US8741679B2 - Surface treatment method by using the NH3 plasma treatment to modify the sensing thin-film - Google Patents

Surface treatment method by using the NH3 plasma treatment to modify the sensing thin-film Download PDF

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US8741679B2
US8741679B2 US13/466,291 US201213466291A US8741679B2 US 8741679 B2 US8741679 B2 US 8741679B2 US 201213466291 A US201213466291 A US 201213466291A US 8741679 B2 US8741679 B2 US 8741679B2
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sensing
hafnium dioxide
hafnium
sensing membrane
enzyme
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US20120322167A1 (en
Inventor
Chao-Sung Lai
Jau-Song Yu
Yu-Sun CHANG
Po-Lung Yang
Tseng-Fu Lu
Yi-Ting Lin
Wen-Yu Chuang
Ting-Chun Yu
I-Shun Wang
Jyh-Ping Chen
Chou Chien
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Chang Gung University CGU
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/1486—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue using enzyme electrodes, e.g. with immobilised oxidase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/405—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/14532—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue for measuring glucose, e.g. by tissue impedance measurement
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/14546—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue for measuring analytes not otherwise provided for, e.g. ions, cytochromes

Definitions

  • the present invention relates to a surface treatment method for the sensing thin-film, particularly to a surface treatment method by using the NH 3 plasma treatment to modify the sensing thin-film.
  • the enzyme has been widely applied in various fields of industrial production and inspection at present.
  • the enzyme is one of proteins.
  • the protein is composed of the amino acids arranged in long chain and folded into certain shape. Thus, it has various activity or function.
  • the amino acid sequence of enzyme is changed, the activity or other properties of enzyme can be changed.
  • the enzyme immobilization can be conducted.
  • the enzyme immobilization the enzyme is combined on the carrier by the physical method or the chemical method.
  • the physical confining method can be used to confine the enzyme in a certain area.
  • the chemical bonding method can also be used to bond the enzyme to a certain solid phase object.
  • the adsorption or the entrapment is often used for the physical method. Also, due to the bonding force is relatively weaker, thus the desorption may be caused due to the change of environment and temperature.
  • the covalent-bonding and the cross-linking are often used for the chemical method. The structure change or activity loss of enzyme will be caused due to the strong chemical reaction.
  • the conventional chemical enzyme immobilization enzyme needs to modify the surface through several reaction steps, such as the change of reagent, or the adjustment of concentration, pH value, reaction temperature, and reaction time etc., the production time and cost will be increased, which is unfavorable for the industrial production process.
  • the main purpose of the present invention is to provide a surface treatment method by using the NH 3 plasma treatment to modify the sensing thin-film.
  • the plasma process is used to replace the chemical surface modification procedure.
  • the NH 3 plasma treatment is applied on the surface of sensing thin-film to form the amino group on the sensing thin-film.
  • the cross-linking agent is then used to immobilize the biological or chemical substance on the surface of sensing thin-film to form the sensing thin-film.
  • the present invention provides a plasma surface treatment method to carry out the surface amination directly in the process.
  • the cross-linking agent is then combined to shorten the process time and maintain the stability of chemical immobilization.
  • the sensor formed by the present invention has better and more accurate biochemical test result.
  • the present invention Compared to the conventional covalent bonding process, the present invention has the advantages of simplified step and process time saving etc. The purpose of raising process safety and reducing environmental pollution can be achieved.
  • FIG. 1 is a diagram illustrating the flow chart diagram of the present invention.
  • FIG. 2A is a diagram illustrating the NH 3 plasma treatment of the present invention.
  • FIG. 2B shows the amino group (—NH 2 ) is formed on the surface of hafnium dioxide sensing membrane after the NH 3 plasma treatment.
  • FIG. 3 shows the X-ray photoelectron spectroscopy (XPS) of the present invention.
  • FIG. 4 shows the comparison diagram of the present invention and the conventional inspection response.
  • the present invention provides a surface treatment method by using the NH 3 plasma treatment to modify the sensing thin-film.
  • the detailed description of an embodiment is described as follows:
  • FIG. 1 is a diagram illustrating the flow chart diagram of the present invention.
  • the tetrakis(ethylmethylamino) hafnium (TEMAH) is used as the precursor.
  • the Atomic Layer Deposition (ALD) is used and the argon is used as the carrier.
  • the water steam is introduced to provide the oxygen and 15 nm thick hafnium dioxide sensing membrane is formed on a p-type silicon substrate at 200° C.
  • the NH 3 plasma is used to treat the surface of the hafnium dioxide sensing membrane at 50W to 200W to form the amino group (—NH2).
  • FIG. 2A is a diagram illustrating the NH 3 plasma treatment of the present invention.
  • the Si substrate 201 and the hafnium dioxide sensing membrane 202 are shown in the FIG. 2A .
  • FIG. 2B shows the amino group (—NH 2 ) is formed on the surface of hafnium dioxide sensing membrane 202 after the NH 3 plasma treatment.
  • a 300 nm thick aluminum metal layer is formed on the back of Si substrate to form an ohmic contact layer.
  • a negative-photoresist of SU8-2005 is used to define the sensing area of hafnium dioxide sensing membrane.
  • the sensing area is immersed in 2.5% Glutaraldehyde solution (i.e. cross-linking agent) to form a Glutaraldehyde layer.
  • the cross-linking agent is used to immobilize the biological or chemical substance on the surface of hafnium dioxide sensing membrane.
  • the Glutaraldehyde is often used as the cross-linking agent.
  • the bio-molecule can be immobilized on the surface of hafnium dioxide sensing membrane.
  • the present invention emphasizes the technique for forming the amino acid on surface, the other cross-linking agent may be used to substitute the Glutaraldehyde.
  • Step 106 of FIG. 1 drop the bio-reactor into the sensing area of hafnium dioxide sensing membrane to form the sensing thin-film with the biological and chemical application.
  • the present invention immobilizes the bio-reactor on the surface of hafnium dioxide sensing membrane.
  • the bio-reactor has biological or chemical reacted molecules, such as the enzyme, antibody, and deoxyribonucleic acid (DNA), to carry on the biological marking in the sensing solution.
  • biological or chemical reacted molecules such as the enzyme, antibody, and deoxyribonucleic acid (DNA)
  • DNA deoxyribonucleic acid
  • the biomarker means the substance which can measure the physiological response, disease evolution process, medicine physiological reaction and medicine safety of normal human by any biological assay method. It can be used as the biological feature of the clinical decision, such as the intermediate product of metabolism, gene expression, or protein expression etc.
  • the biomarker can be divided into eight categories, including the ill biomarker, substituting assessment biomarker, curative or physiological biomarker, physiological mechanism biological, drug effect biomarker, medical objective biomarker, toxicity biomarker, and translating type biomarker etc.
  • FIG. 3 shows the X-ray photoelectron spectroscopy (XPS) of the present invention.
  • the abscissa represents the binding energy.
  • the ordinate represents the intensity of photoelectron. It is shown that the NH 3 plasma treatment can increase the intensity with respect to the treatment time.
  • FIG. 4 shows the comparison diagram of the present invention and the conventional inspection response. It is shown that the NH 3 plasma treatment has better performance than the control group.

Abstract

The NH3 plasma treatment by remote plasma is firstly proposed to replace the covalent bonding process during surface modification procedure that for amine bond generation.

Description

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a surface treatment method for the sensing thin-film, particularly to a surface treatment method by using the NH3 plasma treatment to modify the sensing thin-film.
2. Description of the Prior Art
Due to the development of biological sensing technology and biomedical sensing technology is mature recently, the developed technology has been able to be applied in enzyme chip by immobilizing the enzyme on thin-film, and the enzyme can be used to test the electrode for inspecting a large number of samples quickly. There are many successful cases by using the enzyme immobilization to raise the application range of the sensor, such as the glucose sensor, the cholesterol sensor, the lactic acid sensor, and the acetylcroline sensor etc. Thus, it is expected to have an infinite application potential.
The enzyme has been widely applied in various fields of industrial production and inspection at present. The enzyme is one of proteins. The protein is composed of the amino acids arranged in long chain and folded into certain shape. Thus, it has various activity or function. When the amino acid sequence of enzyme is changed, the activity or other properties of enzyme can be changed. In order to increase the stability of enzyme, facilitate the recovery and reuse of enzyme, the enzyme immobilization can be conducted. As for the so-called enzyme immobilization, the enzyme is combined on the carrier by the physical method or the chemical method. The physical confining method can be used to confine the enzyme in a certain area. The chemical bonding method can also be used to bond the enzyme to a certain solid phase object.
However, in numerous enzyme immobilization methods, the adsorption or the entrapment is often used for the physical method. Also, due to the bonding force is relatively weaker, thus the desorption may be caused due to the change of environment and temperature. The covalent-bonding and the cross-linking are often used for the chemical method. The structure change or activity loss of enzyme will be caused due to the strong chemical reaction.
Therefore, in view of the fact that the conventional chemical enzyme immobilization enzyme needs to modify the surface through several reaction steps, such as the change of reagent, or the adjustment of concentration, pH value, reaction temperature, and reaction time etc., the production time and cost will be increased, which is unfavorable for the industrial production process.
Therefore, in order to increase the efficiency of the enzyme immobilization, it is necessary to develop new enzyme immobilization techniques, so as to raise the production efficiency, and reduce the research and development time and relevant manufacturing costs.
SUMMARY OF THE INVENTION
The main purpose of the present invention is to provide a surface treatment method by using the NH3 plasma treatment to modify the sensing thin-film. The plasma process is used to replace the chemical surface modification procedure. The NH3 plasma treatment is applied on the surface of sensing thin-film to form the amino group on the sensing thin-film. The cross-linking agent is then used to immobilize the biological or chemical substance on the surface of sensing thin-film to form the sensing thin-film.
The present invention provides a plasma surface treatment method to carry out the surface amination directly in the process. The cross-linking agent is then combined to shorten the process time and maintain the stability of chemical immobilization.
Compared to the biochemical test result of the conventional sensor, the sensor formed by the present invention has better and more accurate biochemical test result.
Compared to the conventional covalent bonding process, the present invention has the advantages of simplified step and process time saving etc. The purpose of raising process safety and reducing environmental pollution can be achieved.
Therefore, the advantage and spirit of the present invention can be understood further by the following detail description of invention and attached Figures.
BRIEF DESCRIPTION OF THE DRAWINGS
The foregoing aspects and many of the attendant advantages of this invention will become more readily appreciated as the same becomes better understood by reference to the following detailed description, when taken in conjunction with the accompanying drawings, wherein:
FIG. 1 is a diagram illustrating the flow chart diagram of the present invention.
FIG. 2A is a diagram illustrating the NH3 plasma treatment of the present invention.
FIG. 2B shows the amino group (—NH2) is formed on the surface of hafnium dioxide sensing membrane after the NH3 plasma treatment.
FIG. 3 shows the X-ray photoelectron spectroscopy (XPS) of the present invention.
FIG. 4 shows the comparison diagram of the present invention and the conventional inspection response.
 DESCRIPTION OF THE PREFERRED EMBODIMENT
The present invention provides a surface treatment method by using the NH3 plasma treatment to modify the sensing thin-film. The detailed description of an embodiment is described as follows:
FIG. 1 is a diagram illustrating the flow chart diagram of the present invention. As shown in Step 101 of FIG. 1, the tetrakis(ethylmethylamino) hafnium (TEMAH) is used as the precursor. The Atomic Layer Deposition (ALD) is used and the argon is used as the carrier. The water steam is introduced to provide the oxygen and 15 nm thick hafnium dioxide sensing membrane is formed on a p-type silicon substrate at 200° C.
As shown in Step 102 of FIG. 1, under a constant supply of argon and ammonia, the NH3 plasma is used to treat the surface of the hafnium dioxide sensing membrane at 50W to 200W to form the amino group (—NH2).
FIG. 2A is a diagram illustrating the NH3 plasma treatment of the present invention. The Si substrate 201 and the hafnium dioxide sensing membrane 202 are shown in the FIG. 2A.
FIG. 2B shows the amino group (—NH2) is formed on the surface of hafnium dioxide sensing membrane 202 after the NH3 plasma treatment.
As shown in Step 103 of FIG. 1, a 300 nm thick aluminum metal layer is formed on the back of Si substrate to form an ohmic contact layer.
As shown in Step 104 of FIG. 1, a negative-photoresist of SU8-2005 is used to define the sensing area of hafnium dioxide sensing membrane.
As shown in Step 105 of FIG. 1, the sensing area is immersed in 2.5% Glutaraldehyde solution (i.e. cross-linking agent) to form a Glutaraldehyde layer. The cross-linking agent is used to immobilize the biological or chemical substance on the surface of hafnium dioxide sensing membrane. The Glutaraldehyde is often used as the cross-linking agent. There is an aldehyde group at every end of Glutaraldehyde. The aldehyde group at one end reacts with the amino group formed on the surface of hafnium dioxide sensing membrane, and the aldehyde group at another end reacts with the amino group on the bio-molecule to be immobilized. Thus, the bio-molecule can be immobilized on the surface of hafnium dioxide sensing membrane. The present invention emphasizes the technique for forming the amino acid on surface, the other cross-linking agent may be used to substitute the Glutaraldehyde.
Finally, as shown in Step 106 of FIG. 1, drop the bio-reactor into the sensing area of hafnium dioxide sensing membrane to form the sensing thin-film with the biological and chemical application.
The present invention immobilizes the bio-reactor on the surface of hafnium dioxide sensing membrane. The bio-reactor has biological or chemical reacted molecules, such as the enzyme, antibody, and deoxyribonucleic acid (DNA), to carry on the biological marking in the sensing solution. According to the definition of US Food and Drug Administration (FDA), the biomarker means the substance which can measure the physiological response, disease evolution process, medicine physiological reaction and medicine safety of normal human by any biological assay method. It can be used as the biological feature of the clinical decision, such as the intermediate product of metabolism, gene expression, or protein expression etc. In view of the functionality of biomarker, the biomarker can be divided into eight categories, including the ill biomarker, substituting assessment biomarker, curative or physiological biomarker, physiological mechanism biological, drug effect biomarker, medical objective biomarker, toxicity biomarker, and translating type biomarker etc.
FIG. 3 shows the X-ray photoelectron spectroscopy (XPS) of the present invention. The abscissa represents the binding energy. The ordinate represents the intensity of photoelectron. It is shown that the NH3 plasma treatment can increase the intensity with respect to the treatment time.
FIG. 4 shows the comparison diagram of the present invention and the conventional inspection response. It is shown that the NH3 plasma treatment has better performance than the control group.
It is understood that various other modifications will be apparent to and can be readily made by those skilled in the art without departing from the scope and spirit of this invention. Accordingly, it is not intended that the scope of the claims appended hereto be limited to the description as set forth herein, but rather that the claims be construed as encompassing all the features of patentable novelty that reside in the present invention, including all features that would be treated as equivalents thereof by those skilled in the art to which this invention pertains.

Claims (1)

What is claimed is:
1. A surface treatment method for modifying a sensing thin-film by providing a tetrakis(ethylmethylamino)hafnium as a precursor, using an Atomic Layer Deposition method, using a NH3 plasma method, sputtering an aluminum metal layer, defining a hafnium dioxide sensing membrane area, forming a cross-linking agent layer and dropping a bio-reactor, comprising:
providing a tetrakis(ethylmethylamino)hafnium as a precursor;
using an Atomic Layer Deposition method to form a 15 nm thick hafnium dioxide sensing membrane on a p-type silicon substrate, wherein the Atomic Layer Deposition method comprises using argon as a carries and providing oxygen by introducing water steam, and wherein the Atomic Layer Deposition method is conducted at a temperature of 200°C.;
using a NH3 plasma method to treat a surface of the hafnium dioxide sensing membrane to form an amino group on the hafnium dioxide sensing membrane, wherein the NH3 plasma method comprises providing a constant supply of argon and an ammonia;
sputtering an aluminum metal layer on a back of the silicon substrate to form an ohmic contact layer, wherein the aluminum metal layer is 300 nm thick;
defining a sensing area of the hafnium dioxide sensing membrane by a negative-photoresist;
forming a cross-linking agent layer on the sensing area, wherein the step of forming a cross-linking agent layer on the sensing area comprises using a Glutaraldehyde solution to form a Glutaraldehyde layer on the sensing area; and
dropping a bio-reactor into the sensing area of the hafnium dioxide sensing membrane, wherein the bio-reactor is selected from the group consisting of an enzyme, and an antibody.
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