US3600798A - Process for fabricating a panel array of electromechanical light valves - Google Patents

Process for fabricating a panel array of electromechanical light valves Download PDF

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Publication number
US3600798A
US3600798A US801971A US3600798DA US3600798A US 3600798 A US3600798 A US 3600798A US 801971 A US801971 A US 801971A US 3600798D A US3600798D A US 3600798DA US 3600798 A US3600798 A US 3600798A
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United States
Prior art keywords
array
light
valve
column
light valves
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Expired - Lifetime
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US801971A
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English (en)
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Ray H Lee
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Texas Instruments Inc
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Texas Instruments Inc
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    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
    • G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

Definitions

  • FIG. 3 there is shown an addressing scheme for a matrix of light valves arranged in rows b b ...b,,, and columns 11,, a ...a,, to be subsequently coupled to a video signal source 40 through a writing resistor 42 by means of single pole single throw switches.
  • Each valve branch includes a light valve 44 having a capacitor 46, an isolating element 48, and a resistor 50.
  • the switch in column a, and the switch in row b are coupled to one side or the other of the source.
  • the diode 48 in all the light valves 44, except the one coupled to both terminals of the source 40, will be reversed biased thereby isolating these valves.
  • the upper section 52 and the lower section 54 could be joined to form a monochromatic display.
  • additional processing is required.
  • a negative resist colorized by mixing with a dye or pigment is applied to the sections 76a, 76b and 76c. This colorized negative resist is exposed through the glass side and developed to produce one of the desired color filters of the three primary colors, red, blue, or green. This same process is repeated for each of the other two primary colors.
  • sections 78a, 79b and 780 are coated with a colorized negative resist that is exposed through the glass side and developed.
  • the sections 80a, 80b and 800 are coated with a colorized negative resist. This resist is again exposed through the glass side and developed to form the third color filter for a tricolor display.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Illuminated Signs And Luminous Advertising (AREA)
US801971A 1969-02-25 1969-02-25 Process for fabricating a panel array of electromechanical light valves Expired - Lifetime US3600798A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US80197169A 1969-02-25 1969-02-25

Publications (1)

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US3600798A true US3600798A (en) 1971-08-24

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Application Number Title Priority Date Filing Date
US801971A Expired - Lifetime US3600798A (en) 1969-02-25 1969-02-25 Process for fabricating a panel array of electromechanical light valves

Country Status (5)

Country Link
US (1) US3600798A (enrdf_load_stackoverflow)
JP (1) JPS4923635B1 (enrdf_load_stackoverflow)
DE (1) DE1964836A1 (enrdf_load_stackoverflow)
FR (1) FR2030876A5 (enrdf_load_stackoverflow)
GB (1) GB1261960A (enrdf_load_stackoverflow)

Cited By (105)

* Cited by examiner, † Cited by third party
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US3743773A (en) * 1972-03-31 1973-07-03 Zenith Radio Corp Image display panel
US4229732A (en) * 1978-12-11 1980-10-21 International Business Machines Corporation Micromechanical display logic and array
DE3108240A1 (de) * 1980-03-11 1982-04-29 Centre Electronique Horloger S.A., Neuchâtel "miniatur-anzeigeanordnung"
US4564836A (en) * 1981-07-02 1986-01-14 Centre Electronique Horloger S.A. Miniature shutter type display device with multiplexing capability
WO1986001625A1 (en) * 1984-08-21 1986-03-13 Simpson George R Array of electrostatically actuated binary devices and methods of manufacture
US4662746A (en) * 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US4710732A (en) * 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US4736202A (en) * 1984-08-21 1988-04-05 Bos-Knox, Ltd. Electrostatic binary switching and memory devices
US4794370A (en) * 1984-08-21 1988-12-27 Bos-Knox Ltd. Peristaltic electrostatic binary device
US4956619A (en) * 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
US5142405A (en) * 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
EP0616238A1 (en) * 1993-03-16 1994-09-21 Texas Instruments Incorporated Package for a semiconductor device
EP0692728A2 (en) 1994-07-13 1996-01-17 Texas Instruments Incorporated Improvements in and relating to spatial light modulators
EP0712022A2 (en) 1994-11-14 1996-05-15 Texas Instruments Incorporated Improvements in or relating to micromechanical devices
US5579151A (en) * 1995-02-17 1996-11-26 Texas Instruments Incorporated Spatial light modulator
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5696619A (en) * 1995-02-27 1997-12-09 Texas Instruments Incorporated Micromechanical device having an improved beam
US5808797A (en) * 1992-04-28 1998-09-15 Silicon Light Machines Method and apparatus for modulating a light beam
US5841579A (en) * 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
US5926309A (en) * 1997-04-18 1999-07-20 Memsolutions, Inc. Light valve target comprising electrostatically-repelled micro-mirrors
US5982553A (en) * 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
US5986391A (en) * 1998-03-09 1999-11-16 Feldman Technology Corporation Transparent electrodes
US5991066A (en) * 1998-10-15 1999-11-23 Memsolutions, Inc. Membrane-actuated charge controlled mirror
US6028696A (en) * 1998-10-15 2000-02-22 Memsolutions, Inc. Charge controlled mirror with improved frame time utilization and method of addressing the same
US6031657A (en) * 1998-10-15 2000-02-29 Memsolutions, Inc. Membrane-actuated charge controlled mirror (CCM) projection display
US6034810A (en) * 1997-04-18 2000-03-07 Memsolutions, Inc. Field emission charge controlled mirror (FEA-CCM)
US6038058A (en) * 1998-10-15 2000-03-14 Memsolutions, Inc. Grid-actuated charge controlled mirror and method of addressing the same
US6088102A (en) * 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
US6101036A (en) * 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6123985A (en) * 1998-10-28 2000-09-26 Solus Micro Technologies, Inc. Method of fabricating a membrane-actuated charge controlled mirror (CCM)
US6130770A (en) * 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
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US20010022382A1 (en) * 1998-07-29 2001-09-20 Shook James Gill Method of and apparatus for sealing an hermetic lid to a semiconductor die
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US6356378B1 (en) 1995-06-19 2002-03-12 Reflectivity, Inc. Double substrate reflective spatial light modulator
US6396619B1 (en) 2000-01-28 2002-05-28 Reflectivity, Inc. Deflectable spatial light modulator having stopping mechanisms
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US6813053B1 (en) 2000-05-19 2004-11-02 The Regents Of The University Of California Apparatus and method for controlled cantilever motion through torsional beams and a counterweight
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Cited By (160)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3743773A (en) * 1972-03-31 1973-07-03 Zenith Radio Corp Image display panel
US4229732A (en) * 1978-12-11 1980-10-21 International Business Machines Corporation Micromechanical display logic and array
DE3108240A1 (de) * 1980-03-11 1982-04-29 Centre Electronique Horloger S.A., Neuchâtel "miniatur-anzeigeanordnung"
US4564836A (en) * 1981-07-02 1986-01-14 Centre Electronique Horloger S.A. Miniature shutter type display device with multiplexing capability
US4710732A (en) * 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
WO1986001625A1 (en) * 1984-08-21 1986-03-13 Simpson George R Array of electrostatically actuated binary devices and methods of manufacture
US4736202A (en) * 1984-08-21 1988-04-05 Bos-Knox, Ltd. Electrostatic binary switching and memory devices
US4794370A (en) * 1984-08-21 1988-12-27 Bos-Knox Ltd. Peristaltic electrostatic binary device
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
US4662746A (en) * 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US4956619A (en) * 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
US5142405A (en) * 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5808797A (en) * 1992-04-28 1998-09-15 Silicon Light Machines Method and apparatus for modulating a light beam
EP0616238A1 (en) * 1993-03-16 1994-09-21 Texas Instruments Incorporated Package for a semiconductor device
EP0692728A2 (en) 1994-07-13 1996-01-17 Texas Instruments Incorporated Improvements in and relating to spatial light modulators
EP0712022A2 (en) 1994-11-14 1996-05-15 Texas Instruments Incorporated Improvements in or relating to micromechanical devices
US5579151A (en) * 1995-02-17 1996-11-26 Texas Instruments Incorporated Spatial light modulator
US5696619A (en) * 1995-02-27 1997-12-09 Texas Instruments Incorporated Micromechanical device having an improved beam
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5841579A (en) * 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
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US7023607B2 (en) 1995-06-19 2006-04-04 Reflectivity, Inc Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
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US7027207B2 (en) 1995-06-19 2006-04-11 Reflectivity, Inc Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6538800B2 (en) 1995-06-19 2003-03-25 Reflectivity, Inc. Reflective spatial light modulator with deflectable elements formed on a light transmissive substrate
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US20040141224A1 (en) * 1995-06-19 2004-07-22 Huibers Andrew G. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6975444B2 (en) 1995-06-19 2005-12-13 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US20050168795A1 (en) * 1995-06-19 2005-08-04 Huibers Andrew G. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6947200B2 (en) 1995-06-19 2005-09-20 Reflectivity, Inc Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6798561B2 (en) 1995-06-19 2004-09-28 Reflectivity, Inc Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US7403324B2 (en) 1995-06-19 2008-07-22 Texas Instruments Incorporated Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6356378B1 (en) 1995-06-19 2002-03-12 Reflectivity, Inc. Double substrate reflective spatial light modulator
US5982553A (en) * 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
US5926309A (en) * 1997-04-18 1999-07-20 Memsolutions, Inc. Light valve target comprising electrostatically-repelled micro-mirrors
US6034810A (en) * 1997-04-18 2000-03-07 Memsolutions, Inc. Field emission charge controlled mirror (FEA-CCM)
US6088102A (en) * 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
US5986391A (en) * 1998-03-09 1999-11-16 Feldman Technology Corporation Transparent electrodes
US6271808B1 (en) 1998-06-05 2001-08-07 Silicon Light Machines Stereo head mounted display using a single display device
US6130770A (en) * 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
US6101036A (en) * 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6215579B1 (en) 1998-06-24 2001-04-10 Silicon Light Machines Method and apparatus for modulating an incident light beam for forming a two-dimensional image
US6764875B2 (en) 1998-07-29 2004-07-20 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
US20010022382A1 (en) * 1998-07-29 2001-09-20 Shook James Gill Method of and apparatus for sealing an hermetic lid to a semiconductor die
US6872984B1 (en) 1998-07-29 2005-03-29 Silicon Light Machines Corporation Method of sealing a hermetic lid to a semiconductor die at an angle
US6529310B1 (en) 1998-09-24 2003-03-04 Reflectivity, Inc. Deflectable spatial light modulator having superimposed hinge and deflectable element
US6031657A (en) * 1998-10-15 2000-02-29 Memsolutions, Inc. Membrane-actuated charge controlled mirror (CCM) projection display
US5991066A (en) * 1998-10-15 1999-11-23 Memsolutions, Inc. Membrane-actuated charge controlled mirror
US6028696A (en) * 1998-10-15 2000-02-22 Memsolutions, Inc. Charge controlled mirror with improved frame time utilization and method of addressing the same
US6038058A (en) * 1998-10-15 2000-03-14 Memsolutions, Inc. Grid-actuated charge controlled mirror and method of addressing the same
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DE1964836A1 (de) 1970-09-17
FR2030876A5 (enrdf_load_stackoverflow) 1970-11-13
GB1261960A (en) 1972-02-02
JPS4923635B1 (enrdf_load_stackoverflow) 1974-06-17

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