US9250202B2 - Nanopore molecule detection system and molecule detection method based on potential measurement of insulated conductive thin layer - Google Patents
Nanopore molecule detection system and molecule detection method based on potential measurement of insulated conductive thin layer Download PDFInfo
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- US9250202B2 US9250202B2 US13/674,344 US201213674344A US9250202B2 US 9250202 B2 US9250202 B2 US 9250202B2 US 201213674344 A US201213674344 A US 201213674344A US 9250202 B2 US9250202 B2 US 9250202B2
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- nanopore
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- 238000005259 measurement Methods 0.000 title description 11
- 238000001514 detection method Methods 0.000 title description 4
- 239000002052 molecular layer Substances 0.000 claims abstract description 132
- 239000002245 particle Substances 0.000 claims abstract description 99
- 230000005684 electric field Effects 0.000 claims abstract description 13
- 230000005012 migration Effects 0.000 claims abstract description 7
- 238000013508 migration Methods 0.000 claims abstract description 7
- 108020004414 DNA Proteins 0.000 claims description 41
- 238000000034 method Methods 0.000 claims description 21
- 102000053602 DNA Human genes 0.000 claims description 12
- 108020004682 Single-Stranded DNA Proteins 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910021389 graphene Inorganic materials 0.000 claims description 3
- 238000012163 sequencing technique Methods 0.000 description 7
- 239000002090 nanochannel Substances 0.000 description 5
- 238000001712 DNA sequencing Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- OPTASPLRGRRNAP-UHFFFAOYSA-N cytosine Chemical compound NC=1C=CNC(=O)N=1 OPTASPLRGRRNAP-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- UYTPUPDQBNUYGX-UHFFFAOYSA-N guanine Chemical compound O=C1NC(N)=NC2=C1N=CN2 UYTPUPDQBNUYGX-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- RWQNBRDOKXIBIV-UHFFFAOYSA-N thymine Chemical compound CC1=CNC(=O)NC1=O RWQNBRDOKXIBIV-UHFFFAOYSA-N 0.000 description 2
- 229930024421 Adenine Natural products 0.000 description 1
- GFFGJBXGBJISGV-UHFFFAOYSA-N Adenine Chemical compound NC1=NC=NC2=C1N=CN2 GFFGJBXGBJISGV-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910020776 SixNy Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229960000643 adenine Drugs 0.000 description 1
- 230000003190 augmentative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229940104302 cytosine Drugs 0.000 description 1
- 230000002068 genetic effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229940113082 thymine Drugs 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/483—Physical analysis of biological material
- G01N33/487—Physical analysis of biological material of liquid biological material
- G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
- G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
Definitions
- the present disclosure relates to a particle detector and a method for detecting a particle. More particularly, the disclosure relates to a particle detector and a method for detecting a particle based on nanopores, wherein a conductive nanolayer and nanopores are used, capable of detecting a particle with high signal-to-noise ratio and resolution and scanning a sample without mechanical movement of the conductive nanolayer.
- DNA sequencing The most important performance indices in DNA (or RNA, hereinafter simply referred to as DNA) sequencing are read length and throughput. Recently, the direct DNA sequencing technique based on measurement of electrical current in nanopores or nanochannels is drawing attentions, because of its advantages of high spatial resolution, high throughput and theoretically unlimited read length.
- the current measurement is performed axially or transversely.
- the axial current measurement is a method of measuring ionic current through the nanopores or nanochannels.
- the system configuration for the axial current measurement is relatively simple, deconvolution of signals is difficult because signals of a plurality of bases are obtained at once since the length of the nanopores or nanochannels is much longer than the distance between each DNA base, i.e. 0.33 nm.
- electrodes arranged perpendicularly to the nanopores or nanochannels are used to measure the change in tunneling current occurring as DNA passes between the electrodes. Although high spatial resolution can be achieved by the transverse current measurement, related procedures are relatively complicated.
- An aspect of the present disclosure is directed to providing a particle detector and a method for detecting a particle based on nanopores, wherein a conductive nanolayer and nanopores are used, capable of detecting a particle with high signal-to-noise ratio and resolution and scanning a sample without mechanical movement of the conductive nanolayer.
- the particle detector comprises: a conductive nanolayer; insulating nanolayers attached to both sides of the conductive nanolayer; a nanopore formed to penetrate the conductive nanolayer and the insulating nanolayers so as to provide a migration path for a sample particle; a power supply unit configured to apply an electric field between both ends of the nanopore so as to apply a potential to the conductive nanolayer; and an electric signal measuring unit electrically connected to the conductive nanolayer and configured to measure the potential change in the conductive nanolayer induced by the sample particle as the sample particle migrates through the nanopore.
- the electric signal measuring unit may be configured to measure the potential change in the conductive nanolayer resulting from partial change in resistance in the nanopore caused by the sample particle or the potential change in the conductive nanolayer resulting from charge induced in the conductive nanolayer by the charge of the sample particle.
- the conductive nanolayer may comprise a plurality of patterns separated from each other, and the nanopore may comprise a plurality of nanopores formed respectively in the plurality of patterns.
- the electric signal measuring unit may be configured to measure the potential change in the plurality of patterns independently.
- the electric signal measuring unit may be configured to measure the potential change in the conductive nanolayer occurring sequentially as a single-stranded DNA (ssDNA) or a DNA to which a label is attached passes through the nanopore so as to analyze the base sequence of the DNA.
- ssDNA single-stranded DNA
- the method for detecting a particle comprises: providing a conductive nanolayer, insulating nanolayers attached to both sides of the conductive nanolayer, and a nanopore formed to penetrate the conductive nanolayer and the insulating nanolayers; applying a potential to the conductive nanolayer by applying an electric field between both ends of the nanopore; migrating a sample particle through the nanopore; and measuring the potential change in the conductive nanolayer induced by the sample particle as the sample particle migrates through the nanopore.
- the measuring of the potential change in the conductive nanolayer may comprise measuring the potential change in the conductive nanolayer resulting from partial change in resistance in the nanopore caused by the sample particle or measuring the potential change in the conductive nanolayer resulting from charge induced in the conductive nanolayer by the charge of the sample particle.
- the conductive nanolayer may comprise a plurality of patterns separated from each other, and the nanopore may comprise a plurality of nanopores formed respectively in the plurality of patterns.
- the measuring of the potential change in the conductive nanolayer may comprise measuring the potential change in the plurality of patterns independently.
- the measuring of the potential change in the conductive nanolayer may comprise measuring the potential change in the conductive nanolayer occurring sequentially as an ssDNA or a DNA to which a label is attached passes through the nanopore so as to analyze the base sequence of the DNA.
- FIGS. 1A , 1 B, 1 C, and 1 D are cross-sectional views for illustrating a particle detector according to an embodiment and signal measurement using the same;
- FIG. 2A is a cross-sectional view showing a process of fabricating a particle detector according to an embodiment
- FIG. 2B is a plan view of FIG. 2A ;
- FIG. 2C is a cross-sectional view showing a process of fabricating a particle detector according to an embodiment
- FIG. 2D is a plan view of FIG. 2C ;
- FIG. 2E is a cross-sectional view showing a process of fabricating a particle detector according to an embodiment
- FIG. 2F is a plan view of FIG. 2E ;
- FIG. 2G is a cross-sectional view showing a process of fabricating a particle detector according to an embodiment
- FIG. 2H is a plan view FIG. 2G ;
- FIG. 3 is a schematic view for illustrating DNA base sequencing using a particle detector according to an embodiment.
- FIGS. 1A , 1 B, 1 C, and 1 D are cross-sectional views for illustrating a particle detector according to an embodiment and signal measurement using the same;
- a particle detector comprises a power supply unit 12 , an electric signal measuring unit 13 , insulating nanolayers 14 a , 14 b , a conductive nanolayer 15 and a nanopore 18 .
- the particle detector may further comprise one or more electrodes 11 .
- the one or more electrodes 11 are used to apply an electric field by the power supply unit 12 between both ends of the nanopore 18 .
- the one or more electrodes 11 may comprise a pair of electrodes separated from each other.
- the electrodes 11 may comprise a conducting material and may be electrically connected to the power supply unit 12 .
- an electric field may be applied between both ends of the nanopore 18 .
- the insulating nanolayers 14 a , 14 b and the conductive nanolayer 15 may be disposed between the two electrodes 11 .
- the power supply unit 12 serves to apply an electric field between both ends of the nanopore 18 .
- the power supply unit 12 may be a device for supplying a DC power. However, the present disclosure is not limited thereto, and the power supply unit 12 may be configured to supply AC or other type of power. As the power is supplied from the power supply unit 12 , an electric field may be applied between both ends of the nanopore 18 . Owing to the applied electric field, the conductive nanolayer 15 has a predetermined potential.
- the electric signal measuring unit 13 may measure the potential change in the conductive nanolayer 15 induced by a sample particle 16 as the sample particle 16 migrates through the nanopore 18 .
- the electric signal measuring unit 13 may be configured to measure the potential change in the conductive nanolayer 15 resulting from charge induced in the conductive nanolayer 15 by the charge of the sample particle 16 , the potential change in the conductive nanolayer 15 resulting from partial change in resistance in the nanopore 18 caused by the size of the sample particle 16 , or both.
- the insulating nanolayers 14 a , 14 b are thin films for insulating the conductive nanolayer 15 .
- the insulating nanolayers 14 a , 14 b may be attached to both sides of the conductive nanolayer 15 . That is to say, the insulating nanolayer 14 a and the insulating nanolayer 14 b may be respectively attached to different sides of the conductive nanolayer 15 .
- the insulating nanolayers 14 a , 14 b may have a thickness of about tens of nanometers.
- the insulating nanolayers 14 a , 14 b may comprise silicon nitride (SixNy) or titanium oxide (TiO2).
- the thickness or constituent material of the insulating nanolayers 14 a , 14 b is not limited to the above description but may be embodied variously so as to insulate the conductive nanolayer 15 from its surrounding medium.
- the conductive nanolayer 15 is a thin film for detecting potential change resulting from charge induced by the charge of the sample particle 16 or partial change in resistance in the nanopore 18 caused by the size of the sample particle 16 .
- potential change resulting from charge induced in the conductive nanolayer 15 by the charge of the sample particle 16 may be detected through the conductive nanolayer 15 .
- the conductive nanolayer 15 may have a thickness of not greater than tens of nanometers.
- the conductive nanolayer 15 may comprise gold (Au), graphene or titanium nitride (TiN).
- Au gold
- TiN titanium nitride
- the nanopore 18 is a migration path through which the sample particle 16 can be introduced.
- the nanopore 18 may be formed to penetrate the conductive nanolayer 15 and the insulating nanolayers 14 a , 14 b .
- the nanopore refers to an aperture of a nanometer scale that can serves as a migration path through which a sample particle can pass and is not particularly limited in size or shape.
- the diameter of the nanopore 18 may be determined according to the size of the sample particle 16 to be detected.
- the diameter of the nanopore 18 may be smaller than 10 times the diameter of the sample particle 16 .
- the nanopore may be any structure allowing the migration of the sample particle, without being limited in preparation method or name.
- the nanopore referred to in this disclosure may be also referred to as a nanochannel.
- the sample particle 16 is a substance to be detected using a particle detector according to an embodiment.
- the sample particle 16 may comprise a DNA or an RNA.
- the DNA may be either a single-stranded DNA (ssDNA) obtained from a naturally occurring DNA or a DNA to which a label is attached.
- FIG. 1A shows a state before the sample particle 16 is introduced to the nanopore 18 of the particle detector according to an embodiment.
- the electric signal measuring unit 13 obtains a constant value. That is to say, the conductive nanolayer 15 may have a predetermined potential which is determined by the arrangement of the conductive nanolayer 15 between the two electrodes 11 to which the electric field is applied and the power supplied from the power supply unit 12 .
- FIG. 1B shows an early state where the sample particle 16 is introduced into the nanopore 18 of the particle detector according to an embodiment. As the sample particle 16 blocks the upper portion of the nanopore 18 , the portions of the nanopore 18 above and below the conductive nanolayer 15 have different resistance. Consequently, potential change occurs in the conductive nanolayer 15 and this value is detected by the electric signal measuring unit 13 .
- FIG. 1C shows a state where the sample particle 16 migrates further downward through the nanopore 18 and is positioned near the conductive nanolayer 15 .
- the portions of the nanopore 18 above and below the conductive nanolayer 15 have similar resistance.
- potential change in the conductive nanolayer 15 resulting from charge induced in the conductive nanolayer 15 by the charge of the sample particle 16 may be detected by the electric signal measuring unit 13 .
- FIG. 1D shows a state where the sample particle 16 migrates further downward through the nanopore 18 and is positioned at the lower portion of the nanopore 18 .
- the sample particle 16 blocks the lower portion of the nanopore 18 , the portions of the nanopore 18 above and below the conductive nanolayer 15 have different resistance. Consequently, potential change occurs in the conductive nanolayer 15 and this value is detected by the electric signal measuring unit 13 . Thereafter, the sample particle 16 leaves the nanopore 18 .
- potential change occurs in the conductive nanolayer 15 while the sample particle 16 migrates through the nanopore 18 .
- the potential change in the conductive nanolayer 15 depends on the partial change in resistance in the nanopore 18 caused by the size of the sample particle 16 and/or the charge induced in the conductive nanolayer 15 by the charge of the sample particle 16 . Accordingly, the sample particle 16 migrating through the nanopore 18 may be identified and detected by measuring the potential change in the conductive nanolayer 15 .
- FIGS. 2A through 2H show a process of fabricating a particle detector according to an embodiment.
- FIGS. 2A , 2 C, 2 E and 2 G are cross-sectional views for illustrating a process of fabricating the particle detector.
- FIGS. 2B , 2 D, 2 F and 2 H are plan views of FIGS. 2A , 2 C, 2 E and 2 G, respectively.
- a particle detector according to an embodiment shown in FIGS. 2A through 2H has a structure wherein a conductive nanolayer 15 comprises a plurality of patterns separated from each other and a nanopore 18 is formed for each separated pattern, such that sample particles 16 migrating through the nanopores 18 are detected in parallel by an electric signal measuring unit 13 electrically connected to the respective patterns. That is to say, the plurality of nanopores 18 are arranged in an array to form a nanopore array.
- an insulating nanolayer 14 b may be prepared.
- the insulating nanolayer 14 b is to be attached to the surface of a conductive nanolayer which will be formed later for insulation.
- a conductive nanolayer 15 may be formed on the insulating nanolayer 14 b .
- the conductive nanolayer 15 may comprise a plurality of patterns separated from each other.
- FIG. 2D shows a conductive nanolayer 15 comprising 64 independent patterns.
- the conductive nanolayer 15 may comprise patterns of different number and shape.
- the conductive nanolayer 15 may comprise a single layer.
- an insulating nanolayer 14 a may be formed on the conductive nanolayer 15 .
- a nanopore 18 may be formed corresponding to each pattern of the conductive nanolayer 15 .
- FIGS. 2G and 2H are magnified views of a portion 19 of the nanopore array shown in FIG. 2F .
- the nanopores 18 may be formed to penetrate the patterned conductive nanolayer 15 and the insulating nanolayers 14 a , 14 b attached thereto.
- the diameter D of the nanopore 18 may be smaller than the width W of the pattern 15 a of the conductive nanolayer where the nanopore 18 is located.
- the particle detector described referring to FIGS. 2A through 2H is advantageous in that independent signal measurement is possible for each nanopore 18 . That is to say, it is possible to independently detect particles passing through the plurality of nanopores 18 of the nanopore array. Accordingly, high-speed particle detection can be achieved through parallel signal acquisition.
- FIG. 3 is a schematic view for illustrating DNA base sequencing using a particle detector according to an embodiment.
- a DNA may be passed through a nanopore formed in a conductive nanolayer to which an electric signal measuring unit is connected, while reading sequentially generated electric signals so as to analyze the base sequence of the DNA.
- the particle detector for DNA base sequencing may comprise electrodes 11 , a power supply unit 12 , an electric signal measuring unit 13 , insulating nanolayers 14 a , 14 b , a conductive nanolayer 15 and a nanopore 18 .
- Detailed description of the configuration of the particle detector will be omitted since it is the same as in the foregoing embodiment described referring to FIG. 1A .
- a DNA 31 is used as a sample particle.
- the DNA 31 may be an ssDNA obtained from a naturally occurring DNA.
- the DNA 31 may have labels 32 a , 32 g , 32 t , 32 c attached thereto.
- the labels 32 a , 32 g , 32 t , 32 c are attached to the DNA 31 to give electric signals corresponding to the adenine (A), guanine (G), thymine (T) and cytosine (C) bases, respectively, and may have different charge or size.
- the labels may be attached at specific intervals.
- the target DNA may be augmented using the designed DNA polymer technique and the labels 32 a , 32 g , 32 c , 32 t corresponding to the bases may be attached, such that the labels 32 a , 32 g , 32 t , 32 c are separated from each other with predetermined intervals.
- the designed DNA polymer technique will be omitted since it is well known to those skilled in the art.
- a particle can be detected with high signal-to-noise ratio and resolution and a sample can be scanned without mechanical motion of the conductive nanolayer using the nanopore-based particle detector.
- DNA base sequencing can be achieved by passing a DNA through the nanopore and analyzing the signals read by the electric signal measuring unit.
- the medical services will become more prognostic, preventive and customized.
- base sequencing for obtaining genetic information at low cost is required.
- the DNA sequencing according to the present disclosure is applicable to personal genomics required for these medical services.
- the method for detecting a particle based on potential measurement of the insulated thin-film electrode is applicable to various clinical diagnoses or sensors since it allows effective detection of nanoparticles.
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Abstract
Description
Claims (8)
Applications Claiming Priority (3)
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KR10-2010-0045419 | 2010-05-14 | ||
KR1020100045419A KR101648417B1 (en) | 2010-05-14 | 2010-05-14 | Nanopore single molecule detection system based on insulated conductive thin layer potential measurement |
PCT/KR2011/003527 WO2011142614A2 (en) | 2010-05-14 | 2011-05-12 | Nanopore single-particle detector using the measurement of the electric potential of an insulated thin-film electrode |
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PCT/KR2011/003527 Continuation-In-Part WO2011142614A2 (en) | 2010-05-14 | 2011-05-12 | Nanopore single-particle detector using the measurement of the electric potential of an insulated thin-film electrode |
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US20130063168A1 US20130063168A1 (en) | 2013-03-14 |
US9250202B2 true US9250202B2 (en) | 2016-02-02 |
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US13/674,344 Expired - Fee Related US9250202B2 (en) | 2010-05-14 | 2012-11-12 | Nanopore molecule detection system and molecule detection method based on potential measurement of insulated conductive thin layer |
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US (1) | US9250202B2 (en) |
KR (1) | KR101648417B1 (en) |
WO (1) | WO2011142614A2 (en) |
Cited By (2)
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US9382575B2 (en) | 2012-04-09 | 2016-07-05 | Samsung Electronics Co., Ltd. | Biomolecule detection apparatus including plurality of electrodes |
US20200056978A1 (en) * | 2018-08-15 | 2020-02-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Particle detector |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US9718668B2 (en) | 2012-02-16 | 2017-08-01 | Board Of Trustees Of The University Of Arkansas | Method of fabricating a nanochannel system for DNA sequencing and nanoparticle characterization |
DE102013214341A1 (en) * | 2013-07-23 | 2015-01-29 | Siemens Aktiengesellschaft | A method of making a nanopore for sequencing a biopolymer |
KR102144995B1 (en) | 2013-09-12 | 2020-08-14 | 삼성전자주식회사 | Nanopore device including graphene nanopore and method of fabricating the same |
CN109455662B (en) * | 2018-11-26 | 2020-07-03 | 广东工业大学 | Solid-state nanopore structure |
US12012329B2 (en) | 2020-02-13 | 2024-06-18 | Board Of Trustees Of The University Of Arkansas | Carbyne-based sensing device for high spatial resolution in DNA sequencing and biomolecule characterization and method of fabricating the same |
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Also Published As
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WO2011142614A3 (en) | 2012-04-19 |
US20130063168A1 (en) | 2013-03-14 |
KR101648417B1 (en) | 2016-08-16 |
KR20110125833A (en) | 2011-11-22 |
WO2011142614A2 (en) | 2011-11-17 |
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