US20240072442A1 - Package device with an embedded oscillation region - Google Patents
Package device with an embedded oscillation region Download PDFInfo
- Publication number
- US20240072442A1 US20240072442A1 US17/895,502 US202217895502A US2024072442A1 US 20240072442 A1 US20240072442 A1 US 20240072442A1 US 202217895502 A US202217895502 A US 202217895502A US 2024072442 A1 US2024072442 A1 US 2024072442A1
- Authority
- US
- United States
- Prior art keywords
- metal
- oscillation region
- antenna
- die
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 title claims abstract description 74
- 238000000034 method Methods 0.000 claims abstract description 107
- 239000000758 substrate Substances 0.000 claims abstract description 85
- 229910052751 metal Inorganic materials 0.000 claims description 176
- 239000002184 metal Substances 0.000 claims description 176
- 239000004065 semiconductor Substances 0.000 claims description 36
- 230000005540 biological transmission Effects 0.000 claims description 16
- 239000008393 encapsulating agent Substances 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 230000001902 propagating effect Effects 0.000 claims description 5
- 239000011368 organic material Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 161
- 230000008569 process Effects 0.000 description 67
- 238000001465 metallisation Methods 0.000 description 59
- 239000000463 material Substances 0.000 description 31
- 229910000679 solder Inorganic materials 0.000 description 22
- 239000004020 conductor Substances 0.000 description 17
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 15
- 229910052802 copper Inorganic materials 0.000 description 15
- 239000010949 copper Substances 0.000 description 15
- 229910052737 gold Inorganic materials 0.000 description 13
- 239000010931 gold Substances 0.000 description 13
- 229920002120 photoresistant polymer Polymers 0.000 description 13
- 238000002161 passivation Methods 0.000 description 12
- 238000012545 processing Methods 0.000 description 12
- 239000011162 core material Substances 0.000 description 11
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 11
- 238000012360 testing method Methods 0.000 description 11
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 10
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 8
- 239000005360 phosphosilicate glass Substances 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 7
- 238000007747 plating Methods 0.000 description 7
- 229910052709 silver Inorganic materials 0.000 description 7
- 239000004332 silver Substances 0.000 description 7
- 239000004593 Epoxy Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 6
- 239000005388 borosilicate glass Substances 0.000 description 6
- 238000009713 electroplating Methods 0.000 description 6
- 238000004806 packaging method and process Methods 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 238000000231 atomic layer deposition Methods 0.000 description 5
- 239000012212 insulator Substances 0.000 description 5
- 229910052763 palladium Inorganic materials 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 4
- 238000007772 electroless plating Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000010354 integration Effects 0.000 description 4
- 229920002577 polybenzoxazole Polymers 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 238000007639 printing Methods 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 3
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 3
- 229910000673 Indium arsenide Inorganic materials 0.000 description 3
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 238000012795 verification Methods 0.000 description 3
- 229910005540 GaP Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011152 fibreglass Substances 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- MSNOMDLPLDYDME-UHFFFAOYSA-N gold nickel Chemical compound [Ni].[Au] MSNOMDLPLDYDME-UHFFFAOYSA-N 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000011135 tin Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 1
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- CGZLUZNJEQKHBX-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti][Ti][W] CGZLUZNJEQKHBX-UHFFFAOYSA-N 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/12—Supports; Mounting means
- H01Q1/22—Supports; Mounting means by structural association with other equipment or articles
- H01Q1/2283—Supports; Mounting means by structural association with other equipment or articles mounted in or on the surface of a semiconductor substrate as a chip-type antenna or integrated with other components into an IC package
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q9/00—Electrically-short antennas having dimensions not more than twice the operating wavelength and consisting of conductive active radiating elements
- H01Q9/04—Resonant antennas
- H01Q9/0407—Substantially flat resonant element parallel to ground plane, e.g. patch antenna
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4857—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/66—High-frequency adaptations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/19—Manufacturing methods of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/20—Structure, shape, material or disposition of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0655—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q9/00—Electrically-short antennas having dimensions not more than twice the operating wavelength and consisting of conductive active radiating elements
- H01Q9/04—Resonant antennas
- H01Q9/0407—Substantially flat resonant element parallel to ground plane, e.g. patch antenna
- H01Q9/0421—Substantially flat resonant element parallel to ground plane, e.g. patch antenna with a shorting wall or a shorting pin at one end of the element
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4853—Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68345—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used as a support during the manufacture of self supporting substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/58—Structural electrical arrangements for semiconductor devices not otherwise provided for
- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6661—High-frequency adaptations for passive devices
- H01L2223/6677—High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05567—Disposition the external layer being at least partially embedded in the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05573—Single external layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05624—Aluminium [Al] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13075—Plural core members
- H01L2224/1308—Plural core members being stacked
- H01L2224/13082—Two-layer arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/13109—Indium [In] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/13111—Tin [Sn] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/13116—Lead [Pb] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/13124—Aluminium [Al] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/13139—Silver [Ag] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/13144—Gold [Au] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/13147—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/13155—Nickel [Ni] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/13164—Palladium [Pd] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/731—Location prior to the connecting process
- H01L2224/73101—Location prior to the connecting process on the same surface
- H01L2224/73103—Bump and layer connectors
- H01L2224/73104—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8119—Arrangement of the bump connectors prior to mounting
- H01L2224/81193—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed on both the semiconductor or solid-state body and another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
- H01L2224/81815—Reflow soldering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/921—Connecting a surface with connectors of different types
- H01L2224/9212—Sequential connecting processes
- H01L2224/92122—Sequential connecting processes the first connecting process involving a bump connector
- H01L2224/92125—Sequential connecting processes the first connecting process involving a bump connector the second connecting process involving a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/147—Semiconductor insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3171—Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3185—Partial encapsulation or coating the coating covering also the sidewalls of the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49866—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
- H01L23/49894—Materials of the insulating layers or coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L24/80 - H01L24/90
- H01L24/92—Specific sequence of method steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0133—Ternary Alloys
Definitions
- PoP Package-on-Package
- FIGS. 1 through 10 A, 10 B, and 11 through 15 illustrate various views of intermediate steps during a process for forming a package component in accordance with some embodiments.
- FIG. 16 illustrates a cross-sectional view of an integrated circuit die in accordance with some embodiments.
- FIGS. 17 through 23 A, 23 B, and 24 through 25 illustrate various views of intermediate steps during a process for forming a package component in accordance with some embodiments.
- FIG. 26 illustrates flow diagrams for a process of transmitting and receiving a transmission signal, in accordance with some embodiments.
- first and second features are formed in direct contact
- additional features may be formed between the first and second features, such that the first and second features may not be in direct contact
- present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
- spatially relative terms such as “beneath,” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures.
- the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures.
- the apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.
- Devices with embedded antennas face unique challenges. Using printed circuit boards and/or complementary metal oxide semiconductors and associated metal layers may be used to form antennas, however, performance of such antennas is dominated by the large capacitance between metal layers. Further, layout is difficult to accommodate antennas to avoid interference from other metal structures in the devices. Also, space is limited and antennas may be weak or contain a lot of noise in transmission and/or reception. Integrated antennas typically suffer from process integration challenges, need large chip areas, and have high relative cost.
- Embodiments provide a structure and device having an integrated antenna which is suitable for transmitting and receiving in 5G/6G radio frequency ranges, such as at around the nominal 12.4 GHz range for 5G/6G, and in the upcoming 5th generation around the nominal 5.8 GHz range and 5th generation high frequency ranges (29 GHz to 38 GHz and 77 GHz to 120 GHz.) Other frequencies are possible and contemplated.
- FIGS. 1 through 20 illustrate cross-sectional views and top down views of intermediate steps during a process for forming a first package component 100 , in accordance with some embodiments.
- a first package region is illustrated. Additional package region may be formed at the same time as the first package region and may be understood as being like unto the first package region.
- the package regions are formed using the same base wafer substrate and later singulated and attached to a substrate, which is described following the formation of the first package component 100 .
- a substrate 102 is provided.
- the substrate 102 may be a semiconductor substrate, such as a bulk semiconductor, a semiconductor-on-insulator (SOI) substrate, or the like, which may be doped (e.g., with a p-type or an n-type dopant) or undoped.
- the substrate 102 may be a wafer, such as a silicon wafer having a thickness between about 500 and 2000 ⁇ m.
- an SOI substrate is a layer of a semiconductor material formed on an insulator layer.
- the insulator layer may be, for example, a buried oxide (BOX) layer, a silicon oxide layer, or the like.
- the insulator layer is provided on a substrate, typically a silicon or glass substrate.
- the semiconductor material of the substrate 102 may include silicon; germanium; a compound semiconductor including silicon carbide, gallium arsenide, gallium phosphide, indium phosphide, indium arsenide, and/or indium antimonide; an alloy semiconductor including silicon-germanium, gallium arsenide phosphide, aluminum indium arsenide, aluminum gallium arsenide, gallium indium arsenide, gallium indium phosphide, and/or gallium indium arsenide phosphide; or combinations thereof.
- the substrate 102 is patterned to form recesses or trenches therein.
- the recesses 104 are formed for conductive vias which are subsequently used to route signals to subsequently provided integrated circuit dies.
- the recesses 105 are formed which align to a subsequently formed oscillation cavity for an integrated antenna an oscillation region.
- the recesses may have a depth D 1 between about 50 ⁇ m and 200 ⁇ m, though other depths may be used.
- the recesses 104 / 105 may be formed using any suitable process, such as by an acceptable photoetching technique. For example, in one embodiment, a photoresist is formed over the substrate 102 and patterned into a photomask using a photolithography process.
- the photomask is then used to protect areas of the substrate 102 which are not to be etched. Then an etching technique, such as a reactive ion etch or wet etch may be used to etch the substrate 102 to a desired depth. For example, a timed etch may be used. While each of the recesses 104 / 105 is shown as having the same depth, in some embodiments, the recesses 104 may be deeper or shallower than the recesses 105 .
- the recesses 104 may be any desired width, such as about 2 ⁇ m to about 50 ⁇ m and the recesses 105 may have a width and length (the length being in a perpendicular horizontal direction to the width) that corresponds to a subsequently formed antenna. In some embodiments, for example, the width and length of the recesses 105 may each be between about 3 mm and 80 mm.
- a liner layer 106 may be formed in each of the recesses 104 / 105 .
- the liner layer 106 may be formed by a thermal oxidation process which uses steam or ambient oxygen to oxidize exposed portions of the substrate 102 .
- the liner layer 106 may be silicon oxide.
- the liner layer 106 may include a conformally deposited insulating material, such as silicon oxide, silicon nitride, silicon oxynitride, the like, or combination thereof, deposited by chemical vapor deposition (CVD), physical vapor deposition (PVD), atomic layer deposition (ALD), or the like.
- a metal fill 108 is deposited in the remaining portion of the recesses 104 and a metal fill 110 is deposited in the remaining portion of the recesses 105 .
- the metal fill 108 and 110 may include any suitable material, such as copper, titanium, aluminum, silver, tungsten, cobalt, the like, or combinations (or alloys) thereof.
- the metal fill 108 and metal fill 110 may be deposited using any suitable process, such as by CVD, PVD, ALD, electroplating, electrochemical plating, and the like.
- a seed layer is formed over the dielectric layer liner layer 106 in the recesses 104 and 105 .
- the seed layer is a metal layer, which may be a single layer or a composite layer comprising a plurality of sub-layers formed of different materials.
- the seed layer comprises a titanium layer and a copper layer over the titanium layer.
- the seed layer may be formed using, for example, physical vapor deposition (PVD) or the like.
- PVD physical vapor deposition
- a photoresist (not shown) is then formed and patterned on the seed layer.
- the photoresist may be formed by spin coating or the like and may be exposed to light for patterning.
- the pattern of the photoresist corresponds to the recesses 104 and 105 .
- the patterning forms openings through the photoresist to expose the seed layer in the recesses 104 and 105 .
- a conductive material is formed in the openings of the photoresist and on the exposed portions of the seed layer.
- the conductive material may be formed by plating, such as electroplating or electroless plating, or the like.
- the photoresist and portions of the seed layer on which the conductive material is not formed are removed.
- the photoresist may be removed by an acceptable ashing or stripping process, such as using an oxygen plasma or the like.
- exposed portions of the seed layer are removed, such as by using an acceptable etching process, such as by wet or dry etching.
- the remaining portions of the seed layer and conductive material form the metal fill 108 and metal fill 110 .
- Portions of the metal fill 108 and 110 which may extend above the substrate 102 may be removed and leveled to the surface of the substrate 102 using a planarization process, such as a chemical mechanical polishing (CMP) process.
- CMP chemical mechanical polishing
- a first metallization pattern 116 for a redistribution structure 111 may be formed over a dielectric layer 112 of the redistribution structure 111 .
- the dielectric layer 112 may be formed on the liner layer 106 and over the metal fills 108 and 110 .
- the first metallization pattern 116 may penetrate through the dielectric layer 112 using through vias 114 to contact and couple the metal fills 108 to the first metallization pattern 116 .
- the bottom surface of the dielectric layer 112 may be in contact with the top surface of the liner layer 106 .
- the dielectric layer 112 is formed of a polymer, such as polybenzoxazole (PBO), polyimide, benzocyclobutene (BCB), or the like.
- the dielectric layer 112 is formed of a nitride such as silicon nitride; an oxide such as silicon oxide, phosphosilicate glass (PSG), borosilicate glass (BSG), boron-doped phosphosilicate glass (BPSG), or the like; or the like.
- the dielectric layer 112 may be formed by any acceptable deposition process, such as spin coating, CVD, plasma enhanced CVD (PECVD), laminating, the like, or a combination thereof. After depositing the dielectric layer 112 , openings may be made through the dielectric layer 112 using an acceptable photoetching process, such as described above, the openings corresponding to the through vias 114 .
- the first metallization pattern 116 may be formed on the dielectric layer 112 and the through vias 114 formed through the openings in the dielectric layer 112 in a the same process or in different processes.
- the first metallization pattern 116 and through vias 114 may be formed using processes and materials similar to those used to form the metal fills 108 and 110 .
- a seed layer may be formed over the dielectric layer 112 and in the openings through the dielectric layer 112 to contact exposed upper surfaces of the metal fills 108 .
- the seed layer may be a single or composite metal layer.
- a photoresist may then be formed and patterned on the seed layer to form openings therein corresponding to the first metallization pattern 116 , which includes the through vias 114 .
- a conductive material is formed in the openings of the photoresist and on the exposed portions of the seed layer. Then, the photoresist and portions of the seed layer on which the conductive material is not formed are removed. The remaining portions of the seed layer and conductive material form the first metallization pattern 116 and through vias 114 .
- Other processes may be used. For example, in some embodiments, the through vias 114 may be formed first, followed by the first metallization pattern 116 .
- the first metallization pattern 116 may be formed within the dielectric layer 112 such that the upper surface of the dielectric layer 112 (e.g., see dielectric layer 118 in FIG. 5 ) may be leveled with the upper surface of the first metallization pattern 116 .
- the first metallization pattern 116 may include a metal grate 116 rf which defines an outer portion of an oscillation region.
- the first metallization pattern 116 may also include a ground metal 116 g which couples to the metal grate 116 rf.
- FIG. 4 illustrates a top down view of the structure of FIG. 3 , in accordance with some embodiments.
- the reference line A-A corresponds to the cross-sectional view of FIG. 3 .
- the dielectric layer 112 is shown as well as an example first metallization pattern 116 .
- the metal grate 116 rf is illustrated as having multiple parallel metal lines that are spaced apart from each other. These metal lines are used to amplify an antenna signal, which will be explained in greater detail below.
- the spacing s 1 of the metal lines of the metal grate 116 rf may be between about 0.1 ⁇ m and about 100 ⁇ m.
- the width wl of the metal lines of the metal grate 116 rf may be between about 0.1 ⁇ m and about 100 ⁇ m.
- the length L 1 of the metal lines of the metal grate 116 rf may be between about 10 ⁇ m and about 10,000 ⁇ m. On one or both ends, as shown in dashed outline, the ends of the metal grate 116 rf may all be coupled to each other and to the ground metal 116 g.
- the dielectric layer 122 may be formed on the first metallization pattern 116 and the dielectric layer 112 .
- the dielectric layer 122 is formed of a polymer, which may be a photo-sensitive material such as PBO, polyimide, BCB, or the like, that may be patterned using a lithography mask.
- the dielectric layer 122 is formed of a nitride such as silicon nitride; an oxide such as silicon oxide, PSG, BSG, BPSG; or the like.
- the dielectric layer 122 may be formed by spin coating, lamination, CVD, the like, or a combination thereof.
- the dielectric layer 122 is then patterned to form openings exposing portions of the first metallization pattern 116 .
- the patterning may be formed by an acceptable process, such as by exposing the dielectric layer 122 to light when the dielectric layer 122 is a photo-sensitive material or by etching using, for example, an anisotropic etch. If the dielectric layer 122 is a photo-sensitive material, the dielectric layer 122 can be developed after the exposure.
- Through vias 124 are formed in the openings through the dielectric layer 122 and a second metallization pattern 126 is formed over the dielectric layer 122 .
- the through vias 124 and second metallization pattern 126 may be formed using processes and materials similar to those described above with respect to the through vias 114 and the first metallization pattern 116 .
- the dielectric layer 132 may be formed on the second metallization pattern 126 and the dielectric layer 122 .
- the dielectric layer 132 may be formed using processes and materials similar to those discussed above with respect to the dielectric layer 112 and/or dielectric layer 122 .
- the dielectric layer 132 is then patterned to form openings exposing portions of the second metallization pattern 126 .
- the patterning may be formed by an acceptable process, such as described above with respect to the dielectric layer 122 .
- Through vias 134 are formed in the openings through the dielectric layer 132 and a third metallization pattern 136 is formed over the dielectric layer 132 .
- the through vias 134 and third metallization pattern 136 may be formed using processes and materials similar to those described above with respect to the through vias 114 and the first metallization pattern 116 .
- the third metallization pattern 136 includes a patch antenna 136 a formed as part of the third metallization pattern 136 .
- FIGS. 8 through 14 provide a modified top down view of a portion of the structure of FIG. 7 utilizing various options for a through via array 134 va of the through vias 134 and a metal wall 126 w of the second metallization pattern 126 .
- the top down view of FIGS. 8 through 14 includes a top down view of the dashed box portion of the structure of FIG. 7 .
- the ground metal 116 g and metal grate 116 rf would be covered by the dielectric layer 132 , but are included in these views to show the relationships of each of the illustrated parts.
- the through via array 134 va is shown in dashed outline as, it is actually below the antenna 136 a .
- the antenna 136 a is coupled by the through via array 134 va to the metal wall 126 w of the second metallization pattern 126 .
- the through via array 134 va may include multiple through vias arranged around a periphery of the footprint of the antenna 136 a .
- Each of the through vias 134 is arranged in a single deep row of through vias 134 . They are positioned close together so that the spacing s 2 between each of the through vias of the through via array 134 va is less than the diameter d 2 or width of each of the through-vias. In some embodiments the spacing s 2 is 20% to 50% of the width wl.
- the through via array 134 va may include a double deep row of through vias 134 aligned to the periphery of the antenna 136 a .
- the through via array 134 va may include one or more additional rows of the through vias 134 on one or more of the sides of the antenna 136 a .
- the through vias 134 of the through via array 134 va may each be horizontally and vertically aligned, such as illustrated in FIG. 9 . In other embodiments, however, the through via array 134 va may include multiple rows of staggered through vias 134 , such as illustrated in FIGS. 10 A and 10 B .
- the staggered through vias 134 are separated in each row by a spacing s 3 where s 3 is greater than the diameter d 3 of each of the through vias 134 .
- a line pl perpendicular to the orientation of the through via array 134 va i.e., perpendicular to the edge direction of the antenna 136 a
- the staggered through vias 134 are separated in each row by a spacing s 4 , where s 4 is less than the diameter d 4 of each of the through vias 134 .
- any line pl perpendicular to the orientation of the through via array 134 va would contact at least one of the through vias 134 .
- the arrangement of the through via array 134 va in FIG. 10 B may be beneficial in helping the oscillation region operate more efficiently by causing more of the generated or received radio frequency signals to oscillate in the oscillation region.
- a metal wall 126 w is shown in dashed outline as, it is actually below the antenna 136 a .
- the antenna 136 a is coupled by the through via array 134 va to the metal wall 126 w of the second metallization pattern 126 .
- the metal wall 126 w is illustrated as being a single solid ring of metal aligned to the periphery of the antenna 136 a .
- the metal wall 126 w may be electrically coupled to the antenna 136 a by the through via array 134 va , while in other embodiments, the metal wall 126 w may be electrically floating, i.e., not electrically coupled to the antenna 136 a or another metal structure.
- the metal wall 126 w and/or through via array 134 va serves as an outer lateral boundary of the oscillation region.
- the length L 2 of the metal wall 126 w in a first horizontal dimension and the length L 3 of the metal wall 126 w in a second horizontal dimension may each be between about 10 ⁇ m and about 100,000 ⁇ m.
- the lateral thickness t 1 of the metal wall 126 w may be between about 0.1 ⁇ m and about 20 ⁇ m.
- the metal wall structure includes a first metal wall 126 w 1 and a second metal wall 126 w 2 surrounding the first metal wall 126 w 1 .
- the first metal wall 126 w 1 may be separated from the second metal wall 126 w 2 by a distance between about 0.1 ⁇ m and about 100 ⁇ m.
- the first metal wall 126 w 1 and second metal wall 126 w 2 may be combined with an embodiment including double deep through via array 134 va , such as illustrated in FIGS.
- first metal wall 126 w 1 and/or second metal wall 126 w 2 may be electrically floating, i.e., not electrically coupled to the antenna 136 a or another metal structure.
- additional metal walls 126 wx may be provided in like manner as the first metal walls 126 w 1 and second metal walls 126 w 2 .
- the lateral thickness t 1 of the first metal wall 126 w 1 may be between about 0.1 ⁇ m and about 20 ⁇ m, and the lateral thickness t 2 of the second metal wall 126 w 2 may be between about 0.1 ⁇ m and about 20 ⁇ m.
- the lateral thickness t 1 may be the same or different than the lateral thickness t 2 .
- the metal wall 126 w is segmented. Instead of extending continuously around the antenna 136 a footprint, the metal wall 126 w has breaks disposed along its length.
- the spacing s 5 between one end of one segment and the nearest end of an adjacent segment may be between about 0.1 ⁇ m and about 20 ⁇ m.
- the length L 4 of each of the segments may be between about 1 ⁇ m and about 1000 ⁇ m.
- the lengths and spacing may be standard to all the segments of the metal wall 126 w or may vary from segment to segment and space to space.
- the lateral thickness t 1 of the metal wall 126 w may be between about 0.1 ⁇ m and about 20 ⁇ m.
- the metal wall structure includes a first metal wall 126 w 1 and a second metal wall 126 w 2 surrounding the first metal wall 126 w 1 .
- Each of the first metal wall 126 w 1 and second metal wall 126 w 2 may be segmented like the metal wall 126 w of FIG. 13 .
- the segments may be aligned.
- the segments may be staggered such that a line p 1 perpendicular to the edge of the antenna 136 a would intersect the first metal wall 126 w 1 and/or the second metal wall 126 w 2 .
- the spacing s 6 between segments may be smaller than the length L 5 of the segments.
- the spacing s 6 between one end of one segment and the nearest end of an adjacent segment may be between about 0.1 ⁇ m and about 20 ⁇ m.
- the length L 5 of each of the segments may be between about 1 ⁇ m and about 1000 ⁇ m.
- the lengths and spacing may be standard to all the segments of the metal wall 126 w or may vary from segment to segment and space to space.
- the lateral thickness t 1 of the first metal wall 126 w 1 may be between about 0.1 ⁇ m and about 20 ⁇ m
- the lateral thickness t 2 of the second metal wall 126 w 2 may be between about 0.1 ⁇ m and about 20 ⁇ m.
- the lateral thickness t 1 may be the same or different than the lateral thickness t 2 .
- the metal walls 126 w or metal wall structures including first metal walls 126 w 1 and second metal walls 126 w 2 and so forth of FIGS. 11 through 14 and the through via array 134 va of FIGS. 8 through 10 A and 10 B together provide an oscillation region.
- a line perpendicular to the edge of the antenna 136 a may intersect the metal walls 126 w , 126 w 1 , and/or 126 w 2 (depending on the design used). If such a line, for example, were representative of a radio signal transmitting from or receiving to the antenna 136 a , the signal would reflect off of the first metal wall 126 w 1 and/or second metal wall 126 w 2 and oscillate between sides of the metal walls.
- the signals received or transmitted can be additive, causing a signal boost before being received by the antenna 126 a (as in the case of a received signal) or leaving the oscillation region, propagating away from the antenna 126 a (as in the case of transmitting a signal).
- the oscillation may also be similarly aided by the many individual and potentially overlapping through vias 134 of the through via array 134 va.
- a dielectric layer 142 is formed over the third metallization pattern 136 .
- the dielectric layer 142 may be formed using processes and materials similar to those used to form the dielectric layer 112 .
- the dielectric layer 142 is then patterned to form openings exposing portions of the third metallization pattern 136 , including the antenna 136 a .
- the patterning may be formed by an acceptable process, such as described above with respect to the dielectric layer 122 .
- Through vias 144 are formed in the openings through the dielectric layer 142 and a fourth metallization pattern 146 is formed over the dielectric layer 142 .
- the through vias 144 and fourth metallization pattern 146 may be formed using processes and materials similar to those described above with respect to the through vias 114 and the first metallization pattern 116 . In other embodiments, the through vias 144 and fourth metallization pattern 146 may be formed using materials alternate to those used to form the through vias 114 and first metallization pattern 116 .
- the through vias 144 and fourth metallization pattern 146 may be formed of aluminum using a seed layer, photoresist, and plating process such as described above. Utilizing aluminum for example, may provide desired physical and electrical properties between the subsequently formed connectors 155 and the material of the redistribution structure 111 .
- the fourth metallization pattern 146 may be thicker than the metallization patterns of the redistribution structure 111 and produce less diffusion of conductive materials into the surrounding dielectric layers and passivation layer 150 .
- the passivation layer 150 may be formed over the fourth metallization pattern 146 to protect the fourth metallization pattern from further processing.
- the passivation layer 150 may be formed of any suitable material, such as silicon nitride, silicon oxynitride, silicon oxycarbonitride, silicon carbide, polyimide, the like, or combinations thereof. After the passivation layer 150 is formed, openings corresponding to the connectors 155 may be made through the passivation layer 150 to expose portions of the fourth metallization pattern 146 through the passivation layer 150 .
- Connectors 155 are formed for connection to an integrated circuit device subsequently attached to the redistribution structure 111 by the fourth metallization pattern 146 .
- the connectors 155 may be microbumps, having bump portions on and extending along the major surface of the passivation layer 150 and via portions extending through the passivation layer 150 to physically and electrically couple the fourth metallization pattern 146 .
- the connectors 155 are electrically coupled to features of the redistribution structure 111 and one or more of the connectors 155 are coupled through the redistribution structure 111 to the metal fill 108 .
- the connectors 155 may be formed of the same material as the fourth metallization pattern 146 or third metallization pattern 136 .
- the connectors 155 may include an underbump metallization (UBM) and conductive connector on the UBM.
- the conductive connector of the connectors 155 may be ball grid array (BGA) connectors, solder balls, metal pillars, controlled collapse chip connection (C4) bumps, micro bumps, electroless nickel-electroless palladium-immersion gold technique (ENEPIG) formed bumps, or the like.
- the connectors 155 may include a conductive material such as solder, copper, aluminum, gold, nickel, silver, palladium, tin, the like, or a combination thereof.
- the connectors 155 are formed by forming a layer of solder over the UBMs through evaporation, electroplating, printing, solder transfer, ball placement, or the like. Once a layer of solder has been formed on the UBMs, a reflow may be performed in order to shape the material into the desired bump shapes.
- the connectors 155 comprise metal pillars (such as a copper pillar) formed by sputtering, printing, electro plating, electroless plating, CVD, or the like. The metal pillars may be solder free and have substantially vertical sidewalls.
- a metal cap layer is formed on the top of the metal pillars. The metal cap layer may include nickel, tin, tin-lead, gold, silver, palladium, indium, nickel-palladium-gold, nickel-gold, the like, or a combination thereof and may be formed by a plating process.
- the first package component 100 includes an oscillation region 156 , such as outlined by the dashed box illustrated in FIG. 15 .
- the oscillation region 156 causes RF signals entering the metal grate 116 rf or leaving the antenna 136 a to bounce within the oscillation region 156 , for example off of the through via array 134 va , off of the metal grate 116 rf , off the antenna 136 a , and off the metal wall 126 w , the RF signals adding and boosting their signals.
- the first package component 100 may be formed in a wafer and may be one of multiple first package components 100 formed in the wafer, each one of the first package components corresponding to first package region, a second package region, etc. Following the formation of the first package components 100 , in some embodiments the first package components 100 may be singulated from one another in a singulation process. In other embodiments, integrated circuit dies may be mounted to the first package components 100 prior to singulation. The singulation process may be performed by sawing along scribe line regions, e.g., between the first package region (as illustrated in FIG. 15 ) and an adjacent second package region. The sawing singulates the first package component 100 from the adjacent first package component 100 . The resulting, singulated first package component contains the corresponding package region and may then be used to attach appropriate dies and used in further processing. In some embodiments, the singulation process is performed after the integrated circuit dies 50 are attached to the first package component 100 .
- FIG. 16 illustrates a cross-sectional view of an integrated circuit die 50 in accordance with some embodiments.
- the integrated circuit die 50 will be packaged in subsequent processing to form an integrated circuit package.
- the integrated circuit die 50 may be a logic die (e.g., central processing unit (CPU), graphics processing unit (GPU), system-on-a-chip (SoC), application processor (AP), microcontroller, etc.), a memory die (e.g., dynamic random access memory (DRAM) die, static random access memory (SRAM) die, etc.), a power management die (e.g., power management integrated circuit (PMIC) die), a radio frequency (RF) transmit/receiving die, an RF Baseband (BB) die, a sensor die, a micro-electro-mechanical-system (MEMS) die, a signal processing die (e.g., digital signal processing (DSP) die), a front-end die (e.g., analog front-end (AFE) dies), the like, or combinations thereof.
- the integrated circuit die 50 may be formed in a wafer, which may include different device regions that are singulated in subsequent steps to form a plurality of integrated circuit dies.
- the integrated circuit die 50 may be processed according to applicable manufacturing processes to form integrated circuits.
- the integrated circuit die 50 includes a semiconductor substrate 52 , such as silicon, doped or undoped, or an active layer of a semiconductor-on-insulator (SOI) substrate.
- SOI semiconductor-on-insulator
- the semiconductor substrate 52 may include other semiconductor materials, such as germanium; a compound semiconductor including silicon carbide, gallium arsenic, gallium phosphide, indium phosphide, indium arsenide, and/or indium antimonide; an alloy semiconductor including SiGe, GaAsP, AlInAs, AlGaAs, GaInAs, GaInP, and/or GaInAsP; or combinations thereof. Other substrates, such as multi-layered or gradient substrates, may also be used.
- the semiconductor substrate 52 has an active surface (e.g., the surface facing upwards in FIG. 16 ), sometimes called a front side, and an inactive surface (e.g., the surface facing downwards in FIG. 16 ), sometimes called a back side.
- Devices represented by a transistor
- the devices 54 may be formed at the front surface of the semiconductor substrate 52 .
- the devices 54 may be active devices (e.g., transistors, diodes, etc.), capacitors, resistors, etc.
- An inter-layer dielectric (ILD) 56 is over the front surface of the semiconductor substrate 52 .
- the ILD 56 surrounds and may cover the devices 54 .
- the ILD 56 may include one or more dielectric layers formed of materials such as Phospho-Silicate Glass (PSG), Boro-Silicate Glass (BSG), Boron-Doped Phospho-Silicate Glass (BPSG), undoped Silicate Glass (USG), or the like.
- PSG Phospho-Silicate Glass
- BSG Boro-Silicate Glass
- BPSG Boron-Doped Phospho-Silicate Glass
- USG undoped Silicate Glass
- Conductive plugs 58 extend through the ILD 56 to electrically and physically couple the devices 54 .
- the conductive plugs 58 may couple the gates and source/drain regions of the transistors. Source/drain region(s) may refer to a source or a drain, individually or collectively dependent upon the context.
- the conductive plugs 58 may be formed of tungsten, cobalt, nickel, copper, silver, gold, aluminum, the like, or combinations thereof.
- An interconnect structure 60 is over the ILD 56 and conductive plugs 58 .
- the interconnect structure 60 interconnects the devices 54 to form an integrated circuit.
- the interconnect structure 60 may be formed by, for example, metallization patterns in dielectric layers on the ILD 56 .
- the metallization patterns include metal lines and vias formed in one or more low-k dielectric layers.
- the metallization patterns of the interconnect structure 60 are electrically coupled to the devices 54 by the conductive plugs 58 .
- the integrated circuit die 50 further includes pads 62 , such as aluminum pads, to which external connections are made.
- the pads 62 are on the active side of the integrated circuit die 50 , such as in and/or on the interconnect structure 60 .
- One or more passivation films 64 are on the integrated circuit die 50 , such as on portions of the interconnect structure 60 and pads 62 . Openings extend through the passivation films 64 to the pads 62 .
- Die connectors 66 such as conductive pillars (for example, formed of a metal such as copper), extend through the openings in the passivation films 64 and are physically and electrically coupled to respective ones of the pads 62 .
- the die connectors 66 may be formed by, for example, plating, or the like. The die connectors 66 electrically couple the respective integrated circuits of the integrated circuit die 50 .
- solder regions may be disposed on the pads 62 .
- the solder balls may be used to perform chip probe (CP) testing on the integrated circuit die 50 .
- CP testing may be performed on the integrated circuit die 50 to ascertain whether the integrated circuit die 50 is a known good die (KGD).
- KGD known good die
- the solder regions may be removed in subsequent processing steps.
- a dielectric layer 68 may (or may not) be on the active side of the integrated circuit die 50 , such as on the passivation films 64 and the die connectors 66 .
- the dielectric layer 68 laterally encapsulates the die connectors 66 , and the dielectric layer 68 is laterally coterminous with the integrated circuit die 50 .
- the dielectric layer 68 may bury the die connectors 66 , such that the topmost surface of the dielectric layer 68 is above the topmost surfaces of the die connectors 66 .
- the dielectric layer 68 may bury the solder regions as well. Alternatively, the solder regions may be removed prior to forming the dielectric layer 68 .
- the dielectric layer 68 may be a polymer such as PBO, polyimide, BCB, or the like; a nitride such as silicon nitride or the like; an oxide such as silicon oxide, PSG, BSG, BPSG, or the like; the like, or a combination thereof.
- the dielectric layer 68 may be formed, for example, by spin coating, lamination, chemical vapor deposition (CVD), or the like.
- the die connectors 66 are exposed through the dielectric layer 68 during formation of the integrated circuit die 50 . In some embodiments, the die connectors 66 remain buried and are exposed during a subsequent process for packaging the integrated circuit die 50 . Exposing the die connectors 66 may remove any solder regions that may be present on the die connectors 66 .
- the integrated circuit die 50 is a stacked device that includes multiple semiconductor substrates 52 .
- the integrated circuit die 50 may be a memory device such as a hybrid memory cube (HMC) module, a high bandwidth memory (HBM) module, or the like that includes multiple memory dies.
- the integrated circuit die 50 includes multiple semiconductor substrates 52 interconnected by through-substrate vias (TSVs). Each of the semiconductor substrates 52 may (or may not) have an interconnect structure 60 .
- integrated circuit dies 50 e.g., a first integrated circuit die 50 A and a second integrated circuit die 50 B are connected to the connectors 155 .
- a desired type and quantity of integrated circuit dies 50 are adhered in each of the package regions corresponding to each of the first package components 100 .
- multiple integrated circuit dies 50 are connected adjacent one another, including the first integrated circuit die 50 A and the second integrated circuit die 50 B in each of the package regions.
- the first integrated circuit die 50 A may be a logic device, such as a central processing unit (CPU), a graphics processing unit (GPU), a system-on-a-chip (SoC), a microcontroller, or the like.
- the first integrated circuit die 50 A is a SoC with Baseband (BB) RF functions for RF signal processing, such as 5G/6G RF signals.
- the second integrated circuit die 50 B may be a memory device, such as a dynamic random access memory (DRAM) die, a static random access memory (SRAM) die, a hybrid memory cube (HMC) module, a high bandwidth memory (HBM) module, or the like.
- the second integrated circuit die 50 B may be a transmitting/receiving (tx/rx) die which is coupled to the antenna 136 a . Additional integrated circuit dies 50 with any of the aforementioned functionality may also attached as desired.
- the first integrated circuit die 50 A and second integrated circuit die 50 B may be formed in processes of a same technology node, or may be formed in processes of different technology nodes.
- the first integrated circuit die 50 A may be of a more advanced process node than the second integrated circuit die 50 B.
- the first and second integrated circuit dies 50 A and 50 B may have different sizes (e.g., different heights and/or surface areas), or may have the same size (e.g., same heights and/or surface areas).
- the integrated circuit dies 50 may be attached using any suitable process, such as a pick and place process to align the die connectors 66 with the connectors 155 and couple the die connectors 66 to the connectors 155 using a die attachment process, such as reflowing a solder material to adhere the die connectors 66 to the connectors 155 .
- a die attachment process such as reflowing a solder material to adhere the die connectors 66 to the connectors 155 .
- Other die attachment processes may be used, such as utilizing a direct metal to metal bond between the connectors 66 and the connectors 155 .
- the connectors 155 have an epoxy flux formed thereon before they are reflowed with at least some of the epoxy portion of the epoxy flux remaining after the first and second integrated circuit dies 50 A and 50 B are attached to the first package component 100 .
- an underfill 160 is formed between the first package component 100 and the first integrated circuit die 50 A and the second integrated circuit die 50 B, surrounding the connectors 155 and connectors 66 .
- the underfill 160 may reduce stress and protect the joints resulting from the reflowing of the connectors 155 .
- the underfill 160 may be formed by a capillary flow process after the first and second integrated circuit dies 50 A and 50 B are attached. In embodiments where the epoxy flux is formed, it may act as the underfill. As seen in FIG. 18 , in some embodiments, the underfill 160 may extend at least partially up a sidewall of the first and second integrated circuit dies 50 A and 50 B.
- the underfill 160 may continue to extend all the way to the uppermost surface (i.e., the backsides of the first and second integrated circuit dies 50 A and 50 B). In such embodiments, the upper surface of the underfill 160 may dip down between the first and second integrated circuit dies 50 A and 50 B in a manner similar to that illustrated in FIG. 18 .
- an encapsulant 165 is formed on and around the various components, including on and around the underfill 160 and on and around the first and second integrated circuit dies 50 A and 50 B.
- the encapsulant 165 encapsulates the first and second integrated circuit dies 50 A and 50 B.
- the encapsulant 165 may be a molding compound, epoxy, or the like.
- the encapsulant 165 may be applied by compression molding, transfer molding, or the like, and may be formed over the underfill 160 such that the first and second integrated circuit dies 50 A and 50 B are buried or covered.
- the encapsulant 165 is further formed in gap regions between the first and second integrated circuit dies 50 A and 50 B.
- the encapsulant 165 may be applied in liquid or semi-liquid form and then subsequently cured.
- a planarization process is performed on the encapsulant 165 to expose the back side of the first and second integrated circuit dies 50 A and 50 B.
- the planarization process may continue to operate to thin the substrate 52 of the first and second integrated circuit dies 50 A and 50 B.
- Top surfaces of the first and second integrated circuit dies 50 A and 50 B and encapsulant 165 are substantially coplanar after the planarization process within process variations.
- the planarization process may be, for example, a chemical-mechanical polish (CMP), a grinding process, or the like.
- a carrier substrate 170 is mounted to the upper side of the structure of FIG. 20 by a release layer 168 .
- the carrier substrate 170 may be a glass carrier substrate, a ceramic carrier substrate, or the like.
- the release layer 168 may be formed of a polymer-based material, which may be removed along with the carrier substrate 170 in subsequent steps.
- the release layer 168 is an epoxy-based thermal-release material, which loses its adhesive property when heated, such as a light-to-heat-conversion (LTHC) release coating.
- the release layer 168 may be an ultra-violet (UV) glue, which loses its adhesive property when exposed to UV lights.
- UV ultra-violet
- the release layer 168 may be dispensed as a liquid and cured, may be a laminate film laminated onto the carrier substrate 170 or the encapsulant 165 and first and second integrated circuit dies 50 A and 50 B, or may be the like.
- the top surface of the release layer 168 may be leveled and may have a high degree of planarity.
- the structure of FIG. 21 is flipped over and the substrate 102 is thinned to expose the metal fills 108 and 110 .
- the thinning process may be a grinding process, a CMP process, an etching process, or combinations thereof.
- a portion of the liner layer 106 is removed which was previously along a bottom of the metal fills 108 and 110 , along with a portion of the substrate 102 .
- some of the metal fill 108 and/or metal fill 110 may be removed, for example, if the metal fill 108 or metal fill 110 was thicker than the other.
- a photomask 172 is formed over the substrate 102 and patterned to form an opening corresponding to the metal fill 110 . Then the metal fill 110 is etched to form a cavity 175 in the substrate 102 corresponding to the antenna 136 a . Because RF signals do not easily propagate through metal or semiconductor materials, the cavity 175 is made in the semiconductor substrate 102 to allow the RF signals in and out of the oscillation region 156 .
- the photomask 172 is formed over the substrate 102 and patterned to form an opening over the metal fill 110 .
- the photomask 172 is smaller than the metal fill 110 but as large as the metal grate 116 rf .
- the cavity 175 may have a portion 110 ′ of the metal fill 110 remaining on side walls of the cavity 175 .
- the photomask 172 is removed by an acceptable process, such as by an ashing process. Then, conductive connectors 178 are formed over the metal fills 108 which serve as through vias for the substrate 102 . In some embodiments bond pads 176 may be formed first over the metal fills 108 . The bond pads 176 are electrically coupled to the metal fill 108 , the redistribution structure 111 , and the first and/or second integrated circuit dies 50 A and 50 B.
- the bond pads 176 may be formed using similar processes and materials used to form the first metallization pattern 116 .
- the bond pads 176 are formed by forming recesses (not shown) into a dielectric layer (not shown) disposed on the substrate 102 .
- the recesses may be formed to allow the bond pads 176 to be embedded into the dielectric layer.
- the recesses are omitted as the bond pads 176 may be formed on the dielectric layer or on the substrate 102 .
- the bond pads 176 include a thin seed layer (not shown) made of copper, titanium, nickel, gold, palladium, the like, or a combination thereof.
- the conductive material of the bond pads 176 may be deposited over the thin seed layer.
- the conductive material may be formed by an electro-chemical plating process, an electroless plating process, CVD, atomic layer deposition (ALD), PVD, the like, or a combination thereof.
- the conductive material of the bond pads 176 is copper, tungsten, aluminum, silver, gold, the like, or a combination thereof.
- the bond pads 176 are UBMs that include three layers of conductive materials, such as a layer of titanium, a layer of copper, and a layer of nickel. Other arrangements of materials and layers, such as an arrangement of chrome/chrome-copper alloy/copper/gold, an arrangement of titanium/titanium tungsten/copper, or an arrangement of copper/nickel/gold, may be utilized for the formation of the bond pads 176 . Any suitable materials or layers of material that may be used for the bond pads 176 are fully intended to be included within the scope of the current application.
- Conductive connectors 178 are formed on the bond pads 176 .
- the conductive connectors 178 may be ball grid array (BGA) connectors, solder balls, metal pillars, controlled collapse chip connection (C4) bumps, micro bumps, electroless nickel-electroless palladium-immersion gold technique (ENEPIG) formed bumps, or the like.
- the conductive connectors 178 may include a conductive material such as solder, copper, aluminum, gold, nickel, silver, palladium, tin, the like, or a combination thereof.
- the conductive connectors 178 are formed by initially forming a layer of solder through evaporation, electroplating, printing, solder transfer, ball placement, or the like.
- the conductive connectors 178 comprise metal pillars (such as a copper pillar) formed by sputtering, printing, electro plating, electroless plating, CVD, or the like.
- the metal pillars may be solder free and have substantially vertical sidewalls.
- a metal cap layer is formed on the top of the metal pillars.
- the metal cap layer may include nickel, tin, tin-lead, gold, silver, palladium, indium, nickel-palladium-gold, nickel-gold, the like, or a combination thereof and may be formed by a plating process.
- a carrier substrate de-bonding is performed to detach (or “de-bond”) the carrier substrate 170 from the top of the structure, e.g., the encapsulant 165 and first and second integrated circuit dies 50 A and 50 B.
- the de-bonding includes projecting a light such as a laser light or an UV light on the release layer 168 so that the release layer 168 decomposes under the heat of the light and the carrier substrate 170 can be removed.
- the first package component 100 including the first and second integrated circuit dies 50 A and 50 B may be singulated from neighboring package components.
- the singulation process described above may be used to perform the singulation.
- the structure is then flipped over and attached by the conductive connectors 178 to a package substrate 180 using the conductive connectors 178 .
- the package substrate 180 includes a substrate core 182 and bond pads 184 over the substrate core 182 .
- the substrate core 182 may be made of a non metal or non semiconductor material, such as an organic material, such as BT resin (bismaleimide triazine resin), a build-up ABF resin, or MIS (molded interconnect substrate) material, or the like.
- the substrate core 182 is, in one alternative embodiment, based on an insulating core such as a fiberglass reinforced resin core.
- One example core material is fiberglass resin such as FR4.
- the substrate core 182 may include active and passive devices (not shown). A wide variety of devices such as transistors, capacitors, resistors, combinations of these, and the like may be used to generate the structural and functional requirements of the design for the device stack. The devices may be formed using any suitable methods.
- the substrate core 182 may also include metallization layers and vias (not shown), with the bond pads 184 being physically and/or electrically coupled to the metallization layers and vias.
- the metallization layers may be formed over the active and passive devices and are designed to connect the various devices to form functional circuitry.
- the metallization layers may be formed of alternating layers of dielectric material (e.g., low-k dielectric material) and conductive material (e.g., copper) with vias interconnecting the layers of conductive material and may be formed through any suitable process (such as deposition, damascene, dual damascene, or the like).
- the substrate core 182 is substantially free of active and passive devices.
- the package substrate 180 may have a keep out zone 183 aligned to the substrate cavity 175 and oscillation region 156 , to allow the passage of RF signals to and from the antenna 136 a without interference from conductive or semi-conductive materials.
- the conductive connectors 178 are reflowed to attach the conductive connectors 178 to the bond pads 184 .
- the conductive connectors 178 electrically and/or physically couple the package substrate 180 , including metallization layers in the substrate core 182 , to the conductive elements of the first package component 100 and first and second integrated circuit dies 50 A and 50 B.
- testing structures may be included to aid in the verification testing of the 3D packaging or 3DIC devices.
- the testing structures may include, for example, test pads formed in a redistribution layer or on a substrate that allows the testing of the 3D packaging or the 3DIC, the use of probes and/or probe cards, and the like.
- the verification testing may be performed on intermediate structures as well as the final structure.
- the structures and methods disclosed herein may be used in conjunction with testing methodologies that incorporate intermediate verification of known good dies to increase the yield and decrease costs.
- FIG. 26 illustrates a flow diagram for a process 200 and a flow diagram for a process 250 .
- a transmission signal is generated in a first device, such as the second integrated device die 50 B.
- the transmission signal is provided to an embedded antenna, such as the antenna 136 a .
- the transmission signal is transmitted by the embedded antenna.
- the transmission signal is boosted in an oscillation region of the first device, such as the oscillation region 156 .
- the signal is propagated from the oscillation region through the first device, for example beyond the metal grate 116 rf .
- an RF signal is received into an oscillation region of a first device, such as the oscillation region 256 .
- the RF signal is boosted in the oscillation region.
- the boosted RF signal is received by an embedded antenna, such as the embedded antenna 136 a .
- the RF signal is provided from the embedded antenna to a receive device, such as the second integrated circuit die 50 B.
- Embodiments may achieve advantages.
- Embodiments provide an oscillation region for an embedded antenna.
- the oscillation region provides a better transmitted signal or received signal for the embedded antenna, which is suitable for 5G and/or 6G signals and their associated RF signal frequency ranges (e.g., for the upcoming 5th Gen. (5.8 GHz) and 5th Gen. high frequency (29 ⁇ 38 GHz and 77 ⁇ 120 GHz) RF transceiver).
- these devices are suitable for use in highly integrated devices, such as portable, wearable, internet of things (IoT), and smart phone products.
- Embedding the antenna in a metallization layer and providing an oscillation region aligned to the antenna provides the ability to utilize an embedded antenna at the same production cost as without.
- the embedded antenna cavity shrinks the footprint normally needed to utilize an embedded antenna, which must typically be walled off from the rest of the structure.
- the thicknesses of the various layers may be tuned for specific application and to meet packaging requirements.
- One embodiment is a method including forming a metal grate in a first metal layer of an interconnect.
- the method also includes forming an oscillation region aligned to the metal grate.
- the method also includes forming an antenna in a second metal layer of the interconnect, the antenna aligned to the oscillation region and the metal grate.
- the method also includes coupling a first die to the antenna, the first die may include a transmitting and/or receiving die.
- the method also includes encapsulating the first die by an encapsulant to form a first package.
- the method further includes coupling the first package to a first substrate, the first substrate including an organic material.
- the first substrate has a metal free zone aligned to the antenna.
- the method further includes originating a signal in the first die, transmitting the signal by the antenna, boosting the signal by the oscillation region, and propagating the signal outwardly from the oscillation region through one or more dielectric layers of the first package.
- the method further includes removing a portion of a semiconductor substrate of the first package to form an oscillation cavity aligned to the oscillation region.
- the method further includes electrically coupling the metal grate to a ground source metal.
- forming the oscillation region includes forming a metal wall in a third metal layer of the interconnect, the third metal layer interposed between the first metal layer and the second metal layer, the metal wall forming a periphery of the oscillation region, and forming a via wall in a via layer of the interconnect, the via layer interposed between the third metal layer and the second metal layer.
- the metal wall is segmented.
- Another embodiment is a method including generating a transmission signal in a first device.
- the method also includes providing the transmission signal to an embedded antenna.
- the method also includes transmitting the transmission signal by the embedded antenna.
- the method also includes boosting the transmission signal in an oscillation region of the first device.
- the method also includes propagating the signal from the oscillation region through the first device.
- the first device includes a semiconductor substrate having a portion of the semiconductor substrate removed corresponding to the oscillation region.
- the method further includes receiving a radio frequency (RF) signal into the oscillation region, boosting the RF signal in the oscillation region, receiving the boosted RF signal by the embedded antenna, and providing the RF signal from the embedded antenna to a receive device.
- the method further includes passing the transmission signal from the oscillation region through a grounded metal grate, the grounded metal grate embedded in the first device.
- the antenna is embedded in a redistribution layer of the first device.
- Another embodiment is a device including a first integrated circuit die, the first integrated circuit die corresponding to a transmit and/or receive die.
- the device also includes a redistribution structure coupled to the first integrated circuit die, the redistribution structure including a first embedded antenna coupled to the first integrated die.
- the device also includes an oscillation region aligned to the first embedded antenna, the oscillation region embedded in insulating layers of the redistribution structure.
- the device also includes a semiconductor substrate attached to the redistribution structure, the semiconductor substrate having an oscillation cavity disposed therein, the oscillation cavity aligned to the oscillation region.
- the oscillation region is surrounded by a metal wall, the metal wall coupled to the embedded antenna by a first via array.
- the first via array includes two or more rows of vias surrounding the oscillation region.
- the oscillation region extends from the antenna to a metal grate disposed opposite the first embedded antenna.
- the oscillation region is laterally surrounded by a metal wall structure, the metal wall structure coupled to the antenna by one or more vias.
- the metal wall structure includes one or more continuous rings or one or more segmented rings.
- the oscillation region is encircled by a via array including one or more rows of vias.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Embodiments provide an integrated package device and method of forming the same, the device including a receive transmit integrated circuit die and embedded antenna. An oscillation region is aligned to the embedded antenna and a cavity is provided in the substrate to allow the passage of radio frequency (RF) signals into and out of the oscillation region.
Description
- The semiconductor industry has experienced rapid growth due to ongoing improvements in the integration density of a variety of electronic components (e.g., transistors, diodes, resistors, capacitors, etc.). For the most part, improvement in integration density has resulted from iterative reduction of minimum feature size, which allows more components to be integrated into a given area. As the demand for shrinking electronic devices has grown, a need for smaller and more creative packaging techniques of semiconductor dies has emerged. An example of such packaging systems is Package-on-Package (PoP) technology. In a PoP device, a top semiconductor package is stacked on top of a bottom semiconductor package to provide a high level of integration and component density. PoP technology generally enables production of semiconductor devices with enhanced functionalities and small footprints on a printed circuit board (PCB).
- Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It is noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.
-
FIGS. 1 through 10A, 10B, and 11 through 15 illustrate various views of intermediate steps during a process for forming a package component in accordance with some embodiments. -
FIG. 16 illustrates a cross-sectional view of an integrated circuit die in accordance with some embodiments. -
FIGS. 17 through 23A, 23B, and 24 through 25 illustrate various views of intermediate steps during a process for forming a package component in accordance with some embodiments. -
FIG. 26 illustrates flow diagrams for a process of transmitting and receiving a transmission signal, in accordance with some embodiments. - The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. Specific examples of components and arrangements are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
- Further, spatially relative terms, such as “beneath,” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.
- Devices with embedded antennas face unique challenges. Using printed circuit boards and/or complementary metal oxide semiconductors and associated metal layers may be used to form antennas, however, performance of such antennas is dominated by the large capacitance between metal layers. Further, layout is difficult to accommodate antennas to avoid interference from other metal structures in the devices. Also, space is limited and antennas may be weak or contain a lot of noise in transmission and/or reception. Integrated antennas typically suffer from process integration challenges, need large chip areas, and have high relative cost.
- Embodiments provide a structure and device having an integrated antenna which is suitable for transmitting and receiving in 5G/6G radio frequency ranges, such as at around the nominal 12.4 GHz range for 5G/6G, and in the upcoming 5th generation around the nominal 5.8 GHz range and 5th generation high frequency ranges (29 GHz to 38 GHz and 77 GHz to 120 GHz.) Other frequencies are possible and contemplated.
-
FIGS. 1 through 20 illustrate cross-sectional views and top down views of intermediate steps during a process for forming afirst package component 100, in accordance with some embodiments. A first package region is illustrated. Additional package region may be formed at the same time as the first package region and may be understood as being like unto the first package region. The package regions are formed using the same base wafer substrate and later singulated and attached to a substrate, which is described following the formation of thefirst package component 100. - In
FIG. 1 , asubstrate 102 is provided. Thesubstrate 102 may be a semiconductor substrate, such as a bulk semiconductor, a semiconductor-on-insulator (SOI) substrate, or the like, which may be doped (e.g., with a p-type or an n-type dopant) or undoped. Thesubstrate 102 may be a wafer, such as a silicon wafer having a thickness between about 500 and 2000 μm. Generally, an SOI substrate is a layer of a semiconductor material formed on an insulator layer. The insulator layer may be, for example, a buried oxide (BOX) layer, a silicon oxide layer, or the like. The insulator layer is provided on a substrate, typically a silicon or glass substrate. Other substrates, such as a multi-layered or gradient substrate may also be used. In some embodiments, the semiconductor material of thesubstrate 102 may include silicon; germanium; a compound semiconductor including silicon carbide, gallium arsenide, gallium phosphide, indium phosphide, indium arsenide, and/or indium antimonide; an alloy semiconductor including silicon-germanium, gallium arsenide phosphide, aluminum indium arsenide, aluminum gallium arsenide, gallium indium arsenide, gallium indium phosphide, and/or gallium indium arsenide phosphide; or combinations thereof. - The
substrate 102 is patterned to form recesses or trenches therein. Therecesses 104 are formed for conductive vias which are subsequently used to route signals to subsequently provided integrated circuit dies. Therecesses 105 are formed which align to a subsequently formed oscillation cavity for an integrated antenna an oscillation region. The recesses may have a depth D1 between about 50 μm and 200 μm, though other depths may be used. Therecesses 104/105 may be formed using any suitable process, such as by an acceptable photoetching technique. For example, in one embodiment, a photoresist is formed over thesubstrate 102 and patterned into a photomask using a photolithography process. The photomask is then used to protect areas of thesubstrate 102 which are not to be etched. Then an etching technique, such as a reactive ion etch or wet etch may be used to etch thesubstrate 102 to a desired depth. For example, a timed etch may be used. While each of therecesses 104/105 is shown as having the same depth, in some embodiments, therecesses 104 may be deeper or shallower than therecesses 105. Therecesses 104 may be any desired width, such as about 2 μm to about 50 μm and therecesses 105 may have a width and length (the length being in a perpendicular horizontal direction to the width) that corresponds to a subsequently formed antenna. In some embodiments, for example, the width and length of therecesses 105 may each be between about 3 mm and 80 mm. - In
FIG. 2 , aliner layer 106 may be formed in each of therecesses 104/105. Theliner layer 106 may be formed by a thermal oxidation process which uses steam or ambient oxygen to oxidize exposed portions of thesubstrate 102. When thesubstrate 102 is silicon, for example, theliner layer 106 may be silicon oxide. In other embodiments, theliner layer 106 may include a conformally deposited insulating material, such as silicon oxide, silicon nitride, silicon oxynitride, the like, or combination thereof, deposited by chemical vapor deposition (CVD), physical vapor deposition (PVD), atomic layer deposition (ALD), or the like. - After forming the
liner layer 106, ametal fill 108 is deposited in the remaining portion of therecesses 104 and ametal fill 110 is deposited in the remaining portion of therecesses 105. The metal fill 108 and 110 may include any suitable material, such as copper, titanium, aluminum, silver, tungsten, cobalt, the like, or combinations (or alloys) thereof. The metal fill 108 andmetal fill 110 may be deposited using any suitable process, such as by CVD, PVD, ALD, electroplating, electrochemical plating, and the like. In some embodiments, a seed layer is formed over the dielectriclayer liner layer 106 in therecesses recesses recesses metal fill 108 and metal fill 110. Portions of themetal fill substrate 102 may be removed and leveled to the surface of thesubstrate 102 using a planarization process, such as a chemical mechanical polishing (CMP) process. - In
FIG. 3 , afirst metallization pattern 116 for a redistribution structure 111 (seeFIG. 7 ) may be formed over adielectric layer 112 of theredistribution structure 111. Thedielectric layer 112 may be formed on theliner layer 106 and over the metal fills 108 and 110. Thefirst metallization pattern 116 may penetrate through thedielectric layer 112 using throughvias 114 to contact and couple the metal fills 108 to thefirst metallization pattern 116. The bottom surface of thedielectric layer 112 may be in contact with the top surface of theliner layer 106. In some embodiments, thedielectric layer 112 is formed of a polymer, such as polybenzoxazole (PBO), polyimide, benzocyclobutene (BCB), or the like. In other embodiments, thedielectric layer 112 is formed of a nitride such as silicon nitride; an oxide such as silicon oxide, phosphosilicate glass (PSG), borosilicate glass (BSG), boron-doped phosphosilicate glass (BPSG), or the like; or the like. Thedielectric layer 112 may be formed by any acceptable deposition process, such as spin coating, CVD, plasma enhanced CVD (PECVD), laminating, the like, or a combination thereof. After depositing thedielectric layer 112, openings may be made through thedielectric layer 112 using an acceptable photoetching process, such as described above, the openings corresponding to the throughvias 114. - The
first metallization pattern 116 may be formed on thedielectric layer 112 and the throughvias 114 formed through the openings in thedielectric layer 112 in a the same process or in different processes. Thefirst metallization pattern 116 and throughvias 114 may be formed using processes and materials similar to those used to form the metal fills 108 and 110. For example, to formfirst metallization pattern 116 and throughvias 114 at the same process, a seed layer may be formed over thedielectric layer 112 and in the openings through thedielectric layer 112 to contact exposed upper surfaces of the metal fills 108. The seed layer may be a single or composite metal layer. A photoresist may then be formed and patterned on the seed layer to form openings therein corresponding to thefirst metallization pattern 116, which includes the throughvias 114. A conductive material is formed in the openings of the photoresist and on the exposed portions of the seed layer. Then, the photoresist and portions of the seed layer on which the conductive material is not formed are removed. The remaining portions of the seed layer and conductive material form thefirst metallization pattern 116 and throughvias 114. Other processes may be used. For example, in some embodiments, the throughvias 114 may be formed first, followed by thefirst metallization pattern 116. In other embodiments, thefirst metallization pattern 116 may be formed within thedielectric layer 112 such that the upper surface of the dielectric layer 112 (e.g., see dielectric layer 118 inFIG. 5 ) may be leveled with the upper surface of thefirst metallization pattern 116. - The
first metallization pattern 116 may include ametal grate 116 rf which defines an outer portion of an oscillation region. Thefirst metallization pattern 116 may also include aground metal 116 g which couples to themetal grate 116 rf. -
FIG. 4 illustrates a top down view of the structure ofFIG. 3 , in accordance with some embodiments. The reference line A-A corresponds to the cross-sectional view ofFIG. 3 . Thedielectric layer 112 is shown as well as an examplefirst metallization pattern 116. Themetal grate 116 rf is illustrated as having multiple parallel metal lines that are spaced apart from each other. These metal lines are used to amplify an antenna signal, which will be explained in greater detail below. The spacing s1 of the metal lines of themetal grate 116 rf may be between about 0.1 μm and about 100 μm. The width wl of the metal lines of themetal grate 116 rf may be between about 0.1 μm and about 100 μm. The length L1 of the metal lines of themetal grate 116 rf may be between about 10 μm and about 10,000 μm. On one or both ends, as shown in dashed outline, the ends of themetal grate 116 rf may all be coupled to each other and to theground metal 116 g. - In
FIG. 5 , thedielectric layer 122 may be formed on thefirst metallization pattern 116 and thedielectric layer 112. In some embodiments, thedielectric layer 122 is formed of a polymer, which may be a photo-sensitive material such as PBO, polyimide, BCB, or the like, that may be patterned using a lithography mask. In other embodiments, thedielectric layer 122 is formed of a nitride such as silicon nitride; an oxide such as silicon oxide, PSG, BSG, BPSG; or the like. Thedielectric layer 122 may be formed by spin coating, lamination, CVD, the like, or a combination thereof. - In
FIG. 6 , thedielectric layer 122 is then patterned to form openings exposing portions of thefirst metallization pattern 116. The patterning may be formed by an acceptable process, such as by exposing thedielectric layer 122 to light when thedielectric layer 122 is a photo-sensitive material or by etching using, for example, an anisotropic etch. If thedielectric layer 122 is a photo-sensitive material, thedielectric layer 122 can be developed after the exposure. Throughvias 124 are formed in the openings through thedielectric layer 122 and asecond metallization pattern 126 is formed over thedielectric layer 122. The throughvias 124 andsecond metallization pattern 126 may be formed using processes and materials similar to those described above with respect to the throughvias 114 and thefirst metallization pattern 116. - In
FIG. 7 , thedielectric layer 132 may be formed on thesecond metallization pattern 126 and thedielectric layer 122. In some embodiments, thedielectric layer 132 may be formed using processes and materials similar to those discussed above with respect to thedielectric layer 112 and/ordielectric layer 122. Thedielectric layer 132 is then patterned to form openings exposing portions of thesecond metallization pattern 126. The patterning may be formed by an acceptable process, such as described above with respect to thedielectric layer 122. Throughvias 134 are formed in the openings through thedielectric layer 132 and athird metallization pattern 136 is formed over thedielectric layer 132. The throughvias 134 andthird metallization pattern 136 may be formed using processes and materials similar to those described above with respect to the throughvias 114 and thefirst metallization pattern 116. Thethird metallization pattern 136 includes apatch antenna 136 a formed as part of thethird metallization pattern 136. -
FIGS. 8 through 14 provide a modified top down view of a portion of the structure ofFIG. 7 utilizing various options for a through viaarray 134 va of the throughvias 134 and ametal wall 126 w of thesecond metallization pattern 126. The top down view ofFIGS. 8 through 14 includes a top down view of the dashed box portion of the structure ofFIG. 7 . Theground metal 116 g andmetal grate 116 rf would be covered by thedielectric layer 132, but are included in these views to show the relationships of each of the illustrated parts. InFIGS. 8 through 10A and 10B , the through viaarray 134 va is shown in dashed outline as, it is actually below theantenna 136 a. Theantenna 136 a is coupled by the through viaarray 134 va to themetal wall 126 w of thesecond metallization pattern 126. - As illustrated in
FIG. 8 , the through viaarray 134 va may include multiple through vias arranged around a periphery of the footprint of theantenna 136 a. Each of the throughvias 134 is arranged in a single deep row of throughvias 134. They are positioned close together so that the spacing s2 between each of the through vias of the through viaarray 134 va is less than the diameter d2 or width of each of the through-vias. In some embodiments the spacing s2 is 20% to 50% of the width wl. - In
FIG. 9 , the through viaarray 134 va may include a double deep row of throughvias 134 aligned to the periphery of theantenna 136 a. In some embodiments, the through viaarray 134 va may include one or more additional rows of the throughvias 134 on one or more of the sides of theantenna 136 a. In some embodiments, the throughvias 134 of the through viaarray 134 va may each be horizontally and vertically aligned, such as illustrated inFIG. 9 . In other embodiments, however, the through viaarray 134 va may include multiple rows of staggered throughvias 134, such as illustrated inFIGS. 10A and 10B . - In
FIG. 10A , the staggered throughvias 134 are separated in each row by a spacing s3 where s3 is greater than the diameter d3 of each of the throughvias 134. As such, a line pl perpendicular to the orientation of the through viaarray 134 va (i.e., perpendicular to the edge direction of theantenna 136 a) may fit between the staggered throughvias 134 without contacting any of the throughvias 134. InFIG. 10B , in accordance with some embodiments, the staggered throughvias 134 are separated in each row by a spacing s4, where s4 is less than the diameter d4 of each of the throughvias 134. As such, any line pl perpendicular to the orientation of the through viaarray 134 va would contact at least one of the throughvias 134. The arrangement of the through viaarray 134 va inFIG. 10B may be beneficial in helping the oscillation region operate more efficiently by causing more of the generated or received radio frequency signals to oscillate in the oscillation region. - In
FIGS. 11 through 14 ametal wall 126 w is shown in dashed outline as, it is actually below theantenna 136 a. Theantenna 136 a is coupled by the through viaarray 134 va to themetal wall 126 w of thesecond metallization pattern 126. InFIG. 11 , themetal wall 126 w is illustrated as being a single solid ring of metal aligned to the periphery of theantenna 136 a. Themetal wall 126 w may be electrically coupled to theantenna 136 a by the through viaarray 134 va, while in other embodiments, themetal wall 126 w may be electrically floating, i.e., not electrically coupled to theantenna 136 a or another metal structure. Themetal wall 126 w and/or through viaarray 134 va serves as an outer lateral boundary of the oscillation region. The length L2 of themetal wall 126 w in a first horizontal dimension and the length L3 of themetal wall 126 w in a second horizontal dimension may each be between about 10 μm and about 100,000 μm. The lateral thickness t1 of themetal wall 126 w may be between about 0.1 μm and about 20 μm. - In
FIG. 12 , the metal wall structure includes afirst metal wall 126 w 1 and asecond metal wall 126w 2 surrounding thefirst metal wall 126 w 1. In some embodiments, thefirst metal wall 126 w 1 may be separated from thesecond metal wall 126w 2 by a distance between about 0.1 μm and about 100 μm. In some embodiments, thefirst metal wall 126 w 1 andsecond metal wall 126w 2 may be combined with an embodiment including double deep through viaarray 134 va, such as illustrated inFIGS. 9, 10A, and 10B , with one row of the through viaarray 134 va coupled to thefirst metal wall 126 w 1 and another row of the through viaarray 134 va coupled to thesecond metal wall 126w 2. In other embodiments, one or more of thefirst metal wall 126 w 1 and/orsecond metal wall 126w 2 may be electrically floating, i.e., not electrically coupled to theantenna 136 a or another metal structure. In some embodiments,additional metal walls 126 wx may be provided in like manner as thefirst metal walls 126 w 1 andsecond metal walls 126w 2. The lateral thickness t1 of thefirst metal wall 126 w 1 may be between about 0.1 μm and about 20 μm, and the lateral thickness t2 of thesecond metal wall 126w 2 may be between about 0.1 μm and about 20 μm. The lateral thickness t1 may be the same or different than the lateral thickness t2. - In
FIG. 13 , themetal wall 126 w is segmented. Instead of extending continuously around theantenna 136 a footprint, themetal wall 126 w has breaks disposed along its length. In some embodiments, the spacing s5 between one end of one segment and the nearest end of an adjacent segment may be between about 0.1 μm and about 20 μm. In some embodiments, the length L4 of each of the segments may be between about 1 μm and about 1000 μm. The lengths and spacing may be standard to all the segments of themetal wall 126 w or may vary from segment to segment and space to space. The lateral thickness t1 of themetal wall 126 w may be between about 0.1 μm and about 20 μm. - In
FIG. 14 , the metal wall structure includes afirst metal wall 126 w 1 and asecond metal wall 126w 2 surrounding thefirst metal wall 126 w 1. Each of thefirst metal wall 126 w 1 andsecond metal wall 126w 2 may be segmented like themetal wall 126 w ofFIG. 13 . In some embodiments, the segments may be aligned. In other embodiments, such as illustrated inFIG. 14 , the segments may be staggered such that a line p1 perpendicular to the edge of theantenna 136 a would intersect thefirst metal wall 126 w 1 and/or thesecond metal wall 126w 2. In such embodiments, the spacing s6 between segments may be smaller than the length L5 of the segments. In some embodiments, the spacing s6 between one end of one segment and the nearest end of an adjacent segment may be between about 0.1 μm and about 20 μm. In some embodiments, the length L5 of each of the segments may be between about 1 μm and about 1000 μm. The lengths and spacing may be standard to all the segments of themetal wall 126 w or may vary from segment to segment and space to space. The lateral thickness t1 of thefirst metal wall 126 w 1 may be between about 0.1 μm and about 20 μm, and the lateral thickness t2 of thesecond metal wall 126w 2 may be between about 0.1 μm and about 20 μm. The lateral thickness t1 may be the same or different than the lateral thickness t2. - The
metal walls 126 w or metal wall structures includingfirst metal walls 126 w 1 andsecond metal walls 126w 2 and so forth ofFIGS. 11 through 14 and the through viaarray 134 va ofFIGS. 8 through 10A and 10B together provide an oscillation region. A line perpendicular to the edge of theantenna 136 a may intersect themetal walls antenna 136 a, the signal would reflect off of thefirst metal wall 126 w 1 and/orsecond metal wall 126w 2 and oscillate between sides of the metal walls. In oscillating, the signals received or transmitted can be additive, causing a signal boost before being received by the antenna 126 a (as in the case of a received signal) or leaving the oscillation region, propagating away from the antenna 126 a (as in the case of transmitting a signal). The oscillation may also be similarly aided by the many individual and potentially overlapping throughvias 134 of the through viaarray 134 va. - In
FIG. 15 , after thethird metallization pattern 136 is formed, adielectric layer 142 is formed over thethird metallization pattern 136. Thedielectric layer 142 may be formed using processes and materials similar to those used to form thedielectric layer 112. Thedielectric layer 142 is then patterned to form openings exposing portions of thethird metallization pattern 136, including theantenna 136 a. The patterning may be formed by an acceptable process, such as described above with respect to thedielectric layer 122. Throughvias 144 are formed in the openings through thedielectric layer 142 and afourth metallization pattern 146 is formed over thedielectric layer 142. In some embodiments, the throughvias 144 andfourth metallization pattern 146 may be formed using processes and materials similar to those described above with respect to the throughvias 114 and thefirst metallization pattern 116. In other embodiments, the throughvias 144 andfourth metallization pattern 146 may be formed using materials alternate to those used to form the throughvias 114 andfirst metallization pattern 116. For example, the throughvias 144 andfourth metallization pattern 146 may be formed of aluminum using a seed layer, photoresist, and plating process such as described above. Utilizing aluminum for example, may provide desired physical and electrical properties between the subsequently formedconnectors 155 and the material of theredistribution structure 111. For example, thefourth metallization pattern 146 may be thicker than the metallization patterns of theredistribution structure 111 and produce less diffusion of conductive materials into the surrounding dielectric layers andpassivation layer 150. - Following the formation of the through
vias 144 andfourth metallization pattern 146, thepassivation layer 150 may be formed over thefourth metallization pattern 146 to protect the fourth metallization pattern from further processing. Thepassivation layer 150 may be formed of any suitable material, such as silicon nitride, silicon oxynitride, silicon oxycarbonitride, silicon carbide, polyimide, the like, or combinations thereof. After thepassivation layer 150 is formed, openings corresponding to theconnectors 155 may be made through thepassivation layer 150 to expose portions of thefourth metallization pattern 146 through thepassivation layer 150. -
Connectors 155 are formed for connection to an integrated circuit device subsequently attached to theredistribution structure 111 by thefourth metallization pattern 146. Theconnectors 155 may be microbumps, having bump portions on and extending along the major surface of thepassivation layer 150 and via portions extending through thepassivation layer 150 to physically and electrically couple thefourth metallization pattern 146. As a result, theconnectors 155 are electrically coupled to features of theredistribution structure 111 and one or more of theconnectors 155 are coupled through theredistribution structure 111 to themetal fill 108. Theconnectors 155 may be formed of the same material as thefourth metallization pattern 146 orthird metallization pattern 136. - In some embodiments, the
connectors 155 may include an underbump metallization (UBM) and conductive connector on the UBM. The conductive connector of theconnectors 155 may be ball grid array (BGA) connectors, solder balls, metal pillars, controlled collapse chip connection (C4) bumps, micro bumps, electroless nickel-electroless palladium-immersion gold technique (ENEPIG) formed bumps, or the like. Theconnectors 155 may include a conductive material such as solder, copper, aluminum, gold, nickel, silver, palladium, tin, the like, or a combination thereof. In some embodiments, theconnectors 155 are formed by forming a layer of solder over the UBMs through evaporation, electroplating, printing, solder transfer, ball placement, or the like. Once a layer of solder has been formed on the UBMs, a reflow may be performed in order to shape the material into the desired bump shapes. In another embodiment, theconnectors 155 comprise metal pillars (such as a copper pillar) formed by sputtering, printing, electro plating, electroless plating, CVD, or the like. The metal pillars may be solder free and have substantially vertical sidewalls. In some embodiments, a metal cap layer is formed on the top of the metal pillars. The metal cap layer may include nickel, tin, tin-lead, gold, silver, palladium, indium, nickel-palladium-gold, nickel-gold, the like, or a combination thereof and may be formed by a plating process. - Following the formation of the
connectors 155, thefirst package component 100 is formed. Thefirst package component 100 includes anoscillation region 156, such as outlined by the dashed box illustrated inFIG. 15 . Theoscillation region 156 causes RF signals entering themetal grate 116 rf or leaving theantenna 136 a to bounce within theoscillation region 156, for example off of the through viaarray 134 va, off of themetal grate 116 rf, off theantenna 136 a, and off themetal wall 126 w, the RF signals adding and boosting their signals. - As noted above, the
first package component 100 may be formed in a wafer and may be one of multiplefirst package components 100 formed in the wafer, each one of the first package components corresponding to first package region, a second package region, etc. Following the formation of thefirst package components 100, in some embodiments thefirst package components 100 may be singulated from one another in a singulation process. In other embodiments, integrated circuit dies may be mounted to thefirst package components 100 prior to singulation. The singulation process may be performed by sawing along scribe line regions, e.g., between the first package region (as illustrated inFIG. 15 ) and an adjacent second package region. The sawing singulates thefirst package component 100 from the adjacentfirst package component 100. The resulting, singulated first package component contains the corresponding package region and may then be used to attach appropriate dies and used in further processing. In some embodiments, the singulation process is performed after the integrated circuit dies 50 are attached to thefirst package component 100. -
FIG. 16 illustrates a cross-sectional view of an integrated circuit die 50 in accordance with some embodiments. The integrated circuit die 50 will be packaged in subsequent processing to form an integrated circuit package. The integrated circuit die 50 may be a logic die (e.g., central processing unit (CPU), graphics processing unit (GPU), system-on-a-chip (SoC), application processor (AP), microcontroller, etc.), a memory die (e.g., dynamic random access memory (DRAM) die, static random access memory (SRAM) die, etc.), a power management die (e.g., power management integrated circuit (PMIC) die), a radio frequency (RF) transmit/receiving die, an RF Baseband (BB) die, a sensor die, a micro-electro-mechanical-system (MEMS) die, a signal processing die (e.g., digital signal processing (DSP) die), a front-end die (e.g., analog front-end (AFE) dies), the like, or combinations thereof. - The integrated circuit die 50 may be formed in a wafer, which may include different device regions that are singulated in subsequent steps to form a plurality of integrated circuit dies. The integrated circuit die 50 may be processed according to applicable manufacturing processes to form integrated circuits. For example, the integrated circuit die 50 includes a
semiconductor substrate 52, such as silicon, doped or undoped, or an active layer of a semiconductor-on-insulator (SOI) substrate. Thesemiconductor substrate 52 may include other semiconductor materials, such as germanium; a compound semiconductor including silicon carbide, gallium arsenic, gallium phosphide, indium phosphide, indium arsenide, and/or indium antimonide; an alloy semiconductor including SiGe, GaAsP, AlInAs, AlGaAs, GaInAs, GaInP, and/or GaInAsP; or combinations thereof. Other substrates, such as multi-layered or gradient substrates, may also be used. Thesemiconductor substrate 52 has an active surface (e.g., the surface facing upwards inFIG. 16 ), sometimes called a front side, and an inactive surface (e.g., the surface facing downwards inFIG. 16 ), sometimes called a back side. - Devices (represented by a transistor) 54 may be formed at the front surface of the
semiconductor substrate 52. Thedevices 54 may be active devices (e.g., transistors, diodes, etc.), capacitors, resistors, etc. An inter-layer dielectric (ILD) 56 is over the front surface of thesemiconductor substrate 52. TheILD 56 surrounds and may cover thedevices 54. TheILD 56 may include one or more dielectric layers formed of materials such as Phospho-Silicate Glass (PSG), Boro-Silicate Glass (BSG), Boron-Doped Phospho-Silicate Glass (BPSG), undoped Silicate Glass (USG), or the like. - Conductive plugs 58 extend through the
ILD 56 to electrically and physically couple thedevices 54. For example, when thedevices 54 are transistors, the conductive plugs 58 may couple the gates and source/drain regions of the transistors. Source/drain region(s) may refer to a source or a drain, individually or collectively dependent upon the context. The conductive plugs 58 may be formed of tungsten, cobalt, nickel, copper, silver, gold, aluminum, the like, or combinations thereof. Aninterconnect structure 60 is over theILD 56 and conductive plugs 58. Theinterconnect structure 60 interconnects thedevices 54 to form an integrated circuit. Theinterconnect structure 60 may be formed by, for example, metallization patterns in dielectric layers on theILD 56. The metallization patterns include metal lines and vias formed in one or more low-k dielectric layers. The metallization patterns of theinterconnect structure 60 are electrically coupled to thedevices 54 by the conductive plugs 58. - The integrated circuit die 50 further includes
pads 62, such as aluminum pads, to which external connections are made. Thepads 62 are on the active side of the integrated circuit die 50, such as in and/or on theinterconnect structure 60. One ormore passivation films 64 are on the integrated circuit die 50, such as on portions of theinterconnect structure 60 andpads 62. Openings extend through thepassivation films 64 to thepads 62. Dieconnectors 66, such as conductive pillars (for example, formed of a metal such as copper), extend through the openings in thepassivation films 64 and are physically and electrically coupled to respective ones of thepads 62. Thedie connectors 66 may be formed by, for example, plating, or the like. Thedie connectors 66 electrically couple the respective integrated circuits of the integrated circuit die 50. - Optionally, solder regions (e.g., solder balls or solder bumps) may be disposed on the
pads 62. The solder balls may be used to perform chip probe (CP) testing on the integrated circuit die 50. CP testing may be performed on the integrated circuit die 50 to ascertain whether the integrated circuit die 50 is a known good die (KGD). Thus, only integrated circuit dies 50, which are KGDs, undergo subsequent processing and are packaged, and dies, which fail the CP testing, are not packaged. After testing, the solder regions may be removed in subsequent processing steps. - A
dielectric layer 68 may (or may not) be on the active side of the integrated circuit die 50, such as on thepassivation films 64 and thedie connectors 66. Thedielectric layer 68 laterally encapsulates thedie connectors 66, and thedielectric layer 68 is laterally coterminous with the integrated circuit die 50. Initially, thedielectric layer 68 may bury thedie connectors 66, such that the topmost surface of thedielectric layer 68 is above the topmost surfaces of thedie connectors 66. In some embodiments where solder regions are disposed on thedie connectors 66, thedielectric layer 68 may bury the solder regions as well. Alternatively, the solder regions may be removed prior to forming thedielectric layer 68. - The
dielectric layer 68 may be a polymer such as PBO, polyimide, BCB, or the like; a nitride such as silicon nitride or the like; an oxide such as silicon oxide, PSG, BSG, BPSG, or the like; the like, or a combination thereof. Thedielectric layer 68 may be formed, for example, by spin coating, lamination, chemical vapor deposition (CVD), or the like. In some embodiments, thedie connectors 66 are exposed through thedielectric layer 68 during formation of the integrated circuit die 50. In some embodiments, thedie connectors 66 remain buried and are exposed during a subsequent process for packaging the integrated circuit die 50. Exposing thedie connectors 66 may remove any solder regions that may be present on thedie connectors 66. - In some embodiments, the integrated circuit die 50 is a stacked device that includes
multiple semiconductor substrates 52. For example, the integrated circuit die 50 may be a memory device such as a hybrid memory cube (HMC) module, a high bandwidth memory (HBM) module, or the like that includes multiple memory dies. In such embodiments, the integrated circuit die 50 includesmultiple semiconductor substrates 52 interconnected by through-substrate vias (TSVs). Each of thesemiconductor substrates 52 may (or may not) have aninterconnect structure 60. - In
FIG. 17 , integrated circuit dies 50 (e.g., a first integrated circuit die 50A and a second integrated circuit die 50B) are connected to theconnectors 155. A desired type and quantity of integrated circuit dies 50 are adhered in each of the package regions corresponding to each of thefirst package components 100. In the embodiment shown, multiple integrated circuit dies 50 are connected adjacent one another, including the first integrated circuit die 50A and the second integrated circuit die 50B in each of the package regions. The first integrated circuit die 50A may be a logic device, such as a central processing unit (CPU), a graphics processing unit (GPU), a system-on-a-chip (SoC), a microcontroller, or the like. In one embodiment, the first integrated circuit die 50A is a SoC with Baseband (BB) RF functions for RF signal processing, such as 5G/6G RF signals. The second integrated circuit die 50B may be a memory device, such as a dynamic random access memory (DRAM) die, a static random access memory (SRAM) die, a hybrid memory cube (HMC) module, a high bandwidth memory (HBM) module, or the like. In one embodiment, the second integrated circuit die 50B may be a transmitting/receiving (tx/rx) die which is coupled to theantenna 136 a. Additional integrated circuit dies 50 with any of the aforementioned functionality may also attached as desired. The first integrated circuit die 50A and second integrated circuit die 50B may be formed in processes of a same technology node, or may be formed in processes of different technology nodes. For example, the first integrated circuit die 50A may be of a more advanced process node than the second integrated circuit die 50B. The first and second integrated circuit dies 50A and 50B may have different sizes (e.g., different heights and/or surface areas), or may have the same size (e.g., same heights and/or surface areas). - The integrated circuit dies 50 may be attached using any suitable process, such as a pick and place process to align the
die connectors 66 with theconnectors 155 and couple thedie connectors 66 to theconnectors 155 using a die attachment process, such as reflowing a solder material to adhere thedie connectors 66 to theconnectors 155. Other die attachment processes may be used, such as utilizing a direct metal to metal bond between theconnectors 66 and theconnectors 155. In some embodiments, theconnectors 155 have an epoxy flux formed thereon before they are reflowed with at least some of the epoxy portion of the epoxy flux remaining after the first and second integrated circuit dies 50A and 50B are attached to thefirst package component 100. - In
FIG. 18 , anunderfill 160 is formed between thefirst package component 100 and the first integrated circuit die 50A and the second integrated circuit die 50B, surrounding theconnectors 155 andconnectors 66. Theunderfill 160 may reduce stress and protect the joints resulting from the reflowing of theconnectors 155. Theunderfill 160 may be formed by a capillary flow process after the first and second integrated circuit dies 50A and 50B are attached. In embodiments where the epoxy flux is formed, it may act as the underfill. As seen inFIG. 18 , in some embodiments, theunderfill 160 may extend at least partially up a sidewall of the first and second integrated circuit dies 50A and 50B. In some embodiments, theunderfill 160 may continue to extend all the way to the uppermost surface (i.e., the backsides of the first and second integrated circuit dies 50A and 50B). In such embodiments, the upper surface of theunderfill 160 may dip down between the first and second integrated circuit dies 50A and 50B in a manner similar to that illustrated inFIG. 18 . - In
FIG. 19 , anencapsulant 165 is formed on and around the various components, including on and around theunderfill 160 and on and around the first and second integrated circuit dies 50A and 50B. After formation, theencapsulant 165 encapsulates the first and second integrated circuit dies 50A and 50B. Theencapsulant 165 may be a molding compound, epoxy, or the like. Theencapsulant 165 may be applied by compression molding, transfer molding, or the like, and may be formed over theunderfill 160 such that the first and second integrated circuit dies 50A and 50B are buried or covered. Theencapsulant 165 is further formed in gap regions between the first and second integrated circuit dies 50A and 50B. Theencapsulant 165 may be applied in liquid or semi-liquid form and then subsequently cured. - In
FIG. 20 , a planarization process is performed on theencapsulant 165 to expose the back side of the first and second integrated circuit dies 50A and 50B. In some embodiments, the planarization process may continue to operate to thin thesubstrate 52 of the first and second integrated circuit dies 50A and 50B. Top surfaces of the first and second integrated circuit dies 50A and 50B andencapsulant 165 are substantially coplanar after the planarization process within process variations. The planarization process may be, for example, a chemical-mechanical polish (CMP), a grinding process, or the like. - In
FIG. 21 , acarrier substrate 170 is mounted to the upper side of the structure ofFIG. 20 by arelease layer 168. Thecarrier substrate 170 may be a glass carrier substrate, a ceramic carrier substrate, or the like. Therelease layer 168 may be formed of a polymer-based material, which may be removed along with thecarrier substrate 170 in subsequent steps. In some embodiments, therelease layer 168 is an epoxy-based thermal-release material, which loses its adhesive property when heated, such as a light-to-heat-conversion (LTHC) release coating. In other embodiments, therelease layer 168 may be an ultra-violet (UV) glue, which loses its adhesive property when exposed to UV lights. Therelease layer 168 may be dispensed as a liquid and cured, may be a laminate film laminated onto thecarrier substrate 170 or theencapsulant 165 and first and second integrated circuit dies 50A and 50B, or may be the like. The top surface of therelease layer 168 may be leveled and may have a high degree of planarity. - In
FIG. 22 , the structure ofFIG. 21 is flipped over and thesubstrate 102 is thinned to expose the metal fills 108 and 110. The thinning process may be a grinding process, a CMP process, an etching process, or combinations thereof. Following the thinning process, a portion of theliner layer 106 is removed which was previously along a bottom of the metal fills 108 and 110, along with a portion of thesubstrate 102. In some embodiments, some of themetal fill 108 and/or metal fill 110 may be removed, for example, if the metal fill 108 or metal fill 110 was thicker than the other. - In
FIG. 23A , aphotomask 172 is formed over thesubstrate 102 and patterned to form an opening corresponding to themetal fill 110. Then the metal fill 110 is etched to form acavity 175 in thesubstrate 102 corresponding to theantenna 136 a. Because RF signals do not easily propagate through metal or semiconductor materials, thecavity 175 is made in thesemiconductor substrate 102 to allow the RF signals in and out of theoscillation region 156. - In
FIG. 23B , thephotomask 172 is formed over thesubstrate 102 and patterned to form an opening over themetal fill 110. InFIG. 23B , however, thephotomask 172 is smaller than the metal fill 110 but as large as themetal grate 116 rf. Thus, when the metal fill 110 is etched to form thecavity 175 in thesubstrate 102, thecavity 175 may have aportion 110′ of themetal fill 110 remaining on side walls of thecavity 175. - In
FIG. 24 , thephotomask 172 is removed by an acceptable process, such as by an ashing process. Then,conductive connectors 178 are formed over the metal fills 108 which serve as through vias for thesubstrate 102. In someembodiments bond pads 176 may be formed first over the metal fills 108. Thebond pads 176 are electrically coupled to themetal fill 108, theredistribution structure 111, and the first and/or second integrated circuit dies 50A and 50B. - The
bond pads 176 may be formed using similar processes and materials used to form thefirst metallization pattern 116. In some embodiments, thebond pads 176 are formed by forming recesses (not shown) into a dielectric layer (not shown) disposed on thesubstrate 102. The recesses may be formed to allow thebond pads 176 to be embedded into the dielectric layer. In other embodiments, the recesses are omitted as thebond pads 176 may be formed on the dielectric layer or on thesubstrate 102. In some embodiments, thebond pads 176 include a thin seed layer (not shown) made of copper, titanium, nickel, gold, palladium, the like, or a combination thereof. The conductive material of thebond pads 176 may be deposited over the thin seed layer. The conductive material may be formed by an electro-chemical plating process, an electroless plating process, CVD, atomic layer deposition (ALD), PVD, the like, or a combination thereof. In an embodiment, the conductive material of thebond pads 176 is copper, tungsten, aluminum, silver, gold, the like, or a combination thereof. - In some embodiments, the
bond pads 176 are UBMs that include three layers of conductive materials, such as a layer of titanium, a layer of copper, and a layer of nickel. Other arrangements of materials and layers, such as an arrangement of chrome/chrome-copper alloy/copper/gold, an arrangement of titanium/titanium tungsten/copper, or an arrangement of copper/nickel/gold, may be utilized for the formation of thebond pads 176. Any suitable materials or layers of material that may be used for thebond pads 176 are fully intended to be included within the scope of the current application. -
Conductive connectors 178 are formed on thebond pads 176. Theconductive connectors 178 may be ball grid array (BGA) connectors, solder balls, metal pillars, controlled collapse chip connection (C4) bumps, micro bumps, electroless nickel-electroless palladium-immersion gold technique (ENEPIG) formed bumps, or the like. Theconductive connectors 178 may include a conductive material such as solder, copper, aluminum, gold, nickel, silver, palladium, tin, the like, or a combination thereof. In some embodiments, theconductive connectors 178 are formed by initially forming a layer of solder through evaporation, electroplating, printing, solder transfer, ball placement, or the like. Once a layer of solder has been formed on the structure, a reflow may be performed in order to shape the material into the desired bump shapes. In another embodiment, theconductive connectors 178 comprise metal pillars (such as a copper pillar) formed by sputtering, printing, electro plating, electroless plating, CVD, or the like. The metal pillars may be solder free and have substantially vertical sidewalls. In some embodiments, a metal cap layer is formed on the top of the metal pillars. The metal cap layer may include nickel, tin, tin-lead, gold, silver, palladium, indium, nickel-palladium-gold, nickel-gold, the like, or a combination thereof and may be formed by a plating process. - In
FIG. 25 , a carrier substrate de-bonding is performed to detach (or “de-bond”) thecarrier substrate 170 from the top of the structure, e.g., theencapsulant 165 and first and second integrated circuit dies 50A and 50B. In accordance with some embodiments, the de-bonding includes projecting a light such as a laser light or an UV light on therelease layer 168 so that therelease layer 168 decomposes under the heat of the light and thecarrier substrate 170 can be removed. - In embodiments where the
first package component 100 was not previously singulated, thefirst package component 100, including the first and second integrated circuit dies 50A and 50B may be singulated from neighboring package components. The singulation process described above may be used to perform the singulation. - The structure is then flipped over and attached by the
conductive connectors 178 to apackage substrate 180 using theconductive connectors 178. Thepackage substrate 180 includes asubstrate core 182 andbond pads 184 over thesubstrate core 182. Thesubstrate core 182 may be made of a non metal or non semiconductor material, such as an organic material, such as BT resin (bismaleimide triazine resin), a build-up ABF resin, or MIS (molded interconnect substrate) material, or the like. Thesubstrate core 182 is, in one alternative embodiment, based on an insulating core such as a fiberglass reinforced resin core. One example core material is fiberglass resin such as FR4. Thesubstrate core 182 may include active and passive devices (not shown). A wide variety of devices such as transistors, capacitors, resistors, combinations of these, and the like may be used to generate the structural and functional requirements of the design for the device stack. The devices may be formed using any suitable methods. - The
substrate core 182 may also include metallization layers and vias (not shown), with thebond pads 184 being physically and/or electrically coupled to the metallization layers and vias. The metallization layers may be formed over the active and passive devices and are designed to connect the various devices to form functional circuitry. The metallization layers may be formed of alternating layers of dielectric material (e.g., low-k dielectric material) and conductive material (e.g., copper) with vias interconnecting the layers of conductive material and may be formed through any suitable process (such as deposition, damascene, dual damascene, or the like). In some embodiments, thesubstrate core 182 is substantially free of active and passive devices. - The
package substrate 180 may have a keep outzone 183 aligned to thesubstrate cavity 175 andoscillation region 156, to allow the passage of RF signals to and from theantenna 136 a without interference from conductive or semi-conductive materials. - In some embodiments, the
conductive connectors 178 are reflowed to attach theconductive connectors 178 to thebond pads 184. Theconductive connectors 178 electrically and/or physically couple thepackage substrate 180, including metallization layers in thesubstrate core 182, to the conductive elements of thefirst package component 100 and first and second integrated circuit dies 50A and 50B. - Other features and processes may also be included. For example, testing structures may be included to aid in the verification testing of the 3D packaging or 3DIC devices. The testing structures may include, for example, test pads formed in a redistribution layer or on a substrate that allows the testing of the 3D packaging or the 3DIC, the use of probes and/or probe cards, and the like. The verification testing may be performed on intermediate structures as well as the final structure. Additionally, the structures and methods disclosed herein may be used in conjunction with testing methodologies that incorporate intermediate verification of known good dies to increase the yield and decrease costs.
-
FIG. 26 illustrates a flow diagram for aprocess 200 and a flow diagram for aprocess 250. In theprocess 200 at thefirst element 205, a transmission signal is generated in a first device, such as the second integrated device die 50B. At 210, the transmission signal is provided to an embedded antenna, such as theantenna 136 a. At 215, the transmission signal is transmitted by the embedded antenna. At 220, the transmission signal is boosted in an oscillation region of the first device, such as theoscillation region 156. At 225 the signal is propagated from the oscillation region through the first device, for example beyond themetal grate 116 rf. In theprocess 250 at thefirst element 255, an RF signal is received into an oscillation region of a first device, such as the oscillation region 256. At 260, the RF signal is boosted in the oscillation region. At 265, the boosted RF signal is received by an embedded antenna, such as the embeddedantenna 136 a. At 270 the RF signal is provided from the embedded antenna to a receive device, such as the second integrated circuit die 50B. - Embodiments may achieve advantages. Embodiments provide an oscillation region for an embedded antenna. The oscillation region provides a better transmitted signal or received signal for the embedded antenna, which is suitable for 5G and/or 6G signals and their associated RF signal frequency ranges (e.g., for the upcoming 5th Gen. (5.8 GHz) and 5th Gen. high frequency (29˜38 GHz and 77˜120 GHz) RF transceiver). Given the simplified embedding processes, these devices are suitable for use in highly integrated devices, such as portable, wearable, internet of things (IoT), and smart phone products. Embedding the antenna in a metallization layer and providing an oscillation region aligned to the antenna provides the ability to utilize an embedded antenna at the same production cost as without. Yet the embedded antenna cavity shrinks the footprint normally needed to utilize an embedded antenna, which must typically be walled off from the rest of the structure. The thicknesses of the various layers may be tuned for specific application and to meet packaging requirements.
- One embodiment is a method including forming a metal grate in a first metal layer of an interconnect. The method also includes forming an oscillation region aligned to the metal grate. The method also includes forming an antenna in a second metal layer of the interconnect, the antenna aligned to the oscillation region and the metal grate. The method also includes coupling a first die to the antenna, the first die may include a transmitting and/or receiving die. The method also includes encapsulating the first die by an encapsulant to form a first package. In an embodiment, the method further includes coupling the first package to a first substrate, the first substrate including an organic material. In an embodiment, the first substrate has a metal free zone aligned to the antenna. In an embodiment, the method further includes originating a signal in the first die, transmitting the signal by the antenna, boosting the signal by the oscillation region, and propagating the signal outwardly from the oscillation region through one or more dielectric layers of the first package. In an embodiment, the method further includes removing a portion of a semiconductor substrate of the first package to form an oscillation cavity aligned to the oscillation region. In an embodiment, the method further includes electrically coupling the metal grate to a ground source metal. In an embodiment, forming the oscillation region includes forming a metal wall in a third metal layer of the interconnect, the third metal layer interposed between the first metal layer and the second metal layer, the metal wall forming a periphery of the oscillation region, and forming a via wall in a via layer of the interconnect, the via layer interposed between the third metal layer and the second metal layer. In an embodiment, the metal wall is segmented.
- Another embodiment is a method including generating a transmission signal in a first device. The method also includes providing the transmission signal to an embedded antenna. The method also includes transmitting the transmission signal by the embedded antenna. The method also includes boosting the transmission signal in an oscillation region of the first device. The method also includes propagating the signal from the oscillation region through the first device. In an embodiment, the first device includes a semiconductor substrate having a portion of the semiconductor substrate removed corresponding to the oscillation region. In an embodiment, the method further includes receiving a radio frequency (RF) signal into the oscillation region, boosting the RF signal in the oscillation region, receiving the boosted RF signal by the embedded antenna, and providing the RF signal from the embedded antenna to a receive device. In an embodiment, the method further includes passing the transmission signal from the oscillation region through a grounded metal grate, the grounded metal grate embedded in the first device. In an embodiment, the antenna is embedded in a redistribution layer of the first device.
- Another embodiment is a device including a first integrated circuit die, the first integrated circuit die corresponding to a transmit and/or receive die. The device also includes a redistribution structure coupled to the first integrated circuit die, the redistribution structure including a first embedded antenna coupled to the first integrated die. The device also includes an oscillation region aligned to the first embedded antenna, the oscillation region embedded in insulating layers of the redistribution structure. The device also includes a semiconductor substrate attached to the redistribution structure, the semiconductor substrate having an oscillation cavity disposed therein, the oscillation cavity aligned to the oscillation region. In an embodiment, the oscillation region is surrounded by a metal wall, the metal wall coupled to the embedded antenna by a first via array. In an embodiment, the first via array includes two or more rows of vias surrounding the oscillation region. In an embodiment, the oscillation region extends from the antenna to a metal grate disposed opposite the first embedded antenna. In an embodiment, the oscillation region is laterally surrounded by a metal wall structure, the metal wall structure coupled to the antenna by one or more vias. In an embodiment, the metal wall structure includes one or more continuous rings or one or more segmented rings. In an embodiment, the oscillation region is encircled by a via array including one or more rows of vias.
- The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure.
Claims (20)
1. A method comprising:
forming a metal grate in a first metal layer of an interconnect;
forming an oscillation region aligned to the metal grate;
forming an antenna in a second metal layer of the interconnect, the antenna aligned to the oscillation region and the metal grate;
coupling a first die to the antenna, the first die comprising a transmitting and/or receiving die; and
encapsulating the first die by an encapsulant to form a first package.
2. The method of claim 1 , further comprising:
coupling the first package to a first substrate, the first substrate comprising an organic material.
3. The method of claim 2 , wherein the first substrate has a metal free zone aligned to the antenna.
4. The method of claim 1 , further comprising:
originating a signal in the first die;
transmitting the signal by the antenna;
boosting the signal by the oscillation region; and
propagating the signal outwardly from the oscillation region through one or more dielectric layers of the first package.
5. The method of claim 1 , further comprising:
removing a portion of a semiconductor substrate of the first package to form an oscillation cavity aligned to the oscillation region.
6. The method of claim 1 , further comprising:
electrically coupling the metal grate to a ground source metal.
7. The method of claim 1 , wherein forming the oscillation region comprises:
forming a metal wall in a third metal layer of the interconnect, the third metal layer interposed between the first metal layer and the second metal layer, the metal wall forming a periphery of the oscillation region; and
forming a via wall in a via layer of the interconnect, the via layer interposed between the third metal layer and the second metal layer.
8. The method of claim 7 , wherein the metal wall is segmented.
9. A method comprising:
generating a transmission signal in a first device;
providing the transmission signal to an embedded antenna;
transmitting the transmission signal by the embedded antenna;
boosting the transmission signal in an oscillation region of the first device; and
propagating the signal from the oscillation region through the first device.
10. The method of claim 9 , wherein the first device includes a semiconductor substrate having a portion of the semiconductor substrate removed corresponding to the oscillation region.
11. The method of claim 9 , further comprising:
receiving a radio frequency (RF) signal into the oscillation region;
boosting the RF signal in the oscillation region;
receiving the boosted RF signal by the embedded antenna; and
providing the RF signal from the embedded antenna to a receive device.
12. The method of claim 9 , further comprising:
passing the transmission signal from the oscillation region through a grounded metal grate, the grounded metal grate embedded in the first device.
13. The method of claim 9 , wherein the antenna is embedded in a redistribution layer of the first device.
14. The method of claim 9 , wherein the oscillation region is surrounded by a metal wall, the metal wall coupled to the embedded antenna by a first via array.
15. The method of claim 14 , wherein the first via array comprises two or more rows of vias surrounding the oscillation region.
16. A device comprising:
a first integrated circuit die, the first integrated circuit die corresponding to a transmit and/or receive die;
a redistribution structure coupled to the first integrated circuit die, the redistribution structure including a first embedded antenna coupled to the first integrated die;
an oscillation region aligned to the first embedded antenna, the oscillation region embedded in insulating layers of the redistribution structure; and
a semiconductor substrate attached to the redistribution structure, the semiconductor substrate having an oscillation cavity disposed therein, the oscillation cavity aligned to the oscillation region.
17. The device of claim 16 , wherein the oscillation region extends from the antenna to a metal grate disposed opposite the first embedded antenna.
18. The device of claim 16 , wherein the oscillation region is laterally surrounded by a metal wall structure, the metal wall structure coupled to the antenna by one or more vias.
19. The device of claim 18 , wherein the metal wall structure comprises one or more continuous rings or one or more segmented rings.
20. The device of claim 16 , wherein the oscillation region is encircled by a via array comprising one or more rows of vias.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17/895,502 US20240072442A1 (en) | 2022-08-25 | 2022-08-25 | Package device with an embedded oscillation region |
US18/151,843 US20240072443A1 (en) | 2022-08-25 | 2023-01-09 | Dual band fan out device and method |
TW112130220A TW202410357A (en) | 2022-08-25 | 2023-08-11 | Antenna device and method forming thereof |
CN202322297033.4U CN221008932U (en) | 2022-08-25 | 2023-08-25 | Antenna device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17/895,502 US20240072442A1 (en) | 2022-08-25 | 2022-08-25 | Package device with an embedded oscillation region |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US18/151,843 Continuation-In-Part US20240072443A1 (en) | 2022-08-25 | 2023-01-09 | Dual band fan out device and method |
Publications (1)
Publication Number | Publication Date |
---|---|
US20240072442A1 true US20240072442A1 (en) | 2024-02-29 |
Family
ID=89994520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US17/895,502 Pending US20240072442A1 (en) | 2022-08-25 | 2022-08-25 | Package device with an embedded oscillation region |
Country Status (3)
Country | Link |
---|---|
US (1) | US20240072442A1 (en) |
CN (1) | CN221008932U (en) |
TW (1) | TW202410357A (en) |
-
2022
- 2022-08-25 US US17/895,502 patent/US20240072442A1/en active Pending
-
2023
- 2023-08-11 TW TW112130220A patent/TW202410357A/en unknown
- 2023-08-25 CN CN202322297033.4U patent/CN221008932U/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN221008932U (en) | 2024-05-24 |
TW202410357A (en) | 2024-03-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20210210399A1 (en) | Package Structure and Method | |
US20200083187A1 (en) | Semiconductor Package and Method of Forming the Same | |
US11984372B2 (en) | Integrated circuit package and method | |
US20220336376A1 (en) | Integrated Circuit Package and Method | |
US11635566B2 (en) | Package and method of forming same | |
US20210335753A1 (en) | Semiconductor Device and Method | |
US12002767B2 (en) | Integrated circuit package and method | |
US20220359465A1 (en) | Package structures and method for forming the same | |
US20220328467A1 (en) | Molded dies in semicondcutor packages and methods of forming same | |
US11854994B2 (en) | Redistribution structure for integrated circuit package and method of forming same | |
US20220384388A1 (en) | Semiconductor Packaging and Methods of Forming Same | |
US20230260941A1 (en) | Semiconductor Device and Method | |
US20240072442A1 (en) | Package device with an embedded oscillation region | |
US20240072443A1 (en) | Dual band fan out device and method | |
US20230266528A1 (en) | Package and method of forming same | |
US11444034B2 (en) | Redistribution structure for integrated circuit package and method of forming same | |
US11652037B2 (en) | Semiconductor package and method of manufacture | |
US11948918B2 (en) | Redistribution structure for semiconductor device and method of forming same | |
US11830859B2 (en) | Package structures and method for forming the same | |
TWI843329B (en) | Device package and manufacturing method thereof | |
US20230387063A1 (en) | Integrated circuit package and method of forming same | |
US20220037243A1 (en) | Package structure and method | |
US20230387039A1 (en) | Semicondcutor packages and methods of forming thereof | |
US20240071947A1 (en) | Semiconductor package and method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TAIWAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:LIAO, WEN-SHIANG;REEL/FRAME:060901/0056 Effective date: 20220821 |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION |