US8637859B2 - Opto-electrical devices incorporating metal nanowires - Google Patents
Opto-electrical devices incorporating metal nanowires Download PDFInfo
- Publication number
- US8637859B2 US8637859B2 US13/651,128 US201213651128A US8637859B2 US 8637859 B2 US8637859 B2 US 8637859B2 US 201213651128 A US201213651128 A US 201213651128A US 8637859 B2 US8637859 B2 US 8637859B2
- Authority
- US
- United States
- Prior art keywords
- layer
- nanostructures
- light
- substrate
- matrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910052751 metal Inorganic materials 0.000 title description 53
- 239000002184 metal Substances 0.000 title description 53
- 239000002070 nanowire Substances 0.000 title description 23
- 239000002086 nanomaterial Substances 0.000 claims abstract description 169
- 239000000758 substrate Substances 0.000 claims description 93
- 238000000149 argon plasma sintering Methods 0.000 claims description 24
- 239000002245 particle Substances 0.000 claims description 22
- -1 InOx Inorganic materials 0.000 claims description 19
- 239000011521 glass Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910006854 SnOx Inorganic materials 0.000 claims description 6
- 229910007667 ZnOx Inorganic materials 0.000 claims description 5
- 229910017107 AlOx Inorganic materials 0.000 claims description 3
- 229910003087 TiOx Inorganic materials 0.000 claims description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 39
- 238000010168 coupling process Methods 0.000 abstract description 9
- 238000005859 coupling reaction Methods 0.000 abstract description 9
- 239000010410 layer Substances 0.000 description 182
- 239000011159 matrix material Substances 0.000 description 87
- 239000010408 film Substances 0.000 description 78
- 230000003287 optical effect Effects 0.000 description 46
- 239000000463 material Substances 0.000 description 34
- 230000003667 anti-reflective effect Effects 0.000 description 32
- 238000012546 transfer Methods 0.000 description 30
- 238000000151 deposition Methods 0.000 description 22
- 230000036961 partial effect Effects 0.000 description 18
- 239000011248 coating agent Substances 0.000 description 17
- 238000000576 coating method Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 17
- 239000000203 mixture Substances 0.000 description 16
- 239000011230 binding agent Substances 0.000 description 15
- 239000004020 conductor Substances 0.000 description 15
- 239000002105 nanoparticle Substances 0.000 description 15
- 229920001721 polyimide Polymers 0.000 description 15
- 239000000243 solution Substances 0.000 description 15
- 239000012044 organic layer Substances 0.000 description 13
- 239000004642 Polyimide Substances 0.000 description 12
- 239000004094 surface-active agent Substances 0.000 description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 11
- 238000013459 approach Methods 0.000 description 10
- 230000008021 deposition Effects 0.000 description 10
- 238000013086 organic photovoltaic Methods 0.000 description 10
- 238000002347 injection Methods 0.000 description 9
- 239000007924 injection Substances 0.000 description 9
- 239000006185 dispersion Substances 0.000 description 8
- 238000009826 distribution Methods 0.000 description 8
- 239000001866 hydroxypropyl methyl cellulose Substances 0.000 description 8
- 229920003088 hydroxypropyl methyl cellulose Polymers 0.000 description 8
- UFVKGYZPFZQRLF-UHFFFAOYSA-N hydroxypropyl methyl cellulose Chemical compound OC1C(O)C(OC)OC(CO)C1OC1C(O)C(O)C(OC2C(C(O)C(OC3C(C(O)C(O)C(CO)O3)O)C(CO)O2)O)C(CO)O1 UFVKGYZPFZQRLF-UHFFFAOYSA-N 0.000 description 8
- 235000010979 hydroxypropyl methyl cellulose Nutrition 0.000 description 8
- 239000002904 solvent Substances 0.000 description 8
- 239000004034 viscosity adjusting agent Substances 0.000 description 8
- 239000002042 Silver nanowire Substances 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 229920001940 conductive polymer Polymers 0.000 description 6
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 6
- 230000003993 interaction Effects 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000008199 coating composition Substances 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 239000002071 nanotube Substances 0.000 description 4
- 230000006855 networking Effects 0.000 description 4
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 4
- 229920000728 polyester Polymers 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 238000007764 slot die coating Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 230000006399 behavior Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000009969 flowable effect Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000005325 percolation Methods 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 229920000098 polyolefin Polymers 0.000 description 3
- 230000001902 propagating effect Effects 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 206010041316 Solvent sensitivity Diseases 0.000 description 2
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 2
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 2
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229920002313 fluoropolymer Polymers 0.000 description 2
- 238000007756 gravure coating Methods 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 125000005487 naphthalate group Chemical group 0.000 description 2
- 239000002736 nonionic surfactant Substances 0.000 description 2
- 229920002113 octoxynol Polymers 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- 229920000058 polyacrylate Polymers 0.000 description 2
- 229920005862 polyol Polymers 0.000 description 2
- 150000003077 polyols Chemical class 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- ZRYCRPNCXLQHPN-UHFFFAOYSA-N 3-hydroxy-2-methylbenzaldehyde Chemical compound CC1=C(O)C=CC=C1C=O ZRYCRPNCXLQHPN-UHFFFAOYSA-N 0.000 description 1
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920002943 EPDM rubber Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 1
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000001241 acetals Chemical class 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 229920006397 acrylic thermoplastic Polymers 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000003490 calendering Methods 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 229920003090 carboxymethyl hydroxyethyl cellulose Polymers 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- 229940105329 carboxymethylcellulose Drugs 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- NLEBIOOXCVAHBD-QKMCSOCLSA-N dodecyl beta-D-maltoside Chemical compound O[C@@H]1[C@@H](O)[C@H](OCCCCCCCCCCCC)O[C@H](CO)[C@H]1O[C@@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 NLEBIOOXCVAHBD-QKMCSOCLSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000004811 fluoropolymer Substances 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 1
- 229940071826 hydroxyethyl cellulose Drugs 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 229960002900 methylcellulose Drugs 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 239000002159 nanocrystal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000847 nonoxynol Polymers 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000636 poly(norbornene) polymer Polymers 0.000 description 1
- 229920000548 poly(silane) polymer Polymers 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000015 polydiacetylene Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 229920000306 polymethylpentene Polymers 0.000 description 1
- 239000011116 polymethylpentene Substances 0.000 description 1
- 238000004917 polyol method Methods 0.000 description 1
- 235000013824 polyphenols Nutrition 0.000 description 1
- 229920013636 polyphenyl ether polymer Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920000734 polysilsesquioxane polymer Polymers 0.000 description 1
- 229920001021 polysulfide Polymers 0.000 description 1
- 239000005077 polysulfide Substances 0.000 description 1
- 150000008117 polysulfides Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920000123 polythiophene Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229940068984 polyvinyl alcohol Drugs 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 229920002102 polyvinyl toluene Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000007655 standard test method Methods 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- 238000001931 thermography Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- GPRLSGONYQIRFK-MNYXATJNSA-N triton Chemical compound [3H+] GPRLSGONYQIRFK-MNYXATJNSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000000230 xanthan gum Substances 0.000 description 1
- 229920001285 xanthan gum Polymers 0.000 description 1
- 235000010493 xanthan gum Nutrition 0.000 description 1
- 229940082509 xanthan gum Drugs 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
- H10K71/611—Forming conductive regions or layers, e.g. electrodes using printing deposition, e.g. ink jet printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/115—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers comprising active inorganic nanostructures, e.g. luminescent quantum dots
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
- H01L31/022491—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers composed of a thin transparent metal layer, e.g. gold
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
- H05B33/28—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode of translucent electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
- H10K50/828—Transparent cathodes, e.g. comprising thin metal layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/85—Arrangements for extracting light from the devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/85—Arrangements for extracting light from the devices
- H10K50/854—Arrangements for extracting light from the devices comprising scattering means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/621—Providing a shape to conductive layers, e.g. patterning or selective deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/80—Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/331—Nanoparticles used in non-emissive layers, e.g. in packaging layer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/30—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains
- H10K30/35—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains comprising inorganic nanostructures, e.g. CdSe nanoparticles
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/50—Photovoltaic [PV] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
- H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
- H10K50/814—Anodes combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/85—Arrangements for extracting light from the devices
- H10K50/858—Arrangements for extracting light from the devices comprising refractive means, e.g. lenses
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- This disclosure generally relates to opto-electrical devices such as organic light-emitting diodes (OLEDs) and photovoltaic (PV) cells.
- OLEDs organic light-emitting diodes
- PV photovoltaic
- FIG. 1 shows a conventional OLED ( 10 ) formed on a substrate ( 12 ).
- An anode ( 14 ) is disposed on the substrate.
- the light-emitting layer takes the form of an organic stack ( 16 ) that includes a thin film of electroluminescent chemical compounds ( 18 ) flanked by two charge injection layers ( 20 and 22 , one for electron injection and one for hole injection).
- a cathode ( 24 ) is disposed on the organic stack ( 16 ).
- the cathode and anode provide the contacts for an external circuitry to supply an electrical current, which in turn generates light ( 26 ) in the organic stack ( 16 ).
- the anode ( 14 ) and the substrate ( 12 ) shall be transparent, allowing the internally generated light ( 26 ) to exit from the substrate ( 12 ).
- the cathode ( 24 ) shall be transparent, allowing the internally generated light ( 26 ) to exit from the cathode.
- the OLED may be entirely transparent, whereby both the cathode and the anode are transparent.
- a conventional transparent electrode is indium tin oxide (ITO).
- the internally generated light ( 26 ) propagates via various modes.
- FIG. 2 schematically shows certain paths of the light propagation. It is desired that the light propagates via an external mode ( 30 ), i.e., by traveling through the transparent anode ( 14 ) and exiting from the substrate ( 12 ). However, not all the light generated from the organic stack is capable of existing via the external mode. Instead, depending on the light incident angle on a given interface, a substantial portion of the light may propagate via a number of waveguide modes.
- One waveguide mode is a combined mode of the ITO layer ( 14 ) and the organic stack ( 16 ), both of which have comparably high refractive indices.
- light ( 32 ) is totally reflected at the interface ( 34 ) between the substrate ( 12 ) and the combined ITO-organic stack.
- Another mode is a substrate mode, where the light ( 38 , 40 ) is reflected at the interface ( 36 ) of the substrate and air.
- the waveguided light ( 38 ) may also exit from the edges of an OLED.
- a critical parameter of OLED performance is the external coupling (“out-coupling”) efficiency, which is the ratio of photons emitted externally over photons generated.
- output-coupling the ratio of photons emitted externally over photons generated.
- opto-electrical devices with improved light out-coupling for outputting light (e.g., OLED) or light input-coupling for absorbing light (e.g., photovoltaic cells).
- One embodiment provides an optical stack that comprises: a first electrode; an organic stack underlying the first electrode; a nanostructure layer underlying the organic stack, the nanostructure layer comprises a plurality of metal nanostructures; a high-index layer underlying the nanostructure layer; and a substrate underlying the high-index layer, wherein the high-index layer has the same or a higher refractive index than the organic layer, and wherein the nanostructure layer forms a second electrode.
- Another embodiment provides an optical stack that comprises: a first electrode; an organic stack underlying the first electrode; a nanostructure layer underlying the organic stack, the nanostructure layer comprises a plurality of metal nanostructures; and a substrate supporting the first electrode, organic stack and nanostructure layer, wherein an energy density of light that would be waveguided in the optical stack without the nanostructure layer is reduced by inclusion of the nanostructure layer in the optical stack.
- a top-emitting OLED that comprises: a substrate, a first electrode disposed on the substrate; an organic stack disposed on the first electrode; and a nanostructure layer including a plurality of nanostructures overlying the organic stack, wherein the nanostructure layer is a second electrode.
- One embodiment provides a process that comprises: providing a partial optical stack including a substrate, a cathode disposed on the substrate and an organic stack disposed on the cathode, the partial optical stack having a top surface; providing a donor film including a nanostructure layer on a transfer film, the nanostructure layer including a plurality of nanostructures optionally dispersed in a matrix; and contacting the nanostructure layer of the donor film to the top surface of the partial optical stack.
- Another embodiment provides a process that comprises: providing a donor film by (i) depositing a plurality of nanostructures on a release liner; (ii) forming a matrix on the plurality of nanostructures, the matrix having a top surface; (iii) contacting a transfer film to the top surface of the matrix, and (iv) removing the release liner to expose a nanostructure surface; providing a partial optical stack including a substrate, a cathode disposed on the substrate and an organic stack disposed on the cathode, the partial optical stack having a top surface; and contacting the donor film by the nanostructure surface to the top surface of the partial optical stack.
- a further embodiment provides a process that comprises: providing a donor film by: (i) forming a matrix on a release liner, the matrix having a top surface; (ii) depositing a plurality of nanostructures on the top surface of the matrix; (iii) reflowing the matrix to form a reflowed matrix; (iv) pressing the nanostructures into the reflowed matrix such that the transfer film contacts the top surface of the matrix; (v)removing the transfer film to expose the top surface; providing a partial optical stack including a substrate, a cathode disposed on the substrate and an organic stack disposed on the cathode, the partial optical stack having a top surface; and contacting the top surface of the donor film with the top surface of the partial optical stack.
- Yet another embodiment provides an OLED that comprises: a substrate; a bottom electrode disposed on the substrate; an organic stack disposed on the bottom electrode; and a metal film disposed on the organic stack, wherein the metal film has an outer surface and contacts the organic stack by a metal/organic interface, and wherein a first plurality of nanostructures are disposed on the metal/organic interface.
- a further embodiment provides an OLED that comprises: a transparent substrate; a transparent bottom electrode disposed on the transparent substrate; an organic stack disposed on the transparent bottom electrode; and a metal film disposed on the organic stack, wherein the metal film contacts the organic stack by a metal/organic interface and has an outer surface, and wherein a plurality of nanostructures are disposed on the outer surface.
- an OLED that comprises: a substrate having a top surface and a bottom surface, the top surface being an interface between the substrate and air; an anti-reflective layer contacting the bottom surface of the substrate; a first electrode deposited on the anti-reflective layer, the first electrode comprising a plurality of conductive nanostructures; an organic stack deposited on the first electrode, the organic stack comprising an organic light-emitting material, a charge injection layer and a hole injection layer; and a second electrode deposited on the organic stack.
- the substrate of the OLED has a first refractive index
- the organic stack has a second refractive index
- the anti-reflective layer has a third refractive index, and wherein the third refractive index is larger than the first refractive index and less than the second refractive index.
- the anti-reflective layer of the OLED has an index of reflection in the range of 1.5-1.8.
- the anti-reflective layer is a polyimide layer.
- a photovoltaic cell which comprises: a substrate having a top surface and a bottom surface, the top surface being an interface between the substrate and air; an anti-reflective layer contacting the bottom surface of the substrate; a first electrode deposited on the anti-reflective layer, the first electrode comprising a plurality of conductive nanostructures; a photo-active layer; and a second electrode deposited on the photo-active layer.
- the substrate of the photovoltaic cell has a first refractive index
- the photo-active layer has a second refractive index
- the anti-reflective layer has a third refractive index, and wherein the third refractive index is larger than the first refractive index and less than the second refractive index.
- the anti-reflective layer of the photovoltaic cell has an index of reflection in the range of 1.5-1.8.
- the anti-reflective layer is a polyimide layer.
- FIG. 1 shows a prior art OLED.
- FIG. 2 shows various waveguide modes in an OLED.
- FIGS. 3(A)-3(B) shows a bottom-emitting OLED according to an embodiment of the present disclosure.
- FIGS. 4 (A)- 4 (B) shows a PV cell according to another embodiment of the present disclosure.
- FIG. 5 shows a top-emitting OLED according to an embodiment of the present disclosure.
- FIG. 6 shows a solid-state transfer process according to an embodiment of the present disclosure.
- FIGS. 7-8 show alternative solid-state transfer processes according to embodiments of the present disclosure.
- FIGS. 9(A)-9(D) show various embodiments directed to OLED configurations that reduce surface plasmon polaritons (SPP).
- FIG. 10 shows waveguided light represented by its energy density within a device stack.
- FIG. 11 shows the impact of a high-index layer for modifying the energy density of the waveguide light.
- FIGS. 12-15 show various embodiments in accordance with the disclosure for incorporating a high-index layer in an optical stack device.
- thin films of interconnecting conductive nanostructures are formed as one or more transparent electrodes in an opto-electrical device such as an OLED or a PV cell.
- an opto-electrical device such as an OLED or a PV cell.
- nanostructure-based electrodes can be advantageously fabricated in a solution-based approach or through a solid state transfer process from a donor layer, making them particularly suitable for large format or high throughput manufacturing.
- the optical behavior of the light can be influenced by at least one, or more typically, all of the layers within the device stack. For instance, when light travels from a medium of a high refractive index to one of a lower refractive index, depending on the angle of the incident light, a certain degree of reflection may occur at the interface between the two media.
- a bottom-emitting OLED the internally generated light must travel from the organic layer and the transparent bottom electrode, then through the substrate in order to exit.
- the combined ITO/organic layer has a much higher refractive index (n 1 ⁇ 1.8) than that of the glass substrate (n 2 ⁇ 1.5), a substantial amount of the light can be waveguided in the ITO/organic layer.
- light that travels from the substrate (n 2 ⁇ 1.5) to the air (n 3 ⁇ 1) may also be waveguided in the substrate and the organic/ITO layer (see FIG. 2 ).
- Various embodiments are directed to OLEDs in which conductive nanostructure-based transparent conductors are used in place of the conventional ITO layer.
- the distribution of the waveguide modes can be modified.
- the large difference between the indices of refraction of the glass and the organic layer will still cause losses due to total internal reflection at this interface.
- an anti-reflective layer is interposed between the substrate and the bottom electrode formed by the nanostructure layer. Because the nanostructure layer is a network of interconnecting nanostructures (e.g., metal nanowires) rather than a continuous layer, it does not completely inhibit the optical interaction between the organic layer and the anti-reflection layer.
- FIG. 3A shows an OLED ( 50 ) according to an embodiment of the present disclosure.
- the OLED ( 50 ) includes a transparent substrate ( 54 ), an anti-reflective layer ( 58 ) interposed between the transparent substrate ( 54 ) and a nanostructure layer ( 62 ).
- the nanostructure layer comprises a plurality of metal nanostructures ( 66 ) and acts as an anode (i.e., the bottom electrode).
- An organic stack ( 70 ) is situated between the anode and a cathode ( 76 ).
- an intermediate conductive layer ( 80 ) may be interposed between the organic stack ( 70 ) and the nanostructure layer ( 62 ).
- the intermediate conductive layer is sufficiently conductive such that the current is laterally distributed to achieve a uniform carrier injection into the organic stack (e.g., the light-emitting layer), thereby providing uniform electroluminescence.
- the intermediate conductive layer may be, for example, a thin ITO layer, or a conductive polymer layer, or a layer of evenly distributed nanoparticles or nanowires. More detailed description of such a composite structure of the nanostructure layer ( 62 ) and the intermediate conductive layer ( 80 ) may be found in, for example, U.S. Published Application No. 2008/02592, in the name of Cambrios Technologies, the assignee of the present disclosure.
- the index of refraction of the anti-reflective layer (n 4 ) should be a value between those of the substrate (n 2 ) and the organic stack (n 5 ). More specifically, the index of refraction of the anti-reflective layer may be in the range of 1.5-1.8, or in the range of 1.55-1.6, or in the range of 1.6-1.65, or in the ranges of 1.65-1.7, or 1.7-1.75, or 1.75-1.8. For the most efficient reduction of internal reflection, the index of refraction (n 4 ) may be ascertained according to the following formula: ⁇ square root over (n 2 ⁇ n 5 ) ⁇
- the index of refraction (n 4 ) of the anti-reflective layer ( 58 ) should be 1.6 for this particular configuration.
- the anti-reflective layer is a polyimide layer.
- the anti-reflective layer can be formed by direct deposition on the substrate.
- conductive nanostructures can be formulated into an ink composition (described in further detail below) and deposited directly on the anti-reflective layer.
- ink composition described in further detail below
- the organic stack can be formed by known methods of the art. Because the organic stack is typically sensitive to water, prior to the formation of the organic stack, care should be taken to ensure that the nanostructure layer is free of water, which is a common solvent in the nanostructure ink composition.
- the anti-reflective layer ( 58 ) may further contain a plurality of light-scattering nanoparticles ( 88 ).
- the presence of the light-scattering nanoparticles may force the waveguided or trapped light in the anti-reflective layer out (also referred to as “extraction”).
- These light-scattering nanoparticles are also referred to as “scattering centers.”
- particle-based scattering centers may also be used in a PV cell in conjunction with a nanostructure-based electrode.
- An PV cell comprises a photo-active layer, which absorbs light and converts it into an electrical current.
- the photo-active layer is organic and the PV cells are also referred to as organic photovoltaic (OPV) cells. Unless specified otherwise, the embodiments described herein are equally applicable to PV and OPV cells.
- FIG. 4A shows an OPV cell ( 90 ) according to an embodiment.
- the OPV cell ( 90 ) includes a transparent substrate ( 94 ) and an overlying nanostructure layer ( 102 ).
- the nanostructure layer comprises a plurality of metal nanostructures ( 104 ) and acts as an electrode (e.g., anode).
- a photo-active layer ( 106 ) is situated between the nanostructure layer ( 102 ) and a cathode ( 108 ). Because the photo-active layer ( 106 ) and the nanostructure layer ( 102 ) have high indices of refraction of comparable values, they form a combined optical stack ( 107 ) in the propagation path of light ( 110 ).
- the ratio of the absorbed photons to the input photons need to be maximized.
- the travel length or total travel time of the light ( 110 ) within the photo-active layer should be as long as possible. In other words, it is desirable for the light ( 110 ) to be waveguided within the combined optical stack ( 107 ). However, because it is not possible to create internal reflection within the combined optical stack, waveguiding can only be created by incorporating scattering centers therein.
- FIG. 4B shows an embodiment for effectively creating waveguiding in an OPV device.
- a plurality of nanoparticles is incorporated at the interface ( 109 ) of the combined optical stack ( 107 ) and the substrate ( 94 ).
- the nanoparticles as scattering centers, facilitate the waveguiding for light ( 111 ).
- light ( 111 ) of FIG. 4B is waveguided within the photo-active layer, thereby extending its total travel length and maximizing the light absorption.
- the OPV device can be fabricated in a similar sequence as the OLED disclosed herein.
- conductive nanostructures can be formulated into an ink composition (described in further detail below) and deposited directly on the substrate.
- the scattering centers e.g., nanoparticles
- the scattering centers may be formed by direct deposition on the substrate simultaneously with the nanostructures.
- the nanoparticles may be deposited prior to or subsequently to the deposition of the nanostructures.
- the photo-active layer can be formed by known methods of the art, followed by the formation of the top electrode, which can be a metal plate.
- Nanostructure layers are also suitable for replacing the ITO layer in a conventional top-emitting OLED.
- FIG. 5 schematically shows a top-emitting OLED according to an embodiment of the present disclosure.
- the top-emitting OLED ( 112 ) includes a substrate ( 116 ), a cathode ( 120 ) disposed on the substrate ( 116 ), an organic stack ( 124 ) disposed on the cathode ( 120 ); and a nanostructure layer ( 126 ) including a plurality of nanostructures ( 128 ).
- the nanostructure layer forms the transparent anode and top electrode of the OLED.
- the substrate and the cathode need not be transparent.
- the cathode may be connected to a thin film transistor (TFT). It should also be recognized that the anode and the cathode could be exchanged or reversed.
- TFT thin film transistor
- nanostructure layer As the top electrode, due in part to the solvent sensitivity of the underlying organic stack.
- one embodiment provides a method of forming a nanostructure layer on an organic stack through solid-state transfer process using a donor film. More specifically, a donor film is fabricated by pre-forming a nanostructure layer a transfer film through a solution-phase deposition, and allowing the solvent to fully evaporate. The nanostructure layer is then transferred to the organic stack, thereby avoiding direct solvent contact with the organic stack.
- one embodiment provides a method comprising:
- a partial optical stack including a substrate ( 116 ), a cathode ( 120 ) disposed on the substrate ( 116 ) and an organic stack ( 124 ) disposed on the cathode ( 120 ), the partial optical stack having a top surface ( 134 );
- the method further comprises removing the transfer film ( 140 ).
- an ink composition of nanostructures may be deposited directly on the transfer film by known methods in the art, including slot die coating, spray coating, reverse offset printing, and the like.
- the nanostructure layer forms after the volatile components of the ink composition are removed.
- the ink composition may further comprise a matrix material (e.g., a binder).
- a matrix material e.g., a binder
- the nanostructures and the binder are co-deposited on the transfer film.
- the nanostructures are dispersed in the matrix in a substantially uniform manner, i.e., the nanostructures are distributed throughout the entire thickness of the matrix.
- the matrix may be conductive (e.g., conductive polymer) or non-conductive (e.g., dielectric polymer), the nanostructure layer is conductive due to the percolative conductivity between contacting nanostructures.
- a release liner is employed to provide a smooth surface of the conductive layer for contacting the organic stack. More specifically and as illustrated in FIG. 7 , the method comprises:
- a partial optical stack including a substrate ( 116 ), a cathode ( 120 ) disposed on the substrate ( 116 ) and an organic stack ( 124 ) disposed on the cathode ( 120 ), the partial optical stack having a top surface ( 134 );
- the method further comprises removing the transfer film ( 152 ).
- the method further comprises first forming an intermediate conductive layer on the organic stack prior to contacting the donor film to the organic stack.
- the intermediate conductive layer is preferably a continuous film such as a thin layer of ITO or conductive polymer. Such an intermediate conductive film can be helpful to ensure that the contact between the nanostructures and the organic stack is uniform.
- the matrix When prepared for deposition, the matrix may be combined with an appropriate solvent to assist with flowability, or deposited as neat if it is a flowable material. Following the deposition, the matrix cures or hardens into a solid layer, either through removal of the solvent(s) and/or crosslinking.
- the matrix is a thermoplastic polymer that, even after curing, may become reflowable upon heating or solvent infiltration, and hardened again upon cooling or solvent evaporation.
- crosslinked matrix may be formed through a photo-initiated or heat-initiated process and, once hardened, is incapable of reflowing even upon further heating.
- the release liner can be removed, leaving a surface ( 156 ) of the nanostructure layer smooth and ready to make contact with the organic stack.
- the nanostructures are not necessarily distributed throughout the entire height of the matrix; the nanostructure layer contacts the organic stack by the nanostructure surface ( 156 ) to ensure maximum and uniform contact between the nanostructures and the organic stack.
- Yet another embodiment provides an alternative approach to achieving a smooth contacting surface in the nanostructure layer.
- the method involves first depositing a matrix on a release liner, followed by depositing nanostructures.
- the nanostructures are not impacted into the matrix, but are deposited on the top surface of the matrix.
- the matrix may be still flowable (prior to a fully cured state) or can be heated to a reflowed state.
- the reflowed matrix is in a semi-solid state and readily deformable such that the nanostructures can be pressed into the matrix. More specifically and as illustrated in FIG. 8 , the method comprises:
- a partial optical stack including a substrate ( 116 ), a cathode ( 120 ) disposed on the substrate ( 116 ) and an organic stack ( 124 ) disposed on the cathode ( 120 ), the partial optical stack having a top surface ( 134 );
- the method further comprises removing the release liner ( 144 ).
- the method may omit the step of laminating the transfer film ( 152 ).
- the nanostructures 128 may be calendered with a calender roll directly into the reflowed matrix.
- the method further comprises first forming an intermediate conductive layer on the organic stack prior to contacting the donor film to the organic stack.
- the intermediate conductive layer is preferably a continuous film such as a thin layer of ITO or conductive polymer. Such an intermediate conductive film can be helpful to ensure that the contact between the nanostructures and the organic stack is uniform.
- the method may further comprise, prior to contacting the organic stack, surface treating the nanostructure surface of the donor film to minimize or eliminate any non-conductive contaminant.
- the surface treatment may involve Argon-plasma (or nitrogen-plasma) for a brief period of time. This surface treatment effectively removes thin deposition of contaminants on the nanostructure surface, thereby improving carrier injection/extraction. Additionally, the surface treatment achieves a slight back-etching of the matrix, which provides a better electric contact with the organic stack or the intermediate conductive layer.
- the matrix has to provide some mechanical adhesion to the organic stack (e.g., pressure sensitive adhesive).
- the matrix also offers the ability to tailor the optical characteristics such as the index of refraction, incorporation of scattering centers, incorporation of down-converter dyes, etc.
- the matrix can therefore be used to optimize the optical stack with respect to light extraction, emission uniformity and emission color.
- the matrix can be a crosslinkable polymer or a reflowable polymer.
- the matrix may also be an optical clear adhesive.
- the matrix may also possess tailored optical properties (index of refraction, absorption, color etc.) and contain particles to impact the optical performance (e.g., scattering particles, etc.)
- the matrix may also be patterned, e.g., by UV irradiation, prior to transfer.
- UV irradiation exposure to the UV irradiation in selected areas of the matrix causes crosslinking in the selected areas only, whereas the non-exposed areas can be removed.
- the resulting pattern can then be transferred onto the organic stack.
- LITI Laser Induced Thermal Imaging
- LITI Laser Induced Thermal Imaging
- the solid-phase transfer process is particularly suitable for forming a top electrode, it is not limited to top electrodes. The process equally applies to forming bottom electrodes. It should further be understood that, although OLED is illustrated, the processes disclosed herein apply equally to PV devices (e.g., OPV). That solid-phase transfer process ensures that the conductive network of nanostructures is exposed on one surface ( 156 in FIG. 7 or 150 in FIG. 8 ) that contacts the organic stack (e.g., a light-emitting layer in an OLED or a photo-active layer in a PV cell), thus providing carrier injection/extraction in OLED and PV devices.
- PV devices e.g., OPV
- a solid metal cathode is typically used as the top electrode (see FIG. 1 ).
- SPP surface plasmon polaritons
- dipole interactions Such energy loss decreases the efficiency of the device. It has been shown that a higher roughness of the metal surface reduces the energy loss at this interface, see for example: Koo et al. Nature Photonics 4, 222 (2010) or An et al. Optics Express 8 (5), p 4041 (2010).
- nanostructures are placed on either or both sides of the metal electrode.
- the presence of the nanostructures increases surface roughness, thereby reducing SPP. It should be noted that it is not necessary to have a conductive network of nanostructures. Rather, surface roughness may be sufficiently achieved by providing non-percolating nanostructures (e.g., nanowires or simply nanoparticles).
- an OLED ( 200 a ) comprises a substrate ( 204 a ), a bottom electrode ( 208 a ) disposed on the transparent substrate, an organic stack ( 212 a ) disposed on the transparent bottom electrode, and a metal film/cathode ( 216 a ) disposed on the organic stack ( 212 a ), wherein the metal film ( 216 a ) contacts the organic stack ( 212 a ) by a metal/organic interface ( 220 a ), and wherein a plurality of nanostructures ( 224 a ) are disposed on the metal/organic interface ( 220 a ).
- an OLED ( 200 b ) comprises a substrate ( 204 b ), a bottom electrode ( 208 b ) disposed on the transparent substrate, an organic stack ( 212 b ) disposed on the transparent bottom electrode, and a metal film/cathode ( 216 b ) disposed on the organic stack ( 212 b ), wherein the metal film ( 216 b ) contacts the organic stack ( 212 b ) by a metal/organic interface ( 220 b ) and has an outer surface ( 222 b ), and wherein a plurality of nanostructures ( 228 b ) are disposed on the outer surface ( 222 b ).
- an OLED ( 200 c ) comprises a substrate ( 204 c ), a bottom electrode ( 208 c ) disposed on the transparent substrate, an organic stack ( 212 c ) disposed on the transparent bottom electrode, and a metal film/cathode ( 216 c ) disposed on the organic stack ( 212 c ), wherein the metal film ( 216 c ) contacts the organic stack ( 212 c ) by a metal/organic interface ( 220 a ) and has an outer surface ( 222 c ), and wherein a first plurality of nanostructures ( 224 c ) are placed on the metal/organic interface ( 220 c ), and a second plurality of nanostructures ( 228 c ) are disposed on the outer surface ( 222 c ).
- nanostructures there are a number of approaches to deposit nanostructures on the outer surface of the metal film/cathode.
- a solution-based approach to depositing nanostructures may be employed, including spin coating, slot-die coating, printing, and the like.
- FIG. 9(D) illustrates an OLED ( 200 d) comprises a substrate ( 204 d ), a bottom electrode ( 208 d ) disposed on the transparent substrate, an organic stack ( 212 d ) disposed on the transparent bottom electrode, and a metal film/cathode ( 216 d ) disposed on the organic stack ( 212 d ), wherein the metal film ( 216 d ) contacts the organic stack ( 212 d ) by a metal/organic interface ( 220 d ) and has an outer surface ( 222 d ), and wherein a plurality of nanostructures ( 228 d ) are disposed on the outer surface ( 222 d ) and are embedded in a matrix ( 232 d ).
- the nanostructures and the matrix have been previously formed on a transfer film (e.g., FIG. 7 or 8 ), and transferred to the outer surface ( 222 d ) of the OLED.
- the matrix may be any of the matrix described herein. In these embodiments (e.g., FIGS. 9A-9D ), the optical properties of the matrix will not play a major role because the OLEDs are bottom-emitting. In certain embodiments, the matrix is opaque.
- nanostructures at the metal/organic interface is not compatible with the solution-based approach because of the solvent-sensitivity of the organic stack.
- nanostructures may be transferred onto the metal/organic interface in a solid-state process before the metal film is deposited, e.g., by physical vapor deposition.
- light out-coupling in an OLED device can be further improved by maximizing the efficiencies of the scattering centers in the OLED device.
- Scattering centers can be strategically positioned to interfere with the behaviors of the propagating light, especially those of the otherwise waveguided light.
- an energy density of light that would have been waveguided in an optical stack without the scattering centers can be reduced by inclusion of the scattering centers in the optical stack.
- waveguided light may have such limited amount of interaction with the scattering centers that the scattering centers cannot be employed efficiently.
- FIG. 10 shows how waveguided light may not interact with the scattering centers in any appreciable way.
- FIG. 10 shows the energy density distribution of the propagating light in a simplified device stack ( 300 ).
- the device stack includes a first electrode ( 310 ), an organic stack ( 320 ), and a glass substrate ( 360 ).
- Light generated by the organic stack propagates within the device stack before it exits through the glass substrate.
- the waveguide mode is mostly supported within the organic stack due to the index difference between the organic stack ( 320 ) and the substrate ( 360 ).
- the maximum ( 390 ) of the bell curve is approximately centered within the organic stack.
- Such waveguiding in the organic layer causes the light to have little or a minimum interaction with any element beyond the organic stack (i.e., light scattering centers that underlie the organic stack, which are not shown for sake of clarity).
- FIG. 11 shows how the energy density distribution curve is drawn away from the center of the organic stack, thereby shifting closer to one end of the organic stack.
- a high-index layer ( 420 ) is disposed between the organic stack ( 320 ) and the substrate ( 360 ).
- the high-index layer has a comparably high-index of refraction as that of the organic stack. Because of the optical continuity between the organic layer ( 320 ) and the high-index layer ( 420 ), the energy density distribution curve ( 430 ) extends into said high-index layer ( 420 ). As a result, the maximum of the curve ( 430 ) shifts toward the high-index layer ( 420 ), resulting in a greater overlap ( 450 ) with the high-index layer.
- the energy density distribution can be modified in a way that its maximum is being shifted towards the location of the scattering particles.
- FIG. 12 is based on the concept of FIG. 11 , and incorporates a plurality of nanostructures ( 340 ) between the organic stack ( 320 ) and the high-index layer ( 420 ). These nanostructures (e.g., silver nanowires) function as the second electrode in an OLED device, as well as scattering centers, which can facilitate extracting the light generated and waveguided in the organic stack.
- the overlap ( 450 ) between the scattering centers ( 340 ) and the energy density distribution curve ( 430 ) substantially increases as compared to the stack without the high-index layer (e.g., FIG.
- the overlap is defined as the under-curve area (in percentage) of the portion of the energy density distribution curve that extends beyond the organic stack as compared to the entire under-curve area of the curve.
- An example is area 450 of FIG. 11 .
- the larger the overlap the more efficient it is for the scattering centers to extract the waveguided light.
- the scattering centers are positioned in an overlapped area that is at least 2%, or at least 3% or at least 5%, or at least 10%, or at least 30% or at least 50% to achieve the desired result.
- the “high-index” layer has a refractive index at least the same or more than the refractive index of the organic layer in which the mode is propagating.
- the high-index layer has a refractive index of 1.55 or higher, or preferably 1.6 or higher, or more preferably, 1.7 or higher, or more preferably, 1.8 or higher.
- FIG. 13 shows an embodiment according to the present disclosure.
- a device stack ( 500 ) includes a first electrode ( 310 ), an organic stack ( 320 ), a second electrode ( 510 ) having a plurality of interconnecting/networking nanostructures ( 340 ), a high-index layer ( 520 ) underlying the nanostructures ( 340 ) and a substrate ( 360 ).
- the second electrode is formed by directly depositing the nanostructures on the high-index layer. If processing concern requires that a binder material be present during coating of the nanostructures on the high-index layer, the binder may be subsequently removed (e.g., by washing or plasma treatment) before forming the organic stack ( 320 ).
- FIG. 14 shows a further embodiment according to the present disclosure.
- Device stack ( 700 ) combines the characteristics of device stacks ( 500 ) and ( 600 ).
- the device stack ( 700 ) includes a first electrode ( 310 ), an organic stack ( 320 ), a second electrode ( 710 ) having a plurality of interconnecting/networking nanostructures ( 340 ) embedded in a first high-index layer or matrix( 720 ), a second underlying high-index layer ( 730 ), and a substrate ( 360 ).
- FIG. 15 shows yet another embodiment according to the present disclosure.
- a device stack ( 800 ) includes a first electrode ( 310 ), an organic stack ( 320 ), a second electrode ( 810 ) having a plurality of interconnecting/networking nanostructures ( 340 ) embedded in a low-index matrix or binder 350 , a high-index layer ( 820 ) underlying the second electrode, and a substrate ( 360 ).
- the binder is deposited with the nanostructures on the high-index layer ( 820 ) to form the electrode ( 810 ).
- the low-index binder then remains in the electrode and should have a lower refractive index than the organic stack or the high-index layer.
- the high-index layer can further include additional scattering centers, i.e., light scattering particles as defined herein.
- the transparent conductors described herein are thin conductive films of conductive nanostructures.
- one or more electrically conductive paths are established through continuous physical contacts among the nanostructures.
- a conductive network of nanostructures is formed when sufficient nanostructures are present to reach an electrical percolation threshold.
- the electrical percolation threshold is therefore an important value above which long range connectivity can be achieved.
- conductive nanostructures or “nanostructures” generally refer to electrically conductive nano-sized structures, at least one dimension of which is less than 500 nm, more preferably, less than 250 nm, 100 nm, 50 nm or 25 nm.
- the nanostructures can be of any shape or geometry.
- Typical isotropic nanostructures include nanoparticles.
- the nanostructures are anisotropically shaped (i.e., aspect ratio ⁇ 1).
- aspect ratio refers to the ratio between the length and the width (or diameter) of the nanostructure.
- the anisotropic nanostructure typically has a longitudinal axis along its length.
- Exemplary anisotropic nanostructures include nanowires and nanotubes, as defined herein.
- the nanostructures can be solid or hollow.
- Solid nanostructures include, for example, nanoparticles and nanowires.
- Nanowires thus refers to solid anisotropic nanostructures.
- each nanowire has an aspect ratio (length:diameter) of greater than 10, preferably greater than 50, and more preferably greater than 100.
- the nanowires are more than 500 nm, more than 1 ⁇ m, or more than 10 ⁇ m long.
- Hollow nanostructures include, for example, nanotubes.
- the nanotube has an aspect ratio (length:diameter) of greater than 10, preferably greater than 50, and more preferably greater than 100.
- the nanotubes are more than 500 nm, more than 1 ⁇ m, or more than 10 ⁇ m in length.
- the nanostructures can be formed of any electrically conductive material.
- the conductive material is metallic.
- the metallic material can be an elemental metal (e.g., transition metals) or a metal compound (e.g., metal oxide).
- the metallic material can also be a bimetallic material or a metal alloy, which comprises two or more types of metal. Suitable metals include, but are not limited to, silver, gold, copper, nickel, gold-plated silver, platinum and palladium.
- the conductive material can also be non-metallic, such as carbon or graphite (an allotrope of carbon).
- a nanostructure layer or coating acts as a transparent electrode in the opto-electrical devices described herein.
- the nanostructure layer (also referred to as a transparent conductor layer) is formed by depositing a liquid dispersion (or coating composition) comprising a liquid carrier and a plurality of conductive nanostructures, and allowing the liquid carrier to dry.
- the nanostructure layer may also be first formed on a transfer film, then transferred to an underlying layer in the opto-electrical device.
- the nanostructure layer comprises nanostructures that are randomly distributed and interconnect with one another. As the number of the nanostructures reaches the percolation threshold, the thin film is electrically conductive. Other non-volatile components of the ink composition, including, for example, one or more binders, surfactants and viscosity modifiers, may form part of the conductive film.
- conductive film refers to a nanostructure layer formed of networking and percolative nanostructures combined with any of the non-volatile components of the ink composition, and may include, for example, one or more of the following: a binder (e.g., a viscosity modifier), surfactant and corrosion inhibitor.
- the liquid carrier for the dispersion may be water, an alcohol, a ketone or a combination thereof.
- exemplary alcohols may include isopropanol (IPA), ethanol, diacetone alcohol (DAA) or a combination of IPA and DAA.
- exemplary ketones may include methyl ethyl ketone (MEK) and methyl propyl ketone (MPK).
- the surfactants serve to reduce aggregation of the nanostructures and/or the light-scattering material.
- suitable surfactants include fluorosurfactants such as ZONYL® surfactants, including ZONYL® FSN, ZONYL® FSO, ZONYL® FSA, ZONYL® FSH (DuPont Chemicals, Wilmington, Del.), and NOVECTM (3M, St. Paul, Minn.).
- fluorosurfactants such as ZONYL® surfactants, including ZONYL® FSN, ZONYL® FSO, ZONYL® FSA, ZONYL® FSH (DuPont Chemicals, Wilmington, Del.), and NOVECTM (3M, St. Paul, Minn.).
- Other exemplary surfactants include non-ionic surfactants based on alkylphenol ethoxylates.
- Preferred surfactants include, for example, octylphenol ethoxylates such as TRITONTM (x100, x114, x45), and nonylphenol ethoxylates such as TERGITOLTM (Dow Chemical Company, Midland Mich.).
- Further exemplary non-ionic surfactants include acetylenic-based surfactants such as DYNOL® (604, 607) (Air Products and Chemicals, Inc., Allentown, Pa.) and n-dodecyl ⁇ -D-maltoside.
- the viscosity modifier serves as a binder that immobilizes the nanostructures on a substrate.
- suitable viscosity modifiers include hydroxypropyl methylcellulose (HPMC), methyl cellulose, xanthan gum, polyvinyl alcohol, carboxy methyl cellulose, and hydroxy ethyl cellulose.
- the weight ratio of the surfactant to the viscosity modifier in the coating solution is preferably in the range of about 80:1 to about 0.01:1; the weight ratio of the viscosity modifier to the conductive nanostructures is preferably in the range of about 5:1 to about 0.000625:1; and the weight ratio of the conductive nanostructures to the surfactant is preferably in the range of about 560:1 to about 5:1.
- the ratios of components of the coating solution may be modified depending on the substrate and the method of application used.
- a preferred viscosity range for the coating solution is between about 1 and 100 cP.
- the coating solution may initially contain a binder (e.g., HPMC) to facilitate film forming.
- a binder e.g., HPMC
- the binder should be removed thereafter such that the nanostructures form a discontinuous layer and do not interfere with the optical interaction between the anti-reflective layer and the organic stack.
- the electrical conductivity of the conductive film is often measured by “sheet resistance,” which is represented by Ohms/square (or “ohms/sq”).
- sheet resistance is a function of at least the surface loading density, the size/shapes of the nanostructures, and the intrinsic electrical property of the nanostructure constituents.
- a thin film is considered conductive if it has a sheet resistance of no higher than 10 8 ohms/sq.
- the sheet resistance is no higher than 10 4 ohms/sq, 3,000 ohms/sq, 1,000 ohms/sq or 350 ohms/sq, or 100 ohms/sq.
- the sheet resistance of a conductive network formed by metal nanostructures is in the ranges of from 10 ohms/sq to 1000 ohms/sq, from 100 ohms/sq to 750 ohms/sq, 50 ohms/sq to 200 ohms/sq, from 100 ohms/sq to 500 ohms/sq, or from 100 ohms/sq to 250 ohms/sq, or 10 ohms/sq to 200 ohms/sq, from 10 ohms/sq to 50 ohms/sq, or from 1 ohms/sq to 10 ohms/sq.
- the sheet resistance is typically less than 20 ohms/square, or less than 15 ohms/square, or less than 10 ohms/square.
- the nanostructure-based transparent conductors have high light transmission in the visible region (400 nm-700 nm).
- the transparent conductor is considered optically clear when the light transmission is more than 70%, or more typically more than 85% in the visible region. More preferably, the light transmission is more than 90%, more than 93%, or more than 95%.
- a conductive film is optically transparent (e.g., more than 70% in transmission).
- transparent conductor, transparent conductive film, layer or coating, conductive film, layer or coating, and transparent electrode are used interchangeably.
- Haze is an index of optical clarity. Haze results from light-scattering and reflection/refraction due to both bulk and surface roughness effects.
- high-haze transparent conductors may be preferred. These transparent conductors typically have haze values of more than 10%, more typically more than 15%, or more typically, in the range of 20%-50%. See Published U.S. Patent Application No. 2011/0163403.
- OLED organic light-emitting diode
- Low-haze is preferred. Additional details for adjusting or reducing haze can be found, for example, Published U.S. Patent Application No. 2009/0321113. These published U.S. patent applications are co-pending applications assigned to Cambrios Technologies Inc., the assignee of the present disclosure.
- the haze value of a give transparent conductor described and claimed herein is measured photo-optically in accordance with ASTM D 1003-07, “Standard Test Method for Haze and Luminous Transmittance of Transparent Plastics.”
- Microx refers to a solid-state material into which the metal nanowires are dispersed or embedded. Portions of the nanowires may protrude from the matrix to enable surface access to the conductive network.
- the matrix is a host for the metal nanowires and provides a physical form of the conductive layer. The matrix protects the metal nanowires from adverse environmental factors, such as corrosion and abrasion. In particular, the matrix significantly lowers the permeability of corrosive elements in the environment, such as moisture, trace amount of acids, oxygen, sulfur and the like.
- the matrix offers favorable physical and mechanical properties to the conductive layer. For example, it can provide adhesion to the substrate.
- polymeric or organic matrices embedded with metal nanowires can be robust and flexible. As will be discussed in more detail herein, flexible matrices make it possible to fabricate transparent conductors in a low-cost, high throughput process.
- the optical properties of the conductive layer can be tailored by selecting an appropriate matrix material. For example, reflection loss and unwanted glare can be effectively reduced by using a matrix of a desirable refractive index, composition and thickness.
- the matrix is an optically clear material.
- a material is considered optically clear if the light transmission of the material is at least 80% in the visible region (400 nm-700 nm).
- all the layers (including the substrate) in a transparent conductor described herein are preferably optically clear.
- the optical clarity of the matrix is typically determined by a multitude of factors, including without limitation: the refractive index (RI), thickness, consistency of RI throughout the thickness, surface (including interface) reflection, and haze (a scattering loss caused by surface roughness and/or embedded particles).
- the matrix is a binder, i.e., the matrix is initially dispersed in the ink composition with the nanostructures.
- the terms “matrix” and “binder” are interchangeable. Following deposition on a substrate, the matrix cures as the volatile components of the ink composition are removed or evaporate.
- the matrix is formed after the ink composition is deposited on a substrate.
- the matrix may also form a protective layer or overcoat overlying the nanostructures.
- the matrix is about 10 nm to 5 ⁇ m thick, about 20 nm to 1 ⁇ m thick, or about 50 nm to 200 nm thick. In other embodiments, the matrix has a refractive index of about 1.3 to 2.5, or about 1.35 to 1.8.
- the matrix is a polymer, which is also referred to as a polymeric matrix.
- a polymer which is also referred to as a polymeric matrix.
- Optically clear polymers are known in the art.
- the polymer is crosslinklable or reflowable (e.g., flowable after curing upon heating).
- polyacrylics such as polymethacrylates (preferably, poly(methyl methacrylate)), polyacrylates and polyacrylonitriles, polyvinyl alcohols, polyesters (e.g., polyethylene terephthalate (PET), polyester naphthalate, and polycarbonates), polymers with a high degree of aromaticity such as phenolics or cresol-formaldehyde (Novolacs®), polystyrenes, polyvinyltoluene, polyvinylxylene, polyimides, polyamides, polyamideimides, polyetherimides, polysulfides, polysulfones, polyphenylenes, and polyphenyl ethers, polyurethane (PU), epoxy, polyolefins (e.g.
- EPR, SBR, EPDM and fluoropolymers
- fluoropolymers e.g., polyvinylidene fluoride, polytetrafluoroethylene (TFE) or polyhexafluoropropylene
- copolymers of fluoro-olefin and hydrocarbon olefin e.g., Lumiflon®
- amorphous fluorocarbon polymers or copolymers e.g., CYTOP® by Asahi Glass Co., or Teflon® AF by Du Pont).
- the matrix is an inorganic material.
- a sol-gel matrix based on silica, mullite, alumina, SiC, MgO—Al 2 O 3 —SiO 2 , Al2O 3 —SiO 2 , MgO—Al 2 O 3 —SiO 2 —Li 2 O or a mixture thereof can be used.
- the matrix itself is conductive.
- the matrix can be a conductive polymer.
- Conductive polymers are well known in the art, including without limitation: poly(3,4-ethylenedioxythiophene) (PEDOT), polyanilines, polythiophenes, and polydiacetylenes.
- An anti-reflective layer can take the form of a Rayleigh's film based on the principle of index matching, or an interference film based on destructive interference.
- Rayleigh's film is a thin film interposed between two layers that have different indices of refraction, e.g., a substrate and an organic layer (of an OLED).
- the index of refraction of the anti-reflective layer is a value selected between those of the substrate and the organic layer (i.e., “index matching”).
- index matching a value selected between those of the substrate and the organic layer. The presence of the anti-reflective layer mitigates the large difference of the indices of refraction of the substrate and the organic layer, thus reducing the internal reflection at their respective interfaces.
- the anti-reflective layer may have an index of refraction in the range of 1.5-1.8, or in the range of 1.55-1.6, or in the range of 1.6-1.65, or in the ranges of 1.65-1.7, or 1.7-1.75, or 1.75-1.8.
- the anti-reflective layer is typically optically transparent and has a thickness between 200 nm to 2 microns.
- the anti-reflective layer is a polyimide layer.
- polyimides regardless of the specific chemical moieties thereof have indices of refraction of about 1.6, which value is between those of a typical substrate (e.g., glass) and the organic stack, which tends to have a much higher index of refraction than that of the substrate.
- the anti-reflective layer can be typically deposited on a substrate according to known methods in the art, which includes spin-coating, slot die coating or gravure coating, etc.
- a multi-layer interference film may also be used.
- Such an interference film typically comprises alternating layers of low refractive index material and high refractive index material, the thickness of which can be selected and optimized depending on the wavelength to be transmitted.
- the light-emitting layer is a component of the organic stack in the OLED, according to one embodiment.
- the light-emitting layer can be an organic material capable of emitting light when a current is passed between the anode (30) and the cathode.
- the light-emitting layer contains a phosphorescent emissive material, although fluorescent emissive materials may also be used. Phosphorescent materials are preferred because of the higher luminescent efficiencies associated with such materials.
- the light-emitting layer may also comprise a host material capable of transporting electrons and/or holes, doped with an emissive material that may trap electrons, holes, and/or excitons, such that excitons relax from the emissive material via a photoemissive mechanism.
- the light-emitting layer may comprise a single material or a material that combines transport and emissive properties.
- the photo-active layer is also a type of organic stack, which is the light-absorbing component of a PV cell that converts light directly into electricity.
- the photo-active layer may be one or more of the following semiconductive materials: monocrystalline silicon, polycrystalline silicon, amorphous silicon, cadmium telluride, and copper indium selenide/sulfide.
- suitable materials include thin-film layers of organic dyes, and/or organic polymers.
- nanocrystals or quantum dots may be used as the light-absorbing material.
- the photo-active layer can be a single layer, or more typically, in multiple physical configurations to take advantage of different light absorption and charge separation mechanisms.
- scattering centers are formed by light-scattering material, which is an inert material that causes light scattering.
- the light-scattering material includes, for example, particulate scattering media or scattering-promoting agents (e.g., precursors).
- the light-scattering material is in the form of particles, also referred to as “light-scattering particles,” which can be directly incorporated into a coating solution of polyimide. Following coating of the polyimide solution on the substrate, the light-scattering particles are distributed randomly in the polyimide film.
- the light-scattering particles are preferably micro-sized particles, or more preferably nano-sized particles.
- the particle sizes are in the range of 1 nm to several microns; preferably in the range of 10 nm-800 nm, 10 nm-600 nm, 10 nm-400 nm, or 10 nm-200 nm. More typically, the particle sizes are in the range of 1 nm-100 nm.
- the light-scattering particles may be an inorganic material, which may be conductive, semiconductive, or non-conductive. Typically, the index of refraction of the light scattering material should be high (e.g., more than 1.6, or more typically, more than 1.7, or more typically, about 1.8).
- suitable light-scattering particles include, without limitation, SiO x , AlO x , InO x , SnO x , ZnO x , Al-doped ZnO x (AZO), indium tin oxide (ITO), Sb-doped SnO x (ATO), TiO x , SiC, fluorine-doped SnO x (FTO), and the like.
- Examples of higher refractive index particles include TiO x , AlO x , and ZnO x .
- conductive particles include ITO, AZO, ATO, and the like. Different oxidation ratios (stoichiometries and hence doping levels) may be used, particularly with respect to systems that include three or more elements (e.g., AZO, ATO, ITO). In particular and in preferred embodiments, such materials, compositions and doping levels may be used for the scattering additives and also act as a suitable buffer and interface layer between the conductive nanostructure network and an adjacent semiconductor (e.g., a-Si, um-Si layer in a PV stack). For example, without limitation, AdNano® ZnO 20 and AdNano® Z805 nanoparticles and AdNano® ZnO deionized water-based dispersion can be used in this way.
- Any substrate suitable for conventional OLED is also suitable for the various embodiments of the present disclosure.
- rigid substrates include glass, polycarbonates, acrylics, and the like.
- polyesters e.g., polyethylene terephthalate (PET), polyester naphthalate, and polycarbonate
- polyolefins e.g., linear, branched, and cyclic polyolefins
- polyvinyls e.g., polyvinyl chloride, polyvinylidene chloride, polyvinyl acetals, polystyrene, polyacrylates, and the like
- cellulose ester bases e.g., cellulose triacetate, and cellulose acetate
- polysulphones such as polyethersulphone, polyimides, silicones, and other conventional polymeric films.
- Silver nanowires were synthesized by the reduction of silver nitrate dissolved in ethylene glycol in the presence of poly(vinyl pyrrolidone) (PVP) following the “polyol” method described in, e.g., Y. Sun, B. Gates, B. Mayers, & Y. Xia, “Crystalline silver nanowires by soft solution processing,” Nanoletters 2(2): 165-168, 2002.
- PVP poly(vinyl pyrrolidone)
- a modified polyol method described in co-pending and co-owned U.S. patent application Ser. No. 11/766,552, produces more uniform silver nanowires at higher yields than does the conventional “polyol” method. This application is incorporated by reference herein in its entirety. Resulting nanowires primarily had lengths from about 13 ⁇ m to about 17 ⁇ m and diameters from about 34 nm to about 44 nm.
- a typical coating composition for depositing metal nanowires comprises, by weight, from 0.0025% to 0.1% surfactant (e.g., a preferred range is from 0.0025% to 0.05% for ZONYL® FSO-100), from 0.02% to 4% viscosity modifier (e.g., a preferred range is 0.02% to 0.5% for hydroxypropyl methylcellulose (HPMC), from 94.5% to 99.0% solvent and from 0.05% to 1.4% metal nanowires.
- surfactant e.g., a preferred range is from 0.0025% to 0.05% for ZONYL® FSO-100
- 0.02% to 4% viscosity modifier e.g., a preferred range is 0.02% to 0.5% for hydroxypropyl methylcellulose (HPMC)
- HPMC hydroxypropyl methylcellulose
- the coating composition can be prepared based on a desired concentration of the nanowires, which is an index of the loading density of the final conductive film formed on the substrate.
- the coating composition can be deposited on a substrate according to, for example, the methods described in co-pending U.S. patent application Ser. No. 11/504,822.
- deposition techniques can be employed, e.g., sedimentation flow metered by a narrow channel, die flow, flow on an incline, slit coating, gravure coating, microgravure coating, bead coating, dip coating, slot die coating, and the like.
- Printing techniques can also be used to directly print an ink composition onto a substrate with or without a pattern.
- inkjet, flexoprinting and screen printing can be employed. It is further understood that the viscosity and shear behavior of the fluid as well as the interactions between the nanowires may affect the distribution and interconnectivity of the nanowires deposited.
- a sample conductive nanostructure dispersion was prepared that comprised silver nanowires as fabricated in Example 1 dispersed, a surfactant (e.g., Triton), and a viscosity modifier (e.g., low molecular-weight HPMC) and water.
- the final dispersion included about 0.4% silver and 0.4% HPMC (by weight).
- This dispersion can be used (neat or diluted) in combination with a light-scattering material (e.g., in a particulate form) directly to form a coating solution.
- the dispersion can be combined with a dispersion of a light-scattering material to form a coating solution.
- a polyimide coating solution (e.g., SUNEVER Polyimide (type 0821)) was first deposited on a substrate, spun on at 1500 rpm, followed by drying at 90° C., and curing for 30 min at 200° C. The haze and transmission of the resulting sample were 0.1% and 92.1%, respectively. The film thickness was measured at 1.2 microns.
- Silver nanowires were deposited on an anti-reflective layer, e.g., a polyimide film, to form a conductive film.
- a standard nanowire suspension was first prepared according to Example 2 (0.4% AgNW, 0.4% LMw HPMC, 250 ppm Triton X). The coating solution was spun on the polyimide film at 1000 rpm, followed by drying for 90 seconds at 50° C. and annealing for 90 seconds at 140° C. The resulting sheet resistance is 9 ohms/sq with 87.5% in transmission and 3.9% in haze.
- the optical data as well as the sheet resistance were substantially identical.
- the anti-reflective layer does not impact the optical and electrical performance of the nanostructure layer.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Dispersion Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Nanotechnology (AREA)
- Electroluminescent Light Sources (AREA)
- Photovoltaic Devices (AREA)
- Non-Insulated Conductors (AREA)
- Powder Metallurgy (AREA)
Abstract
Description
√{square root over (n2×n5)}
-
- (i) depositing a plurality of nanostructures (128) on a release liner (144);
- (ii) forming a matrix (148) on the plurality of nanostructures (128), the matrix having a top surface (150);
- (iii) contacting a transfer film (152) to the top surface (150) of the matrix (148), and
- (iv) removing the release liner (144) to expose a nanostructure surface (156);
-
- (i) forming a matrix (148) on a release liner (144), the matrix having a top surface (150);
- (ii) depositing a plurality of nanostructures (128) on the top surface (150) of the matrix (148);
- (iii) applying a transfer film (152) on the plurality of nanostructures (128);
- (iv) reflowing the matrix (148) to form a reflowed matrix;
- (v) applying pressure to the transfer film (152) to press the nanostructures (128) underlying the transfer film (152) into the reflowed matrix such that the transfer film contacts the top surface (150) of the matrix (148);
- (vi) removing the transfer film (152) to expose the top surface (150);
Claims (4)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/651,128 US8637859B2 (en) | 2011-10-13 | 2012-10-12 | Opto-electrical devices incorporating metal nanowires |
US14/109,164 US9076988B2 (en) | 2011-10-13 | 2013-12-17 | Opto-electrical devices incorporating metal nanowires |
US14/746,105 US9559335B2 (en) | 2011-10-13 | 2015-06-22 | Opto-electrical devices incorporating metal nanowires |
US15/415,105 US9905763B2 (en) | 2011-10-13 | 2017-01-25 | Opto-electrical devices incorporating metal nanowires |
US15/877,683 US10367141B2 (en) | 2011-10-13 | 2018-01-23 | Opto-electrical devices incorporating metal nanowires |
US16/454,258 US10636970B2 (en) | 2011-10-13 | 2019-06-27 | Opto-electrical devices incorporating metal nanowires |
US16/859,071 US10964890B2 (en) | 2011-10-13 | 2020-04-27 | Opto-electrical devices incorporating metal nanowires |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161546938P | 2011-10-13 | 2011-10-13 | |
US201261593790P | 2012-02-01 | 2012-02-01 | |
US13/651,128 US8637859B2 (en) | 2011-10-13 | 2012-10-12 | Opto-electrical devices incorporating metal nanowires |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/109,164 Division US9076988B2 (en) | 2011-10-13 | 2013-12-17 | Opto-electrical devices incorporating metal nanowires |
Publications (2)
Publication Number | Publication Date |
---|---|
US20130105770A1 US20130105770A1 (en) | 2013-05-02 |
US8637859B2 true US8637859B2 (en) | 2014-01-28 |
Family
ID=47080865
Family Applications (7)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/651,128 Active US8637859B2 (en) | 2011-10-13 | 2012-10-12 | Opto-electrical devices incorporating metal nanowires |
US14/109,164 Active US9076988B2 (en) | 2011-10-13 | 2013-12-17 | Opto-electrical devices incorporating metal nanowires |
US14/746,105 Active US9559335B2 (en) | 2011-10-13 | 2015-06-22 | Opto-electrical devices incorporating metal nanowires |
US15/415,105 Active US9905763B2 (en) | 2011-10-13 | 2017-01-25 | Opto-electrical devices incorporating metal nanowires |
US15/877,683 Active US10367141B2 (en) | 2011-10-13 | 2018-01-23 | Opto-electrical devices incorporating metal nanowires |
US16/454,258 Active US10636970B2 (en) | 2011-10-13 | 2019-06-27 | Opto-electrical devices incorporating metal nanowires |
US16/859,071 Active US10964890B2 (en) | 2011-10-13 | 2020-04-27 | Opto-electrical devices incorporating metal nanowires |
Family Applications After (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/109,164 Active US9076988B2 (en) | 2011-10-13 | 2013-12-17 | Opto-electrical devices incorporating metal nanowires |
US14/746,105 Active US9559335B2 (en) | 2011-10-13 | 2015-06-22 | Opto-electrical devices incorporating metal nanowires |
US15/415,105 Active US9905763B2 (en) | 2011-10-13 | 2017-01-25 | Opto-electrical devices incorporating metal nanowires |
US15/877,683 Active US10367141B2 (en) | 2011-10-13 | 2018-01-23 | Opto-electrical devices incorporating metal nanowires |
US16/454,258 Active US10636970B2 (en) | 2011-10-13 | 2019-06-27 | Opto-electrical devices incorporating metal nanowires |
US16/859,071 Active US10964890B2 (en) | 2011-10-13 | 2020-04-27 | Opto-electrical devices incorporating metal nanowires |
Country Status (6)
Country | Link |
---|---|
US (7) | US8637859B2 (en) |
EP (2) | EP3550629A3 (en) |
JP (1) | JP6195836B2 (en) |
KR (2) | KR20190092492A (en) |
TW (1) | TWI576310B (en) |
WO (1) | WO2013056155A2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140084266A1 (en) * | 2012-07-02 | 2014-03-27 | The Regents Of The University Of California | Semi-transparent, transparent, stacked and top-illuminated organic photovoltaic devices |
US20150249212A1 (en) * | 2014-02-28 | 2015-09-03 | International Business Machines Corporation | Optoelectronics integration by transfer process |
US10564780B2 (en) | 2015-08-21 | 2020-02-18 | 3M Innovative Properties Company | Transparent conductors including metal traces and methods of making same |
US10739623B2 (en) | 2016-11-10 | 2020-08-11 | Bergische Universitaet Wuppertal | Waveguide, method of projecting light from a waveguide, and display |
US10964890B2 (en) * | 2011-10-13 | 2021-03-30 | Cambrios Film Solutions Corporation | Opto-electrical devices incorporating metal nanowires |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108594338B (en) * | 2011-11-04 | 2019-11-26 | 凯姆控股有限公司 | Optical stack based on nanostructure and the display with the optical stack |
KR20130108027A (en) * | 2012-03-23 | 2013-10-02 | 주식회사 엘지화학 | Method for preparing substrate for organic electronic device |
JP5865851B2 (en) * | 2012-03-23 | 2016-02-17 | 富士フイルム株式会社 | Manufacturing method of conductive member, conductive member, and touch panel using the same |
CN104247053B (en) * | 2012-03-23 | 2017-03-08 | 夏普株式会社 | Semiconductor light-emitting elements, the manufacture method of semiconductor light-emitting elements, semiconductor light-emitting apparatus and substrate |
KR20130111154A (en) * | 2012-03-30 | 2013-10-10 | 주식회사 엘지화학 | Substrate for organic electronic device |
US9655252B2 (en) * | 2012-06-01 | 2017-05-16 | Suzhou Nuofei Nano Science And Technology Co., Ltd. | Low haze transparent conductive electrodes and method of making the same |
US9780335B2 (en) * | 2012-07-20 | 2017-10-03 | 3M Innovative Properties Company | Structured lamination transfer films and methods |
TWI493744B (en) * | 2012-11-30 | 2015-07-21 | Solar cell module and method of forming the same | |
US9368248B2 (en) | 2013-04-05 | 2016-06-14 | Nuovo Film, Inc. | Transparent conductive electrodes comprising metal nanowires, their structure design, and method of making such structures |
KR102080131B1 (en) * | 2013-06-17 | 2020-04-14 | 삼성디스플레이 주식회사 | Organic light emitting diode display |
DE102013109898A1 (en) * | 2013-09-10 | 2015-03-12 | Osram Oled Gmbh | Organic light-emitting component, method for producing an organic light-emitting component and illumination device for a motor vehicle |
US9484553B2 (en) * | 2013-09-25 | 2016-11-01 | Boe Technology Group Co., Ltd. | Organic light-emitting diode device and manufacturing method thereof |
CN105684098B (en) * | 2013-10-04 | 2018-10-02 | 万斯有限公司 | The good electrode of light transmittance, preparation method and the electronic component including it |
KR102156764B1 (en) * | 2013-11-13 | 2020-09-16 | 엘지디스플레이 주식회사 | Organic light emitting diode display device and method for fabricating the same |
WO2015077629A1 (en) * | 2013-11-21 | 2015-05-28 | Atom Nanoelectronics, Inc. | Devices, structures, materials and methods for vertical light emitting transistors and light emitting displays |
EP3084776B1 (en) * | 2013-12-19 | 2018-06-20 | Fraunhofer Gesellschaft zur Förderung der Angewand | Transparent nanowire electrode with functional organic layer |
MY176206A (en) * | 2013-12-26 | 2020-07-24 | Vitro Flat Glass Llc | Organic light emitting diode with light extracting electrode |
ES2825099T3 (en) * | 2013-12-26 | 2021-05-14 | Vitro Flat Glass Llc | Light Extraction Electrode and Organic Light Emitting Diode with Light Extraction Electrode |
CN103715368A (en) * | 2013-12-27 | 2014-04-09 | 京东方科技集团股份有限公司 | Light emitting device, manufacturing method thereof and display device |
DE102014100627A1 (en) * | 2014-01-21 | 2015-07-23 | Osram Oled Gmbh | Optoelectronic component and method for producing an optoelectronic component |
DE102014107102A1 (en) * | 2014-05-20 | 2015-11-26 | Osram Opto Semiconductors Gmbh | Organic light-emitting device and method for producing an organic light-emitting device |
DE102014107658A1 (en) | 2014-05-30 | 2015-12-03 | Osram Opto Semiconductors Gmbh | Organic optoelectronic component and method for its production |
US10558027B2 (en) | 2014-07-02 | 2020-02-11 | Bergische Universitaet Wuppertal | Method of concentrating light and light concentrator |
GB201412455D0 (en) * | 2014-07-14 | 2014-08-27 | Cambridge Display Tech Ltd | Lighting devices |
KR20160008797A (en) * | 2014-07-15 | 2016-01-25 | (주)켐옵틱스 | Light Extraction Efficiency improved Organic Light Emitting Diode |
EP3210250B1 (en) * | 2014-10-24 | 2020-10-07 | Corning Incorporated | Oleds with improved light extraction using enhanced guided mode coupling |
DE102015101820A1 (en) | 2015-02-09 | 2016-08-11 | Osram Oled Gmbh | Process for producing an organic light emitting diode and organic light emitting diode |
KR20170110628A (en) | 2015-02-09 | 2017-10-11 | 오스람 오엘이디 게엠베하 | Method for manufacturing organic light emitting diode and organic light emitting diode |
CN104701466B (en) * | 2015-03-25 | 2018-09-04 | 京东方科技集团股份有限公司 | Array substrate and preparation method thereof and display device |
DE102015104793A1 (en) * | 2015-03-27 | 2016-09-29 | Osram Oled Gmbh | Organic light emitting diode and method for producing an organic light emitting diode |
KR102433790B1 (en) * | 2015-07-07 | 2022-08-18 | 삼성디스플레이 주식회사 | Electrode, method for manufacturing the same and organic light emitting diode display including the same |
CN105098095B (en) * | 2015-07-27 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of organic light emitting diode device and preparation method thereof, display device |
WO2017096058A1 (en) | 2015-12-01 | 2017-06-08 | LUAN, Xinning | Electron injection based vertical light emitting transistors and methods of making |
CN105405982A (en) * | 2015-12-09 | 2016-03-16 | 深圳市华星光电技术有限公司 | Organic light-emitting diode encapsulation structure, encapsulation method and organic light-emitting diode |
KR102560317B1 (en) | 2015-12-29 | 2023-07-28 | 삼성디스플레이 주식회사 | Organic light emitting display device |
US10541374B2 (en) | 2016-01-04 | 2020-01-21 | Carbon Nanotube Technologies, Llc | Electronically pure single chirality semiconducting single-walled carbon nanotube for large scale electronic devices |
US20180175319A1 (en) | 2016-12-15 | 2018-06-21 | Universal Display Corporation | Spectral emission modification using localized surface plasmon of metallic nanoparticles |
CN108630827B (en) * | 2017-03-15 | 2020-01-14 | Tcl集团股份有限公司 | Quantum dot solid-state film, quantum dot light-emitting diode and preparation method thereof |
US10847757B2 (en) | 2017-05-04 | 2020-11-24 | Carbon Nanotube Technologies, Llc | Carbon enabled vertical organic light emitting transistors |
CN110603301B (en) | 2017-05-05 | 2022-09-30 | 3M创新有限公司 | Polymer film and display device containing such film |
US10665796B2 (en) | 2017-05-08 | 2020-05-26 | Carbon Nanotube Technologies, Llc | Manufacturing of carbon nanotube thin film transistor backplanes and display integration thereof |
US10978640B2 (en) | 2017-05-08 | 2021-04-13 | Atom H2O, Llc | Manufacturing of carbon nanotube thin film transistor backplanes and display integration thereof |
CN107275426A (en) * | 2017-05-26 | 2017-10-20 | 电子科技大学 | A kind of many sophisticated nano-structured solar cells of plasma and its manufacture method |
EP3617292A1 (en) * | 2018-08-30 | 2020-03-04 | Samsung Electronics Co., Ltd. | Electronic device including quantum dots |
US11106107B2 (en) * | 2018-09-09 | 2021-08-31 | Zhejiang Jingyi New Material Technology Co., Ltd | Ultra-flexible and robust silver nanowire films for controlling light transmission and method of making the same |
US11910525B2 (en) | 2019-01-28 | 2024-02-20 | C3 Nano, Inc. | Thin flexible structures with surfaces with transparent conductive films and processes for forming the structures |
CN109991772B (en) * | 2019-03-29 | 2023-03-14 | 广州国显科技有限公司 | Display panel film structure and preparation process thereof |
CN110246876B (en) * | 2019-06-03 | 2021-07-06 | 深圳市华星光电半导体显示技术有限公司 | Light-emitting layer structure and display device |
CN111224011A (en) * | 2019-11-06 | 2020-06-02 | 武汉华星光电半导体显示技术有限公司 | Display panel, preparation method thereof and display device |
CN111769202B (en) * | 2020-06-02 | 2022-08-30 | 南京邮电大学 | Organic light-emitting device structure based on silver nanowire electrode |
TWI771975B (en) * | 2021-04-01 | 2022-07-21 | 國立中山大學 | Method for manufacturing anti-reflection layer of a solar panel |
CN113782647B (en) * | 2021-08-03 | 2023-06-23 | 华东师范大学 | Flexible light-emitting device and preparation method thereof |
CN114171699A (en) * | 2021-11-30 | 2022-03-11 | 深圳市华星光电半导体显示技术有限公司 | Display panel and preparation method thereof |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050088078A1 (en) | 2003-01-28 | 2005-04-28 | Mei-Rurng Tseng | Organic electroluminescent device |
US20050127832A1 (en) | 2002-03-29 | 2005-06-16 | Satoru Toguchi | Light-emitting device, its manufacturing method, and display using same |
US20080210052A1 (en) | 2006-06-21 | 2008-09-04 | Cambrios Technologies Corporation | Methods of controlling nanostructure formations and shapes |
US20080259262A1 (en) | 2007-04-20 | 2008-10-23 | Cambrios Technologies Corporation | Composite transparent conductors and methods of forming the same |
US20090321113A1 (en) | 2007-04-20 | 2009-12-31 | Cambrios Technologies Corporation | High contrast transparent conductors and methods of forming the same |
US20100295446A1 (en) | 2008-01-31 | 2010-11-25 | Sumitomo Chemical Company, Limited | Transparent plate with transparent conductive film and organic electroluminescence element |
US20110163403A1 (en) | 2009-12-04 | 2011-07-07 | Cambrios Technologies Corporation | Nanostructure-based transparent conductors having increased haze and devices comprising the same |
US8049333B2 (en) | 2005-08-12 | 2011-11-01 | Cambrios Technologies Corporation | Transparent conductors comprising metal nanowires |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11160703A (en) * | 1997-11-21 | 1999-06-18 | Sony Corp | Display device |
JP2001056467A (en) * | 1999-08-20 | 2001-02-27 | Nec Corp | Active matrix type liquid crystal display device |
JP2001196168A (en) * | 2000-01-14 | 2001-07-19 | Sharp Corp | Method for manufacturing organic electroluminescent element |
JP2003031374A (en) * | 2001-07-17 | 2003-01-31 | Sony Corp | Organic electroluminescent element |
JP4195352B2 (en) * | 2003-09-10 | 2008-12-10 | 三星エスディアイ株式会社 | Light emitting element substrate and light emitting element using the same |
JP2006012726A (en) * | 2004-06-29 | 2006-01-12 | Bridgestone Corp | Organic electroluminescent panel |
ATE465521T1 (en) * | 2004-07-29 | 2010-05-15 | Konarka Technologies Inc | METHOD FOR COATING NANOSTRUCTURED ELECTRODES |
US8228798B2 (en) | 2006-06-28 | 2012-07-24 | Cisco Technology, Inc. | QoS-aware service flow mapping in mobile wireless all IP networks |
TWI426531B (en) * | 2006-10-12 | 2014-02-11 | Cambrios Technologies Corp | Nanowire-based transparent conductors and applications thereof |
JP4538482B2 (en) * | 2007-10-04 | 2010-09-08 | 富士フイルム株式会社 | Antiglare antireflection film, polarizing plate and display device |
US8198796B2 (en) * | 2008-07-25 | 2012-06-12 | Konica Minolta Holdings, Inc. | Transparent electrode and production method of same |
KR20190092492A (en) * | 2011-10-13 | 2019-08-07 | 캄브리오스 필름 솔루션스 코포레이션 | Opto-electrical devices with electrode incorporating metal nanowires |
-
2012
- 2012-10-12 KR KR1020197019299A patent/KR20190092492A/en not_active IP Right Cessation
- 2012-10-12 EP EP19170557.3A patent/EP3550629A3/en not_active Withdrawn
- 2012-10-12 US US13/651,128 patent/US8637859B2/en active Active
- 2012-10-12 KR KR1020147012831A patent/KR101999253B1/en active IP Right Grant
- 2012-10-12 JP JP2014535956A patent/JP6195836B2/en active Active
- 2012-10-12 EP EP12778915.4A patent/EP2766939B1/en not_active Not-in-force
- 2012-10-12 WO PCT/US2012/060101 patent/WO2013056155A2/en active Application Filing
- 2012-10-15 TW TW101137969A patent/TWI576310B/en active
-
2013
- 2013-12-17 US US14/109,164 patent/US9076988B2/en active Active
-
2015
- 2015-06-22 US US14/746,105 patent/US9559335B2/en active Active
-
2017
- 2017-01-25 US US15/415,105 patent/US9905763B2/en active Active
-
2018
- 2018-01-23 US US15/877,683 patent/US10367141B2/en active Active
-
2019
- 2019-06-27 US US16/454,258 patent/US10636970B2/en active Active
-
2020
- 2020-04-27 US US16/859,071 patent/US10964890B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050127832A1 (en) | 2002-03-29 | 2005-06-16 | Satoru Toguchi | Light-emitting device, its manufacturing method, and display using same |
US20050088078A1 (en) | 2003-01-28 | 2005-04-28 | Mei-Rurng Tseng | Organic electroluminescent device |
US8049333B2 (en) | 2005-08-12 | 2011-11-01 | Cambrios Technologies Corporation | Transparent conductors comprising metal nanowires |
US20080210052A1 (en) | 2006-06-21 | 2008-09-04 | Cambrios Technologies Corporation | Methods of controlling nanostructure formations and shapes |
US20080259262A1 (en) | 2007-04-20 | 2008-10-23 | Cambrios Technologies Corporation | Composite transparent conductors and methods of forming the same |
US20090321113A1 (en) | 2007-04-20 | 2009-12-31 | Cambrios Technologies Corporation | High contrast transparent conductors and methods of forming the same |
US20100295446A1 (en) | 2008-01-31 | 2010-11-25 | Sumitomo Chemical Company, Limited | Transparent plate with transparent conductive film and organic electroluminescence element |
US20110163403A1 (en) | 2009-12-04 | 2011-07-07 | Cambrios Technologies Corporation | Nanostructure-based transparent conductors having increased haze and devices comprising the same |
Non-Patent Citations (5)
Title |
---|
An et al., "Surface plasmon mediated energy transfer of electrically-pumped excitons," Optics Express 18(5): 4041-4048, 2010. |
Jin et al., "Silica nanoparticle-embedded sol-gel organic/inorganic hybrid nanocomposite for transparent OLED encapsulation," Organic Electronics 13: 53-57, 2012. |
Koo et al., "Light extraction from organic light-emitting diodes enhanced by spontaneously formed buckles," Nature Photonics 4: 222-226, 2010. |
Riedel et al., "Polymer light emitting diodes containing nanoparticle clusters for improved efficiency," Organic Electronics 11: 1172-1175, 2010. |
Sun et al., "Crystalline Silver Nanowires by Soft Solution Processing," Nano Letters 2(2): 165-168, 2002. |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10964890B2 (en) * | 2011-10-13 | 2021-03-30 | Cambrios Film Solutions Corporation | Opto-electrical devices incorporating metal nanowires |
US20140084266A1 (en) * | 2012-07-02 | 2014-03-27 | The Regents Of The University Of California | Semi-transparent, transparent, stacked and top-illuminated organic photovoltaic devices |
US8993998B2 (en) * | 2012-07-02 | 2015-03-31 | The Regents Of The University Of California | Electro-optic device having nanowires interconnected into a network of nanowires |
US20150249212A1 (en) * | 2014-02-28 | 2015-09-03 | International Business Machines Corporation | Optoelectronics integration by transfer process |
US9577196B2 (en) * | 2014-02-28 | 2017-02-21 | International Business Machines Corporation | Optoelectronics integration by transfer process |
US10564780B2 (en) | 2015-08-21 | 2020-02-18 | 3M Innovative Properties Company | Transparent conductors including metal traces and methods of making same |
US10739623B2 (en) | 2016-11-10 | 2020-08-11 | Bergische Universitaet Wuppertal | Waveguide, method of projecting light from a waveguide, and display |
Also Published As
Publication number | Publication date |
---|---|
EP2766939A2 (en) | 2014-08-20 |
US9905763B2 (en) | 2018-02-27 |
US20140175407A1 (en) | 2014-06-26 |
US20170133595A1 (en) | 2017-05-11 |
US20190319192A1 (en) | 2019-10-17 |
US10367141B2 (en) | 2019-07-30 |
KR20190092492A (en) | 2019-08-07 |
US20200259092A1 (en) | 2020-08-13 |
WO2013056155A2 (en) | 2013-04-18 |
US9076988B2 (en) | 2015-07-07 |
EP2766939B1 (en) | 2019-04-24 |
JP2014534572A (en) | 2014-12-18 |
US20180159040A1 (en) | 2018-06-07 |
KR20140095488A (en) | 2014-08-01 |
EP3550629A2 (en) | 2019-10-09 |
US20150287955A1 (en) | 2015-10-08 |
US10636970B2 (en) | 2020-04-28 |
US9559335B2 (en) | 2017-01-31 |
TW201321299A (en) | 2013-06-01 |
TWI576310B (en) | 2017-04-01 |
WO2013056155A3 (en) | 2013-07-04 |
JP6195836B2 (en) | 2017-09-13 |
US10964890B2 (en) | 2021-03-30 |
US20130105770A1 (en) | 2013-05-02 |
KR101999253B1 (en) | 2019-10-01 |
EP3550629A3 (en) | 2019-12-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10964890B2 (en) | Opto-electrical devices incorporating metal nanowires | |
Azani et al. | Benefits, problems, and solutions of silver nanowire transparent conductive electrodes in indium tin oxide (ITO)‐free flexible solar cells | |
Kinner et al. | Inkjet-printed embedded Ag-PEDOT: PSS electrodes with improved light out coupling effects for highly efficient ITO-free blue polymer light emitting diodes | |
JP6130882B2 (en) | Method for patterning a conductive layer | |
US9860993B2 (en) | Grid and nanostructure transparent conductor for low sheet resistance applications | |
US8174667B2 (en) | Nanowire-based transparent conductors and applications thereof | |
KR102154562B1 (en) | Nanostructure-based transparent conductors having increased haze and devices comprising the same | |
Jing et al. | Vacuum-free transparent quantum dot light-emitting diodes with silver nanowire cathode | |
JP2018092937A (en) | Transparent conductor | |
KR102066075B1 (en) | Substrate having transparent electrode for flexible display and method of fabricating the same | |
US9560754B2 (en) | Solution processed nanoparticle-nanowire composite film as a transparent conductor for opto-electronic devices |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: CAMBRIOS TECHNOLOGIES CORPORATION, CALIFORNIA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:PSCHENITZKA, FLORIAN;REEL/FRAME:029615/0189 Effective date: 20121109 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
AS | Assignment |
Owner name: SEED IP LAW GROUP PLLC, WASHINGTON Free format text: LIEN;ASSIGNOR:CAMBRIOS TECHNOLOGIES CORPORATION;REEL/FRAME:037760/0806 Effective date: 20160209 |
|
AS | Assignment |
Owner name: CAMBRIOS TECHNOLOGIES CORPORATION, CALIFORNIA Free format text: RELEASE OF LIEN;ASSIGNOR:SEED IP LAW GROUP PLLC;REEL/FRAME:038146/0630 Effective date: 20160317 |
|
AS | Assignment |
Owner name: CHAMP GREAT INT'L CORPORATION, SEYCHELLES Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:CAMBRIOS TECHNOLOGIES CORPORATION;REEL/FRAME:038295/0845 Effective date: 20160316 |
|
AS | Assignment |
Owner name: CAM HOLDING CORPORATION, VIRGIN ISLANDS, BRITISH Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:CHAMP GREAT INTERNATIONAL CORPORATION;REEL/FRAME:040322/0944 Effective date: 20160909 |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
AS | Assignment |
Owner name: CAMBRIOS FILM SOLUTIONS CORPORATION, VIRGIN ISLAND Free format text: CHANGE OF NAME;ASSIGNOR:CAM HOLDING CORPORATION;REEL/FRAME:048172/0510 Effective date: 20180828 Owner name: CAMBRIOS FILM SOLUTIONS CORPORATION, VIRGIN ISLANDS, BRITISH Free format text: CHANGE OF NAME;ASSIGNOR:CAM HOLDING CORPORATION;REEL/FRAME:048172/0510 Effective date: 20180828 |
|
AS | Assignment |
Owner name: INVENTIVE POWER LIMITED, TAIWAN Free format text: SECURITY INTEREST;ASSIGNOR:CAMBRIOS FILM SOLUTIONS CORPORATION;REEL/FRAME:047297/0351 Effective date: 20171117 |
|
AS | Assignment |
Owner name: CAMBRIOS FILM SOLUTIONS CORPORATION, VIRGIN ISLANDS, BRITISH Free format text: CHANGE OF NAME;ASSIGNOR:CAM HOLDING CORPORATION;REEL/FRAME:047508/0135 Effective date: 20180930 Owner name: CAMBRIOS FILM SOLUTIONS CORPORATION, VIRGIN ISLAND Free format text: CHANGE OF NAME;ASSIGNOR:CAM HOLDING CORPORATION;REEL/FRAME:047508/0135 Effective date: 20180930 |
|
AS | Assignment |
Owner name: CAMBRIOS FILM SOLUTIONS CORPORATION, VIRGIN ISLANDS, BRITISH Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:INVENTIVE POWER LIMITED;REEL/FRAME:055633/0196 Effective date: 20210316 |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 8TH YR, SMALL ENTITY (ORIGINAL EVENT CODE: M2552); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY Year of fee payment: 8 |