US4876579A - Low top gate resistance JFET structure - Google Patents
Low top gate resistance JFET structure Download PDFInfo
- Publication number
- US4876579A US4876579A US07/301,835 US30183589A US4876579A US 4876579 A US4876579 A US 4876579A US 30183589 A US30183589 A US 30183589A US 4876579 A US4876579 A US 4876579A
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- top gate
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- field effect
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- 230000005669 field effect Effects 0.000 claims description 18
- 239000012535 impurity Substances 0.000 description 20
- 238000009792 diffusion process Methods 0.000 description 6
- 239000007943 implant Substances 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000002955 isolation Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1066—Gate region of field-effect devices with PN junction gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/808—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a PN junction gate, e.g. PN homojunction gate
Definitions
- the present invention relates generally to junction field effect transistors and, more specifically, to an improved thin channel junction field effect transistor.
- JFET Junction field effect transistors
- BIFET Bipolar processing
- Parallel source and drain regions are formed in a bottom gate region during the base diffusion of the bipolar processing.
- a common ohmic contact region to the bottom gate region and the to-be-formed top gate region are formed during the emitter diffusion of the bipolar devices.
- the additional BFET processing steps are ion implantations of a channel region between the source and drain regions and buried below the surface followed by an ion implantation of the top gate region. Since in most applications, the top and bottom gates are connected together, a single ohmic contact to the bottom and the thin top gate regions is made in the bottom gate. Also, the top gate extends outside the channel region and makes direct contact with the bottom gate.
- FIG. 1 Such a prior art device is illustrated in FIG. 1.
- the P implant which forms a channel region is about 0.3 microns thick and about 0.3 microns below silicon surface.
- the two P diffusion contacts which form the source and drain along the two edges provide a path from the channel implant up to the top surface wherein interconnects can be made.
- the N implant forms the top gate and is very shallow, typically about 0.3 microns, into the top surface.
- the N top gate implant is lower in impurity concentration than the surface of the P source and drain diffusion and, consequently, aluminum cannot make an ohmic contact thereto. Also, the top gate is so shallow that aluminum will migrate through it to form a short to the channel region if direct contact were made. To avoid these problems, the gate implant is extended and overlaps the N+ contact diffusion at the end of the channel.
- U.S. Pat. No. 4,176,368 shows the use of a cap of low impurity concentration extending over the thin channel region and a higher impurity concentration top gate extending into the channel below the cap and laterally beyond the channel to contact the bottom gate.
- the top gate provides a more pronounced gate action and enhanced channel pinch off.
- an isolated gate structure is that several devices can be built in a common bottom gate isolated island rather than in separate isolated islands. This saves die area and improves match of matched pairs by allowing the members of the pair to be closer to one another.
- top gate As a closed geometry surrounding either the source or drain and the top gate surrounded by the other terminal.
- the choice of a closed geometry provides termination of gate region across the source and drain contact regions along the entire parameter of the gate. This assures that there is no contact between top and bottom gates along their edge.
- An example of such a closed geometry JFET is illustrated in U.S. Pat. No. 3,649,385.
- Another object of the present invention is to provide a thin channel isolated top gate JFET having reduced top gate resistance.
- a still even further object of the present invention is to provide an isolated top gate JFET with improved noise reduction and frequency response.
- An even further object of the present invention is to provide a JFET with reduced top gate resistance.
- the thin top gate and channel region formed in a bottom gate region extending between source and drain regions, and providing a top gate contact region having a lower resistance than the top gate region in one or both of the source and drain regions and contacting a substantial portion of the edge termination of the top gate region in the source and drain regions.
- the top gate contact region extends to a depth below the channel region.
- the source and drain regions have a sufficient depth to isolate the top gate and top gate contact regions from the bottom gate region.
- a concentric source and drain region which encompasses the top gate and channel regions includes a concentric region contact region in the concentric region, spaced from and laterally encompassing the top gate contact region therein.
- a bottom gate contact region is in the bottom gate exterior the concentric source and drain region.
- the encompassed source and drain region also includes an encompassed contact region.
- the top gate contact region may extend laterally into the bottom gate.
- FIG. 1 is a perspective cross-sectional view of a BIFET structure of the prior art.
- FIG. 2 is a perspective cross-sectional view of an isolated topgate JFET in accordance with the principles of the present invention.
- FIG. 3 is a perspective cross-sectional view of another embodiment of a JFET according to the principles of the present invention.
- FIG. 4 is a perspective cross-sectional view of a connected top and bottom gate JFET according to the principles of the present invention.
- the bottom gate of the JFET is an N- region 10 which may be a dielectrically isolated region or an epitaxial junction isolated region.
- the impurity concentration of the bottom gate 10 may be in the range of 1 ⁇ 10 14 to 1 ⁇ 10 17 .
- the thin channel JFET of the present invention is compatible with and may be formed using bipolar processing techniques and, thus, is considered a BIFET.
- the source and drain regions 14 and 16 are formed by introducing impurities opposite that of the bottom gate or in this example P type impurities into the bottom gate region 10.
- the source and drain region 14 is formed as an annulus or closed geometry.
- the source and drain 16 is formed interior to the source and drain 14.
- source and drain region 14 would be a concentric source and drain region laterally encompassing encompassed source and drain region 16.
- the source and drain regions 14 and 16 do not encompasses one another.
- the source and drain regions 14 and 16 may be formed simultaneously with forming the collector of a PNP, a low concentration NPN base region, a low concentration I 2 L base or a specific diffusion designed for isolation functions.
- the surface impurity concentration of the resulting source and drain regions should be in the range of 5 ⁇ 10 5 to 5 ⁇ 10 17 .
- they may be formed simultaneously with the formation of bases of NPN bipolar transistors and have a surface impurity region in the range of 5 ⁇ 10 17 to 5 ⁇ 10 18 .
- the source and drain regions 14 and 16 have a depth in the range of 2 to 15 microns.
- the final step which is common with the bipolar processing is the formation of the N+ top gate and bottom gate contact regions 18 and 20, formed in the source and drain region 14 and the bottom gate 10, respectively and P+ source and drain contact regions 26 and 28 in source and drain regions 14 and 16, respectively. As illustrated in FIG. 3, an N+ top gate contact region 30 may also be formed in the source and drain region 16.
- the N+ and P+ contact regions have a surface impurity concentrations in the range of 5 ⁇ 10 19 to 5 ⁇ 10 20 .
- the top gate contact regions 18, 30 may have surface impurity concentration in the range of 5 ⁇ 10 17 to 5 ⁇ 10 19 along its length and one or more N+ regions of the range of 5 ⁇ 10 19 to 5 ⁇ 10 20 therein. This would increase the breakdown voltage from approximately 20 volts to approximately 55 volts.
- the contact regions 18, 20, 26, 28 and 30 have a depth in the range of 1 to 6 microns.
- the N+ top gate contact regions 18 and 30 are formed so as to contact and extend along the termination edge of the to-be-formed top gate in the source and drain regions 16, 18.
- the N+ top gate contact regions 18 and 30 are formed as annulus or closed geometry so as to completely encompass the to-be-formed top gate at its lateral edges.
- the P+ source and drain contact region 26 is also formed as an annulus concentric to and encompassing the N+ top gate contact annulus 18.
- the P+ source and drain contact region 28 is interior the annular N+ top gate contact region 30 as illustrated in FIG. 3. This produces four terminal isolated top gate devices.
- the top gate contact region 18 extends into the bottom gate region 10 to form a three terminal device.
- top gate contact regions 18, 30 are isolated from the bottom gate 10 at the channel. This also allows the top gate contact regions 18, 30 to have sufficient horizontal and vertical dimensions to prevent metal contact migration into the source and drain regions 14, 16 which results in a short.
- the thin P channel region is formed by ion implanting P type impurities.
- the impurities are introduced to form a thin channel region below the surface having thickness in the range of 0.1 to 0.5 microns.
- the thin channel region overlaps portions of the source region 14 and the drain region 16 and may overlap positions of top gate contact regions 18 and 20.
- the P channel region 22 has a peak impurity concentration in the range of 1 ⁇ 10 16 to 1 ⁇ 10 18 . This is less than the impurity concentration of the N+ top gate contact region 18 and 30 so that they do not adversely effect their resistance.
- N type impurities are ion implanted to form the top gate region 24 on top of the channel region 22.
- the top gate is formed to have a depth in the range of 0.05 to 0.4 microns and interconnects the source and drain regions 14 and 16 and the top gate contacts 18 and 30.
- the top gate region 24 has an impurity concentration in the range of 1 ⁇ 10 16 to 5 ⁇ 10 18 .
- the surface impurity concentration of the source and drain regions 14 and 16 are selected to be less than that of the top gate region 24 such that during the ion implantation, the ions can change the conductivity type of portions of the surface of the source and drain regions 14 and 16 such that the top gate will contact and be connected to the top gate contacts 18 and 30.
- FIGS. 2 and 3 A review of the structure of FIGS. 2 and 3 illustrate that the top gate 24 is separated from the bottom gate 10 on its lower surface by channel region 22 and source and drain regions 14 and 16.
- the lateral edges of the top gate 24 are encompassed by and contact the top gate contact regions 18 in FIGS. 2 and 18, 30 in FIG. 3.
- the contact regions 18, 30 have a higher impurity concentration than the top gate region 24 and may extend to a depth below the channel region 22.
- the top gate contact regions 18 and 30 are isolated from the bottom gate 10 by source and drain regions 14 and 16 respectively.
- the higher impurity concentration, and thus lower resistance, of the top gate contact regions 18, 30 substantially reduce the resistance of the thin ion implanted top gate 24.
- the N+ contact region may be region 18 either at the outer edge in source and drain region 14, region 30 at the inner edge in source and drain region 16, or regions 18 and 30 at both.
- a pinched source and drain resistance PP c is introduced under the N+ contact regions 18, 30. For a process with a pinched resistance of 5,000 ohms per square, in a device with a 10 micron ring length and a 40 mil channel width, the pinched source and drain resistance would be 50 ohms.
- the 50 ohm resistance would be in series with the drain and would be negligible. If the source and drain region 14 were the source, the N+ contact region 18 and its associated 50 ohm resistance would act as a negative feedback element which would decrease the small signal transconductance gm.
- FIGS. 2 and 3 can also be applied to reduce the resistance of the top gate and a plurality of spoke-like N-type conductivity regions may be provided extended between the two top gate contact regions 18, 30 and extending down into the bottom gate region 10 through the top gate region 24 and the channel region 22. Although further reducing the gate resistance, it also reduces the channel area available.
- the structure of FIG. 4 is preferred for a non-isolated top gate or three terminal device.
- top gate contact regions 18 and 30 have been shown as continuous regions extending totally along the width of the top gate at its termination in the source and drain regions 14, 16. Although this structure maximizes the reduction of resistance, in some applications the top gate contact regions may extend only along a substantial portion of the edge termination in order to reduce capacitance. Also, the top gate contact regions 18, 30 may segmented so as to effectively extend completely along the edge termination.
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
Description
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US07/301,835 US4876579A (en) | 1989-01-26 | 1989-01-26 | Low top gate resistance JFET structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US07/301,835 US4876579A (en) | 1989-01-26 | 1989-01-26 | Low top gate resistance JFET structure |
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US4876579A true US4876579A (en) | 1989-10-24 |
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US07/301,835 Expired - Lifetime US4876579A (en) | 1989-01-26 | 1989-01-26 | Low top gate resistance JFET structure |
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Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5118632A (en) * | 1989-10-20 | 1992-06-02 | Harris Corporation | Dual layer surface gate JFET having enhanced gate-channel breakdown voltage |
EP0981166A2 (en) * | 1998-08-17 | 2000-02-23 | ELMOS Semiconductor AG | JFET transistor |
US6525383B1 (en) * | 1997-02-14 | 2003-02-25 | Siemens Aktiengesellschaft | Power MOSFET |
US20030168704A1 (en) * | 2001-06-14 | 2003-09-11 | Shin Harada | Lateral junction type field effect transistor |
US6818947B2 (en) | 2002-09-19 | 2004-11-16 | Fairchild Semiconductor Corporation | Buried gate-field termination structure |
US6825510B2 (en) | 2002-09-19 | 2004-11-30 | Fairchild Semiconductor Corporation | Termination structure incorporating insulator in a trench |
US20110079824A1 (en) * | 2009-10-07 | 2011-04-07 | Derek Hullinger | Alternate 4-terminal jfet geometry to reduce gate to source capacitance |
US8049276B2 (en) | 2009-06-12 | 2011-11-01 | Fairchild Semiconductor Corporation | Reduced process sensitivity of electrode-semiconductor rectifiers |
US8148749B2 (en) | 2009-02-19 | 2012-04-03 | Fairchild Semiconductor Corporation | Trench-shielded semiconductor device |
US8174067B2 (en) | 2008-12-08 | 2012-05-08 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US8227855B2 (en) | 2009-02-09 | 2012-07-24 | Fairchild Semiconductor Corporation | Semiconductor devices with stable and controlled avalanche characteristics and methods of fabricating the same |
US8304829B2 (en) | 2008-12-08 | 2012-11-06 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
TWI408808B (en) * | 2007-10-24 | 2013-09-11 | Chun Chu Yang | The structure of the coaxial transistor |
US20140332858A1 (en) * | 2013-05-13 | 2014-11-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Junction gate field-effect transistor (jfet), semiconductor device having jfet and method of manufacturing |
US9882012B2 (en) | 2013-05-13 | 2018-01-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Junction gate field-effect transistor (JFET) having source/drain and gate isolation regions |
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US4143392A (en) * | 1977-08-30 | 1979-03-06 | Signetics Corporation | Composite jfet-bipolar structure |
US4176368A (en) * | 1978-10-10 | 1979-11-27 | National Semiconductor Corporation | Junction field effect transistor for use in integrated circuits |
US4187514A (en) * | 1976-11-09 | 1980-02-05 | Tokyo Shibaura Electric Co., Ltd. | Junction type field effect transistor |
US4322738A (en) * | 1980-01-21 | 1982-03-30 | Texas Instruments Incorporated | N-Channel JFET device compatible with existing bipolar integrated circuit processing techniques |
US4456918A (en) * | 1981-10-06 | 1984-06-26 | Harris Corporation | Isolated gate JFET structure |
US4495694A (en) * | 1981-10-06 | 1985-01-29 | Harris Corporation | Method of fabricating an isolated gate JFET |
-
1989
- 1989-01-26 US US07/301,835 patent/US4876579A/en not_active Expired - Lifetime
Patent Citations (8)
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US3223904A (en) * | 1962-02-19 | 1965-12-14 | Motorola Inc | Field effect device and method of manufacturing the same |
US3649385A (en) * | 1969-03-12 | 1972-03-14 | Hitachi Ltd | Method of making a junction type field effect transistor |
US4187514A (en) * | 1976-11-09 | 1980-02-05 | Tokyo Shibaura Electric Co., Ltd. | Junction type field effect transistor |
US4143392A (en) * | 1977-08-30 | 1979-03-06 | Signetics Corporation | Composite jfet-bipolar structure |
US4176368A (en) * | 1978-10-10 | 1979-11-27 | National Semiconductor Corporation | Junction field effect transistor for use in integrated circuits |
US4322738A (en) * | 1980-01-21 | 1982-03-30 | Texas Instruments Incorporated | N-Channel JFET device compatible with existing bipolar integrated circuit processing techniques |
US4456918A (en) * | 1981-10-06 | 1984-06-26 | Harris Corporation | Isolated gate JFET structure |
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Cited By (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5118632A (en) * | 1989-10-20 | 1992-06-02 | Harris Corporation | Dual layer surface gate JFET having enhanced gate-channel breakdown voltage |
US6525383B1 (en) * | 1997-02-14 | 2003-02-25 | Siemens Aktiengesellschaft | Power MOSFET |
EP0981166A2 (en) * | 1998-08-17 | 2000-02-23 | ELMOS Semiconductor AG | JFET transistor |
EP0981166A3 (en) * | 1998-08-17 | 2000-04-19 | ELMOS Semiconductor AG | JFET transistor |
US20030168704A1 (en) * | 2001-06-14 | 2003-09-11 | Shin Harada | Lateral junction type field effect transistor |
US7023033B2 (en) * | 2001-06-14 | 2006-04-04 | Sumitomo Electric Industries, Ltd. | Lateral junction field-effect transistor |
US20060118813A1 (en) * | 2001-06-14 | 2006-06-08 | Sumitomo Electric Industries, Ltd. | Lateral junction field-effect transistor |
US7528426B2 (en) | 2001-06-14 | 2009-05-05 | Sumitomo Electric Industries, Ltd. | Lateral junction field-effect transistor |
US6818947B2 (en) | 2002-09-19 | 2004-11-16 | Fairchild Semiconductor Corporation | Buried gate-field termination structure |
US6825510B2 (en) | 2002-09-19 | 2004-11-30 | Fairchild Semiconductor Corporation | Termination structure incorporating insulator in a trench |
TWI408808B (en) * | 2007-10-24 | 2013-09-11 | Chun Chu Yang | The structure of the coaxial transistor |
US8963212B2 (en) | 2008-12-08 | 2015-02-24 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US9391193B2 (en) | 2008-12-08 | 2016-07-12 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US10868113B2 (en) | 2008-12-08 | 2020-12-15 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US8174067B2 (en) | 2008-12-08 | 2012-05-08 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US8193581B2 (en) | 2008-12-08 | 2012-06-05 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US9748329B2 (en) | 2008-12-08 | 2017-08-29 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US8304829B2 (en) | 2008-12-08 | 2012-11-06 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US9293526B2 (en) | 2008-12-08 | 2016-03-22 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US8932924B2 (en) | 2008-12-08 | 2015-01-13 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US8563377B2 (en) | 2008-12-08 | 2013-10-22 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US8564024B2 (en) | 2008-12-08 | 2013-10-22 | Fairchild Semiconductor Corporation | Trench-based power semiconductor devices with increased breakdown voltage characteristics |
US8227855B2 (en) | 2009-02-09 | 2012-07-24 | Fairchild Semiconductor Corporation | Semiconductor devices with stable and controlled avalanche characteristics and methods of fabricating the same |
US8148749B2 (en) | 2009-02-19 | 2012-04-03 | Fairchild Semiconductor Corporation | Trench-shielded semiconductor device |
US8049276B2 (en) | 2009-06-12 | 2011-11-01 | Fairchild Semiconductor Corporation | Reduced process sensitivity of electrode-semiconductor rectifiers |
US8492837B2 (en) | 2009-06-12 | 2013-07-23 | Fairchild Semiconductor Corporation | Reduced process sensitivity of electrode-semiconductor rectifiers |
US20110079824A1 (en) * | 2009-10-07 | 2011-04-07 | Derek Hullinger | Alternate 4-terminal jfet geometry to reduce gate to source capacitance |
US8058674B2 (en) | 2009-10-07 | 2011-11-15 | Moxtek, Inc. | Alternate 4-terminal JFET geometry to reduce gate to source capacitance |
US20140332858A1 (en) * | 2013-05-13 | 2014-11-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Junction gate field-effect transistor (jfet), semiconductor device having jfet and method of manufacturing |
US9287413B2 (en) * | 2013-05-13 | 2016-03-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Junction gate field-effect transistor (JFET) and semiconductor device |
US9882012B2 (en) | 2013-05-13 | 2018-01-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Junction gate field-effect transistor (JFET) having source/drain and gate isolation regions |
US10658477B2 (en) | 2013-05-13 | 2020-05-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Junction gate field-effect transistor (JFET) having source/drain and gate isolation regions |
US11264471B2 (en) | 2013-05-13 | 2022-03-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Junction gate field-effect transistor (JFET) having source/drain and gate isolation regions |
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