US5656219A - Process for producing densely sintered silicon nitride components - Google Patents
Process for producing densely sintered silicon nitride components Download PDFInfo
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- US5656219A US5656219A US08/531,699 US53169995A US5656219A US 5656219 A US5656219 A US 5656219A US 53169995 A US53169995 A US 53169995A US 5656219 A US5656219 A US 5656219A
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- 238000000034 method Methods 0.000 title claims abstract description 33
- 230000008569 process Effects 0.000 title claims abstract description 29
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 8
- 229910052581 Si3N4 Inorganic materials 0.000 title description 5
- 238000005245 sintering Methods 0.000 claims abstract description 26
- 239000000843 powder Substances 0.000 claims abstract description 21
- 238000007493 shaping process Methods 0.000 claims abstract description 13
- 239000000203 mixture Substances 0.000 claims abstract description 12
- 239000000919 ceramic Substances 0.000 claims abstract description 9
- 239000007789 gas Substances 0.000 claims abstract description 6
- 239000012299 nitrogen atmosphere Substances 0.000 claims abstract description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 claims abstract description 3
- 239000000654 additive Substances 0.000 claims description 14
- 229910007277 Si3 N4 Inorganic materials 0.000 claims description 13
- 239000002245 particle Substances 0.000 claims description 11
- 239000002270 dispersing agent Substances 0.000 claims description 7
- 229920000642 polymer Polymers 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims description 7
- 239000002202 Polyethylene glycol Substances 0.000 claims description 5
- 239000006185 dispersion Substances 0.000 claims description 5
- 229920000765 poly(2-oxazolines) Polymers 0.000 claims description 5
- 229920001223 polyethylene glycol Polymers 0.000 claims description 5
- 229910018404 Al2 O3 Inorganic materials 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 150000001735 carboxylic acids Chemical class 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 239000007900 aqueous suspension Substances 0.000 claims description 3
- 238000005266 casting Methods 0.000 claims description 3
- 235000014113 dietary fatty acids Nutrition 0.000 claims description 3
- 150000002148 esters Chemical class 0.000 claims description 3
- 239000000194 fatty acid Substances 0.000 claims description 3
- 229930195729 fatty acid Natural products 0.000 claims description 3
- 150000004665 fatty acids Chemical class 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000000462 isostatic pressing Methods 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 3
- 229920000728 polyester Polymers 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 238000007569 slipcasting Methods 0.000 claims description 3
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 229920001577 copolymer Polymers 0.000 claims description 2
- 238000001746 injection moulding Methods 0.000 claims description 2
- 150000003839 salts Chemical class 0.000 claims description 2
- 238000005056 compaction Methods 0.000 claims 1
- 238000011085 pressure filtration Methods 0.000 claims 1
- 238000003801 milling Methods 0.000 description 11
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000008187 granular material Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 7
- 230000007847 structural defect Effects 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 239000001993 wax Substances 0.000 description 5
- 238000007792 addition Methods 0.000 description 4
- 238000000280 densification Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 229910003480 inorganic solid Inorganic materials 0.000 description 3
- 239000004014 plasticizer Substances 0.000 description 3
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229930040373 Paraformaldehyde Natural products 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 235000021355 Stearic acid Nutrition 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 238000005469 granulation Methods 0.000 description 2
- 230000003179 granulation Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000002356 laser light scattering Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 235000021313 oleic acid Nutrition 0.000 description 2
- 239000011505 plaster Substances 0.000 description 2
- -1 polyoxymethylene Polymers 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000001694 spray drying Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 1
- 239000005642 Oleic acid Substances 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 229920000615 alginic acid Polymers 0.000 description 1
- 235000010443 alginic acid Nutrition 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000005189 flocculation Methods 0.000 description 1
- 230000016615 flocculation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 150000004676 glycans Chemical class 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004413 injection moulding compound Substances 0.000 description 1
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
- 150000002889 oleic acids Chemical class 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 239000006259 organic additive Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 125000005498 phthalate group Chemical class 0.000 description 1
- 229920001282 polysaccharide Polymers 0.000 description 1
- 239000005017 polysaccharide Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 230000003335 steric effect Effects 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- PHYFQTYBJUILEZ-IUPFWZBJSA-N triolein Chemical compound CCCCCCCC\C=C/CCCCCCCC(=O)OCC(OC(=O)CCCCCCC\C=C/CCCCCCCC)COC(=O)CCCCCCC\C=C/CCCCCCCC PHYFQTYBJUILEZ-IUPFWZBJSA-N 0.000 description 1
- 150000003673 urethanes Chemical class 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- XOOUIPVCVHRTMJ-UHFFFAOYSA-L zinc stearate Chemical class [Zn+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O XOOUIPVCVHRTMJ-UHFFFAOYSA-L 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
- C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
Definitions
- the present invention relates to a process for producing a homogeneous and finely crystalline silicon nitride ceramic, in which ceramic powder is milled, mixed with shaping aids, the mixture is shaped into parts and the shaped parts are subsequently sintered in a nitrogen atmosphere.
- the invention also relates to shaped parts produced according to the process.
- DE-A-42 34 794 discloses that, for the production of silicon nitride components which, because of their high strength, are able to resist very special mechanical stresses, many different process parameters have to be optimally matched to one another. In particular, during the sintering step, the temperature and nitrogen pressure settings have to be set as a function of the slowly increasing density of the shaped part.
- EP-A-079 678 describes a process for sintering silicon nitride ceramic with sintering additives in the form of oxides of the elements Mg, Al, Y, Ce or Be and/or nitrides or carbides of elements of the groups IVa, Va and VIa of the Periodic Table of the Elements.
- the sintering process described is distinguished by a continuous temperature increase and three pressure stages. However, since a combined holding time for pressure and temperature is not provided in the context of these directions, the components produced in accordance therewith achieve only a moderate level of strength.
- the object is achieved by a process of the type mentioned in the introduction, the defining features of which are that sintering is carried out in a multistage process at temperatures in the range from 1700° to 1900° C. in a nitrogen atmosphere using gas pressures in the range from 0.2 to 50 MPa, where in a first temperature stage a temperature from 0.9 to 0.96 ⁇ T max , preferably 0.945 ⁇ T max , is maintained over a time period from 10 to 50 minutes, preferably from 12 to 25 minutes, at an N 2 pressure from 0.2 to 1.2 MPa, preferably from 0.3 to 0.6 MPa, and where in a second temperature stage a temperature from 0.97 to 0.985 ⁇ T max , preferably of 0,975 ⁇ T max , is maintained over a time period from 20 to 80 minutes, preferably from 30 to 50 minutes, at an N 2 pressure from 3 to 6 MPa, preferably from 4 to 5 MPa, and that subsequently the temperature is increased to T max and the pressure is increased to from 7 to 50 MPa, preferably to from 7 to
- the pressure holding time in the final stage is from 30 to 100 minutes, preferably from 60 to 90 minutes.
- the heating rates lie in the range from 5 to 35 K/min and the pressure is increased at a rate from 0.25 to 1.2 MPa/min, preferably from 0.5 to 1.1 MPa/min.
- the heating to temperatures in the range from 800° to 1200° C. is carried out in vacuo and then up to the first temperature stage under an N 2 pressure from 0.3 to 0.6 MPa.
- a multistage sintering cycle with different N 2 pressures is also described in the above-cited patent document DE-A-42 34 794.
- the level of the maximum gas pressure is set as a function of the densification achieved in the shaped body, derived from the shrinkage profile of the dilatometer curves, in such a way that the gas pressure is from 0.1 to 0.3 ⁇ P max on reaching 85% of the theoretical density and from 0.2 to 0.4 ⁇ P max on reaching 93% of the theoretical density, P max lying in the range from 5 to 10 MPa.
- the pressure is only in the range from 0.03 to 0.086 ⁇ P max when the density reached is 90% . Accordingly, a densification of 85% is, according to the invention, reached below 0.1 ⁇ P max . According to the present invention, a densification of 93% of the theoretical density is present after setting the second temperature stage and increasing the pressure to from 0.42 to 0.86 P max .
- the parameters temperature, nitrogen pressure and time are, according to the invention, preferably are coordinated in such a way that high-density homogeneous and finely crystalline Si 3 N 4 shaped parts can be produced at residence times above 1700° C. in the range from 75 to 135 minutes.
- nitrogen atmosphere is pure nitrogen or an atmosphere which consists essentially of nitrogen and which can contain nonoxidizing gases such as noble gases or hydrogen as further components.
- the prescribed pressures are in each case total pressure and not partial pressure.
- Si 3 N 4 starting powder having high purity and good sinteractivity with sintering additives in the form of Al 2 O 3 and at least one further oxide of group IVb of the Periodic Table also being added.
- the mixture is dispersed, mixed and milled or deagglomerated in aqueous suspension.
- predispersion is carried out with intensive stirring and the mixing-milling procedure is carried out in mills, to make possible the elimination of agglomerates ⁇ 2 ⁇ m and to achieve homogeneous mixing of the individual components.
- the gentle milling procedure ensures that the oxygen absorption during processing in the aqueous medium remains less than 0.75%, preferably ⁇ 0.5%.
- the proportion of particles ⁇ 1 ⁇ m in the milled product is ⁇ 8%, preferably ⁇ 3%, with the particle size being advantageously measured by means of laser light scattering.
- the combination of electrostatic and mechanical deagglomeration mechanisms makes it possible to achieve a more homogeneous distribution of the sintering additives in the aqueous suspension and subsequently in the shaped and sintered parts.
- the dispersants used can be, for example, a polymer of ⁇ , ⁇ -ethylenically unsaturated carboxylic acids, preferably salts thereof, or can be water-soluble copolymers with esters of the ethyl ethylenically unsaturated carboxylic acids.
- the shaping method to be used is dry pressing, first a free-flowing and readily pressable granular material is produced by spray-drying or fluidized-bed granulation.
- the selection of the organic shaping acids required, namely binders, plasticizers and lubricants, is of particular importance in respect of the maximum achievable strength values in the fully sintered shaped parts.
- the shaping aids should, to avoid flocculation and reagglomeration processes, be compatible with the dispersants used and augment their action with regard to the deagglomeration of the inorganic solid particle with an additional electrostatic and/or steric effect.
- the suspensions should be processed into free-flowing, readily pressable and very soft granulated materials, using suitable drying conditions. The formation of hard agglomerates which lead to defects, including, inter alia, ring or crescent pores, or to areas having different degrees of densification in the final sintered body must be absolutely avoided.
- organic polymers containing as binders for example, polyvinyl alcohols, polyoxazolines, cellulose derivatives, alginates, polysaccharides or monocarboxylic esters, in combination with plasticizers, for example glycerol or polyethylene glycol, and/or lubricants such as olein, oleic acid, stearic acid, stearates, waxes or wax dispersions, and also with drying and granulation conditions matched to each case.
- plasticizers for example glycerol or polyethylene glycol
- lubricants such as olein, oleic acid, stearic acid, stearates, waxes or wax dispersions
- the production of these shaped parts can be carried out not only by axial pressing but also, particularly for rotationally symmetrical parts having large length-to-thickness ratios, by isostatic pressing in such a way that the number and size of structural defects which limit the strength are minimized or the defects are completely eliminated.
- EP-A-388 214 describes the use of polyoxazolines as binders for inorganic solids dispersed in organic solvents with the aim of producing shaped bodies having high green density and strength, whereas the present invention relates to systems in aqueous dispersions. Also surprising is the advantageous use of the polyoxazolines in combination with polyester urethanes and/or fatty acid/ polyethylene glycol dispersions and also their effect on the mechanical strength of sintered shaped bodies by avoidance of structural defects.
- the slip prepared according to the invention can, by setting the solids content to from 40 to 60% by volume and adding of polymer in the form of, for example, waxes or cellulose derivatives, be cast and dewatered directly in plaster molds or, by means of pressure casting, in synthetic molds.
- polymer in the form of, for example, waxes or cellulose derivatives
- the prepared and dried material is intensively mixed with polymer additives or their combination with waxes, paraffins, phthalates, stearic and/or oleic acids, polyoxymethylene and the like in compounders or extruders and subsequently shaped using injection pressures in the range from 5 to 2000 bar.
- these additives are burnt out prior to sintering using cycle times of different lengths in an oxidizing or inert atmosphere at a maximum temperature of 1000° C., preferably of 500° C., with or without the use of loose powders such as aluminum oxide as bedding material to shorten the cycle times.
- the proportion by volume of Si 3 N 4 shaped bodies to be sintered, based on the total volume of the crucible containing the product to be sintered, should be as high as possible.
- the crucible material used can be boron nitride, graphite coated with boron nitride, or silicon nitride.
- the shaped bodies can also be bedded into a loose powder of Si 3 N 4 with particle sizes from 0.3 to 5 mm which preferably contains more than 20% of the sintering additives present in the shaped part.
- the firing aids used can also be Si 3 N 4 parts which have already been suitably shaped and sintered, with or without sintering additives, in the case of cylindrical shaped parts, particularly also in the form of sleeves.
- the shaped parts produced according to the process of the invention preferably possess a very fine-grained micro-structure which has an average grain width ⁇ 0.6 ⁇ m, preferably ⁇ 0.3 ⁇ m, and the number of grains per unit area is ⁇ 0.95 ⁇ 10 6 , preferably ⁇ 4 ⁇ 10 6 , grains/mm 2 .
- average aspect ratios of more than 8 are advantageous for high strengths, it was found according to the invention that average aspect ratios of only from 5 to 7.8 lead to the high mechanical strengths desired according to the invention.
- a further microstructural feature of the shaped parts produced according to the process of the invention is a narrow crystallite width distribution with preferably 95% of the crystallites lying in the range from 0.05 ⁇ m to 0.5 ⁇ m and the maximum grain width being preferably ⁇ 1.5 ⁇ m.
- the microstructural features are determined on polished and plasma-etched sections of the sintered shaped parts by microscopy using a magnification of 5000 ⁇ .
- the amorphous grain boundary phase formed from the oxidic sintering additives and the SiO 2 at the surface zone of the Si 3 N 4 particles is very finely distributed in the fully sintered shaped parts as a result of the production process of the invention. This is shown by the fact that the thickness of the amorphous grain boundary phase at the triple points is 0.2 ⁇ m on average.
- the temperature/ time/pressure cycle of the invention during sintering results in a part of the Al 2 O 3 introduced into the batch of compound (from 30 to 70% of the total amount, determined by STEM) being dissolved in the Si 3 N 4 crystallites. This circumstance contributes significantly to the improvement in the mechanical properties of the fully sintered shaped parts at elevated temperatures.
- the K IC values of the shaped parts lie in the range from 7.5 to 11 MPa ⁇ m (test in accordance with DIN 51109). Owing to the high thermal conductivity of 20 W/m ⁇ K and the very low linear coefficients of thermal expansion of 2.4 ⁇ 10 -6 /K (measured in the range from 20° to 1000° C.), the shaped parts produced according to the process of the invention also possess very good thermal shock resistance. Their elastic modulus is 310 GPa, while their mechanical flexural fracture strength lies in the range from 850 to 1000 MPa at test temperatures of 1000° C.
- the shaped parts produced by the process of the invention are particularly suitable for use in the construction of machines, plants and engines and also specifically as inlet and exhaust valves in combustion engines.
- 610.5 parts by weight of the oxidic components of the powder mixture specified in Table I were predispersed in an initially charged amount of water of 3.25 parts by volume containing 0.5% of polycarboxylic acid (from BK Ladenburg GmbH) as dispersant (active content 25%) for 20 minutes by means of a stirrer (dissolver).
- the continuous addition of 5265 parts by weight of Si 3 N 4 powder type B was then carried out by means of a metering screw over 10 minutes.
- the predispersed slip was pumped into a stirred ball mill having a capacity of 4 parts by volume.
- the mill possessed a lining and milling disks made of Si 3 N 4 .
- the milling space was filled with Si 3 N 4 milling balls having a size from 1 to 2 mm.
- milling was carried out with circulation of the slip for an effective milling time of 75 minutes.
- Air inlet temperature 200° C.
- Air outlet temperature 90° C.
- the granular material prepared in this manner possesses the following properties:
- the granular material was then shaped by isostatic pressing at a pressing pressure of 2000 bar to give cylindrical bodies having a diameter of 13 mm and a length of 120 mm.
- First temperature stage 0.945 ⁇ T max for a time period of 17 minutes, at an N 2 pressure of 0.4 MPa;
- Second temperature stage 0.975 ⁇ T max for a time period of 40 minutes at an N 2 pressure of 4.5 MPa;
- the starting powders were mixed and milled in accordance with Example 1 and after completion of milling were spray-dried under the same conditions as in Example 1 but without further addition of polymer.
- the abovementioned powder having a solids content of 65% by weight was then redispersed. Based on the weight of powder used, 0.5% of a dispersant KV 5088, from Zschimmer & Schwarz GmbH, Lahnstein, and 3% of KST wax (Hoechst AG) were then added. The slip was homogenized by stirring for 2 hours and was then cast into bars in conventional plaster molds. After 1 hour, the green parts were removed from the molds, dried over a time period of 24 hours at a temperature of 30° C. and sintered as in Example 1.
- Example 2 Powder preparation and drying were carried out as in Example 2. The material was then intensively mixed with organic components in a compounder over a time of 2 hours at a temperature of 190° C.
- the composition of the organics was as follows:
- the material granulated by cooling in the compounder was then injection-molded into bars in an injection-molding machine at a nozzle temperature of 185° C. using an injection pressure of 135 MPa.
- the green parts were heated to 400° C. over a time of 48 hours in a burn-out furnace, completely removing the organic components. Sintering was carried out in accordance with Example 1; the resulting properties of the shaped parts are shown in Table 2.
- Si 3 N 4 powder type A is mixed with sintering additives, milled and spray-dried in accordance with Example 1 under the conditions specified in Table 1 for powder A.
- the holding time in all 3 temperature stages was 40 minutes.
- the pressure build-up was to 1.2 MPa on reaching the first temperature stage and to 5 MPa after sintering had proceeded for 1/4 of the holding time of the second temperature stage.
- the pressure was then increased to 8 MPa and kept constant until the end of the temperature holding time.
- Table 2 The properties of the shaped parts resulting therefrom are shown in Table 2.
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
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Abstract
In the process for producing a homogeneous and finely crystalline silicon nitride ceramic, ceramic powder is milled, mixed with shaping aids, the mixture is shaped into parts and the shaped parts are subsequently sintered in a nitrogen atmosphere. According to the invention, sintering is carried out in a multistage process at temperatures Tmax in the range from 1700° to 1900° C. using gas pressures in the range from 0.3 to 50 MPa. In a first temperature stage, a temperature from 0.9 to 0.96·Tmax is maintained over a time period from 10 to 50 minutes at an N2 pressure from 0.2 to 1.2 MPa, while in a second temperature stage a temperature from 0.97 to 0.985·Tmax is maintained over a time period from 20 to 80 minutes at an N2 pressure from 3 to 6 MPa. Then the temperature is increased to Tmax and the pressure is increased to from 7 to 50 MPa.
Description
This application is a continuation of application Ser. No. 08/193,594, filed Feb. 9, 1994 now abandoned.
The present invention relates to a process for producing a homogeneous and finely crystalline silicon nitride ceramic, in which ceramic powder is milled, mixed with shaping aids, the mixture is shaped into parts and the shaped parts are subsequently sintered in a nitrogen atmosphere. The invention also relates to shaped parts produced according to the process.
DE-A-42 34 794 discloses that, for the production of silicon nitride components which, because of their high strength, are able to resist very special mechanical stresses, many different process parameters have to be optimally matched to one another. In particular, during the sintering step, the temperature and nitrogen pressure settings have to be set as a function of the slowly increasing density of the shaped part.
EP-A-079 678 describes a process for sintering silicon nitride ceramic with sintering additives in the form of oxides of the elements Mg, Al, Y, Ce or Be and/or nitrides or carbides of elements of the groups IVa, Va and VIa of the Periodic Table of the Elements. The sintering process described is distinguished by a continuous temperature increase and three pressure stages. However, since a combined holding time for pressure and temperature is not provided in the context of these directions, the components produced in accordance therewith achieve only a moderate level of strength.
It is an object of the present invention to organize the individual steps of the ceramic production process for shaped parts made of silicon nitride and to define the technological parameters of the overall process in such a way that, in the components produced in this manner, a homogeneous distribution of the sintering additives and a finely crystalline microstructure are achieved and also the number and size of the fracture-triggering structural defects are reduced sufficiently for a strength level ≧900 MPa, when using specially optimized raw powder mixtures a ≧1200 MPa in particular, to be reproducibly achieved.
The object is achieved by a process of the type mentioned in the introduction, the defining features of which are that sintering is carried out in a multistage process at temperatures in the range from 1700° to 1900° C. in a nitrogen atmosphere using gas pressures in the range from 0.2 to 50 MPa, where in a first temperature stage a temperature from 0.9 to 0.96·Tmax, preferably 0.945·Tmax, is maintained over a time period from 10 to 50 minutes, preferably from 12 to 25 minutes, at an N2 pressure from 0.2 to 1.2 MPa, preferably from 0.3 to 0.6 MPa, and where in a second temperature stage a temperature from 0.97 to 0.985·Tmax, preferably of 0,975·Tmax, is maintained over a time period from 20 to 80 minutes, preferably from 30 to 50 minutes, at an N2 pressure from 3 to 6 MPa, preferably from 4 to 5 MPa, and that subsequently the temperature is increased to Tmax and the pressure is increased to from 7 to 50 MPa, preferably to from 7 to 10 MPa.
The pressure holding time in the final stage is from 30 to 100 minutes, preferably from 60 to 90 minutes. The heating rates lie in the range from 5 to 35 K/min and the pressure is increased at a rate from 0.25 to 1.2 MPa/min, preferably from 0.5 to 1.1 MPa/min. The heating to temperatures in the range from 800° to 1200° C. is carried out in vacuo and then up to the first temperature stage under an N2 pressure from 0.3 to 0.6 MPa.
A multistage sintering cycle with different N2 pressures is also described in the above-cited patent document DE-A-42 34 794. According to said document, the level of the maximum gas pressure is set as a function of the densification achieved in the shaped body, derived from the shrinkage profile of the dilatometer curves, in such a way that the gas pressure is from 0.1 to 0.3·Pmax on reaching 85% of the theoretical density and from 0.2 to 0.4·Pmax on reaching 93% of the theoretical density, Pmax lying in the range from 5 to 10 MPa.
In contrast, however, according to the present invention the pressure is only in the range from 0.03 to 0.086·Pmax when the density reached is 90% . Accordingly, a densification of 85% is, according to the invention, reached below 0.1·Pmax. According to the present invention, a densification of 93% of the theoretical density is present after setting the second temperature stage and increasing the pressure to from 0.42 to 0.86 Pmax. The parameters temperature, nitrogen pressure and time are, according to the invention, preferably are coordinated in such a way that high-density homogeneous and finely crystalline Si3 N4 shaped parts can be produced at residence times above 1700° C. in the range from 75 to 135 minutes.
For the purposes of the present invention, nitrogen atmosphere is pure nitrogen or an atmosphere which consists essentially of nitrogen and which can contain nonoxidizing gases such as noble gases or hydrogen as further components. The prescribed pressures are in each case total pressure and not partial pressure.
For the purposes of the present invention, it has also been found to be particularly advantageous to use Si3 N4 starting powder having high purity and good sinteractivity, with sintering additives in the form of Al2 O3 and at least one further oxide of group IVb of the Periodic Table also being added. The mixture is dispersed, mixed and milled or deagglomerated in aqueous suspension. Preferably, predispersion is carried out with intensive stirring and the mixing-milling procedure is carried out in mills, to make possible the elimination of agglomerates ≧2 μm and to achieve homogeneous mixing of the individual components. Contrary to the general view that as high as possible a comminution intensity leads to homogeneous sintered bodies having high strength, it was possible to show that the component properties desired according to the object can be achieved, using the sintering conditions of the invention, by the combination of pH monitoring during the whole preparation process with the addition of organic dispersants for the controlled setting of negative zeta potentials of the inorganic solid particle end the limiting of the comminution energy introduced during the preparation process.
The gentle milling procedure ensures that the oxygen absorption during processing in the aqueous medium remains less than 0.75%, preferably ≦0.5%. The proportion of particles ≧1 μm in the milled product is <8%, preferably ≦3%, with the particle size being advantageously measured by means of laser light scattering. The combination of electrostatic and mechanical deagglomeration mechanisms makes it possible to achieve a more homogeneous distribution of the sintering additives in the aqueous suspension and subsequently in the shaped and sintered parts.
The dispersants used can be, for example, a polymer of α,β-ethylenically unsaturated carboxylic acids, preferably salts thereof, or can be water-soluble copolymers with esters of the ethyl ethylenically unsaturated carboxylic acids.
If the shaping method to be used is dry pressing, first a free-flowing and readily pressable granular material is produced by spray-drying or fluidized-bed granulation. The selection of the organic shaping acids required, namely binders, plasticizers and lubricants, is of particular importance in respect of the maximum achievable strength values in the fully sintered shaped parts.
The shaping aids should, to avoid flocculation and reagglomeration processes, be compatible with the dispersants used and augment their action with regard to the deagglomeration of the inorganic solid particle with an additional electrostatic and/or steric effect. In addition, the suspensions should be processed into free-flowing, readily pressable and very soft granulated materials, using suitable drying conditions. The formation of hard agglomerates which lead to defects, including, inter alia, ring or crescent pores, or to areas having different degrees of densification in the final sintered body must be absolutely avoided. This is generally possible with known suitable combinations of organic polymers containing as binders, for example, polyvinyl alcohols, polyoxazolines, cellulose derivatives, alginates, polysaccharides or monocarboxylic esters, in combination with plasticizers, for example glycerol or polyethylene glycol, and/or lubricants such as olein, oleic acid, stearic acid, stearates, waxes or wax dispersions, and also with drying and granulation conditions matched to each case.
It is often claimed that the achievement of a high density in the unfired shaped parts is an indispensable prerequisite for achievement of high mechanical strengths in the final fired shaped parts. However, it has surprisingly been found that this is not always the case in direct comparison of specific organic additives using specific pressure-sintering conditions. For instance, with a binder in the form of a water-dispersible polyester urethane in combination with polyoxazoline and/or a fatty acid/polyethylene glycol mixture and the green density at 56.5% of the theoretical density it was possible to achieve the same level of strength in the sintered shaped parts at lower pressing pressures than with known binders containing polyvinyl alcohol and glycerol as plasticizer, which led to green densities of 61.5% of the theoretical density. According to the invention, the production of these shaped parts can be carried out not only by axial pressing but also, particularly for rotationally symmetrical parts having large length-to-thickness ratios, by isostatic pressing in such a way that the number and size of structural defects which limit the strength are minimized or the defects are completely eliminated.
EP-A-388 214 describes the use of polyoxazolines as binders for inorganic solids dispersed in organic solvents with the aim of producing shaped bodies having high green density and strength, whereas the present invention relates to systems in aqueous dispersions. Also surprising is the advantageous use of the polyoxazolines in combination with polyester urethanes and/or fatty acid/ polyethylene glycol dispersions and also their effect on the mechanical strength of sintered shaped bodies by avoidance of structural defects.
Direct proof of the action claimed according to the invention for avoiding structural defects which limit strength is, in the final analysis, only to be found in the relationship between flexural fracture strength achieved, or fracture stress, and size and position of the fracture-triggering flaws. Typical shaping defects such as granule "ghosts" (flaws caused by differential sintering of granules) lie in the size range from 20 to 80 μm (depending on granule size). If these are positioned in the region of maximum tensile stress during 4-point bend testing, they would limit the strength of these materials to 1000 or 500 MPa. This results from the known relationship: ##EQU1## with σf =fracture stress (strength) KIC =critical stress intensity factor
F=shape factor (≈1.13)
ac critical flaw size
These types of flaws could also be detected on polished sections of the sintered shaped parts by optical microscopy using 100×magnification and cannot be found in shaped parts prepared, pressed and densely sintered according to the invention.
Other shaping processes which do not start with intermediately dried products (for example granules) can be seen as non-critical with regard to the abovementioned structural defects, but, that if they are not carried out properly, other possible faults can likewise arise.
In slip casting, the slip prepared according to the invention can, by setting the solids content to from 40 to 60% by volume and adding of polymer in the form of, for example, waxes or cellulose derivatives, be cast and dewatered directly in plaster molds or, by means of pressure casting, in synthetic molds. However, it is also possible to dewater the prepared and dispersant-containing slip without further additions of polymer, for example in a spray dryer, and to redisperse the material required for shaping by casting.
This applies likewise to the production of an injection molding compound. The prepared and dried material is intensively mixed with polymer additives or their combination with waxes, paraffins, phthalates, stearic and/or oleic acids, polyoxymethylene and the like in compounders or extruders and subsequently shaped using injection pressures in the range from 5 to 2000 bar.
Depending on the type and amount of the polymer additives used as shaping aids, these additives are burnt out prior to sintering using cycle times of different lengths in an oxidizing or inert atmosphere at a maximum temperature of 1000° C., preferably of 500° C., with or without the use of loose powders such as aluminum oxide as bedding material to shorten the cycle times.
To avoid concentration gradients and/or re-formation of pores by the formation and vaporization of volatile components in the form of Si or SiOx, the proportion by volume of Si3 N4 shaped bodies to be sintered, based on the total volume of the crucible containing the product to be sintered, should be as high as possible. The crucible material used can be boron nitride, graphite coated with boron nitride, or silicon nitride.
To increase the proportion by volume of Si3 N4, the shaped bodies can also be bedded into a loose powder of Si3 N4 with particle sizes from 0.3 to 5 mm which preferably contains more than 20% of the sintering additives present in the shaped part. According to the invention, the firing aids used can also be Si3 N4 parts which have already been suitably shaped and sintered, with or without sintering additives, in the case of cylindrical shaped parts, particularly also in the form of sleeves.
The shaped parts produced according to the process of the invention preferably possess a very fine-grained micro-structure which has an average grain width ≦0.6 μm, preferably ≦0.3 μm, and the number of grains per unit area is ≧0.95·106, preferably ≧4·106, grains/mm2. Contrary to the prevailing opinion that average aspect ratios of more than 8 are advantageous for high strengths, it was found according to the invention that average aspect ratios of only from 5 to 7.8 lead to the high mechanical strengths desired according to the invention.
A further microstructural feature of the shaped parts produced according to the process of the invention is a narrow crystallite width distribution with preferably 95% of the crystallites lying in the range from 0.05 μm to 0.5 μm and the maximum grain width being preferably ≦1.5 μm. The microstructural features are determined on polished and plasma-etched sections of the sintered shaped parts by microscopy using a magnification of 5000×.
The amorphous grain boundary phase formed from the oxidic sintering additives and the SiO2 at the surface zone of the Si3 N4 particles is very finely distributed in the fully sintered shaped parts as a result of the production process of the invention. This is shown by the fact that the thickness of the amorphous grain boundary phase at the triple points is 0.2 μm on average.
The combination of the process features of the invention and the reduction thus achieved in strength-limiting structural defects makes it possible, on the basis of a proportion from 8 to 12% by weight of sintering additives, to produce shaped parts having flexural fracture strengths ≧1200 MPa. Peak values can even lie above 1300 MPa (four-point bend test in accordance with DIN 51110; tensile side of the test pieces polished).
It has surprisingly been found that the temperature/ time/pressure cycle of the invention during sintering results in a part of the Al2 O3 introduced into the batch of compound (from 30 to 70% of the total amount, determined by STEM) being dissolved in the Si3 N4 crystallites. This circumstance contributes significantly to the improvement in the mechanical properties of the fully sintered shaped parts at elevated temperatures.
The KIC values of the shaped parts lie in the range from 7.5 to 11 MPa·√m (test in accordance with DIN 51109). Owing to the high thermal conductivity of 20 W/m·K and the very low linear coefficients of thermal expansion of 2.4·10-6 /K (measured in the range from 20° to 1000° C.), the shaped parts produced according to the process of the invention also possess very good thermal shock resistance. Their elastic modulus is 310 GPa, while their mechanical flexural fracture strength lies in the range from 850 to 1000 MPa at test temperatures of 1000° C.
The shaped parts produced by the process of the invention are particularly suitable for use in the construction of machines, plants and engines and also specifically as inlet and exhaust valves in combustion engines.
Embodiments of the invention will now be more particularly described by way of example, without implying any limitation to the concrete embodiments presented.
610.5 parts by weight of the oxidic components of the powder mixture specified in Table I were predispersed in an initially charged amount of water of 3.25 parts by volume containing 0.5% of polycarboxylic acid (from BK Ladenburg GmbH) as dispersant (active content 25%) for 20 minutes by means of a stirrer (dissolver). The continuous addition of 5265 parts by weight of Si3 N4 powder type B was then carried out by means of a metering screw over 10 minutes. After a further dispersion time of 30 minutes, the predispersed slip was pumped into a stirred ball mill having a capacity of 4 parts by volume. The mill possessed a lining and milling disks made of Si3 N4. The milling space was filled with Si3 N4 milling balls having a size from 1 to 2 mm. Using a container fitted with stirrer, milling was carried out with circulation of the slip for an effective milling time of 75 minutes.
After milling is complete, 0.5% by weight of polyvinyl alcohol (®Mowiol GE 4-86, from Hoechst AG, Frankfurt/Main) and 1% of glycerol, based on the solids contained in the slip, were added to the slip. Other processing parameters and associated measured values are shown in
Table 1. Spray-drying was then carried out by means of a two-fluid nozzle under the following conditions:
Air inlet temperature: 200° C.
Air outlet temperature: 90° C.
Slip throughput: 3.3 kg/h
Air flow (nozzle): 2.9 kg/h
The granular material prepared in this manner possesses the following properties:
Bulk density: 0.97 g/cm3
Flow time through a 7 mm orifice: 4.5 s/100 g
Residual moisture: 0.8%
Granule size:
d10: 29 μm
d50: 64 μm
d90: 105 μm
Proportion of fines <24 μm: 6%.
The granular material was then shaped by isostatic pressing at a pressing pressure of 2000 bar to give cylindrical bodies having a diameter of 13 mm and a length of 120 mm.
After burning out the organic pressing aids, sintering was carried out under the following conditions:
T.sub.max= 1865° C.;
First temperature stage: 0.945·Tmax for a time period of 17 minutes, at an N2 pressure of 0.4 MPa;
Second temperature stage: 0.975·Tmax for a time period of 40 minutes at an N2 pressure of 4.5 MPa;
Temperature increase to Tmax and pressure increase to 10 MPa for a pressure holding time of 15 minutes.
The properties of the shaped parts achieved in this manner are shown in detail in Table 2.
The starting powders were mixed and milled in accordance with Example 1 and after completion of milling were spray-dried under the same conditions as in Example 1 but without further addition of polymer.
The abovementioned powder having a solids content of 65% by weight was then redispersed. Based on the weight of powder used, 0.5% of a dispersant KV 5088, from Zschimmer & Schwarz GmbH, Lahnstein, and 3% of KST wax (Hoechst AG) were then added. The slip was homogenized by stirring for 2 hours and was then cast into bars in conventional plaster molds. After 1 hour, the green parts were removed from the molds, dried over a time period of 24 hours at a temperature of 30° C. and sintered as in Example 1.
Powder preparation and drying were carried out as in Example 2. The material was then intensively mixed with organic components in a compounder over a time of 2 hours at a temperature of 190° C. The composition of the organics was as follows:
74.3% of polyoxymethylene 52021 (from Hoechst AG)
19.2% of polyethylene glycol (Hoechst AG)
6.4% of Mikrowachs C (from Hoechst AG)
The material granulated by cooling in the compounder was then injection-molded into bars in an injection-molding machine at a nozzle temperature of 185° C. using an injection pressure of 135 MPa. The green parts were heated to 400° C. over a time of 48 hours in a burn-out furnace, completely removing the organic components. Sintering was carried out in accordance with Example 1; the resulting properties of the shaped parts are shown in Table 2.
Si3 N4 powder type A is mixed with sintering additives, milled and spray-dried in accordance with Example 1 under the conditions specified in Table 1 for powder A.
Prismatic parts having dimensions of 20×20×55 mm were pressed at 2500 bar using the isostatic wet-bed method and sintered under conditions changed as follows from Example 1:
The holding time in all 3 temperature stages was 40 minutes. The pressure build-up was to 1.2 MPa on reaching the first temperature stage and to 5 MPa after sintering had proceeded for 1/4 of the holding time of the second temperature stage. The pressure was then increased to 8 MPa and kept constant until the end of the temperature holding time. The properties of the shaped parts resulting therefrom are shown in Table 2.
TABLE 1
______________________________________
Powder properties, chemical composition of the
powder mixture, preparation parameters:
Powder properties Type A Type B
______________________________________
Proportion of α-Si.sub.3 N.sub.4 [%]
96.5 98
Oxygen content [%] 1.8 1.5
Carbon content [%] 0.15 0.1
Cationic impurities [%]
0.05 0.025
Average particle size [μm].sup.1)
0.3 0.45
Specific surface area [m.sup.2 /g]
19.3 12
Powder mixture:
Si.sub.3 N.sub.4 [by weight]
87.5 87.7
Y.sub.2 O.sub.3 [% by weight]
8.2 8.2
Al.sub.2 O.sub.3 [% by weight]
4.1 4.1
HfO.sub.2 [% by weight]
0.2 --
Preparation:
Solids content [%] 65 65
pH 10 9.5
Effective milling time [min]
75 75
Abrasion of milling balls
[% based on solids] 0.2 0.2
Specific surface area of
millbase [m.sup.2 /g]
19.5 14
Increase in oxygen content [%]
0.65 0.5
Average particle size of
millbase [μm] 0.3 0.38
Proportion of particles > 1 μm [%]
1.0 2.5
______________________________________
.sup.1) Measurement method: laser light scattering
TABLE 2
______________________________________
Properties of the shaped parts:
Example No. 1 2 3 4
______________________________________
Density [% of 99.2 99.0 98.8 99.0
theoretical density]
Flexural fracture
1308 1312 1180 943
strength.sup.1) [MPa] at
room temperature
Weibull modulus 20 22 25 26
Fracture toughness.sup.2)
9 8.8 8.5 7.5
K.sub.IC [MPa · √m]
Microstructural
parameters:
Aspect ratio.sup.3)
6.5 7.5 7.0 5
Average grain width [μm]
0.22 0.25 0.32 0.6
Number of grains 5.3 4.5 3.5 0.95
[10.sup.6 /mm.sup.2 ]
______________________________________
.sup.1) Test in accordance with DIN 51110
.sup.2) Test in accordance with DIN 51109
.sup.3) Ratio of crystallite length to crystallite width, determined by
measurement of at least 40 crystallites having parallel crystallite edges
in a scanning electron micrograph depicting a microstructure in a
magnification of 5000×.
Claims (11)
1. A process for producing a homogenous and finely crystalline silicon nitride ceramic in which ceramic powder is milled, mixed with shaping aids, the mixture is shaped into parts and the shaped parts are subsequently sintered in a nitrogen atmosphere, which comprises carrying out sintering in a multi-stage process at temperatures Tmax in a range from 1700° to 1900° C. using gas pressures in a range from 0.2 to 50 MPa,
wherein in a first stage, a first temperature from 0.9 to 0.96·Tmax is maintained over a first time period from 10 to 50 minutes at a first N2 pressure from 0.2 to 1.2MPa, and
then in a second stage, said first temperature is increased to a second temperature from 0.97 to 0.985·Tmax is maintained over a second time period from 20 to 80 minutes at a second N2 pressure from 3 to 6 MPa, and
then increasing the second temperature to a third stage having a third temperature of Tmax and increasing the second pressure to the third stage having a third pressure of from 7 to 50 MPa.
2. The process as claimed in claim 1, wherein from a temperature of 1000° C. up to the first temperature stage there is an N2 pressure from 0.3 to 0.6 MPa, in the first temperature stage a first temperature of 0.945·Tmax is maintained over a first time period from 12 to 25 minutes at a first N2 pressure from 0.3 to 0.6 MPa, in the second temperature stage a second temperature of 0.975·Tmax is maintained over a second N2 pressure from 4 to 5 MPa, and then the second temperature is increased to the third temperature of Tmax and the pressure is increased to a third pressure of from 7 to 10 MPa.
3. The process as claimed in claim 1, wherein a holding time of the third pressure in the third stage is from 30 to 100 minutes, a heating rate from said second to said third stage lies in a range from 5 to 35 K/min and a pressure from said second to said third stage is increased at a rate from 0.25 to 1.2 MPa/min.
4. The process as claimed in claim 3, wherein the holding time in the third stage is from 60 to 90 minutes.
5. The process as claimed in claim 3, wherein the pressure form said second to said third stage is increased at a rate from 0.5 to 1.1 MPa/min.
6. The process as claimed in claim 1, wherein a mixture of high-purity Si3 N4 starting powder having good sinteractivity and containing sintering additives in a form of Al2 O3 and at least one further oxide of group IVb of the Periodic Table is dispersed, mixed and milled or deagglomerated in aqueous suspension in a pH range from 8 to 10.5 in such a way that oxygen absorption during processing remains less than 0.75%, preferably ≦0.5%, and that a proportion of particles ≧1 μm in the milled product is <8%, with polymers of α, β-ethylenically unsaturated carboxylic acids, preferably salts thereof, or water-soluble copolymers with esters of the ethylenically unsaturated carboxylic acids being used as a dispersant.
7. The process as claimed in claim 6, wherein said sintering additives which includes Al2 O3 are present in an amount from 8 to 12.5 weight percent based on the total amount of the sintered ceramic.
8. The process according to claim 6, wherein the proportion of particles ≧1 mm in the milled product is ≦3%.
9. The process as claimed in claim 1, wherein shaping is carried out by means of slip casting, pressure filtration, sheet casting, extruding, injection-molding or dry pressing.
10. The process as claimed in claim 9, wherein a water-dispersible polyester urethane in combination with a polyoxazoline and/or a fatty acid/polyethylene glycol dispersion is used in an amount from 0.5 to 10% by weight, based on a total weight of the powder to be shaped, as a shaping aid in dry pressing, and a compaction of components having rotational symmetry is carried out with an aid of isostatic pressing.
11. The process as claimed in claim 1, wherein said shaping is carried out by means of pressure slip casting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/531,699 US5656219A (en) | 1993-02-11 | 1995-09-21 | Process for producing densely sintered silicon nitride components |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4304033 | 1993-02-11 | ||
| DE4304033.0 | 1993-02-11 | ||
| US19359494A | 1994-02-09 | 1994-02-09 | |
| US08/531,699 US5656219A (en) | 1993-02-11 | 1995-09-21 | Process for producing densely sintered silicon nitride components |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US19359494A Continuation | 1993-02-11 | 1994-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US5656219A true US5656219A (en) | 1997-08-12 |
Family
ID=6480177
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US08/531,699 Expired - Fee Related US5656219A (en) | 1993-02-11 | 1995-09-21 | Process for producing densely sintered silicon nitride components |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US5656219A (en) |
| EP (1) | EP0610848B1 (en) |
| JP (1) | JPH06234572A (en) |
| AT (1) | ATE153325T1 (en) |
| BR (1) | BR9400555A (en) |
| CA (1) | CA2115408A1 (en) |
| CZ (1) | CZ284803B6 (en) |
| DE (1) | DE59402786D1 (en) |
| ES (1) | ES2105368T3 (en) |
| TW (1) | TW320626B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6415996B1 (en) * | 2000-10-16 | 2002-07-09 | The Penn State Research Foundation | Dynamic control and enhanced chemical milling of ceramics to submicron particle sizes |
| US20050107498A1 (en) * | 2002-02-21 | 2005-05-19 | Karl Kolter | Rapidly soluble film covering based on polyvinylalcohol-polyether graft copolymers combined with components containing hydroxyl, amide, or ester functions |
| US20090018008A1 (en) * | 2007-06-18 | 2009-01-15 | Vibro Meter France | Process for the preparation of a sintered ceramic, ceramic thus obtained and spark plug comprising it |
| CN115340402A (en) * | 2021-05-13 | 2022-11-15 | 中国科学院上海硅酸盐研究所 | Preparation method of gradient silicon nitride capillary core |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4336311C2 (en) * | 1993-10-25 | 1996-03-14 | Bayer Ag | Process for the production of dense silicon nitride materials |
| DE19748225A1 (en) * | 1997-10-31 | 1999-05-06 | Ceramtec Ag | Silicon nitride ceramic with high mechanical strength at room and elevated temperature |
| DE102008047910A1 (en) | 2008-09-19 | 2010-03-25 | Molkerei Meggle Wasserburg Gmbh & Co. Kg | Tabletting excipient based on lactose and cellulose |
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| JPS5918165A (en) * | 1982-07-19 | 1984-01-30 | 日本特殊陶業株式会社 | Manufacture of silicon nitride sintered body |
| EP0336377A2 (en) * | 1988-04-07 | 1989-10-11 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Silicon nitride sintered body |
| EP0388214A1 (en) * | 1989-03-17 | 1990-09-19 | The Dow Chemical Company | Ceramic greenware formulation for dry pressed greenware |
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-
1994
- 1994-02-07 ES ES94101801T patent/ES2105368T3/en not_active Expired - Lifetime
- 1994-02-07 DE DE59402786T patent/DE59402786D1/en not_active Expired - Fee Related
- 1994-02-07 EP EP94101801A patent/EP0610848B1/en not_active Expired - Lifetime
- 1994-02-07 AT AT94101801T patent/ATE153325T1/en not_active IP Right Cessation
- 1994-02-09 CZ CZ94277A patent/CZ284803B6/en unknown
- 1994-02-09 JP JP6015121A patent/JPH06234572A/en active Pending
- 1994-02-10 CA CA002115408A patent/CA2115408A1/en not_active Abandoned
- 1994-02-10 BR BR9400555A patent/BR9400555A/en not_active Application Discontinuation
- 1994-04-22 TW TW083103604A patent/TW320626B/zh active
-
1995
- 1995-09-21 US US08/531,699 patent/US5656219A/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0079678A1 (en) * | 1981-10-12 | 1983-05-25 | Sumitomo Electric Industries Limited | Method for sintering silicon nitride |
| JPS5918165A (en) * | 1982-07-19 | 1984-01-30 | 日本特殊陶業株式会社 | Manufacture of silicon nitride sintered body |
| EP0336377A2 (en) * | 1988-04-07 | 1989-10-11 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Silicon nitride sintered body |
| EP0388214A1 (en) * | 1989-03-17 | 1990-09-19 | The Dow Chemical Company | Ceramic greenware formulation for dry pressed greenware |
| EP0419757A1 (en) * | 1989-09-26 | 1991-04-03 | Rockwell International Corporation | Process for injection molding ceramics |
| US5114888A (en) * | 1989-11-21 | 1992-05-19 | Ngk Spark Plug Co., Ltd. | Silicon nitride sintered body and method for producing same |
| DE4126510A1 (en) * | 1991-08-08 | 1993-02-11 | Mathias Dr Herrmann | High strength and fracture toughness sintered silicon nitride body mfr. - by wet milling silicon nitride powder with additives, drying and sintering, esp. for machine and tool cutting and wear parts |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6415996B1 (en) * | 2000-10-16 | 2002-07-09 | The Penn State Research Foundation | Dynamic control and enhanced chemical milling of ceramics to submicron particle sizes |
| US20050107498A1 (en) * | 2002-02-21 | 2005-05-19 | Karl Kolter | Rapidly soluble film covering based on polyvinylalcohol-polyether graft copolymers combined with components containing hydroxyl, amide, or ester functions |
| US20090018008A1 (en) * | 2007-06-18 | 2009-01-15 | Vibro Meter France | Process for the preparation of a sintered ceramic, ceramic thus obtained and spark plug comprising it |
| US8003020B2 (en) * | 2007-06-18 | 2011-08-23 | Meggitt (France) | Process for the preparation of a sintered ceramic spark plug |
| CN115340402A (en) * | 2021-05-13 | 2022-11-15 | 中国科学院上海硅酸盐研究所 | Preparation method of gradient silicon nitride capillary core |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0610848A2 (en) | 1994-08-17 |
| ATE153325T1 (en) | 1997-06-15 |
| CA2115408A1 (en) | 1994-08-12 |
| TW320626B (en) | 1997-11-21 |
| ES2105368T3 (en) | 1997-10-16 |
| EP0610848A3 (en) | 1994-11-30 |
| JPH06234572A (en) | 1994-08-23 |
| CZ27794A3 (en) | 1994-08-17 |
| BR9400555A (en) | 1994-08-23 |
| CZ284803B6 (en) | 1999-03-17 |
| EP0610848B1 (en) | 1997-05-21 |
| DE59402786D1 (en) | 1997-06-26 |
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