US7961371B2 - Optical beam generating device - Google Patents
Optical beam generating device Download PDFInfo
- Publication number
- US7961371B2 US7961371B2 US12/516,416 US51641607A US7961371B2 US 7961371 B2 US7961371 B2 US 7961371B2 US 51641607 A US51641607 A US 51641607A US 7961371 B2 US7961371 B2 US 7961371B2
- Authority
- US
- United States
- Prior art keywords
- light
- phase modulation
- modulation element
- optical phase
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active, expires
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/32—Micromanipulators structurally combined with microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
Definitions
- the present invention relates to a light beam generator which generates light having a predetermined phase distribution on a beam cross section of light.
- LG mode light Laguerre-Gaussian Mode light
- the above-described conventional light beam generators are functionally insufficient in making further applications of LG mode light.
- the above described conventional methods are able to generate light having a higher-order declination exponent, of LG mode light.
- they are unable to generate, for example, higher-order radial exponent LG mode light preferable in transporting captured atoms systematically and in a sufficient quality from a practical standpoint.
- the present invention has been made in order to solve the above problem, an object of which is to provide a light beam generator capable of generating LG mode light which is expected for further applications.
- the light beam generator of the present invention is provided with (1) a light source of outputting coherent light and (2) an optical phase modulation element which receives light output from the light source to modulate a phase of the light depending on a position on the beam cross section of the light, and outputs the light after the phase modulation.
- the optical phase modulation element is preferably an element in which a phase modulation amount of each pixel is set on the basis of a control signal input from outside.
- n is given as an integer
- an arbitrary phase ⁇ and a phase ( ⁇ +2n ⁇ ) are equal in value to each other.
- a distribution ⁇ of phase adjustment amount may be set by disregarding an offset value but giving consideration only to a relative value.
- a phase modulation amount ⁇ in an optical phase modulation element can be limited to a range from a phase ⁇ to a phase ( ⁇ +2 ⁇ ), or ⁇ may be a value of zero.
- the light beam generator of the present invention is able to generate higher-order LG mode light which is expected for further applications.
- FIG. 1 is a block diagram showing a light beam generator 1 of the present embodiment.
- FIG. 2 is a view showing an example of a distribution of phase modulation amount in an optical phase modulation element 15 .
- FIG. 3 is a view showing an example of a distribution of phase modulation amount in the optical phase modulation element 15 .
- FIG. 4 is a view showing an example of a distribution of phase modulation amount in the optical phase modulation element 15 .
- FIG. 5 is a view showing examples of the respective distributions of phase modulation amount in two optical phase modulation elements.
- FIG. 6 is a view showing an example of an intensity distribution (observed values) on a beam cross section of LG mode light output from the light beam generator 1 of the present embodiment.
- FIG. 7 is a view showing an example of an intensity distribution (theoretical values) on the beam cross section of LG mode light output from the light beam generator 1 of the present embodiment.
- FIG. 8 is an example of an intensity distribution on the beam cross section of LG mode light output from the light beam generator 1 of the present embodiment.
- FIG. 1 is a block diagram showing the light beam generator 1 of the present embodiment.
- the light beam generator 1 shown in this drawing is provided with a laser light source 10 , a convex lens 11 , a convex lens 12 , an aperture 13 , a beam splitter 14 , an optical phase modulation element 15 , a mirror 16 , a convex lens 17 , a convex lens 18 and a CCD camera 19 .
- the laser light source 10 is to output coherent laser light, including, for example, a He—Ne laser light source.
- the lens 11 and the lens 12 which act as a beam expander receive light output from the laser light source 10 to expand a beam radius of the light, thereby outputting the light as parallel light.
- the aperture 13 has a round opening and receives the light output from the lens 11 and the lens 12 , and outputs a part of the light passing through the opening at the beam cross section of the light.
- the beam splitter 14 allows a part of the light reached from the aperture 13 to transmit through and outputs to the optical phase modulation element 15 and also allows a part of the light reached from the optical phase modulation element 15 to reflect and outputs to the mirror 16 .
- the optical phase modulation element 15 receives the light output from the laser light source 10 and passed through the beam splitter 14 to modulate a phase of the light depending on a position on the beam cross section of the light, thereby outputting the light after the phase modulation to the beam splitter 14 .
- the optical phase modulation element 15 may be an element which is given a thickness distribution by working the surface of a glass plate or the like, however, preferably an element (SLM: spatial light modulator) in which a phase modulation amount of each pixel is set on the basis of a control signal input from outside. Where an SLM is used as the optical phase modulation element 15 , a spatial distribution of phase modulation amount can be written electrically to give various phase modulation distributions as appropriate.
- the mirror 16 reflects light which has reached from the beam splitter 14 and outputs the thus reflected light to the lens 17 .
- the lens 17 and the lens 18 receive light reflected by the mirror 16 to adjust a beam radius of the light, thereby outputting the light as parallel light.
- the CCD camera 19 receives light output from the lens 17 and the lens 18 , thereby detecting an optical intensity distribution on the beam cross section of the light.
- coherent laser light output from the laser light source 10 is expanded for the beam radius by the convex lens 11 and the convex lens 12 , thereafter, a part of the beam cross section passes through the round opening of the aperture 13 , by which the beam cross section is made round, and it transmits also through the beam splitter 14 and is input in the optical phase modulation element 15 .
- the light input in the optical phase modulation element 15 is subjected to phase modulation by the optical phase modulation element 15 depending on a position on the beam cross section and reflected.
- the light which is subjected to phase modulation by the optical phase modulation element 15 and reflected is reflected by the beam splitter 14 and further reflected by the mirror 16 , adjusted for the beam radius by the convex lens 17 and the convex lens 18 , and made incident on a light receiving face of the CCD camera 19 , thereby the optical intensity distribution on the beam cross section of the light is detected by the CCD camera 19 .
- n is given as an integer
- an arbitrary phase ⁇ and an arbitrary phase ( ⁇ +2n ⁇ ) are equal in value to each other.
- a distribution ⁇ (r, ⁇ ) of the phase adjustment amount may be set by disregarding an offset value but giving consideration only to a relative value.
- a phase modulation amount ⁇ expressed by the above formula (1) can be limited to a range from a phase ⁇ to a phase ( ⁇ +2 ⁇ ). It is noted that ⁇ is an arbitrary value and preferably a value of zero in terms of the mathematical expression.
- a phase discontinuity line expressed by circumferences of p (number of pieces) radiuses r 1 to r p to be set in a radial direction r can be set as follows.
- the phase discontinuity line is present at a part (“segment”) at which an optical intensity is zero.
- a segment of the optical intensity distribution can be determined by the zero point of Sonine polynomials. Specifically, determined is a value of a variable z in which Sonine polynomials S p q (z) defined by the formula (2) given below is a value of zero.
- phase modulation ⁇ (r, ⁇ ) by the optical phase modulation element 15 and reflected is changed into LG mode light in which a radial exponent is p and a declination exponent is q.
- a radial exponent is p
- a declination exponent is q.
- the phase value repeats the change of the value 2 ⁇ to the value zero ⁇ q times.
- the declination variable ⁇ when the declination variable ⁇ is fixed, a phase value at a point belonging to two domains in contact with the phase discontinuity line as a border line has a difference of ⁇ .
- FIG. 2 to FIG. 4 are drawings respectively showing examples of distributions of phase modulation amount in the optical phase modulation element 15 .
- the radial exponent p and the declination exponent q are respectively given as each value of 1 to 3 and a distribution of phase modulation amount in the optical phase modulation element 15 is shown by making contrasting densities different.
- FIG. 3 shows in a three-dimensional manner a distribution of phase modulation amount in the optical phase modulation element 15 , in which the phase adjustment amount in the optical phase modulation element 15 is given on the z axis.
- FIG. 3 ( a ) shows a distribution of phase adjustment amount in the optical phase modulation element 15 where the radial exponent p is zero and the declination exponent q is one.
- FIG. 3 ( b ) shows a distribution of phase adjustment amount in the optical phase modulation element 15 where the radial exponent p is one and the declination exponent q is one.
- FIG. 4 ( a ) shows a distribution of phase adjustment amount in the optical phase modulation element 15 by making contrasting densities different where the radial exponent p is two and the declination exponent q is four.
- FIG. 4 ( b ) shows a distribution of phase adjustment amount in the optical phase modulation element 15 by making contrasting densities different where the radial exponent p is five and the declination exponent q is one.
- Phase modulation in the declination direction and phase modulation in the radial direction may be given by one optical phase modulation element or may be given individually by two optical phase modulation elements.
- FIG. 5 is a view showing an example of the latter or the respective distributions of phase modulation amount in two optical phase modulation elements.
- FIG. 5 ( a ) shows a distribution of phase adjustment amount by making contrasting densities different where the radial exponent p is two and the declination exponent q is three.
- FIG. 5 ( b ) shows a distribution of phase adjustment amount in a first optical phase modulation element where the radial exponent p is two.
- phase adjustment amount shown in FIG. 5 ( c ) shows a distribution of phase adjustment amount in a second optical phase modulation element by making contrasting densities different where the radial exponent p is zero and the declination exponent q is three.
- the distribution of phase modulation amount shown in FIG. 5 ( b ) is that given by the above formulae (2) and (3), therefore depending on the declination exponent q as well.
- the distribution of phase adjustment amount shown in FIG. 5 ( a ) is expressed as a sum of the respective distributions of phase adjustment amount shown in FIG. 5 ( b ) and FIG. 5 ( c ).
- the phase distribution may be given first in the radial direction and then in the declination direction or vice versa.
- FIG. 6 and FIG. 7 are drawings respectively showing examples of intensity distributions on a beam cross section of LG mode light output from the light beam generator 1 of the present embodiment.
- FIG. 6 shows observed values
- FIG. 7 shows theoretical values.
- the radial exponent p and the declination exponent q are respectively given as each value of 1 to 3. These exponents correspond to the distribution of phase modulation amount in the optical phase modulation element 15 shown in FIG. 2 .
- the observed values ( FIG. 6 ) and the theoretical values ( FIG. 7 ) correspond well to each other in any mode and the thus obtained light is LG mode light.
- FIG. 8 is a view showing an example of an intensity distribution on the beam cross section of LG mode light output from the light beam generator 1 of the present embodiment.
- FIG. 8 ( a ) shows observed values
- FIG. 8 ( b ) shows theoretical values.
- the radial exponent p is five and the declination exponent q is one, which corresponds to the distribution of phase modulation amount in the optical phase modulation element 15 shown in FIG. 4 ( b ).
- the thus described higher-order LG mode light can be generated highly accurately and in high definition.
- the light beam generator 1 of the present embodiment is able to generate at high accuracy and in high definition the LG mode light which is high order both in terms of radial exponents and declination exponents. And further applications are expected by using the higher-order LG mode light.
- the optical phase modulation element 15 is of a reflection type.
- a transmission type optical phase modulation element may be used in the present invention.
- the present invention is to provide a light beam generator capable of generating LG mode light for which further applications are expected.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006320549A JP5008954B2 (ja) | 2006-11-28 | 2006-11-28 | 光ビーム発生装置 |
JP2006-320549 | 2006-11-28 | ||
PCT/JP2007/067951 WO2008065797A1 (fr) | 2006-11-28 | 2007-09-14 | Dispositif de génération de faisceau optique |
Publications (2)
Publication Number | Publication Date |
---|---|
US20100060969A1 US20100060969A1 (en) | 2010-03-11 |
US7961371B2 true US7961371B2 (en) | 2011-06-14 |
Family
ID=39467595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/516,416 Active 2027-11-16 US7961371B2 (en) | 2006-11-28 | 2007-09-14 | Optical beam generating device |
Country Status (5)
Country | Link |
---|---|
US (1) | US7961371B2 (de) |
EP (1) | EP2088462A4 (de) |
JP (1) | JP5008954B2 (de) |
CN (1) | CN101542355B (de) |
WO (1) | WO2008065797A1 (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015004014A1 (en) | 2013-07-11 | 2015-01-15 | Koninklijke Philips N.V. | Device and method for non-invasive treatment of skin using laser light. |
WO2015110273A1 (en) | 2014-01-21 | 2015-07-30 | Koninklijke Philips N.V. | Device and method for non-invasive treatment of skin using laser light |
US20150372398A1 (en) * | 2012-12-26 | 2015-12-24 | Huawei Technologies Co., Ltd. | Method and Apparatus for Generating Electromagnetic Beams |
EP3809188A1 (de) | 2019-10-17 | 2021-04-21 | National Institute for Laser, Plasma and Radiation Physics - INFLPR | Optisches system zur erzeugung von vektorstrahlen |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5410043B2 (ja) * | 2008-07-10 | 2014-02-05 | 浜松ホトニクス株式会社 | 光制御装置および光制御方法 |
WO2010082650A1 (ja) * | 2009-01-19 | 2010-07-22 | 三菱電機株式会社 | エレベータシステム |
JP5338698B2 (ja) * | 2009-03-19 | 2013-11-13 | セイコーエプソン株式会社 | 画像表示装置 |
DE102010013830A1 (de) * | 2010-03-26 | 2011-09-29 | Carl Zeiss Microlmaging Gmbh | Mikroskop und Verfahren zur mikroskopischen Erfassung von Licht einer Probe |
WO2015097679A1 (en) * | 2013-12-24 | 2015-07-02 | Ecole Polytechnique Federale De Lausanne (Epfl) | Ablation device and method for subsurface biological tissue ablation |
CN104950453B (zh) * | 2015-06-19 | 2017-08-25 | 苏州大学 | 一种产生全庞加莱光束的装置和方法 |
KR102609437B1 (ko) | 2017-07-13 | 2023-12-01 | 프레지던트 앤드 펠로우즈 오브 하바드 칼리지 | 중성 원자 양자 정보 프로세서 |
EP3928142B1 (de) | 2019-02-22 | 2023-04-05 | President and Fellows of Harvard College | Erzeugung eines grossflächigen gleichförmigen optischen fokusarrays mit einem räumlichen phasenlichtmodulator |
CN113485023B (zh) * | 2021-07-06 | 2022-08-26 | 上海国科航星量子科技有限公司 | 一种基于指向镜的偏振保持光路系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5333000A (en) * | 1992-04-03 | 1994-07-26 | The United States Of America As Represented By The United States Department Of Energy | Coherent optical monolithic phased-array antenna steering system |
JP2001523396A (ja) | 1997-05-01 | 2001-11-20 | イエダ リサーチ アンド ディヴェロップメント カンパニー リミテッド | 不連続位相素子を有する光共振器 |
US20030026199A1 (en) * | 2001-08-03 | 2003-02-06 | Myers Michael H. | Code-division, minimum-shift-keying optical multiplexing |
US20100238455A1 (en) * | 2009-03-20 | 2010-09-23 | Zygo Corporation | Error compensation in phase shifting interferometry |
-
2006
- 2006-11-28 JP JP2006320549A patent/JP5008954B2/ja active Active
-
2007
- 2007-09-14 US US12/516,416 patent/US7961371B2/en active Active
- 2007-09-14 WO PCT/JP2007/067951 patent/WO2008065797A1/ja active Application Filing
- 2007-09-14 CN CN2007800441271A patent/CN101542355B/zh active Active
- 2007-09-14 EP EP07807355A patent/EP2088462A4/de not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5333000A (en) * | 1992-04-03 | 1994-07-26 | The United States Of America As Represented By The United States Department Of Energy | Coherent optical monolithic phased-array antenna steering system |
JP2001523396A (ja) | 1997-05-01 | 2001-11-20 | イエダ リサーチ アンド ディヴェロップメント カンパニー リミテッド | 不連続位相素子を有する光共振器 |
US20030026199A1 (en) * | 2001-08-03 | 2003-02-06 | Myers Michael H. | Code-division, minimum-shift-keying optical multiplexing |
US20100238455A1 (en) * | 2009-03-20 | 2010-09-23 | Zygo Corporation | Error compensation in phase shifting interferometry |
Non-Patent Citations (10)
Title |
---|
Arlt et al., "Atom Guiding Along Laguerre-Gaussian and Bessel Light Beams", Applied Physics B, (2000), vol. 71, pp. 549-554. |
Arlt et al., "The Production of Multiringed Laguerre-Gaussian Modes by Computer-Generated Holograms", Journal of Modern Optics, (1998), vol. 45, No. 6, pp. 1231-1237. |
Beijersbergen et al., "Helical-wavefront Laser Beams Produced with a Spiral Phaseplate", Elsevier, Optics Communications vol. 112, (1994), pp. 321-327. |
David G. Grier, "A Revolution in Optical Manipulation", Nature, Aug. 14, 2003, vol. 424, pp. 810-816. |
Heckenberg et al., "Generation of Optical Phase Singularities by Computer-Generated Holograms", Optics Letters, Feb. 1, 1992, vol. 17, No. 3, pp. 221-223. |
Heckenberg et al., "Laser Beams with Phase Singularities", Optical and Quantum Electronics, (1992), vol. 24, No. 9, pp. 155-166. |
Petrov et al., "A Simple Method to Generate Optical Beams With a Screw Phase Dislocation", Optics Communications No. 143 Nov. 15, 1997, pp. 265-267. |
Sueda et al., "Laguerre-Gaussian Beam Generated with a Multilevel Spiral Phase Plate for High Intensity Laser Pulses", Optics Express, Jul. 26, 2004, vol. 12, No. 15, pp. 3548-3553. |
Sueda et al., "Laguerre-Gaussian Beam Generated With a Multilevel Spiral Phase Plate for High Intensity Laser Pulses", Quantum Electronics and Laser Science Conference, (2005), pp. 1567-1569. |
Yoko Miyamoto, Laguerre-Gaussian Beams and Optical Orbital Angular Momentum, The Review of Laser Engineering, vol. 32, No. 4, Apr. 15, 2004, pp. 232-236 (with English language translation, pp. 1-12). |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150372398A1 (en) * | 2012-12-26 | 2015-12-24 | Huawei Technologies Co., Ltd. | Method and Apparatus for Generating Electromagnetic Beams |
WO2015004014A1 (en) | 2013-07-11 | 2015-01-15 | Koninklijke Philips N.V. | Device and method for non-invasive treatment of skin using laser light. |
WO2015110273A1 (en) | 2014-01-21 | 2015-07-30 | Koninklijke Philips N.V. | Device and method for non-invasive treatment of skin using laser light |
EP3809188A1 (de) | 2019-10-17 | 2021-04-21 | National Institute for Laser, Plasma and Radiation Physics - INFLPR | Optisches system zur erzeugung von vektorstrahlen |
Also Published As
Publication number | Publication date |
---|---|
WO2008065797A1 (fr) | 2008-06-05 |
EP2088462A4 (de) | 2011-08-03 |
EP2088462A1 (de) | 2009-08-12 |
US20100060969A1 (en) | 2010-03-11 |
CN101542355B (zh) | 2011-04-13 |
CN101542355A (zh) | 2009-09-23 |
JP5008954B2 (ja) | 2012-08-22 |
JP2008134450A (ja) | 2008-06-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7961371B2 (en) | Optical beam generating device | |
US6842285B2 (en) | Method and apparatus for generating a phase-modulated wave front of electromagnetic radiation | |
US20220178752A1 (en) | Dispersion measuring device, pulse light source, dispersion measuring method, and dispersion compensating method | |
US9297991B2 (en) | Lighting method and microscopic observation device | |
US20220390810A1 (en) | Tunable Orbital Angular Momentum System | |
US8610993B2 (en) | Light control device and light control method | |
US8441709B2 (en) | Light control device and light control method | |
Zhao et al. | Vibration-compensated interferometer for surface metrology | |
JP6538084B2 (ja) | 多数のレーザー光源を位相整合するシステム | |
Mikhailov et al. | Four-wave mixing in a ring cavity | |
EP1793460A1 (de) | Laserstrahl-weglängendifferenz-detektor, laserphasensteuerung und kohärenter optischer koppler | |
CN105467608A (zh) | 产生第二阶厄米复变函数高斯光束的方法及装置 | |
US11962913B2 (en) | Imaging device comprising spatial light modulator and imaging method thereof | |
Kim et al. | Rapid 3D shape measurement using sine pattern in phase-shifting projection method | |
JP2006023662A (ja) | 光電場波形制御方法および制御装置 | |
EP4325193A1 (de) | Dispersionsmessvorrichtung und dispersionsmessverfahren | |
US20210341764A1 (en) | Systems and methods for diffractive coherent laser combining | |
US20240192082A1 (en) | Dispersion measurement device and dispersion measurement method | |
Chen et al. | Generation of robust spatiotemporal optical vortices with transverse orbital angular momentum beyond $10^ 2$ | |
US20240201046A1 (en) | Dispersion measuring device, and dispersion measuring method | |
Pabón et al. | High-dimensional states of light with full control of transverse path and OAM degrees of freedom | |
Seck et al. | Towards solid state laser annealing: interference suppression by non-periodic homogenizers suitable for high-power applications | |
Umbetov et al. | Laser Measuring Apparatus Based on Using Bifocal Lenses | |
Wilcox et al. | Diffractive combining and control of femtosecond pulse beam arrays | |
Maweza et al. | Shaping and detecting mid-IR light with a spatial light modulator |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: HAMAMATSU PHOTONICS K.K.,JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ANDO, TARO;OHTAKE, YOSHIYUKI;FUKUCHI, NORIHIRO;AND OTHERS;REEL/FRAME:022738/0888 Effective date: 20090514 Owner name: HAMAMATSU PHOTONICS K.K., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ANDO, TARO;OHTAKE, YOSHIYUKI;FUKUCHI, NORIHIRO;AND OTHERS;REEL/FRAME:022738/0888 Effective date: 20090514 |
|
FEPP | Fee payment procedure |
Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 8 |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 12TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1553); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 12 |