US539074A - Device for circulating or pumping liquids - Google Patents

Device for circulating or pumping liquids Download PDF

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US539074A
US539074A US539074DA US539074A US 539074 A US539074 A US 539074A US 539074D A US539074D A US 539074DA US 539074 A US539074 A US 539074A
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solenoid
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liquid
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valve
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04FPUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F1/00Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped
    • F04F1/06Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped the fluid medium acting on the surface of the liquid to be pumped
    • F04F1/10Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped the fluid medium acting on the surface of the liquid to be pumped of multiple type, e.g. with two or more units in parallel
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/86493Multi-way valve unit
    • Y10T137/86574Supply and exhaust
    • Y10T137/8667Reciprocating valve
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/86493Multi-way valve unit
    • Y10T137/86574Supply and exhaust
    • Y10T137/8667Reciprocating valve
    • Y10T137/86694Piston valve
    • Y10T137/8671With annular passage [e.g., spool]

Definitions

  • Briefiymyinvention effects the continuous and almost uniform flow of liquid from one tank to another by means of two reservoirs which are alternately filled and discharged by means of 'an electrically controlled automatic valve which supplies compressed air to the reservoirs or tanks.
  • the valve is actuated by means of two or more solenoids, or series of solenoids, drawing upon coils or plungers secured to the valve stem.
  • the pumping reservoirs are placed some what below the level of the liquid to be pumped so that they fill freely when the air is allowed to escape.
  • the circuit is closed directly through the .flowing liquid as before, and the second solenoid in turn acts to open the valve Wide and at the same time open the exhaust from the first pumping reservoir.
  • FIG. 1 is a diagrammatic View showing the general arrangement of the tanks and apparatus for controlling the discharge or circulation of the liquid, though, as above stated,
  • Fig. 2 is an elevation, partlyin section,showing the electromagnetic reversing mechanism for the valves, together with the valves, 1ncluding a diagrammatic illustration of the electric connections, the whole being shown in the position when the right-hand pumpingreservoir is commencing its pulsation.
  • Fig. 3 is a horizontal cross-section of the valves, shown in the same position as in Fig. 2.
  • Figs. 4: and 5 are elevation and cross-section corresponding to'Figs. 2 and 3, but showing the apparatus in the extreme right-hand position when the right-hand tank or reservoir is in Figs. 6 and 7 are detail plan views of movable switch-contacts for effecting some of the electric connections.
  • Fig. 1 B is the tank from which the liquid is to ,be drawn or discharged into the receiving tank 0 I will refer to these tanks hereinafter as the discharge tank and receiving tank respectively.
  • DZ and Dr are respectively the left and for convenience of description and greater distinction, I will call eggs without intending in any way to litnit myself by the expression to any precise form.
  • the eggs are air tight and connect with the valve mechanism V by means of the pressure pipes d through which air pressure is supplied from a suitablesource E, and through which also the air within the eggs is allowed to exhaust at the proper timeinto the exhaust passage E.
  • Uptake passages O extend from the bottom of the eggs to the receiving tank O in a position to discharge into the metallic funnels F through a short air space.
  • the uptakes O and the funnels F are electrically connected with a source of current and with the respective solenoids so that the discharge -of the liquid across the space between the mouth of the uptake pipe and its corresponding funnel closes the electric circuit and en ergizes the solenoid, as will more fully appear from the other figures. From Fig. 1, however, it will be seen that when the exhaust is open from one of the eggs it will be filled from the tank 13, and while so filling the other egg previously filled may be discharged by pressure through its pressure pipe and the liquid pass through the corresponding uptake into the tank 0'.
  • valve proper '0 may be a slide valve as shown, the admission passage being indicated at E and the exhaust at E.
  • the right and left hand pressure connections are shown respectively at CH and dr.
  • the valve stem is indicated at Gand the solenoid cores or plungers by II.
  • J are shown a pair of terminals or leading-in wires from a battery or any convenient source of electric energy.
  • One terminal which for convenience I will call the positive, is connected to the funnels F by .meaus of the conductors f, and to the two snap switches, which will be presently described, by means of the conductors m.
  • Fig. 4 illustrates the extreme right-hand position of all the parts.
  • Figs. 6 and 7 are plan views of certain details of shifting mechanism by which the switch plates P are shifted laterally into and out of the path of the snap switch contacts O.
  • the actuating springs for the snap switches are shown at 0, the controlling triggers at Q, the releases for the triggers at Q, and the cooking rods at II.
  • the snap switch 01" has just been cooked by com ing into contact and compressing its spring against the cocking rod U.
  • the extreme motion to the right causes the stationary release Q to clear the trigger Q allowing it to fall and catch the switch.
  • the other switch OZ is shown at the other limit of its motion, the trigger still holding the spring compressed and ready to release when moved sufficiently to the left to come into contact with its release Q.
  • the switch plates P are each mounted upon a piece of ebonite, or other insulation, and travel laterally or transversely upon the slides 19.
  • the transverse sliding movement is effected by means of the bell crank levers K, the free ends 7; being alternately broughtin contact with the tappcts 71: which move with the brackets h and the solenoid cores, turning the belleranks and giving a transverse motion to the other arms.
  • This transverse movement is transmitted to the respective switch plates P by means of tho projecting rods or arms 19' connected by a pin-and-slot or other loose connection with the bell crank levers and carried by the blocks of insulating material. Then the valves are in the extreme right-hand position, as in Fig. 4,'tl1e plate Pl is drawn into line with the snap IEO ' close the switch.
  • Figs. 6 and 7' correspond on a larger scale and in plan View to the position shown in Fig. 4 in elevation, but the bell cranks K and their connections, which would appear in the background of Fig. 4, are omitted thereform for the sake of clearness, the movable tappets' is wide open, the position forthe left-hand valve just opening and the left-hand valve wide open would be in all respects but an inversion of theviews shown and are thereforesupertluous.
  • I will start from the extreme left-hand position of all the parts following their action and tracing out their successive motions into the two positions shown respectively in Figs. 2 and 3 and in Figs. 4, 5, 6 and 7.
  • the snap switch 01' is released by its trigger Q coming into contact with the stationary release Q and the switch snaps from its contact plate Pr breaking the circuit through the resistance N7" and the right-hand solenoid and leaving both solenoids de-energized.
  • the admission of air from the supply pipe E into the port dZ of the left-hand egg DZ is checked and the right-hand port dr slightly opened, as clearly shown in Fig. 3.
  • Any electrical equivalent for the resistance may of course be introduced, such, for instance, as using separate coils upon the solenoid of less ampere turns than those energized directly through the funnels and flowing liquid. So also many other equivalents, both electrical and mechanical, may be substituted-in myinvention without in any way interfering with its principles, and I have purposely omitted the enumeration of these, as well as many details of construction, because to set these forth at lengtn would obscure rather than make clear the more essential features of my device.
  • a controlling circuit therefor completed through the flowing liquid and broken upon the cessation of flow, substantially as set forth.
  • the electromagnetic shifting mechanism for governing the circulation of liquids consisting of oppositely acting solenoids and cores, and controlling circuits therefor, one circuit of each. solenoid being completed through a switch actuated by the movement of the solenoid cores, and a second incomplete circuit for each solenoid arranged to be closed by the passage of the liquid across the break in such circuit, substantially as set forth.
  • the electromagnetic shifting mechanism for governing the circulation of liquids consisting of oppositely acting solenoids and cores, and controlling circuits therefor, one circuit of each solenoid being completed through a switch actuated by the movement of the solenoid cores, and a second incomplete circuit for each solenoid arranged to be closed by the passage of the liquid across the break in such circuit, the said switches being arranged to be closed when the cores are drawn farthest out from the corresponding solenoid and opened by the return movement of the cores somewhat more than half way, and means controlled by the said solenoid cores for alternately forcing the said liquid through passages and across the breaks in the said incomplete circuits whereby alternate pulsations of the liquid may take place at first gently and then full force, and the reversal of the said device occur upon the cessation of each pulsation or flow, substantially as set forth.
  • the electromagnetic shifting mechanism for governing the circulation of liquids, consisting of oppositely acting solenoids and cores, and controlling circuits therefor, one
  • each solenoid being completed through a switch actuated by the movement of the solenoid cores, and a second incomplete circuit for each solenoid arranged to be closed by the passage of the liquid across the break in such circuit, the circuits through the said switches being of weaker edect upon the solenoid cores than the other circuits, substantially as set forth.
  • the double Valve for controlling the admission and exhaust to and from two ports (Zr, (11, the pair of solenoids acting upon the said valve, and connections and means for energizing the said solenoids alternately weakly and then strongly, thereby opening the ad mission slightly and then fully to each of the said ports and exhausting from the other, sub stantially as set forth.

Description

3 Sheets-Sheet l.
Patented May 14, 1895.-
Ill IIIIIIIRIL (No Model.)
I gab? $1 I 3513 attoznuagw J all \iliulEi-HU In: uunm; PErzRs c0, PHOTO-LITHQ, wnsnmmou. o c.
(No Model.) 3 SheetsF-Sheet 2.
J. T; MORROW- vDEVICE FOR GIRGULATING 0R PUMPING LIQUIDS.' No. 539,074. Patentd Men- 3 14, 1895.
-/II/II///IIA 7///////// I g ammm m: Nonms PETERS c0 FHomLlTna. WASHINGTON. n, c.
3 Sheets-Sheet 3.
(No Model.)
Patented May 14, 1895.
| PETERS. o0. Pnoruu'ma, WASHINGTON. n. c
Urvrrno Tarps PATENT Prion.
JOHN T. MORROW, or GREAT FALLS, MONTANA.
DEVICE FOR CIRCULATING OR PUMPING LIQUIDS.
SPECIFICATION forming part of Letters Patent No. 539,074, dated May 14, 1895.
Application filed October 9, 1894. Serial No. 525,385. (No model.)
To all whom it may concern:
Be it known that I, JOHN T. MORROW, of Great Falls, Montana, have invented a new and useful Device for Circulating or Pumping Liquids, of which the following is a description, referring to the accompanying drawings, which form a part of this specification. The object of the invention is to pump or circulate liquids, especiallyliquids of an acid nature where a regular discharge or circulation is desired; and while in the drawings I have-shown one arrangement of tanks through which the circulation is carried it must not be understood that my invention is in any way restricted to such an arrangement, which I show merely to indicate one of the many applications of my invention.
Briefiymyinvention effects the continuous and almost uniform flow of liquid from one tank to another by means of two reservoirs which are alternately filled and discharged by means of 'an electrically controlled automatic valve which supplies compressed air to the reservoirs or tanks. The valve is actuated by means of two or more solenoids, or series of solenoids, drawing upon coils or plungers secured to the valve stem. The pumping reservoirs are placed some what below the level of the liquid to be pumped so that they fill freely when the air is allowed to escape. When the valves are at one limit of travel air pressure is admitted to one of the pumping reservoirs, driving the liquid therein through the proper channel into the tank to which the liquid is to be pumped -a check valve closing and preventing the back flow of the liquid into the tank from which the liquid was originally drawn. solenoids the circuit is closed across a space traversed by the flow of liquid,- and the current so passing controls the position of the valve, holding it wide open. At the same time,however, the opposing solenoid is closed through a suitable resistance permitting the flow of a current too weak to overcome the pull of the other. When, however, the flow from the pumping reservoir or tank is exhausted the circuit formed by the flowing liquid is broken and then the opposing solenoid being, free to act closes the valve of that In this position of the valves and full operation.
, reservoir and opens slightly the valve into the other reservoir starting the pulsation in the second reservoir. When theliquid has filled the pipe leading to the receiving tank,
the circuit is closed directly through the .flowing liquid as before, and the second solenoid in turn acts to open the valve Wide and at the same time open the exhaust from the first pumping reservoir.
operation of my invention.
The details of the invention as illustrated in one preferred embodiment, together with certain minor features and objects of the invention, will be more clearly apparent from the following description and the accompanying drawings.
Figure 1 is a diagrammatic View showing the general arrangement of the tanks and apparatus for controlling the discharge or circulation of the liquid, though, as above stated,
it must not be understood that my electromagnetic valve-controlling apparatus for restricted to precisely such an arrangement.
Fig. 2 is an elevation, partlyin section,showing the electromagnetic reversing mechanism for the valves, together with the valves, 1ncluding a diagrammatic illustration of the electric connections, the whole being shown in the position when the right-hand pumpingreservoir is commencing its pulsation. Fig. 3 is a horizontal cross-section of the valves, shown in the same position as in Fig. 2. Figs. 4: and 5 are elevation and cross-section corresponding to'Figs. 2 and 3, but showing the apparatus in the extreme right-hand position when the right-hand tank or reservoir is in Figs. 6 and 7 are detail plan views of movable switch-contacts for effecting some of the electric connections.
Throughout the drawings like letters of referenceindicate like parts.
Referring to the general arrangement shown in Fig. 1 B is the tank from which the liquid is to ,be drawn or discharged into the receiving tank 0 I will refer to these tanks hereinafter as the discharge tank and receiving tank respectively.
DZ and Dr are respectively the left and for convenience of description and greater distinction, I will call eggs without intending in any way to litnit myself by the expression to any precise form.
bl and brare respectively the left and rightmitting the How of the liquid frotn the tank into the eggsbut checking any return flow. The eggs are air tight and connect with the valve mechanism V by means of the pressure pipes d through which air pressure is supplied from a suitablesource E, and through which also the air within the eggs is allowed to exhaust at the proper timeinto the exhaust passage E. Uptake passages O extend from the bottom of the eggs to the receiving tank O in a position to discharge into the metallic funnels F through a short air space. The uptakes O and the funnels F are electrically connected with a source of current and with the respective solenoids so that the discharge -of the liquid across the space between the mouth of the uptake pipe and its corresponding funnel closes the electric circuit and en ergizes the solenoid, as will more fully appear from the other figures. From Fig. 1, however, it will be seen that when the exhaust is open from one of the eggs it will be filled from the tank 13, and while so filling the other egg previously filled may be discharged by pressure through its pressure pipe and the liquid pass through the corresponding uptake into the tank 0'.
In Figs. 2 and 3 details of the valves and electrical connections are clearly apparent. The valve proper '0 may be a slide valve as shown, the admission passage being indicated at E and the exhaust at E. The right and left hand pressure connections are shown respectively at CH and dr. The valve stem is indicated at Gand the solenoid cores or plungers by II. At J are shown a pair of terminals or leading-in wires from a battery or any convenient source of electric energy. One terminal, which for convenience I will call the positive, is connected to the funnels F by .meaus of the conductors f, and to the two snap switches, which will be presently described, by means of the conductors m. From these switches the conductors m lead through resistance N to one terminals of each of the re spective solenoids S. The same terminals 8 are connected with the uptake pipes C. The other terminals T of the solenoids are connected by t directly to the negative conductor J. When the valves are in the position shown in Figs. 2 and 3, it is clear that the compressed air will be admitted from the supply pipe E through the port dr and into the right hand eggDr. This will force the liquid through the uptake Cr. It will be noticed that the port (Zr is very slightly opened, thereby preventing a rush of theliquid until the pressure of the column within the uptake has been established. When, however, theliquid begins to How from the mouth of the uptake into the funnel F r the electrical connection is com pleted between the uptake and the funnel and the full force of the current flows through the right-hand solenoid S7.. The electric circuit is from the positive wire J through the conductor f to the funnel Fr, thence through the flowing liquid to the uptake Cr and by the conductor 5 into I the terminal 8 of the solenoid Sr and thence back to the negative conductor J by way of terminalT and conductor 25. There being no resistance save that of the solenoid core and of the conductors, the maximum current Howe and the solenoid core Hr is drawn to the right opening the valve 1 wide and admitting the full pressure to the right-handegg Dr.
I will now describe the switching mechanism by which the circuit is made and broken through the resistance N.
Fig. 4, as already described, illustrates the extreme right-hand position of all the parts.
Figs. 6 and 7 are plan views of certain details of shifting mechanism by which the switch plates P are shifted laterally into and out of the path of the snap switch contacts O.
At h are shown the brackets or standards carrying the right and left-hand snap switches OZ, Or. The actuating springs for the snap switches are shown at 0, the controlling triggers at Q, the releases for the triggers at Q, and the cooking rods at II. In the figure the snap switch 01" has just been cooked by com ing into contact and compressing its spring against the cocking rod U. The extreme motion to the right causes the stationary release Q to clear the trigger Q allowing it to fall and catch the switch. The other switch OZ is shown at the other limit of its motion, the trigger still holding the spring compressed and ready to release when moved sufficiently to the left to come into contact with its release Q. The switch plates P are each mounted upon a piece of ebonite, or other insulation, and travel laterally or transversely upon the slides 19. The transverse sliding movement is effected by means of the bell crank levers K, the free ends 7; being alternately broughtin contact with the tappcts 71: which move with the brackets h and the solenoid cores, turning the belleranks and giving a transverse motion to the other arms. This transverse movement is transmitted to the respective switch plates P by means of tho projecting rods or arms 19' connected by a pin-and-slot or other loose connection with the bell crank levers and carried by the blocks of insulating material. Then the valves are in the extreme right-hand position, as in Fig. 4,'tl1e plate Pl is drawn into line with the snap IEO ' close the switch.
switch contact OZ, the tip of the contact OZ being clearly indicated in Fig. 7. With the other switch plate Pr, however, the reverse action takes place the plate being moved out of the line of travel of the snap switch contact Or. Thus at the extreme right-hand travel of the valves the switch plate PZ is thrown into contact with the snap switch contact OZ and the circuit of the left-hand solenoid SZ closed through the resistance NZ. At the same time the switch contact plate P-r is moved out of line with its snap switch contact Or so that the returning movement of the valves toward the central position will not Of course in the extreme left-hand position the plate Pr is shifted in turninto line with its contact, closing the circuit through the resistance N7" and the right-hand solenoid, while the plate PZ is drawn out of line with its switch contact so that when the valve action moves again to the right toward the central position its con-' tact will not be closed.
Figs. 6 and 7' correspond on a larger scale and in plan View to the position shown in Fig. 4 in elevation, but the bell cranks K and their connections, which would appear in the background of Fig. 4, are omitted thereform for the sake of clearness, the movable tappets' is wide open, the position forthe left-hand valve just opening and the left-hand valve wide open would be in all respects but an inversion of theviews shown and are thereforesupertluous. In describingtheoperation ofthe snap switches, however, I will start from the extreme left-hand position of all the parts following their action and tracing out their successive motions into the two positions shown respectively in Figs. 2 and 3 and in Figs. 4, 5, 6 and 7.
YVhen the current flowing through the lefthand funnel FZ breaks andde-energizes the left-hand solenoid,.the weaker current flowing in the right-hand solenoid through its resistance Nr in a manner exactly similar to that described in connection with the left-hand solenoid SZ, draws the parts to the right toward the position shown in Figs. 2 and 3. Upon reaching the position shown in Figs. 2
, and3 the snap switch 01' is released by its trigger Q coming into contact with the stationary release Q and the switch snaps from its contact plate Pr breaking the circuit through the resistance N7" and the right-hand solenoid and leaving both solenoids de-energized. At this position, however, which is slightly to the right of the central position of the valves, the admission of air from the supply pipe E into the port dZ of the left-hand egg DZ is checked and the right-hand port dr slightly opened, as clearly shown in Fig. 3.
The pressure of. the air flowing down the corresponding passage cZ into the right-hand egg drcloses the check valve in the intake hr and. forces the liquid within Dr gently through the uptake Cr and funnel Fr into the tank 0'. As soon as the flow is established between the intake Or and its funnel Fr the circuit is thereby closed directly through the right-hand solenoid and the valve drawn strongly to the right to its extreme position, as shown in Figs. 4 and 5. This clearly opens wide the port dr and permits the exhaust of the air within the left-hand egg all through its pressure pipe and port all into the exhaust passage EZ. At the same time this extreme motion to the right has brought the switch OZ (which was cooked in its extreme left-hand position) to its righthand limit; and. brought the corresponding contactplate PZ into contact with it by shifting the bell crank. lever K by means of the tappet Zcl, allclearly shown in Fig. 7. The closing of the switch-OZ, PZ, establishes the minimum current in the left-hand solenoid SZ, the circuit being through the conductor m, switch and switchplate OZ, PZ, resistance NZ, solenoid, and conductor 15. At the same time the switch Or has been cocked by coming into contact with its cocking rod U, and its hammer becoming clear of the release UZ drops into place, ready for the left-hand cycle. Upon the cessation of flow into the funnel Fr the circuit through the right-hand solenoid is again broken and by the pull due to the minimum current in SZ the other half of the complete cycle repeats itself in a mannersubstantially similar but of course the reverse of that already described while the valve was being moved successively to the right. When, therefore, the liquid is blown out of one of the eggs, the air pressure'is at once shut 0E from it and the admission to the other egg slightly opened. As soonas the electric circuit is closed by the flow of the liquid into the funnel of this second egg, the admission is opened wide and-the exhaust from the first egg takes place, such egg'being filled (either by the gravity of the liquid or by the application of a vacuum exhaust) from the discharge tank B. The maximum pull of one solenoid, when energized through the flowing liquid, need not exceed the minimum of the other by any great amount; so that the resistance N may be small. Any electrical equivalent for the resistance may of course be introduced, such, for instance, as using separate coils upon the solenoid of less ampere turns than those energized directly through the funnels and flowing liquid. So also many other equivalents, both electrical and mechanical, may be substituted-in myinvention without in any way interfering with its principles, and I have purposely omitted the enumeration of these, as well as many details of construction, because to set these forth at lengtn would obscure rather than make clear the more essential features of my device.
I believe I am the first to accomplish certain of my results, as well as the first to construct my apparatus for accomplishing them, and therefore I claim, broadly, and desire to secure by these Letters Patent, together with all such modifications, substitutions, and additions as may be made by mere skill, electrical or mechanical, and with only the limitations expressed or by law implied in view of the related art, the following:
1. In a device for pumping liquids, the pair of eggs D, the intake and uptake passages therefor, the pressure connections (1, controlling valve or valves and exhaust and supply pipes, the receiving reservoir or tank 0', in combination with the oppositely acting solenoids and cores, the snap switches, and connections with a suitable current source, and the controlling circuits completed through theliquid flowing in or from the respective uptakes and broken when such flow ceases, substantially as described.
2. In combination in or with an electromagnetic device for pumping or controlling the pumping of liquids, a controlling circuit therefor completed through the flowing liquid and broken upon the cessation of flow, substantially as set forth.
3. The electromagnetic shifting mechanism for governing the circulation of liquids, consisting of oppositely acting solenoids and cores, and controlling circuits therefor, one circuit of each. solenoid being completed through a switch actuated by the movement of the solenoid cores, and a second incomplete circuit for each solenoid arranged to be closed by the passage of the liquid across the break in such circuit, substantially as set forth.
a. The electromagnetic shifting mechanism for governing the circulation of liquids consisting of oppositely acting solenoids and cores, and controlling circuits therefor, one circuit of each solenoid being completed through a switch actuated by the movement of the solenoid cores, and a second incomplete circuit for each solenoid arranged to be closed by the passage of the liquid across the break in such circuit, the said switches being arranged to be closed when the cores are drawn farthest out from the corresponding solenoid and opened by the return movement of the cores somewhat more than half way, and means controlled by the said solenoid cores for alternately forcing the said liquid through passages and across the breaks in the said incomplete circuits whereby alternate pulsations of the liquid may take place at first gently and then full force, and the reversal of the said device occur upon the cessation of each pulsation or flow, substantially as set forth.
5. The electromagnetic shifting mechanism for governing the circulation of liquids, consisting of oppositely acting solenoids and cores, and controlling circuits therefor, one
circuit of each solenoid being completed through a switch actuated by the movement of the solenoid cores, and a second incomplete circuit for each solenoid arranged to be closed by the passage of the liquid across the break in such circuit, the circuits through the said switches being of weaker edect upon the solenoid cores than the other circuits, substantially as set forth.
6. The pair of solenoids and coresfor actuating a shifting device, and electric circuits for drawing the said cores toward one or the other of the said solenoids alternately, in combination with the second circuits for the said solenoids containing the switches and resistances, the said switches being actuated by the motion of the solenoid cores, substantially as set forth.
7. The movable switch plate P, co-operatiug snap switch contact 0, and solenoid circuit controlled thereby, in combination with means actuated by the said solenoid for snapping and cooking the said switch and for giving travel to the said movable switch plate, substantially as set forth.
8. The double Valve for controlling the admission and exhaust to and from two ports (Zr, (11, the pair of solenoids acting upon the said valve, and connections and means for energizing the said solenoids alternately weakly and then strongly, thereby opening the ad mission slightly and then fully to each of the said ports and exhausting from the other, sub stantially as set forth.
In testimony whereofl have hereunto set my hand, at Great Falls, Montana, this 20th day of September, 189i.
JOHN T. MORROW.
\Vitnesses:
R. H. OLIVER, (J. P. HADLEY.
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US4778532A (en) * 1985-06-24 1988-10-18 Cfm Technologies Limited Partnership Process and apparatus for treating wafers with process fluids
US4911761A (en) * 1984-05-21 1990-03-27 Cfm Technologies Research Associates Process and apparatus for drying surfaces
US4984597A (en) * 1984-05-21 1991-01-15 Cfm Technologies Research Associates Apparatus for rinsing and drying surfaces
US5286657A (en) * 1990-10-16 1994-02-15 Verteq, Inc. Single wafer megasonic semiconductor wafer processing system
US6143087A (en) * 1991-10-04 2000-11-07 Cfmt, Inc. Methods for treating objects
US20080006292A1 (en) * 1996-09-30 2008-01-10 Bran Mario E System for megasonic processing of an article

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4911761A (en) * 1984-05-21 1990-03-27 Cfm Technologies Research Associates Process and apparatus for drying surfaces
US4917123A (en) * 1984-05-21 1990-04-17 Cfm Technologies Limited Partnership Apparatus for treating wafers with process fluids
US4984597A (en) * 1984-05-21 1991-01-15 Cfm Technologies Research Associates Apparatus for rinsing and drying surfaces
US4778532A (en) * 1985-06-24 1988-10-18 Cfm Technologies Limited Partnership Process and apparatus for treating wafers with process fluids
US5286657A (en) * 1990-10-16 1994-02-15 Verteq, Inc. Single wafer megasonic semiconductor wafer processing system
US6143087A (en) * 1991-10-04 2000-11-07 Cfmt, Inc. Methods for treating objects
US6348101B1 (en) 1991-10-04 2002-02-19 Cfmt, Inc. Methods for treating objects
US20080006292A1 (en) * 1996-09-30 2008-01-10 Bran Mario E System for megasonic processing of an article
US7518288B2 (en) 1996-09-30 2009-04-14 Akrion Technologies, Inc. System for megasonic processing of an article
US8257505B2 (en) 1996-09-30 2012-09-04 Akrion Systems, Llc Method for megasonic processing of an article
US8771427B2 (en) 1996-09-30 2014-07-08 Akrion Systems, Llc Method of manufacturing integrated circuit devices

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