US4724016A - Ion-implantation of zirconium and its alloys - Google Patents
Ion-implantation of zirconium and its alloys Download PDFInfo
- Publication number
- US4724016A US4724016A US06/777,645 US77764585A US4724016A US 4724016 A US4724016 A US 4724016A US 77764585 A US77764585 A US 77764585A US 4724016 A US4724016 A US 4724016A
- Authority
- US
- United States
- Prior art keywords
- wear
- zircaloy
- ion
- nitrogen
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005468 ion implantation Methods 0.000 title claims abstract description 28
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 title abstract description 8
- 229910052726 zirconium Inorganic materials 0.000 title abstract description 8
- 229910045601 alloy Inorganic materials 0.000 title description 6
- 239000000956 alloy Substances 0.000 title description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 56
- 229910001093 Zr alloy Inorganic materials 0.000 claims abstract description 35
- 238000005260 corrosion Methods 0.000 claims abstract description 29
- 230000007797 corrosion Effects 0.000 claims abstract description 29
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 9
- 150000002500 ions Chemical class 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000007792 addition Methods 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 3
- 239000010955 niobium Substances 0.000 claims description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 229910052720 vanadium Inorganic materials 0.000 claims description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract description 18
- 229910052804 chromium Inorganic materials 0.000 abstract description 18
- 239000011651 chromium Substances 0.000 abstract description 18
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052718 tin Inorganic materials 0.000 abstract description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052785 arsenic Inorganic materials 0.000 abstract description 5
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052698 phosphorus Inorganic materials 0.000 abstract description 5
- 239000011574 phosphorus Substances 0.000 abstract description 5
- 239000011135 tin Substances 0.000 abstract description 3
- 238000012360 testing method Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000001627 detrimental effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 241000047703 Nonion Species 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910000756 V alloy Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- SYHGEUNFJIGTRX-UHFFFAOYSA-N methylenedioxypyrovalerone Chemical compound C=1C=C2OCOC2=CC=1C(=O)C(CCC)N1CCCC1 SYHGEUNFJIGTRX-UHFFFAOYSA-N 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F3/00—Changing the physical structure of non-ferrous metals or alloys by special physical methods, e.g. treatment with neutrons
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/90—Ion implanted
Definitions
- the present invention is directed to a method for increasing the wear and corrosion resistance of zirconium and zirconium alloys by ion implantation.
- the present invention is directed to the ion implantation of nitrogen and/or carbon for the purpose of increasing wear resistance; and the ion implantation of arsenic, carbon, chromium, nitrogen, tin, phosphorus or combinations thereof for the purpose of increasing corrosion resistance.
- Zirconium alloys such as Zircaloy are frequently used in nuclear environments.
- Zircaloy in particular has a desirable combination of properties for use in nuclear environments including a relatively low neutron cross section, good corrosion resistance during early stages of operation and elevated temperature stability.
- the wear resistance of Zircaloy may be less than desirable for certain applications and the corrosion resistance, although characterized as good, may be erratic.
- the corrosion resistance can be erratic.
- Nitrogen and carbon are known to have a particularly adverse effect on the corrosion resistance. It is reported in the Metals Handbook, Volume 3, 9th edition, 1980, pages 784-791; and in Metallurgy of Zirconium, B. Lustman and F. Kerze Jr., 1955, McGraw-Hill, that nitrogen levels of greater than 40 ppm or carbon concentrations greater than about 300 ppm markedly decrease the corrosion resistance of zirconium alloys.
- Ion implantation has been used extensively in semiconductor processing. More recently, metal and ceramic surfaces used in a variety of applications, including prosthetic devices used within the human body and tools, have been ion implanted to increase the wear resistance. The life of tool and die components used for drills, dies, injection molds, slitters, knives and mill rolls has been prolonged significantly by ion implantation of nitrogen. Nitrogen and carbon ion implantation of titanium, aluminum and vanadium alloys components has been shown to increase the wear resistance by a factor of 400 or more when compared to non-ion implanted components.
- Still another object of the invention is to enhance both the corrosion resistance and the wear resistance of zirconium alloys.
- the present invention is directed to the ion implantation of zirconium and its alloys for the purpose of improving the wear and corrosion resistance.
- the present invention is directed to the ion implantation of Zircaloy with arsenic, carbon, chromium, nitrogen, phosphorus, tin or combinations thereof.
- Nitrogen and carbon were found to be particularly effective in increasing the wear and corrosion resistance, while the other ions have been found to enhance the corrosion resistance.
- the ion implantation of nitrogen has been shown to result in a factor of two improvement in the wear resistance of Zircaloy under a contact pressure of about 4,400 psi. Since the contact pressure for most applications in which Zircaloy is used is less than 500 psi, this data indicates that a wear reduction of ten or more would be expected from the ion implantation of nitrogen in Zircaloy.
- This improvement could provide Zircaloy components with sufficient wear resistance to permit Zircaloy to be used in applications where grid to grid wear, anti-bow grid wear, grid to core shroud wear and possibly fuel rod fretting wear would be encountered.
- the ion implantation of reactor guide tubes could eliminate the need for stainless steel sleeves to protect the guide tubes from control element assembly (CEA) wear.
- the ion dosage be between about 10 7 ions/cm 2 and 10 18 ions/cm 2 and that the energy level of the ions be between about 5 keV and 200 keV.
- FIG. 1 shows a nitrogen implanted Zircaloy-4 plate which was wear tested with a Zircaloy-4 pin as discussed above. The plate shows no visible wear tracks.
- FIG. 2 shows a non-implanted Zircaloy-4 plate which was wear tested with a Zircaloy-4 pin as discussed above.
- the plate shows visible wear tracks.
- FIG. 3 shows a Zircaloy-4 plate which was implanted with a combination of chromium plus carbon and then wear tested with a Zircaloy-4 pin as discussed above. The plate shows no visible wear tracks.
- FIG. 4 shows a chromium implanted Zircaloy-4 plate which was wear tested with a Zircaloy-4 pin. The plate shows visible wear tracks.
- the present invention is directed to the ion implantation of zirconium and its alloys for the purpose of improving the wear and corrosion resistance.
- Zircaloy is ion implanted with nitrogen and/or carbon to improve the wear resistance.
- ion implantation of nitrogen has been shown to result in a factor of two improvement in the wear resistance of Zircaloy-4 when a contact pressure of about 4,400 psi is used. Since the contact pressure for most applications in which Zircaloy is used is less than 500 psi, a wear reduction factor of ten or more would be expected in most applications from the ion implantation of nitrogen in Zircaloy.
- This improvement in wear resistance could provide Zircaloy with sufficient wear resistance to be used in applications where grid to grid wear, anti-bow grid wear, grid to core shroud wear and possibly fuel rod fretting wear would be encountered.
- reactor guide tubes could eliminate the need for stainless steel sleeves to protect the guide tubes from control element assembly (CEA) wear.
- CEA control element assembly
- ion implantation of Zircaloy with nitrogen and carbon was found to enhance the corrosion resistance of the Zircaloy.
- Zircaloy-4 is a zirconium alloy which contains by weight about 1.5% tin, 0.15% iron, ad 0.1% chromium. After ion implantation the samples were exposed to steam at 750° F. (399° C.) and 1500 psi (10.3 MPa) for three days and then visually inspected in accordance with the test procedure set forth in ASTM designation G2-81, "Standard Practice of Aqueous Corrosion Testing of Samples of Zirconium and Zirconium Alloys".
- FIG. 1 shows a nitrogen implanted Zircaloy-4 plate which was wear tested with a Zircaloy-4 pin as discussed above. The plate shows no visible wear tracks.
- FIG. 2 shows a non-implanted Zircaloy-4 plate which was wear tested with a Zircaloy-4 pin as discussed above.
- the plate shows visible wear tracks.
- FIG. 3 shows a Zircaloy-4 plate which was implanted with a combination of chromium plus carbon and then wear tested with a Zircaloy-4 pin as discussed above. The plate shows no visible wear tracks.
- FIG. 4 shows a chromium implanted Zircaloy-4 plate which was wear tested with a Zircaloy-4 pin. The plate shows visible wear tracks.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
TABLE I
______________________________________
Visual inspection of
Ion implanted Autoclave Corrosion
______________________________________
Tin - 2.5 × 10.sup.7 ion/cm.sup.2
Black shiny
@ 80 keV Surface
Phosphorus - 2.0 × 10.sup.7 ion/cm.sup.2
Black shiny
@ 150 keV Surface
Carbon - 2.0 × 10.sup.7 ion/cm.sup.2
Black shiny
@ 120 keV Surface
Arsenic - 1.5 × 10.sup.7 ion/cm.sup.2
Black shiny
@ 150 keV Surface
Nitrogen - 2.0 × 10.sup.17 ion/cm.sup.2
Black shiny
@ 120 keV Surface
Chromium - 2.0 × 10.sup.17 ion/cm.sup.2
Black shiny
@ 100 keV Surface
Carbon plus Chromium -
Black shiny
2.0 × 10.sup.17 ion/cm.sup.2
Surface
@ 100 keV for Chromium
2.0 × 10.sup.17 ion/cm.sup.2
@ 50 keV for Carbon
______________________________________
TABLE II
______________________________________
IMPLANTATION PARAMETERS
SAMPLE ION DOSE ENERGY
______________________________________
1 Nitrogen 2.0 × 10.sup.17 ion/cm.sup.2
120 keV
2 None
3 (dual)
Chromium 2.0 × 10.sup.17 ion/cm.sup.2
100 keV
Carbon 2.0 × 10.sup.17 ion/cm.sup.2
50 keV
4 Chromium 2.0 × 10.sup.17 ion/cm.sup.2
100 keV
______________________________________
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/777,645 US4724016A (en) | 1985-09-19 | 1985-09-19 | Ion-implantation of zirconium and its alloys |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/777,645 US4724016A (en) | 1985-09-19 | 1985-09-19 | Ion-implantation of zirconium and its alloys |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US4724016A true US4724016A (en) | 1988-02-09 |
Family
ID=25110838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US06/777,645 Expired - Fee Related US4724016A (en) | 1985-09-19 | 1985-09-19 | Ion-implantation of zirconium and its alloys |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | US4724016A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5192618A (en) * | 1991-04-26 | 1993-03-09 | International Business Machines Corporation | Corrosion protection by femn by ion implantation |
| US5227129A (en) * | 1990-04-26 | 1993-07-13 | Combustion Engineering, Inc. | Method for applying corrosion resistant metallic coating of zirconium nitride |
| US5267289A (en) * | 1992-09-25 | 1993-11-30 | Combustion Engineering, Inc. | Ion implantation of nuclear fuel assembly components using cathodic vacuum arc source |
| US5711780A (en) * | 1992-06-08 | 1998-01-27 | Canon Kabushiki Kaisha | Mold for molding optical element |
| US6098655A (en) * | 1996-12-03 | 2000-08-08 | Carolina Power & Light Company | Alleviating sticking of normally closed valves in nuclear reactor plants |
| US6128361A (en) * | 1996-03-26 | 2000-10-03 | General Electric Company | Coating for reducing corrosion of zirconium-based alloys induced by . .beta-particle irradiation |
| RU2298049C2 (en) * | 2005-04-26 | 2007-04-27 | Федеральное государственное унитарное предприятие "Институт реакторных материалов" | Zirconium alloys treatment process |
| US20130251087A1 (en) * | 2012-02-17 | 2013-09-26 | Massachusetts Institute Of Technology | Surface modification of cladding material |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3150972A (en) * | 1961-12-27 | 1964-09-29 | Siemens Ag | Zirconium alloy |
| US3205076A (en) * | 1963-08-29 | 1965-09-07 | Aaron E Wasserman | Preparation of maple sirup from buddy sap |
| US3664825A (en) * | 1969-02-21 | 1972-05-23 | Sandvikens Jernverks Ab | Method for manufacturing zirconium alloys and alloys manufactured according to the method |
| US3674571A (en) * | 1970-03-04 | 1972-07-04 | Surface Technology Corp | Nitrided zirconium alloys |
| GB2125442A (en) * | 1982-05-24 | 1984-03-07 | Atomic Energy Authority Uk | A procedure for the hardening of materials |
-
1985
- 1985-09-19 US US06/777,645 patent/US4724016A/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3150972A (en) * | 1961-12-27 | 1964-09-29 | Siemens Ag | Zirconium alloy |
| US3205076A (en) * | 1963-08-29 | 1965-09-07 | Aaron E Wasserman | Preparation of maple sirup from buddy sap |
| US3664825A (en) * | 1969-02-21 | 1972-05-23 | Sandvikens Jernverks Ab | Method for manufacturing zirconium alloys and alloys manufactured according to the method |
| US3674571A (en) * | 1970-03-04 | 1972-07-04 | Surface Technology Corp | Nitrided zirconium alloys |
| GB2125442A (en) * | 1982-05-24 | 1984-03-07 | Atomic Energy Authority Uk | A procedure for the hardening of materials |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5227129A (en) * | 1990-04-26 | 1993-07-13 | Combustion Engineering, Inc. | Method for applying corrosion resistant metallic coating of zirconium nitride |
| US5192618A (en) * | 1991-04-26 | 1993-03-09 | International Business Machines Corporation | Corrosion protection by femn by ion implantation |
| EP0510468A3 (en) * | 1991-04-26 | 1994-03-02 | Ibm | |
| US5711780A (en) * | 1992-06-08 | 1998-01-27 | Canon Kabushiki Kaisha | Mold for molding optical element |
| US5855641A (en) * | 1992-06-08 | 1999-01-05 | Canon Kabushiki Kaisha | Mold for molding optical element |
| US5267289A (en) * | 1992-09-25 | 1993-11-30 | Combustion Engineering, Inc. | Ion implantation of nuclear fuel assembly components using cathodic vacuum arc source |
| US6128361A (en) * | 1996-03-26 | 2000-10-03 | General Electric Company | Coating for reducing corrosion of zirconium-based alloys induced by . .beta-particle irradiation |
| US6098655A (en) * | 1996-12-03 | 2000-08-08 | Carolina Power & Light Company | Alleviating sticking of normally closed valves in nuclear reactor plants |
| RU2298049C2 (en) * | 2005-04-26 | 2007-04-27 | Федеральное государственное унитарное предприятие "Институт реакторных материалов" | Zirconium alloys treatment process |
| US20130251087A1 (en) * | 2012-02-17 | 2013-09-26 | Massachusetts Institute Of Technology | Surface modification of cladding material |
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