US2730641A - Magnetic compensator - Google Patents

Magnetic compensator Download PDF

Info

Publication number
US2730641A
US2730641A US360978A US36097853A US2730641A US 2730641 A US2730641 A US 2730641A US 360978 A US360978 A US 360978A US 36097853 A US36097853 A US 36097853A US 2730641 A US2730641 A US 2730641A
Authority
US
United States
Prior art keywords
arms
chamber
compensator
magnetic
changeable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US360978A
Inventor
Thomas A Mclauchlan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Steel Corp
Original Assignee
United States Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
Priority to US360978A priority Critical patent/US2730641A/en
Application granted granted Critical
Publication of US2730641A publication Critical patent/US2730641A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Definitions

  • This invention relates to an improved compensator for changeable local magnetic fields.
  • My compensator is especially suited for electron microscopes, but it is apparent that it can be used with other mechanisms which are similarly disturbed by changeable local elds.
  • an electron beam from a suitable source passes through an evacuated specimen chamber and impinges on a specimen at an angle of incidence of approximately 90. Any magnetic field that acts on this beam tends to deflect it away from the specimen.
  • Such microscopes commonly are equipped with means which compensate for constant magnetic fields that act on this beam, such as that of the earth.
  • those with which l am familiar lack effective means to compensate for changeable fields, and it often has been necessary to resort to complete magnetic shielding to overcome the effects of such fields.
  • An object of the present invention is to provide an improved and simplified compensator which effectively overcomes the effects of local changeable magnetic fields and which eliminates the need for elaborate shielding of the mechanism to which it is applied.
  • a further object is to provide an improved compensator which includes opposed hook-shaped arms of magnetic material arranged to have induced therein a magnetic field proportional to and opposite a disturbing field, whereby the latter is effectively compensated.
  • Figure 1 is a top plan view, partly in section, of a compensator which embodies features of my invention.
  • Figure 2 is a vertical sectional View on line lI-II of Figure l.
  • the drawing shows a portion of a cylindrical specimen chamber of an electron microscope.
  • This chamber is formed of nonmagnetic material and is evacuated after insertion of a specimen indicated at X.
  • An electron beam a--b from a source Y beyond the opposite end of the chamber passes therethrough along the central axis and impinges on the specimen.
  • Any local changeable field such as that indi ⁇ cated in Figure l, tends to defiect this beam away from the specimen and thus prevents proper observation thereof.
  • the compensator of my invention comprises a pair of opposed hook-shaped arms 12 and 12a which are of a soft magnetic material and are of like construction. Each arm has a screw-threaded shank 13 and a reversely bent tip 14, which are axially aligned.
  • the two arms are held together as a rigid assembly by pairs of clamping bars 15 of a conductive nonmagnetic material, such as aluminum or brass, which does not acquire an electrostatic charge when exposed to an electron beam.
  • a conductive nonmagnetic material such as aluminum or brass
  • the assembly of the two arms 12 and 12a and the clamping bars 15 is mounted inside the chamber 10 with the common axis of the Shanks and tips extending across the diameter of the chamber parallel to the direction of the external changeable field.
  • the mounting means illustrated includes spacers 17 which fit against the inside wall of the chamber and nuts 18 which are threadedly engaged with the Shanks and abut said spacers.
  • the spacers and nuts preferably are formed of the same material as the clamping bars 15.
  • the electron beam a-b passes through the gap 16 between the two tips 14.
  • a pair of bushings 19 and 19a are xed to the exterior of the chamber 10, for example by soldering or adhesively.
  • the bushing 19 is attached opposite the shank of the arm 12 and the bushing 19a opposite that of the arm 12a.
  • Plugs 2) and 20a are threadedly engaged with the bushings 19 and 19a respectively for adjustment toward and away from the Shanks of the arms.
  • These plugs preferably are of similar material to the arms and are axially aligned with the Shanks and tips thereof.
  • the changeable local field always induces a proportional eld in the arms 12 and 12a.
  • the induced field is of course much more intense than the external eld, but it acts on the electron beam only in the relatively small region of the gap 16.
  • the exact relation between the intensities of the two fields can be adjusted by moving the plugs 2i)l and 20a closer to or farther from the ends of the arms 12 and 12a.
  • the reverse bends in these arms causes the field induced therein to act in a direction opposite that of the external field and consequently compensates for the latter.
  • the present invention affords a compensator of very simple construction that effectively overcomes disturbances caused by local changeable magnetic fields. It eliminates any need for the more expensive and cumbersome magnetic shielding.
  • a compensator for changeable local magnetic fields of a known direction comprising a pair of hook-shaped arms of soft magnetic material each having a shank and a reversely bent tip aligned with its shank, non-magnetic and conductive means clamping said arms together with their tips separated to form a gap and the Shanks and tips of the two arms all in alignment, and means mounting said arms inside said chamber with said Shanks and tips lying along a diameter of the chamber in the direction of the changeable local field and with the central axis of the chamber passing through said gap.
  • a combination as defined in claim 1 including mounting means on the exterior of said chamber opposite the extremities of said Shanks, and plugs of soft magnetic material adjustably supported in said exterior mounting means in alignment with said Shanks and tips for Varying the intensity of magnetic field induced in said arms.

Description

Jan. lO, 1956 T. A. MOLAUCHLAN 2,730f64l MAGNETIC COMPENSATOR Filed June 1l, 1953 ff/Mm-X [noem:
Unite MAGNETIC COMPENSATUR Application .lune 11, 1953, Serial No. 360,978
2 Claims. (Cl. 313-75) This invention relates to an improved compensator for changeable local magnetic fields.
My compensator is especially suited for electron microscopes, but it is apparent that it can be used with other mechanisms which are similarly disturbed by changeable local elds. In the example of an electron microscope, an electron beam from a suitable source passes through an evacuated specimen chamber and impinges on a specimen at an angle of incidence of approximately 90. Any magnetic field that acts on this beam tends to deflect it away from the specimen. Such microscopes commonly are equipped with means which compensate for constant magnetic fields that act on this beam, such as that of the earth. However, those with which l am familiar lack effective means to compensate for changeable fields, and it often has been necessary to resort to complete magnetic shielding to overcome the effects of such fields.
An object of the present invention is to provide an improved and simplified compensator which effectively overcomes the effects of local changeable magnetic fields and which eliminates the need for elaborate shielding of the mechanism to which it is applied.
A further object is to provide an improved compensator which includes opposed hook-shaped arms of magnetic material arranged to have induced therein a magnetic field proportional to and opposite a disturbing field, whereby the latter is effectively compensated.
In accomplishing these and other objects of the invention, I have provided improved details of structure, a preferred form of which is shown in the accompanying drawing, in which:
Figure 1 is a top plan view, partly in section, of a compensator which embodies features of my invention; and
Figure 2 is a vertical sectional View on line lI-II of Figure l.
As an example of suitable environmental structure for the compensator of my invention, the drawing shows a portion of a cylindrical specimen chamber of an electron microscope. This chamber is formed of nonmagnetic material and is evacuated after insertion of a specimen indicated at X. An electron beam a--b from a source Y beyond the opposite end of the chamber passes therethrough along the central axis and impinges on the specimen. Any local changeable field, such as that indi` cated in Figure l, tends to defiect this beam away from the specimen and thus prevents proper observation thereof.
The compensator of my invention comprises a pair of opposed hook- shaped arms 12 and 12a which are of a soft magnetic material and are of like construction. Each arm has a screw-threaded shank 13 and a reversely bent tip 14, which are axially aligned. The two arms are held together as a rigid assembly by pairs of clamping bars 15 of a conductive nonmagnetic material, such as aluminum or brass, which does not acquire an electrostatic charge when exposed to an electron beam. In their clamped position the Shanks and tips 13 and 14 of both arms are all in alignment, and the two tips 14 are separated by a gap 16.
Zfiil iatented Jan. 10, 1956 The assembly of the two arms 12 and 12a and the clamping bars 15 is mounted inside the chamber 10 with the common axis of the Shanks and tips extending across the diameter of the chamber parallel to the direction of the external changeable field. The mounting means illustrated includes spacers 17 which fit against the inside wall of the chamber and nuts 18 which are threadedly engaged with the Shanks and abut said spacers. The spacers and nuts preferably are formed of the same material as the clamping bars 15. The electron beam a-b passes through the gap 16 between the two tips 14.
A pair of bushings 19 and 19a are xed to the exterior of the chamber 10, for example by soldering or adhesively. The bushing 19 is attached opposite the shank of the arm 12 and the bushing 19a opposite that of the arm 12a. Plugs 2) and 20a are threadedly engaged with the bushings 19 and 19a respectively for adjustment toward and away from the Shanks of the arms. These plugs preferably are of similar material to the arms and are axially aligned with the Shanks and tips thereof.
The changeable local field always induces a proportional eld in the arms 12 and 12a. The induced field is of course much more intense than the external eld, but it acts on the electron beam only in the relatively small region of the gap 16. The exact relation between the intensities of the two fields can be adjusted by moving the plugs 2i)l and 20a closer to or farther from the ends of the arms 12 and 12a. The reverse bends in these arms causes the field induced therein to act in a direction opposite that of the external field and consequently compensates for the latter.
From the foregoing description it s seen that the present invention affords a compensator of very simple construction that effectively overcomes disturbances caused by local changeable magnetic fields. It eliminates any need for the more expensive and cumbersome magnetic shielding.
While I have shown and described only a single embodiment of the invention, it is apparent that modifications may arise. Therefore I do not wish to be limited to the disclosure set forth but only by the scope of the appended claims.
I claim:
l. 'I'he combination, with a device which includes a cylindrical chamber and means for passing an electron beam through said chamber along its central axis, of a compensator for changeable local magnetic fields of a known direction comprising a pair of hook-shaped arms of soft magnetic material each having a shank and a reversely bent tip aligned with its shank, non-magnetic and conductive means clamping said arms together with their tips separated to form a gap and the Shanks and tips of the two arms all in alignment, and means mounting said arms inside said chamber with said Shanks and tips lying along a diameter of the chamber in the direction of the changeable local field and with the central axis of the chamber passing through said gap.
2. A combination as defined in claim 1 including mounting means on the exterior of said chamber opposite the extremities of said Shanks, and plugs of soft magnetic material adjustably supported in said exterior mounting means in alignment with said Shanks and tips for Varying the intensity of magnetic field induced in said arms.
References Cited inthe file of this patent UNITED STATES PATENTS 2,153,643 Roosenstein et al Apr. l1, 1939 2,425,125 Richards Aug. 5, 1947 2,637,000 Page Apr. 28, 1953 2,651,000 Linder Sept. 1, 1953
US360978A 1953-06-11 1953-06-11 Magnetic compensator Expired - Lifetime US2730641A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US360978A US2730641A (en) 1953-06-11 1953-06-11 Magnetic compensator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US360978A US2730641A (en) 1953-06-11 1953-06-11 Magnetic compensator

Publications (1)

Publication Number Publication Date
US2730641A true US2730641A (en) 1956-01-10

Family

ID=23420155

Family Applications (1)

Application Number Title Priority Date Filing Date
US360978A Expired - Lifetime US2730641A (en) 1953-06-11 1953-06-11 Magnetic compensator

Country Status (1)

Country Link
US (1) US2730641A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2153643A (en) * 1936-01-24 1939-04-11 Telefunken Gmbh Cathode ray deflection apparatus
US2425125A (en) * 1940-07-20 1947-08-05 Hartford Nat Bank & Trust Co Cathode-ray tube with magnetic compensating means
US2637000A (en) * 1951-02-15 1953-04-28 Magnetic electron -lens
US2651000A (en) * 1949-11-22 1953-09-01 Rca Corp Reflex velocity modulated discharge device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2153643A (en) * 1936-01-24 1939-04-11 Telefunken Gmbh Cathode ray deflection apparatus
US2425125A (en) * 1940-07-20 1947-08-05 Hartford Nat Bank & Trust Co Cathode-ray tube with magnetic compensating means
US2651000A (en) * 1949-11-22 1953-09-01 Rca Corp Reflex velocity modulated discharge device
US2637000A (en) * 1951-02-15 1953-04-28 Magnetic electron -lens

Similar Documents

Publication Publication Date Title
US2503173A (en) Permanent magnetic electron lens system
US2500455A (en) Charged particle deflecting unit employing a permanent magnet
US2452919A (en) Electron optical system
US2730641A (en) Magnetic compensator
DE1766111B2 (en) Cavity resonator
WO2004013577A1 (en) Sensor that operates according to a running time principle comprising a detector unit for mechanically elastic shafts
US3325757A (en) Negative temperature coefficient means for a magnet structure
DE3415419A1 (en) SWITCH FOR A TOOTH-RANK PROFILE MEASURING DEVICE FOR DETERMINING THE TOOTH-FLANGE SURFACE ROUGHNESS
US2510349A (en) Rod-type specimen stage for electron optical instruments
DE938862C (en) Deflection arrangement for cathode ray tubes
US2637000A (en) Magnetic electron -lens
GB691156A (en) Improvements in or relating to corpuscular ray apparatus
US3038993A (en) Aperture system for electron optical instrument
DE3104379A1 (en) Pressure gauge having an electromechanical transducer
US2481276A (en) Measuring instrument
US3056070A (en) Magnet adjusting method and apparatus
US2739249A (en) Velocity pickup devices
DE2161027A1 (en) Electron beam device with a cathode to be heated by an energy beam
DE2345290A1 (en) ARRANGEMENT FOR LIMITING AN INTERFERING MAGNETIC ALTERNATING FIELD
DE1920941B2 (en) Device for correcting the beam path of an electron beam deflected by a magnetic stray field of one or more magnetic lenses
Birdsall Aperture lens formula corrected for space charge in the electron stream
US2655601A (en) Electron microscope
SU13318A1 (en) Magnetic compass with a device for the destruction of semicircular deviation
DE917440C (en) Electron microscope with device for the production of fine-beam electron diffraction diagrams
SU109277A1 (en) Lens for electron-optical system