules uniforme et dispositif formant film de nanoparticules
GB201306913D0 (en) 2013-04-16 2013-05-29 Univ Southampton A method of electrically measuring the size of individual particles flowing in a liquid
GB201306914D0 (en) * 2013-04-16 2013-05-29 Univ Southampton Apparatus for electrically measuring individual particles flowing in a liquid
JP6255244B2 (ja) * 2014-01-08 2017-12-27 日本特殊陶業株式会社 微粒子センサ
FR3039434B1 (fr) * 2015-07-28 2018-02-16 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de collecte de particules contenues dans un aerosol, muni d'electrometres pour determiner la concentration et la granulometrie des nanoparticules
EP3371582A4 (fr) * 2015-11-02 2020-02-12 Pegasor Oy Appareil et procédé de mesure de caractéristiques de flux de particules
US11117138B2 (en) 2016-02-19 2021-09-14 Washington University Systems and methods for gas cleaning using electrostatic precipitation and photoionization
JP6626406B2 (ja) 2016-05-24 2019-12-25 日本特殊陶業株式会社 微粒子センサ
WO2018012421A1 (fr) * 2016-07-12 2018-01-18 日本碍子株式会社 Détecteur de nombre de particules fines
CN107138277B (zh) * 2017-04-20 2018-10-23 中国科学院合肥物质科学研究院 集成自由离子捕集功能的单极性颗粒物荷电装置及方法
DE112018002030T5 (de) * 2017-05-15 2020-01-16 Ngk Insulators, Ltd. Partikelzähler
WO2019012185A1 (fr) 2017-07-14 2019-01-17 Pegasor Oy Procédé et appareil de surveillance de particules
DE102017212789A1 (de) * 2017-07-25 2019-01-31 Robert Bosch Gmbh Partikelsensor und Herstellungsverfahren hierfür
DE102017213522A1 (de) * 2017-08-03 2019-02-07 Robert Bosch Gmbh Partikelsensor und Betriebsverfahren hierfür
WO2019049566A1 (fr) * 2017-09-06 2019-03-14 日本碍子株式会社 Élément de détection de microparticules et détecteur de microparticules
CN108007835A (zh) * 2017-12-22 2018-05-08 上海胜战科技发展有限公司 一种颗粒粒度和浓度测量方法及其装置
CN111656159A (zh) * 2018-02-08 2020-09-11 日本碍子株式会社 微粒检测器
AT523371B1 (de) * 2019-12-18 2021-11-15 Avl List Gmbh Vorrichtung und Verfahren zur Messung von Aerosolen
CN111402540B (zh) * 2020-02-25 2021-08-24 王勇强 吸气式感烟火灾探测装置、方法及设备

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3718029A (en) 1971-01-25 1973-02-27 Gourdine Syst Inc Electrostatic mass per unit volume dust monitor
US4531402A (en) * 1983-05-02 1985-07-30 Battelle Development Corp. Apparatus and method for measuring the concentration of large particles in a gas
JPH0549970A (ja) 1991-08-19 1993-03-02 Japan Synthetic Rubber Co Ltd 静電分級装置
US6991045B2 (en) * 2001-10-24 2006-01-31 Shell Oil Company Forming openings in a hydrocarbon containing formation using magnetic tracking
US7066037B2 (en) 2001-08-20 2006-06-27 Dekati Oy Method for measuring properties of a particle distribution
US20060156791A1 (en) 2003-06-24 2006-07-20 Dekati Oy Method and a sensor device for measuring particle emissions from the exhaust gases of a combustion engine
JP2006250576A (ja) 2005-03-08 2006-09-21 Shimadzu Corp 粒度分布測定装置
WO2009109688A1 (fr) 2008-03-04 2009-09-11 Pegasor Oy Procédé et appareil de mesure de particules

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5399415B2 (ja) * 2008-02-06 2014-01-29 ビーエーエスエフ ソシエタス・ヨーロピア 多元的エアロゾル特性決定のための測定システム
WO2010061327A1 (fr) * 2008-11-25 2010-06-03 Koninklijke Philips Electronics N.V. Capteur destiné à détecter des particules en suspension dans l’air
CN102536406B (zh) * 2012-02-10 2014-02-12 金坛华诚电子有限公司 一种颗粒物传感器及其测量方法

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3718029A (en) 1971-01-25 1973-02-27 Gourdine Syst Inc Electrostatic mass per unit volume dust monitor
US4531402A (en) * 1983-05-02 1985-07-30 Battelle Development Corp. Apparatus and method for measuring the concentration of large particles in a gas
JPH0549970A (ja) 1991-08-19 1993-03-02 Japan Synthetic Rubber Co Ltd 静電分級装置
US7066037B2 (en) 2001-08-20 2006-06-27 Dekati Oy Method for measuring properties of a particle distribution
US6991045B2 (en) * 2001-10-24 2006-01-31 Shell Oil Company Forming openings in a hydrocarbon containing formation using magnetic tracking
US20060156791A1 (en) 2003-06-24 2006-07-20 Dekati Oy Method and a sensor device for measuring particle emissions from the exhaust gases of a combustion engine
JP2007514923A (ja) 2003-06-24 2007-06-07 デカティ オイ 燃焼機関の排気ガスからの粒子放出を測定する方法およびセンサ装置
JP2006250576A (ja) 2005-03-08 2006-09-21 Shimadzu Corp 粒度分布測定装置
WO2009109688A1 (fr) 2008-03-04 2009-09-11 Pegasor Oy Procédé et appareil de mesure de particules
US20110050243A1 (en) * 2008-03-04 2011-03-03 Pegasor Oy Particle Measurement Process and Apparatus
JP2011513742A (ja) 2008-03-04 2011-04-28 ぺガソー オーワイ 粒子測定方法及び装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Extended Supplementary European Search Report dated Dec. 18, 2015, issued in counterpart European Patent Application No. 12877345.4 (10 pages).
International Search Report dated Aug. 7, 2012, issued in corresponding application No. PCT/JP2012/062922.

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190039076A1 (en) * 2015-09-08 2019-02-07 Rutgers, The State University Of New Jersey Personal Electrostatic Bioaerosol Sampler with High Sampling Flow Rate
US10919047B2 (en) * 2015-09-08 2021-02-16 Rutgers, The State University Of New Jersey Personal electrostatic bioaerosol sampler with high sampling flow rate
US10436752B2 (en) * 2016-09-28 2019-10-08 Ngk Spark Plug Co., Ltd. Particulate measurement apparatus and particulate measurement system
US10429290B2 (en) * 2016-09-29 2019-10-01 Ngk Spark Plug Co., Ltd. Particulate measurement apparatus and particulate measurement system

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US20150102822A1 (en) 2015-04-16
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CN104285140B (zh) 2016-08-24
JP5817929B2 (ja) 2015-11-18
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JPWO2013175548A1 (ja) 2016-01-12
EP2853882A4 (fr) 2016-01-20

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