US8033011B2 - Method for mounting a thinned semiconductor wafer on a carrier substrate - Google Patents

Method for mounting a thinned semiconductor wafer on a carrier substrate Download PDF

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US8033011B2
US8033011B2 US12/222,343 US22234308A US8033011B2 US 8033011 B2 US8033011 B2 US 8033011B2 US 22234308 A US22234308 A US 22234308A US 8033011 B2 US8033011 B2 US 8033011B2
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Prior art keywords
carrier substrate
tape
double
frame
blue
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Expired - Fee Related, expires
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US12/222,343
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US20100035405A1 (en
Inventor
Jason Chou
Chang-Hwang Hua
Ping-Wei Chen
Sen Yang
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WIN Semiconductors Corp
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WIN Semiconductors Corp
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Assigned to WIN SEMICONDUCTORS CORP. reassignment WIN SEMICONDUCTORS CORP. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHEN, Ping-wei, HUA, CHUNG-HWANG, YANG, SEN, CHOU, JASON
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/185—Joining of semiconductor bodies for junction formation
    • H01L21/187—Joining of semiconductor bodies for junction formation by direct bonding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1892—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof methods involving the use of temporary, removable substrates
    • H01L31/1896—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof methods involving the use of temporary, removable substrates for thin-film semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.

Definitions

  • the present invention relates to a method for III-V semiconductor wafer processing, and more particularly, relates to a method for mounting a thinned semiconductor wafer on a carrier substrate for further processing.
  • the method not only prevents possible damages during the handling of thinned wafers for further processing, but also fits the conventional production line.
  • the method is particularly useful for handling wafers after back-side processing, such as back-side via-hole etching and metal coating for the fabrication of semiconductor power devices, and can also be applied to the production line for other areas that requires handing of thinned wafers, such as light emitting diodes, micro-electro-mechanical systems (MEMS), and solar cells.
  • MEMS micro-electro-mechanical systems
  • the state-of-the-art III-V semiconductor power devices such as pHEMT (pseudomorphic high-electron mobility transistor) devices or HBT (Heterojunction Bipolar Transistor) devices, require not only sophisticated fabrication processes on the front-side of a semiconductor wafer, but also back-side wafer processing, such as via-hole etching and metal coating.
  • pHEMT pseudomorphic high-electron mobility transistor
  • HBT Heterojunction Bipolar Transistor
  • the wafer For back-side via-hole processing, the wafer has to be thinned to a desired thickness, which is typically less than 100 ⁇ m.
  • An important step in back-side processing of GaAs wafers for power devices is the deposition of metal layer on the back-side surface and into through substrate via holes in order to meet thermal conduction requirements and provide low inductance ground connections.
  • the wafers front-sides were mounted onto flat carriers. To prevent possible damages to the front-side devices, the fabricated devices must be carefully protected or passivated.
  • the processing steps will be further complicated if the front-side wafer requires bumping processes. Typical bumping processes will lead to a surface topological difference of about 50-100 ⁇ m. If the front-side bumping processes were proceeded before wafer thinning for back-side processing, it becomes very difficult to protect the surface bumps of such a large topological difference when attaching the wafer front side to the carrier substrate.
  • a possible approach is to perform back-side wafer processing steps prior to the surface bumping processes.
  • the major technical challenge is that the wafer will become highly brittle after wafer thinning. Wafers were usually damaged, or even cracked during further processing steps for front side devices. Therefore, it is necessary to develop a method for handling thinned wafer, which can sustain further processing, such as thermal treatments and/or chemical etchings.
  • the main object of the present invention is to develop a method that can handle thinned semiconductor wafers for further processing.
  • the method consists of a series of steps, which is based on providing a frame with a double-side tape to mount the thinned wafer on a carrier substrate.
  • the frame is used to support the double-side tape and can be designed to fit the conventional production line for holding, picking and transferring wafers.
  • the carrier substrate can be a sapphire substrate, a quartz substrate or other substrates that can sustain further processing, such as thermal treatments and/or chemical etchings.
  • An advantage of the present invention is that it prevents possible damages to the highly brittle chip after wafer thinning, which is particularly useful during the fabrication of many semiconductor devices, such as power devices, light emitting diodes, micro-electro-mechanical systems (MEMS), as well as solar cells.
  • semiconductor devices such as power devices, light emitting diodes, micro-electro-mechanical systems (MEMS), as well as solar cells.
  • MEMS micro-electro-mechanical systems
  • Another advantage of the invented method is that it can be designed to fit the conventional production lines for processing semiconductor wafers even without using the metal frame as long as the mounting thinned wafers follow the same or a similar way.
  • FIG. 1 depicts schematically the first step for thin wafer mounting of the present invention.
  • FIG. 2 depicts schematically the second step for thin wafer mounting of the present invention.
  • FIG. 3 depicts schematically the third step for thin wafer mounting of the present invention.
  • FIG. 4 depicts schematically the final step for thin wafer mounting of the present invention.
  • All the process steps for mounting a thinned wafer on a carrier substrate are based on providing a frame with a double-side tape.
  • the frame can be a metal frame, or a frame made of other materials that can be used to support the double-side tape thereon.
  • the metal frame can also be designed to fit the conventional production line for processing wafers. Therefore, the invented process steps are not only helpful for mounting thinned wafer on carrier substrate manually, but also beneficial for handling thinned wafer under the frame work of high-volume production lines.
  • the first step of the present invention is to prepare such a frame for further processing, as illustrated in FIG. 1 .
  • a metal frame 1 is first prepared, followed by attaching a first blue tape 2 on the said metal frame.
  • the second step of the present invention is to attach a carrier substrate to the metal frame with a double-side tape for mounting the thinned wafer, as illustrated in FIG. 2 .
  • a double-side tape 3 is laid on the first blue tape 2 that has been attached to the metal frame 1 .
  • the front cover film 30 of the double-side tape 3 is then torn off, followed by attaching the carrier substrate 4 onto the double-side tape.
  • the carrier substrate 4 could be a sapphire substrate, a quartz substrate or other substrates that can firmly hold a thinned wafer and sustain further processing, such as thermal treatments and/or chemical etchings.
  • the third step of the present invention is to flip the carrier substrate 4 with the double-side tape 3 on the top, in order to facilitate mounting a thinned wafer thereon, as shown in FIG. 3 .
  • the carrier substrate 4 along with both the double-side tape 3 and the first blue tapes 2 is first detached from the metal frame 1 .
  • the exterior portion 20 of blue tape may be cut away from the carrier substrate 4 .
  • a second blue tape 5 is laid on the metal frame 1 .
  • the sapphire substrate with both the double-side tape 3 and the first blue tapes 2 is then flipped upside-down and reattached to the metal frame 1 .
  • the first blue tape 2 together with the rear cover film 32 of the double-side tape 3 is removed, leaving behind a carrier substrate 4 with the double-side tape 3 thereon ready for mounting a thinned wafer 6 .
  • the final step is to mount the thinned wafer 6 to the carrier substrate 4 , as shown in FIG. 4 .
  • the thinned wafer 6 is mounted firmly onto the carrier substrate 4 via the double-side tape thereon.
  • the thinned wafer mounted on the carrier substrate can now be detached from the metal frame for further processing.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A method for mounting a thinned semiconductor wafer on a carrier substrate for further processing is disclosed. The method consists of a series of steps, which is based on providing a frame with a double-side tape to mount the thinned wafer on the carrier substrate. The frame is used to support the double-side tape and can be designed to fit the conventional production line for holding, picking and transferring wafers. The carrier substrate can be a sapphire substrate, a quartz substrate or other substrates that can sustain further processing, such as thermal treatments and/or chemical etchings. The method of the present invention not only prevents possible damages to the highly brittle chip after wafer thinning, but also fits the conventional production line for processing semiconductor wafers.

Description

FIELD OF THE INVENTION
The present invention relates to a method for III-V semiconductor wafer processing, and more particularly, relates to a method for mounting a thinned semiconductor wafer on a carrier substrate for further processing. The method not only prevents possible damages during the handling of thinned wafers for further processing, but also fits the conventional production line. Further, the method is particularly useful for handling wafers after back-side processing, such as back-side via-hole etching and metal coating for the fabrication of semiconductor power devices, and can also be applied to the production line for other areas that requires handing of thinned wafers, such as light emitting diodes, micro-electro-mechanical systems (MEMS), and solar cells.
BACKGROUND OF THE INVENTION
The state-of-the-art III-V semiconductor power devices, such as pHEMT (pseudomorphic high-electron mobility transistor) devices or HBT (Heterojunction Bipolar Transistor) devices, require not only sophisticated fabrication processes on the front-side of a semiconductor wafer, but also back-side wafer processing, such as via-hole etching and metal coating.
For back-side via-hole processing, the wafer has to be thinned to a desired thickness, which is typically less than 100 μm. An important step in back-side processing of GaAs wafers for power devices is the deposition of metal layer on the back-side surface and into through substrate via holes in order to meet thermal conduction requirements and provide low inductance ground connections. During the back-side wafer processing steps, the wafers front-sides were mounted onto flat carriers. To prevent possible damages to the front-side devices, the fabricated devices must be carefully protected or passivated. However, the processing steps will be further complicated if the front-side wafer requires bumping processes. Typical bumping processes will lead to a surface topological difference of about 50-100 μm. If the front-side bumping processes were proceeded before wafer thinning for back-side processing, it becomes very difficult to protect the surface bumps of such a large topological difference when attaching the wafer front side to the carrier substrate.
A possible approach is to perform back-side wafer processing steps prior to the surface bumping processes. However, the major technical challenge is that the wafer will become highly brittle after wafer thinning. Wafers were usually damaged, or even cracked during further processing steps for front side devices. Therefore, it is necessary to develop a method for handling thinned wafer, which can sustain further processing, such as thermal treatments and/or chemical etchings.
SUMMARY OF THE INVENTION
The main object of the present invention is to develop a method that can handle thinned semiconductor wafers for further processing. The method consists of a series of steps, which is based on providing a frame with a double-side tape to mount the thinned wafer on a carrier substrate. The frame is used to support the double-side tape and can be designed to fit the conventional production line for holding, picking and transferring wafers. The carrier substrate can be a sapphire substrate, a quartz substrate or other substrates that can sustain further processing, such as thermal treatments and/or chemical etchings.
An advantage of the present invention is that it prevents possible damages to the highly brittle chip after wafer thinning, which is particularly useful during the fabrication of many semiconductor devices, such as power devices, light emitting diodes, micro-electro-mechanical systems (MEMS), as well as solar cells.
Another advantage of the invented method is that it can be designed to fit the conventional production lines for processing semiconductor wafers even without using the metal frame as long as the mounting thinned wafers follow the same or a similar way.
BRIEF DESCRIPTION OF DRAWINGS
FIG. 1 depicts schematically the first step for thin wafer mounting of the present invention.
FIG. 2 depicts schematically the second step for thin wafer mounting of the present invention.
FIG. 3 depicts schematically the third step for thin wafer mounting of the present invention.
FIG. 4 depicts schematically the final step for thin wafer mounting of the present invention.
 DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
All the process steps for mounting a thinned wafer on a carrier substrate are based on providing a frame with a double-side tape. The frame can be a metal frame, or a frame made of other materials that can be used to support the double-side tape thereon. The metal frame can also be designed to fit the conventional production line for processing wafers. Therefore, the invented process steps are not only helpful for mounting thinned wafer on carrier substrate manually, but also beneficial for handling thinned wafer under the frame work of high-volume production lines.
The first step of the present invention is to prepare such a frame for further processing, as illustrated in FIG. 1. In this step, a metal frame 1 is first prepared, followed by attaching a first blue tape 2 on the said metal frame. The second step of the present invention is to attach a carrier substrate to the metal frame with a double-side tape for mounting the thinned wafer, as illustrated in FIG. 2. In this step, a double-side tape 3 is laid on the first blue tape 2 that has been attached to the metal frame 1. The front cover film 30 of the double-side tape 3 is then torn off, followed by attaching the carrier substrate 4 onto the double-side tape. The carrier substrate 4 could be a sapphire substrate, a quartz substrate or other substrates that can firmly hold a thinned wafer and sustain further processing, such as thermal treatments and/or chemical etchings. The third step of the present invention is to flip the carrier substrate 4 with the double-side tape 3 on the top, in order to facilitate mounting a thinned wafer thereon, as shown in FIG. 3. In this step, the carrier substrate 4 along with both the double-side tape 3 and the first blue tapes 2 is first detached from the metal frame 1. The exterior portion 20 of blue tape may be cut away from the carrier substrate 4. In order to reattach the carrier substrate 4 to the metal frame 1, a second blue tape 5 is laid on the metal frame 1. The sapphire substrate with both the double-side tape 3 and the first blue tapes 2 is then flipped upside-down and reattached to the metal frame 1. After that, the first blue tape 2 together with the rear cover film 32 of the double-side tape 3 is removed, leaving behind a carrier substrate 4 with the double-side tape 3 thereon ready for mounting a thinned wafer 6. The final step is to mount the thinned wafer 6 to the carrier substrate 4, as shown in FIG. 4. In this step, the thinned wafer 6 is mounted firmly onto the carrier substrate 4 via the double-side tape thereon. The thinned wafer mounted on the carrier substrate can now be detached from the metal frame for further processing.

Claims (6)

1. A method for mounting a thinned semiconductor wafer on a carrier substrate, comprising the following procedures:
A. Providing a frame with a first blue tape thereon;
B. Attaching the carrier substrate to the first blue tape on the frame by using a double-side tape having rear and front cover films thereon in between;
C. Detaching the carrier substrate together with the double-side tape and the first blue tape from the frame;
D. Laying a second blue tape onto the frame;
E. Attaching the carrier substrate together with the double-side tape and the first blue tape to the second blue tape on the frame;
F. Removing the first blue tape and the rear cover film of the double-side tape from the carrier substrate; and
G. Mounting the thinned wafer onto the carrier substrate via the double-side tape and then detaching from the frame for further processes.
2. The method according to claim 1, wherein the procedure (B) further comprises steps of:
laying the double-side tape on the first blue tape;
tearing off the front cover film of the said double-side tape; and
attaching the carrier substrate onto the said double-side tape.
3. The method according to claim 1, wherein the procedure (E) further comprises steps of:
flipping the carrier substrate together with the double-side tape and the first blue tape; and
attaching the carrier substrate to the second blue tape on the frame.
4. The method according to claim 1, wherein the procedure (E) further comprises steps of:
Flipping the frame with the second blue tape;
Attaching the second blue tape to the carrier substrate; and
Flipping back the frame with the second blue tape together with the carrier substrate, the double-side tape and the first blue tape.
5. The method according to claim 4, wherein the said carrier substrate is made of materials that can firmly hold the thinned wafer and sustain further processes, such as thermal treatments and/or chemical etchings.
6. The method according to claim 5, wherein the said carrier substrate is a sapphire substrate or a quartz substrate.
US12/222,343 2008-08-07 2008-08-07 Method for mounting a thinned semiconductor wafer on a carrier substrate Expired - Fee Related US8033011B2 (en)

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CN103972073B (en) * 2014-04-18 2016-12-07 丽智电子(昆山)有限公司 Chip back and the method for side coating protection material
EP3333882B1 (en) 2016-12-06 2020-08-05 IMEC vzw Method for bonding thin semiconductor chips to a substrate

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US20100006988A1 (en) * 2008-07-09 2010-01-14 Jinbang Tang Integrated Conformal Shielding Method and Process Using Redistributed Chip Packaging

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US6093623A (en) * 1998-08-04 2000-07-25 Micron Technology, Inc. Methods for making silicon-on-insulator structures
US6309950B1 (en) * 1998-08-04 2001-10-30 Micron Technology, Inc. Methods for making silicon-on-insulator structures
US7115981B2 (en) * 2000-04-28 2006-10-03 Micron Technology, Inc. Semiconductor device assemblies including interposers with dams protruding therefrom
US6572944B1 (en) * 2001-01-16 2003-06-03 Amkor Technology, Inc. Structure for fabricating a special-purpose die using a polymerizable tape
US6610167B1 (en) * 2001-01-16 2003-08-26 Amkor Technology, Inc. Method for fabricating a special-purpose die using a polymerizable tape
US7189593B2 (en) * 2002-01-09 2007-03-13 Micron Technology, Inc. Elimination of RDL using tape base flip chip on flex for die stacking
US20040219713A1 (en) * 2002-01-09 2004-11-04 Micron Technology, Inc. Elimination of RDL using tape base flip chip on flex for die stacking
US20050215078A1 (en) * 2002-06-10 2005-09-29 New Wave Research Scribing sapphire substrates with a solid state UV laser
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US20080073774A1 (en) * 2006-09-21 2008-03-27 Advanced Chip Engineering Technology Inc. Chip package and chip package array
US20080315376A1 (en) * 2007-06-19 2008-12-25 Jinbang Tang Conformal EMI shielding with enhanced reliability
US20090072357A1 (en) * 2007-09-13 2009-03-19 Jinbang Tang Integrated shielding process for precision high density module packaging
US20100006988A1 (en) * 2008-07-09 2010-01-14 Jinbang Tang Integrated Conformal Shielding Method and Process Using Redistributed Chip Packaging

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