US8579502B2 - Method for determining leak rate through a bond line of a MEMS device - Google Patents
Method for determining leak rate through a bond line of a MEMS device Download PDFInfo
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- US8579502B2 US8579502B2 US13/185,723 US201113185723A US8579502B2 US 8579502 B2 US8579502 B2 US 8579502B2 US 201113185723 A US201113185723 A US 201113185723A US 8579502 B2 US8579502 B2 US 8579502B2
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- mems device
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- bond line
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- leak rate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/008—Aspects related to assembling from individually processed components, not covered by groups B81C3/001 - B81C3/002
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Definitions
- the invention relates generally to Micro-Electro-Mechanical Systems (MEMS). More particularly, the invention relates to a method for optimizing wafer bond line width for reduction of parasitic capacitance in MEMS accelerometers and a method of determining leak rate through a bond line.
- MEMS Micro-Electro-Mechanical Systems
- MEMS Micro-Electro-Mechanical Systems
- CMOS complementary metal-oxide-semiconductor
- BICMOS Integrated Circuit
- micromechanical components are fabricated using “micromachining” techniques that selectively etch away or add new layers to the silicon wafer to form mechanical and electromechanical devices.
- MEMS devices are widely used in automotives, navigation systems, chemical and biological sensors, microoptics, accelerometers, pressure sensors and other devices.
- a common approach to fabrication of MEMS devices is the so-called bulk MEMS process. This process consists of processing two or three silicon wafers with patterns machined by Deep Reactive Ion Etching (DRIE) to form the structure used in each layer, and then bonding these layers together by a process called direct bonding to form a hermetic cavity.
- DRIE Deep Reactive Ion Etching
- a process for optimizing direct wafer bond line width for reduction of parasitic capacitance in a MEMS device and determining leak rate through a bond line involves reducing the width of a bond line between a first and a second wafer, exposing the MEMS device to water vapor for a predetermined time period and at a first temperature capable of evaporating the water, cooling the MEMS device at a second temperature capable of freezing the water, and operating the MEMS device at a third temperature capable of freezing the water to determine if there is discontinuity during operation.
- the bond line width is reduced to approximately 100-200 microns.
- a different bond line width can be used to determine its operability and reliability at design conditions.
- the first temperature used for evaporating water is approximately 100° C.
- the second temperature can approximately be below 0° C., preferably about ⁇ 55° C.
- the third temperature can be approximately equal to the second temperature.
- the process further includes a method of calculating the leak rate through the bond line by dividing the volume of fluid in the MEMS device by the predetermined time period.
- a different bond line width of the MEMS device can be used to reduce discontinuity during operation and achieve optimum operability and reliability of the MEMS device.
- FIG. 1 is a perspective view of a prior art silicon accelerometer sensor
- FIG. 2 is an assembly drawing of the silicon accelerometer sensor of FIG. 1 ;
- FIG. 3 is a side view of a silicon accelerometer sensor, according to one embodiment of the present invention.
- FIG. 4 is a schematic diagram showing a silicon accelerometer inside a steam oven in accordance with a method of the present invention
- FIG. 5 is an exemplary flow chart depicting a method for bombing an accelerometer sensor with water vapor according to one embodiment of the present invention.
- FIG. 6 is an exemplary flow chart depicting a method for determining leak rate of an accelerometer sensor according to one embodiment of the present invention.
- FIG. 1 is a perspective view of a prior art silicon accelerometer sensor 100 before assembly.
- the sensor 100 has a first outside layer 110 , a second outside layer 115 , a first guard layer 120 , a second guard layer 125 , and a proof mass layer 130 .
- the proof mass layer 130 is sandwiched between the first and second guard layers 120 and 125 , which are then sandwiched between the first and second outside layers 110 and 115 .
- the sensor 100 also has a via 135 to facilitate a path or opening for circuit shorting.
- the sensor 100 is fabricated from two silicon-on-insulator (SOI) wafers and one prime silicon wafer.
- the SOI wafers provide the first and second outside layers 110 and 115 , and the first and second guard layers 120 and 125 .
- the prime silicon wafer provides the proof mass layer 130 .
- each wafer layer 110 - 130 On the surface of each wafer layer 110 - 130 is a layer of oxide, typically 1 micron thick. When the layers 120 - 130 are bonded together, a 2 micron layer of oxide is formed between the guard layers 120 and 125 and the proof mass layer 130 .
- One technique to bond all the wafer layers 110 - 130 together is by a process called direct bonding.
- the wafer layers 110 - 130 are preferably cleaned and activated. Activation is done by either chemical or plasma surface activation.
- the wafer layers 110 - 130 are properly aligned and coupled to each other. Van Der Waals forces will cause the layers 110 - 130 to bond to each other. Since the Van Der Waals forces are relatively weak, the wafer layers 110 - 130 may be annealed at an elevated temperature. This temperature depends on the activation process. Older processes used temperatures in excess of 1000° C. With newer plasma processes, 400° C. may suffice. It can be envisioned that other methods or techniques can be used to bond the layers 110 - 130 together and achieve the same objective of the present invention.
- FIG. 2 is an assembly drawing of the silicon accelerometer sensor 100 of FIG. 1 .
- the assembly drawing shows the internal components of sensor 100 .
- Contained within the proof mass layer 130 is a proof mass paddle 205 that may be coupled to the proof mass layer 130 by silicon hinges.
- On opposite sides of the paddle 205 are electrodes.
- FIGS. 2 and 3 show electrodes 210 contained within the guard layers 120 and 125 and parallel to one another. This configuration forms a capacitor between each electrode 210 and the paddle 205 . In operation, the capacitance is used to determine the gap between the paddle 205 and each electrode 210 .
- An electronic circuit supplies the proper voltage pulses to force the paddle to null, defined as the paddle position where both capacitances are equal.
- FIG. 3 is a side view of a silicon accelerometer sensor 300 , according to one embodiment of the present invention.
- the sensor 300 has an internal cavity 315 enclosed by layers 110 - 130 .
- the internal cavity 315 houses the paddle 205 and electrodes 210 , leaving a gap 320 between them.
- the sensor 300 also has a PM-G bond line 305 formed between the proof mass layer 130 and first and second guard layers 120 and 125 .
- the sensor 300 has a G-E bond line 310 formed between the guard layers 120 and 125 and the outside wafer layers 110 and 115 , respectively.
- the width of the bond line 305 between the proof mass and guard should be decreased.
- the bond strength is decreased, and the ruggedness and reliability of the chip may become compromised.
- the prior art width used for bond line 305 is 400 microns. This prior art width is a consequence of fabrication techniques used that does not account for the optimum width necessary to reduce parasitic capacitance and maintain reliable bond strength.
- the bond line 305 can be reduced substantially without compromising the reliability of the chip.
- the sensor 300 can withstand a tensile force of about 50 lbs.
- the G loading would be about 700,000 G and the tensile strength of the oxide would be about 3400 PSI.
- the bonds do not necessarily delaminate, but the silicon breaks instead. Consequently, from a strength standpoint, the bond line 305 can be reduced by a factor of 2 to 4 without compromising the reliability of the chip.
- a decrease in the width of the bond line 305 may not substantially affect the bond strength of the sensor 300 , it may affect the hermeticity of the chip, either by increased leak failures or inherent permeability of the silicon dioxide.
- a method for optimizing bond line 305 width for reduction of parasitic capacitance in MEMS accelerometers is provided.
- an application for practicing the method embodying the present invention is generally designated 400 .
- the sensor 300 is exposed to water vapor using a steam furnace or oven 405 .
- a method utilizing an oven 405 is described herein, the method of the present invention applies equally to other steam producing sources.
- the steam oven 405 is heated, at step 500 , to an elevated temperature for evaporating water.
- the temperature of the oven or furnace 405 can be preheated to approximately 100° C.
- a thermal controller 410 can be used to set the temperature of the steam oven 405
- a timer 415 can be used to set the period of exposure of the sensor 300 to the water vapor 420 .
- the MEMS device or sensor 300 is inserted, at step 510 , for a desirable or predetermined period, for example, 24 hours.
- the period of exposure to the water vapor 420 is used in calculating the leak rate, which is discussed in detail below.
- the MEMS device After bombing the MEMS device or sensor 300 with water vapor 420 for a specific period, the MEMS device is removed, at step 520 , from the steam oven 405 and allowed to cool, at step 530 , at a temperature below 0° C. In one embodiment, the MEMS device is cooled to a temperature of ⁇ 55° C., as required by the military operational guidelines.
- the MEMS device or sensor 300 is then tested at the temperature (below 0° C.) to determine if there is any discontinuity in performance of the device during operation.
- a method for determining leak rate of an accelerometer sensor 300 is provided in accordance with the present invention.
- a MEMS device or sensor 300 is tested at a temperature below 0° C., for example ⁇ 55° C.
- discontinuity in performance of the device during operation (Step 600 ) may occur. If the sensor 300 does not show any discontinuity in performance during operation at ⁇ 55° C., then the sensor 300 does not leak, at step 610 , and consequently, the reduced width of bond line 305 does not compromise the reliability of the chip.
- the MEMS device or sensor 300 has a leak that allowed water vapor 420 to seep through and crystallize at the lower temperature. Because the gap 320 between the paddle 205 and the electrodes 210 is about 2 microns, when the temperature is lowered to the ⁇ 55° C. lower operating limit, even a very small vapor pressure in the sensor 300 will form an ice crystal or dendrite that blocks the motion of the paddle. This shows up as a discontinuity in operation of the accelerometer. At a temperature of ⁇ 60° C., there is enough water in the chip to form a pillar of ice over 3 microns in diameter on both sides of the paddle 205 .
- the leak rate can be calculated by dividing the volume of water in the sensor's internal cavity 315 by the water vapor bombing time period.
- the leak rate depends on (1) the temperature at which discontinuity of operation occurs, and (2) the time and temperature at which a MEMS device is bombed with water vapor. For example, suppose a MEMS device is bombed with saturated steam at about 100° C. for 24 hours. If there is discontinuity of operation at 0° C., it indicates that the vapor pressure of water in the MEMS device is above the equilibrium vapor pressure of ice or water at that temperature (4.58 mm of Hg).
- the chip Given that the volume of an internal cavity 315 of a sensor 300 is about 4.36 ⁇ L, the chip would contain about 2.6 ⁇ 10 ⁇ 6 cm 3 of water. Since, the MEMS device was exposed for 24 hours, it would have accumulated that water in 86,400 seconds, so the leak rate would be 3 ⁇ 10 ⁇ 10 cm 3 /s.
- bombing with water vapor 420 can be accomplished at different times and temperatures.
- the bomb time or temperature could be increased.
- a temperature of 120° C. would approximately double the external water vapor pressure and a temperature of 180° C. would increase it 10 fold.
- the MEMS device can be cooled to a temperature even lower than ⁇ 55° C. during testing.
- a sensor 300 can be fabricated with a combination of the prior art bond line 305 width of 400 microns with the reduced bond line 305 width of 100-200 microns. If this sensor 300 is subjected to water vapor bombing, at step 510 , then any compromise of hermeticity with the reduced bond line 305 width could be determined statistically during operation testing, at step 540 .
- a decrease in the width of the bond line 305 may not substantially affect the bond strength of the sensor 300 , it may affect the hermeticity of the chip, either by increased leak failures or inherent permeability of the silicon dioxide.
- hermeticity of a MEMS device depends on leak rates, it is also affected by inherent permeability of the silicon dioxide. Even if there is a perfect seal, permeation of water vapor 420 through the oxide may affect hermeticity.
- permeation data was ascertained for Helium, Hydrogen, Deuterium and Neon at 700° C. At this temperature the permeation coefficient of Neon (the closest of the four to water in size) is about 1 ⁇ 10 ⁇ 9 cm 3 mm/cm 2 sec cm of Hg. Hydrogen and Deuterium are about twice as large as Neon, while Helium is about 20 times as large as Neon. The permeation coefficient of Neon would be equivalent to a leak rate of about 10 ⁇ 9 cm 3 /s.
- the permeation constants would likely be several orders of magnitude lower than Neon at 700° C. Consequently, permeation through the oxide layer would not affect the hermeticity and reliability of a MEMS device with a reduced bond line 305 width of 100-200 microns. Even if permeation proved to be an issue for the long term stability of the MEMS device, it could be dealt with, for example, by filling the MEMS device with the same gas as the system housing the device.
Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US13/185,723 US8579502B2 (en) | 2005-05-25 | 2011-07-19 | Method for determining leak rate through a bond line of a MEMS device |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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US68443105P | 2005-05-25 | 2005-05-25 | |
PCT/US2006/020084 WO2006127814A2 (en) | 2005-05-25 | 2006-05-24 | Method for optimizing direct wafer bond line width for reduction of parasitic capacitance in mems accelerometers |
US91493207A | 2007-11-19 | 2007-11-19 | |
US13/185,723 US8579502B2 (en) | 2005-05-25 | 2011-07-19 | Method for determining leak rate through a bond line of a MEMS device |
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PCT/US2006/020084 Division WO2006127814A2 (en) | 2005-05-25 | 2006-05-24 | Method for optimizing direct wafer bond line width for reduction of parasitic capacitance in mems accelerometers |
US11/914,932 Division US8007166B2 (en) | 2005-05-25 | 2006-05-24 | Method for optimizing direct wafer bond line width for reduction of parasitic capacitance in MEMS accelerometers |
US91493207A Division | 2005-05-25 | 2007-11-19 |
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US20110271744A1 US20110271744A1 (en) | 2011-11-10 |
US8579502B2 true US8579502B2 (en) | 2013-11-12 |
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US11/914,932 Expired - Fee Related US8007166B2 (en) | 2005-05-25 | 2006-05-24 | Method for optimizing direct wafer bond line width for reduction of parasitic capacitance in MEMS accelerometers |
US13/185,723 Active 2026-08-14 US8579502B2 (en) | 2005-05-25 | 2011-07-19 | Method for determining leak rate through a bond line of a MEMS device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US9796585B2 (en) * | 2015-12-17 | 2017-10-24 | Texas Instruments Incorporated | Leak detection using cavity surface quality factor |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US8661872B2 (en) * | 2010-11-12 | 2014-03-04 | William J. Brocker | Test system |
US9442131B2 (en) * | 2013-03-13 | 2016-09-13 | Analog Devices, Inc. | System and method for run-time hermeticity detection of a capped MEMS device |
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WO2006127814A2 (en) | 2006-11-30 |
US20110271744A1 (en) | 2011-11-10 |
US20080184778A1 (en) | 2008-08-07 |
US8007166B2 (en) | 2011-08-30 |
WO2006127814A3 (en) | 2007-04-12 |
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