US3576420A - Electron beam focus control system - Google Patents

Abstract

The temperature of an electron beam at the face of a workpiece is sequentially sampled and a voltage representing the temperature is stored for comparison with prior voltage samples. The focus coil current is increased or decreased as a function of the relative difference between the compared samples. When the samples are equal, the comparison is discontinued. The sampling sequence of the system is controlled by a counter operating at one rate and the comparison is controlled by logic gated at a relatively higher rate so that the change in the focus coil current can be completed before the next sample is taken.

Description

I United States Patent H 13,576,420

[72] Invent rs Wil am F- I nd 3,354,720 11/1967 Hager 73/355 Los Alamitos; 3,426,174 2/196'9 Graham etal. 219/121 Frank H. Grigg, Fullerton; Charles J. 3,491,236 1/1970 Newberry r 219/121 Mc i ypr 3,534,386 10/1970 Mercer 219/121 [21] P 24998 Primary ExaminerJ. V. Truhe [22] Filed 1970 Assistant Examiner-R ONeill [45] Patented Apr. 27, 1971 [73] Assi North American Rockwell Cor oration Attorneys-L. Lee Humphries, Rolf M. Pitts, H. Fredrick gnee p Hamann and Robert G. Rogers [54] ELECTRON BEAM FOCUS CONTROL SYSTEM 9 l 9D F C aims rawmg ABSTRACT: The temperature of an electron beam at the face [52] US. Cl ..2l9/l2lEB, f a workpiece i equentially sampled and a voltage 340/173 representing the temperature is stored for comparison with [51] Int. Cl B23k 15/00 prior voltage samples The focus coil current is increased or Fleld of Search 250/333 decreased as a function of the relative difference between the (H),49-5315/11340/173(kn/257,258,259; compared samples. When the samples are equal, the com- 219/121 (EB), 125 (PL), 121 (L) parison is discontinued.

The sampling sequence of the system is controlled by a [56] References C'ted counter operating at one rate and the comparison is controlled UNITED STATES PATENTS by logic gated at a relatively higher rate so that the change in 2,938,122 5/1960 Cole 73/359 the focus coil current can be completed before the next sam- 3,082,316 3/1963 Greene 219/117 ple is taken.

5 4 FROM URI W g8 g V0 35 Mmlm 38 Vpp Va WA 24 35 mourn-ER E DRIVE P05 To omv: use T 22 27 4 25 23 16 as CLOCK ADE COUNTER INDICATORS l momma Patentdj' April 27, 1971 6 Sheets-Sheet 2 r L..! SEOLENCE CONTROL LOGIC 'D C B A T INCREASE CLRRENT RETLRN TO STEAUY STATE DECREASE CURRENT I T5 }RETURN TO sTEAbY STATE MAKE CORRECTION HOLD AT NEW STEADY T9 STATE LEVEL OOT4 .o o o o TO new 85kg; Lo msimumzuh FOCUS COIL ClRRENT INVENTORS WILLIAM F. ICELAND FRANK a. sales BY CHARLES J. mamas FIG. 2

mam

Patented April 27, 1971 6 Sheets-Sheet 3 FIG. 3

INITIAL FOCUS INVENTORS BY CHARLES J. HcGUIRE FIG.4

WI F D FR H ATTORNEY Patented April 27, 1971 6 Sheets-Sheet 5 INVENTORS WILLIAM E ICELAND FRANK H. emee CHARLES J. McGUIRE A'TTORNQ Patentd A ril 27, 1911 6 Sheets-Sheet 6 m w m INVENTORS WILLIAM F. ICELAND FRANK H. GRIGG BY CHARLES J. MCGUIRE Maw ELECTRON BEAM FOCUS CONTROL SYSTEM BACKGROUND OF THE INVENTION 1. Field of the Invention The invention relates to an electron beam focus control system and more particularly to such a system in which the focus coil current is sequentially changed until a peak temperature at the face of a workpiece is indicated.

2. Description of Prior Art A system is needed to eliminate the necessity for an operator to visually determine the optimum electron beam configuration, or focus, on the surface of a workpiece being welded. Certain systems use a manually controlled potentiometer for obtaining the maximum beam intensity. However, manually controlled, systems must be adjusted periodically for each weld, due to the inherent deterioration of the tungsten filament, and any variance necessary in beam voltage or current requirements.

A preferred system should be able to automatically adjust the focus to achieve the maximum beam intensity or any other beam intensity at the face of a workpiece as required for a particular operation. The present system provides such a capability.

SUMMARY OF THE INVENTION Briefly, the invention comprises a system for sampling the temperature of a workpiece being heated by an electron beam. The temperature varies as a function of the beam intensity. The sampled temperature is converted to a voltage and compared with prior samples. The focus coil current is changed as a function of the difference between the voltages until a predetermined beam intensity at the workpiece is achieved.

In the preferred system, the beam focus is changed first in one direction and then in another. The temperature is sampled as each focus is changed. A voltage representing each sample is stored and sequentially compared with other samples. A drive signal is generated to change the relative focus as a function of the sense of the temperature changes which occurred during the initial focusing sequence. The drive signal is changed during each operating cycle until the samples are equal. The operating sequence is controlled by a counter operated at one rate. The comparison logic is gated at a relatively higher rate so that the change in beam focus is completed before the next sampling interval within an operating cycle.

In another embodiment, an analog system is used in controlling the beam focus. An analog signal representing the temperature generated by the beam at the workpiece is compared with a reference voltage. If the signals are not equal, an output voltage is generated to change the focus coil current.

For certain applications, it is desired to focus the beam at a point above or below the surface of the workpiece. In that case, the measured temperature at the face of the workpiece is less than the maximum temperature possible. Therefore, the system must be biased, or offset, to indicate maximum beam intensity at the surface even though the beam is focused for maximum intensity at a position displaced from the surface.

Therefore, it is an object of this invention to provide an improved electron beam welding control system for automatically controlling the focus of an electron beam relative to the surface of the workpiece.

It is another object of this invention to provide an improved digital electron beam welding control system having a constant focus control for an electron beam relative to the surface of the workpiece.

A still further object of this invention is to provide an improved system for controlling the focus of an electron beam on a workpiece using an offset circuit to obtain maximum beam intensity at a point displaced from the surface of the workpiece.

It is another object of this invention to provide an improved system for controlling the focus of an electron beam in which adjacent temperature samples are stored and compared for indicating the sense and amplitude of temperature changes at the surface of the workpiece due to changes in the focus of an electron beam.

A still further object of this invention is to provide an improved electron beam focus control system which is adaptable to a repetitive preset beam configuration.

A further object of this invention is to provide an improved electron beam focus system which is not as dependent on visual observations of an operator in determining the maximum intensity of the beam.

A further object of this invention is to provide an improved beam focus control system for minimizing the problems due to the inherent deterioration of the resistance of the filament and any variance in beam voltage or current setting for different welding operations.

These and other objects of the invention will become more apparent when taken in connection with the drawings, a brief description of which follows:

BRIEF DESCRIPTION OF DRAWINGS FIG. 1a is a block diagram of a digital system for automatically controlling the focus of an electron beam at the surface of a workpiece being welded.

FIG. lb is a table showing the operating sequence of the FIG. 1a system.

FIG. 2 is a plot of the temperature change at the surface of a workpiece as a function of the focus coil current.

FIG. 3 is a representation of the beam focus for different focus coil current values. FIG. 4 is a different representation of the beam focus for different focus coil current values.

FIG. 5 is a schematic diagram of the compare logic shown generally in FIG. 1. FIG. 6 is a schematic diagram of the counter and digital-toanalog converter shown generally in FIG. 1.

FIG. 7 is a schematic diagram of one embodiment of a switch circuit usable in the FIG. 1 embodiment.

FIG. 8 is a schematic diagram of one embodiment of the sequence control logic illustrated generally in FIG. 1.

DESCRIPTION OF PREFERRED EMBODIMENTS FIG. la is a block diagram of a digital system for controlling the focus of an electron beam 2 by controlling the sense and amplitude of current in focus coil 3. The electron beam is produced from generator 5 which may comprise a filament actuated by a power source.

The beam configuration is sensed by sensor 4 which may be a standard infrared detector measuring temperature change. The temperature of a workpiece varies as a function of an electron beam focus, or configuration. The sensor 4 detects the change in the beam focus and generates a voltage representing that change. The sensor may include a motor driven shutter and lens for permitting the temperature of the workpiece to be selectively chopped. In other words, with the chopper in one position, the heat from the workpiece is permitted to be sensed whereas in another position the heat is blocked from the sensor.

The voltage is amplified by amplifier 6 and provided as input V to one of three switches 7, 8 and 9. The switches are sequentially turned on by control signals generated by sequence control logic 10. The switches may be implemented by semiconductor devices such as field effect transistors. If field effect transistors are used, the control signals are applied to the gate electrodes of the devices.

Capacitors 11, 12 and 13 are connected at the outputs of the switches 7, 8 and 9, respectively, for storing the output voltage from the switches, approximately V The other sides of the capacitors are connected to electrical ground except for capacitor 13. In one embodiment, offset control circuit 17 is connected between the capacitor and ground. The offset circuit is discussed subsequently.

Sequence control logic 10, which may be implemented by AND gates or equivalent circuitry, receives the DCBA outputs from decade counter 14. The outputs are encoded by the sequence control logic, as shown in block 10, to provide sequence control signals T through T The control function of each signal is shown in the table illustrated as FIG. 1b.

Decade counter 14 may be implemented by series connected flip-i1ops including interconnecting logic gates. For that embodiment, the D flip-flop receives control pulses from clock 15. The counter recycles at each count of nine.

The clock 15 may be implemented by unijunction oscillator or by other circuitry well known to persons skilled in the art. In some embodiments, it may be preferred to provide an intermediate switch so that manual inputs can be provided to counter 14. In that way, the system can be held in any desired step in the control sequence. Similarly, manual inputs can also be provided to set decade counter 14 to a desired count. Manual control inputs 25 and 26 are shown for the clock 15 and decade counter 14, respectively.

FIG. la also illustrates indicator 16 which receives signals from decade counter 14. The count in the counter (representing the timing sequence) is therefore visible to an operator at all times during the operation of the system. Indicators, such as Nixie tubes, are commercially available.

In addition to providing sequence control signals on lines 18, 19 and 20 to switches 7, 8 and 9, respectively, sequence control logic 10 also provides a drive positive signal at T on line 21 to pulse amplifier 22 and a drive negative signal at T on line 23. The pulse amplifier provides a negative pulse to focus coil driver 24 for decreasing the focus current and a positive pulse for increasing the current.

In one embodiment, two opposite conductivity transistors may be connected in a push-pull arrangement between positive and negative voltages for providing the positive and negative pulses at the output of amplifier 22. For that embodiment, lines 21 and 23 are connected to the base electrodes of the transistors. Line 27 at the output of amplifier 22 conducts the pulses to the focus coil driver 24.

The voltage stored on capacitors ll, 12 and 13 are provided as inputs to comparison logic 28 on lines 29, 30 and 31, respectively. The voltage on line 29 is used for comparison purposes when the focus coil current is required to be decreased. The voltage on line 30 is used for comparison purposes when the current in the focus coil must be increased. The voltage on line 31 indicates the steady state condition of the focus coil.

It is pointed out that in a separate embodiment, the offset control circuit 17 may be interposed between capacitor 13 and electrical ground for biasing the steady state voltage to a value other than the normal steady state voltage. For example, if it is desired to focus the electron beam for producing less than the maximum temperature at the workpiece surface, the offset circuit, such as a voltage source with a potentiometer control, could be used to increase or decrease the steady state voltage to obtain any desired temperature at the workpiece surface.

Although the system would function as though the maximum temperature and being achieved at the workpiece surface, the offset voltage provided by offset circuit 17 wouldshift the maximum temperature to another temperature as a function of the voltage provided by circuit 17. However, for purposes of describing the preferred embodiment, it is assumed that the offset voltage is zero.

Clock 32 provides control pulses to comparison logic 28 on line 33 in response to an output from the comparison logic at certain times during the operating sequence. The control pulses enable the compared voltages on the lines 29, 30 and 31 to be gated into the up-down counter 37. The clock is enabled and disabled by a signal on line 87 as shown in more detail in FIG. 5.

A count-up signal is generated on line 34 at the output of comparison logic 28 and a countdown signal is generated on line 35 of the comparison logic. The count'up signal is generated at times T, and T-, if the V on capacitor 12 is greater than the V, voltage on capacitor 13. Similarly, the countdown signal is generated at T, and T, if the V,,,, signal on capacitor 11 is greater than the V, on capacitor 13 at those times.

A manual input to comparison logic 28 from line 36 may be used to manually control the comparison as may be required for test purposes. In the instances when the manual input is being used for controlling the comparison logic, manual controls are also provided to clock 15 and counter 14.

The outputs from the comparison logic 28 are provided as counting pulses to the up-down counter 37. For purposes of the Figure 1 embodiment, the up-down counter 37 is an 8-bit counter having bit positions A, representing the least significant digit, through H, representing the most significant digit of the count.

Counter 37 also has a manual input from reset 38 which may be used during certain tests for resetting the counter to a particular count. The counter also provides inputs to indicators 39 for producing a visual indication of the count in the counter. The indicators 39 may be comprised of three Nixie tubes and decoding circuitry or by other visual indicators wellknown to persons skilled in the art.

The outputs from the counter 37, A through H, are provided as inputs to the digital-to-analog converter 42 on lines designated generally by numeral 40. Each of the lines 40 provides either a relatively high or relatively low voltage to the digital-to-analog converter. For example, if the least significant digit A is a zero, a relatively low voltage is provided, whereas if the least significant digit had been a one, a relatively high voltage would have been provided. The digital inputs are converted to a drive current signal at the output of converter 42 on line 41. The current is amplified by focus coil driver 24 for providing drive current to the focus coil 3. An amplifier and emitter follower may be provided between the focus coil driver 24 and coil 3 if required. The amplifier and emitter follower may be included within the coil driver 24 symbol.

A brief description of the operation of system 1 can best be understood by referring to FIG. 2. FIG. 2 shows a plot of the focus coil current versus temperature. As indicated by the plot, the temperature increases to a maximum value at point 43 as the focus coil current increases. However, if the current is increased past that point, the temperature decreases.

An example of the focus of the beam at point 43 is shown in FIG. 3. The maximum temperature is represented by the focus of the beam 44 on workpiece 45. As the focus coil current is increased, as shown in FIG. 2, the beam focus changes so that it appears as shown by the dotted beam 46. A decrease of the focus coil current on the opposite side of the maximum point 43 may result in a beam configuration as shown by dotted outline 47.

In the usual case, the maximum temperature that may be generated by a focus beam is determined as a function of the materials being welded. Once the maximum temperature has been determined, the beam current and accelerating voltage are determined. For example, for welding aluminum, a welding temperature of approximately 1200" F. may be required. Based on that temperature, the welding parameters for generating the electron beam are determined. It is known that by maintaining the beam in a sharp focus on the surface of the workpiece, the temperature of l200 F. may be maintained.

In operation, clock 15 is turned on to force counter 14 to pass through its counting cycle. At T the 0000 count in the decade counter 14 is decoded by sequence control logic 10 for providing a drive positive signal on line 21 into amplifier 22. For the duration of that count, a pulse is provided on line 27 into focus coil driver 24. The output from the driver 24 causes the current in focus coil 3 to increase. At the same time, switch 8 is closed so that capacitor 12 charges to a voltage value representing the temperature of the beam on the workpiece during the T time interval. For purposes of illustration, assume that the beam was initially focused as shown by the beam configuration 48 in FIG. 4. At T assume that the focus changed as shown by beam configuration 49 in FIG. 4. As a result, the temperature at the workpiece would have decreased for the assumed conditions.

An illustration of the example can be seen by referring to FIG. 2. For example, assume that the initial focus caused a temperature of 900 C. as shown at point 50 in FIG. 2. .The increase in focus coil current would cause the temperature to drop to approximately 600 C. at point 51.

The drive positive pulse is terminated at the end of T and the system is permitted to return to its steady state condition, i.e. beam configuration 48, during the time intervals T and T At time T the 0011 count in decade counter 14 is decoded by sequence control logic for providing a drive negative signal on line 23 into pulse amplifier 22;For the T; time interval, a pulse is provided on line 27 into focus coil driver 24 for decreasing the focus current in coil 3. For the assumed circumstances, the beam focus may change from configuration 48 as shown in FIG. 4 to beam configuration 52 in FIG. 4. It should be obvious from an examination of FIG. 4, therefore, that the temperature at the workpiece would have increased.

Refer to FIG. 2 for an example of the change in temperature relative to the decrease in focus coil current. The temperature would increase from 900 C. at point 50 to approximately I200 C. at point 51. Switch 7 is closed at T: so that capacitor 11 stores a voltage representing the increase in temperature during T During T and T the drive negative pulse is discontinued so that the system can return to its steady state value as represented by point 50 in FIG. 2 and by beam configuration 48 in FIG. 4.

During T and T the voltages stored on the capacitors 11 through 13 are compared in comparison logic 28. For the example assumed, the steady state voltage would be greater than the V voltage on capacitor 12 and the V, voltage on capacitor 11 would be greater than the steady state voltage, V on capacitor 13. At T, and T-, time, clock 32 is enabled if either V,,,, or V is greater than V In other words, if the voltages are equal, the clock is not enabled at T and T-, time. However, for the example assumed, clock 32 is enabled and the comparison logic gates a signal from comparison logic 28 to updown counter 37 on line 35. The countdown signal forces the counter to decrease its count by one. As a result, the output on lines 40 into digital-to-analog converter 42 causes a decrease in the voltage on line 41 to focus coil driver 24. The current in coil 3 is instantaneously decreased. A voltage representing the temperature of the beam at the workpiece is provided into comparison logic 28 on line 53 so that if either V or V,,,,

become equal to the temperature, during T and T the clock 32 is disabled for preventing further changes in the focus coil current.

At T, and T the counts 1000 and 1001 of the decade counter 14 are decoded for closing switch 9. Capacitor 13 is then enabled to charge to a voltage representing the temperature of the workpiece at the end of T time. Since it was determined that the counter 37 was initially too high, and therefore had to be counted down by a signal on line 35, the beam focus may appear as shown by configuration 53in FIG. 4 at the end of T-, time. The temperature for that example may appear as the temperature at point 52 in FIG. 2.

The cycle is repeated at T until the increase in coil current at T and the decrease in coil current at T cause the temperature at the workpiece to shift from point 54 as shown in FIG. 2. In that case, V and V,,, would not be greater than V so that the count in counter 0 and, therefore, the output from D-A converter 42 would remain the same. The temperature at the workpiece would be approximately the maximum temperature of l350 C. as represented by point 43 in FIG. 2. The beam focus would appear as shown by configuration 44 in FIG. 3.

FIG. 5 is a schematic diagram of one embodiment of the comparison logic 28 shown generally in FIG. 1. The comparison logic includes emitter followers 60, 61, 62 and 63 between switches 7. 8 and 9 voltage comparators 64 and 65.

The emitter followers are provided for isolation. The outputs from emitter followers 67 and 68. Diodes 69 and 70 are also provided at input 71 to gate into capacitor 66 the highest voltage from the emitter followers 68 and 67. The other input to voltage comparator 66 is taken from the output of amplifier 6 through emitter follower 72.

The output from voltage comparator 64 is true when V,,, is greater than V Similarly, the output from voltage comparator 65 is true when V, is greater than V The output from voltage comparator 66 is true when either V or V,,,, is greater than V,,.

NAND gates 73, 74 and 75 receive inputs from voltage comparators 64, 65 and 66, respectively. The other inputs 8 and C to the NAND gates are taken from the decade counter 14. NAND gate 75 provides a drive signal for the clock 32 at T and T, if V or V, are less than V Switch 76 of the clock is interposed between the oscillator 77 of the clock and the output from NAND gate 75. The oscillator may be implemented by a unijunction semiconductor device which has its control electrode connected to the collector of the transistor of switch 76. When the transistor is off, a capacitor at the control electrode is permitted to charge. When the switch 76 is on, the capacitor is discharged so that the oscillator is turned off. Potentiometer 78 varies the resistance of an RC time constant for varying the frequency of the oscillator. The oscillator output may appear as shown by pulse group 79 on line 80.

NAND gates 73 and 74 provide inputs to NAND gates 81 and 82 which also receive manual inputs. For automatic operation, the manual inputs are connected to a high voltage so that the signal on lines 83 and 84 control the output from NAND gates 81 and 82, respectively. It is also pointed out that since the B and C inputs to NAND gates 73, 74 and 75 taken from decade counter 14 are high during T and T the signals on lines 85, 86 and 87 control the outputs from the NAND gates 73-75. For example, if the signal on line is true during T and T the output from NAND gate 73 is false, whereas if the input on line 85 is false during T and T the output from NAND gate 73 is true.

The outputs from NAND gates 81 and 82 provide the count up (U) and countdown (D) signals on lines 34 and 35, respectively. The count-up and countdown signals on lines 34 and 35 are provided as inputs to the up-down counter 37, as shown in FIG. 6. In addition, the up-down counting signals are provided as inputs to NAND gates 90 and 91 which also receive a clock signal from clock 32 on line 80.

The count-up signal is true at T and T, if V is greater than V whereas the countdown signal is true at T and T, if V is greater than V Both signals are not true or false at the same time. It is pointed out that the count-up and countdown signals are only gated through gates 90 and 91 if V or V, are greater than V The outputs from gates 90 and 91 provide inputs to NAND gate 92 which is used as a clock signal for the first bit position of counter 37. The counter is described in more detail in connection with FIG. 6.

If the count-up signal is true at T and T the countdown signal is false. Therefore, when the clock is false, the output from gate 90 will be true. The output from gate 91 will also be true so that the output from gate 92 will be false. However, when the clock signal is true the output from gate 90 will be false, the output from gate 91 will remain true, and the output from gate 92 will become true so that it can be used as a clock signal.

FIG. 6 is a schematic diagram of the up-down counter 37 comprising flip-flops 93 through 100. Flip-flop 93 is gated by the output from NAND gate 92. Each succeeding flip-flop is gated by the output from the preceding flip-flop by logic 101 through 107. For example, the output from logic 101 provides a clock input to flip-flop 94. The output from flip-flop 94 is provided as a clock input to flip-flop 95 through logic 102. The output from the logic gates 101 through 107 is either high or low as a function of the up and down inputs taken from lines 88 and 99 as shown in FIG. 5. If the up input is high, the true output from the flip-flops is gated through to the next input. For example, if the up input is high for the first bit position of the counter, the A output is gated through NAND gates 108 and 109 to the clock input of flip-flop 94. If the down input had been true, the A input would have been gated through NAND gate 110 and NAND gate 109 to the clock input to flip-flop 94. A similar explanation is true for the remaining bit positions of the counter 37.

In addition, the true, i.e. A, B, C, D, E, F, G, and H outputs from the flip-flop are provided as inputs to the A to D converter 42. For convenience, only one bit position, the least significant digit, of the A to D converter is shown. The other bit positions are shown as blocks for convenience. The output from all the bit positions are summed at point 111 with the pulsed output from pulse amplifier 22 to provide an input signal to the focus coil driver 24.

The circuitry for generating the voltage representing the least significant digit comprises transistor 112 which is turned on by the A signal from flip-flop 93. The signal is divided across resistors 113 and 114 at the base of the transistor. Resistor 115 is provided as a load resistor between the collector of the transistor and a voltage source +V. The output from transistor 112 is taken from its collector. The voltage at the collector and the voltage, -V at one side of resistor 116, provide a control voltage at the base electrode of transistor 118. Resistor 117 is provided between the collector of transistor 112 and the base electrode of transistor 118.

When transistor 112 is on, transistor 118 is off. When transistor 112 is off, transistor 118 is on. When transistor 118 is on, point 119 is connected to ground and volts are provided at the least significant digit. When transistor 118 is off, the +V volts are divided across resistors 120 and 121 to provide a voltage at point 111 representing the least significant digit.

For purposes of illustrating one example, the +V and V voltages may be volts and the 120 and 121 resistors may be 2k and 510k, respectively. The resistors of the corresponding stages between corresponding points 119 and 111 are consecutively reduced by a factor of approximately two so the resistor at the most significant digit would be approximately 1.3k for the example given.

FIG. 7 is a circuit diagram of switch 9 shown generally in FIG. 1. The other switches 7 and 8 may be implemented by similar circuitry. The switch comprises transistor 122 which receives an input signal from the sequence control logic on its base electrode. The signal from the sequence control logic is divided across resistors 123 and 124. The collector of the transistor 122 is tied to a voltage source V through resistor 128. The output is provided from the collector across resistor 125 to the gate electrode of field effect transistor 126. The gate electrode of transistor 126 is biased by voltage V across resistors 127 and 125. The voltage at the gate electrode of transistor 126 changes as a function of the off or on condition of transistor 122.

When transistor 126 is on, capacitor 13 is charged with voltage V appearing on the other electrode of the field effect transistor 126. The transistor is turned on at T and T when the signal at the gate of transistor 122 is low. At that time, the transistor 122 is turned off so that the voltages V and -V are divided between resistors 127, 128 and 125 to turn transistor 126 on.

FIG. 8 is an illustration of the sequence control logic 10 shown generally in FIG. 1. The sequence control logic may be implemented by four NAND gates 129 each receiving ABCD output signals from decade counter 14. The NAND gates 129 invert the ABCD signals and provide input signals to NAND gate 130. In addition, the C and output signals are provided as inBut signals to NAND gate 131 and switch 9 respectively. The signal is false only during T and T However, since it is low, transistor 122 is turned off for enabling the conduction of transistor 126 of switch 9.

G is high during T time. However, since the other inputs A and B to NAND gate 131 are also high during T time, the output from NAND gate 131 is low and switch 7 is turned on to permit the storing of V on capacitors 11.

At T the outputs from NAND gates 129 are all true so that the output from NAND gate 130 is low. The low output from NAND gate 130 turns switch 8 on so that capacitor 12 can store the V voltage.

5 NAND gate 130 provides an input into pulse amplifier 22 on line 21. NAND gate 131 provides an input into 132 which inverts the output from 131 to provide an input to pulse amplifier 22 on line 23. At T the A and B inputs to NAND gate 131 are high and the 6 input is high. As a result, the output is 10 low, inverted through NAND gate 132 to provide a high input on line 23 to pulse amplifier 22. As a result of the high input to pulse amplifier 22, a negative output pulse is provided on line 27 to the summing point at the output of D to A converter 42.

FIG. 8 also illustrates one embodiment of the pulse amplifi- 15 er 22. The amplifier includes resistors 133 and 134 between the output on NAND gate 132 and voltage source V. The resistors provide a voltage divider which enables transistor 135 to turn on as a function of the output from NAND gate 132.

When transistor 135 is on, voltage -V is dropped across resistor 136 to electrical ground. When transistor 135 is off, the

-V voltage is dropped across resistors 136 and 137 to provide a negative pulse at the output of the driver on line 27.

Resistors 138 and 139 provide a voltage divider between NAND gate 130 and voltage source -V for enabling transistor 140 to turn on as a function of the output from NAND gate 130. When the transistor is off, voltage +V is dropped across resistors 142 and 143 to provide a plus voltage output from the driver on line 27. Only one of the transistors 135 and 140 are turned off at a time. The transistors are consecutively turned off to provide a plus pulse for increasing the focus coil current and a negative pulse for decreasing the focus coil current as previously described.

We claim:

1. A system for controlling the focus of an electron beam on a workpiece, said system comprising,

means for sequentially changing the focus of the beam during certain time intervals,

means for sequentially sensing the temperature at the workpiece as the focus is changed including means for storing voltages representing the temperature during each sensing sequence and for representing the steady state temperature,

means for comparing said stored voltages for changing the current through the focused coil to a new steady state value as a function of the relative values of each sensed temperature.

2. The system recited in claim 1 wherein said focus is initially changed in one direction during one time interval and 50 then in the opposite direction during a subsequent time interval,

said means for sensing including means for storing a voltage indicating the temperature at the workpiece during the time intervals whereby by comparing the stored voltages to the voltage representing the steady state temperature, the means for comparing generates a signal for increasing or decreasing the focus coil current for increasing or decreasing the temperature at the workpiece until a predetermined temperature has been sensed.

3. The system recited in claim 1 further including counter means responsive to the means for comparing for increasing or decreasing its count as a function of the voltages stored during the sensing sequences relative to the stored voltage representing the steady state temperature at the workpiece.

4. The system recited in claim 3 including means responsive to said counter means for maintaining the current in said coil a value represented by the count in said counter means, until changed during a subsequent sequence if said sensed voltages are not approximately equal.

5. The system recited in claim 3 further including clock means responsive to a difference in said voltages for actuating a counter during certain sequences of said system's operation and for interrupting said counter when the voltages are equal.

6. The system recited in claim 3 further including means for 75 converting the count into a drive current, said drive current temperature other than the maximum temperature at the workpiece.

9. The system recited in claim 1 wherein said means for sequentially sensing comprises a plurality of switches including a first switch for storing a voltage as the focus of the coil is increased, a second switch for storing a voltage as the focus of the coil is decreased, and a third switch for storing a voltage indicating the steady state temperature of the electron beam on the workpiece.

Claims (9)

1. A system for controlling the focus of an electron beam on a workpiece, said system comprising, means for sequentially changing the focus of the beam during certain time intervals, means for sequentially sensing the temperature at the workpiece as the focus is changed including means for storing voltages representing the temperature during each sensing sequence and for representing the steady state temperature, means for comparing said stored voltages for changing the current through the focused coil to a new steady state value as a function of the relative values of each sensed temperature.

2. The system recited in claim 1 wherein said focus is initially changed in one direction during one time interval and then in the opposite direction during a subsequent time interval, said means for sensing including means for storing a voltage indicating the temperature at the workpiece during the time intervals whereby by comparing the stored voltages to the voltage representing the steady state temperature, the means for comparing generates a signal for increasing or decreasing the focus coil current for increasing or decreasing the temperature at the workpiece until a predetermined temperature has been sensed.

3. The system recited in claim 1 further including counter means responsive to the means for comparing for increasing or decreasing its count as a function of the voltages stored during the sensing sequences relative to the stored voltage representing the steady state temperature at the workpiece.

4. The system recited in claim 3 including means responsive to said counter means for maintaining the current in said coil a value represented by the count in said counter means, until changed during a subsequent sequence if said sensed voltages are not approximately equal.

5. The system recited in claim 3 further including clock means responsive to a difference in said voltages for actuating a counter during certain sequences of said system''s operation and for interrupting said counter when the voltages are equal.

6. The system recited in claim 3 further including means for converting the count into a drive current, said drive current being provided through a focus coil for focusing said electron beam.

7. The system recited in claim 1 further including means for generating a recycling sequence of pulses for controlling the operating sequence of said system, said focus being changed during each cycle until a maximum temperature has been sensed at the workpiece.

8. The system recited in claim 1 including means for biasing said means for sequentially sensing for indicating a temperature which is different from the temperature sensed at the workpiece whereby said beam can be focused for producing a tEmperature other than the maximum temperature at the workpiece.

9. The system recited in claim 1 wherein said means for sequentially sensing comprises a plurality of switches including a first switch for storing a voltage as the focus of the coil is increased, a second switch for storing a voltage as the focus of the coil is decreased, and a third switch for storing a voltage indicating the steady state temperature of the electron beam on the workpiece.

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