US3594895A - Ceramic to metal seal - Google Patents

Ceramic to metal seal Download PDF

Info

Publication number
US3594895A
US3594895A US748227A US3594895DA US3594895A US 3594895 A US3594895 A US 3594895A US 748227 A US748227 A US 748227A US 3594895D A US3594895D A US 3594895DA US 3594895 A US3594895 A US 3594895A
Authority
US
United States
Prior art keywords
alloy
metal
ceramic
ductile
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US748227A
Inventor
Russell J Hill
Rowland M Cannon Jr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ROWLAND M CANNON JR
Original Assignee
ROWLAND M CANNON JR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ROWLAND M CANNON JR filed Critical ROWLAND M CANNON JR
Application granted granted Critical
Publication of US3594895A publication Critical patent/US3594895A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550°C
    • B23K35/3033—Ni as the principal constituent
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550°C
    • B23K35/3046—Co as the principal constituent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550°C
    • B23K35/3053—Fe as the principal constituent
    • B23K35/3093—Fe as the principal constituent with other elements as next major constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/32—Selection of soldering or welding materials proper with the principal constituent melting at more than 1550°C
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567—Treatment time
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
    • C04B2235/667—Sintering using wave energy, e.g. microwave sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/122—Metallic interlayers based on refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
    • C04B2237/127—The active component for bonding being a refractory metal
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C04B2237/348—Zirconia, hafnia, zirconates or hafnates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/403—Refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
    • C04B2237/765—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc at least one member being a tube
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12611—Oxide-containing component
    • Y10T428/12618—Plural oxides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y10T428/12812—Diverse refractory group metal-base components: alternative to or next to each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y10T428/12819—Group VB metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12875—Platinum group metal-base component

Definitions

  • the present invention relates to the bonding of nonmetallic refractory members to metal members, and more particularly to a temperature resistant, oxidation resistant metal to ceramic seal capable of use in cesium environments.
  • a common prior art method of making such seals involves first placing a layer of metal on the surface of the ceramic body or member then brazing the metal body or member to the metallized ceramic with the aid of a fusible metallic shim therebetween.
  • Any of the several diverse metal to metal interfaces present in the so sealed structure may have a brittle intermetallic phase in the metal junction due to interaction between metal, braze, and metallized ceramic.
  • the joint or seal as a whole may be weak due to the various intermetallic phases present. Eliminating the metallizing step and brazing directly to the ceramic body offers promise for more facile sealing techniques, even better seals.
  • the braze metal must then be some material which reacts strongly with the ceramic in order to achieve the desired bond.
  • braze metal may cause the braze also to react strongly with the metal member.
  • a pure metal braze is employed, the solution resulting from dissolution of the metal body and the braze metal has a progressively lower melting point than the pure braze metal and substantial, even complete, dissolution of the metal body can result if the completed seal is subjected to high operating temperatures.
  • a eutectic braze is employed, the metal from the metal body which dissolves therein often forms a brittle intermetallic phase between itself and one or both of the braze constituents.
  • an upper operating limit of about 500 C. is commonly set for the ultimate equipment sealed by conventional brazing alloys and the heretofore employed ceramic to metal sealing techniques.
  • An object of the present invention is to provide an improved bond for joining nonmetallic refractory bodies to metallic members.
  • a further object of the invention is to provide a ceramic to metal seal having good compatibility with a cesium environ ment and operation at elevated temperatures.
  • Still another object of the invention is to provide a high quality ceramic to metal seal employing a ductile metal braze.
  • the practice of the present invention comprises forming the seal with a 50 atomic percent alloy of one member selected from the group lVb metals and the other member selected from the group Vlll metals of the same period.
  • the alloys contemplated for the braze material are the 50 a/o alloys of: titanium with iron, cobalt, nickel or mixtures thereof; hafnium with osmium, iridium, platinum, or mixtures thereof; zirconium with rhodium, ruthenium, palladium, or mixtures thereof.
  • the ductile alloy brazes contemplated for practice of this invention may be of any specific composition within their homogeneity range. Therefore, within the context of this invention a general reference to these alloy brazes as 50 a/o ductile alloys should be taken as a reference to include the entire range of homogeneity. As a practical matter the braze alloy composition should be held within somewhat narrower limits than the entire homogeneity range, 50 a/trt2 a/o being preferred.
  • the lVb-Vlll ductile 50 a/o alloys When used as brazes to join ceramic bodies to metal members, they perform in a beneficial and perhaps unique manner.
  • the molten alloy reacts with the ceramic to form a hermetic joint, eliminating need for preliminary metallizing of the ceramic.
  • the braze reacts only slightly with the metal member in the seal assembly. Any intermetallic reaction products between the braze alloy and the metal member are not precipitated as a brittle intermetallic phase. After the seal has been formed no subsequent conditioning steps are needed.
  • ductile 50 a/o alloy brazes have general applicability to the many refractory ceramics usually joined to metal members, including for example, alumina, zirconia, magnesia yttria, sapphire. They have, also, general applicability to the metals usually joined to ceramics for electronic uses, including for example, tantalum, niobium, the group Vlll metals. lmportantly, they can be used at elevated temperatures, e.g. to 800 C.
  • One exemplary instance of a preferred embodiment of practice according to the invention is formation of a seal between a niobium member or a tantalum member and a high' purity alumina body with a ductile 50 (1/0 alloy of titanium-nickel.
  • ductile 50 (1/0 alloy brazes permits seal fabrication by relatively uncomplicated techniques.
  • the ceramic body and the metal member to be joined are juxtaposed with a shim or wire of the chosen interrnetallic alloy placed between them.
  • This assembly is then heated, eg in a vacuum furnace or by radio frequency induction heating in an argon atmosphere to the melting point of the chosen alloy, at which point the molten alloy reacts with and wets the ceramic body and also brazes to the metal member.
  • the braze material remains as a single phase ductile intermetallic alloy. Thereafter the assembly is cooled as rapidly as the ceramic will allow.
  • the joint is ready for use without further conditioning. It is airtight, heat and oxidation resistant and stable for use over extended periods of time; it may be employed in a cesium environment, I
  • a nickel titanium alloy of exactly 50 a/o employed as the braze alloy had the following properties:
  • hafnium-iridium hraze alloy washer formed a good seal between a tantalum cup and an alu mina tube.
  • a metal to ceramic seal which consists essentially of a ductile brazing alloy interposed between the metal and ceramic, said alloy consisting essentially of a single phase ductile alloy within the range of 48 a/52 a/o of titanium with a member selected from the group consisting of Fe, and Co and mixtures thereof,
  • a metal to ceramic seal which consists essentially of a ductile brazing alloy interposed between the metal and ceramic, said alloy consisting essentially of a single phase ductile alloy within the range of 48 a/o52 a/o of zirconium with a member selected from the group consisting of Ru, Rh and Pd and mixtures thereof.
  • a metal to ceramic seal which consists essentially of a ductile brazing alloy interposed between the metal and ceramic, said alloy consisting essentially of a single phase ductile alloy within the range of 48 a/o-52 all) of hafnium with a member selected from the group consisting of Os, lr, Pt and mixtures thereof.
  • a method of bonding a metal member and a nonmetallic refractory body which consists essentially of interposing therebctween a preform of a single phase ductile alloy within the range of 48 a/o-52 a/o of titanium with a member selected from the group consisting of Fe and Co, and mixtures thereof, then melting only said alloy under nonoxidizing conditions, and thereafter cooling the assembly whereby said alloy forms a tight high temperature resistant bond between the metal member and the refractory body.
  • said ceramic is alumina
  • saidmetal is selected from the group consisting of Tantalum and Niobium
  • said 50 a/o brazing alloy is a Ti-Fe or Ti-Co alloy having a composition range of 50 ale: 2 a/o.
  • a method of bonding metal member and a nonmetallic refractory body which consists essentially of interposing therebetween a preform of a single phase ductile alloy within the range of 48 a/o-52 a/o of zirconium with a member selected from the group consisting of Ru, Rh, Pd and mixtures thereof, then melting only said alloy under nonoxidizing conditions, and thereafter cooling the assembly whereby said alloy forms a tight high temperature resistant bond between the metal member and refractory body.
  • a method of bonding a metal member and a nonmetallic refractory body which consists essentially of interposing therebetween a preform of a single phase ductile alloy within the range of 48 a/o52 a/a of hafnium with a member selected from the group consisting of Os, Ir, Pt and mixtures thereof, then melting only said alloy under nonoxidizing conditions, and thereafter cooling the assembly whereby said alloy forms a tight high temperature resistant bond between the metal member and the refractory body.
  • line 1 through line 3 should read---ln the same fashion a.
  • 50 a/o zirconium-palladium braze alloy Washer and a 50 a/o hafniumiridium braze alloy washer formed a good seal between a tantalum cup and an alumina tube.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)

Abstract

This disclosure is directed to metal to refractory seals wherein a ductile 50 atomic percent alloy of a group IVb metal with a group VIII metal of the same period is used to braze ceramic to metal. A preferred example is sealing Tantalum or Niobium to alumina with a 50 a/o Ti-Ni alloy braze.

Description

United States Patent [111 4,
[72] Inventors Russell]. Hill [56| References Cited 20 Marie Drive, R.F.C. N0. 3, Wilmington, UNITED STATES PATENTS Mam. 01887; Rowland M. Cannon Jr. 151 Highland 2,857,663 10/1958 Beggs 29/473 1 2,859,512 11/1958 DljkSlElllUlS et al. 29/473.l Ave., Arlington, Mass. 02174 H PP No 748,227 3,091,028 5/1963 Westbrook et al 29/473.1 [22] Filed July 29 968 3,395,993 8/1968 Brlstow 29/473.1 X [45] Patented July 27, 1971 Primary Examiner-John F. Campbell Assistant Examiner-Ronald .l Shore 4 Att0rneysChar1es M. Hogan and Abraham Ogman [54] CERAMIC T0 METAL SEAL 8 Claims, No Drawings [52] US. Cl 29/473.l, ABSTRACT: This disclosure is directed to metal to refractory 29/ 1 95, 29/504 seals wherein a ductile 50 atomic percent alloy of a group 1Vb [51] lnt.Cl. ..B23k 31/02 metal with a group V111 metal of the same period is used to [501 Field of 29/473.1, braze ceramic to metal. A preferred example is sealing Tantalum or Niobium to alumina with a 50 a/a Ti-Ni alloy braze.
CERAMIC TO METAL SEAL The present invention relates to the bonding of nonmetallic refractory members to metal members, and more particularly to a temperature resistant, oxidation resistant metal to ceramic seal capable of use in cesium environments.
The problems involved in obtaining satisfactory ceramic to metal seals are well known, and various brazing alloys have been suggested by workers in the art, as in, for example, US. Pats. Nos. 3,091,028 and 2,857,663. Such seals are important to satisfactory operation of high power electron tube devices and are notably so in devices employing metal vapors or liquid therein such as are devices and thermionic converters.
A common prior art method of making such seals involves first placing a layer of metal on the surface of the ceramic body or member then brazing the metal body or member to the metallized ceramic with the aid of a fusible metallic shim therebetween. Any of the several diverse metal to metal interfaces present in the so sealed structure may have a brittle intermetallic phase in the metal junction due to interaction between metal, braze, and metallized ceramic. Besides the high failure rate, the joint or seal as a whole may be weak due to the various intermetallic phases present. Eliminating the metallizing step and brazing directly to the ceramic body offers promise for more facile sealing techniques, even better seals. The braze metal must then be some material which reacts strongly with the ceramic in order to achieve the desired bond. Yet, the high chemical reactivity of such a braze metal may cause the braze also to react strongly with the metal member. Thus, ifa pure metal braze is employed, the solution resulting from dissolution of the metal body and the braze metal has a progressively lower melting point than the pure braze metal and substantial, even complete, dissolution of the metal body can result if the completed seal is subjected to high operating temperatures. On the other hand, if a eutectic braze is employed, the metal from the metal body which dissolves therein often forms a brittle intermetallic phase between itself and one or both of the braze constituents.
1n any event, an upper operating limit of about 500 C. is commonly set for the ultimate equipment sealed by conventional brazing alloys and the heretofore employed ceramic to metal sealing techniques.
An object of the present invention is to provide an improved bond for joining nonmetallic refractory bodies to metallic members.
A further object of the invention is to provide a ceramic to metal seal having good compatibility with a cesium environ ment and operation at elevated temperatures.
Still another object of the invention is to provide a high quality ceramic to metal seal employing a ductile metal braze.
Further objects and the advantages of the present invention will be apparent from the description thereof which follows.
Briefly stated, the practice of the present invention comprises forming the seal with a 50 atomic percent alloy of one member selected from the group lVb metals and the other member selected from the group Vlll metals of the same period. More specifically, the alloys contemplated for the braze material are the 50 a/o alloys of: titanium with iron, cobalt, nickel or mixtures thereof; hafnium with osmium, iridium, platinum, or mixtures thereof; zirconium with rhodium, ruthenium, palladium, or mixtures thereof.
Most significant in terms of the ceramic to metal seal is that this group of 50 atomic percent alloys or intermetallic compounds are ductile and have a significant homogeneity range on either side of the 50 (1/0. They remain ductile within this range of homogeneity. Thus, the Ti-Ni system has a homogeneity range of 46-53 /0 Ti. The other systems have similar, but not necessarily identical homogeneity ranges. For further description of the alloys per se reference is made to a series of articles by F. B. Wang or F. E. Wang et al. in Journal of Applied Physics, Vol. 36, p. 3232 (1965); Vol. 38, p. 822 (1967); and Vol. 29, p. 2192 (1968). Attention is directed also to US. Pat. No. 3,174,851 for description of the 50 a/a Ti-Ni alloy.
While reference has been made above to 50 a/o, the ductile alloy brazes contemplated for practice of this invention may be of any specific composition within their homogeneity range. Therefore, within the context of this invention a general reference to these alloy brazes as 50 a/o ductile alloys should be taken as a reference to include the entire range of homogeneity. As a practical matter the braze alloy composition should be held within somewhat narrower limits than the entire homogeneity range, 50 a/trt2 a/o being preferred.
When the lVb-Vlll ductile 50 a/o alloys are used as brazes to join ceramic bodies to metal members, they perform in a beneficial and perhaps unique manner. The molten alloy reacts with the ceramic to form a hermetic joint, eliminating need for preliminary metallizing of the ceramic. Moreover, the braze reacts only slightly with the metal member in the seal assembly. Any intermetallic reaction products between the braze alloy and the metal member are not precipitated as a brittle intermetallic phase. After the seal has been formed no subsequent conditioning steps are needed. These ductile 50 a/o alloy brazes have general applicability to the many refractory ceramics usually joined to metal members, including for example, alumina, zirconia, magnesia yttria, sapphire. They have, also, general applicability to the metals usually joined to ceramics for electronic uses, including for example, tantalum, niobium, the group Vlll metals. lmportantly, they can be used at elevated temperatures, e.g. to 800 C.
One exemplary instance of a preferred embodiment of practice according to the invention is formation of a seal between a niobium member or a tantalum member and a high' purity alumina body with a ductile 50 (1/0 alloy of titanium-nickel.
Use of these ductile 50 (1/0 alloy brazes permits seal fabrication by relatively uncomplicated techniques. According to one method, the ceramic body and the metal member to be joined are juxtaposed with a shim or wire of the chosen interrnetallic alloy placed between them. This assembly is then heated, eg in a vacuum furnace or by radio frequency induction heating in an argon atmosphere to the melting point of the chosen alloy, at which point the molten alloy reacts with and wets the ceramic body and also brazes to the metal member. The braze material remains as a single phase ductile intermetallic alloy. Thereafter the assembly is cooled as rapidly as the ceramic will allow. The joint is ready for use without further conditioning. It is airtight, heat and oxidation resistant and stable for use over extended periods of time; it may be employed in a cesium environment, I
For further understanding of the invention more detailed specific examples of the practice thereof is now presented.
A nickel titanium alloy of exactly 50 a/o employed as the braze alloy had the following properties:
Density 6.45 g./cc. Melting point I250 C. Electrical resistivity flcm.
(room temperature) Expansion coefficient IOAXIO" C." Ultimate tensile strength l40,000 p.a.i. Yield strength 8l,000 p,s.i. Young's Modulus 1 1X10 p.s.i.
Tensile elongation up to 15 percent A washer (0.005 inches thick) of the alloy was placed at the bottom of a tantalum cup and a high purity alumina tube was placed on top the washer. The so assembled cup, washer and tube was heated inductively in a stream of commercial grade argon to a temperature just above 1250" C. to melt the washer. The assembly was then cooled in the argon stream and removed, with the whole heating, melting and cooling process taking about 5 minutes. Examination of the cooled assembly showed that very little dissolution of the tantalum had taken place during the brief period the braze was molten and that an airtight satisfactory seal was formed.
In the same fashion a 50 all) hafnium-iridium hraze alloy washer formed a good seal between a tantalum cup and an alu mina tube.
Sealed assemblies, sealed by the 50 a/o 'l'i-Ni, braze alloy in the manner described above were fully fabricated and tested for temperature resistance in the presence of cesium. They proved satisfactory at elevated temperatures up to 800 C.
In the same fashion a tantalum tube was brazed to magnesia with the above 50 a/o Ti-Ni alloy. In this instance the differential expansion between magnesia and tantalum caused the magnesia to crack upon cooling, but the seal itself appears satisfactory.
What we claim is:
l. A metal to ceramic seal which consists essentially of a ductile brazing alloy interposed between the metal and ceramic, said alloy consisting essentially of a single phase ductile alloy within the range of 48 a/52 a/o of titanium with a member selected from the group consisting of Fe, and Co and mixtures thereof,
2. A seal as in claim 1 wherein said ceramic is alumina, said metal is selected from the group consisting of Tantalum and Niobium and said 50 (1/0 brazing alloy is a Ti-Fe or Ti-Co alloy having a composition range of 50 a/oi 2 a/o.
3. A metal to ceramic seal which consists essentially of a ductile brazing alloy interposed between the metal and ceramic, said alloy consisting essentially of a single phase ductile alloy within the range of 48 a/o52 a/o of zirconium with a member selected from the group consisting of Ru, Rh and Pd and mixtures thereof.
4. A metal to ceramic seal which consists essentially of a ductile brazing alloy interposed between the metal and ceramic, said alloy consisting essentially of a single phase ductile alloy within the range of 48 a/o-52 all) of hafnium with a member selected from the group consisting of Os, lr, Pt and mixtures thereof.
5. A method of bonding a metal member and a nonmetallic refractory body which consists essentially of interposing therebctween a preform of a single phase ductile alloy within the range of 48 a/o-52 a/o of titanium with a member selected from the group consisting of Fe and Co, and mixtures thereof, then melting only said alloy under nonoxidizing conditions, and thereafter cooling the assembly whereby said alloy forms a tight high temperature resistant bond between the metal member and the refractory body.
6. The method of claim 5 wherein said ceramic is alumina, saidmetal is selected from the group consisting of Tantalum and Niobium and said 50 a/o brazing alloy is a Ti-Fe or Ti-Co alloy having a composition range of 50 ale: 2 a/o.
7. A method of bonding metal member and a nonmetallic refractory body which consists essentially of interposing therebetween a preform of a single phase ductile alloy within the range of 48 a/o-52 a/o of zirconium with a member selected from the group consisting of Ru, Rh, Pd and mixtures thereof, then melting only said alloy under nonoxidizing conditions, and thereafter cooling the assembly whereby said alloy forms a tight high temperature resistant bond between the metal member and refractory body.
8. A method of bonding a metal member and a nonmetallic refractory body which consists essentially of interposing therebetween a preform of a single phase ductile alloy within the range of 48 a/o52 a/a of hafnium with a member selected from the group consisting of Os, Ir, Pt and mixtures thereof, then melting only said alloy under nonoxidizing conditions, and thereafter cooling the assembly whereby said alloy forms a tight high temperature resistant bond between the metal member and the refractory body.
atent No. 9 9 Dated July 27, 1971 Inventor) Russell J. Hill and Rowland M. Cannon It is certified that error appears in the above-identified patent and that said Letters Patent are hereby corrected as shown below:
Column 2, line 58, for "10. 4x10 0 read--- 10.4- c
and Column 3, line 1 through line 3 should read---ln the same fashion a. 50 a/o zirconium-palladium braze alloy Washer and a 50 a/o hafniumiridium braze alloy washer formed a good seal between a tantalum cup and an alumina tube.
Signed and sealed this 12th day of September 1972.
(SEAL) Attest:
EDWARD M.F'LETCHER,JR. ROBERT GOT'ISCHALK Attesting Officer Commissioner of Patents

Claims (7)

  1. 2. A seal as in claim 1 wherein said ceramic is alumina, said metal is selected from the group consisting of Tantalum and Niobium and said 50 a/o brazing alloy is a Ti-Fe or Ti-Co alloy having a composition range of 50 a/o + or - 2 a/o.
  2. 3. A metal to ceramic seal which consists essentially of a ductile brazing alloy interposed between the metal and ceramic, said alloy consisting essentially of a single phase ductile alloy within the range of 48 a/o- 52 a/o of zirconium with a member selected from the group consisting of Ru, Rh and Pd and mixtures thereof.
  3. 4. A metal to ceramic seal which consists essentially of a ductile brazing alloy interposed between the metal and ceramic, said alloy consisting essentially of a single phase ductile alloy within the range of 48 a/o- 52 a/o of hafnium with a member selected from the group consisting of Os, Ir, Pt and mixtures thereof.
  4. 5. A method of bonding a metal member and a nonmetallic refractory body which consists essentially of interposing therebetween a preform of a single phase ductile alloy within the range of 48 a/o- 52 a/o of titanium with a member selected from the group consisting of Fe and Co, and mixtures thereof, then melting only said alloy under nonoxidizing conditions, and thereafter cooling the assembly whereby said alloy forms a tight high temperature resistant bond between the metal member and the refractory body.
  5. 6. The method of claim 5 wherein said ceramic is alumina, said metal is selected from the group consisting of Tantalum and Niobium and said 50 a/o brazing alloy is a Ti-Fe or Ti-Co alloy having a composition range of 50 a/o + or - 2 a/o.
  6. 7. A method of bonding metal member and a nonmetallic refractory body which consists essentially of interposing therebetween a preform of a single phase ductile alloy within the range of 48 a/o- 52 a/o of zirconium with a member selected from the group consisting of Ru, Rh, Pd and mixtures thereof, then melting only said alloy under nonoxidizing conditions, and thereafter cooling the assembly whereby said alloy forms a tight high temperature resistant bond between the metal member and refractory body.
  7. 8. A method of bonding a metal member and a nonmetallic refractory body which consists essentially of interposing therebetween a preform of a single phase ductile alloy within the range of 48 a/o- 52 a/o of hafnium with a member selected from the group consisting of Os, Ir, Pt and mixtures thereof, then melting only said alloy under nonoxidizing conditions, and thereafter cooling the assembly whereby said alloy forms a tight high temperature resistant bond between the metal member and the refractory body.
US748227A 1968-07-29 1968-07-29 Ceramic to metal seal Expired - Lifetime US3594895A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74822768A 1968-07-29 1968-07-29

Publications (1)

Publication Number Publication Date
US3594895A true US3594895A (en) 1971-07-27

Family

ID=25008543

Family Applications (1)

Application Number Title Priority Date Filing Date
US748227A Expired - Lifetime US3594895A (en) 1968-07-29 1968-07-29 Ceramic to metal seal

Country Status (1)

Country Link
US (1) US3594895A (en)

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3662455A (en) * 1970-12-10 1972-05-16 Sanders Associates Inc Method for preparing an anti-oxidizing, active alloy brazing composition
US3736650A (en) * 1971-06-01 1973-06-05 Varian Associates Method for making metal-to-ceramic seals
US3897223A (en) * 1967-03-21 1975-07-29 Arco Nuclear Co Nb joined to alumina with Ni-Ti eutectic seal
US3903585A (en) * 1969-11-10 1975-09-09 Valentin Petrovich Kosteruk Method of brazing
US3918922A (en) * 1971-06-01 1975-11-11 Norman C Anderson Method for making metal-to-ceramic seals
US4225262A (en) * 1979-01-11 1980-09-30 Medtronic, Inc. Niobium coatings for joining ceramic to metal
US4705207A (en) * 1986-10-16 1987-11-10 Rohr Industries, Inc. Method of brazing columbium to itself using low bonding pressures and temperatures
US4706872A (en) * 1986-10-16 1987-11-17 Rohr Industries, Inc. Method of bonding columbium to nickel and nickel based alloys using low bonding pressures and temperatures
FR2605828A1 (en) * 1986-10-28 1988-04-29 Univ Metz THERMAL OR MECHANICAL COMPRESSOR COMPENSATION ELEMENT, IN PARTICULAR FOR A PRINTED CIRCUIT, AND METHOD FOR MANUFACTURING SUCH A COMPONENT IMPLEMENTED IN A PRINTED CIRCUIT
US4989773A (en) * 1986-10-31 1991-02-05 Japan Atomic Energy Research Institute Method of joining graphite and metallic material with a material comprising titanium, nickel and copper
WO1999058332A1 (en) * 1998-05-12 1999-11-18 Pacific Coast Technologies Methods and materials for sealing ceramic to metallic surfaces
WO2001024962A1 (en) * 1999-10-04 2001-04-12 Alfred E. Mann Foundation For Scientific Research Good hermetic seals and method for making them
WO2002102589A1 (en) 2001-06-18 2002-12-27 Alfred E. Mann Foundation For Scientific Research Application and manufacturing method for a ceramic to metal seal
US6616032B1 (en) * 1998-12-23 2003-09-09 Commissariat A L'energie Atomique Brazing composition and method for brazing parts made of alumina-based materials with said composition
US20050095442A1 (en) * 2003-10-30 2005-05-05 Byers Charles L. Ceramic to noble metal braze and method of manufacture
US20050103825A1 (en) * 2003-11-13 2005-05-19 Guangqiang Jiang Manufacturing method for a ceramic to metal seal
US20050194425A1 (en) * 2004-03-03 2005-09-08 Schnittgrund Gary D. Layered sphere braze material
US20050196631A1 (en) * 2004-03-03 2005-09-08 Schnittgrund Gary D. Layered deposition braze material
US20050194426A1 (en) * 2004-03-03 2005-09-08 Guangqiang Jiang Brazing titanium to stainless steel using nickel filler material
US20050227105A1 (en) * 2004-04-07 2005-10-13 Guangqiang Jiang Brazing titanium to stainless steel using layered particulate
US20050228467A1 (en) * 2004-04-07 2005-10-13 Guangqiang Jiang Implantable miniature titanium to stainless steel connector
US20050224558A1 (en) * 2004-04-07 2005-10-13 Guangqiang Jiang Brazing titanium to stainless steel using laminated Ti-Ni filler material
US7771838B1 (en) * 2004-10-12 2010-08-10 Boston Scientific Neuromodulation Corporation Hermetically bonding ceramic and titanium with a Ti-Pd braze interface
WO2010133402A1 (en) * 2009-05-18 2010-11-25 Endress+Hauser Gmbh+Co.Kg Ceramic component having at least one electric feedthrough, method for the production thereof and pressure sensor comprising such a component
US8329314B1 (en) 2004-10-12 2012-12-11 Boston Scientific Neuromodulation Corporation Hermetically bonding ceramic and titanium with a palladium braze
US8957327B2 (en) 2011-09-30 2015-02-17 General Electric Company Feed-through assembly
US10406774B2 (en) 2016-10-17 2019-09-10 U.S. Department Of Energy Diffusion bonding of silicon carbide using iridium and hermetic silicon carbide-iridium bonds

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2857663A (en) * 1954-02-09 1958-10-28 Gen Electric Metallic bond
US2859512A (en) * 1955-04-23 1958-11-11 Philips Corp Method of bonding a titanium member to a ceramic surface
US3091028A (en) * 1960-09-02 1963-05-28 Gen Electric Method and alloy for bonding to nonmetallic refractory members
US3395993A (en) * 1966-06-22 1968-08-06 Gen Electric Titanium activated nickel seal and method of forming it

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2857663A (en) * 1954-02-09 1958-10-28 Gen Electric Metallic bond
US2859512A (en) * 1955-04-23 1958-11-11 Philips Corp Method of bonding a titanium member to a ceramic surface
US3091028A (en) * 1960-09-02 1963-05-28 Gen Electric Method and alloy for bonding to nonmetallic refractory members
US3395993A (en) * 1966-06-22 1968-08-06 Gen Electric Titanium activated nickel seal and method of forming it

Cited By (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3897223A (en) * 1967-03-21 1975-07-29 Arco Nuclear Co Nb joined to alumina with Ni-Ti eutectic seal
US3903585A (en) * 1969-11-10 1975-09-09 Valentin Petrovich Kosteruk Method of brazing
US3662455A (en) * 1970-12-10 1972-05-16 Sanders Associates Inc Method for preparing an anti-oxidizing, active alloy brazing composition
US3736650A (en) * 1971-06-01 1973-06-05 Varian Associates Method for making metal-to-ceramic seals
US3918922A (en) * 1971-06-01 1975-11-11 Norman C Anderson Method for making metal-to-ceramic seals
US4225262A (en) * 1979-01-11 1980-09-30 Medtronic, Inc. Niobium coatings for joining ceramic to metal
US4705207A (en) * 1986-10-16 1987-11-10 Rohr Industries, Inc. Method of brazing columbium to itself using low bonding pressures and temperatures
US4706872A (en) * 1986-10-16 1987-11-17 Rohr Industries, Inc. Method of bonding columbium to nickel and nickel based alloys using low bonding pressures and temperatures
FR2605828A1 (en) * 1986-10-28 1988-04-29 Univ Metz THERMAL OR MECHANICAL COMPRESSOR COMPENSATION ELEMENT, IN PARTICULAR FOR A PRINTED CIRCUIT, AND METHOD FOR MANUFACTURING SUCH A COMPONENT IMPLEMENTED IN A PRINTED CIRCUIT
EP0267862A1 (en) * 1986-10-28 1988-05-18 Cimulec Compensating element for thermal or mechanical strain, especially for a printed circuit, and process for making such an element for use in a printed circuit
US4857387A (en) * 1986-10-28 1989-08-15 Cimulec, S.A. Compensating element for stresses of thermal or mechanical orgin, especially for printed circuits, and process for making such an element employed in a printed circuit
US4989773A (en) * 1986-10-31 1991-02-05 Japan Atomic Energy Research Institute Method of joining graphite and metallic material with a material comprising titanium, nickel and copper
WO1999058332A1 (en) * 1998-05-12 1999-11-18 Pacific Coast Technologies Methods and materials for sealing ceramic to metallic surfaces
US6221513B1 (en) 1998-05-12 2001-04-24 Pacific Coast Technologies, Inc. Methods for hermetically sealing ceramic to metallic surfaces and assemblies incorporating such seals
US6616032B1 (en) * 1998-12-23 2003-09-09 Commissariat A L'energie Atomique Brazing composition and method for brazing parts made of alumina-based materials with said composition
WO2001024962A1 (en) * 1999-10-04 2001-04-12 Alfred E. Mann Foundation For Scientific Research Good hermetic seals and method for making them
WO2002102590A1 (en) * 2001-06-18 2002-12-27 Alfred E. Mann Foundation For Scientific Research Ceramic to metal seal
US6521350B2 (en) 2001-06-18 2003-02-18 Alfred E. Mann Foundation For Scientific Research Application and manufacturing method for a ceramic to metal seal
WO2002102589A1 (en) 2001-06-18 2002-12-27 Alfred E. Mann Foundation For Scientific Research Application and manufacturing method for a ceramic to metal seal
US20050095442A1 (en) * 2003-10-30 2005-05-05 Byers Charles L. Ceramic to noble metal braze and method of manufacture
US6989200B2 (en) 2003-10-30 2006-01-24 Alfred E. Mann Foundation For Scientific Research Ceramic to noble metal braze and method of manufacture
US6986453B2 (en) 2003-11-13 2006-01-17 Alfred E. Mann Foundation For Scientific Research Manufacturing method for a ceramic to metal seal
US20050103825A1 (en) * 2003-11-13 2005-05-19 Guangqiang Jiang Manufacturing method for a ceramic to metal seal
US20050194425A1 (en) * 2004-03-03 2005-09-08 Schnittgrund Gary D. Layered sphere braze material
US20050196631A1 (en) * 2004-03-03 2005-09-08 Schnittgrund Gary D. Layered deposition braze material
US20050194426A1 (en) * 2004-03-03 2005-09-08 Guangqiang Jiang Brazing titanium to stainless steel using nickel filler material
US7022415B2 (en) 2004-03-03 2006-04-04 Alfred E. Mann Foundation For Scientific Research Layered sphere braze material
US20050228467A1 (en) * 2004-04-07 2005-10-13 Guangqiang Jiang Implantable miniature titanium to stainless steel connector
US20050224558A1 (en) * 2004-04-07 2005-10-13 Guangqiang Jiang Brazing titanium to stainless steel using laminated Ti-Ni filler material
US20050227105A1 (en) * 2004-04-07 2005-10-13 Guangqiang Jiang Brazing titanium to stainless steel using layered particulate
US7157150B2 (en) 2004-04-07 2007-01-02 Alfred E. Mann Foundation For Scientific Research Brazing titanium to stainless steel using layered particulate
US7771838B1 (en) * 2004-10-12 2010-08-10 Boston Scientific Neuromodulation Corporation Hermetically bonding ceramic and titanium with a Ti-Pd braze interface
US8329314B1 (en) 2004-10-12 2012-12-11 Boston Scientific Neuromodulation Corporation Hermetically bonding ceramic and titanium with a palladium braze
WO2010133402A1 (en) * 2009-05-18 2010-11-25 Endress+Hauser Gmbh+Co.Kg Ceramic component having at least one electric feedthrough, method for the production thereof and pressure sensor comprising such a component
US8915142B2 (en) 2009-05-18 2014-12-23 Endress + Hauser Gmbh + Co. Kg Ceramic component having at least one electrical feedthrough, method for its manufacture and pressure sensor with such a component
US8957327B2 (en) 2011-09-30 2015-02-17 General Electric Company Feed-through assembly
US10406774B2 (en) 2016-10-17 2019-09-10 U.S. Department Of Energy Diffusion bonding of silicon carbide using iridium and hermetic silicon carbide-iridium bonds

Similar Documents

Publication Publication Date Title
EP0005312B1 (en) Gold alloys, a method of brazing and articles formed thereby
US3324543A (en) Pressure bonded ceramic-to-metal gradient seals
US4217137A (en) Gold based alloy composition and brazing therewith, particularly for ceramic-metal seals in electrical feedthroughs
US3766634A (en) Method of direct bonding metals to non-metallic substrates
US2857663A (en) Metallic bond
US3395993A (en) Titanium activated nickel seal and method of forming it
US3795041A (en) Process for the production of metal-ceramic bond
JPS62192295A (en) Soft solder alloy for mutual bonding of ceramic part or bonding with part consisting of metal
US4448605A (en) Ductile brazing alloys containing reactive metals
US6050478A (en) Composition and process for the reactive brazing of ceramic materials containing alumina
US3226822A (en) Art of bonding ceramic to metal
JP4558736B2 (en) Manufacturing method of composite member
US3091028A (en) Method and alloy for bonding to nonmetallic refractory members
US3001269A (en) Composite material, brazing alloys and process of manufacture
JPS60131874A (en) Method of bonding ceramic and metal
US3192620A (en) Method of joining diamond to metal
US6663982B1 (en) Silver-hafnium braze alloy
US3196536A (en) Method of connecting graphite articles to one another or to articles of different materials
US3442006A (en) Process for welding or brazing two members of which at least one is made of graphite
US3518066A (en) Metallizing non-metals
US20040050912A1 (en) Diffusion bonding process of two-phase metal alloys
US3227591A (en) Film techniques
US3666429A (en) Metallized and brazed ceramics
US3700420A (en) Ceramic-to-metal seal
US3591917A (en) Process for joining surfaces