US6269687B1 - Force sensing slider - Google Patents
Force sensing slider Download PDFInfo
- Publication number
- US6269687B1 US6269687B1 US09/072,815 US7281598A US6269687B1 US 6269687 B1 US6269687 B1 US 6269687B1 US 7281598 A US7281598 A US 7281598A US 6269687 B1 US6269687 B1 US 6269687B1
- Authority
- US
- United States
- Prior art keywords
- disc
- plate
- cavity
- slider
- force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/60—Fluid-dynamic spacing of heads from record-carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B21/00—Head arrangements not specific to the method of recording or reproducing
- G11B21/16—Supporting the heads; Supporting the sockets for plug-in heads
- G11B21/20—Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier
- G11B21/21—Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier with provision for maintaining desired spacing of head from record carrier, e.g. fluid-dynamic spacing, slider
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/4826—Mounting, aligning or attachment of the transducer head relative to the arm assembly, e.g. slider holding members, gimbals, adhesive
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B33/00—Constructional parts, details or accessories not provided for in the other groups of this subclass
- G11B33/10—Indicating arrangements; Warning arrangements
Definitions
- the present invention relates to a force sensing disc drive slider, and more particularly to a disc drive slider having a capacitance sensor responsive to forces acting on a contact pad that does not affect the aerodynamic characteristics of the slider.
- the contact force between a slider carrying a transducing head and a disc media perpendicular to the surface of the disc media is a very important parameter. It is desirable to accurately measure this force in order to obtain a quantitative understanding of a variety of head-to-disc interface phenomena such as friction, vibration and wear, for example, particularly in planar slider systems where the transducing head is somewhat exposed at the air-bearing surface. These measurements enable slider glidability, seek and take-off characteristics to be analyzed for potential improvements in the slider architecture. The debris generation and wear characteristics of the head-to-disc interface could also be measured through mapping of the contact force measurements. The uniformity of the surface of the disc media could be tested and certified by analyzing these measurements. Other applications utilizing quantitative measurements of the contact force between the slider and disc media perpendicular to the disc surface will be apparent to one skilled in the art.
- the slider incorporating the contact force sensor In order for the contact force measurements to be useful, the slider incorporating the contact force sensor must exhibit the same aerodynamic behavior as an actual slider for carrying a transducing head. Therefore, the contact force sensor must be implemented within the physical dimensions of an actual slider.
- the fabrication of the contact force sensor should not affect the fabrication process used in forming the air-bearing surface (ABS) of the slider.
- the resulting slider containing the contact force sensor must be attachable to a suspension in the same manner as a head-carrying slider, and the wire leads of the force-sensing slider should be located in a manner similar to the head-carrying slider.
- the present invention is a disc drive test slider apparatus for measuring contact force perpendicular to a surface of a rotating disc media.
- a slider body is positioned proximate the surface of the rotating disc.
- An air-bearing surface of the slider body is substantially parallel to the nominal surface of the disc and is separated from the surface of the disc by a glide height.
- the slider body includes a cavity having a side wall substantially normal to the surface of the disc and a wall substantially parallel to the surface of the disc.
- a beam flexure is attached to the side wall of the cavity.
- a plate is attached to the beam flexure in the cavity, and the beam flexure has a spring resiliency to permit movement of the plate in the cavity substantially normal to the surface of the disc.
- a contact rod is attached to the plate, and extends through the cavity and a via in the slider body.
- the contact rod has a distal tip projecting from the air-bearing surface.
- a force applied to the contact rod perpendicular to the surface of the rotating disc media causes displacement of the plate normal to the surface of the disc.
- metal films are formed on the plate and on the wall of the cavity substantially parallel to the surface of the disc.
- the metal films confront one another, and a change in capacitance between the metal films due to changes in a gap distance between the metal films caused by displacement of the plate normal to the surface of the disc is determined.
- Another aspect of the present invention is a process of forming a disc drive test slider for measuring contact force perpendicular to a surface of a rotating disc media.
- a slider body is provided, and a cavity is formed in the slider body through the air-bearing surface between the leading edge surface and the trailing edge surface of the slider body.
- the cavity has a first wall substantially parallel to the air-bearing surface and a second wall substantially normal to the air-bearing surface.
- a first metal film is deposited on the first wall of the cavity.
- a sacrificial layer is formed over the first metal film.
- a second metal film is deposited on the first sacrificial layer.
- a first slider body material layer is deposited over the first sacrificial layer and the second metal film to fill the cavity, with the first slider body material layer projecting beyond the level of the air-bearing surface.
- the first slider body material layer is etched to form a beam flexure attached to the second wall of the cavity, a plate attached to the beam flexure, and a contact rod projecting from the plate beyond the level of the air-bearing surface.
- a second sacrificial layer is deposited on the beam flexure, plate and first sacrificial layer.
- a second slider body material layer is deposited on the second sacrificial layer to the level of the air-bearing surface, leaving a gap around the contact rod.
- the features of the air bearing surface of the slider body are defined.
- the first and second sacrificial layers are then removed, so that the plate is movable normal to the air-bearing surface in response to a force applied to the contact rod normal to the air-bearing surface of the slider body
- a further aspect of the invention is a method of measuring contact force between a disc drive test slider and a rotating disc media.
- a mechanical assembly is provided in the slider that is displaceable in response to the contact force, the assembly providing a mechanical force to oppose the contact force.
- the mechanical force increases with displacement of the assembly.
- the disc drive test slider is operated so that contact force is applied to the mechanical assembly, and the displacement of the mechanical assembly is measured.
- FIG. 1 is a perspective view of a disc drive slider showing the rear of the slider as it flies over a rotating disc.
- FIG. 2 is a diagrammatic section view of a disc drive slider including contact force measuring apparatus according to a first embodiment of the present invention, taken at plane 2 — 2 in FIG. 1 .
- FIG. 3 is a diagrammatic section view of the disc drive slider including contact force measuring apparatus, taken along line 3 — 3 in FIG. 2 .
- FIG. 4 is a diagrammatic section view as in FIG. 2 of a disc drive slider containing contact force measuring apparatus according to a second embodiment of the present invention.
- FIG. 5 is a diagrammatic section view of the disc drive slider including contact force measuring apparatus taken along line 5 — 5 in FIG. 4 .
- FIGS. 6A-6H are section diagrams illustrating the fabrication process steps involved in forming a disc drive slider having contact force measuring apparatus.
- FIG. 1 is a perspective view of head gimbal assembly (HGA) 10 including disc drive slider 12 showing trailing edge surface 19 of slider 12 as slider 12 is positioned above disc 20 , which is a magnetic storage medium.
- Slider 12 includes rails 14 on air-bearing surface (ABS) 16 , top surface 18 and trailing edge surface 19 .
- Slider 12 is supported by a head gimbal assembly suspension (not shown).
- Air-bearing surface 16 is aerodynamically designed to include rails 14 so that windage encountered due to rotation of disc 20 causes slider 12 to “fly” a small distance (the glide height) above the surface of disc 20 .
- a transducing head (not shown) is carried by slider 12 at trailing edge surface 19 , usually on a rail 14 , for reading data from disc 20 and writing data to disc 20 .
- FIG. 2 is a diagrammatic section view taken at plane 2 — 2 in FIG. 1
- FIG. 3 is a diagrammatic section view taken along line 3 — 3 in FIG. 2, showing disc drive slider 12 including contact force measuring apparatus according to a first embodiment of the present invention.
- Cavity 30 is formed in slider 12 at the trailing edge surface 19 between top surface 18 and ABS 16 .
- Preferably, cavity 30 is centrally located between rails 14 and between surface 31 of the pressure cavity between the rails and top surface 18 .
- a plate 36 is attached to a side wall of cavity 34 by beam flexure 34 , which enables plate 36 to move with respect to the top and bottom walls of cavity 30 via bending of beam flexure 34 .
- plate 36 is attached via beam flexure 34 to the leading side wall of cavity 30 , but in other embodiments it may be attached to one of the other side walls of the cavity.
- Metal film 32 a is deposited on the top wall of cavity 30 and metal film 32 b is deposited on plate 36 to confront metal film 32 a .
- Vertical displacement of plate 36 normal to the surface of disc 20 therefore changes the distance between metal films 32 a and 32 b .
- Contact rod 38 is attached to the underside of plate 36 , and extends in sliding engagement through via 39 in slider 12 to distal tip 40 beyond ABS 16 .
- Lead wires 42 and 44 electrically connect metal films 32 a and 32 b , respectively, to bond pads 41 and 43 on trailing edge surface 19 of slider 12 , which are in turn connected to analyzing/driving circuitry 46 in a manner known in the art.
- the senor is designed so that the electrical force of attraction between metal films 32 a and 32 b is negligible in comparison to the contact force acting on contact rod 38 and the resistance force provided by beam flexure 34 .
- the sum of the forces acting on plate 36 is zero, so that plate 36 stops moving toward the top wall of cavity 30 —it is this position that is of interest to determine the magnitude of the contact force applied to contact rod 38 .
- metal films 32 a and 32 b and the gap distance between metal films 32 a and 32 b are limited by the thickness and dimensions of slider 12 and cavity 30 .
- metal films 32 a and 32 b are each 0.5 mm ⁇ 0.5 mm, and the at-rest gap distance between metal films 32 a and 32 b is 1.0 ⁇ m.
- a sensing current of about 0.2 mA is obtained for a displacement of 0.1 ⁇ m, which is a sufficiently large current to be measured and analyzed using routine electronic analyzing circuitry 46 , as is known in the art. From the sensing current measurement, the displacement of plate 36 and therefore the forces acting to cause the displacement of plate 36 may be readily determined.
- FIG. 4 is a diagrammatic section view as in FIG. 2, and FIG. 5 is a diagrammatic section view taken alone line 5 — 5 in FIG. 4, showing disc drive slider 12 including contact force measuring apparatus according to a second embodiment of the present invention.
- Cavity 30 is formed in slider 12 in the same manner described above with respect to FIGS. 2 and 3.
- Plate 36 is attached to the sides of cavity 34 at its center by beam flexures 34 , enabling the ends of plate 36 to move with respect to the top and bottom walls of cavity 30 via bending of beam flexures 34 .
- Metal films 32 a and 32 b are deposited opposite one another on the top wall of cavity 30 and on the top surface of plate 36 , respectively, at a first end of plate 36 .
- Metal films 32 c and 32 d are deposited opposite one another on the bottom of plate 36 and on the bottom wall of cavity 30 , respectively, at a second end of plate 36 .
- Vertical displacement of plate 36 at the first end and opposite vertical displacement of plate 36 at the second end therefore changes the distance between metal films 32 a and 32 b and between metal films 32 c and 32 d .
- Contact rod 38 is attached to the underside of plate 36 at the first end of plate 36 , and extends in sliding engagement through via 39 in slider 12 to distal tip 40 beyond ABS 16 .
- Lead wires 42 , 44 , 48 and 49 electrically connect metal films 32 a , 32 b , 32 c and 32 d , respectively, to bond pads 41 , 43 , 45 and 47 on trailing edge surface 19 of slider 12, which are in turn connected to analyzing/driving circuitry 46 in a manner known in the art.
- FIGS. 4 and 5 The operation of the plate capacitors shown in FIGS. 4 and 5 is similar to the operation described above with respect to FIGS. 2 and 3, in that the capacitance between metal films 32 a and 32 b is related to the displacement of the end of plate 36 .
- the dual film-pair arrangement presents some additional configuration options.
- beam flexure 34 is extremely flexible, so that the force associated with the spring's resistance to vertical rotation is negligible.
- beam flexure 34 acts only as a pivot at the center of plate 36 .
- Both metal film 32 c and metal film 32 d are connected to battery terminals having the same polarity, so that equal charge of the same polarity (and relatively large magnitude) is present on each metal film and the resulting electrical repulsion force between metal films 32 c and 32 d therefore provides the proper amount of resistance to rotational movement of plate 36 around the pivot for the desired range of forces applied to contact rod 38 to be measured.
- beam flexure 34 is relatively stiff, providing significant resistance to rotational movement of plate 36 , and the same voltages are applied across metal films 32 a and 32 b and metal films 32 c and 32 d .
- the electromechanical force resisting rotational movement of plate 36 combines with the resistance provided by beam flexure 34 to yield the proper amount of total resistance, and the change in capacitance between metal films 32 a and 32 b is the same as the change in capacitance between metal films 32 c and 32 d , effectively doubling the magnitude of the signal.
- this arrangement of the sensor is designed so that the electrical force of attraction between metal films 32 a and 32 b and between metal films 32 c and 32 d is negligible in comparison to the contact force acting on contact rod 38 and the resistance force provided by beam flexures 34 .
- a sense current signal is again obtained by analyzing circuitry 46 which can be readily translated into a contact force measurement. Either of the embodiments shown in FIGS. 2 and 3 or in FIGS. 4 and 5 are acceptable for determining the contact force acting on slider 12 .
- the first is the force of gravity, pulling the end of plate 36 down.
- the second is the electrical force between metal films 32 a and 32 b (and between metal films 32 c and 32 d where they are arranged as a second capacitive sensor), attracting one another due to the opposite charges on the films and pulling that end of plate 36 up.
- the third is the balancing force.
- the balancing force is provided in the embodiment shown in FIGS. 2 and 3 and in the second arrangement of the embodiment shown in FIGS. 4 and 5 by the stiffness of beam flexure 34 . In the first arrangement of the embodiment shown in FIGS.
- the balancing force is provided by the electrical force of repulsion between metal films 32 c and 32 d .
- the sum of the forces acting on plate 36 is zero, so that the end of plate 36 is suspended in a fixed position.
- the first is gravity
- the second is the electrical force
- the third is the balancing force, as described above.
- the fourth is the contact force acting on contact rod 38 to move plate 36 upward.
- the force of gravity is the same in the maximum displacement condition as the at-rest position.
- the increased balancing force resisting movement of the end of plate 36 in the upward direction is provided due to the spring resiliency of beam flexure 34 .
- the force provided by beam flexure 34 resisting further bending increases.
- this force offsets the electrical attraction force and the contact force, so that upward movement of the end of plate 36 ceases.
- This force is known because the spring constant of beam flexure 34 and the displacement of the end of plate 36 are known, and the magnitude of the contact force can therefore be quantified based on the distance of displacement between metal films 32 a and 32 b.
- the increased balancing force resisting movement of the end of plate 36 in the upward direction is provided due to the decrease in distance between metal films 32 c and 32 d , since the repulsion force between the films is given by the force equation above (with force being inversely proportional to the square of the gap distance).
- This balancing force is known because the distance between metal films 32 c and 32 d is known from the sense current/capacitance/displacement relationship associated with metal films 32 a and 32 b , the distance between metal films 32 c and 32 d being equal to the distance between metal films 32 a and 32 b .
- the magnitude of the contact force can therefore be quantified based on the distance of displacement between metal films 32 a and 32 b.
- FIGS. 6A-6H are section diagrams illustrating fabrication process steps involved in forming disc drive slider 12 having contact force measuring apparatus according to the present invention.
- the process steps shown in FIGS. 6A-6H illustrate formation of the contact force measuring apparatus shown in FIGS. 2 and 3; similar process steps would be performed to form the contact force measuring apparatus shown in FIGS. 4 and 5.
- two etching steps are performed to create a cavity 50 in slider 12 through air-bearing surface 16 , with a stepped shape at the bottom of cavity 50 .
- Cavity 50 is preferably 1 mm ⁇ 1 mm in area, with a depth of 10 ⁇ m.
- Sacrificial material 52 is preferably about 2 mm thick and is preferably composed of a material that may be easily deposited and later removed without affecting neighboring metal and polysilicon components. Such a material choice is within the ability of one skilled in the art; silicon dioxide or an organic material such as photoresist may be used in an exemplary embodiment.
- top metal film 32 b is etched into the desired electrode shape, and polysilicon slider body material 54 is deposited over sacrificial material 52 and metal film 32 b to fill the cavity in slider 12 .
- the polysilicon slider body material is etched to form contact rod 38 , plate 36 and beam flexure 34 , as shown in FIG. 6 D.
- This etch defines the thickness of plate 36 , which is preferably about 5 ⁇ m, and of beam flexure 34 , which is chosen to yield the desired effective spring constant.
- plate 36 is attached to all four walls of the cavity in slider 12 .
- another etch is performed to define the shape of plate 36 and of beam flexure 34 . This etch detaches plate 36 from three walls of the cavity and shapes beam flexure 34 , yielding the configuration shown in FIG. 3 .
- Plate 36 is preferably about 30 ⁇ m long and 100 ⁇ m wide.
- sacrificial material 56 is deposited over beam flexure 34 , plate 36 and sacrificial material 52 .
- Sacrificial material 56 is preferably about 2 mm thick, and is preferably composed of the same material as sacrificial material 52 .
- a top layer of polysilicon slider body material 58 is deposited on sacrificial material 56 up to air-bearing surface 16 of slider 12 , leaving a small gap around contact rod 38 .
- the top polysilicon slider material layer 58 is planarized along with the rest of air-bearing surface 16 of slider 12 using a chemical mechanical polishing process.
- Ion milling is then performed to define the features of air-bearing surface 16 , as is known in the art.
- sacrificial materials 56 and 52 are removed, leaving plate 36 free to move vertically, suspended by beam flexure 34 , in response to contact force applied to contact rod 38 .
- the present invention therefore provides a contact force measuring sensor for use with a standard slider, by forming a cavity in the slider and implementing the sensor in the cavity.
- the contact force measuring sensor responds directly to the vertical component of the forces acting on the slider, so that minimal signal interpretation is required to obtain a contact force measurement at the head-to-disc interface perpendicular to the surface of a disc media.
- the slider body and shaped features of the present invention have been described as fabricated from polysilicon, for ease of processing; it will be understood by one skilled in the art that the apparatus described above may be formed of regular read/write slider material such as titanium aluminum carbide if the capability to process the features described above in such a material is available.
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- Supporting Of Heads In Record-Carrier Devices (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
Description
Claims (18)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US09/072,815 US6269687B1 (en) | 1997-09-22 | 1998-05-05 | Force sensing slider |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US5944297P | 1997-09-22 | 1997-09-22 | |
US09/072,815 US6269687B1 (en) | 1997-09-22 | 1998-05-05 | Force sensing slider |
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US6269687B1 true US6269687B1 (en) | 2001-08-07 |
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US09/072,815 Expired - Fee Related US6269687B1 (en) | 1997-09-22 | 1998-05-05 | Force sensing slider |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030011915A1 (en) * | 2001-07-16 | 2003-01-16 | Riddering Jason W. | Slider fly control |
US20030173947A1 (en) * | 2002-03-13 | 2003-09-18 | Chung See Fook | Printed circuit board test fixture |
US20040051992A1 (en) * | 2002-09-13 | 2004-03-18 | Zine-Eddine Boutaghou | Disc drive slider with protruding electrostatic actuator electrode |
US20040089068A1 (en) * | 2001-12-04 | 2004-05-13 | Michael Munz | Device and method for measuring a force component or torque component |
US20040233568A1 (en) * | 2003-05-19 | 2004-11-25 | Seagate Technology Llc | Electrostatic actuator with multilayer electrode stack |
US6861854B1 (en) | 2001-10-23 | 2005-03-01 | Maxtor Corporation | Peizoelectric microactuator and sensor failure detection in disk drives |
US6967805B1 (en) | 2002-04-09 | 2005-11-22 | Seagate Technology Llc | In-situ monitoring of proximity and contact between a slider and a disc in a disc drive |
US7165462B2 (en) * | 2004-11-29 | 2007-01-23 | Hitachi Global Storage Technologies Netherlands B.V. | Individual slider testing |
CN110595337A (en) * | 2019-10-18 | 2019-12-20 | 杭州同正建设工程检测有限公司 | Wall roughness check out test set on a large scale |
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US6967805B1 (en) | 2002-04-09 | 2005-11-22 | Seagate Technology Llc | In-situ monitoring of proximity and contact between a slider and a disc in a disc drive |
US20040051992A1 (en) * | 2002-09-13 | 2004-03-18 | Zine-Eddine Boutaghou | Disc drive slider with protruding electrostatic actuator electrode |
US6888693B2 (en) | 2002-09-13 | 2005-05-03 | Seagate Technology Llc | Disc drive slider with protruding electrostatic actuator electrode |
US20040233568A1 (en) * | 2003-05-19 | 2004-11-25 | Seagate Technology Llc | Electrostatic actuator with multilayer electrode stack |
US6967806B2 (en) * | 2003-05-19 | 2005-11-22 | Seagate Technology Llc | Electrostatic actuator with multilayer electrode stack |
US7165462B2 (en) * | 2004-11-29 | 2007-01-23 | Hitachi Global Storage Technologies Netherlands B.V. | Individual slider testing |
CN110595337A (en) * | 2019-10-18 | 2019-12-20 | 杭州同正建设工程检测有限公司 | Wall roughness check out test set on a large scale |
CN110595337B (en) * | 2019-10-18 | 2021-09-10 | 杭州同正建设工程检测有限公司 | Wall roughness check out test set on a large scale |
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