US3866625A - Manifold for selectively distributing a fluid pressure medium - Google Patents

Manifold for selectively distributing a fluid pressure medium Download PDF

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Publication number
US3866625A
US3866625A US402049A US40204973A US3866625A US 3866625 A US3866625 A US 3866625A US 402049 A US402049 A US 402049A US 40204973 A US40204973 A US 40204973A US 3866625 A US3866625 A US 3866625A
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Prior art keywords
channels
ports
fluid pressure
block
manifold
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US402049A
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Axel Kemner
Rudi Conradt
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Wabco Westinghouse GmbH Germany
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Wabco Westinghouse GmbH Germany
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0807Manifolds
    • F15B13/0814Monoblock manifolds
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0871Channels for fluid
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/5109Convertible
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/85938Non-valved flow dividers

Definitions

  • ABSTRACT A fluid pressure medium distributing manifold having a plurality of ports opening to the surface thereof and interconnected by a plurality of grooves or channels formed in the manifold with respective bores intersecting said grooves, said bores being adapted for re ceiving air tight plugs for interrupting communication through the respective channels so plugged, whereby communication among the several ports via the interconnecting channels may be selectively set up by placing plugs in the appropriate bores for closing off com munication through those channels while leaving the other channels open.
  • the object of the invention is to provide a fluid pressure medium distributing manifold characterized by flexibility of varying the connections between inlets and outlets according to the particular requirements of a plurality of apparatus with which the manifold may be used.
  • the invention comprises a manifold block having a plurality of ports formed therein, any selected number of which may be used as fluid pressure, inlet ports or as fluid pressure outlet ports and a plurality of grooves or channels interconnecting said ports, each of said grooves or channels having an intersecting bore formed therein between the two ends of the channel opening to respective ports, said bores being adapted for receiving plugs, as desired, for interrupting communication through the channels so plugged.
  • FIG. 1 is a horizontal view, in outline, of a manifold block with the sealing face thereof exposed
  • FIG. 2 is an elevational sectional view taken along line lI--Il of FIG. 1 as viewed in the direction indicated by the arrows;
  • FIG. 3 is also a sectional view, similar to FIG. 2, of the manifold block shown in FIG. I, but is assembled relation with a cover plate.
  • a manifold distributor block 1 is provided with a plurality of ports 2, 3, 4, 5 and 6 conveniently located and extending transversely therethrough. Connections to the several ports 2, 3, 4, 5 and 6, either inlet or delivery, are intended to be made on the bottom side, as viewed in FIGS. 2 and 3, of the block 1.
  • the several ports 2, 3, 4, 5 and 6 are interconnected by grooves or channels 7, 8, 9, 10, 11 and 12 formed in the upper side of block 1, as viewed in FIGS. 2 and 3 but as best seen in FIG. 1.
  • Port 2 for example, is connected to port 3 via channel 7, to port 4 via channel 8, to port 6 via channels 8 and 11, etc., so that all ports may be interconnected to each other via the several channels, except as will hereinafter be illustrated.
  • Each of the channels 7, 8, 9, 10, 11 and 12 is intersected by respective transverse bores 13, l4, 15, 16, 17 and 18 disposed intermediate the ends of said channels between the respective ports opening to the ends of said channels.
  • Each of the transverse bores 13, 14, 15, l6, l7 and 18 is slightly larger in diameter than the width and slightly deeper than the respective channel in which it is formed, the former structure being best seen in FIG. 1, and the latter in FIG. 2.
  • plug 19 being shown inserted in bore 14 in channel 8 in FIG. 3.
  • plug 19 which for the intended purpose may be of a resilient material, is in place in bore 14, said plug makes sealing contact at four intersections20, 21, 22 and 23 of the bore with channel 8 to effectively cut off flow communication through said channel, as best seen in FIG. 1.
  • the depth of bore 14 extends below the bottom of channel 8 to thereby permit plug 19 to rest at a level below the bottom of said channel for insuring complete sealing effect.
  • port 4 only is selected as an inlet port to which fluid under pressure is connected and that it is desired to deliver said fluid under pressure to ports 2 and 3 selected as outlet ports to which respective fluid operable devices (not shown) are connected.
  • Plugs similar to plug 19 are inserted in bores l3, l6 and 17, thus permitting flow offluid under pressure from port 4 to ports 2 and. 3 via channels 8 and 9, respectively, independently of each other, since the plug in bore 13 prevents direct communication between said ports 2 and 3.
  • Ports 5 :and 6 are effectively isolated from port 2 by the plugs inserted in bores 16 and 17, it being noted that no plug is necessary in bore 18 since it is immaterial that channel 12 between ports 5 and 6 remains open.
  • a cap 24 is secured to block 1 by suitable means such as bolts (not shown) for which threaded holes 2 are provided.
  • a shallow flat-bottomed depression 26 is formed on the upper side of block 1, as viewed in FIG. 2, in which a sealing gasket 27 conforming in outline with said depression and of such area as to extend over the openings comprising the several ports, bores and channels, is disposed, said sealing gasket being of such thickness as to effectively seal against leakage between said block and cap and among the several ports and channels.
  • Sealing gasket 27 is provided with aperture spaced therein in conformance ,with the disposition pattern of bores 13, 14,15, 16, 17 and 18 to permit insertion of plugs 19, as desired.
  • relief bores or passageways 28, 29, 30 and 31 are provided in block 1 for connecting the under side of said gasket directly to atmosphere, as may best be seen in FIG. 3.
  • a fluid pressure medium distributing manifold comprising:
  • a cap member removably and sealingly secured on said one side of said block for sealing the adjacent ends of said ports and channels against atmosphere.
  • a fluid pressure distributing manifold as set forth in claim 1, wherein:
  • each of said channels has a transverse bore formed intermediate the ends thereof, and
  • said means comprises a plug member insertable in each of any selected number of said transverse bores.
  • a fluid pressure distributing manifold as set forth in claim 2, wherein one end of said transverse bore opens to said one side of said distributor block and the other end bottoms at a level slightly below the bottom of the respective channel in which it is formed.
  • a fluid pressure distributing manifold as set forth in claim 3, further characterized by a sealing gasket interposed between said cap member and said one side i of said distributor block, said sealing gasket having a pressure in the event of failure of the sealing gasket.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Valve Housings (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)

Abstract

A fluid pressure medium distributing manifold having a plurality of ports opening to the surface thereof and interconnected by a plurality of grooves or channels formed in the manifold with respective bores intersecting said grooves, said bores being adapted for receiving air tight plugs for interrupting communication through the respective channels so plugged, whereby communication among the several ports via the interconnecting channels may be selectively set up by placing plugs in the appropriate bores for closing off communication through those channels while leaving the other channels open.

Description

Unite States Patent 1191 Kemner et a1.
1111 3,866,625 1451 Feb. 18,1975
[ MANIFOLD FOR SELECTIVELY DISTRIBUTING A FLUID PRESSURE MEDIUM [75] Inventors: Axel Kemner, Altwarmbuchen; Rudi Conradt, Hemmingen-Westerfeld, both of Germany [73] Assignee: WABCO Westinghouse GmbH,
Hannover, Germany 22 Filed: on. 1, 1973 21 Appl. No.: 402,049
[30] Foreign Application Priority Data 12111.25, 1973 Germany 2303474 [52] U.S. Cl...... 137/269, 137/561 A [51] Int. Cl. Fl6k 11/20 [58] Field of Search 137/271, 269, 608, 833,
137/561 A; 235/201 ME; 251/367, 561
[56] References Cited UNITED STATES PATENTS Brandenberg 137/271 3,658,088 4/1972 Jensen 137/561 A 3,661,166 5/1972 Dickason 3,747,628 7/1973 Holster et al. 4. 3,765,441 10/1973 Chang 137/271 Primary ExaminerMartin P. Schwadron Assistant Examiner-Robert J. Miller Attorney, Agent, or Firm-R. W. Mclntire, Jr.
[57] ABSTRACT A fluid pressure medium distributing manifold having a plurality of ports opening to the surface thereof and interconnected by a plurality of grooves or channels formed in the manifold with respective bores intersecting said grooves, said bores being adapted for re ceiving air tight plugs for interrupting communication through the respective channels so plugged, whereby communication among the several ports via the interconnecting channels may be selectively set up by placing plugs in the appropriate bores for closing off com munication through those channels while leaving the other channels open.
5 Claims, 3 Drawing Figures MANIFOLD FOR SELECTIVELY DISTRIBUTING A FLUID PRESSURE MEDIUM BACKGROUND OF THE INVENTION Although fluid pressure medium distributing manifolds are known, such manifolds usually provide no flexibility with respect to varying the routes of pressure medium distribution within the manifold so as to be able to connect certain inlets to certain oulets compatible with the desired distribution. In other words, each distribution situation requires a different manifold, so that it becomes necessary to have as many different manifolds as there are different requirements or apparatus with which the manifolds are to be used.
SUMMARY OF THE INVENTION The object of the invention is to provide a fluid pressure medium distributing manifold characterized by flexibility of varying the connections between inlets and outlets according to the particular requirements of a plurality of apparatus with which the manifold may be used. I The invention comprises a manifold block having a plurality of ports formed therein, any selected number of which may be used as fluid pressure, inlet ports or as fluid pressure outlet ports and a plurality of grooves or channels interconnecting said ports, each of said grooves or channels having an intersecting bore formed therein between the two ends of the channel opening to respective ports, said bores being adapted for receiving plugs, as desired, for interrupting communication through the channels so plugged.
In the drawing,
FIG. 1 is a horizontal view, in outline, of a manifold block with the sealing face thereof exposed,
FIG. 2 is an elevational sectional view taken along line lI--Il of FIG. 1 as viewed in the direction indicated by the arrows; and
FIG. 3 is also a sectional view, similar to FIG. 2, of the manifold block shown in FIG. I, but is assembled relation with a cover plate.
DESCRIPTION AND OPERATION As shown in FIG. 1, a manifold distributor block 1 is provided with a plurality of ports 2, 3, 4, 5 and 6 conveniently located and extending transversely therethrough. Connections to the several ports 2, 3, 4, 5 and 6, either inlet or delivery, are intended to be made on the bottom side, as viewed in FIGS. 2 and 3, of the block 1. The several ports 2, 3, 4, 5 and 6 are interconnected by grooves or channels 7, 8, 9, 10, 11 and 12 formed in the upper side of block 1, as viewed in FIGS. 2 and 3 but as best seen in FIG. 1. Port 2, for example, is connected to port 3 via channel 7, to port 4 via channel 8, to port 6 via channels 8 and 11, etc., so that all ports may be interconnected to each other via the several channels, except as will hereinafter be illustrated.
Each of the channels 7, 8, 9, 10, 11 and 12 is intersected by respective transverse bores 13, l4, 15, 16, 17 and 18 disposed intermediate the ends of said channels between the respective ports opening to the ends of said channels. Each of the transverse bores 13, 14, 15, l6, l7 and 18 is slightly larger in diameter than the width and slightly deeper than the respective channel in which it is formed, the former structure being best seen in FIG. 1, and the latter in FIG. 2.
Communicationamong the several ports 2, 3, 4, 5 and 6 by selectively inserting plugs in selected ones of the bores 13, 14, 15, l6, l7 and 18 that provides the desired communications, one such. plug 19 being shown inserted in bore 14 in channel 8 in FIG. 3. When plug 19, which for the intended purpose may be of a resilient material, is in place in bore 14, said plug makes sealing contact at four intersections20, 21, 22 and 23 of the bore with channel 8 to effectively cut off flow communication through said channel, as best seen in FIG. 1. Moreover, as was hereinbefore noted, the depth of bore 14 extends below the bottom of channel 8 to thereby permit plug 19 to rest at a level below the bottom of said channel for insuring complete sealing effect.
For purposes of illustrating the manner of operation of the invention, let it be assumed that port 4 only is selected as an inlet port to which fluid under pressure is connected and that it is desired to deliver said fluid under pressure to ports 2 and 3 selected as outlet ports to which respective fluid operable devices (not shown) are connected. Plugs similar to plug 19 are inserted in bores l3, l6 and 17, thus permitting flow offluid under pressure from port 4 to ports 2 and. 3 via channels 8 and 9, respectively, independently of each other, since the plug in bore 13 prevents direct communication between said ports 2 and 3. Ports 5 :and 6 are effectively isolated from port 2 by the plugs inserted in bores 16 and 17, it being noted that no plug is necessary in bore 18 since it is immaterial that channel 12 between ports 5 and 6 remains open.
When the desired number of plugs 19 have been inserted in selected ones of bores l3, 14, 15, 16, 17 and 18 to provide the desired fluid pressure medium distri bution, a cap 24 is secured to block 1 by suitable means such as bolts (not shown) for which threaded holes 2 are provided.
A shallow flat-bottomed depression 26 is formed on the upper side of block 1, as viewed in FIG. 2, in which a sealing gasket 27 conforming in outline with said depression and of such area as to extend over the openings comprising the several ports, bores and channels, is disposed, said sealing gasket being of such thickness as to effectively seal against leakage between said block and cap and among the several ports and channels. Sealing gasket 27 is provided with aperture spaced therein in conformance ,with the disposition pattern of bores 13, 14,15, 16, 17 and 18 to permit insertion of plugs 19, as desired.
In order to prevent shunting of pressurized fluid leakage anomg the several channels in the event of a broken gasket 27, relief bores or passageways 28, 29, 30 and 31 are provided in block 1 for connecting the under side of said gasket directly to atmosphere, as may best be seen in FIG. 3.
Having now described the invention what we claim as new and desire to secure by Letters Patent, is:
1. A fluid pressure medium distributing manifold comprising:
'a. a distributor block having formed therein:
i. a plurality of ports extending transversely through and open to opposite sides of said block, any number of said ports being available as inlet ports and any number being available as outlet ports, and
ii. a plurality of channels of uniform depth openly formed on one side of said opposite sides of said block for interconnecting the ends of said ports opening to said one side;
b. means removably insertable in any selected number of said channels for disrupting communication through the respective channels so selected and therefore between the ports interconnected by said selected channels, and for providing communication between the remaining inlet and outlet ports; and
c. a cap member removably and sealingly secured on said one side of said block for sealing the adjacent ends of said ports and channels against atmosphere.
2. A fluid pressure distributing manifold, as set forth in claim 1, wherein:
a. each of said channels has a transverse bore formed intermediate the ends thereof, and
b. said means comprises a plug member insertable in each of any selected number of said transverse bores.
3. A fluid pressure distributing manifold, as set forth in claim 2, wherein one end of said transverse bore opens to said one side of said distributor block and the other end bottoms at a level slightly below the bottom of the respective channel in which it is formed.
4. A fluid pressure distributing manifold, as set forth in claim 3, further characterized by a sealing gasket interposed between said cap member and said one side i of said distributor block, said sealing gasket having a pressure in the event of failure of the sealing gasket.

Claims (5)

1. A fluid pressure medium distributing manifold comprising: a. a distributor block having formed therein: i. a plurality of ports extending transversely through and open to opposite sides of said block, any number of said ports being available as inlet ports and any number being available as outlet ports, and ii. a plurality of channels of uniform depth openly formed on one side of said opposite sides of said block for interconnecting the ends of said ports opening to said one side; b. means removably insertable in any selected number of said channels for disrupting communication through the respective channels so selected and therefore between the ports interconnected by said selected chAnnels, and for providing communication between the remaining inlet and outlet ports; and c. a cap member removably and sealingly secured on said one side of said block for sealing the adjacent ends of said ports and channels against atmosphere.
2. A fluid pressure distributing manifold, as set forth in claim 1, wherein: a. each of said channels has a transverse bore formed intermediate the ends thereof, and b. said means comprises a plug member insertable in each of any selected number of said transverse bores.
3. A fluid pressure distributing manifold, as set forth in claim 2, wherein one end of said transverse bore opens to said one side of said distributor block and the other end bottoms at a level slightly below the bottom of the respective channel in which it is formed.
4. A fluid pressure distributing manifold, as set forth in claim 3, further characterized by a sealing gasket interposed between said cap member and said one side of said distributor block, said sealing gasket having a plurality of apertures disposed in coinciding location with said transverse bores.
5. A fluid pressure distributing manifold, as set forth in claim 4, wherein said distributor block is provided with a plurality of pressure relief passageways having one end open to atmosphere and the other end opening to the side of said sealing gasket adjacent said one side of said distributor block for providing relief of fluid pressure in the event of failure of the sealing gasket.
US402049A 1973-01-25 1973-10-01 Manifold for selectively distributing a fluid pressure medium Expired - Lifetime US3866625A (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4164236A (en) * 1977-07-21 1979-08-14 Morris Ray E Valve assembly with seat cleaning system
US4488343A (en) * 1982-05-07 1984-12-18 Jacob Kobelt Mounting assembly for fluid actuated components and method for connecting said components thereto
US4537217A (en) * 1982-12-09 1985-08-27 Research Triangle Institute Fluid distributor
US6766830B2 (en) * 2001-09-28 2004-07-27 Parker Hannifin Rak Sa Isolating module for a pneumatic distribution modular block
US20100007057A1 (en) * 2008-07-11 2010-01-14 Jan Klestinec Injection mold manifold and method of using same
US20120305190A1 (en) * 2011-05-31 2012-12-06 Lam Research Corporation Gas distribution system for ceramic showerhead of plasma etch reactor
US20130061967A1 (en) * 2010-05-27 2013-03-14 Graco Minnesota Inc. Piston bore undercut and methods of manufacturing a piston bore undercut for a series progressive divider valve
CN107407302A (en) * 2015-02-25 2017-11-28 克诺尔商用车制动系统有限公司 Pressure medium device with the flowing connection variable based on formation of sealing component

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4011887A (en) * 1976-02-23 1977-03-15 R. E. Raymond Co. Inc. Fluid power control apparatus
DE3729216A1 (en) * 1987-09-02 1989-03-16 Teves Gmbh Alfred HYDRAULIC UNIT
ATE82798T1 (en) * 1987-09-16 1992-12-15 Colt Int Holdings INTEGRATION BLOCK.
FR2663402B1 (en) * 1990-06-14 1992-10-09 Wabco Westinghouse DEVICE FOR ASSEMBLING AND COUPLING VALVES.
DE102014019116A1 (en) * 2014-12-19 2016-06-23 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Pneumatic means with variable due to form seals flow connections

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3407834A (en) * 1966-08-05 1968-10-29 Karl A. Brandenberg Fluid logic circuit mechanism
US3658088A (en) * 1970-06-17 1972-04-25 Ibm Packaging system for pneumatic logic
US3661166A (en) * 1970-01-12 1972-05-09 Garlock Inc Fluid logic control system
US3747628A (en) * 1971-02-17 1973-07-24 Philips Corp Fluidic function module for use in a system for constructing fluidic circuits
US3765441A (en) * 1972-03-22 1973-10-16 Sun Oil Co Pennsylvania Fluid manifolding arrangement

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3407834A (en) * 1966-08-05 1968-10-29 Karl A. Brandenberg Fluid logic circuit mechanism
US3661166A (en) * 1970-01-12 1972-05-09 Garlock Inc Fluid logic control system
US3658088A (en) * 1970-06-17 1972-04-25 Ibm Packaging system for pneumatic logic
US3747628A (en) * 1971-02-17 1973-07-24 Philips Corp Fluidic function module for use in a system for constructing fluidic circuits
US3765441A (en) * 1972-03-22 1973-10-16 Sun Oil Co Pennsylvania Fluid manifolding arrangement

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4164236A (en) * 1977-07-21 1979-08-14 Morris Ray E Valve assembly with seat cleaning system
US4488343A (en) * 1982-05-07 1984-12-18 Jacob Kobelt Mounting assembly for fluid actuated components and method for connecting said components thereto
US4537217A (en) * 1982-12-09 1985-08-27 Research Triangle Institute Fluid distributor
US6766830B2 (en) * 2001-09-28 2004-07-27 Parker Hannifin Rak Sa Isolating module for a pneumatic distribution modular block
US20100007057A1 (en) * 2008-07-11 2010-01-14 Jan Klestinec Injection mold manifold and method of using same
US8939176B2 (en) * 2010-05-27 2015-01-27 Graco Minnesota Inc. Piston bores and methods of manufacturing piston bores for a series progressive divider valve
US20130061967A1 (en) * 2010-05-27 2013-03-14 Graco Minnesota Inc. Piston bore undercut and methods of manufacturing a piston bore undercut for a series progressive divider valve
US20130118603A1 (en) * 2010-05-27 2013-05-16 Graco Minnesota Inc. Piston bores and methods of manufacturing piston bores for a series progressive divider valve
US9062783B2 (en) * 2010-05-27 2015-06-23 Graco Minnesota Inc. Piston bore undercut and methods of manufacturing a piston bore undercut for a series progressive divider valve
AU2011258889B2 (en) * 2010-05-27 2015-06-25 Graco Minnesota Inc. Piston bore undercut and methods of manufacturing a piston bore undercut for a series progressive divider valve
US20120305190A1 (en) * 2011-05-31 2012-12-06 Lam Research Corporation Gas distribution system for ceramic showerhead of plasma etch reactor
US9245717B2 (en) * 2011-05-31 2016-01-26 Lam Research Corporation Gas distribution system for ceramic showerhead of plasma etch reactor
US10366865B2 (en) * 2011-05-31 2019-07-30 Lam Research Corporation Gas distribution system for ceramic showerhead of plasma etch reactor
CN107407302A (en) * 2015-02-25 2017-11-28 克诺尔商用车制动系统有限公司 Pressure medium device with the flowing connection variable based on formation of sealing component
US10337534B2 (en) 2015-02-25 2019-07-02 Knorr-Bremse Systeme Fuer Nutzfahrzeuge Gmbh Pressure medium device comprising fluidic connections which are variable on the basis of molded seals
CN107407302B (en) * 2015-02-25 2019-08-20 克诺尔商用车制动系统有限公司 Pressure medium device with the flowing connection variable based on formation of sealing component

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DE2303474C3 (en) 1980-08-21
DE2303474B2 (en) 1979-12-13
DE2303474A1 (en) 1974-08-01

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