US3506426A - Multi-layer type fusing boat - Google Patents

Multi-layer type fusing boat Download PDF

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US3506426A
US3506426A US590985A US3506426DA US3506426A US 3506426 A US3506426 A US 3506426A US 590985 A US590985 A US 590985A US 3506426D A US3506426D A US 3506426DA US 3506426 A US3506426 A US 3506426A
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boat
glass
fusing
metal
eyelets
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US590985A
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Chan H Wang
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Texas Instruments Inc
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Texas Instruments Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C29/00—Joining metals with the aid of glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/32—Sealing leading-in conductors

Definitions

  • the multi-layer fusion boat comprising a bottom plate with cavities for each element to be assembled and an aligned lead holding plate with geometrically shaped peripheral elements enclosing groups of leads in specific relationship and an aligned cover plate with glass port delivering means for the assembly.
  • This invention relates to glass-to-metal seals and more particularly to a fusing boat for manufacturing headers for semiconductor devices.
  • a header a support platform for a semiconductor device, is commonly formed by sealing glass to metal leads and to a metal eyelet.
  • An object of this invention is a fusing boat for forming glass-to-metal seals that does not deteriorate with use.
  • Another object of the invention is a fusing boat for forming glass-to-metal seals that can be cleaned of glass buildup.
  • a further object of the invention is a fusing boat for forming glass-to-metal seals that does not contaminate the glass-to-metal seal to form bubbles at the glass-tometal interface.
  • a preferred embodiment of the fusing boat of the invention comprises a bottom section 1 made of metal, preferably Kovar, a trademarked nickel cobalt alloy of iron manufactured by the Westinghouse Electric Company.
  • Said section has a number of eyelet seating slots 2 (eight by way of example, as shown in the drawing) in which to hold the eyelets 3 of the headers in relationship to the leads 4 of said headers, which leads are connected together in a lead frame 5, both the frame 5 and the leads 4 being made of the same metal or alloy as the sections 1 and 8 of the fusing boat to insure the same coefficient of expansion between the fusing boat and the headers.
  • the lead frame 5 has precisely located holes 6 which locate on the posts 7 of the bottom section 1 of the boat.
  • the top section 8 of the boat has locating holes 9 which also locate on posts 7. Therefore both sections 1 and 8 of the boat, eyelets 3 and lead frame 5 are precisely aligned with each other.
  • the top section 8 of the boat has eight apertures 10 to allow weights (not shown) to be placed on top of the eyelets 3 when required.
  • a pressed glass pellet (not shown) or a glass slurry (not shown) is placed in each eyelet 3 after the leads 4 "ice are located in the eyelet so that the leads extend through lead openings (not shown) in the eyelets 3.
  • the assembly of eyelets 3, lead frame 5 and the glass is placed on the bottom section 1 of the boat with the eyelets open-end up in the eyelet seating slots 2, such that the locating posts 7 pass through the locating holes 6 of the lead frame 5.
  • the top section 8 of the boat is then placed over the assembled lead frame and eyelets by aligning the 10- cating holes 9 with the locating posts 7.
  • a weight (not shown) is then placed in each aperture 10 of the top section to aid in forming the glass-to-metal seal when the glass pellet is used but is not required with the glass slurry.
  • the assembled boat and header components are made to travel through a conventional header fusing furnace for about one hour, during which time the glass melts to form glass-to-metal seals to the eyelets and leads.
  • the Kovar boat is virtually unaffected by the furnace conditions so that it has very extended life. Because the Kovar does not deteriorate with use it is not a source of contamination thereby allowing almost bubble-free glass-tometal seals. Any glass that has fallen on the surface of the boat can be easily removed with a dilute hydrofluoric acid etch without harming the boat. Since the boat is made from the same metal as the metal components of the header there is a perfect thermal expansion match of the boat and header during the sealing operation which increases the dimensional control of the header.
  • a header fusing boat for releasably holding a metal lead frame, such as the type having groups of metal leads and respective metal eyelets, in relative position, and for making glass-to-metal seals between the groups of leads and respective eyelets, comprising in combination:
  • a geometrically shaped metal bottom section hav- (1) a plurality of geometrically shaped slots formed on one surface thereof, and (2) a plurality of spaced posts extending from said one surface;
  • a geometrically shaped metal lead frame contiguous with said bottom section and having 1) a plurality of groups of leads, with each group of leads extending toward and into a respective geometrically shaped eyelet, and (2) a plurality of spaced openings formed therein, each of which is coaxially aligned with and positioned upon a respective one of said posts on said bottom section, wherein (3) said eyelets are respectively positioned within said slots in said bottom section; and
  • a geometrically shaped metal top section contiguous with said lead frame and having (1) a plurality of geometrically shaped openings formed therein, each of which circumscribes a respective eyelet of said lead frame, and (2) a plurality of spaced openings formed therein, each of which is coaxially aligned with and positioned upon a respective one of said posts on said bottom section

Description

April 14, 1970 CHAN H. WANG MULTI-LAYER TYPE FUSING BOAT Filed OOt.'3l. 1966 INVENTOR Chan H. Wang ATTORNEY United States Patent 3,506,426 MULTI-LAYER TYPE FUSING BOAT Chan H. Wang, Mountain View, Calif., assignor to Texas Instruments Incorporated, Dallas, Tex., a corporation of Delaware Filed Oct. 31, 1966, Ser. No. 590,985 Int. Cl. C03b 23/20 U.S. Cl. 65-156 3 Claims ABSTRACT OF THE DISCLOSURE The multi-layer fusion boat comprising a bottom plate with cavities for each element to be assembled and an aligned lead holding plate with geometrically shaped peripheral elements enclosing groups of leads in specific relationship and an aligned cover plate with glass port delivering means for the assembly.
This invention relates to glass-to-metal seals and more particularly to a fusing boat for manufacturing headers for semiconductor devices.
A header, a support platform for a semiconductor device, is commonly formed by sealing glass to metal leads and to a metal eyelet. A holder, or fusing boat as it is sometimes called, is used to hold the component parts of the headers in the desired relationship to each other until the glass-to-metal seal is formed.
An object of this invention is a fusing boat for forming glass-to-metal seals that does not deteriorate with use.
Another object of the invention is a fusing boat for forming glass-to-metal seals that can be cleaned of glass buildup.
A further object of the invention is a fusing boat for forming glass-to-metal seals that does not contaminate the glass-to-metal seal to form bubbles at the glass-tometal interface.
The novel features believed to be characteristic of the invention are set forth in the appended claims. The invention itself, however, as well as further objects and advantages thereof, will best be understood from the following detailed description of an illustrative embodiment thereof when read in conjunction with the accompanying drawing wherein the sole figure is a perspective representation of the two complementary sections of a fusing boat according to the invention, including a number of header components in between the two sections of the boat.
Referring to the drawing, a preferred embodiment of the fusing boat of the invention comprises a bottom section 1 made of metal, preferably Kovar, a trademarked nickel cobalt alloy of iron manufactured by the Westinghouse Electric Company. Said section has a number of eyelet seating slots 2 (eight by way of example, as shown in the drawing) in which to hold the eyelets 3 of the headers in relationship to the leads 4 of said headers, which leads are connected together in a lead frame 5, both the frame 5 and the leads 4 being made of the same metal or alloy as the sections 1 and 8 of the fusing boat to insure the same coefficient of expansion between the fusing boat and the headers. The lead frame 5 has precisely located holes 6 which locate on the posts 7 of the bottom section 1 of the boat. The top section 8 of the boat has locating holes 9 which also locate on posts 7. Therefore both sections 1 and 8 of the boat, eyelets 3 and lead frame 5 are precisely aligned with each other. The top section 8 of the boat has eight apertures 10 to allow weights (not shown) to be placed on top of the eyelets 3 when required.
A pressed glass pellet (not shown) or a glass slurry (not shown) is placed in each eyelet 3 after the leads 4 "ice are located in the eyelet so that the leads extend through lead openings (not shown) in the eyelets 3. The assembly of eyelets 3, lead frame 5 and the glass is placed on the bottom section 1 of the boat with the eyelets open-end up in the eyelet seating slots 2, such that the locating posts 7 pass through the locating holes 6 of the lead frame 5. The top section 8 of the boat is then placed over the assembled lead frame and eyelets by aligning the 10- cating holes 9 with the locating posts 7. A weight (not shown) is then placed in each aperture 10 of the top section to aid in forming the glass-to-metal seal when the glass pellet is used but is not required with the glass slurry.
The assembled boat and header components are made to travel through a conventional header fusing furnace for about one hour, during which time the glass melts to form glass-to-metal seals to the eyelets and leads. The Kovar boat is virtually unaffected by the furnace conditions so that it has very extended life. Because the Kovar does not deteriorate with use it is not a source of contamination thereby allowing almost bubble-free glass-tometal seals. Any glass that has fallen on the surface of the boat can be easily removed with a dilute hydrofluoric acid etch without harming the boat. Since the boat is made from the same metal as the metal components of the header there is a perfect thermal expansion match of the boat and header during the sealing operation which increases the dimensional control of the header.
Although a preferred embodiment of the invention has been described in detail, it is to be understood that ohvious changes, substitutions, and alterations can be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
What is claimed is:
1. A header fusing boat for releasably holding a metal lead frame, such as the type having groups of metal leads and respective metal eyelets, in relative position, and for making glass-to-metal seals between the groups of leads and respective eyelets, comprising in combination:
(a) a geometrically shaped metal bottom section hav- (1) a plurality of geometrically shaped slots formed on one surface thereof, and (2) a plurality of spaced posts extending from said one surface; (b) a geometrically shaped metal lead frame contiguous with said bottom section and having 1) a plurality of groups of leads, with each group of leads extending toward and into a respective geometrically shaped eyelet, and (2) a plurality of spaced openings formed therein, each of which is coaxially aligned with and positioned upon a respective one of said posts on said bottom section, wherein (3) said eyelets are respectively positioned within said slots in said bottom section; and (c) a geometrically shaped metal top section contiguous with said lead frame and having (1) a plurality of geometrically shaped openings formed therein, each of which circumscribes a respective eyelet of said lead frame, and (2) a plurality of spaced openings formed therein, each of which is coaxially aligned with and positioned upon a respective one of said posts on said bottom section; wherein (d) said bottom and top sections releasably hold said eyelets in a predetermined position with respect to said groups of leads. 2. The header fusing boat of claim 1 wherein: (a) said bottom and top sections and said lead frame are rectangular shaped; and
. 3 4 (b) said slots of said bottom section, said geometric 3,310,392 3/1967 Rhodes 65-154 openings of said top section and said eyelets of said 3,317,106 5/1967 Dix 65-154 XR lead frame are rectangular shaped. 3. The header fusing boat of claim 1 wherein said FOREIGN PATENTS bottom and top sections and said lead frame are made 5 347,724 1886 yf k1 blt llo of'o. me e co a a y n FRANK W. MIGA, Primary Examiner References Cited UNITED STATES PATENTS 911,678 2/ 1909' Quertinmount 65154 1 3,299,502 1/1967 Wanesky 65-155 XR US. Cl. X.R.
US590985A 1966-10-31 1966-10-31 Multi-layer type fusing boat Expired - Lifetime US3506426A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US911678A (en) * 1907-09-24 1909-02-09 Jules J Quertinmont Process and apparatus for making plate, window, or wire glass.
DE347724C (en) * 1919-06-23 1922-01-24 Duplex Engine Governor Co Inc Control device for engines, in particular internal combustion engines
US3299502A (en) * 1964-10-01 1967-01-24 Western Electric Co Methods and apparatus for assembling articles
US3310392A (en) * 1962-03-19 1967-03-21 Corning Glass Works Electrical capacitor manufacture
US3317106A (en) * 1963-08-19 1967-05-02 Dix Engineering Co Solder boat

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US911678A (en) * 1907-09-24 1909-02-09 Jules J Quertinmont Process and apparatus for making plate, window, or wire glass.
DE347724C (en) * 1919-06-23 1922-01-24 Duplex Engine Governor Co Inc Control device for engines, in particular internal combustion engines
US3310392A (en) * 1962-03-19 1967-03-21 Corning Glass Works Electrical capacitor manufacture
US3317106A (en) * 1963-08-19 1967-05-02 Dix Engineering Co Solder boat
US3299502A (en) * 1964-10-01 1967-01-24 Western Electric Co Methods and apparatus for assembling articles

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