US5917113A - Process for producing spherical metal particles - Google Patents

Process for producing spherical metal particles Download PDF

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US5917113A
US5917113A US08/680,644 US68064496A US5917113A US 5917113 A US5917113 A US 5917113A US 68064496 A US68064496 A US 68064496A US 5917113 A US5917113 A US 5917113A
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metal particles
chamber
composition
production process
refrigerant gas
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US08/680,644
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Gozo Suzuki
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Minerva Kiki Co Ltd
Mitsui Mining and Smelting Co Ltd
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Minerva Kiki Co Ltd
Mitsui Mining and Smelting Co Ltd
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Priority to JP5354705A priority Critical patent/JPH07179912A/en
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Priority to US08/680,644 priority patent/US5917113A/en
Assigned to MITSUI MINING & SMELTING CO., LTD., MINERVA KIKI CO., LTD. reassignment MITSUI MINING & SMELTING CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SUZUKI, GOZO
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/10Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying using centrifugal force
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/06Metallic powder characterised by the shape of the particles
    • B22F1/065Spherical particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/086Cooling after atomisation
    • B22F2009/0876Cooling after atomisation by gas
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy

Definitions

  • the present invention relates to a process for producing spherical metal particles and more specifically to an improved process for producing metal particles by spraying a molten metal within a chamber filled with a refrigerant gas using a centrifugal atomizer.
  • the inventor of this invention has conducted various studies and investigations and as a result, has found out that the foregoing phenomena that metal particles formed are adhered to one another to form massive particles and that the resulting particles are irregular in shape are closely related to not only the degree of solidification of the scattered metal particles observed when they arrive at the inner wall of the chamber, but also to the surface conditions of the particles observed at that time.
  • the scattered metal particles are covered with some hard films, the metal particles are not adhered to one another or do not undergo any agglomeration even when the scattered metal particles are solidified to such an extent that they are adhered to one another; and that, if the surface of the scattered metal particles are covered with films, these metal particles may be recovered from some deformation thereof caused by collision of the particles with the inner wall of the chamber or other metal particles already attached to the wall, even if the scattered metal particles are insufficiently solidified.
  • Such films on the scattered metal particles are formed through oxidation of the metal. For this reason, the foregoing phenomena such as mutual adhesion of these metal particles and/or agglomeration thereof can be eliminated by adding oxygen gas to the inert refrigerant gas used in the process for producing such metal particles in which a molten metal is sprayed within a chamber filled with such a refrigerant gas using a centrifugal atomizer, to thus form films on the surface of the scattered metal particles.
  • an object of the present invention is to provide a process for mass-producing fluent, spherical metal particles having a smooth surface in low cost, while using a small-sized chamber, by improving the surface conditions of scattered metal particles during processes for cooling and solidifying scattered droplets of a molten metal in the production of such metal particles by spraying such a molten metal in a chamber filled with a refrigerant gas through a centrifugal atomizer.
  • the present invention relates to a process for producing spherical metal particles which comprises the step of spraying a molten metal in a chamber filled with a refrigerant gas through a centrifugal atomizer, wherein the refrigerant gas is a composition comprising nitrogen and oxygen gases or nitrogen gas and air and the concentration of the oxygen ranges from 3 to 600 ppm on the basis of the weight of the composition.
  • the refrigerant gas is a composition comprising nitrogen and oxygen gases or nitrogen gas and air and the concentration of the oxygen ranges from 3 to 600 ppm on the basis of the weight of the composition.
  • FIG. 1 is a schematic diagram for illustrating the principal parts of an apparatus used in Example of the present invention.
  • Metals used for forming into spherical particles by the production process according to the present invention include any metals capable of easily forming an oxide thereof in the molten state, for instance, elemental metals such as aluminum, zinc, copper, tin, lead, zirconium, iron, magnesium, manganese; and alloys, intermetallic compounds and metal mixtures comprising these elemental metals.
  • the refrigerant gases usable in the production process of the present invention is a composition essentially consisting of nitrogen and oxygen and it should satisfy such an essential requirement that the concentration of the oxygen ranges from 3 to 600 ppm on the basis of the weight of the composition.
  • the use of the composition having such an oxygen concentration permits the production of fluent, spherical metal particles having a smooth surface using a small-sized chamber in low production cost and in high yield.
  • the oxygen concentration is less than the lower limit, i.e., 3 ppm, the oxide film is not sufficiently formed on the resulting metal particles and for this reason, if a small-sized chamber is used, scattered droplets of a molten metal which are still in an insufficiently cooled and solidified state collide against the inner wall of the chamber and/or collide with other metal particles already attached to the inner wall to thus undergo phenomena such as mutual adhesion and/or deformation and this results in the formation of metal particles non-uniform in shape.
  • the lower limit i.e. 3 ppm
  • the oxygen concentration of the refrigerant gas preferably ranges from 10 to 500 ppm and most preferably 20 to 300 ppm. In this respect, if the oxygen concentration ranges from 3 to 20 ppm, the resulting metal particles has a tendency of containing a small amount of elliptical metal particles, but the presence thereof does not interfere with the applicability of the metal particles.
  • the air is a composition comprising about 78% of nitrogen, about 1% of other inert gases and about 21% of oxygen. Therefore, if air is incorporated into nitrogen gas in such a manner that the resulting refrigerant gas composition comprises oxygen in an amount falling within the range defined above, the concentration of inert gases other than nitrogen is less than 1/20 time that of the oxygen and can be disregarded, even when air is substituted for pure oxygen gas.
  • the temperature in the chamber be maintained at a level of from about 25 to 30° C. by cooling the wall of the chamber with water and that the chamber be slightly pressurized, for instance, the pressure therein be maintained at about 1.1 atm.
  • the number of revolutions of a rotary disc of a centrifugal atomizer for spraying a molten metal may arbitrarily be determined depending on the viscosity of the molten metal to be formed into spherical particles and/or the desired particle size of the metal particles to be formed. For instance, the number of revolutions thereof may be set at a range of from 25,000 to 120,000 rpm. In this respect, the smaller the particle size of the metal particles to be formed, the higher the number of revolutions.
  • C represents a chamber provided with a water-cooling jacket J; a crucible P is positioned at the top of the chamber C; the chamber C accommodates a centrifugal atomizer A which comprises a rotary disc D and a motor M; a sensor S for analyzing the composition of a refrigerant gas is positioned within the chamber C; a receiver R for receiving particulate metal particles is arranged at a lower part of the chamber C; a nitrogen gas bomb B 1 and an oxygen gas or compressed air bomb B 2 are arranged outside the chamber C; electromagnetic valves V 1 and V 2 and flowmeters F 1 and F 2 are arranged between these bombs and the chamber C, respectively; and further an automatic control system K for controlling these electromagnetic valves V 1 and V 2 is positioned between the sensor S for
  • the surface of the scattered particles of a molten metal sprayed in a chamber through a centrifugal atomizer is oxidized with oxygen present in a refrigerant gas in a low concentration, is thus covered with an oxide film having an appropriate thickness and the metal particles are physically protected by the film, according to the production process of the present invention. Therefore, the metal particles are rarely adhered to one another. Moreover, the shapes of the metal particles are restored immediately after they undergo deformation due to collision between metal particles and/or collision thereof with the inner wall of the chamber and accordingly, the shapes of the metal particles seldom undergo any ultimate change in shape. For this reason, it is not necessary to completely solidify the scattering metal particles till they are attached to the wall of the chamber. This in turn leads to the elimination of the use of helium gas as an inert gas for accelerating cooling or extension of the flying time through the use of a large-sized chamber.
  • the production process of the present invention permits mass-production of fluent, spherical metal particles having a smooth surface, in low cost and excellent in dispersibility in a dispersing medium, which is required when the particles are used as a component for pastes or paints and varnishes, while using a small-sized chamber.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)

Abstract

A process for producing spherical metal particles comprises the step of spraying a molten metal in a chamber filled with a refrigerant gas through a centrifugal atomizer, wherein the refrigerant gas is a composition comprising nitrogen and oxygen gases or nitrogen gas and air and the concentration of the oxygen ranges from 3 to 600 ppm on the basis of the weight of the composition. The production process of the present invention permits mass-production of fluent, spherical metal particles having a smooth surface, in low cost and excellent in dispersibility in a dispersing medium, which is required when the particles are used as a component for pastes or paint and varnishes, while using a small-sized chamber.

Description

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a process for producing spherical metal particles and more specifically to an improved process for producing metal particles by spraying a molten metal within a chamber filled with a refrigerant gas using a centrifugal atomizer.
2. Description of the Prior Art
There have conventionally been well-known a process for producing metal particles which comprises the step of spraying a molten metal in a chamber filled with a refrigerant gas using a centrifugal atomizer to cool and solidify the scattered droplets and to thus form metal particles. In this production process, however, the scattered droplets formed by spraying a molten metal in a chamber filled with a refrigerant gas through a centrifugal atomizer should be cooled by the refrigerant gas atmosphere and should completely be solidified till the scattered droplets arrive at the inner wall of the chamber. If the scattered droplets collide with the inner wall of the chamber while they are still in an insufficiently solidified state, the resulting metal particles are adhered to one another and/or they undergo deformation and are correspondingly irregular in shape. For this reason, it has been difficult to obtain spherical metal particles having a uniform diameter. In order to eliminate the foregoing drawback, it is necessary to increase the flying time of the scattered droplets of a sprayed molten metal so that the scattered droplets are completely solidified and it is accordingly necessary to increase the scattering distance thereof. This correspondingly requires the use of an extremely large-sized chamber.
Incidentally, there has been disclosed, in Japanese Examined Patent Publication No. Sho 59-14084, a proposal capable of miniaturization of the chamber by controlling the time required till the scattered droplets of a molten metal are completely solidified through the use of a mixture which comprises at least two inert gases as the refrigerant gas to be used in the chamber. However, the control of the time required for the solidification to a preferred level according to the proposed process requires the use of a large quantity of helium gas which is excellent in heat transfer properties, but is very expensive. Therefore, such a proposed process is suitable for producing metal particles in a laboratory scale, i.e., in a small amount, but it is inevitable that the production of such metal particles in an industrial scale is quite unfavorable in the production cost.
SUMMARY OF THE INVENTION
The inventor of this invention has conducted various studies and investigations and as a result, has found out that the foregoing phenomena that metal particles formed are adhered to one another to form massive particles and that the resulting particles are irregular in shape are closely related to not only the degree of solidification of the scattered metal particles observed when they arrive at the inner wall of the chamber, but also to the surface conditions of the particles observed at that time. More specifically, it has been recognized that, if the scattered metal particles are covered with some hard films, the metal particles are not adhered to one another or do not undergo any agglomeration even when the scattered metal particles are solidified to such an extent that they are adhered to one another; and that, if the surface of the scattered metal particles are covered with films, these metal particles may be recovered from some deformation thereof caused by collision of the particles with the inner wall of the chamber or other metal particles already attached to the wall, even if the scattered metal particles are insufficiently solidified.
Such films on the scattered metal particles are formed through oxidation of the metal. For this reason, the foregoing phenomena such as mutual adhesion of these metal particles and/or agglomeration thereof can be eliminated by adding oxygen gas to the inert refrigerant gas used in the process for producing such metal particles in which a molten metal is sprayed within a chamber filled with such a refrigerant gas using a centrifugal atomizer, to thus form films on the surface of the scattered metal particles.
Accordingly, an object of the present invention is to provide a process for mass-producing fluent, spherical metal particles having a smooth surface in low cost, while using a small-sized chamber, by improving the surface conditions of scattered metal particles during processes for cooling and solidifying scattered droplets of a molten metal in the production of such metal particles by spraying such a molten metal in a chamber filled with a refrigerant gas through a centrifugal atomizer.
More specifically, the present invention relates to a process for producing spherical metal particles which comprises the step of spraying a molten metal in a chamber filled with a refrigerant gas through a centrifugal atomizer, wherein the refrigerant gas is a composition comprising nitrogen and oxygen gases or nitrogen gas and air and the concentration of the oxygen ranges from 3 to 600 ppm on the basis of the weight of the composition.
BRIEF DESCRIPTION OF THE DRAWING
FIG. 1 is a schematic diagram for illustrating the principal parts of an apparatus used in Example of the present invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
Metals used for forming into spherical particles by the production process according to the present invention include any metals capable of easily forming an oxide thereof in the molten state, for instance, elemental metals such as aluminum, zinc, copper, tin, lead, zirconium, iron, magnesium, manganese; and alloys, intermetallic compounds and metal mixtures comprising these elemental metals.
The refrigerant gases usable in the production process of the present invention is a composition essentially consisting of nitrogen and oxygen and it should satisfy such an essential requirement that the concentration of the oxygen ranges from 3 to 600 ppm on the basis of the weight of the composition. The use of the composition having such an oxygen concentration permits the production of fluent, spherical metal particles having a smooth surface using a small-sized chamber in low production cost and in high yield. If the oxygen concentration is less than the lower limit, i.e., 3 ppm, the oxide film is not sufficiently formed on the resulting metal particles and for this reason, if a small-sized chamber is used, scattered droplets of a molten metal which are still in an insufficiently cooled and solidified state collide against the inner wall of the chamber and/or collide with other metal particles already attached to the inner wall to thus undergo phenomena such as mutual adhesion and/or deformation and this results in the formation of metal particles non-uniform in shape. On the other hand, if the oxygen concentration exceeds the upper limit, i.e., 600 ppm, a large amount of coarse clast-like metal oxide is formed on the surface of the resulting metal particles and as a result, the applicability of the resulting metal particles is considerably limited or reduced. For instance, when using them as a granular solder, the oxide film is too thick and the compatibility thereof with fluxes is impaired, or when producing aluminum powder for synthetic resin paint and varnishes, the resulting metal particles are insufficiently dispersed in a liquid resin. The oxygen concentration of the refrigerant gas preferably ranges from 10 to 500 ppm and most preferably 20 to 300 ppm. In this respect, if the oxygen concentration ranges from 3 to 20 ppm, the resulting metal particles has a tendency of containing a small amount of elliptical metal particles, but the presence thereof does not interfere with the applicability of the metal particles.
It is not necessary to always use pure oxygen as an oxygen source for the refrigerant gas composition used in the production process of the present invention and air may be used as such an oxygen source. The air is a composition comprising about 78% of nitrogen, about 1% of other inert gases and about 21% of oxygen. Therefore, if air is incorporated into nitrogen gas in such a manner that the resulting refrigerant gas composition comprises oxygen in an amount falling within the range defined above, the concentration of inert gases other than nitrogen is less than 1/20 time that of the oxygen and can be disregarded, even when air is substituted for pure oxygen gas.
When practicing the production process according to the present invention, it is desirable that the temperature in the chamber be maintained at a level of from about 25 to 30° C. by cooling the wall of the chamber with water and that the chamber be slightly pressurized, for instance, the pressure therein be maintained at about 1.1 atm. Moreover, the number of revolutions of a rotary disc of a centrifugal atomizer for spraying a molten metal may arbitrarily be determined depending on the viscosity of the molten metal to be formed into spherical particles and/or the desired particle size of the metal particles to be formed. For instance, the number of revolutions thereof may be set at a range of from 25,000 to 120,000 rpm. In this respect, the smaller the particle size of the metal particles to be formed, the higher the number of revolutions.
EXAMPLE
There were produced Pb-Sn eutectic solder particles and aluminum powder for paints and varnishes under the conditions specified in the following Table 1, using the apparatus shown in FIG. 1 according to the production process of the present invention. In the apparatus shown in FIG. 1, C represents a chamber provided with a water-cooling jacket J; a crucible P is positioned at the top of the chamber C; the chamber C accommodates a centrifugal atomizer A which comprises a rotary disc D and a motor M; a sensor S for analyzing the composition of a refrigerant gas is positioned within the chamber C; a receiver R for receiving particulate metal particles is arranged at a lower part of the chamber C; a nitrogen gas bomb B1 and an oxygen gas or compressed air bomb B2 are arranged outside the chamber C; electromagnetic valves V1 and V2 and flowmeters F1 and F2 are arranged between these bombs and the chamber C, respectively; and further an automatic control system K for controlling these electromagnetic valves V1 and V2 is positioned between the sensor S for analyzing the composition of the refrigerant gas and the valves V1 and V2. In the apparatus shown in FIG. 1, the chamber has a diameter of 2000 mm and a height of 1400 mm.
These production experiments were each repeated three times and the experimental results, i.e., the average value of three experiments are summarized in Table 1.
              TABLE 1
______________________________________
Article Produced Eutectic   Aluminum for
(Particles)      Solder     Paint and Varnish
______________________________________
Temperature in Crucible
                 250° C.
                            750° C.
No. of Revolution of Disc
                 35,000 rpm 50,000 rpm
Principal Component of
                 N.sub.2    N.sub.2
Refrigerant Gas
Oxygen Concentration (*1)
                 50 ppm     20 ppm
Throughput per Hour
                 80 kg      60 kg
Particle size    45μ (*2)
                            38μ (*3)
Yield (*4)       80%        60%
______________________________________
 *1 The oxygen concentration is adjusted by automatically opening and
 closing the electromagnetic valves V.sub.1 and V.sub.2 by the action of
 the automatic control system K provided with an oxygen
 concentrationindicator which is connected to the sensor S.
 *2 Particles which can pass through a sieve of 325 mesh and have a
 spherical shape.
 *3 Particles which can pass through a sieve of 400 mesh and have a
 spherical shape.
 *4 The residue is again molten in the crucible P and reused.
As has been clear from the foregoing description, the surface of the scattered particles of a molten metal sprayed in a chamber through a centrifugal atomizer is oxidized with oxygen present in a refrigerant gas in a low concentration, is thus covered with an oxide film having an appropriate thickness and the metal particles are physically protected by the film, according to the production process of the present invention. Therefore, the metal particles are rarely adhered to one another. Moreover, the shapes of the metal particles are restored immediately after they undergo deformation due to collision between metal particles and/or collision thereof with the inner wall of the chamber and accordingly, the shapes of the metal particles seldom undergo any ultimate change in shape. For this reason, it is not necessary to completely solidify the scattering metal particles till they are attached to the wall of the chamber. This in turn leads to the elimination of the use of helium gas as an inert gas for accelerating cooling or extension of the flying time through the use of a large-sized chamber.
As has been discussed above in detail, the production process of the present invention permits mass-production of fluent, spherical metal particles having a smooth surface, in low cost and excellent in dispersibility in a dispersing medium, which is required when the particles are used as a component for pastes or paints and varnishes, while using a small-sized chamber.

Claims (10)

I claim:
1. A process for producing spherical metal particles which comprises the step of spraying a molten metal in a chamber filled with a refrigerant gas through a centrifugal atomizer, wherein the refrigerant gas is a composition consisting essentially of nitrogen and oxygen gases and the concentration of the oxygen ranges from 10 to 500 ppm on the basis of the weight of the composition.
2. The production process of claim 1 wherein the composition used has an oxygen concentration ranging from 20 to 300 ppm on the basis of the weight of the composition.
3. A process for producing spherical metal particles which comprises the step of spraying a molten metal in a chamber filled with a refrigerant gas through a centrifugal atomizer, wherein the refrigerant gas is a composition consisting essentially of nitrogen gas and air and the concentration of the oxygen ranges from 10 to 500 ppm on the basis of the weight of the composition.
4. The production process of claim 3 wherein the composition used has an oxygen concentration ranging from 20 to 300 ppm on the basis of the weight of the composition.
5. The production process of claim 1, further comprising maintaining the temperature in the chamber to a level ranging from about 25° to 30° C.
6. The production process of claim 1, further comprising maintaining the pressure in the chamber to about 1.1 atmospheres.
7. The production process of claim 1, wherein the centrifugal atomizer comprises a rotary disc which is operated at a range of 25,000 to 120,000 rpm.
8. The production process of claim 3 further comprising maintaining the temperature in the chamber to a level ranging from about 25° to 30° C.
9. The production process of claim 3, further comprising maintaining the pressure in the chamber to about 1.1 atmospheres.
10. The production process of claim 3, wherein the centrifugal atomizer comprises a rotary disc which is operated at a range of 25,000 to 120,000 rpm.
US08/680,644 1993-12-22 1996-07-17 Process for producing spherical metal particles Expired - Lifetime US5917113A (en)

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JP5354705A JPH07179912A (en) 1993-12-22 1993-12-22 Production of globular metallic grain
US08/680,644 US5917113A (en) 1993-12-22 1996-07-17 Process for producing spherical metal particles

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JP5354705A JPH07179912A (en) 1993-12-22 1993-12-22 Production of globular metallic grain
US08/680,644 US5917113A (en) 1993-12-22 1996-07-17 Process for producing spherical metal particles

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WO2001068297A2 (en) * 2000-03-13 2001-09-20 Sanei Kasei Co., Limited Metal powder with nano-composite structure and its production method using centrifugal force
US7374840B1 (en) * 1999-02-09 2008-05-20 Umicore Centrifugally atomized zinc alloy powder for alkaline batteries
CN101362206B (en) * 2008-10-09 2011-03-23 陈新国 Preparation method of continuous high quality soldering powder
CN102689015A (en) * 2012-06-21 2012-09-26 北京有色金属研究总院 Metal powder preparation device and method therefor
RU2489229C1 (en) * 2012-07-04 2013-08-10 Открытое акционерное общество "Всероссийский институт легких сплавов" (ОАО "ВИЛС") Pelletising magnesium or magnesium alloys
CN104325147A (en) * 2014-11-25 2015-02-04 北京康普锡威科技有限公司 In-situ passivation method for preparing spherical brazing powder through atomization
RU2612869C1 (en) * 2015-09-24 2017-03-13 Андрей Борисович Бондарев Method of obtaining magnesium alloy granules
US10661346B2 (en) 2016-08-24 2020-05-26 5N Plus Inc. Low melting point metal or alloy powders atomization manufacturing processes
US11084095B2 (en) 2018-02-15 2021-08-10 5N Plus Inc. High melting point metal or alloy powders atomization manufacturing processes
US11318534B2 (en) 2018-10-26 2022-05-03 Panasonic Intellectual Property Management Co., Ltd. Metal microparticle production method and metal microparticle production device

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JP5590501B2 (en) * 2009-06-30 2014-09-17 日立金属株式会社 Method for producing metal microspheres
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