US3749528A - Vacuum pumps - Google Patents

Vacuum pumps Download PDF

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Publication number
US3749528A
US3749528A US00127951A US3749528DA US3749528A US 3749528 A US3749528 A US 3749528A US 00127951 A US00127951 A US 00127951A US 3749528D A US3749528D A US 3749528DA US 3749528 A US3749528 A US 3749528A
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United States
Prior art keywords
pump
rotor
shaft
bearing
accordance
Prior art date
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Expired - Lifetime
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US00127951A
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English (en)
Inventor
M Rousseau
R Berthoumieux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Safran Aircraft Engines SAS
Original Assignee
Commissariat a lEnergie Atomique CEA
SNECMA SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of US3749528A publication Critical patent/US3749528A/en
Assigned to ARTHUR PFEIFFER VAKUUMTECHNIK WETZLAR GMBH, reassignment ARTHUR PFEIFFER VAKUUMTECHNIK WETZLAR GMBH, ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: COMMISSARIAT A L'ENERGIE ATOMIQUE, SOCIETE NATIONALE D'ETUDE ET DE CONSTRUCTION DE MOTEURS D'AVIATION
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Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C23/00—Bearings for exclusively rotary movement adjustable for aligning or positioning
    • F16C23/06—Ball or roller bearings
    • F16C23/08—Ball or roller bearings self-adjusting
    • F16C23/082—Ball or roller bearings self-adjusting by means of at least one substantially spherical surface
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0402—Bearings not otherwise provided for using magnetic or electric supporting means combined with other supporting means, e.g. hybrid bearings with both magnetic and fluid supporting means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/04—Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
    • F16C35/06—Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
    • F16C35/07—Fixing them on the shaft or housing with interposition of an element
    • F16C35/077—Fixing them on the shaft or housing with interposition of an element between housing and outer race ring

Definitions

  • FIG. 2 is a detail view on a large scale showing the lower portion of FIG. 1 .and in -particular the thrustbea'ring
  • FIG. 3 is a view on a large scale showing the upper portion of FIG. 1 and in particular the magnetic bearing for centering the shaft
  • FIG. 4 which is similar to FIG. 2 shows a second embodimentof the invention
  • FIGS. 5 and 6 which are also similar to FIG. 2 show two further embodiments.
  • turbomolecular' pump which is illustrated; in. FIGS. 1 and 3 comprises 'a'housing 10 formedof a'nurn ber of assembled parts and having an upper opening 11 which is connected to a pipe for drawing the gases from the enclosure to be evacuated (not shown in the figures) and a lower opening 12 which provides'a connection with a pipe 14 for discharging to a primary vacuum source (vane pump or oil vapor pump, for example).
  • a primary vacuum source vane pump or oil vapor pump, for example.
  • rotor 16 having a vertical axis is placed within the cylindrical pump housing and providesa separation between the suction and discharge pipes.
  • Said rotor is made up of stacked discs 18 which are mounted on a sleeve 20 magnetic bearings for supporting the rotor and center- I ihg it.
  • the regulation of such a system requires an elabrate serv l p- SUMMIARY t It is an objec o the invention to. provide a vertical aids vacuu pump in. which the mechanism supporting nd. center ng the r tat ng assembly is improved. with e pect t the prior art. mechanisms. particularly in that i mp e. and ruggeddesign and provides unsecy pe ormance. and long-lite.
  • the pump housing is also provided with stacked circular discs 28 which are interposed between the rotary discs 18 and clamped between an annular shoulder-30 of the pump housing and resilient washers 32, the pressure applied by said washers being adjustable by means of adjusting'screws 34 which produce action on thrust members 36- (as shownin- FIG. 2.).
  • the longitudinal and radial clearances which are necessary for operation are provided between the rotary discs 18 and the stationary discs 28.
  • the rotor is supported vertically by a thrust-bearing 38 which? would permit angular displacement of the rotor if this latter were alone (FIGS. 1- and 2) and is centered by a mag netic bearing 40 (shown in FIGS. I and 3).
  • the thrust-bearing38 which is illustrated in FIG. Zis interposed between: ashat't 39' whichforms a. downward extension of the sleeve 20. and a casing 42'which is secured to the base 44 of the pumphousing 10'by means of screws 46.
  • Said thrust-bearing comprises a: ballbearingmade up of an; inner ring 48 which isattached tothelower. end of the shaft 39, a stationary outer ring 52 and? balls 50 (which could” in any case be replaced by rollers or needles).
  • the stationary ring; 52" is connee-ted to the casing 42' by means. of a ball-joint coupling which permits: oscillation ofthe shaft 39 abouta point located; attheintersection of? its.
  • ball-joint coupling comprises a semi-spherical. member in; which isforcibly, fitted. the outer ring- 5-2and1two half-cages56 which are secured. in position. between circlips 58 said.
  • balli-joinh coupling has-only a: small: degree of play and the: contacting parts are preferably impregnated with lubricant. Although it 'doesnot usuallyprovemecessary totake this. precaution,v the? semi-spherical member 54 cambesecured: against rotation. in. orderto: prevent this lattes from: being driven; by.- the: shaft across v the ballbearing; 'Ehe; magnetic: centeringl bearing. 403 which? isillustrated: in: FIGS. 1' and: 3k is. disposed". betweena the cover '60 (in which is formed the suction opening ll) and the socket 22.
  • Said bearing comprises a portion which is secured to the cover 60 and a rotary portion which is attached to the socket.
  • the portion which is secured to the cover comprises a flange plate 62 (as shown in FIG. 3) which can be rigidly fixed to the cover 60 by means of threaded rods 64.
  • the terminal portions of a number of small columns 66 which are parallel to the axis of the rotor and may be three in number, for example, are fixed at uniform intervals around the periphery of the flange plate 62.
  • the other end of each small column is attached to a box 68 which is formed of a plurality of assembled components.
  • the main portion of the box 68 which is of cylindrical shape contains a block 70 of material having high magnetic permeability in which are placed magnets 72.
  • the magnetic flux of said magnets is closed in a loop by means ofa magnetic circuit which comprises in addition to the block 70 two magnetic plates 74 and 76 provided with oppositely-facing centering teeth (tha plate 76 forms the cover of
  • the rotary portion of the centering bearing 40 is constituted by a magnetic plate 78 provided on both faces with teeth which are intended to be placed in alignment with the teeth of the magnetic plates 74 and 76. Said rotary plate 78 is keyed by means of a screw 80 on an extension 82 of the socket 22.
  • the toothed magnetic bearings constitute elements which are now well known and the constructional make-up and operation of these latter do not call for any extended description here only the method of assembly of the centering bearing 40 will accordingly be mentioned.
  • the small columns 66 which are formed of material having a high degree of elasticity (non-magnetic spring steel, for example) facilitate transition to the critical speeds of the rotor and compensate to a certain extent for the low degree of stiffness of the magnetic bearings.
  • a beater 84 which is shown in chain-dotted lines in FIG. 1 can be substituted for the columns 66 for the purpose of damping oscillations and is placed within the sleeve.
  • the magnetic bearing and the columns 66 exert a restoring force on the rotor in the centered position and damping of angular oscillations is carried out at least to a partial extent as a result of the friction which is set up between the half-cages 56 and the semi-spherical member 54 of the ball-joint coupling. As shown in FIG. 3,
  • each elastic element comprises a spring 86 interposed between a stud 88 which is applied against the box and an adjusting screw 90.
  • these elements are necessary only when the rotor is of large size. In the. case of pumps of small size, said elements should preferably not be provided particularly as consideration must be given to the p tential danger of jamming resulting from degassing of the constituent materials of said elements which work under a secondary vacuum (pressure within the range of and 10" torr).
  • the motor which serves to drive the rotor is placed between the thrust-bearing and the stack of discs and therefore works under a primary vacuum.
  • the motor which is illustrated in FIGS. 1 and 2 comprises a stator winding 92 carried by the casing 42 and supplied with current through a sealed lead-in bushing 96 and a rotor winding 94 which is mounted on the shaft 39.
  • the embodiment which is illustrated in FIG. 2 comprises a circulation system 98 for cooling the casing 42 and the stator 92.
  • the circulation system 98 serves to condense the vapor on the casing 42 (said vapor being liable to emanate from the oil vapor pump which producesthe primary vacuum) and thus has a contributory function in maintaining the purity of the secondary vacuum.
  • a turbomolecular pump in accordance with the foregoing description has been constructed and has rotated for a period of several hundred hours at its normal speed of 27,000 rpm without any incident. It has also been possible to increase the pump speed to 30,000 rpm without giving rise to any major difficulty.
  • FIGS. 1 and i 2 the angular displacements of the ball-joint coupling may possibly be braked as a result of friction forces developed between the moving parts.
  • the embodiment which is illustrated in FIG. 4 differs primarily from the preceding form of construction in that provision is made for an elastic restoring device which serves to return the shaft to its centered'position and which is associated with the ball-joint coupling.
  • FIG. 4 in which the components corresponding to those which have already been illustrated in FIG. 2 are designated by the same reference numerals to which is assigned the prime index, there is again shown a pump housing 10' whose end-wall 44' carries a casing 42' which is provided with a cooling circulation system 98'.
  • the shaft 39 which forms a downward extension of the sleeve 20 carries the inner ring 48 of a ball-bearing, the outer ring 52' of which is clamped within a semi-spherical member 54.
  • said semispherical member is imprisoned between two halfcages 56.
  • the member 54' is provided with a tubular tail-piece 100.
  • a centering and damping device constituted by a toric ring 102 of deformable material (such as synthetic rubber, for example), said ring being placed within a circular groove of an annular member 103 which is secured to the casing 42', tends to bring' the tail-piece back to an orientation in which the axis of this latter coincides with the normal axis of rotation of the shaft 39'.
  • deformable material such as synthetic rubber, for example
  • the thrust-bearing comprises two balLbearings between which the axial load is distributed.
  • the inner rings 48" and 104 of the two ball-bearings are passed over the shaft 39".
  • the ring 48" bears on an annular shoulder of the shaft and the ring 104 is applied by a lock-nut 106 against a tubular spacer member 108 which determines the distance between the two bearings.
  • the outer rings 52" and 110 of the ball-bearings are carried by the semi-spherical member 54".
  • the ring 52" is secured in position between an internal shoulder and a threaded sleeve 112.
  • the lower ring 110 is slidably fitted within a bore of the semi-spherical member 54" and is supported by a spring 114, the compression of which is set by means of a threaded sleeve 116 at a value such that the lower ball-being carries approximately one-half of theaxial loads.
  • the bearing which is illustrated in FIG. 5 comprises a circulation system for lubrication of the' ball-joint under pressure said system comprises a supply duct 118 which extends through the pump housing and has its opening in a toric distribution recess 119 formed in ber 54" also supplies oil to the two ball-bearings and ensures lubrication of these latter. Oil losses flow into a sump 122 (only the top portion of which is shown in FIG. and can be collected in said sump.
  • shaft 39" is adapted to carry a deflector 124 which is located beneath the rotor 94" of the electric motor which serves to drive the shaft in rotation, with the result that any oil which may creep upwards along said shaft 39" is returned downwards by said deflector.
  • the ball-type coupling or universal-joint assembly which permits oscillation of the shaft is constituted by a bearing consisting of a double row-of balls.
  • a bearing consisting of a double row-of balls.
  • the outer rings 52" and 110' of said ball-bearings are carried by an annular member 54" which is connected to an end-plate 124 of the pump housing by means of the universal joint assembly.
  • Said assembly is constituted by a ball-bearing comprising an inner cage 126 which is locked in position by means of a nut 126 against a shouldered portion of the annular member 54", a cage 130 which is locked in position against an annular shoulder of the end-plate 124 by means of a threaded retaining ring 131 and a row of balls disposed in staggered relation.
  • the ball-race profiles are such as to permit a slight angular displacement of the outer cage 130 with respect to the inner cage 126.
  • the magnetic bearing can be of a type other than that which has been described and could consist of a more conventional arrangement instead of magnets in the form of separate studs.
  • the small columns could be omitted or replaced by shorter tie-rods in the event that damping of oscillations is carried out by means of different arrangements.
  • a vacuum pump for producing and maintaining a pressure difference between an outlet adapted to be connected to a primary vacuum source and an inlet, said vacuum pump comprising a housing provided with said inlet and outlet a rotor carried by a vertical shaft and separating said inlet and outlet motor means under said rotor for rotating said shaft and means for supporting and-centering said shaft, including a mechanical axial thrust-bearing located under said rotor and constructed and arranged to permit angular movement of said shaft about said thrust-bearing means and centering magnetic bearing means located above said rotor and centering the shaft with respect to said housing.
  • said thrust-bearing means comprises a bearing ring secured to the shaft, a ring non-rotatably connected to the pump housing by a swivel connection and bearing members between said rings.
  • a pump in accordance with claim 2 having first and second bearing rings secured to the shaft and separated by a spacer member, first and second stationary rings and a universal-joint assembly providing a swivel connection between said stationary rings and the easing, said bearing rings being formed with raceways located in register with raceways formed in said station ary rings.
  • said mechanical thrust-bearing comprises a bearing ring secured to the shaft and formed with raceways, a stationary bearing ring secured to the casing and formed with raceways, bearing elements disposed between the rings and rolling on said raceways, said element and race ways being so constructed asto permit angular displacement of said rings with respect to each other.
  • said magnetic bearing means comprises a rotary plate se cured to the shaft, two stationary plates, each of the two end faces of said rotary plate having centering teeth which cooperate with similar teeth carried by said stationary plates, and a box secured to said housing, carrying said stationary plates and provided with magnets for producing a magnetic flux which is closed by air-gaps between oppositely-facing teeth of said rotary plate and said stationary plates.
  • a pump in accordance with claim 7, having a vertical rod, a weight at the lower end of said rod and means for securing the upper end of said rod, axially in said shaft at a location close to the magnetic bearing means for counteracting the oscillations of the shaft.
  • a pump in accordance with claim 2 having means for maintaining an oil film between the components of the universal-joint assembly.
  • a pump in accordance with claim 1 having a universal joint assembly comprising a stationary member secured to the casing, a swiveling member carrying said thrust bearing means and having a tail-piece, and resilient means between said tail-pieceand housing adapted to damp angular oscillations of said shaft.
  • a vacuum pump in accordance with claim I having a turbomolecular pump rotor comprising a stack of disks, wherein said thrust-bearing is located beneath the rotor and in the primary vacuum whilst said magnetic bearing means is above thr rotor in a secondary vacuum.
  • a vertical turbomolecular pump comprising a stationary housing provided with an inlet and an outlet a driving motor having a stationary part and a part rotatable about a vertical axis a turbomolecular pump rotor located coaxially with said motor, separating said part, with respect to said housing, including magnetic inlet and outlet a transmission shaft drivably connectcentering means located above said rotor and mechaniing said rotor and rotatable part, and means for supcal thrust bearing means located under said rotor. porting and centering said rotor, shaft and rotating
US00127951A 1970-04-01 1971-03-25 Vacuum pumps Expired - Lifetime US3749528A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7011571A FR2086525A5 (de) 1970-04-01 1970-04-01

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US3749528A true US3749528A (en) 1973-07-31

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US00127951A Expired - Lifetime US3749528A (en) 1970-04-01 1971-03-25 Vacuum pumps

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US (1) US3749528A (de)
BE (1) BE765041A (de)
CA (1) CA947733A (de)
CH (1) CH536940A (de)
FR (1) FR2086525A5 (de)
GB (1) GB1304989A (de)
NL (1) NL166100C (de)

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3853429A (en) * 1972-09-14 1974-12-10 Eheim G Motor pump combination
DE2349033A1 (de) * 1973-09-29 1975-04-10 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
US3890019A (en) * 1972-03-20 1975-06-17 Padana Ag Magnetic bearings
US3947193A (en) * 1973-03-30 1976-03-30 Compagnie Industrielle Des Telecommunications Cit-Alcatel Molecular vacuum pump structure
US4036565A (en) * 1974-09-27 1977-07-19 Balzers Patent Und Beteiligungs Ag Pump construction
US4116592A (en) * 1976-08-20 1978-09-26 Viktor Yakovlevich Cherny Turbomolecular high-vacuum pulp
US4309143A (en) * 1976-11-29 1982-01-05 Kernforschungsanlage Julich Gmbh Vane-disk type turbomolecular pump and etching method of manufacture of vane disks
US4405286A (en) * 1982-01-21 1983-09-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actively suspended counter-rotating machine
DE3341716A1 (de) * 1982-11-19 1984-05-24 Seiko Instr & Electronics Turbo-molekularpumpe
US4502832A (en) * 1982-02-11 1985-03-05 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Turbo-molecular pump
US5772395A (en) * 1995-12-12 1998-06-30 The Boc Group Plc Vacuum pumps
US5977677A (en) * 1996-06-26 1999-11-02 Allison Engine Company Combination bearing for gas turbine engine
JP2001271786A (ja) * 2000-03-02 2001-10-05 Pfeiffer Vacuum Gmbh ターボ分子ポンプ
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
US20030052558A1 (en) * 2001-09-17 2003-03-20 Brackett Norman C. Repulsive lift systems, flywheel energy storage systems utilizing such systems and methods related thereto
US20030184169A1 (en) * 2002-03-29 2003-10-02 Fadler Richard J. Sleeve and bearing that locate a rotating component and a machined surface of a rotary device
US6727616B1 (en) * 2000-11-08 2004-04-27 Christopher W. Gabrys Flywheel energy storage system with quill stabilizer
US20140186169A1 (en) * 2011-09-14 2014-07-03 Roger L. Bottomfield Turbine Cap For Turbo-Molecular Pump
US20140271174A1 (en) * 2013-03-14 2014-09-18 Roger L. Bottomfield Turbine Cap for Turbo-Molecular Pump
EP2746587A3 (de) * 2012-12-20 2014-10-01 Pfeiffer Vacuum Gmbh Vakuumpumpe
US20150345494A1 (en) * 2014-06-03 2015-12-03 Shimadzu Corporation Vacuum pump and method of manufacturing vacuum pump
US11274671B2 (en) 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2378487A1 (fr) * 1977-02-01 1978-08-25 Lamour Danielle Appareil pour assurer conjointement le reveil et la preparation d'une boisson chaude ou produit similaire
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
EP0209625B1 (de) * 1985-07-09 1990-10-24 JAMES HOWDEN & COMPANY LIMITED Gasumwälzanlage
DE4314419A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit Lagerabstützung
CN116692401B (zh) * 2023-07-31 2023-10-27 原平市兴胜机械制造有限公司 一种带式稀油润滑滚筒

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US1402053A (en) * 1919-04-07 1922-01-03 Pyle National Co Elastic-fluid turbine
US2436939A (en) * 1943-10-21 1948-03-02 Hoover Co Magnetic coupling and bearing
CA530369A (en) * 1953-02-24 1956-09-11 E. Shafer Julius Bearing mounting
US3107310A (en) * 1960-08-03 1963-10-15 Const Mecanique Magnetic coupling having a magnetic bearing
FR1475765A (fr) * 1966-01-31 1967-04-07 Snecma Perfectionnements aux appareils à arbre vertical tournant à grande vitesse

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1402053A (en) * 1919-04-07 1922-01-03 Pyle National Co Elastic-fluid turbine
US2436939A (en) * 1943-10-21 1948-03-02 Hoover Co Magnetic coupling and bearing
CA530369A (en) * 1953-02-24 1956-09-11 E. Shafer Julius Bearing mounting
US3107310A (en) * 1960-08-03 1963-10-15 Const Mecanique Magnetic coupling having a magnetic bearing
FR1475765A (fr) * 1966-01-31 1967-04-07 Snecma Perfectionnements aux appareils à arbre vertical tournant à grande vitesse

Cited By (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3890019A (en) * 1972-03-20 1975-06-17 Padana Ag Magnetic bearings
US3853429A (en) * 1972-09-14 1974-12-10 Eheim G Motor pump combination
US3947193A (en) * 1973-03-30 1976-03-30 Compagnie Industrielle Des Telecommunications Cit-Alcatel Molecular vacuum pump structure
DE2349033A1 (de) * 1973-09-29 1975-04-10 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
US4023920A (en) * 1973-09-29 1977-05-17 Leybold-Heraeus Gmbh & Co. Kg Turbomolecular vacuum pump having a magnetic bearing-supported rotor
US4036565A (en) * 1974-09-27 1977-07-19 Balzers Patent Und Beteiligungs Ag Pump construction
US4116592A (en) * 1976-08-20 1978-09-26 Viktor Yakovlevich Cherny Turbomolecular high-vacuum pulp
US4309143A (en) * 1976-11-29 1982-01-05 Kernforschungsanlage Julich Gmbh Vane-disk type turbomolecular pump and etching method of manufacture of vane disks
US4405286A (en) * 1982-01-21 1983-09-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actively suspended counter-rotating machine
US4502832A (en) * 1982-02-11 1985-03-05 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Turbo-molecular pump
DE3341716A1 (de) * 1982-11-19 1984-05-24 Seiko Instr & Electronics Turbo-molekularpumpe
US5772395A (en) * 1995-12-12 1998-06-30 The Boc Group Plc Vacuum pumps
US5977677A (en) * 1996-06-26 1999-11-02 Allison Engine Company Combination bearing for gas turbine engine
US6953317B2 (en) 1997-06-27 2005-10-11 Ebara Corporation Turbo-molecular pump
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
EP1130269A3 (de) * 2000-03-02 2002-10-30 Pfeiffer Vacuum GmbH Turbomolekularpumpe
JP2001271786A (ja) * 2000-03-02 2001-10-05 Pfeiffer Vacuum Gmbh ターボ分子ポンプ
US6454525B2 (en) * 2000-03-02 2002-09-24 Pfeiffer Vacuum Gmbh Turbomolecular pump
US6727616B1 (en) * 2000-11-08 2004-04-27 Christopher W. Gabrys Flywheel energy storage system with quill stabilizer
US20030052558A1 (en) * 2001-09-17 2003-03-20 Brackett Norman C. Repulsive lift systems, flywheel energy storage systems utilizing such systems and methods related thereto
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US20030184169A1 (en) * 2002-03-29 2003-10-02 Fadler Richard J. Sleeve and bearing that locate a rotating component and a machined surface of a rotary device
US20140186169A1 (en) * 2011-09-14 2014-07-03 Roger L. Bottomfield Turbine Cap For Turbo-Molecular Pump
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US11274671B2 (en) 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump
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Also Published As

Publication number Publication date
NL7104322A (de) 1971-10-05
BE765041A (fr) 1971-08-16
FR2086525A5 (de) 1971-12-31
CH536940A (fr) 1973-05-15
CA947733A (en) 1974-05-21
NL166100B (nl) 1981-01-15
NL166100C (nl) 1981-06-15
GB1304989A (de) 1973-01-31

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