US5473247A - Apparatus for discriminating defects in top and bottom surfaces of objects - Google Patents
Apparatus for discriminating defects in top and bottom surfaces of objects Download PDFInfo
- Publication number
- US5473247A US5473247A US08/043,181 US4318193A US5473247A US 5473247 A US5473247 A US 5473247A US 4318193 A US4318193 A US 4318193A US 5473247 A US5473247 A US 5473247A
- Authority
- US
- United States
- Prior art keywords
- platform
- magnetic flux
- location
- plate
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
- G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
- G01N27/9013—Arrangements for scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
Definitions
- the probe apparatus further includes first sensor means for receiving the generator means signal for inducing eddy currents in the specimen and thereby inducing eddy currents therein and for sensing eddy currents in the specimen and second sensor means for sensing flux leakage from the specimen, the first and second sensor means being fixedly supported by the probe apparatus platform to rotate therewith.
- the first sensor means includes first and second coils differentially connected to one another and the second sensor means includes at least one coil.
- the probe apparatus further includes a core member having end courses extending into proximity with the specimen and an intermediate course disposed interiorly of the second sensor means coil.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/043,181 US5473247A (en) | 1993-04-06 | 1993-04-06 | Apparatus for discriminating defects in top and bottom surfaces of objects |
EP94103610A EP0619487A3 (fr) | 1993-04-06 | 1994-03-09 | Système et procédé de contÔle non-déstructif des plaques. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/043,181 US5473247A (en) | 1993-04-06 | 1993-04-06 | Apparatus for discriminating defects in top and bottom surfaces of objects |
Publications (1)
Publication Number | Publication Date |
---|---|
US5473247A true US5473247A (en) | 1995-12-05 |
Family
ID=21925898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/043,181 Expired - Lifetime US5473247A (en) | 1993-04-06 | 1993-04-06 | Apparatus for discriminating defects in top and bottom surfaces of objects |
Country Status (2)
Country | Link |
---|---|
US (1) | US5473247A (fr) |
EP (1) | EP0619487A3 (fr) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6172501B1 (en) | 1996-06-28 | 2001-01-09 | Tokyo Rope Mfg. Co., Ltd. | Method and apparatus for measuring the degree of cable corrosion |
US20040002171A1 (en) * | 2002-06-28 | 2004-01-01 | Lam Research Corporation | Method and apparatus for real time metal film thickness measurement |
US20040011462A1 (en) * | 2002-06-28 | 2004-01-22 | Lam Research Corporation | Method and apparatus for applying differential removal rates to a surface of a substrate |
US20040058545A1 (en) * | 2002-09-25 | 2004-03-25 | Lam Research Corporation | Enhancement of eddy current based measurement capabilities |
US6741074B2 (en) | 2002-03-01 | 2004-05-25 | General Electric Company | Method and apparatus for separating electrical runout from mechanical runout |
US20040119469A1 (en) * | 2002-12-23 | 2004-06-24 | Lam Corporation | System, method and apparatus for thin-film substrate signal separation using eddy current |
US20040206455A1 (en) * | 2002-06-28 | 2004-10-21 | Lam Research Corporation | Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties |
US6808590B1 (en) | 2002-06-28 | 2004-10-26 | Lam Research Corporation | Method and apparatus of arrayed sensors for metrological control |
US20050066739A1 (en) * | 2003-09-26 | 2005-03-31 | Lam Research Corporation | Method and apparatus for wafer mechanical stress monitoring and wafer thermal stress monitoring |
US20050072528A1 (en) * | 2002-06-28 | 2005-04-07 | Lam Research Corporation | Integration of sensor based metrology into semiconductor processing tools |
US20050093536A1 (en) * | 2002-10-15 | 2005-05-05 | General Electric Company | Manual probe carriage system and method of using the same |
US20140002069A1 (en) * | 2012-06-27 | 2014-01-02 | Kenneth Stoddard | Eddy current probe |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6198280B1 (en) * | 1998-04-27 | 2001-03-06 | Siemens Westinghouse Power Corporation | Eddy current flexible field probe deployed through a loading platform |
WO2003029805A1 (fr) * | 2001-09-28 | 2003-04-10 | Em-Tech Llc | Effet lenticulaire magnetique |
CN110108788B (zh) * | 2019-05-15 | 2023-04-07 | 上海市特种设备监督检验技术研究院 | 基于脉冲涡流的管道漏磁内检测集成探头及检测方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3343079A (en) * | 1963-07-01 | 1967-09-19 | American Mach & Foundry | Apparatus and method for electromagnetically distinguishing between outside and inside flaws in magnetizable members utilizing a leakage field detector |
US3538433A (en) * | 1968-07-15 | 1970-11-03 | American Mach & Foundry | Apparatus for discriminating between inside and outside defects using a combined leakage field and eddy current test system |
US3940689A (en) * | 1974-05-14 | 1976-02-24 | Schlumberger Technology Corporation | Combined eddy current and leakage field detector for well bore piping using a unique magnetizer core structure |
US4445088A (en) * | 1980-05-10 | 1984-04-24 | Institut Dr. Friedrich Forster Prufgeratebau | Method and arrangement for evaluating a defect signal by comparing the ratio of maximum signal rise and maximum signal magnitude to a predetermined value |
US4602212A (en) * | 1982-06-14 | 1986-07-22 | Sumitomo Metal Industries, Ltd. | Method and apparatus including a flux leakage and eddy current sensor for detecting surface flaws in metal products |
US4751460A (en) * | 1986-06-02 | 1988-06-14 | Western Atlas International, Inc. | Method and apparatus for nondestructive inspection of magnetic piping |
US4878180A (en) * | 1985-11-18 | 1989-10-31 | Western Atlas International, Inc. | Method of evaluating the condition of tubular goods |
US4992735A (en) * | 1989-08-01 | 1991-02-12 | Westinghouse Electric Corp. | System and method for inspecting metallic plugs in heat exchanger tubes using a radially extendible probe |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61213667A (ja) * | 1985-03-20 | 1986-09-22 | Mitsubishi Heavy Ind Ltd | 磁気探傷装置 |
JP2681673B2 (ja) * | 1988-11-30 | 1997-11-26 | 原電子測器株式会社 | 平面探傷用交流漏洩磁束探傷装置 |
-
1993
- 1993-04-06 US US08/043,181 patent/US5473247A/en not_active Expired - Lifetime
-
1994
- 1994-03-09 EP EP94103610A patent/EP0619487A3/fr not_active Withdrawn
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3343079A (en) * | 1963-07-01 | 1967-09-19 | American Mach & Foundry | Apparatus and method for electromagnetically distinguishing between outside and inside flaws in magnetizable members utilizing a leakage field detector |
US3538433A (en) * | 1968-07-15 | 1970-11-03 | American Mach & Foundry | Apparatus for discriminating between inside and outside defects using a combined leakage field and eddy current test system |
US3940689A (en) * | 1974-05-14 | 1976-02-24 | Schlumberger Technology Corporation | Combined eddy current and leakage field detector for well bore piping using a unique magnetizer core structure |
US4445088A (en) * | 1980-05-10 | 1984-04-24 | Institut Dr. Friedrich Forster Prufgeratebau | Method and arrangement for evaluating a defect signal by comparing the ratio of maximum signal rise and maximum signal magnitude to a predetermined value |
US4602212A (en) * | 1982-06-14 | 1986-07-22 | Sumitomo Metal Industries, Ltd. | Method and apparatus including a flux leakage and eddy current sensor for detecting surface flaws in metal products |
US4878180A (en) * | 1985-11-18 | 1989-10-31 | Western Atlas International, Inc. | Method of evaluating the condition of tubular goods |
US4751460A (en) * | 1986-06-02 | 1988-06-14 | Western Atlas International, Inc. | Method and apparatus for nondestructive inspection of magnetic piping |
US4992735A (en) * | 1989-08-01 | 1991-02-12 | Westinghouse Electric Corp. | System and method for inspecting metallic plugs in heat exchanger tubes using a radially extendible probe |
Cited By (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6172501B1 (en) | 1996-06-28 | 2001-01-09 | Tokyo Rope Mfg. Co., Ltd. | Method and apparatus for measuring the degree of cable corrosion |
US6741074B2 (en) | 2002-03-01 | 2004-05-25 | General Electric Company | Method and apparatus for separating electrical runout from mechanical runout |
US20050072528A1 (en) * | 2002-06-28 | 2005-04-07 | Lam Research Corporation | Integration of sensor based metrology into semiconductor processing tools |
US20040002171A1 (en) * | 2002-06-28 | 2004-01-01 | Lam Research Corporation | Method and apparatus for real time metal film thickness measurement |
US20040011462A1 (en) * | 2002-06-28 | 2004-01-22 | Lam Research Corporation | Method and apparatus for applying differential removal rates to a surface of a substrate |
US7309618B2 (en) | 2002-06-28 | 2007-12-18 | Lam Research Corporation | Method and apparatus for real time metal film thickness measurement |
US7205166B2 (en) | 2002-06-28 | 2007-04-17 | Lam Research Corporation | Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties |
US7128803B2 (en) | 2002-06-28 | 2006-10-31 | Lam Research Corporation | Integration of sensor based metrology into semiconductor processing tools |
US20040206455A1 (en) * | 2002-06-28 | 2004-10-21 | Lam Research Corporation | Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties |
US6808590B1 (en) | 2002-06-28 | 2004-10-26 | Lam Research Corporation | Method and apparatus of arrayed sensors for metrological control |
US20050000653A1 (en) * | 2002-06-28 | 2005-01-06 | Lam Research Corporation | Method and apparatus of arrayed sensors for metrological control |
US6951624B2 (en) * | 2002-06-28 | 2005-10-04 | Lam Research Corporation | Method and apparatus of arrayed sensors for metrological control |
US7084621B2 (en) | 2002-09-25 | 2006-08-01 | Lam Research Corporation | Enhancement of eddy current based measurement capabilities |
US20040058545A1 (en) * | 2002-09-25 | 2004-03-25 | Lam Research Corporation | Enhancement of eddy current based measurement capabilities |
US20050093536A1 (en) * | 2002-10-15 | 2005-05-05 | General Electric Company | Manual probe carriage system and method of using the same |
US7208971B2 (en) * | 2002-10-15 | 2007-04-24 | General Electric Company | Manual probe carriage system and method of using the same |
US6788050B2 (en) * | 2002-12-23 | 2004-09-07 | Lam Research Corp. | System, method and apparatus for thin-film substrate signal separation using eddy current |
WO2004059313A1 (fr) * | 2002-12-23 | 2004-07-15 | Lam Research Corporation | Systeme, procede et dispositif pour la separation de signal en substrat a film mince reposant sur l'utilisation de courants de foucault |
US20040119469A1 (en) * | 2002-12-23 | 2004-06-24 | Lam Corporation | System, method and apparatus for thin-film substrate signal separation using eddy current |
CN102269566A (zh) * | 2002-12-23 | 2011-12-07 | 兰姆研究有限公司 | 用于使用涡流的薄膜基板信号分离的系统、方法及设备 |
CN102269566B (zh) * | 2002-12-23 | 2014-05-14 | 兰姆研究有限公司 | 用于使用涡流的薄膜基板信号分离的系统、方法及设备 |
US20050066739A1 (en) * | 2003-09-26 | 2005-03-31 | Lam Research Corporation | Method and apparatus for wafer mechanical stress monitoring and wafer thermal stress monitoring |
US20140002069A1 (en) * | 2012-06-27 | 2014-01-02 | Kenneth Stoddard | Eddy current probe |
Also Published As
Publication number | Publication date |
---|---|
EP0619487A2 (fr) | 1994-10-12 |
EP0619487A3 (fr) | 1996-07-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5473247A (en) | Apparatus for discriminating defects in top and bottom surfaces of objects | |
US4379261A (en) | Rotating magnetic field device for detecting cracks in metal | |
US4107605A (en) | Eddy current flaw detector utilizing plural sets of four planar coils, with the plural sets disposed in a common bridge | |
US6344741B1 (en) | Pulsed eddy current method for detection of corrosion in multilayer structures using the lift-off point of intersection | |
US7038445B2 (en) | Method, system and apparatus for ferromagnetic wall monitoring | |
US4095181A (en) | Rotating pot shaped eddy current probe in which only a small fraction of the lip forming the outer core portion is retained | |
US3538433A (en) | Apparatus for discriminating between inside and outside defects using a combined leakage field and eddy current test system | |
EP0624249A1 (fr) | Systeme de sonde a courant de foucault, a disposition en reseau | |
JPH0854375A (ja) | 電磁誘導型検査装置 | |
US3710236A (en) | Magnetic leakage field flaw detector utilizing partially overlapping hall probes | |
GB2273782A (en) | Eddy current flaw detection of sheet metal adjacent fasteners | |
GB2245072A (en) | Eddy current probe for detecting internal defects in ferromagnetic tubes | |
US3609531A (en) | Combined leakage field and eddy current flaw detector | |
GB1567166A (en) | Apparatus and method for the non-destructive testing of ferromagnetic material | |
JP3307220B2 (ja) | 磁性金属体の探傷方法および装置 | |
JPH06242076A (ja) | 電磁気探傷装置 | |
JPH09269316A (ja) | 渦流探傷方法及び渦流探傷器 | |
JPS61502563A (ja) | 渦電流探傷検知器の方法及び装置 | |
EP0823053A1 (fr) | Procede et appareil de mesure d'objets ferromagnetiques | |
JPS6011492Y2 (ja) | 自動磁気探傷装置点検装置 | |
Tajima et al. | Low frequency eddy current testing to measure thickness of double layer plates made of nonmagnetic steel | |
JPH05203629A (ja) | 電磁気探傷方法およびその装置 | |
JPS62232558A (ja) | 渦流探傷による溶接部検査方法 | |
CA2312101C (fr) | Detection sur le terrain de la corrosion dans une structure multicouche, fondee sur le point d'intersection de decollement | |
JPH05164743A (ja) | 中空体の内面検査方法及び内面検査装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: MAGNETIC ANALYSIS CORPORATION, NEW YORK Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:YOU, ZHONGQING;BROOKS, ROBERT B.;COLMAN, RICHARD;AND OTHERS;REEL/FRAME:006523/0414 Effective date: 19930401 |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: APPLICATION UNDERGOING PREEXAM PROCESSING |
|
CC | Certificate of correction | ||
FEPP | Fee payment procedure |
Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
FPAY | Fee payment |
Year of fee payment: 8 |
|
FPAY | Fee payment |
Year of fee payment: 12 |