US7036239B2 - Adjustable probe - Google Patents

Adjustable probe Download PDF

Info

Publication number
US7036239B2
US7036239B2 US10/761,161 US76116104A US7036239B2 US 7036239 B2 US7036239 B2 US 7036239B2 US 76116104 A US76116104 A US 76116104A US 7036239 B2 US7036239 B2 US 7036239B2
Authority
US
United States
Prior art keywords
mobile element
probe according
actuator
probe
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related, expires
Application number
US10/761,161
Other languages
English (en)
Other versions
US20040149057A1 (en
Inventor
Pascal Jordil
Adriano Zanier
Claude Rouge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesa SARL
Original Assignee
Tesa SARL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tesa SARL filed Critical Tesa SARL
Assigned to TESA SA reassignment TESA SA ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: JORDIL, PASCAL, ZANIER, ADRIANO, ROUGE, CLAUDE
Publication of US20040149057A1 publication Critical patent/US20040149057A1/en
Assigned to TESA SA reassignment TESA SA CORRECTED COVER SHEET TO CORRECTED ASSIGNEE NAME, SERIAL NUMBER AND THE FILING DATE. PREVIOUSLY RECORDED AT REEL/FRAME 014911/0452 (ASSIGNMENT OF ASSIGNOR'S INTEREST) Assignors: JORDIL, PASCAL, ZANIER, ADRIANO, ROUGE, CLAUDE
Application granted granted Critical
Publication of US7036239B2 publication Critical patent/US7036239B2/en
Expired - Fee Related legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/047Accessories, e.g. for positioning, for tool-setting, for measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012Contact-making feeler heads therefor

Definitions

  • the present invention concerns a touch-triggered probe that can be oriented spatially along a multiplicity of directions.
  • This probe is designed to be used more particularly, but not exclusively, in a hand-operated or automatic measuring machine or in a machine tool such as for example a milling machine, for the three-dimensional measuring of a piece that has been or is being machined.
  • Touch-triggered probes are measuring instruments used widely, though not exclusively, on production lines of mechanical pieces for accurately checking the dimensions or surfaces of the mechanical pieces. Touch-triggered probes are also used for three-dimensional measuring of pieces of complex shape in order to reproduce or model them.
  • touch-triggered probes comprise a fixed part, designed to be fastened onto a measuring machine or a machine tool, and a mobile feeler, comprising a sphere at the end of an elongated rod and designed to be brought into contact with the piece to be measured.
  • the touch-triggered probes are fastened on the mobile arm of a machine whose spatial position is determinable precisely with the aid of a hand-operated or automatic measuring system, such as for example position encoders placed on the machine's axes.
  • the mobile arm is displaced spatially to bring the probe's measuring feeler into contact with the piece or surface to be measured.
  • a deflective force is then applied onto the feeler, moving it out of its initial resting position.
  • a sensor reacts to the feeler's slightest displacement, generating an electric signal that is sent either to the user, in the form of a light signal, or to the machine's control software that thus determines, on the basis of the measuring system's data, the coordinates of the contact point in a given reference frame.
  • electromechanical or optical sensors or movement sensors based on different principles, for example sensors comprising constraint gauges, are used in the prior art.
  • the link between the feeler and the probe's fixed part is usually achieved along the principle of the Boys connection, such as for example through three cylindrical pins resting on six spheres so as to define six contact points between the fixed device and the feeler.
  • Two-dimensional and one-dimensional probes are however also known.
  • probes are known that allow the contact feeler to be oriented in a plurality of spatial directions. Generally, two independent rotation axes are required to cover all the possible orientations. A probe of this type is described in European patent application EP-0'392'660-A2.
  • the rotation axes are preferably indexed, in the sense that they provide a number sufficiently large but finite of predetermined and accurately reproducible resting positions. This disposition avoids the necessity of again calibrating the measuring machine after each change of the feeler's orientation.
  • the axes allowing the aforementioned prior art probe to be oriented are locked in one of the provided indexed positions.
  • the user When a different orientation of the probe is required, the user must manually unlock the axes, by acting on a wheel or on a lever provided to this effect, orient the probe as needed, and lock the axes again by repositioning the wheel or lever in the initial locking position.
  • These operations can entail positioning errors, for example following an involuntary movement of the first axis during positioning of the second axis.
  • an adjustable touch-triggered probe for orienting a measuring feeler relative to a measuring apparatus comprising:
  • a first resilient device for holding said first mobile element in a locked position, preventing said first mobile element from rotating
  • a second mobile element connected to said first mobile element through a second axis for turning said second mobile element relative to said first mobile element
  • a second resilient device independent from said first resilient device, for holding said second mobile element in a locked position, preventing said second mobile element from rotating.
  • FIG. 1 a shows a first embodiment of a touch-triggered probe according to the invention
  • FIG. 1 b shows a fixed part of the touch-triggered probe according to the invention represented in FIG. 1 a;
  • FIGS. 1 c and 1 d show the indexing mechanism of the first axis of the touch-triggered probe according to the invention represented in FIG. 1 a;
  • FIG. 1 e shows the demultiplying mechanism used for disengaging the first axis of the probe of FIG. 1 a;
  • FIGS. 2 a , 2 b and 2 c show in cross-section and elevation the indexing and demultiplying mechanisms of the second axis of the probe of FIG. 1 a;
  • FIGS. 3 and 4 , 5 a and 5 b show a second embodiment of the probe according to the invention.
  • the first embodiment of the invention represented in FIGS. 1 a to 1 e is a touch-triggered probe 20 comprising a fixed part 250 , represented in detail in FIG. 1 b , and designed to be fastened to the mobile arm of a measuring machine through the threaded rod 251 or through any other known fastening means.
  • the fixed part 250 carries on its lower side 24 spheres 256 , regularly distributed along a circumference and partially protruding downwards.
  • the spheres 256 define 24 indexed positions at a distance of 15 degrees for the probe's first rotation axis, as will be explained further below. It is obvious that a different number of spheres can be used according to the desired number of indexed positions.
  • the mobile element 210 carries on its upper side three cylindrical pins 217 .
  • the flat spring 215 presses the mobile element 210 against the fixed element 250 .
  • each of the pins 217 rests on two of the spheres 256 , the six resulting contact points determining the relative position of the elements 250 and 210 in an accurate and reproducible fashion.
  • the mobile element 210 can take up 24 indexed positions, at a distance of 15 degrees from one another, around the first rotation axis 211 corresponding to the probe's geometrical axis.
  • the same result could have been obtained by other equivalent arrangements, for example by placing the spheres on the mobile element and the pins on the fixed element, or by replacing the spherical or cylindrical surfaces of the pins or of the spheres by inclined planes, or even by using six cylindrical pins having each a single contact point with one of the spheres.
  • the disengaging mechanism 300 allows the mobile element 210 to rotate around the axis 211 .
  • the transmission 300 is constituted of a toothed wheel 301 , driven by the four racks 305 and by the inclined helical surfaces 302 .
  • the racks 305 drive in rotation the toothed wheel 301 and the inclined planes 302 united therewith and which, sliding on their bearings (not represented in the figures), move the fixed element 250 away axially from the mobile element 210 .
  • the spheres 256 protrude over the pins 217 without touching them, and rotation around the axis 211 is possible.
  • the resting force of the pins 217 on the spheres 256 must be sufficiently high to prevent any accidental movement of the mobile part 210 during measuring.
  • the spring 215 is dimensioned for a total resting force of approximately 30 N, i.e. about 10 N for each of the six contact points, since the pressure is exerted at 60 degrees relative to the axis.
  • buttons 310 It would be difficult to apply a force of 30 N directly on the buttons 310 .
  • the slope of the inclined surfaces 302 is chosen to give a sufficient demultiplication ratio between the radial force exerted on the buttons 310 and the axial force opposing the elasticity of the spring 215 .
  • a reduction ratio of 1:2 means an operation force on the buttons 310 of about 15 N, i.e. approximately 1.5 Kgf, which the user can exert without great difficulty. With this reduction ratio, the run of the buttons 310 remains contained within several millimeters.
  • buttons 310 While the buttons 310 are pressed along the radial direction, the user can make the mobile element 210 turn around the axis 211 by acting on the same buttons in tangential direction. This operation is very intuitive and can easily be performed with two fingers of a hand. In this condition, the distance between the spheres 256 and the pins 217 is sufficient to avoid any contact or friction of the indexing surfaces, thus maintaining the positioning accuracy in indexed position. It is thus not necessary to release the buttons 310 to go from the unlocking to the rotation of the probe and then for locking the probe again.
  • the reduction ratio and the friction coefficients of the materials used are chosen so that the transmission 300 is reversible, so that the mobile element 210 returns spontaneously to an indexed position once the pressure on the buttons 310 is released, thus avoiding an accidental use in free position.
  • the first mobile element 210 is connected to a second mobile element 220 capable of turning around a rotation axis 212 , perpendicular to the first rotation axis 211 , and to which a mobile feeler 30 of known type is fastened, as can be seen in FIG. 2 a.
  • the second mobile element 220 is pressed against the first mobile element 210 in the axial direction defined by the rotation axis 212 by the compression spring 225 .
  • a crown of spheres 226 is provided on a vertical side of the mobile element 220 and interacts with three cylindrical pins (not represented in the figure) placed on the adjacent side of the first mobile element 210 to define a predetermined number of indexing positions that are exactly reproducible, in a manner similar to that explained here above for the rotation of the first mobile element 210 .
  • six cylindrical pins having each only a single contact point can be used.
  • the disengaging and rotating system 400 of the second mobile element 220 is represented in figure 2 b .
  • the disengaging is performed by pressing on the two buttons 411 and 410 .
  • the axial force applied on the button 410 capable of sliding axially around the piece 470 , is transmitted by the two levers 430 and 450 and by the horizontal arm 440 , and is multiplied and applied by the pin 461 and the rod 460 to the spring 225 , in order to compress the latter, which suppresses the contact force between 220 and 210 .
  • the dimensions of the arms of the levers 430 , 450 will be chosen of unequal length to obtain a reduction ratio of the operation force of 1:2, as for the first mobile element 210 .
  • a second spring 475 placed between the button 410 and the piece 470 , pushes axially towards the right in figure 2 a the second mobile element 220 while allowing it to rotate.
  • the button 410 When the button 410 is pressed, the second mobile element 220 is displaced towards the right of FIG. 2 a , so that the pins and the indexing spheres 226 no longer touch, and the second mobile element 220 can turn around the axis 212 .
  • the rotation is impressed by the user through the button 410 , which is united angularly with the piece 470 through a pin, not visible in the figures.
  • the button 411 opposed to the button 410 , has the double function of giving the finger a resting surface for exerting a force opposed to that applied on the button 410 and to facilitate the rotation of the element 220 with two fingers.
  • the button 411 is in fact united angularly with the element 220 and is driven in rotation with the latter. Use of two forces that are essentially opposed prevents efforts from being transmitted onto the probe's support and the whole probe from moving.
  • the action of the button 410 on the second mobile element 220 through the rod 460 is substantially aligned and opposed to the force exerted by the spring 225 , which ensures rectilinear movements without any jamming.
  • the electric signal generated by the feeler 30 is sent either to the user, in the form of a light signal emitted by the light diode 50 ( FIG. 1 a ), or to the machine's control software, which thus determines, on the basis of the measuring system's data, the coordinates of the contact point in a given reference frame.
  • the lower part of the probe 20 has one or several protecting elements 218 protruding out of the probe's body and whose function is to protect the indexing mechanism from shocks against the measuring piece or against the supporting table.
  • the protecting element 218 can be an enlargement machined directly in the metallic shell 217 , or an additional element of a suitable material capable of absorbing shocks, for example of rubber or elastomer.
  • the second mobile element 220 can, in this embodiment, take up 7 indexed positions at a distance of 15 degrees from one another, for a total angle of 90 degrees. This angle, when combined with the 360 degrees of rotation possible for the first rotating element 210 , allows the feeler 30 to be oriented in a number of directions uniformly distributed in a half-space. It would however be possible to realize the inventive device with a generic number of indexed positions and having whatever distance between them.
  • FIGS. 4 , 5 a and 5 b show a second embodiment of the invention, in which the disengaging mechanism 300 of the first axis 211 is achieved with four pairs of identical and symmetrical connecting rods 320 .
  • each pair of connecting rods 320 is articulated relative to a central point 323 and the external forces applied to the buttons 310 are transmitted to said central points 323 when the two ends of the two connecting rods of a pair rest one on the fixed element 250 and the other on the first mobile element 210 .
  • the reduction ratio between the axial force exerted on the mobile element 210 and the radial operation force applied to the buttons 310 is proportional to the tangent of the half aperture angle between the connecting rods 320 .
  • This variability of the reduction ratio is advantageous since the force required for holding the buttons pushed at the end of their run is minimal, which makes easier the operation of finely adjusting the feeler 30 .
  • This advantageous characteristic is also possible in the first embodiment by using a non-plane surface instead of the inclined plane 302 .
  • buttons 310 When the buttons 310 are pressed fully, the distance between the spheres 226 and the pins juxtaposed thereto is maintained, and the spheres and pins cannot in any case come into contact with one another or with other elements of the probe's mechanism. Under this condition, wear of the indexing surfaces is reduced to the required minimum, and the indexing accuracy is kept through time.
  • the resulting force on the first mobile element 210 through the connecting rods 320 is substantially axial relative to the rotation axis 211 , i.e. substantially aligned and opposed to the force exerted by the spring 215 , which ensures rectilinear movements without jamming.
  • the horizontal component of the resulting force produces a high friction between the rod 253 and the sleeve 219 preventing the first mobile element 210 from being disengaged. This advantageous characteristic allows ill-timed and involuntary operations to be prevented.
  • buttons 310 are surrounded by a protective ring membrane of rubber or elastomer 330 , whose function is to protect the internal mechanism from dirt and dust, but also to prevent the transmission of heat from the user's hands to the internal indexing mechanism, which would have dire consequences on the indexing accuracy.
  • the buttons 410 and 411 serving for the rotation and disengaging of the second axis 212 , are also preferably made of a synthetic material having good heat-insulating properties.
  • a window 41 is provided on the supporting element 250 to allow the rotation angle relative to the first axis 211 to be read on a scale engraved or printed on the first mobile element 210 , as can be seen in FIGS. 5 a and 5 b.
  • the rotation angle relative to the second axis 212 can be read on the two windows 40 provided in the external crown of the button 411 and visible in FIGS. 5 a and 5 c . Two windows are necessary in this case to allow an optimal visibility in all the probe's possible orientations.
  • the trigger feeler 30 reacts to the slightest contact with the surface of the piece to be measured by generating an electric impulse.
  • the impulse is transmitted, through an electronic processing circuit (not represented), to the connector 70 for connecting with the measuring machine's control device and to the light indicator 50 .
  • the indicator comprises in this embodiment a light diode but could alternatively comprise other known light emitters, such as for example electro-luminescent elements in sheet or wire form.
  • the light diode is topped with an optical light diffuser allowing the emitted light to be seen in a large range of observation angles.
  • the indicator 50 is replaced with several indicators placed at different locations on the probe so that at least one indicator is visible from every possible observation angle.
  • the indicator 50 comprises one or several light conductors for emitting the light produced by one or several light sources from different locations of the probe's surface, so that the light indication is visible from every possible observation angle.
  • the inventive device could also be achieved without using an indexing mechanism but with simple friction mechanisms allowing the axes to be locked in an infinite number of orientations.
  • the invention also comprises an embodiment in which the rotation and the disengaging of the axes are performed by automatic actuators, for example electric motors and/or solenoids.
  • automatic actuators for example electric motors and/or solenoids.
  • the rotation of the probe's axes is ensured by servomotors comprising encoders for measuring the orientation angles of the feeler.
  • the indexing mechanism described here above can be maintained or dispensed with if the servomotors' positioning accuracy is sufficient for the intended applications.
US10/761,161 2003-01-29 2004-01-20 Adjustable probe Expired - Fee Related US7036239B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03001836.0 2003-01-29
EP03001836A EP1443299B1 (fr) 2003-01-29 2003-01-29 Palpeur orientable

Publications (2)

Publication Number Publication Date
US20040149057A1 US20040149057A1 (en) 2004-08-05
US7036239B2 true US7036239B2 (en) 2006-05-02

Family

ID=32605259

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/761,161 Expired - Fee Related US7036239B2 (en) 2003-01-29 2004-01-20 Adjustable probe

Country Status (7)

Country Link
US (1) US7036239B2 (fr)
EP (1) EP1443299B1 (fr)
JP (1) JP3947171B2 (fr)
CN (1) CN1229616C (fr)
AT (1) ATE340987T1 (fr)
DE (3) DE60308632T2 (fr)
HK (1) HK1066268A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060005633A1 (en) * 2004-07-12 2006-01-12 Tesa Sa Probe for three-dimensional measurements
US20090072117A1 (en) * 2007-09-14 2009-03-19 The Gleason Works Carriage arrangement for a machine tool
US20140167745A1 (en) * 2011-07-08 2014-06-19 Carl Zeiss Industrielle Messtechnik Gmbh Correcting and/or preventing errors during the measurement of coordinates of a workpiece
US9454145B2 (en) 2011-01-19 2016-09-27 Renishaw Plc Analogue measurement probe for a machine tool apparatus and method of operation
US10578424B2 (en) 2016-12-22 2020-03-03 Carl Zeiss Industrielle Messtechnik Gmbh Rotating/pivoting sensor system for a coordinate measuring apparatus

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0322115D0 (en) 2003-09-22 2003-10-22 Renishaw Plc Method of error compensation
EP1666833B1 (fr) * 2004-12-01 2008-01-23 Tesa SA Tête de mesure orientable motorisée
DE602004011794T2 (de) * 2004-12-01 2009-02-05 Tesa Sa Motorisierter und orientierbarer Messkopf
EP1666832B1 (fr) * 2004-12-01 2012-08-29 Tesa Sa Tête de mesure orientable motorisée
GB0525306D0 (en) * 2005-12-13 2006-01-18 Renishaw Plc Method of machine tool calibration
DE102010020654A1 (de) * 2010-05-07 2011-11-10 Carl Zeiss Industrielle Messtechnik Gmbh Tastkopf für ein Koordinatenmessgerät zum Bestimmen von Raumkoordinaten an einem Messobjekt
DE102011100467B3 (de) * 2011-05-02 2012-07-05 Carl Zeiss Industrielle Messtechnik Gmbh Messkopf für ein Koordinatenmessgerät zum Bestimmen von Raumkoordinaten an einem Messobjekt
CN102706315A (zh) * 2012-03-20 2012-10-03 深圳市大族激光科技股份有限公司 平台台面的平面度测量装置及测量方法
CN103267513B (zh) * 2013-05-22 2015-10-21 河南省计算机应用技术研究所有限公司 微触式浑水水下地形仪
EP2889573B1 (fr) 2013-12-24 2016-06-15 Tesa Sa Tête de mesure inclinable motorisée
JP2015227816A (ja) * 2014-05-30 2015-12-17 株式会社ミツトヨ 多関節アーム形測定機
CN108534667B (zh) * 2018-04-09 2020-03-24 浙江大学 一种多点触发的平面度误差检测装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4621436A (en) * 1984-06-21 1986-11-11 Sokkisha Co., Ltd. Position detecting apparatus
US4679332A (en) * 1985-10-14 1987-07-14 Tesa S.A. Sensor device for a machine for measuring conductive parts mounted on a measurement table
US4888877A (en) 1987-11-26 1989-12-26 Carl-Zeiss-Stiftung, Heidenhein/Brenz Articulating head for a coordinate-measuring instrument
EP0392660A2 (fr) 1989-04-14 1990-10-17 Renishaw plc Tête de palpeur
US20010025427A1 (en) 2000-02-15 2001-10-04 Werner Lotze Articulated device for the probe head of a coordinate measuring apparatus
US6526672B1 (en) * 1998-09-21 2003-03-04 Marposs Societa′ per Azioni Head for the linear dimension checking of mechanical pieces

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4621436A (en) * 1984-06-21 1986-11-11 Sokkisha Co., Ltd. Position detecting apparatus
US4679332A (en) * 1985-10-14 1987-07-14 Tesa S.A. Sensor device for a machine for measuring conductive parts mounted on a measurement table
US4888877A (en) 1987-11-26 1989-12-26 Carl-Zeiss-Stiftung, Heidenhein/Brenz Articulating head for a coordinate-measuring instrument
EP0392660A2 (fr) 1989-04-14 1990-10-17 Renishaw plc Tête de palpeur
US5088337A (en) * 1989-04-14 1992-02-18 Renishaw Plc Probe head
US6526672B1 (en) * 1998-09-21 2003-03-04 Marposs Societa′ per Azioni Head for the linear dimension checking of mechanical pieces
US20010025427A1 (en) 2000-02-15 2001-10-04 Werner Lotze Articulated device for the probe head of a coordinate measuring apparatus

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
U.S. Appl. No. 10/760,656, filed Jan. 20, 2004, Jordil et al.
U.S. Appl. No. 10/760,781, filed Jan. 20, 2004, Jordil et al.
U.S. Appl. No. 10/760,841, filed Jan. 20, 2004, Jordil et al.

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060005633A1 (en) * 2004-07-12 2006-01-12 Tesa Sa Probe for three-dimensional measurements
US7281433B2 (en) * 2004-07-12 2007-10-16 Tesa Sa Probe for three-dimensional measurements
US20090072117A1 (en) * 2007-09-14 2009-03-19 The Gleason Works Carriage arrangement for a machine tool
US7712227B2 (en) * 2007-09-14 2010-05-11 The Gleason Works Carriage arrangement for a machine tool
US9454145B2 (en) 2011-01-19 2016-09-27 Renishaw Plc Analogue measurement probe for a machine tool apparatus and method of operation
US9471054B2 (en) 2011-01-19 2016-10-18 Renishaw Plc Analogue measurement probe for a machine tool apparatus
US20140167745A1 (en) * 2011-07-08 2014-06-19 Carl Zeiss Industrielle Messtechnik Gmbh Correcting and/or preventing errors during the measurement of coordinates of a workpiece
US9671257B2 (en) * 2011-07-08 2017-06-06 Carl Zeiss Industrielle Messtechnik Gmbh Correcting and/or preventing errors during the measurement of coordinates of a workpiece
US10429178B2 (en) * 2011-07-08 2019-10-01 Carl Zeiss Industrielle Messtechnik Gmbh Correcting and/or preventing errors during the measurement of coordinates of a work piece
US10578424B2 (en) 2016-12-22 2020-03-03 Carl Zeiss Industrielle Messtechnik Gmbh Rotating/pivoting sensor system for a coordinate measuring apparatus

Also Published As

Publication number Publication date
ATE340987T1 (de) 2006-10-15
JP2004233358A (ja) 2004-08-19
JP3947171B2 (ja) 2007-07-18
DE60308632D1 (de) 2006-11-09
CN1229616C (zh) 2005-11-30
EP1443299B1 (fr) 2006-09-27
CN1517667A (zh) 2004-08-04
EP1443299A1 (fr) 2004-08-04
HK1066268A1 (en) 2005-03-18
DE60308632T2 (de) 2007-08-23
DE60331216D1 (de) 2010-03-25
US20040149057A1 (en) 2004-08-05
DE60331408D1 (de) 2010-04-08

Similar Documents

Publication Publication Date Title
US6938353B2 (en) Adjustable probe
US7036239B2 (en) Adjustable probe
US7281433B2 (en) Probe for three-dimensional measurements
US6854195B2 (en) Adjustable probe
US6907673B2 (en) Adjustable probe
EP2805067B1 (fr) Contrepoids de verrouillage pour une machine de mesure des coordonnées
US7213344B2 (en) Motorized orientable measuring head
US7263780B2 (en) Motorized orientable measuring head
JPS62177426A (ja) 力及びトルク変換装置
CN101512285B (zh) 表面感测设备
JP2002131043A (ja) デジタル式測定器
JPH0656791U (ja) X−yテーブル装置

Legal Events

Date Code Title Description
AS Assignment

Owner name: TESA SA, SWITZERLAND

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:JORDIL, PASCAL;ZANIER, ADRIANO;ROUGE, CLAUDE;REEL/FRAME:014911/0452;SIGNING DATES FROM 20031007 TO 20031009

AS Assignment

Owner name: TESA SA, SWITZERLAND

Free format text: CORRECTED COVER SHEET TO CORRECTED ASSIGNEE NAME, SERIAL NUMBER AND THE FILING DATE. PREVIOUSLY RECORDED AT REEL/FRAME 014911/0452 (ASSIGNMENT OF ASSIGNOR'S INTEREST);ASSIGNORS:JORDIL, PASCAL;ZANIER, ADRIANO;ROUGE, CLAUDE;REEL/FRAME:015715/0039;SIGNING DATES FROM 20031007 TO 20031009

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Free format text: PAYER NUMBER DE-ASSIGNED (ORIGINAL EVENT CODE: RMPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

FPAY Fee payment

Year of fee payment: 4

FPAY Fee payment

Year of fee payment: 8

FEPP Fee payment procedure

Free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.)

LAPS Lapse for failure to pay maintenance fees

Free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.)

STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20180502