US8142912B1 - Coating, article coated with coating, and method for manufacturing article - Google Patents
Coating, article coated with coating, and method for manufacturing article Download PDFInfo
- Publication number
- US8142912B1 US8142912B1 US13/031,709 US201113031709A US8142912B1 US 8142912 B1 US8142912 B1 US 8142912B1 US 201113031709 A US201113031709 A US 201113031709A US 8142912 B1 US8142912 B1 US 8142912B1
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- US
- United States
- Prior art keywords
- coating
- layer
- zirconium
- article
- nanometers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Definitions
- the exemplary disclosure generally relates to coatings, and particularly relates to articles coated with the coatings and a method for manufacturing the articles.
- PVD Physical vapor deposition
- TiN Titanium nitride
- TiAlN Titanium-aluminum nitride
- these coating materials have a poor adhesion to metal bases and may be easily peeled off.
- FIG. 1 is a cross-sectional view of an exemplary embodiment of a coating.
- FIG. 2 is a cross-sectional view of an article coated with the coating in FIG. 1 .
- FIG. 3 is a schematic view of a magnetron sputtering coating machine for manufacturing the article in FIG. 2 .
- a coating 30 includes a nano-composite layer 31 , which comprises a plurality of stacked films 311 .
- Each film 311 includes a zirconium nitride (ZrN) layer 311 and a zirconium yttrium nitride (ZrYN) layer 313 .
- the nano-composite layer 31 includes an equal number of alternating ZrN layers 311 and ZrYN layers 313 .
- the ZrN layers 311 and the ZrYN layers 313 may be deposited by magnetron sputtering.
- the number of the films 311 is about 20 ⁇ 50.
- Each ZrN layer 311 has a thickness of about 10 nanometers to about 20 nanometers.
- Each ZrYN layer 313 has a thickness of about 10 nanometers to about 20 nanometers.
- the coating 30 has a thickness of about 1 micrometer to about 4 micrometers.
- the coating 30 may also include a color layer 33 covering the nano-composite layer 31 , to decorate the coating 30 .
- an exemplary article 40 includes a substrate 10 , a bonding layer 20 deposited on the substrate 10 and the coating 30 deposited on the bonding layer 20 .
- the substrate 10 may be made of metal, such as high speed steel, hard alloy, or stainless steel.
- the article 40 may be a cutting tool, a mold, or a housing for an electronic device.
- the bonding layer 20 is a zirconium yttrium (ZrY) layer.
- the bonding layer 20 has a thickness of about 0.05 micrometers to about 0.2 micrometers, and in this exemplary embodiment has a thickness of 0.1 micrometer.
- the bonding layer 20 can be deposited by magnetron sputtering.
- the chemical stability of the bonding layer 20 is between the chemical stability of the substrate 10 and the chemical stability of the coating 30
- the coefficient of thermal expansion of the bonding layer 20 is between the coefficient of thermal expansion of the substrate 10 and the coefficient of thermal expansion of the coating 30 .
- the bonding layer 20 improves the binding force between the substrate 10 and the coating 30 so the coating 30 can be firmly deposited on the substrate 10 .
- the coating 30 contacts with the bonding layer 20 via ZrN layer 311 .
- a method for manufacturing the article 40 may include at least the following steps.
- the substrate 10 may be made of high speed steel, hard alloy, or stainless steel.
- Pretreating the substrate 10 by washing with a solution (e.g., alcohol or acetone) in an ultrasonic cleaner, to remove, e.g., grease, dirt, and/or impurities, then drying the substrate 10 . Then the substrate 10 is cleaned by argon plasma cleaning.
- the substrate 10 is retained on a rotating bracket 50 in a vacuum chamber 60 of a magnetron sputtering coating machine 100 .
- the vacuum level of the vacuum chamber 60 is set to about 8.0 ⁇ 10 ⁇ 3 Pa.
- Argon is floated into the vacuum chamber 60 at a flux of about 300 standard cubic centimeters per minute (sccm) to 600 sccm from a gas inlet 90 .
- a bias voltage is applied to the substrate 10 in a range of about ⁇ 300 volts to ⁇ 800 volts for about 3-10 minutes.
- the substrate 10 is washed by argon plasma, to further remove any grease or dirt.
- the binding force between the substrate 10 and the bonding layer 20 is enhanced.
- the temperature in the vacuum chamber 60 is set to between about 150 degrees Celsius (° C.) and about 300° C.
- Argon is floated into the vacuum chamber 60 at a flux of about 150 sccm to 300 sccm from the gas inlet 90 .
- the flux is about 150 sccm.
- the substrate 10 is rotated at about 1.0 revolution per minute (rpm) to 3 rpm.
- a power source applied to a zirconium yttrium alloy target 70 and a zirconium target 80 may both be in a range of about 20 amperes (A) to about 100 A.
- a bias voltage applied to the substrate 10 may be in a range of about ⁇ 100 volts to ⁇ 300 volts for about 5 min to about 15 min, to deposit the bonding layer 20 on the substrate 10 .
- the zirconium yttrium alloy target contains atomic zirconium in a range about 70 to about 90 wt %.
- nitrogen is floated into the vacuum chamber 60 at a flux of about 10 sccm to about 200 sccm and argon is floated into the vacuum chamber 60 at a flux of about 150 sccm to 300 sccm from the gas inlet 90 .
- the zirconium yttrium alloy target 70 and the zirconium target 80 in the vacuum chamber 60 are alternatively evaporated for about 60 min to about 120 min, to alternatively deposit an equal number of alternating ZrN layers 311 and ZrYN layers 313 on the bonding layer 20 .
- the color layer 33 may be deposited on the nano-composite base 31 to improve the appearance of the article 40 .
- atomic yttrium can react with atomic zirconium to form solid solution alloy. Atomic yttrium cannot react with atomic nitrogen but can react with atomic zirconium to form zirconium-nitrogen crystals. Atomic yttrium is independently located at the boundary of the zirconium-nitrogen crystals, which can prevent the zirconium-nitrogen crystals from enlarging, to maintain the zirconium-nitrogen crystals at a nanometer level. The nanometer level zirconium-nitrogen crystals can improve durability of the coating 30 .
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (18)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010102990258A CN102443773A (en) | 2010-10-06 | 2010-10-06 | Coating and coated piece with same as well as preparation method of coated piece |
CN201010299025 | 2010-10-06 | ||
CN201010299025.8 | 2010-10-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
US8142912B1 true US8142912B1 (en) | 2012-03-27 |
US20120088083A1 US20120088083A1 (en) | 2012-04-12 |
Family
ID=45841833
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/031,709 Expired - Fee Related US8142912B1 (en) | 2010-10-06 | 2011-02-22 | Coating, article coated with coating, and method for manufacturing article |
Country Status (2)
Country | Link |
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US (1) | US8142912B1 (en) |
CN (1) | CN102443773A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100044969A1 (en) * | 2006-10-04 | 2010-02-25 | Manfred Fischer | Piston ring for internal combustion engines |
US20100044968A1 (en) * | 2006-10-04 | 2010-02-25 | Manfred Fischer | Piston ring for internal combustion engines |
CN111575667A (en) * | 2020-06-23 | 2020-08-25 | 上海理工大学 | ZrNiYN nano composite coherent epitaxial coating with bimetallic interface phase and preparation method thereof |
CN115161608A (en) * | 2022-07-06 | 2022-10-11 | 烟台大学 | Preparation method of ZrYAgN nano solid solution film with high hydrophobicity and self-lubrication |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US20020069690A1 (en) * | 1999-06-03 | 2002-06-13 | Volvo Car Corporation | Method and device for abrasion determination |
US6573209B1 (en) * | 2000-10-13 | 2003-06-03 | Applied Thin Films, Inc. | Zirconium nitride and yttrium nitride solid solution composition |
US20060147728A1 (en) * | 2004-05-03 | 2006-07-06 | Yaogen Shen | Multi-layered superhard nanocomposite coatings |
US20070298282A1 (en) * | 2005-06-17 | 2007-12-27 | Sandvik Intellectual Property Ab | Coated cutting tool insert |
US20080260478A1 (en) * | 2005-04-27 | 2008-10-23 | Papken Hovsepian | Pvd Coated Substrate |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6497772B1 (en) * | 2000-09-27 | 2002-12-24 | Molecular Metallurgy, Inc. | Surface treatment for improved hardness and corrosion resistance |
SE0602723L (en) * | 2006-06-16 | 2007-12-17 | Sandvik Intellectual Property | Coated insert |
CN1793415A (en) * | 2005-12-08 | 2006-06-28 | 上海工具厂有限公司 | Process for preparing ZrN/Al2 (O1-xNx)3 hard nano multi-layer coating |
EP2072636B1 (en) * | 2007-12-21 | 2016-08-31 | Sandvik Intellectual Property AB | Method of making a coated cutting tool |
-
2010
- 2010-10-06 CN CN2010102990258A patent/CN102443773A/en active Pending
-
2011
- 2011-02-22 US US13/031,709 patent/US8142912B1/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020069690A1 (en) * | 1999-06-03 | 2002-06-13 | Volvo Car Corporation | Method and device for abrasion determination |
US6573209B1 (en) * | 2000-10-13 | 2003-06-03 | Applied Thin Films, Inc. | Zirconium nitride and yttrium nitride solid solution composition |
US20060147728A1 (en) * | 2004-05-03 | 2006-07-06 | Yaogen Shen | Multi-layered superhard nanocomposite coatings |
US20080260478A1 (en) * | 2005-04-27 | 2008-10-23 | Papken Hovsepian | Pvd Coated Substrate |
US20070298282A1 (en) * | 2005-06-17 | 2007-12-27 | Sandvik Intellectual Property Ab | Coated cutting tool insert |
Non-Patent Citations (6)
Title |
---|
Definition of Superlattice from http://en.wikipedia.org/wiki/Superlattice, internet retrieval date Oct. 25, 2011. * |
Dobrzanski et al., "Mechanical properties of monolayer coatings deposited by PVD techniques", Journal of Achievements in Materials and Manufacturing Engineering, col. 20, Iss. 1-2, 2007, pp. 423-426. * |
Musil et al., "Hard and superhard nanocomposite coatings", Surface and Coatings Technology, vol. 125, Issues 1-3, Mar. 2000, pp. 322-330. * |
Polakova et al., "Control of Structure in magnetron sputtered thin films", Surface and Coatings Technology, vol. 142-144, 2001, pp. 201-205. * |
Soukup et al., "Effect of Ti Interlayer and Bias on Structure and Properties of TiN Films", Czechoslovak Journal of Physics, vol. 50, No. 5., 2000, pp. 655-663. * |
Zywitski et al., Structure of superhard nanocrystalline (Ti,Al)N layers deposited by reactive pulsed magnetron sputtering, Surface and Coatings Technology, vol. 200, Issues 22-23, Jun. 20, 2006, pp. 6522-6526. * |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100044969A1 (en) * | 2006-10-04 | 2010-02-25 | Manfred Fischer | Piston ring for internal combustion engines |
US20100044968A1 (en) * | 2006-10-04 | 2010-02-25 | Manfred Fischer | Piston ring for internal combustion engines |
US9598763B2 (en) * | 2006-10-04 | 2017-03-21 | Federal-Mogul Burscheid Gmbh | Piston ring for internal combustion engines |
US10000840B2 (en) * | 2006-10-04 | 2018-06-19 | Federal-Mogul Burscheid Gmbh | Piston ring for internal combustion engines |
CN111575667A (en) * | 2020-06-23 | 2020-08-25 | 上海理工大学 | ZrNiYN nano composite coherent epitaxial coating with bimetallic interface phase and preparation method thereof |
CN115161608A (en) * | 2022-07-06 | 2022-10-11 | 烟台大学 | Preparation method of ZrYAgN nano solid solution film with high hydrophobicity and self-lubrication |
CN115161608B (en) * | 2022-07-06 | 2023-10-27 | 烟台大学 | Preparation method of ZrYAgN nano solid solution film with high hydrophobicity and self-lubrication |
Also Published As
Publication number | Publication date |
---|---|
CN102443773A (en) | 2012-05-09 |
US20120088083A1 (en) | 2012-04-12 |
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